JP2010048643A - 加速度検知ユニット、及び加速度センサ - Google Patents
加速度検知ユニット、及び加速度センサ Download PDFInfo
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- JP2010048643A JP2010048643A JP2008212511A JP2008212511A JP2010048643A JP 2010048643 A JP2010048643 A JP 2010048643A JP 2008212511 A JP2008212511 A JP 2008212511A JP 2008212511 A JP2008212511 A JP 2008212511A JP 2010048643 A JP2010048643 A JP 2010048643A
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- 230000001133 acceleration Effects 0.000 title claims abstract description 111
- 238000001514 detection method Methods 0.000 title claims abstract description 48
- 230000010363 phase shift Effects 0.000 claims description 44
- 230000008878 coupling Effects 0.000 claims description 24
- 238000010168 coupling process Methods 0.000 claims description 24
- 238000005859 coupling reaction Methods 0.000 claims description 24
- 230000010355 oscillation Effects 0.000 claims description 14
- 230000008859 change Effects 0.000 claims description 8
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 230000009977 dual effect Effects 0.000 abstract description 4
- 238000007493 shaping process Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 230000004069 differentiation Effects 0.000 description 5
- 230000003111 delayed effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 1
- 235000015842 Hesperis Nutrition 0.000 description 1
- 235000012633 Iberis amara Nutrition 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008212511A JP2010048643A (ja) | 2008-08-21 | 2008-08-21 | 加速度検知ユニット、及び加速度センサ |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2008212511A JP2010048643A (ja) | 2008-08-21 | 2008-08-21 | 加速度検知ユニット、及び加速度センサ |
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| Publication Number | Publication Date |
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| JP2010048643A true JP2010048643A (ja) | 2010-03-04 |
| JP2010048643A5 JP2010048643A5 (enrdf_load_stackoverflow) | 2011-10-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2008212511A Withdrawn JP2010048643A (ja) | 2008-08-21 | 2008-08-21 | 加速度検知ユニット、及び加速度センサ |
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| JP (1) | JP2010048643A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011217348A (ja) * | 2010-03-17 | 2011-10-27 | Seiko Epson Corp | 振動片、センサー素子、センサーおよび電子機器 |
| CN108459173A (zh) * | 2018-04-13 | 2018-08-28 | 北京强度环境研究所 | 一种应用于高g值冲击加速度传感器的机械滤波器 |
| CN114994366A (zh) * | 2022-06-06 | 2022-09-02 | 西安微电子技术研究所 | 一种温度补偿型石英振梁加速度计控制电路 |
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2008
- 2008-08-21 JP JP2008212511A patent/JP2010048643A/ja not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011217348A (ja) * | 2010-03-17 | 2011-10-27 | Seiko Epson Corp | 振動片、センサー素子、センサーおよび電子機器 |
| CN108459173A (zh) * | 2018-04-13 | 2018-08-28 | 北京强度环境研究所 | 一种应用于高g值冲击加速度传感器的机械滤波器 |
| CN108459173B (zh) * | 2018-04-13 | 2023-08-11 | 北京强度环境研究所 | 一种应用于高g值冲击加速度传感器的机械滤波器 |
| CN114994366A (zh) * | 2022-06-06 | 2022-09-02 | 西安微电子技术研究所 | 一种温度补偿型石英振梁加速度计控制电路 |
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