JP2009536728A - Method, arrangement and system for polarization sensitive optical frequency domain imaging of samples - Google Patents
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Abstract
【課題】信号伝播チャネルおよび参照チャネルによって平衡になる平衡検出スキームを可能にするシステム、構成、およびプロセスの例示的な実施形態を提供すること。
【解決手段】サンプルに関するデータを取得するための構成および方法が提供される。例えば、少なくとも1つの第1の電磁放射がサンプルに与えられ得、少なくとも1つの第2の電磁放射が参照物(例えば無反射参照物)に与えられ得る。そのような放射周波数は、第1の固有周期の時間にわたって繰り返し変化され得る。さらに、第1の電磁放射、第2の電磁放射、第3の電磁放射(第5の放射と関連する)または第4の電磁放射(第2の電磁放射と関連する)の偏光状態は、第1の周期より短い第2の固有周期の時間にわたって繰り返し変化され得る。サンプルの少なくとも一部分を画像化するためのデータは、偏光状態に応じて提供され得る。
【選択図】図6Exemplary embodiments of systems, configurations, and processes that enable a balanced detection scheme that is balanced by a signal propagation channel and a reference channel.
An arrangement and method for obtaining data about a sample is provided. For example, at least one first electromagnetic radiation can be provided to the sample and at least one second electromagnetic radiation can be provided to a reference (eg, a non-reflective reference). Such a radiation frequency can be changed repeatedly over the time of the first natural period. Further, the polarization state of the first electromagnetic radiation, the second electromagnetic radiation, the third electromagnetic radiation (associated with the fifth radiation) or the fourth electromagnetic radiation (associated with the second electromagnetic radiation) is It can be changed repeatedly over a second natural period time shorter than one period. Data for imaging at least a portion of the sample may be provided depending on the polarization state.
[Selection] Figure 6
Description
(関連出願に対する相互参照)
本出願は、2006年4月5日に出願された米国特許出願第60/789,739号に基づき、それから優先権の利益を主張する。その全開示は、本明細書中に参考として援用される。
(Cross-reference to related applications)
This application is based on US patent application Ser. No. 60 / 789,739 filed Apr. 5, 2006, and claims priority benefit. The entire disclosure is incorporated herein by reference.
(連邦政府支援の声明)
本発明に関する調査は、国立衛生研究所NCRRによって付与された認可番号R019768号および国立衛生研究所NEIによって付与された認可番号EY014975号によって、少なくとも一部分支持されている。従って、米国政府は本発明において特定の権利を有し得る。
(Federal support statement)
The search for the present invention is supported at least in part by grant number R019768 awarded by the National Institutes of Health NCRR and grant number EY014975 awarded by the National Institutes of Health NEI. Accordingly, the US government may have certain rights in the invention.
本発明は、光学顕微鏡法を使用して解剖学的構造またはサンプルに関する情報を取得する方法、構成およびシステムに関し、より具体的には、解剖学的構造/サンプルの偏向感応性光周波数領域画像形成を提供するような方法、構成およびシステムに関する。 The present invention relates to a method, arrangement and system for obtaining information about an anatomical structure or sample using optical microscopy, and more specifically, anatomical structure / sample deflection sensitive optical frequency domain imaging. Relates to such a method, configuration and system.
掃引光源すなわちフーリエ領域光コヒーレンストモグラフィ(OCT)技術としてもまた公知であり得る光周波数領域画像形成(OFDI)技術は、一般に、掃引レーザー光源を使用するOCT手段である。例えば、光源レーザー波長は迅速かつ繰り返して掃引されるため、光ビームは、組織の中に焦点を合わせられ、異なる深度における組織の微細構造からのエコー遅延時間および反射された光の振幅が、組織サンプルと参照物と間のスペクトル的に分解された干渉を検出することによって測定される。信号のフーリエ変換によって、一般に、軸線(例えば、Aライン)に沿って画像データが形成される。Aラインは、画像形成ビームが軸線に対して直交する1つまたは2つの方向において組織の上を横方向に走査するため、連続的に取得される。生じる2次元または3次元のデータセットは、全体のスクリーニングについての任意の方向において画像表示されて見ることができ、個々の高解像度断面は、目的の特定の場所に表示されることができる。この例示的な手段は、臨床医が生きている患者の組織の微細な内部構造を見ることを可能にし、疾患調査および診断から手術中の組織性状治療および画像誘導治療までの広範囲の臨床応用を容易にするかまたは可能にする。 Optical frequency domain imaging (OFDI) technology, which may also be known as a swept light source or Fourier domain optical coherence tomography (OCT) technology, is generally an OCT means that uses a swept laser light source. For example, since the source laser wavelength is swept quickly and repeatedly, the light beam is focused into the tissue, and the echo delay time and the amplitude of the reflected light from the tissue microstructure at different depths Measured by detecting spectrally resolved interference between sample and reference. Image data is generally formed along an axis (eg, A line) by Fourier transform of the signal. The A line is acquired continuously as the imaging beam scans laterally over the tissue in one or two directions perpendicular to the axis. The resulting two-dimensional or three-dimensional data set can be viewed imaged in any direction for the entire screening, and individual high-resolution sections can be displayed at a specific location of interest. This exemplary means allows clinicians to see the fine internal structure of living patient tissue and has a wide range of clinical applications from disease investigation and diagnosis to intraoperative tissue characterization and image guided therapy. Make it easy or possible.
OFDI技術におけるコントラスト機構は、一般に、サンプルまたは組織内の空間の反射率の変化から生じる光後方反射である。この結果は、代表的に2μm〜20μmの範囲である空間分解能を有する深度において数ミリメートルまでの組織の解剖学的構造を示すことができる、いわゆる強度画像であり得る。強度画像は多くの量の形態学的情報を提供することができるが、組織内の複屈折は、いくつかの適用(例えば、組織内のコラーゲン含有量を定量すること、および組織内の複屈折変化に関与する疾患を評価すること)において有用な別のコントラストを与えることができる。特定の方法および装置(いわゆる偏光感応性OFDIまたはOCT)が使用されている。従来の方法において、プローブビームはサンプルの上を横方向に走査されるが、プローブビームの偏光状態は、連続する軸線(Aライン)走査において2つの状態の間で変えることができる。連続する偏光測定の各対は、ベクター解析を介してサンプルの単一の軸複屈折プロファイルを形成することができる。この従来の方法は、スペックル誘導誤用を回避するために2つのAライン走査の間のサンプルにおいてプローブビームの十分なオーバーラップを利用する。従って、複屈折測定における精度と画像の収集速度との間の折り合いが調べられてもよい。さらに、Aライン走査の間の比較的長い遅延に起因して、従来の方法は、サンプルまたはカテーテルの機械的な動きに感知しやすい。 The contrast mechanism in OFDI technology is generally light back reflection resulting from changes in the reflectivity of the space within the sample or tissue. The result can be a so-called intensity image that can show tissue anatomy up to a few millimeters at depths with spatial resolution typically ranging from 2 μm to 20 μm. While intensity images can provide a large amount of morphological information, birefringence in tissue can be used in several applications (eg, quantifying collagen content in tissue and birefringence in tissue). Another contrast useful in assessing disease associated with changes) can be provided. Certain methods and devices (so-called polarization sensitive OFDI or OCT) have been used. In conventional methods, the probe beam is scanned laterally over the sample, but the polarization state of the probe beam can be changed between two states in successive axial (A-line) scans. Each pair of successive polarimetry can form a single axial birefringence profile of the sample via vector analysis. This conventional method utilizes sufficient overlap of the probe beam in the sample between two A-line scans to avoid speckle-induced misuse. Thus, a trade-off between accuracy in birefringence measurement and image collection speed may be examined. Furthermore, due to the relatively long delay between A-line scans, conventional methods are sensitive to sample or catheter mechanical movements.
