JP2010072435A - Optical waveguide film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical waveguide film capable of accurately arranging a positioning mark by performing a cutting work using a dicing saw while suppressing flexibility or deterioration in performance of an optical waveguide film body, and capable of performing accurate alignment by means of visibility or physical contact (abutting). <P>SOLUTION: The optical waveguide film 10 has an optical waveguide film body 116 comprising a cladding 114 and optical wave guide cores 112 embedded in the cladding 114, wherein mark-forming members 118 having groove-like positioning marks 120 formed thereon are arranged on at least one part on a main surface of an optical waveguide film body 116 to be protruded from the main surface. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for producing an optical waveguide film.

  The optical waveguide needs to be connected to a light emitting / receiving element, an optical fiber, or another optical waveguide. Therefore, it is desirable that the positions of the optical waveguide core and the core end face can be accurately recognized. However, since both the waveguide core and the waveguide cladding are transparent bodies, an easy-to-recognize position setting mark is prepared separately, and if the positional relationship between the position setting mark and the core end face is set, the optical waveguide and Connection with a light emitting / receiving element, an optical fiber, or another optical waveguide is facilitated. For example, the position setting mark is configured to accurately detect the position of the optical waveguide core by providing the optical waveguide with a plurality of extremely small cross-shaped marks having a cross section of the optical waveguide core.

  In order to accurately set the positional relationship between the position setting mark and the end face to which the optical waveguide core is to be connected, the position setting mark is manufactured simultaneously with the core pattern using the core pattern manufacturing process. desirable. This is also performed in a conventional method for manufacturing an optical waveguide. For example, in the case of a method using an exposure process using a photomask, a core pattern and a position setting mark pattern are prepared on the photomask, and can be formed while maintaining the positional relationship between the two very accurately by batch exposure. (For example, refer to Patent Documents 1 and 2). The same applies to a replication method using a mold (for example, Patent Document 3).

  On the other hand, as an optical waveguide manufacturing method that does not use a photomask or a mold, there is a manufacturing method in which an optical waveguide core is formed by cutting a flexible optical film using a dicing saw. Such a manufacturing method can be applied to an optical waveguide having a large number of linear arrayed waveguide cores, such as an optical bus for high-speed data transmission between boards. Since cutting using a dicing saw can achieve a high processing speed, it is an effective method for cost reduction.

JP-A-5-323144 JP 2003-245368 A JP 2004-069742 A

  An object of the present invention is to realize a highly accurate positioning mark by cutting a dicing saw while suppressing flexibility and performance deterioration of the optical waveguide film main body, and also to visually or physically contact (apply) ) To provide an optical waveguide film that can be accurately aligned.

The above problem is solved by the following means. That is,
The invention according to claim 1
An optical waveguide core through which light propagates, and an optical waveguide film body having a cladding portion surrounding the optical waveguide core and having a refractive index lower than that of the optical waveguide core;
A mark forming member for forming a position setting mark disposed at least partially on the main surface of the optical waveguide film main body and protruding from the main surface;
A position setting mark formed in a groove shape on the surface of the mark forming member;
An optical waveguide film comprising:

The invention according to claim 2
2. The optical waveguide film according to claim 1, further comprising a colored layer disposed on a surface of the mark forming member on which a position setting mark is to be formed, other than a region where the position setting mark is formed.

The invention according to claim 3
The optical waveguide film according to claim 1, wherein the mark forming member is a member harder than the optical waveguide film body.

The invention according to claim 4
Preparing a laminate in which at least the first cladding layer and the core layer are laminated;
A step of disposing a mark forming member for forming a position setting mark protruding from the main surface on at least a part of the main surface of the laminate;
Forming a waveguide core for propagating light by cutting the core layer with a dicing saw, and continuously cutting the mark forming member to form a mark for position detection;
Forming a second cladding layer so as to cover the optical waveguide core;
The manufacturing method of the optical waveguide film which has this.

The invention according to claim 5
The manufacturing method of the optical waveguide film of Claim 4 which has a colored layer in the cutting surface of the said member for mark formation.

The invention according to claim 6
The method for producing an optical waveguide film according to claim 4, wherein the mark forming member is a member harder than the laminate.

