JP2010056553A5 - - Google Patents

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Publication number
JP2010056553A5
JP2010056553A5 JP2009194869A JP2009194869A JP2010056553A5 JP 2010056553 A5 JP2010056553 A5 JP 2010056553A5 JP 2009194869 A JP2009194869 A JP 2009194869A JP 2009194869 A JP2009194869 A JP 2009194869A JP 2010056553 A5 JP2010056553 A5 JP 2010056553A5
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JP
Japan
Prior art keywords
probe
sample
station
tip
arm
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JP2009194869A
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English (en)
Japanese (ja)
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JP2010056553A (ja
JP5501697B2 (ja
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Publication of JP2010056553A publication Critical patent/JP2010056553A/ja
Publication of JP2010056553A5 publication Critical patent/JP2010056553A5/ja
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Publication of JP5501697B2 publication Critical patent/JP5501697B2/ja
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JP2009194869A 2008-08-26 2009-08-25 プローブ先端 Active JP5501697B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9196208P 2008-08-26 2008-08-26
US61/091,962 2008-08-26

Publications (3)

Publication Number Publication Date
JP2010056553A JP2010056553A (ja) 2010-03-11
JP2010056553A5 true JP2010056553A5 (enExample) 2012-09-27
JP5501697B2 JP5501697B2 (ja) 2014-05-28

Family

ID=41401830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009194869A Active JP5501697B2 (ja) 2008-08-26 2009-08-25 プローブ先端

Country Status (4)

Country Link
US (1) US8327727B2 (enExample)
EP (1) EP2159580B1 (enExample)
JP (1) JP5501697B2 (enExample)
CN (1) CN101685105B (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2202472A1 (en) * 2008-12-29 2010-06-30 Ludwig-Maximilians-Universität München Freeze dryer monitoring device
US8715558B2 (en) * 2010-05-03 2014-05-06 Indian Institute Of Technology Bombay Capillary electrophoresis chips
EP2932229A2 (en) * 2012-12-17 2015-10-21 National Taiwan University Sampling assembly, microscope module, and microscope apparatus
US9417266B2 (en) 2014-01-16 2016-08-16 International Business Machines Corporation Implementing handheld transfer impedance probe
CN106338625B (zh) * 2015-07-06 2019-07-26 创意电子股份有限公司 探针卡
US10060950B2 (en) * 2016-01-15 2018-08-28 Formfactor Beaverton, Inc. Shielded probe systems
US10877070B2 (en) 2018-01-19 2020-12-29 Formfactor Beaverton, Inc. Probes with fiducial targets, probe systems including the same, and associated methods
US11313883B2 (en) * 2020-09-10 2022-04-26 Mpi Corporation Probe station capable of maintaining position of probe tip upon temperature change
CN114811432A (zh) * 2021-01-19 2022-07-29 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） 用于液氦杜瓦的温度补偿支撑结构及具有其的低温容器
CN113075128B (zh) * 2021-04-06 2024-09-10 武汉佰力博科技有限公司 一种探针机构和可变温真空探针平台
US11927603B2 (en) 2021-10-20 2024-03-12 Formfactor, Inc. Probes that define retroreflectors, probe systems that include the probes, and methods of utilizing the probes
US12169208B2 (en) 2021-11-30 2024-12-17 Innovatum Instruments Inc. Probe tip X-Y location identification using a charged particle beam
US12306241B2 (en) 2022-02-14 2025-05-20 Innovatum Instruments Inc. Automated probe landing
CN116298863B (zh) * 2023-02-01 2024-05-10 深圳市致诚达科技有限公司 一种bldc电机生产线快速检验系统及控制方法
EP4439101A1 (en) * 2023-03-31 2024-10-02 kiutra GmbH Apparatus for testing and/or operating electronic devices
CN116430088B (zh) * 2023-06-13 2023-11-24 南方科技大学 探针及其制备方法