偏光感応性情報を取得するための例示的なシステムおよび方法は、特許文献1に記載されている。例示的なOFDI技術およびシステムは、特許文献2に記載されている。組織の偏光特性を測定するための方法およびシステムは、特許文献3に記載されている。例示的なOFDI技術を用いて、平衡検出を実施することが望まれ得る。
しかしながら、平衡検出は、偏光感応性および偏波ダイバーシティのファイバ実施を複雑にし得る。なぜなら、平衡である2つの信号チャネルが異なる偏光状態を有し得るからである。 However, balanced detection can complicate polarization sensitive and polarization diversity fiber implementations. This is because two signal channels that are in equilibrium can have different polarization states.
従って、上記の欠点を克服する必要性が存在する。 There is therefore a need to overcome the above disadvantages.
上記の問題および/または欠点を取り扱うおよび/または克服するために、例えば、チャネルが、2つの信号伝播チャネルによって平衡にならないが、信号伝播チャネルおよび参照チャネルによって平衡になる平衡検出スキームを可能にするシステム、構成、およびプロセスの例示的な実施形態を提供することができる。 To handle and / or overcome the above problems and / or disadvantages, for example, allows a balanced detection scheme where the channel is not balanced by two signal propagation channels but is balanced by the signal propagation channel and the reference channel Exemplary embodiments of systems, configurations, and processes can be provided.
例えば、本発明の例示的な実施形態に従って、偏光感応性OFDIのための方法、システムおよび構成を提供することができ、高速OFDI適用において上記の重大な欠点を克服する。特に、Aライン走査よりもむしろ連続的な波長サンプルにわたってプローブビームの偏光状態を迅速に変更することが可能である。この例示的な技術は、(1波長あたり)即座に取得すべき各対の偏光測定を可能にし、横方向の走査速度および動きアーチファクトにおける問題をかなり軽減する。本発明の別の例示的な実施形態に従って、2つの偏光状態の間の位相遅延および群遅延を独立して制御することができる迅速な偏光モジュレータを使用することができる。本発明の例示的な実施形態は、冠動脈、消化管および眼の臨床的なボリュメトリックイメージングに使用することができる。 For example, in accordance with an exemplary embodiment of the present invention, a method, system and configuration for polarization sensitive OFDI can be provided, overcoming the above significant drawbacks in high speed OFDI applications. In particular, it is possible to quickly change the polarization state of the probe beam over a continuous wavelength sample rather than an A-line scan. This exemplary technique allows each pair of polarization measurements to be acquired immediately (per wavelength), significantly reducing problems in lateral scan speed and motion artifacts. In accordance with another exemplary embodiment of the present invention, a rapid polarization modulator that can independently control the phase delay and group delay between two polarization states can be used. Exemplary embodiments of the present invention can be used for clinical volumetric imaging of coronary arteries, gastrointestinal tracts and eyes.
本発明の1つの例示的な実施形態において、サンプル由来の偏光依存性後方反射の測定によって生体サンプルの断面の画像化を実施するための構成、システムおよび方法を提供することができる。1つの例示的な実施形態に従って、光源の各波長走査の間、波長(または時間)に応じて画像化光ビームの偏光状態を迅速および周期的に変化させるために偏光を変調する構成部を使用することができる。例えば、偏光モジュレータは、電気光学モジュレータもしくは音響光学モジュレータおよび/または複屈折媒体であってもよい。 In one exemplary embodiment of the present invention, a configuration, system and method can be provided for performing imaging of a cross section of a biological sample by measurement of polarization-dependent back reflection from the sample. In accordance with one exemplary embodiment, during each wavelength scan of the light source, using a component that modulates polarization to quickly and periodically change the polarization state of the imaging light beam as a function of wavelength (or time) can do. For example, the polarization modulator may be an electro-optic modulator or an acousto-optic modulator and / or a birefringent medium.
本発明の別の例示的な実施形態に従って、サンプルに関するデータを取得するための構成部および方法を提供することができる。例えば、少なくとも1つの第1の電磁放射をサンプルに与えることができ、少なくとも1つの第2の電磁放射を参照物(例えば、無反射参照物)に与えることができる。そのような放射周波数は、第1の固有周期の時間にわたって繰り返し変化させることができる。さらに、第1の電磁放射、第2の電磁放射、第3の電磁放射(第5の放射に関連する)または第4の電磁放射(第6の放射に関連する)の偏光状態は、第1の周期より短い第2の周期の時間にわたって繰り返し変化させることができる。サンプルの少なくとも一部分を画像化するためのデータを、偏光状態に応じて提供することができる。さらにまたはあるいは、第3および第4の電磁放射は、サンプルの少なくとも一部分の軸反射率プロファイルを測定するために合成することができる。 In accordance with another exemplary embodiment of the present invention, a component and method for obtaining data about a sample can be provided. For example, at least one first electromagnetic radiation can be provided to the sample and at least one second electromagnetic radiation can be provided to a reference (eg, a non-reflective reference). Such a radiation frequency can be changed repeatedly over a first natural period of time. Furthermore, the polarization state of the first electromagnetic radiation, the second electromagnetic radiation, the third electromagnetic radiation (related to the fifth radiation) or the fourth electromagnetic radiation (related to the sixth radiation) is It can be repeatedly changed over the time of the second period shorter than the period of. Data for imaging at least a portion of the sample can be provided depending on the polarization state. Additionally or alternatively, the third and fourth electromagnetic radiation can be combined to measure an axial reflectance profile of at least a portion of the sample.
本発明のさらに別の例示的な実施形態に従って、第1および/または第2の電磁放射を、偏光源を介して提供することができる。偏光状態は、偏光モジュレータ、遅延干渉計、周波数シフタおよび/または複屈折媒体を用いて導くことができる。第1、第2、第3および/または第4の電磁放射を偏光するために構成することができる偏光構成部を提供することができる。第1および/または第2の電磁放射を提供することができ、偏光状態を、偏光変調光源を介して得ることができる。第3の電磁放射をサンプルから与えることができ、第4の電磁放射を参照物から与えることができる。 In accordance with yet another exemplary embodiment of the present invention, the first and / or second electromagnetic radiation can be provided via a polarization source. The polarization state can be derived using a polarization modulator, a delay interferometer, a frequency shifter and / or a birefringent medium. A polarization component can be provided that can be configured to polarize the first, second, third and / or fourth electromagnetic radiation. First and / or second electromagnetic radiation can be provided and the polarization state can be obtained via a polarization-modulated light source. Third electromagnetic radiation can be provided from the sample and fourth electromagnetic radiation can be provided from the reference.
本発明のさらなる別の実施形態において、第1の偏光状態において第3の放射と第4の放射との間に第1の干渉信号、ならびに第2の偏光状態において第3の電磁放射と第4の電磁放射との間に第2の干渉信号を検出することが可能であり、第1の偏光状態および第2の偏光状態は互いに異なる。第1および第2の干渉信号はデジタル化されてもよく、サンプルの少なくとも1部分の偏光特性を測定することができる。第1および第2の偏光状態は、互いに対してほぼ直交していてもよい。 In yet another embodiment of the invention, a first interference signal between the third and fourth radiations in the first polarization state and a third electromagnetic radiation and fourth in the second polarization state. The second interference signal can be detected between the first and second electromagnetic radiations, and the first polarization state and the second polarization state are different from each other. The first and second interference signals may be digitized and a polarization characteristic of at least a portion of the sample can be measured. The first and second polarization states may be substantially orthogonal to each other.