According to the first aspect of the present invention, the placement of the position setting mark with high accuracy is realized by cutting the dicing saw while suppressing the flexibility and performance deterioration of the optical waveguide film main body, and the visual or physical Positioning with high accuracy is achieved by contact (applying).
According to the invention which concerns on Claim 2, the visibility of the mark for position setting improves compared with the case where a coloring layer is not provided in the member for mark formation.
In the invention according to claim 3, the alignment system by physical contact (applying) is improved as compared with the case where the hardness of the mark forming member is not taken into consideration.
According to the fourth aspect of the invention, the placement of the positioning mark with high accuracy is realized by cutting the dicing saw while suppressing the flexibility and performance deterioration of the optical waveguide film main body, and the visual or physical An optical waveguide film that is accurately aligned by contact (applying) is obtained.
According to the invention which concerns on Claim 5, compared with the case where a mark formation member does not have a colored layer, the optical waveguide film in which the visibility of the position setting mark was improved is obtained.
The invention according to claim 6 provides an optical waveguide film in which the alignment system by physical contact (applying) is improved as compared with the case where the hardness of the mark forming member is not taken into consideration.

  Embodiments of the present invention will be described below with reference to the drawings. In addition, the same code | symbol is provided to the member which has the substantially the same function and effect | action through all the drawings, and the overlapping description may be abbreviate | omitted.

(First embodiment)
FIG. 1 is a schematic perspective view showing an optical waveguide film according to the first embodiment. FIG. 2 is a cross-sectional view taken along the line AA of FIG. FIG. 3 is a perspective view showing that the optical waveguide film according to the first embodiment has followability (flexibility) to deformation.

  As shown in FIGS. 1 and 2, the optical waveguide film 10 according to the first embodiment is, for example, a belt-shaped optical waveguide, and includes a clad 114 and an optical waveguide core 112 embedded in the clad 114. An optical waveguide film main body 116 is provided. A mark forming member 118 having, for example, a position setting mark 120 on the upper surface is disposed on one main surface of the optical waveguide film main body 116. In addition, a main surface means the surface orthogonal to the film thickness direction.

  Here, the refractive index of the optical waveguide core 112 is higher than that of the clad 114. For example, considering a case where the refractive index difference between the optical waveguide core 112 and the cladding 114 is 3% as an example, an optical waveguide film having almost no bending loss up to a radius of curvature of 1.5 mm when bent is obtained. The larger the difference in refractive index, the smaller the bending radius with no loss during bending. However, considering the mechanical flexibility of the optical waveguide film and the connection loss with the light emitting / receiving element, the difference in refractive index is 2% or more and 5%. The following degree is most preferable. In particular, when this difference in refractive index is 4% or more, even when bent at a bending radius of 1 mm, the optical loss during practical bending becomes very small, and the connection with the light emitting / receiving element is easy and practical.

  A plurality of the optical waveguide cores 112 are arranged in parallel so that propagating light is translated in the width direction of the optical waveguide film 10 on the same plane. In the present embodiment, six optical waveguide cores 112 are arranged.

  The optical waveguide core 112 may be formed with an inclined surface whose longitudinal end is inclined with respect to the longitudinal direction. This inclined surface is a surface serving as an optical path changing unit for light propagating to the optical waveguide core 112. The inclined surface is formed, for example, at an angle of 45 ° with respect to the longitudinal direction of the optical waveguide core 112. In this inclined surface, when the light propagating in the optical waveguide core 112 reaches the inclined surface, it is reflected by the layer adjacent to the inclined surface (in this embodiment, the air layer corresponds), and the light propagation direction is changed. .

  The clad 114 is made of a material having a refractive index lower than that of the optical waveguide core 112, and is disposed so as to surround the optical waveguide core 112.

  Here, the material of the optical waveguide core 112 and the clad 114 is transparent to the wavelength used for the optical waveguide film 10 and can set a desired refractive index difference between the optical waveguide core 112 and the clad 114. If there is, it will not restrict | limit in particular, For example, an alicyclic olefin resin, an acrylic resin, an epoxy resin, a polyimide resin etc. are used.

  In addition, when the optical waveguide film 10 is coated with a flame retardant resin as will be described later, in order to obtain good adhesion with the flame retardant resin layer, at least the region in contact with the flame retardant resin layer, It is preferable to use acrylic resin or epoxy resin as the material of the clad 114.

