CN101490573B - 高精度原位电阻测量方法 - Google Patents

高精度原位电阻测量方法 Download PDF

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Publication number
CN101490573B
CN101490573B CN2007800271251A CN200780027125A CN101490573B CN 101490573 B CN101490573 B CN 101490573B CN 2007800271251 A CN2007800271251 A CN 2007800271251A CN 200780027125 A CN200780027125 A CN 200780027125A CN 101490573 B CN101490573 B CN 101490573B
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CN
China
Prior art keywords
voltage
instantaneous
circuit
measured
situ
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CN2007800271251A
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English (en)
Chinese (zh)
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CN101490573A (zh
Inventor
凯文·B·佩克
诺埃尔·约翰逊
比约恩·A·拉尔森
庞特斯·K·H·尼尔松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cantel Ltd
Cantel Thermal Transmission Co ltd
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Sandvik Intellectual Property AB
MRL Industries Inc
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Publication of CN101490573A publication Critical patent/CN101490573A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/08—Measuring resistance by measuring both voltage and current

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
CN2007800271251A 2006-06-19 2007-06-04 高精度原位电阻测量方法 Active CN101490573B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/454,922 2006-06-19
US11/454,922 US7825672B2 (en) 2006-06-19 2006-06-19 High accuracy in-situ resistance measurements methods
PCT/US2007/013093 WO2007149205A2 (en) 2006-06-19 2007-06-04 High accuracy in-situ resistance measurements methods

Publications (2)

Publication Number Publication Date
CN101490573A CN101490573A (zh) 2009-07-22
CN101490573B true CN101490573B (zh) 2012-12-12

Family

ID=38833936

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Application Number Title Priority Date Filing Date
CN2007800271251A Active CN101490573B (zh) 2006-06-19 2007-06-04 高精度原位电阻测量方法

Country Status (6)

Country Link
US (1) US7825672B2 (enExample)
EP (1) EP2038667B1 (enExample)
JP (1) JP5209617B2 (enExample)
KR (1) KR101359232B1 (enExample)
CN (1) CN101490573B (enExample)
WO (1) WO2007149205A2 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8581153B2 (en) * 2008-09-30 2013-11-12 Tokyo Electron Limited Method of detecting abnormal placement of substrate, substrate processing method, computer-readable storage medium, and substrate processing apparatus
CN102052971B (zh) * 2010-11-02 2012-07-04 深圳市海一电器有限公司 电加热的热源测温装置及方法
FR2984495B1 (fr) * 2011-12-15 2016-04-15 Valeo Systemes De Controle Moteur Procede de mesure de la temperature
US8995157B2 (en) 2012-04-18 2015-03-31 Strategic Patent Management, Llc Sensing and control for improving switched power supplies
US9568526B2 (en) * 2012-09-13 2017-02-14 Microchip Technology Incorporated Noise detection and correction routines
JP5513586B2 (ja) * 2012-11-01 2014-06-04 株式会社日本製鋼所 温度測定方法
JP6116952B2 (ja) * 2013-03-19 2017-04-19 株式会社東芝 部分放電監視システムおよび部分放電監視方法
US9710863B2 (en) 2013-04-19 2017-07-18 Strategic Patent Management, Llc Method and apparatus for optimizing self-power consumption of a controller-based device
EP2809127B1 (en) * 2013-05-28 2019-01-23 IDTools B.V. Induction heating handheld power tool and method for assembling a front module to an induction heating handheld power tool
CN104569573B (zh) * 2013-10-12 2017-10-13 施耐德电气（澳大利亚）有限公司 一种功率参数的测量方法以及测量电路
CN104950009B (zh) * 2014-03-28 2018-11-20 杭州远方光电信息股份有限公司 一种热阻分析方法
JP6688172B2 (ja) 2016-06-24 2020-04-28 東京エレクトロン株式会社 基板処理システムおよび方法
JP6961025B2 (ja) * 2016-06-24 2021-11-05 東京エレクトロン株式会社 基板処理システム
US12061228B2 (en) 2022-06-06 2024-08-13 Nxp B.V. Degradation monitor for bond wire to bond pad interfaces

Citations (2)

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Publication number Priority date Publication date Assignee Title
US5514129A (en) * 1993-12-03 1996-05-07 Valleylab Inc. Automatic bipolar control for an electrosurgical generator
CN1124846A (zh) * 1994-10-26 1996-06-19 华北电力学院 电力变压器直流电阻的动态测量方法及测量装置