本発明のさらに別の例示的な実施形態に従って、サンプルの偏光特性のうちの少なくとも1つの画像を作り出すことができる。偏光特性は、複屈折、複屈折の軸、非減衰および/または非減衰の軸を含むことができる。 According to yet another exemplary embodiment of the present invention, an image of at least one of the polarization properties of the sample can be created. Polarization properties can include birefringence, birefringence axes, non-attenuating and / or non-attenuating axes.
本発明のさらに別の例示的な実施形態に従って、第1の固有周期は、第2の固有周期より約100マイクロ秒短くてもよい。第1および/または第2の電磁放射走査の周波数は、第1の固有周波数内で少なくとも約1テラHz、および/または第2の固有周期内で多くとも100GHzまで変えられる。第2の周期は、第1の周期の約1/10より短くてもよい。 In accordance with yet another exemplary embodiment of the present invention, the first natural period may be about 100 microseconds shorter than the second natural period. The frequency of the first and / or second electromagnetic radiation scan is varied at least about 1 teraHz within the first natural frequency and / or up to 100 GHz within the second natural period. The second period may be shorter than about 1/10 of the first period.
本発明のこれらおよび他の目的、特性および利点は、添付の特許請求の範囲と合わせて以下の本発明の実施形態の詳細な説明を読むことで明らかになるであろう。 These and other objects, features and advantages of the present invention will become apparent upon reading the following detailed description of the embodiments of the invention in conjunction with the appended claims.
本発明のさらなる目的、特性および利点は、本発明の例示的な実施形態を示す図面と合わせて以下の詳細な説明から明らかになるであろう。 Further objects, features and advantages of the present invention will become apparent from the following detailed description, taken in conjunction with the drawings which illustrate exemplary embodiments of the invention.
別段の説明がない限りは、これらの図面を通して同じ符合や文字が、例示した実施形態について同様の特徴、要素、部品または例示した実施形態の一部を示すために用いられる。さらに、図面を参照して本発明を詳細に説明するが、これは例示した実施形態と関連して行う。添付の特許請求の範囲に示したように、本発明の実際の範囲および趣旨から逸脱せずに説明した実施形態に対して、変更および改変がなされることは意図される。 Unless otherwise described, the same reference numbers and letters are used throughout these drawings to indicate similar features, elements, parts or portions of the illustrated embodiment for the illustrated embodiment. Further, the present invention will be described in detail with reference to the drawings, which are performed in connection with the illustrated embodiment. It is intended that changes and modifications be made to the embodiments described without departing from the actual scope and spirit of the invention as set forth in the appended claims.
図1は、例示的な従来のOFDIシステムのブロック図を例示し、このシステムは、S.H.Yunら「High−speed optical frequency−domain imaging」,Opt.Express11,2953−2963(2003年)に記載されるように光源10、光ファイバ干渉計、および検出構成部を備える。光源10によって与えられる電磁放射の出力波長は、スペクトル領域にわたる時間に掃引され得る。好ましくは、チューニング(例えば出力波数k)が時間の線形関数として与えられる。しかしながら、通常、kは、時間の非線形関数として与えられてもよく、非線形性は信号処理において補正されてもよい。干渉計は、シングルモード光ファイバからなる融合カプラ20を備えてもよい。カプラ20の1つのポートは、参照ミラー24を備える参照アーム22として役立ち得る。カプラ20のもう1つのポートは、プローブ40に連結されるサンプルアーム30として作動し得る。プローブ40は、概して、サンプル44を行き来するそれぞれのサンプル光42に焦点を合わせて集める。例えば、光源10の出力は、単独で偏光され得る。
FIG. 1 illustrates a block diagram of an exemplary conventional OFDI system, which is an S.I. H. Yun et al., “High-speed optical frequency-domain imaging”, Opt. As described in Express 11, 2953-2963 (2003), it comprises a
偏光制御装置50を、ミラー24から戻ってくる参照光と組織44から戻ってくるサンプル光との間の偏光状態を調整するために使用してもよい。参照光とサンプル光との間の干渉信号を、光検出器60を使用して測定することができる。検出信号は、アナログ−デジタルボード70でデジタル化され得、コンピューター72で処理され得、画像に変換され得る。検出器の出力は時間内に均一に抽出され得、抽出データの補間が演算されて、離散フーリエ変換の前に線形k空間において干渉信号が生成される。あるいは、検出信号は、不均一な抽出の時間間隔でk空間において直線的に抽出され得る。画像内の軸線(Aライン)は、光源10の各波長スキャンの間に獲得されるデジタルデータの離散フーリエ変換によって取得することができる。プローブビーム42はサンプル44の上を横方向に走査するため、複数のAラインを獲得することによって断面像を生成することができる。単一の光検出器60の使用によって、主に、サンプル光における偏光成分は、検出され得る参照偏光状態に調整されやすくなる。一方で、直交偏光成分は損失されやすくなる。しかしながら、偏波ダイバーシティはこの問題を解決することができる。
The
図2は、偏波ダイバーシティスキームを使用する別の従来のOFDIシステムを示し、この図に与えられる同じ参照番号は、上記の図1に関して記載した部品/特性と関連する。この従来のシステムはさらに、音響光学周波数シフタ100、102および磁気光学サーキュレータ106、108を備える。周波数シフタ100、102のうちの1つは、必要でなくてもよい。周波数シフタ100、102は、正の深さと負の深さとの間の干渉信号における曖昧性を除去することができ、深さの範囲を効果的に増大させる。参照ミラー24およびサンプル44から戻ってくる光は、50/50融合カプラを用いて合成され得る。偏波ダイバーシティ検出は、点線で囲んだ部分120に示される。カプラ20の各出力ポートは、偏光制御装置136および/または138を介して偏光ビームスプリッタ130および/または132に連結され得る。偏光制御装置136、138は、カプラからの2つのファイバチャネルの複屈折が、偏光スプリッタ130、132においてほぼ等しい割合で参照光に適合することを可能にする。偏光状態を対応させた後、(xまたはyで示した)スプリッタは2つの平衡検出器140、142に方向付けられ得る。検出器信号は低域周波数を通過させ得、2つのチャネルのアナログ−デジタルボード150およびコンピューター152でデジタル化され得る。2つのチャネルデータは独立して処理されて2つの強度画像を与え得る。2つの画像は、非常に抑制された偏光誘導アーチファクトを有する偏光分岐画像を生成するために加算されてもよい。
FIG. 2 shows another conventional OFDI system using a polarization diversity scheme, where the same reference numbers given in this figure are associated with the components / characteristics described with respect to FIG. 1 above. This conventional system further comprises acousto-
偏光感応性OCTは、米国特許第6,208,415号明細書に記載されるように、コントラストとして組織の複屈折を用いて組織の少なくとも一部分の断面像を取得するために用いられ得る技術である。例えば、使用され得る偏光モジュレータは、ポアンカレ球において互いに直交する2つの状態の間のサンプルに入る光の偏光状態を変え、本明細書中の以下において「半直交」偏光状態と言及される。一組の2つの状態の例は、互いに対して45度の角度で直線偏光状態になり得る(例えば、XおよびX+Yの状態)。2つの入力偏光状態のうちの少なくとも1つは、組織の複屈折軸に配置され、深さに依存する複屈折の測定を容易にする。PS−OCTの原理および信号処理アルゴリズムは、当該分野において周知である。 Polarization-sensitive OCT is a technique that can be used to obtain a cross-sectional image of at least a portion of tissue using tissue birefringence as contrast, as described in US Pat. No. 6,208,415. is there. For example, polarization modulators that can be used change the polarization state of light entering a sample between two states that are orthogonal to each other in the Poincare sphere, and are referred to hereinbelow as "semi-orthogonal" polarization states. An example set of two states can be in a linear polarization state at an angle of 45 degrees relative to each other (eg, X and X + Y states). At least one of the two input polarization states is placed on the birefringence axis of the tissue to facilitate depth dependent birefringence measurements. The principles of PS-OCT and signal processing algorithms are well known in the art.