The mark forming members 118 are made of, for example, a cube, and are provided at four corners of one main surface of the optical waveguide film main body 116. The mark forming member 118 is disposed so as to protrude from the main surface of the optical waveguide film main body 116. The mark forming member 118 has a shape as long as it protrudes from at least a part of the main surface of the optical waveguide film main body 116 and the position setting mark 120 is visible when viewed from the main surface side. There are no particular restrictions on the number, location, etc.

The mark forming member 118 may be made of the same material as that of the optical waveguide film main body 116. For example, silicon (Si), glass (SiO ₂ ), various resins (polycarbonate resin, ABS resin [acrylonitrile-butadiene-styrene copolymer] It is more desirable that the member is harder than the optical waveguide film body 116 (a laminate of a clad layer and a core layer described later: polymer film 10A) such as glass fiber reinforced resin. Specifically, for example, the mark forming member 118 has a Young's modulus of 5 GPa or more and 300 GPa or less, and more preferably 10 GPa or more and 200 Pa or less, in consideration of the application accuracy and workability. On the other hand, since the optical waveguide film main body 116 is required to be flexible, if its Young's modulus is unnecessarily high, the bending stress at the time of bending increases and the risk of breakage increases, so its Young's modulus is 5 GPa or less, Desirably, 3 GPa or less is desirable. Thereby, since distortion of the mark forming member 118 itself is reduced, the alignment accuracy by physical contact (applying) is improved as compared with the case where the hardness of the mark forming member 118 is not taken into consideration.

  The mark forming member 118 is bonded and fixed to the main surface of the optical waveguide film main body 116 by, for example, an adhesive (for example, an epoxy adhesive or an acrylic adhesive having ultraviolet curing or thermosetting characteristics).

  The position setting mark 120 is a part called a so-called alignment mark that is provided as a reference for alignment or the like. The position setting mark 120 is constituted by, for example, a cross-shaped groove formed on the surface (top surface) of the mark forming member 118. The shape of the position setting mark 120 is not limited to a cross shape, and is not particularly limited as long as it is a shape that can be visually recognized as a position detection mark (reference portion) such as a line shape. The groove width and the groove depth constituting the position setting mark 120 are arbitrarily set. However, when the position setting (reference portion setting) is performed by fitting the alignment member into the groove-shaped position setting mark 120 while fitting, the groove width and the groove depth are considered in consideration of the size of the alignment member. Is set.

  The optical waveguide film 10 (optical waveguide film main body 116) is preferably made of a transparent resin film having flexibility. As shown in FIGS. 3 (A) and 3 (B), “bending” and “twisting”. It is preferable to have followability (high flexibility) with respect to such deformation. Thereby, even if the film is deformed, the optical signal transmitted from the optical transmission / reception unit is guided by the optical waveguide formed in the optical waveguide film 10 and received by the optical transmission / reception unit. The optical waveguide film 10 preferably has flexibility with a minimum bending radius of 3 mm or less. The minimum bending radius is a value representing the length of the minimum radius of the circle when a minute portion of a curve formed inside the optical waveguide film 10 is approximated to a circle when the optical waveguide film 10 is bent. The permissible value is measured according to ASTM D-2176.

  The thickness of the optical waveguide film 10 (optical waveguide film main body 116) is desirably 50 μm or more and 500 μm or less, and more desirably 50 μm or more and 200 μm or less. On the other hand, the width of the optical waveguide film 10 is desirably 0.2 mm or more and 10 mm or less, and more desirably 0.25 mm or more and 5 mm or less.

  Hereinafter, the manufacturing method of the optical waveguide film 10 which concerns on this embodiment is demonstrated. 4 and 5 are process diagrams showing the method of manufacturing the optical waveguide film according to the first embodiment. 4 and 5 are process diagrams in the AA sectional view of FIG. In addition, the manufacturing method of the optical waveguide film 10 which concerns on this embodiment demonstrated below shows the method of cutting a single polymer film 10A and obtaining the some optical waveguide film 10. FIG.