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US4549073A (en) * 1981-11-06 1985-10-22 Oximetrix, Inc. Current controller for resistive heating element
DE3719844A1 (de) * 1987-06-13 1988-12-29 Basf Ag Durch photopolymersisation vernetzbares gemisch
US4982185A (en) * 1989-05-17 1991-01-01 Blh Electronics, Inc. System for synchronous measurement in a digital computer network
US5552998A (en) * 1990-11-05 1996-09-03 Watlow/Winona, Inc. Method and apparatus for calibration and controlling multiple heaters
US5280422A (en) * 1990-11-05 1994-01-18 Watlow/Winona, Inc. Method and apparatus for calibrating and controlling multiple heaters
DE4037115A1 (de) * 1990-11-22 1992-05-27 Eldeco Elektronik Entwicklunge Schaltungsanordnung zur betriebsmaessigen ermittlung und ueberwachung des elektrischen widerstands
JP3274157B2 (ja) * 1991-11-18 2002-04-15 株式会社ナ・デックス 抵抗溶接制御における２次側抵抗測定方法及び装置
US5387909A (en) * 1993-03-25 1995-02-07 Naztec, Inc. Lamp sensing system for traffic lights
US5629869A (en) * 1994-04-11 1997-05-13 Abb Power T&D Company Intelligent circuit breaker providing synchronous switching and condition monitoring
US5864733A (en) * 1995-10-25 1999-01-26 Ricoh Company, Ltd. Developing device for image forming apparatus
US5754451A (en) * 1996-02-29 1998-05-19 Raytheon Company Preventative maintenance and diagonstic system
US5702624A (en) * 1996-10-09 1997-12-30 Taiwan Semiconductors Manfuacturing Company, Ltd Compete hot plate temperature control system for hot treatment
US5831249A (en) * 1997-01-29 1998-11-03 Advanced Micro Devices, Inc. Secondary measurement of rapid thermal annealer temperature
JP3790342B2 (ja) * 1997-10-08 2006-06-28 日置電機株式会社 抵抗測定装置
US6636012B2 (en) * 2001-09-28 2003-10-21 Rockwell Automation Technologies, Inc. Stator and rotor resistance identifier using high frequency injection
JP2003232822A (ja) * 2002-02-07 2003-08-22 Deicy Corp ４探針法による抵抗率測定方法及びその装置
JP3540311B2 (ja) * 2002-05-31 2004-07-07 松下電器産業株式会社 モータ駆動制御装置
US6956489B2 (en) * 2002-07-17 2005-10-18 Mrl Industries Heating element condition monitor
US6927626B2 (en) * 2002-09-23 2005-08-09 Harman International Industries, Incorporated Thermal protection system for an output stage of an amplifier
JP2006024537A (ja) * 2004-07-09 2006-01-26 Rkc Instrument Inc 電力制御装置および電力制御方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5514129A (en) * 1993-12-03 1996-05-07 Valleylab Inc. Automatic bipolar control for an electrosurgical generator
CN1124846A (zh) * 1994-10-26 1996-06-19 华北电力学院 电力变压器直流电阻的动态测量方法及测量装置

Also Published As

Publication number Publication date
WO2007149205A2 (en) 2007-12-27
US20070290692A1 (en) 2007-12-20
JP5209617B2 (ja) 2013-06-12
CN101490573A (zh) 2009-07-22
US7825672B2 (en) 2010-11-02
EP2038667A2 (en) 2009-03-25
KR20090054423A (ko) 2009-05-29
WO2007149205A3 (en) 2008-11-06
JP2009541740A (ja) 2009-11-26
EP2038667A4 (en) 2017-03-29
EP2038667B1 (en) 2020-03-11
KR101359232B1 (ko) 2014-02-05

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Address after: California, USA

Patentee after: Cantel thermal transmission Co.,Ltd.

Patentee after: SANDVIK INTELLECTUAL PROPERTY AB

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Patentee before: Sandvik Thermal Process, Inc.

Patentee before: SANDVIK INTELLECTUAL PROPERTY AB

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Patentee after: Sandvik Thermal Process, Inc.

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Address after: California, USA

Patentee after: Cantel thermal transmission Co.,Ltd.

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