米国特許第6,208,415号明細書に提供されるような掃引レーザーを用いて、J.Zhangら、「Full range polarization−sensitive Fourier domain optical coherence tomography」,Optics Express12,6033−6039(2004年)に記載されるように、同様の技術がOFDIシステムで使用され得る。例えば、図3Aは、上記で参照したZhangの公報に記載される別の従来のシステムのブロック図を示し、この図に示される同じ参照番号は、図1および図2についての上記の部品/特性と関連する。例えば、電気光学偏光モジュレータ170は、光源アーム30に配置され得る。図3Bに例示したように、この構成部170は、2つの「半直交」偏光状態の間の時間内に光源の偏光状態を周期的に変調することができる。変調周期は、波長走査と同期化され得る。検出ポートは、偏光ビームスプリッタ180および2つ以上の光検出器190、192を備えてもよい。参照光の偏光状態は、偏光制御装置50を用いて制御され得、偏光スプリッタ180において参照物を等しい強度に分ける。干渉信号は、2つのチャネルのアナログ−デジタル変換器およびコンピューター152で収集され得る。完全な偏光変調周期の間の連続的な偏光測定の各組は、当該分野において公知のベクター解析を介してサンプルの単一の軸複屈折プロファイルを形成し得る。この例示的な技術の1つの欠点は、スペックル誘導誤用を回避するために、2つのAライン走査の間のサンプルにおいてプローブビームの実質的なオーバーラップを信頼することである。さらに、Aラインスキャンの間の比較的長い遅延に起因して、このような技術は、サンプルまたはカテーテルの機械的な動きに感応され得る。
Using a swept laser as provided in US Pat. No. 6,208,415, J. Org. Zhang et al., "Full range polarization-sensitive Fourier domain optical coherence tomography", Optics Express 12, 6033-6039 (2004), as described in F. For example, FIG. 3A shows a block diagram of another conventional system described in the Zhang publication referred to above, where the same reference numbers shown in this figure refer to the parts / characteristics described above for FIGS. Related to. For example, the electro-optic polarization modulator 170 can be disposed on the
従って、複屈折の測定における精度と画像取得速度との間の平衡を測定することは有益であり、他の欠点を扱うことができる。 Therefore, it is beneficial to measure the balance between accuracy in birefringence measurement and image acquisition speed, and other drawbacks can be addressed.
本発明の1つの例示的な実施形態に従って、少なくともいくらかの上記の欠点は克服することができ、高速OFDI適用において利点がある。例えば、各Aラインスキャンの間にプローブビームの偏光状態を変調することは利点があり得る。図4は、概念を示す。図4のグラフに示すように、プローブビームの偏光状態は、2つの状態(例えば、互いに半直交)の間で周期的に変化することができる。変調周波数は、実質的に、波長掃引またはAラインスキャンの周波数より高くなり得る。変調周波数は、好ましくは、抽出率の半分または4分の1であり得、それによって、2つの近接するサンプルは、プローブビームの2つの異なる偏光状態と関連してもよい。 In accordance with one exemplary embodiment of the present invention, at least some of the above disadvantages can be overcome and have advantages in high speed OFDI applications. For example, it may be advantageous to modulate the polarization state of the probe beam during each A-line scan. FIG. 4 illustrates the concept. As shown in the graph of FIG. 4, the polarization state of the probe beam can periodically change between two states (eg, semi-orthogonal to each other). The modulation frequency can be substantially higher than the frequency of the wavelength sweep or A-line scan. The modulation frequency may preferably be half or a quarter of the extraction rate, so that two adjacent samples may be associated with two different polarization states of the probe beam.
図4Bは、別の可能性のある例示的な変調フォーマット(すなわち、正弦波変調)のグラフを示す。偏光状態は、ポアンカレ球の円の後に、Xの状態とYの状態の間に変化させることができる。この例示的な場合において、変調周波数は抽出率の4分の1であり得る(1つの変調周期の間に4サンプルを獲得することができる)。図4Cのグラフに示すように、4サンプルの最初のセットは1から1’’’まで、次のセットは2から2’’’まで、そして最後のセットはNからN’’’までで示されることができ、波長掃引または単一のAライン走査の周期の間に合計で4Nのサンプルが獲得されると仮定する。図5に示す本発明に従う方法の例示的な実施形態のフローチャートに例示したように、このセットは、4グループ(1,2...,N),(1’,2’..,N’),(1’’,2’’..,N’’),(1’’’,2’’’..,N’’’)で復調され得る。その結果、強度画像および/または複屈折画像を提供することができる。例えば、復調は、時間領域または周波数領域において実施することができる。各グループは処理されて、異なる偏光状態に関連する画像を作成する。公知のベクター解析により、複屈折の大きさ、複屈折軸、および減衰の空間地図が決定され得る。 FIG. 4B shows a graph of another possible exemplary modulation format (ie, sinusoidal modulation). The polarization state can be changed between the X state and the Y state after the Poincare sphere circle. In this exemplary case, the modulation frequency may be a quarter of the extraction rate (4 samples can be acquired during one modulation period). As shown in the graph of FIG. 4C, the first set of 4 samples is shown from 1 to 1 ′ ″, the next set is shown from 2 to 2 ′ ″, and the last set is shown from N to N ′ ″. Assume that a total of 4N samples are acquired during the period of wavelength sweep or single A-line scan. As illustrated in the flow chart of the exemplary embodiment of the method according to the present invention shown in FIG. 5, this set consists of four groups (1, 2,. ), (1 ″, 2 ″... N ″), (1 ′ ″, 2 ′ ″... N ′ ″). As a result, an intensity image and / or a birefringence image can be provided. For example, demodulation can be performed in the time domain or frequency domain. Each group is processed to create images associated with different polarization states. By known vector analysis, a spatial map of birefringence magnitude, birefringence axis, and attenuation can be determined.