  In the manufacturing method of the optical waveguide film 10 according to this embodiment, first. As shown in FIG. 4A, a polymer film 10A (laminate) is prepared in which a clad layer 114A (first clad layer), a core layer 112A, and a clad layer 114B (first clad layer) are laminated in this order. To do. That is, a polymer film 10A is prepared in which a core layer 112A is sandwiched between two clad layers 114A and 114B. The method of laminating each layer of the polymer film 10A is not particularly limited as long as the layers are integrally laminated so that peeling does not occur between the layers. For example, a known method such as laminating or spin coating is adopted. . Then, the prepared polymer film 10A is bonded to the dicing tape 10B.

  The material constituting the clad layer 114A and the clad layer 114B is not particularly limited as long as a specific refractive index difference can be set with the core layer 112A (optical waveguide core 112). The refractive index is selected in consideration of optical characteristics such as refractive index and light transmittance, mechanical strength, heat resistance, flexibility (flexibility) and the like. For example, a resin such as radiation curable, electron beam curable, or thermosetting, preferably an ultraviolet curable resin or a thermosetting resin is selected, and an ultraviolet curable or thermosetting monomer, an oligomer, or a mixture of a monomer and an oligomer. Is preferably used. More desirably, an ultraviolet curable resin is selected.

  Specific materials constituting the clad layer 114A and the clad layer 114B include, for example, epoxy resins, acrylic resins (polymethyl methacrylate, etc.), alicyclic acrylic resins, styrene resins (polystyrene, acrylonitrile / styrene copolymers). ), Olefin resins (polyethylene, polypropylene, ethylene / propylene copolymers, etc.), alicyclic olefin resins, vinyl chloride resins, vinylidene chloride resins, vinyl alcohol resins, vinyl butyral resins, arylate resins, Fluorine-containing resin, polyester resin (polyethylene terephthalate, polyethylene naphthalate, etc.), polycarbonate resin, cellulose tri- or triacetate, amide resin (aliphatic, aromatic polyamide, etc.), imide resin, sulfone resin, polyether Sulfone resins, polyether ether ketone resin, polyphenylene sulfide resin, polyoxymethylene resin, or blends of the resins.

The clad layer 114A and the clad layer 114B may be formed by, for example, dropping a liquid resin selected from the above materials onto a substrate such as glass and setting it to a uniform thickness by spin coating, and then curing the resin. Alternatively, a pre-molded resin film may be used.
The thickness of the clad layer 114A is not particularly limited, but is preferably 10 μm or more and 100 μm or less, more preferably 20 μm or more and 50 μm or less, from the viewpoint of optical performance, flexible performance, cutting workability described later, strength, and the like. It is.

  The clad layer 114A and the clad layer 114C do not have to have the same thickness. For example, the total thickness of the polymer film 10A may be kept small by making the clad layer 114C thinner than the clad layer 114A. .

  As the core layer 112A, for example, an ultraviolet curable resin is used, and an ultraviolet curable monomer, an oligomer, or a mixture of a monomer and an oligomer is preferably used. As a specific material for the core, an epoxy-based or acrylic-based ultraviolet curable resin is desirably used.

For example, after a liquid resin of a core curable resin (ultraviolet curable resin) is applied on the clad layer 114A with a uniform thickness, it is cured by irradiating with ultraviolet rays using an ultraviolet lamp, an ultraviolet LED, a UV irradiation device, or the like. Thus, the core layer 112A is formed.
The thickness of the core layer 112A is not particularly limited, and may be set as appropriate according to the use. However, from the viewpoint of optical performance, flexible performance, cutting workability described later, strength, and the like, it is preferably 20 μm or more and 120 μm or less. More desirably, it is 30 μm or more and 90 μm or less.

  The size and total thickness of the polymer film 10A are not particularly limited, and may be set as appropriate according to the material, use, etc. For example, in order to obtain the flexible optical waveguide film 10, the thickness of the polymer film 10A Is preferably 50 μm or more and 500 μm or less, and more preferably 50 μm or more and 200 μm or less. On the other hand, the width of the polymer film 10A is desirably 0.2 mm or more and 10 mm or less, and more desirably 0.25 mm or more and 5 mm or less. By setting the thickness and width of the optical waveguide film 10 within the above ranges, it is easy to ensure flexibility and strength as an optical waveguide.

  next. As shown in FIG. 4B, rectangular parallelepiped mark forming members 118 are respectively disposed at the four corners of the region to be the optical waveguide film main body 116 with an adhesive.

