JP2010061043A5 - - Google Patents

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Publication number
JP2010061043A5
JP2010061043A5 JP2008228993A JP2008228993A JP2010061043A5 JP 2010061043 A5 JP2010061043 A5 JP 2010061043A5 JP 2008228993 A JP2008228993 A JP 2008228993A JP 2008228993 A JP2008228993 A JP 2008228993A JP 2010061043 A5 JP2010061043 A5 JP 2010061043A5
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JP
Japan
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anion
resist composition
positive resist
composition according
organic
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JP2008228993A
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Japanese (ja)
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JP5130164B2 (ja
JP2010061043A (ja
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Publication of JP2010061043A5 publication Critical patent/JP2010061043A5/ja
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JP2008228993A 2008-09-05 2008-09-05 ポジ型レジスト組成物及びこれを用いたパターン形成方法 Active JP5130164B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008228993A JP5130164B2 (ja) 2008-09-05 2008-09-05 ポジ型レジスト組成物及びこれを用いたパターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008228993A JP5130164B2 (ja) 2008-09-05 2008-09-05 ポジ型レジスト組成物及びこれを用いたパターン形成方法

Publications (3)

Publication Number Publication Date
JP2010061043A JP2010061043A (ja) 2010-03-18
JP2010061043A5 true JP2010061043A5 (enrdf_load_stackoverflow) 2011-03-31
JP5130164B2 JP5130164B2 (ja) 2013-01-30

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JP2008228993A Active JP5130164B2 (ja) 2008-09-05 2008-09-05 ポジ型レジスト組成物及びこれを用いたパターン形成方法

Country Status (1)

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JP (1) JP5130164B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011209660A (ja) * 2010-03-30 2011-10-20 Fujifilm Corp 感活性光線性又は感放射線性樹脂組成物、並びに、これを用いたレジスト膜及びパターン形成方法
JP5564402B2 (ja) 2010-10-29 2014-07-30 東京応化工業株式会社 レジスト組成物、レジストパターン形成方法、新規な化合物、酸発生剤
JP6126551B2 (ja) 2013-05-20 2017-05-10 富士フイルム株式会社 パターン剥離方法、電子デバイスの製造方法
JP6485240B2 (ja) 2015-06-15 2019-03-20 Jsr株式会社 感放射線性樹脂組成物及びレジストパターン形成方法
KR20180100570A (ko) 2016-01-13 2018-09-11 제이에스알 가부시끼가이샤 감방사선성 수지 조성물, 레지스트 패턴 형성 방법, 산 확산 제어제 및 화합물
WO2017122528A1 (ja) 2016-01-13 2017-07-20 Jsr株式会社 感放射線性樹脂組成物、レジストパターン形成方法及び酸拡散制御剤

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS604165A (ja) * 1983-06-21 1985-01-10 Taiho Yakuhin Kogyo Kk スルホニウム誘導体
JP2002255930A (ja) * 2001-03-01 2002-09-11 Fuji Photo Film Co Ltd 光酸発生化合物、及びポジ型レジスト組成物
JP4271968B2 (ja) * 2003-03-13 2009-06-03 富士フイルム株式会社 ポジ型又はネガ型レジスト組成物及び化合物
JP2006011005A (ja) * 2004-06-25 2006-01-12 Toyo Ink Mfg Co Ltd 感エネルギー線酸発生剤、酸の発生方法、および感エネルギー線硬化性組成物
JP4866605B2 (ja) * 2005-12-28 2012-02-01 富士フイルム株式会社 感光性組成物、該感光性組成物を用いたパターン形成方法及び該感光性組成物に用いられる化合物

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