本発明の例示的な実施形態に従うこの例示的な方法および技術は、適切な電圧分配器を備える偏光モジュレータ170を操作することによって実行され得る。例えば、共鳴電気光学モジュレータが、正弦波変調のために使用され得る。図6は、偏光変調についての代替のスキームを示す。図6Aは、サンプルアーム30において受動型複屈折遅延200を利用する本発明に従うシステムの例示的な実施形態のブロック図を示し、この図に示される同じ参照番号は、図1および図2についての上記の部品/特性と関連する。例示的な複屈折遅延200は、2つ以上の偏光ビームスプリッタ210、212を備えることができる光ファイバ干渉計および/または自由空間干渉計を備えてもよい。アーム220、222の偏光状態は、互いに直交してもよい。
This exemplary method and technique in accordance with an exemplary embodiment of the present invention may be performed by operating a polarization modulator 170 with a suitable voltage divider. For example, a resonant electro-optic modulator can be used for sinusoidal modulation. FIG. 6 shows an alternative scheme for polarization modulation. FIG. 6A shows a block diagram of an exemplary embodiment of a system according to the present invention that utilizes a
この例示的な構成部は、光源の波長が変化するため、効果的な偏光変調を生じることができる。アーム210と212との間の遅延、ΔLは、方程式ΔL*Δk=π/mを満たすように選択され得、ここで、Δkは、2つの近接するサンプルまたはスペクトルの間隔の間の波数の差異を示し、mは整数である。整数でないmの値も可能であり、周波数領域の復調を使用することができる。しかしながら、好ましくは、例えば、m=1または2である。本発明の別の例示的な実施形態に従って、複屈折遅延は、ΔL=Δn*Lを有する高複屈折光ファイバの一部であり得、ここで、Δnは、2つの固有偏光状態の間の屈折率の差を示し、Lはファイバの長さである。複屈折遅延に対する入力偏光状態は、遅延構成部の各固有状態が等価電力で作動されるように調節され得る。図6Bは、光ファイバ干渉計を備える本発明に従う偏光変調構成部の別の例示的な実施形態の図を示す。例えば、図6B(図6Aの複屈折遅延200について使用される)に示す偏光制御装置240、242は、互いに2つのアームの半直交の偏光状態を作製するために調節され得る。2つの半直交状態の間の遅延は、好ましくは、ΔL*Δk=π/2を満たす。
This exemplary component can produce effective polarization modulation because the wavelength of the light source changes. The delay between
図6Aおよび6Bに示される例示的な実施形態において、偏光調節は、2つの偏光状態の間の群遅延を誘発することによって達成され得る。掃引光源10のコヒーレンス長さが有限である場合、しばしば、これらの例示的な構成部が、有意なシグナル対ノイズ比(SNR)の減少を生じ得るという場合があり得る。なぜなら、可視性は光学遅延とともに減少するからである。この問題を扱うために、群遅延に依存せず、変わりに位相遅延を考慮する本発明のさらに別の例示的な実施形態に従う偏光調節構成部が使用され得る。例えば、図3に示すように電気光学変調構成部は、本質的にゼロ、または非常に小さな群遅延を誘発するように本発明に従って使用され得る。
In the exemplary embodiment shown in FIGS. 6A and 6B, polarization adjustment can be achieved by inducing a group delay between the two polarization states. If the coherence length of the swept
図6Cは本発明のさらに別の例示的な実施形態を示し、図6Aの複屈折遅延200について使用される2つの偏光状態の間の連続的な位相遅延を誘発するように音響光学周波数シフタ250、252を使用する。例えば、図6Cに示されるように、別の周波数シフタ254が、参照アーム22に使用され得る。図6Cの構成部を使用する例示的な操作方法は、以下の通りであり得る:(a)周波数シフタ250は、f_s/8によりアップシフトを生じ得、ここで、f_sはサンプリング率である。シフタ252は、f_s/4によりアップシフトを生成し得、参照シフタ254は、ゼロ周波数シフトを生じ得る;そして/または(b)装置250、252、254による周波数シフトの大きさは、それぞれ、ゼロ、+f_s/8、および−f_s/8である。例えば、2つの異なる偏光状態に関する2つの画像は、フーリエ領域において分離され得、さらに複屈折の情報または画像を取得するために処理され得る。本発明に従う他の任意の例示的な処理手順は、周波数領域逆多重化の前に、バックグラウンド除去法、補間、ウィンドウイングまたは振幅補正を包含することができる。信号は、必要に応じて、収集に起因する任意のアーチファクトを除去するために、さらに補正され得る。この方法において、変調構成部における周波数シフタまたは2つのアーム間の正確な経路長差に起因する信号間の位相変化を扱うことができる。
FIG. 6C illustrates yet another exemplary embodiment of the present invention, and an acousto-
図6Dは、2つの偏光状態の間の連続的な位相遅延を誘発するように音響光学周波数シフタ250、252を使用する本発明のさらに別の例示的な実施形態を示し、これは、図6Aの複屈折遅延200について使用され得る。別の周波数シフタ254が、参照アーム22において使用され得る。構成部/システムのこの例示的な実施形態の例示的な部分は、互いに直交する偏光状態を有する2つのビームx、yを入力ビームに分けるように第1の偏光ビームスプリッタ256を利用することができる。周波数シフタ250、252を通った後、2つのビームx、yは、第2の偏光ビームスプリッタ258を用いて合成される。この装置の合成された光出力は、波長または時間に応じて迅速に偏光を変化させる。上記の段落に記載したような同様の方法が、干渉信号を復調するために使用され得る。復調は、時間領域または周波数領域のいずれかにおいて実行され得る。
FIG. 6D illustrates yet another exemplary embodiment of the present invention that uses acousto-
1つより多い偏光基材において干渉信号を検出するための種々の構造は、当該分野において公知である。これらの構造は、偏光ビームスプリッタおよび複数の検出器を使用することができる。参照ビームは、検出器内で例えば等価電力に分けられ得る。光源および自己干渉ノイズの強度ノイズを抑制するために二重の平衡検出を実行することが可能である。偏光感応性および2重の平衡検出を同時に発生させるための種々のファイバおよび自由空間に基づいたスキームは、当該分野において公知である。 Various structures for detecting interference signals in more than one polarizing substrate are known in the art. These structures can use polarizing beam splitters and multiple detectors. The reference beam can be divided into, for example, equivalent power in the detector. It is possible to perform double equilibrium detection to suppress the intensity noise of the light source and self-interference noise. Various fiber and free space based schemes for simultaneously generating polarization sensitive and double balanced detection are known in the art.
上記のように、OFDI技術および構成部を用いて、平衡検出技術を実行することが所望され得る。しかしながら、平衡検出技術は、偏光感応性および偏波ダイバーシティのファイバ実行を複雑にし得る。これは、平衡検出技術および構成部を用いるからであり、平衡状態である2つの信号チャネルは、異なる偏光状態を有し得る。 As described above, it may be desirable to perform an equilibrium detection technique using OFDI techniques and components. However, balanced detection techniques can complicate polarization sensitive and polarization diversity fiber implementations. This is because it uses balanced detection techniques and components, and two signal channels that are in a balanced state may have different polarization states.