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3293759A (en) * 1964-08-06 1966-12-27 Minnetech Labs Inc Linear distance measuring instrument
US3797310A (en) * 1972-02-28 1974-03-19 Steel Corp Temperature sensing device
US4123706A (en) * 1975-03-03 1978-10-31 Electroglas, Inc. Probe construction
US4115736A (en) * 1977-03-09 1978-09-19 The United States Of America As Represented By The Secretary Of The Air Force Probe station
US4194119A (en) * 1977-11-30 1980-03-18 Ford Motor Company Self-adjusting cryogenic thermal interface assembly
US4586383A (en) * 1982-09-13 1986-05-06 Blomquist George W Electronic pressure gauge and flow meter
US4499330A (en) * 1983-12-23 1985-02-12 General Electric Company Anti-vibration support for thermocouple tip
JPS6150048A (ja) * 1984-08-20 1986-03-12 Nippon Seiko Kk プロ−ブ針昇降装置
EP0252523A3 (en) * 1986-07-11 1990-02-07 Nibex Company, Ltd. Temperature sensor
US4831846A (en) * 1988-04-12 1989-05-23 The United States Of America As Represented By The United States Department Of Energy Low temperature cryoprobe
US4909588A (en) * 1988-08-25 1990-03-20 The Dow Chemical Company Sealed fiber optic probe
JPH0362938A (ja) * 1989-07-31 1991-03-19 Tokyo Electron Ltd 検査装置
JPH03280444A (ja) * 1990-03-28 1991-12-11 Toshiba Corp 個別半導体素子の検査方法
US5309088A (en) 1990-08-10 1994-05-03 Texas Instruments Incorporated Measurement of semiconductor parameters at cryogenic temperatures using a spring contact probe
US5193912A (en) * 1991-11-18 1993-03-16 Saunders Roger I Probe for sensing and measuring temperature
JP2598851B2 (ja) * 1992-01-23 1997-04-09 松下電器産業株式会社 位置決め装置
US5349543A (en) * 1992-06-10 1994-09-20 International Business Machines Corporation Constant force probe
JPH088455Y2 (ja) * 1992-12-08 1996-03-06 日本電子材料株式会社 加熱又は冷却テストに適したプローブカード
US5312188A (en) * 1993-04-05 1994-05-17 Figgie International Inc. Temperature sensing apparatus
US5438206A (en) * 1993-06-02 1995-08-01 Matsushita Electric Industrial Co., Ltd. Positioning device
US5479820A (en) * 1993-10-12 1996-01-02 Rochester Gauges, Inc. Cryogenic gauge
JP3351053B2 (ja) * 1993-10-19 2002-11-25 株式会社豊田自動織機 電子部品
WO1996016440A1 (en) * 1994-11-15 1996-05-30 Formfactor, Inc. Interconnection elements for microelectronic components
US5567053A (en) * 1994-12-23 1996-10-22 Figgie International Inc. Temperature sensing apparatus
EP0727649B1 (en) * 1995-02-17 1998-04-08 Hewlett-Packard GmbH Optical system having temperature compensated optical sensor mounting
JP3216616B2 (ja) * 1998-10-06 2001-10-09 日本電気株式会社 半導体装置
NO994363L (no) * 1999-09-09 2001-03-12 Optomed As Fiberoptisk probe for temperaturmÕlinger i biologiske media
US6483336B1 (en) * 2000-05-03 2002-11-19 Cascade Microtech, Inc. Indexing rotatable chuck for a probe station
US6784663B2 (en) * 2001-08-27 2004-08-31 Tristan Technologies, Inc. Self-adjusting assembly and method for close tolerance spacing
US7071714B2 (en) * 2001-11-02 2006-07-04 Formfactor, Inc. Method and system for compensating for thermally induced motion of probe cards
US6972578B2 (en) * 2001-11-02 2005-12-06 Formfactor, Inc. Method and system for compensating thermally induced motion of probe cards
DE10154495C5 (de) * 2001-11-07 2018-01-11 Infineon Technologies Ag Konzept zur Kompensation der Einflüsse externer Störgrößen auf physikalische Funktionsparameter von integrierten Schaltungen
US7239158B2 (en) * 2002-04-16 2007-07-03 Nhk Spring Co., Ltd. Holder for conductive contact
JP4170023B2 (ja) * 2002-06-07 2008-10-22 アルプス電気株式会社 回転型センサ
US6924653B2 (en) 2002-08-26 2005-08-02 Micron Technology, Inc. Selectively configurable microelectronic probes
DE10254720A1 (de) * 2002-11-23 2004-06-03 Endress + Hauser Gmbh + Co. Kg Messgerät
JP2006524798A (ja) * 2003-02-13 2006-11-02 ネクセンス リミテッド 様々なパラメータの高感度測定を行なうための装置、およびそのような装置で特に有用なセンサ
JP4400909B2 (ja) * 2003-04-04 2010-01-20 日本サーモスタット株式会社 サーモスタット装置
WO2005003821A2 (en) * 2003-06-03 2005-01-13 Bay Materials Llc Phase change sensor
US7182761B2 (en) * 2003-12-11 2007-02-27 Scimed Life Systems, Inc. Ablation probe with temperature sensitive electrode array
US7381971B2 (en) * 2004-07-28 2008-06-03 Omniprobe, Inc. Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope
JP2006105859A (ja) * 2004-10-07 2006-04-20 Tem-Tech Kenkyusho:Kk フッ素樹脂薄膜ダイヤフラム圧力センサおよびその製造方法
JP2006242774A (ja) * 2005-03-03 2006-09-14 Tokyo Electron Ltd プローブ及びプローブカード
US20070185477A1 (en) * 2006-02-07 2007-08-09 Hooven Michael D Removable Cryogenic Probe Appliance
DE102006022475A1 (de) * 2006-05-13 2007-11-15 Infineon Technologies Ag Verfahren zum Ausgleichen einer durch eine Temperaturänderung hervorgerufenen Positionsänderung einer Nadelkarte
JP4522975B2 (ja) * 2006-06-19 2010-08-11 東京エレクトロン株式会社 プローブカード
US7746089B2 (en) * 2006-09-29 2010-06-29 Formfactor, Inc. Method and apparatus for indirect planarization

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