JP2010078496A5 - - Google Patents

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Publication number
JP2010078496A5
JP2010078496A5 JP2008248222A JP2008248222A JP2010078496A5 JP 2010078496 A5 JP2010078496 A5 JP 2010078496A5 JP 2008248222 A JP2008248222 A JP 2008248222A JP 2008248222 A JP2008248222 A JP 2008248222A JP 2010078496 A5 JP2010078496 A5 JP 2010078496A5
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JP
Japan
Prior art keywords
inspection object
scattered light
light
inspection
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008248222A
Other languages
English (en)
Japanese (ja)
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JP2010078496A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008248222A priority Critical patent/JP2010078496A/ja
Priority claimed from JP2008248222A external-priority patent/JP2010078496A/ja
Publication of JP2010078496A publication Critical patent/JP2010078496A/ja
Publication of JP2010078496A5 publication Critical patent/JP2010078496A5/ja
Withdrawn legal-status Critical Current

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JP2008248222A 2008-09-26 2008-09-26 表面検査装置、及び表面検査方法 Withdrawn JP2010078496A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008248222A JP2010078496A (ja) 2008-09-26 2008-09-26 表面検査装置、及び表面検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008248222A JP2010078496A (ja) 2008-09-26 2008-09-26 表面検査装置、及び表面検査方法

Publications (2)

Publication Number Publication Date
JP2010078496A JP2010078496A (ja) 2010-04-08
JP2010078496A5 true JP2010078496A5 (cg-RX-API-DMAC10.html) 2011-11-10

Family

ID=42209114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008248222A Withdrawn JP2010078496A (ja) 2008-09-26 2008-09-26 表面検査装置、及び表面検査方法

Country Status (1)

Country Link
JP (1) JP2010078496A (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015184053A (ja) * 2014-03-20 2015-10-22 バンドー化学株式会社 表面モニタリング装置、クリーニング装置、及び搬送装置
US11493453B2 (en) * 2019-06-28 2022-11-08 Kyocera Document Solutions Inc. Belt inspection system, belt inspection method, and recording medium for belt inspection program
CN110554057B (zh) * 2019-09-18 2024-05-17 深圳市深科达智能装备股份有限公司 屏幕盖板外观全自动检测设备

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