図7は、1つより多い信号伝播チャネルを有する平衡検出構成部/システムの第1の例示的な実施形態のブロック図を示し、さらなる詳細において単一の伝播チャネルを有する平衡検出技術/構成部を用いる不都合な点を示す。例えば、光源10から放出される電磁放射または光は、偏光制御装置400に接続され得るかまたは転送され得、この偏光制御装置400は、必要に応じて、偏光モジュレータおよび/または複屈折材料405(および/または図6Bもしくは6Cに示される実施形態の部分)に接続され得る。サーキュレータ106は、必要に応じて、偏光モジュレータおよび/または複屈折材料410(および/または図6Bもしくは6Cに示されるような例示的な実施形態の1つ以上の部分)に電磁放射/光を方向付け得る。融合カプラ20は、任意の偏光モジュレータおよび/または複屈折材料412(および/または図6Bもしくは6Cに示されるような例示的な実施形態の1つより多い部分)によってサンプルアーム30に電磁放射/光を方向付け得、そして可変減衰器および/または偏光制御装置430を有する参照アーム22に電磁放射/光を方向付け得る。
FIG. 7 shows a block diagram of a first exemplary embodiment of a balanced detection component / system having more than one signal propagation channel, and in more detail a balanced detection technique / component having a single propagation channel The disadvantages of using are shown. For example, electromagnetic radiation or light emitted from the
融合カプラ420は、サンプルアーム30および参照アーム22から生じる電磁放射/光を合成し得、この合成された信号/光/放射を、平衡検出のための2つの部分A、Bに分割する。偏光ビームスプリッタ130、132は、合成された信号/光/放射を平衡検出器のチャネル対D1(140)、D2(142)に分割し得る。セクションA、Bの両方は、逆位相を有する参照アーム22およびサンプル30の干渉信号を伝播し得る。セクションA、Bに続いて与えられ得る偏光スプリッタは、それぞれ、直交偏光において参照信号を分割する。理想的な例示の場合において、平衡検出チャネル(D1)140は、逆位相および等しい偏光状態を有する干渉信号を平衡にし得る。同様のことが、平衡検出チャネル(D2)142について起こり得る。しかしながら、セクションA、Bが異なるセクションA、Bにおける偏光状態において変化を可能にすることに起因して、平衡検出チャネル(D1)140、(D2)142は、等しくない偏光状態を平衡にし得る。
The
図7および上記に例示するように、本明細書中で異なる平衡状態を被らない平衡検出器の構成部/システム/技術が所望され得る。例えば、図8〜16および関連する以下の説明は、平衡検出器の構成部/システム/技術の種々の例示的な実施形態を例示および記載し、ここで、チャネルは、2つの信号伝播チャネルによって平衡にされる必要はなく、単一の信号伝播チャネルおよび参照チャネルによって可能にされる。これらの例示的な平衡検出器の実施形態において、光源からの相対強度ノイズは、このような例示的な構成部/システム/技術によって抑制され得る。 As illustrated in FIG. 7 and above, balanced detector components / systems / techniques that do not suffer from different balanced conditions herein may be desired. For example, FIGS. 8-16 and the following description related thereto illustrate and describe various exemplary embodiments of balanced detector components / systems / techniques, where the channel is represented by two signal propagation channels. It does not need to be balanced and is enabled by a single signal propagation channel and reference channel. In these exemplary balanced detector embodiments, relative intensity noise from the light source may be suppressed by such exemplary components / systems / technologies.
例えば、単一の信号伝播チャネルを有する平衡検出の構成部/システムの第2の例示的な実施形態のブロック図を示す図8において、光源10は偏光制御装置400に接続され得、この偏光制御装置400は、任意の偏光モジュレータおよび/または複屈折材料405(および/または図6Bもしくは6Cに示される例示的な実施形態の部分)に接続される。電磁放射/光は、サーキュレータ106に方向付けられ得、このサーキュレータ106は、電磁放射/光を融合カプラ20に方向付け得、この融合カプラ20は、電磁放射/光をサンプルアーム30および参照アーム22に分割し得る。サンプルアーム30からの電磁放射/光は、融合カプラ20を通って往復し得る。この融合カプラ20は、サンプルアーム30から反射される電磁放射/光を干渉し得、サーキュレータ106によって、電磁放射/光を直交状態に分割する偏光制御装置400および偏光スプリッタ440に方向付ける。干渉縞は、平衡検出器(D1)140、(D2)142によって検出され得る。
For example, in FIG. 8, which shows a block diagram of a second exemplary embodiment of a balanced detection component / system having a single signal propagation channel, the
参照アーム22の電磁放射/光は、より大きなフラクションを偏光子460に方向付け得る融合カプラ450に接続され得る。反射の際に、電磁放射/光はさらなる偏光子460および別の融合カプラ450を通って往復し得、サンプルアーム30と一緒に干渉のために融合カプラ20に接続する参照アーム部分に分割され得る。他の部分は、平衡検出器についての非信号伝播参照チャネルであり得、この平衡検出器は、可変減衰器および/または偏光制御装置430に方向付けられ得、平衡受信機(D1)140、(D2)142についての平衡信号を形成し得る。図8に示すように、平衡受信機は、1つの信号伝播チャネルおよび信号を伝播しない1つの参照チャネルを受信するが、光源10の電磁放射/光の相対強度ノイズを平衡にし得る。
The electromagnetic radiation / light of the
単一の信号伝播チャネルを有する平衡検出器の構成部/システムの第3の例示的な実施形態のブロック図を示す図9において、融合カプラ450の代替ポートは、非信号伝播参照チャネルのために使用され得る。 In FIG. 9, which shows a block diagram of a third exemplary embodiment of a balanced detector component / system having a single signal propagation channel, the alternate port of the fusion coupler 450 is for a non-signal propagation reference channel. Can be used.
単一の信号伝播チャネルを有する平衡検出器の構成部/システムの第4の例示的な実施形態のブロック図を示す図10において、非信号伝播参照チャネルは、サーキュレータ106の前に配置され得るさらなる融合カプラ470によって取得され得る。
In FIG. 10, which shows a block diagram of a fourth exemplary embodiment of a balanced detector component / system having a single signal propagation channel, a non-signal propagation reference channel may be placed in front of the
単一の信号伝播チャネルを有する平衡検出器の構成部/システムの第5の例示的な実施形態のブロック図を示す図11において、非信号伝播参照チャネルは、サーキュレータ106の後に配置され得るさらに別の融合カプラ480によって取得され得る。
In FIG. 11, which shows a block diagram of a fifth exemplary embodiment of a balanced detector component / system having a single signal propagation channel, the non-signal propagation reference channel may be placed after the
単一の信号伝播チャネルを有する平衡検出器の構成部/システムの第6の例示的な実施形態のブロック図を示す図12において、非信号伝播参照チャネルは、偏光モジュレータおよび/または複屈折材料405(および/または図6Bもしくは6Cに示される例示的な実施形態の部分)の前に配置され得るさらに別の融合カプラ490によって取得され得る。
In FIG. 12, which shows a block diagram of a sixth exemplary embodiment of a balanced detector component / system having a single signal propagation channel, the non-signal propagation reference channel is a polarization modulator and / or
図13は、単一の信号伝播チャネルおよび無反射参照アームを有する平衡検出器の構成部/システムの第7の例示的な実施形態のブロック図を示す。この例示的な実施形態において、融合カプラ500は、参照アーム22からの電磁放射/光を、減衰器および/または偏光調節装置430に方向付けられる非信号伝播参照物、ならびに偏光制御装置400およびさらなる融合カプラ510に方向付けられる参照部分に分割し得る。これは、単一の信号伝播チャネルおよび参照アーム22とサンプルアーム30の干渉からの無反射参照物/光を有する平衡検出器の構成部/システムの第7の例示的な実施形態のブロック図である。
FIG. 13 shows a block diagram of a seventh exemplary embodiment of a balanced detector component / system having a single signal propagation channel and a non-reflective reference arm. In this exemplary embodiment,
図14は、単一の信号伝播チャネルおよび無反射参照アームを有する平衡検出器の構成部/システムの第8の例示的な実施形態のブロック図を示し、ここで、非信号伝播参照チャネルは、サーキュレータ106の前に配置され得る融合カプラ470によって取得される。
FIG. 14 shows a block diagram of an eighth exemplary embodiment of a balanced detector component / system having a single signal propagation channel and a non-reflective reference arm, where the non-signal propagation reference channel is Acquired by a fusion coupler 470 that may be placed in front of the
図15は、単一の信号伝播チャネルおよび無反射参照アームを有する平衡検出器の構成部/システムの第9の例示的な実施形態のブロック図を示す。例えば、非信号伝播参照チャネルは、サーキュレータ106の後に配置され得る融合カプラ480によって取得され得る。
FIG. 15 shows a block diagram of a ninth exemplary embodiment of a balanced detector component / system having a single signal propagation channel and a non-reflective reference arm. For example, the non-signal propagation reference channel may be acquired by a fusion coupler 480 that may be placed after the
図16は、単一の信号伝播チャネルおよび無反射参照アームを有する平衡検出器の構成部/システムの第10の例示的な実施形態のブロック図を示す。この例示的な実施形態における非信号伝播参照チャネルは、偏光モジュレータおよび/または複屈折材料405(および/または図6Bもしくは6Cに示される例示的な実施形態の部分)の前に配置され得る融合カプラ490によって取得され得る。 FIG. 16 shows a block diagram of a tenth exemplary embodiment of a balanced detector component / system having a single signal propagation channel and a non-reflective reference arm. The non-signal propagation reference channel in this exemplary embodiment may be placed in front of a polarization modulator and / or birefringent material 405 (and / or part of the exemplary embodiment shown in FIG. 6B or 6C). 490.
