JP2010010502A - 半導体装置及び接合材料 - Google Patents
半導体装置及び接合材料 Download PDFInfo
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Abstract
半導体装置のCu,Ni,Alを含めた各種電極と、金属酸化物粒子を接合の主剤とする接合材との接合部の接合信頼性を向上することを目的とする。
【解決手段】
半導体素子と電極がAg系またはCu系材で構成された接合層を介して接続された半導体モジュールであって、半導体素子と前記接合層との界面、及び前記接合層と前記電極との界面に前記接合層と同種の薄膜が形成し、かつ前記薄膜の厚さが1乃至200nmであることを特徴とする。また、半導体素子と電極とを接合する際に、接合材料の還元温度を超えない低温で熱処理し、その後、還元よりも高温での熱処理する2段加熱により接合することを特徴とする。
【選択図】図4
Description
102 配線層
103 セラミックス絶縁基板
104 配線層
105 接合層
106 エミッタ電極
110 支持部材
201 接続用端子
Claims (9)
- 半導体素子と電極がAg系またはCu系材で構成された接合層を介して接続された半導体モジュールであって、半導体素子と前記接合層との界面、及び前記接合層と前記電極との界面に前記接合層と同種の薄膜を有し、かつ前記薄膜の厚さが1乃至200nmであることを特徴とした半導体モジュール。
- 請求項1において、半導体素子と前記接合層との界面、及び前記接合層と前記電極との界面に空洞部があり、前記空洞部と前記半導体素子との界面、及び前記空洞部と前記電極との界面に、前記接合層と同種の薄膜を有し、かつ前記薄膜の厚さが1乃至200nmであることを特徴とした半導体モジュール。
- 請求項1に記載の半導体モジュールを内蔵していることを特徴とする電力変換装置。
- 請求項2に記載の電力変換装置がエンジンルームに搭載されることを特徴とするハイブリット自動車。
- 粒径が1nm以上50μm以下の銀系,銅系、あるいは銀系と銅系を混在させた金属酸化物粒子と、アルコール類,カルボン酸類,アミン類から選ばれた1種以上の有機物を含有する接合材料を接合部材間に配置し、前記接合材料の還元温度よりも低い温度で保持する第1の加熱処理と、接合材料の還元温度よりも高い温度に昇温して保持する第2の加熱処理を施すことにより、接合部材間を接合することを特徴とする接合方法。
- 請求項5に記載の接合方法において、接合部材の最表面がCu,Ni,Alのいずれかであることを特徴とする接合方法。
- 請求項6に記載の接合方法において、前記第1の加熱処理は、40℃以上150℃以下の温度で行われることを特徴とする接合方法。
- 半導体素子と、最表面がCu,Ni,Alのいずれかで構成される電極とがAg系またはCu系材で構成された接合層を介して接続された半導体モジュールの製造方法であって、
半導体素子又は電極の表面に、粒径が1nm以上50μm以下の銀系,銅系、あるいは銀系と銅系を混在させた金属酸化物粒子と、アルコール類,カルボン酸類,アミン類から選ばれた1種以上の有機物を含有する接合材料を配置し、半導体素子と電極とを重ね合わせる工程と、
前記接合材料の還元温度よりも低い温度で保持する第1の加熱処理と、前記接合材料の還元温度よりも高い温度に昇温して保持する第2の加熱処理により、半導体素子及び電極を接合する工程と、
を有することを特徴とする半導体モジュールの製造方法。 - 請求項8に記載の半導体モジュールの製造方法において、40℃以上150℃以下の温度で前記第1の加熱処理を施し、200℃以上の温度で第2の加熱処理を施すことを特徴とする半導体モジュールの製造方法。
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