  Next, as shown in FIG. 4C, the polymer film 10A is cut from the cladding layer 114B side, that is, the core layer 112A is cut together with the cladding layer 114B to form the optical waveguide core 112. The optical waveguide core 112 is formed by, for example, cutting with a dicing saw along the longitudinal direction of the polymer film 10A at a predetermined interval in the width direction of the polymer film 10A (this interval becomes the width of the optical waveguide core 112). ). By this cutting, a plurality of optical waveguide cores 112 are arranged on the same plane of the clad layer 114A and arranged in parallel so that propagating lights are translated in the width direction of the polymer film 10A. In the present embodiment, six optical waveguide cores 112 are formed. In FIG. 4, reference numeral 130 denotes a blade of a dicing saw.

  Next, as shown in FIG. 4D, following the cutting of the core layer 112A, the surface (top surface) of the mark forming member 118 is cut to form the groove-shaped position setting mark 120. Specifically, for example, first, cutting in the same direction as the cutting direction (groove longitudinal direction) of the core layer 112A is performed on the top surface of the mark forming member 118, and then the cutting direction of the core layer 112A ( Cutting in the direction intersecting with the longitudinal direction of the groove) is performed on the top surface of the mark forming member 118. As a result, a cross-shaped groove is formed on the top surface of the mark forming member 118, which becomes the position setting mark 120.

  The surface (top surface) of the mark forming member 118 is continuously cut after the core layer 112A is cut. This continuous cutting means that the core layer 112A and the mark forming member 118 are cut by continuous machining from a single cutting work preparation state. The cutting preparation state means that the polymer film 10A provided with the mark forming member 118, which is a workpiece, is attached to a specific processing place of the dicing saw and the attachment position relative to the machine origin of the dicing saw is set. It is to fix.

  Here, the method of attaching the workpiece to the dicing saw is a vacuum chuck through affixed dicing tape. This positioning state is maintained unless the machining setup is changed, such as releasing the vacuum chuck, replacing the dicing blade, or resetting the dicing saw. When the work piece is a polymer film, misalignment occurs due to re-attachment to the dicing tape or distortion of the dicing tape itself during vacuum chucking. In the case of continuous machining, the position error of a plurality of machining grooves or cut portions is less likely to occur.

  Next, as shown in FIG. 5 (E), after removing the polymer film 10A from the dicing saw, the optical waveguide core 112 is covered, that is, the clad forming curable resin is embedded in the cutting groove by the cutting. Is applied and cured to form a clad layer 114C (second clad layer). Specifically, for example, the clad curable resin is dropped on the cutting surface side of the polymer film 10A and is spread by a centrifugal force by a spin coating method, so that the optical waveguide core 112 and the clad curable resin are formed. While being applied, the inside of each cutting groove is filled with a curable resin for cladding, and is cured. The method of applying the curable resin for clad is not limited to the spin coating method, for example, a method of exposing and curing the curable resin for clad with a glass substrate or the like while controlling the film thickness with a spacer. May be adopted. Thus, the clad 114 (the clad layer 114A, the clad layer 114B, and the clad layer 114C) is formed so as to surround the optical waveguide core 112.

  Here, the clad forming curable resin for forming the clad layer 114C is a liquid substance, and for example, a radiation curable resin, an electron beam curable resin, a thermosetting resin, or the like is used. Among these, as the curable resin, an ultraviolet curable resin and a thermosetting resin are desirably used, but it is desirable to select the ultraviolet curable resin. As the ultraviolet curable resin and the thermosetting resin, ultraviolet curable and thermosetting monomers, oligomers, or a mixture of monomers and oligomers are desirably used. As the ultraviolet curable resin, an epoxy type or acrylic type ultraviolet curable resin is preferably used, and as the thermosetting resin, a polyimide type or silicone type resin is preferably used.

  Then, as shown in FIG. 5 (F) and FIG. 6, after the polymer film 10A on which the optical waveguide core 112 is formed is again placed on the dicing saw, the outer shape is cut along the cutting line P of the polymer film 10A. Processing is performed to produce a plurality of optical waveguide films 10 from one polymer film. FIG. 6 is a top view showing the polymer film 10 </ b> A showing how the outer shape cutting is performed in the optical waveguide film manufacturing method according to the first embodiment.