本発明のさらに別の例示的な実施形態に従って、ほとんどまたは全ての通信が、自由空間伝播を通して、または光ファイバ(例えばシングルモードファイバ)によって提供され得る。 According to yet another exemplary embodiment of the present invention, most or all communication may be provided through free space propagation or by optical fiber (eg, single mode fiber).
上述は、単に、本発明の原理を例示しているだけである。記載された実施形態に対する種々の改変および代替物は、本明細書中の教示を考慮して当業者には明らかであろう。実際に、本発明の例示的な実施形態に従う構成部、システムおよび方法は、任意のOCTシステム、OFDIシステム、SD−OCTシステムまたは他の画像化形成システム、例えば上記の2004年9月8に出願された国際特許出願番号PCT/US2004/029148明細書、2005年11月2日に出願された米国特許出願第11/266,779号明細書、および2004年7月9日に出願された米国特許出願第10/501,276号明細書に記載されたものを用いて使用され得、それらの開示は、その全体が本明細中に参照として援用される。従って、当業者はまた、本明細書中に明確に提示または説明されていなくても、多数のシステム、構成部および方法を考案し、本発明の原理を具現化するこが可能であり、それらが本発明の趣旨および範囲内に含まれることは理解されるだろう。さらに、上記の本明細書中の参照によって明確に援用されていない先行技術の知識は、ある程度まで本明細書中にその全体が明確に援用される。本明細書中に参照された全ての文献は、その全体が本明細書中に参照として援用される。 The foregoing merely illustrates the principles of the invention. Various modifications and alternatives to the described embodiments will be apparent to those skilled in the art in view of the teachings herein. Indeed, the components, systems and methods according to exemplary embodiments of the present invention may be applied to any OCT system, OFDI system, SD-OCT system or other imaging forming system, such as the above-mentioned September 8, 2004. International Patent Application No. PCT / US2004 / 029148, US Patent Application No. 11 / 266,779 filed on November 2, 2005, and US Patent filed on July 9, 2004 Applications may be used with those described in application Ser. No. 10 / 501,276, the disclosures of which are hereby incorporated by reference in their entirety. Accordingly, those skilled in the art can also devise numerous systems, components and methods, and embody the principles of the present invention, even if not explicitly presented or described herein. Should be understood to be included within the spirit and scope of the invention. Further, prior art knowledge not expressly incorporated by reference herein above is expressly incorporated herein in its entirety to some extent. All documents referred to in this specification are hereby incorporated by reference in their entirety.
Claims (46)
第2の固有周期の時間にわたって前記第1の電磁放射、前記第2の電磁放射、第3の電磁放射または第4の電磁放射のうちの少なくとも1つの偏光状態を繰り返し変化させるように構成される少なくとも1つの第2の構成部と、
前記偏光状態に応じて前記サンプルの少なくとも一部分を画像化するためのデータを与えるように構成される少なくとも1つの第3の構成部と、を備える装置であって、前記第3の電磁放射は前記少なくとも1つの第1の放射と関連し、前記第4の電磁放射は前記少なくとも1つの第2の電磁放射と関連し、前記第2の周期は前記第1の周期より短い、装置。 At least one first component providing at least one first electromagnetic radiation to the sample and providing at least one second electromagnetic radiation to the reference, provided by said at least one first component The radiation frequency is at least one first component that varies repeatedly over a time of a first natural period;
Configured to repeatedly change a polarization state of at least one of the first electromagnetic radiation, the second electromagnetic radiation, the third electromagnetic radiation, or the fourth electromagnetic radiation over a time of a second natural period. At least one second component;
At least one third component configured to provide data for imaging at least a portion of the sample in response to the polarization state, wherein the third electromagnetic radiation is the The apparatus associated with at least one first radiation, wherein the fourth electromagnetic radiation is associated with the at least one second electromagnetic radiation, and wherein the second period is shorter than the first period.
第2の偏光状態において前記第3の電磁放射と前記第4の電磁放射との間に第2の干渉信号を検出するように構成される少なくとも1つの第5の構成部と、をさらに備え、前記第1の偏光状態および前記第2の偏光状態は互いに異なる、請求項1に記載の装置。 At least one fourth component configured to detect a first interference signal between the third radiation and the fourth radiation in a first polarization state;
At least one fifth component configured to detect a second interference signal between the third electromagnetic radiation and the fourth electromagnetic radiation in a second polarization state; The apparatus of claim 1, wherein the first polarization state and the second polarization state are different from each other.
第3の電磁放射と第4の電磁放射とを合成するように構成される少なくとも1つの導波管の第2の構成部であって、前記サンプルの少なくとも一部分の軸反射率プロファイルを測定するために、前記第3の電磁放射および前記第4の電磁放射は、それぞれ、前記第1の電磁放射および前記第2の電磁放射と関連する、少なくとも1つの導波管の第2の構成部と、
第2の固有周期の時間にわたって前記第1の電磁放射、前記第2の電磁放射、前記第3の電磁放射または前記第4の電磁放射のうちの少なくとも1つの偏光状態を繰り返し変化させるように構成される少なくとも1つの第3の構成部と、
前記偏光状態に応じて前記サンプルの少なくとも一部分を画像化するためのデータを与えるように構成される、少なくとも1つの第4の構成部と、を備える装置であって、前記第2の周期は前記第1の周期より短い、装置。 At least one first component providing at least one first electromagnetic radiation to the sample and providing at least one second electromagnetic radiation to the reference, provided by said at least one first component The radiation frequency is at least one first component that varies repeatedly over a time of a first natural period;
A second component of at least one waveguide configured to combine third and fourth electromagnetic radiation for measuring an axial reflectance profile of at least a portion of the sample; And wherein the third electromagnetic radiation and the fourth electromagnetic radiation are respectively a second component of at least one waveguide associated with the first electromagnetic radiation and the second electromagnetic radiation;
Configured to repeatedly change a polarization state of at least one of the first electromagnetic radiation, the second electromagnetic radiation, the third electromagnetic radiation, or the fourth electromagnetic radiation over a second natural period of time At least one third component to be
At least one fourth component configured to provide data for imaging at least a portion of the sample in response to the polarization state, wherein the second period is the Device shorter than the first period.
