JP2010056553A5 - - Google Patents

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Publication number
JP2010056553A5
JP2010056553A5 JP2009194869A JP2009194869A JP2010056553A5 JP 2010056553 A5 JP2010056553 A5 JP 2010056553A5 JP 2009194869 A JP2009194869 A JP 2009194869A JP 2009194869 A JP2009194869 A JP 2009194869A JP 2010056553 A5 JP2010056553 A5 JP 2010056553A5
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JP
Japan
Prior art keywords
probe
sample
station
tip
arm
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JP2009194869A
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English (en)
Japanese (ja)
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JP2010056553A (ja
JP5501697B2 (ja
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Publication of JP2010056553A5 publication Critical patent/JP2010056553A5/ja
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JP2009194869A 2008-08-26 2009-08-25 プローブ先端 Active JP5501697B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9196208P 2008-08-26 2008-08-26
US61/091,962 2008-08-26

Publications (3)

Publication Number Publication Date
JP2010056553A JP2010056553A (ja) 2010-03-11
JP2010056553A5 true JP2010056553A5 (https=) 2012-09-27
JP5501697B2 JP5501697B2 (ja) 2014-05-28

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ID=41401830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009194869A Active JP5501697B2 (ja) 2008-08-26 2009-08-25 プローブ先端

Country Status (4)

Country Link
US (1) US8327727B2 (https=)
EP (1) EP2159580B1 (https=)
JP (1) JP5501697B2 (https=)
CN (1) CN101685105B (https=)

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WO2011138635A1 (en) * 2010-05-03 2011-11-10 Indian Institute Of Technology Bombay Capillary electrophoresis chips
CN105378449B (zh) * 2012-12-17 2019-02-05 胡文聪 取样组件、显微镜模块及显微镜装置
US9417266B2 (en) 2014-01-16 2016-08-16 International Business Machines Corporation Implementing handheld transfer impedance probe
CN106338625B (zh) * 2015-07-06 2019-07-26 创意电子股份有限公司 探针卡
US10060950B2 (en) 2016-01-15 2018-08-28 Formfactor Beaverton, Inc. Shielded probe systems
US10877070B2 (en) 2018-01-19 2020-12-29 Formfactor Beaverton, Inc. Probes with fiducial targets, probe systems including the same, and associated methods
US11313883B2 (en) * 2020-09-10 2022-04-26 Mpi Corporation Probe station capable of maintaining position of probe tip upon temperature change
CN114811432A (zh) * 2021-01-19 2022-07-29 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） 用于液氦杜瓦的温度补偿支撑结构及具有其的低温容器
CN113075128B (zh) * 2021-04-06 2024-09-10 武汉佰力博科技有限公司 一种探针机构和可变温真空探针平台
US11927603B2 (en) 2021-10-20 2024-03-12 Formfactor, Inc. Probes that define retroreflectors, probe systems that include the probes, and methods of utilizing the probes
JP7507838B2 (ja) 2021-11-30 2024-06-28 イノヴェータム・インストゥルメンツ・インコーポレイテッド 荷電粒子ビームを使用するプローブ先端のｘ－ｙロケーションの識別
US12306241B2 (en) 2022-02-14 2025-05-20 Innovatum Instruments Inc. Automated probe landing
CN116773997A (zh) * 2022-03-11 2023-09-19 苏州联讯仪器股份有限公司 芯片电性老化测试装置
CN116298863B (zh) * 2023-02-01 2024-05-10 深圳市致诚达科技有限公司 一种bldc电机生产线快速检验系统及控制方法
EP4439101A1 (en) * 2023-03-31 2024-10-02 kiutra GmbH Apparatus for testing and/or operating electronic devices
CN116430088B (zh) * 2023-06-13 2023-11-24 南方科技大学 探针及其制备方法

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