  In addition, the cutting for making the end surface of the optical waveguide film 10 to be manufactured (the end surface of the clad 114 and the end surface of the optical waveguide core 112) into an inclined surface is, for example, a dicing saw using a blade having a 45 ° inclined structure at the cutting edge. Is implemented.

  In the optical waveguide film 10 according to this embodiment described above, the mark forming member 118 having the groove-shaped position setting mark 120 on the upper surface protrudes from the main surface on one main surface of the optical waveguide film main body 116. It is arranged.

  Usually, a dicing saw rotates a blade having a diameter of about 50 mm at a high speed to cut a workpiece having a thickness of 1 mm or less, so that the cutting position and the cutting depth can be precisely controlled, but the cutting distance cannot be precisely controlled. In other words, the dicing saw can only perform linear processing across the entire workpiece. Therefore, even if an attempt is made to form a cross-shaped groove as a position setting mark, for example, at the four corners of the optical waveguide film body on which the optical waveguide core is formed, cutting must be performed across the formed optical waveguide core. Performance may be degraded.

  Therefore, in this embodiment, as described above, the mark forming member 118 is disposed so as to protrude from one main surface of the optical waveguide film main body 116, and the groove-shaped position setting mark 120 is disposed on the mark forming member 118. Has been established. That is, by providing the mark forming member 118, the cutting position for forming the position setting mark 120 is made higher than the cutting position of the core layer for forming the optical waveguide core. For this reason, the groove-shaped position setting mark 120 is not affected by the direction of the groove, and the performance deterioration of flexibility and light propagation properties due to the occurrence of scratches on the optical waveguide film main body 116 (polymer film 10A). It is formed while suppressing. In addition, the cutting of the core layer for forming the optical waveguide core 112 and the cutting of the mark forming member for forming the position setting mark 120 are continuously performed, and the optical waveguide core 112 and the position setting mark 120 are formed. And the distance relationship is accurately formed. That is, the position setting mark 120 serving as a positioning reference is formed with high accuracy.

  Further, since the position setting mark 120 is arranged in a groove shape, not only the alignment by visual recognition but also the positioning can be performed by fitting and positioning the positioning member on the groove-shaped position setting mark. Realized.

  Further, since the position setting mark 120 is disposed on a separately formed mark forming member, the optical waveguide film main body 116 (polymer film 10A) is disposed in a normal configuration.

  Therefore, in the present embodiment, the disposition of the positioning mark 120 with high accuracy is realized by cutting the dicing saw while suppressing the flexibility and performance deterioration of the optical waveguide film main body 116, and the visual or physical contact is realized. (Applying) aligns with high accuracy.

  In addition, the optical waveguide film 10 according to the present embodiment has, for example, other connection elements (connectors, light emitting elements) having convex portions corresponding to the cross grooves as the position setting marks 120 (convex portions fitted into the cross grooves). , A light receiving element) is used, and the convex portion is fitted into a cross groove as a position setting mark, and is connected to another connecting element, so that a highly accurate connection is realized.

(Second Embodiment)
FIG. 7 is a schematic perspective view showing an optical waveguide film according to the second embodiment. 8 is a cross-sectional view taken along the line BB in FIG. 9 and 10 are process diagrams showing a method for manufacturing an optical waveguide film according to the second embodiment. 9 and 10 are process diagrams in the BB sectional view of FIG.

  As shown in FIGS. 7 and 8, the optical waveguide film 10 according to the second embodiment is a surface (top surface) for forming a position setting mark in the mark forming member 118 and has a groove-shaped position setting. In this embodiment, the colored layer 118A is disposed on the surface other than the formation region of the mark 120. That is, for example, the mark forming member 118 having the colored layer 118A formed on the cutting surface (top surface) is cut so as to reach the mark forming member 118 from the colored layer 118A side, so that the groove-like position is obtained. A setting mark is formed (see FIG. 9D). Since the configuration other than these is the same as that of the first embodiment, the description thereof is omitted.

  Here, the colored layer 118A may be disposed, for example, by adhering the dye ink to the top surface of the resin-made mark forming member 118 and penetrating the dye ink, and separately adding a colorant. A resin may be applied and disposed. The color of the colored layer 118 </ b> A may be any color different from that of the mark forming member 118, and examples thereof include red, but are not particularly limited.