第2の偏光状態において前記第3の電磁放射と前記第4の電磁放射との間に第2の干渉信号を検出するように構成される、少なくとも1つの第6の構成部と、をさらに備え、前記第1の偏光状態および前記第2の偏光状態は、互いに異なる、請求項21に記載の装置。 At least one fifth component configured to detect a first interference signal between the third radiation and the fourth radiation in a first polarization state;
And at least one sixth component configured to detect a second interference signal between the third electromagnetic radiation and the fourth electromagnetic radiation in a second polarization state. The apparatus of claim 21, wherein the first polarization state and the second polarization state are different from each other.
少なくとも1つの第1の電磁放射を前記サンプルに与え、少なくとも1つの第2の電磁放射を参照物に与える工程であって、前記第1の放射および前記第2の放射のうちの少なくとも1つの周波数は、第1の固有周期の時間にわたって繰り返し変化する、工程と、
第2の固有周期の時間にわたって前記第1の電磁放射、前記第2の電磁放射、第3の電磁放射または第4の電磁放射のうちの少なくとも1つの偏光状態を繰り返し変化させる工程と、
前記偏光状態に応じて前記サンプルの少なくとも一部分を画像化するためのデータを提供する工程と、を包含する方法であって、前記第3の電磁放射は、前記少なくとも1つの第1の放射と関連し、前記第4の電磁放射は、前記少なくとも1つの第2の放射と関連し、前記第2の周期は前記第1の周期より短い、方法。 A method for providing data about a sample, the method comprising:
Providing at least one first electromagnetic radiation to the sample and providing at least one second electromagnetic radiation to a reference, the frequency of at least one of the first radiation and the second radiation. Is a process that repeatedly changes over time of a first natural period;
Repeatedly changing the polarization state of at least one of the first electromagnetic radiation, the second electromagnetic radiation, the third electromagnetic radiation, or the fourth electromagnetic radiation over a time of a second natural period;
Providing data for imaging at least a portion of the sample in response to the polarization state, wherein the third electromagnetic radiation is associated with the at least one first radiation. And wherein the fourth electromagnetic radiation is associated with the at least one second radiation, the second period being shorter than the first period.
少なくとも1つの第1の電磁放射を前記サンプルに与え、少なくとも1つの第2の電磁放射を参照物に与える工程であって、少なくとも1つの第1の構成部によって与えられる放射周波数は、第1の固有周期の時間にわたって繰り返し変化する、工程と、
第3の電磁放射と第4の電磁放射とを合成する工程であって、前記サンプルの少なくとも一部分の軸反射率プロファイルを測定するために、前記第3の電磁放射および前記第4の電磁放射は、それぞれ、前記第1の電磁放射および前記第2の電磁放射と関連する、工程と、
第2の固有周期の時間にわたって前記第1の電磁放射、前記第2の電磁放射、前記第3の電磁放射または前記第4の電磁放射のうちの少なくとも1つの偏光状態を繰り返し変化させる工程と、
前記偏光状態に応じて前記サンプルの少なくとも一部分を画像化するための前記データを提供する工程と、を包含する方法であって、前記第2の周期は、前記第1の周期より短い、方法。 A method for providing data about a sample, the method comprising:
Providing at least one first electromagnetic radiation to the sample and providing at least one second electromagnetic radiation to a reference, wherein the radiation frequency provided by the at least one first component is: A process that repeatedly changes over time of the natural period; and
Combining the third electromagnetic radiation and the fourth electromagnetic radiation, wherein to measure the axial reflectance profile of at least a portion of the sample, the third electromagnetic radiation and the fourth electromagnetic radiation are: Respectively, associated with the first electromagnetic radiation and the second electromagnetic radiation;
Repeatedly changing the polarization state of at least one of the first electromagnetic radiation, the second electromagnetic radiation, the third electromagnetic radiation, or the fourth electromagnetic radiation over a time of a second natural period;
Providing the data for imaging at least a portion of the sample as a function of the polarization state, wherein the second period is shorter than the first period.
前記第1の電磁放射、前記第2の電磁放射、第3の電磁放射または第4の電磁放射のうちの少なくとも1つの偏光状態を時間とともに繰り返し変化させるように構成される少なくとも1つの第2の構成部と、
前記偏光状態に応じて前記サンプルの少なくとも一部を画像化するためのデータを提供するように構成される少なくとも1つの第3の構成部と、を備える装置であって、前記第3の電磁放射は前記少なくとも1つの第1の放射に関連し、前記第4の電磁放射は前記少なくとも1つの第2の放射に関連する、装置。 At least one first component providing at least one first electromagnetic radiation to the sample and providing at least one second electromagnetic radiation to the non-reflective reference, said at least one first component The applied radiation frequency is at least one first component that changes repeatedly over time;
At least one second configured to repeatedly change a polarization state of at least one of the first electromagnetic radiation, the second electromagnetic radiation, the third electromagnetic radiation, or the fourth electromagnetic radiation with time. A component;
At least one third component configured to provide data for imaging at least a portion of the sample in response to the polarization state, wherein the third electromagnetic radiation Wherein the fourth electromagnetic radiation is associated with the at least one second radiation and the fourth electromagnetic radiation is associated with the at least one second radiation.
少なくとも1つの第1の電磁放射を前記サンプルに与え、少なくとも1つの第2の電磁放射を無反射参照物に与える工程であって、前記第1の放射および前記第2の放射のうちの少なくとも1つの周波数は、時間とともに繰り返し変化する、工程と、
前記第1の電磁放射、前記第2の電磁放射、第3の電磁放射または第4の電磁放射のうちの少なくとも1つの偏光状態を時間とともに繰り返し変化させる工程と、
前記偏光状態に応じて前記サンプルの少なくとも一部分を画像化するためのデータを与える工程と、を包含する方法であって、前記第3の電磁放射は、前記少なくとも1つの第1の放射と関連し、前記第4の電磁放射は前記少なくとも1つの第2の放射と関連する、方法。 A method for providing data associated with a sample, the method comprising:
Providing at least one first electromagnetic radiation to the sample and providing at least one second electromagnetic radiation to an antireflective reference, wherein at least one of the first radiation and the second radiation. The two frequencies change over time, and the process
Repeatedly changing the polarization state of at least one of the first electromagnetic radiation, the second electromagnetic radiation, the third electromagnetic radiation, or the fourth electromagnetic radiation with time;
Providing data for imaging at least a portion of the sample in response to the polarization state, wherein the third electromagnetic radiation is associated with the at least one first radiation. The fourth electromagnetic radiation is associated with the at least one second radiation.
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EP2004041A1 (en) | 2008-12-24 |
WO2007118129A1 (en) | 2007-10-18 |
JP5135324B2 (en) | 2013-02-06 |
JP5536854B2 (en) | 2014-07-02 |
EP2564769B1 (en) | 2015-06-03 |
US20070236700A1 (en) | 2007-10-11 |
EP2004041B1 (en) | 2013-11-06 |
US7742173B2 (en) | 2010-06-22 |
CN101466298B (en) | 2011-08-31 |
CN101466298A (en) | 2009-06-24 |
EP2564769A1 (en) | 2013-03-06 |
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