JP2009541740A5 - - Google Patents

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Publication number
JP2009541740A5
JP2009541740A5 JP2009516498A JP2009516498A JP2009541740A5 JP 2009541740 A5 JP2009541740 A5 JP 2009541740A5 JP 2009516498 A JP2009516498 A JP 2009516498A JP 2009516498 A JP2009516498 A JP 2009516498A JP 2009541740 A5 JP2009541740 A5 JP 2009541740A5
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JP
Japan
Prior art keywords
instantaneous
measured
voltage
circuit
measurement
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JP2009516498A
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English (en)
Japanese (ja)
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JP5209617B2 (ja
JP2009541740A (ja
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Priority claimed from US11/454,922 external-priority patent/US7825672B2/en
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Publication of JP2009541740A publication Critical patent/JP2009541740A/ja
Publication of JP2009541740A5 publication Critical patent/JP2009541740A5/ja
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Publication of JP5209617B2 publication Critical patent/JP5209617B2/ja
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JP2009516498A 2006-06-19 2007-06-04 高精度のその場での抵抗値計測法 Active JP5209617B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/454,922 2006-06-19
US11/454,922 US7825672B2 (en) 2006-06-19 2006-06-19 High accuracy in-situ resistance measurements methods
PCT/US2007/013093 WO2007149205A2 (en) 2006-06-19 2007-06-04 High accuracy in-situ resistance measurements methods

Publications (3)

Publication Number Publication Date
JP2009541740A JP2009541740A (ja) 2009-11-26
JP2009541740A5 true JP2009541740A5 (enExample) 2010-07-22
JP5209617B2 JP5209617B2 (ja) 2013-06-12

Family

ID=38833936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009516498A Active JP5209617B2 (ja) 2006-06-19 2007-06-04 高精度のその場での抵抗値計測法

Country Status (6)

Country Link
US (1) US7825672B2 (enExample)
EP (1) EP2038667B1 (enExample)
JP (1) JP5209617B2 (enExample)
KR (1) KR101359232B1 (enExample)
CN (1) CN101490573B (enExample)
WO (1) WO2007149205A2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
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US8581153B2 (en) * 2008-09-30 2013-11-12 Tokyo Electron Limited Method of detecting abnormal placement of substrate, substrate processing method, computer-readable storage medium, and substrate processing apparatus
CN102052971B (zh) * 2010-11-02 2012-07-04 深圳市海一电器有限公司 电加热的热源测温装置及方法
FR2984495B1 (fr) * 2011-12-15 2016-04-15 Valeo Systemes De Controle Moteur Procede de mesure de la temperature
US8995157B2 (en) 2012-04-18 2015-03-31 Strategic Patent Management, Llc Sensing and control for improving switched power supplies
US9568526B2 (en) * 2012-09-13 2017-02-14 Microchip Technology Incorporated Noise detection and correction routines
JP5513586B2 (ja) * 2012-11-01 2014-06-04 株式会社日本製鋼所 温度測定方法
JP6116952B2 (ja) * 2013-03-19 2017-04-19 株式会社東芝 部分放電監視システムおよび部分放電監視方法
US9710863B2 (en) 2013-04-19 2017-07-18 Strategic Patent Management, Llc Method and apparatus for optimizing self-power consumption of a controller-based device
EP2809127B1 (en) * 2013-05-28 2019-01-23 IDTools B.V. Induction heating handheld power tool and method for assembling a front module to an induction heating handheld power tool
CN104569573B (zh) * 2013-10-12 2017-10-13 施耐德电气（澳大利亚）有限公司 一种功率参数的测量方法以及测量电路
CN104950009B (zh) * 2014-03-28 2018-11-20 杭州远方光电信息股份有限公司 一种热阻分析方法
JP6688172B2 (ja) 2016-06-24 2020-04-28 東京エレクトロン株式会社 基板処理システムおよび方法
JP6961025B2 (ja) * 2016-06-24 2021-11-05 東京エレクトロン株式会社 基板処理システム
US12061228B2 (en) 2022-06-06 2024-08-13 Nxp B.V. Degradation monitor for bond wire to bond pad interfaces

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Publication number Priority date Publication date Assignee Title
US4549073A (en) * 1981-11-06 1985-10-22 Oximetrix, Inc. Current controller for resistive heating element
DE3719844A1 (de) * 1987-06-13 1988-12-29 Basf Ag Durch photopolymersisation vernetzbares gemisch
US4982185A (en) * 1989-05-17 1991-01-01 Blh Electronics, Inc. System for synchronous measurement in a digital computer network
US5552998A (en) * 1990-11-05 1996-09-03 Watlow/Winona, Inc. Method and apparatus for calibration and controlling multiple heaters
US5280422A (en) * 1990-11-05 1994-01-18 Watlow/Winona, Inc. Method and apparatus for calibrating and controlling multiple heaters
DE4037115A1 (de) * 1990-11-22 1992-05-27 Eldeco Elektronik Entwicklunge Schaltungsanordnung zur betriebsmaessigen ermittlung und ueberwachung des elektrischen widerstands
JP3274157B2 (ja) * 1991-11-18 2002-04-15 株式会社ナ・デックス 抵抗溶接制御における２次側抵抗測定方法及び装置
US5387909A (en) * 1993-03-25 1995-02-07 Naztec, Inc. Lamp sensing system for traffic lights
US5514129A (en) * 1993-12-03 1996-05-07 Valleylab Inc. Automatic bipolar control for an electrosurgical generator
US5629869A (en) * 1994-04-11 1997-05-13 Abb Power T&D Company Intelligent circuit breaker providing synchronous switching and condition monitoring
CN1070291C (zh) * 1994-10-26 2001-08-29 华北电力学院 电力变压器直流电阻的动态测量方法及测量装置
US5864733A (en) * 1995-10-25 1999-01-26 Ricoh Company, Ltd. Developing device for image forming apparatus
US5754451A (en) * 1996-02-29 1998-05-19 Raytheon Company Preventative maintenance and diagonstic system
US5702624A (en) * 1996-10-09 1997-12-30 Taiwan Semiconductors Manfuacturing Company, Ltd Compete hot plate temperature control system for hot treatment
US5831249A (en) * 1997-01-29 1998-11-03 Advanced Micro Devices, Inc. Secondary measurement of rapid thermal annealer temperature
JP3790342B2 (ja) * 1997-10-08 2006-06-28 日置電機株式会社 抵抗測定装置
US6636012B2 (en) * 2001-09-28 2003-10-21 Rockwell Automation Technologies, Inc. Stator and rotor resistance identifier using high frequency injection
JP2003232822A (ja) * 2002-02-07 2003-08-22 Deicy Corp ４探針法による抵抗率測定方法及びその装置
JP3540311B2 (ja) * 2002-05-31 2004-07-07 松下電器産業株式会社 モータ駆動制御装置
US6956489B2 (en) * 2002-07-17 2005-10-18 Mrl Industries Heating element condition monitor
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JP2006024537A (ja) * 2004-07-09 2006-01-26 Rkc Instrument Inc 電力制御装置および電力制御方法

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