  As shown in FIGS. 9A to 9D and FIGS. 10E to 10F, the manufacturing method of the optical waveguide film 10 according to this embodiment is a mark forming member 118 having a colored layer. Is disposed on the main surface of the polymer film 10A (see FIG. 9B), and is cut so as to reach the mark forming member 118 from the colored layer 118A side, so that the groove-shaped position setting mark 120 is formed. Except for forming, it carries out similarly to 1st Embodiment.

  In the optical waveguide film 10 according to the present embodiment described above, the groove-shaped position setting mark 120 and the colored layer 118A are disposed on the surface (top surface) of the mark forming member 118 and the region other than the formation region. Therefore, the color differs between the groove-shaped position setting mark 120 and the other region, and contrast is produced. Further, the position setting mark 120 can be visually recognized not only by reflected light but also by transmitted light. For this reason, the visibility of the position setting mark 120 is improved as compared with the case where the mark forming member 118 does not have the colored layer 118A.

  EXAMPLES Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited to these Examples.

Example 1
First, an epoxy resin film (core layer: thickness 60 μm, refractive index 1.59) is sandwiched between epoxy resin films (cladding layer: thickness 20 μm, refractive index 1.55), 2050 mm square (205 mm × 205 mm × 205 mm) three-layer polymer film was prepared. The Young's modulus of this polymer film was 2.2 GPa.

  Next, after pasting the three-layer polymer film on a dicing tape, Si pieces (3 mm square) cut out from the Si wafer as mark forming members at the four corners of the optical waveguide film formation region on the three-layer polymer film. And a thickness of 3 mm and a Young's modulus of 160 GPa) are bonded and fixed with an ultraviolet curable epoxy adhesive. The Si piece as the mark forming member has a size of the optical waveguide film and the number of optical waveguide films per three-layer polymer film (in this example, a width of 25 mm for a 205-width polymer film). Since the optical waveguide film is cut out, the number of the optical waveguide films is 8), so in this example, four optical waveguide films are provided (arranged at the four corners) for each formed optical waveguide film, so that 8 × 4 = 32 Individually arranged.

  Next, a three-layer polymer film provided with Si pieces as mark forming members is placed on a 12-inch dicing saw (DFD6361 manufactured by DISCO). Then, using a dicing saw to which a blade having a width of 65 μM is attached, half-cut cutting is performed 101 times at a feed pitch of 125 μm from the main surface (uppermost clad layer) side of the polymer film to the uppermost clad layer and the core layer. Thus, a 100-core (100 ch) optical waveguide core having a core diameter of 60 μm and a pitch of 125 μm was formed.

  Continuing with the cutting of the optical waveguide core, the top surface of the Si piece as the mark forming member was cut at a blade cutting depth of 100 μm to form a position setting mark consisting of a cross-shaped groove. Since the cutting of the position setting mark was performed above the polymer film, no scratches or the like were formed on the polymer film.

  Next, after removing the cut polymer film from the dicing saw, an epoxy-based ultraviolet curable resin having a refractive index of 1.51 was applied so as to fill the cut recesses, and then irradiated with ultraviolet rays. Cured.

  Next, the polymer film in which the epoxy-based ultraviolet curable resin is embedded in the cut concave portion is again placed on a 12-inch dicing saw (DFD6361 manufactured by DISCO), and the outer shape is cut based on the cross-shaped groove as the position detection mark. Processing was performed to produce a plurality (eight) of optical waveguide films.

  The obtained optical waveguide film has a length of 200 μm × width of 25 μm × thickness of 0.1 mm, and 100 optical waveguide cores having a core diameter of 60 μm and a pitch of 125 μm are formed in the center. On the main surface of the optical waveguide film (optical waveguide film main body), there are four mark forming members (Si pieces) each having a 3 mm square and a thickness of 3 mm at four corners (four corners inside 2 mm from the film edge). It is arranged. A position setting mark made of a cross groove having a depth of 100 μm and a width of 60 μm is disposed on the top surface of the mark forming member (Si piece). The core end face of the optical waveguide film protrudes (projects) in the film longitudinal direction with reference to the center position of two position setting marks (cross grooves) sandwiching the optical waveguide core. The distance between the center positions of the two position setting marks (cross grooves) is 20 mm, and the total width (core array width) 12.5 μm of 100 optical waveguide cores is located at the center of the distance 20 mm. ing.

  The insertion loss of the obtained optical waveguide film was 2.5 dB to 2.8 dB, and the bending loss was negligible up to a curvature radius of 2 mm. Further, the obtained optical waveguide film and a connector having a convex portion corresponding to the cross groove as a position setting mark (a convex portion fitted into the cross groove) are connected by fitting the convex portion into the cross groove. The fixing operation was repeated 30 times, and the variation in the position of the optical waveguide core relative to the connector was evaluated. The result was within 10 μm at 3σ.

(Example 2)
A glass fiber reinforced polycarbonate piece (3 mm square, thickness 3 mm, hardness 5 GPa) on which a red colored layer (thickness 0.1 μm) is formed by attaching a dye ink (type rhodamine red) to the top surface as a mark forming member An optical waveguide film was produced in the same manner as in Example 1 except that the above was used. However, cutting of both ends in the longitudinal direction of the optical waveguide film was performed by a dicing saw having a V-shaped blade, and 45-degree inclined surfaces were formed at both ends in the longitudinal direction of the optical waveguide film.

  The insertion loss of the obtained optical waveguide film was 2.5 dB to 2.8 dB, and the bending loss was negligible up to a curvature radius of 2 mm. In addition, the operation of adhering and fixing one end in the longitudinal direction of the obtained optical waveguide film to the light receiving element array of 100 ch by a microscope optical system using a cross groove as a position setting mark and a positioning adhesive device by image processing, The variation of the optical waveguide core position with respect to the light emitting / receiving element was evaluated 30 times, and the result was within 8 μm at 3σ.

It is a schematic perspective view which shows the optical waveguide film which concerns on 1st Embodiment. It is AA sectional drawing of FIG. It is a perspective view which shows that the optical waveguide film which concerns on 1st Embodiment has followable | trackability (flexibility) with respect to a deformation | transformation. It is process drawing which shows the manufacturing method of the optical waveguide film which concerns on 1st Embodiment. It is process drawing which shows the manufacturing method of the optical waveguide film which concerns on 1st Embodiment. In the manufacturing method of the optical waveguide film concerning a 1st embodiment, it is a top view showing polymer film 10A which shows signs that outline cutting processing is performed. It is a schematic perspective view which shows the optical waveguide film which concerns on 2nd Embodiment. It is BB sectional drawing of FIG. It is process drawing which shows the manufacturing method of the optical waveguide film which concerns on 2nd Embodiment. It is process drawing which shows the manufacturing method of the optical waveguide film which concerns on 2nd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Optical waveguide film 10A Polymer film 10B Dicing tape 112 Optical waveguide core 112A Core layer 114 Clad 114A Clad layer 114B Clad layer 114C Clad layer 116 Optical waveguide film main body 118 Mark forming member 118A Colored layer 120 Position setting mark P Cutting line

Claims (6)

An optical waveguide core through which light propagates, and an optical waveguide film body having a cladding portion surrounding the optical waveguide core and having a refractive index lower than that of the optical waveguide core;
A mark forming member for forming a position setting mark disposed at least partially on the main surface of the optical waveguide film main body and protruding from the main surface;
A position setting mark formed in a groove shape on the surface of the mark forming member;
An optical waveguide film comprising:   2. The optical waveguide film according to claim 1, further comprising a colored layer disposed on a surface of the mark forming member on which a position setting mark is to be formed, other than a region where the position setting mark is formed.   The optical waveguide film according to claim 1, wherein the mark forming member is a member harder than the optical waveguide film body. Preparing a laminate in which at least the first cladding layer and the core layer are laminated;
A step of disposing a mark forming member for forming a position setting mark protruding from the main surface on at least a part of the main surface of the laminate;
Forming a waveguide core for propagating light by cutting the core layer with a dicing saw, and continuously cutting the mark forming member to form a mark for position detection;
Forming a second cladding layer so as to cover the optical waveguide core;
The manufacturing method of the optical waveguide film which has this.   The manufacturing method of the optical waveguide film of Claim 4 which has a colored layer in the cutting surface of the said member for mark formation.   The method for producing an optical waveguide film according to claim 4, wherein the mark forming member is a member harder than the laminate.

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