JP2009521131A - 半導体装置とその形成方法 - Google Patents
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Abstract
Description
以下の詳細な説明は、事実上単なる模範であり、本発明又は本発明の適用と用途の限定を意図するものではない。更に、先の技術分野、背景、簡単な概略又は以下の詳細な説明に示される表示又は暗示理論によって拘束する意図はない。
エピタキシャル層はまた、半導体基板の第二層に隣接する第二導電型を有する第五半導体領域と、第五半導体領域に隣接する第二導電型の分離接触領域とを含むことができる。第一ドーパント型はP型であり、第二ドーパント型はN型である。
Claims (21)
- 第一ドーパント型を有する第一半導体層と、
前記第一半導体層上に設けられて第二ドーパント型を有する第二半導体層と、
前記第二半導体層上の第三半導体層と、
前記第二ドーパント型を有する前記第三半導体層内に設けられた第一半導体領域と、
前記第一半導体領域と前記第二半導体層との間の前記第三半導体層内に設けられて前記第一ドーパント型を有する第二半導体領域と、
前記第二半導体領域上の前記第三半導体層内に設けられて前記第一ドーパント型を有する第三半導体領域と、
前記第三半導体領域に隣接する前記第三半導体層内に設けられて第一濃度の前記第二ドーパント型を有する第四半導体領域と、
前記第三半導体領域に隣接すると共に前記第四半導体領域に隣接する前記第三半導体層内に設けられて第二濃度の前記第二ドーパント型を有し、前記第二濃度が前記第一濃度よりも高いソース接触領域と、
前記第一半導体領域の少なくとも一部の上方と前記第三半導体領域の少なくとも一部の上方とに設けられて前記第四半導体領域に隣接し、更に前記ソース接触領域と反対の前記第四半導体領域の側面に設けられたゲート電極と
を備える半導体装置。 - 請求項1記載の半導体装置において、
前記第三半導体領域は、前記第一半導体領域に隣接して設けられ、
前記第三半導体領域及び前記第一半導体領域はある距離によって離れている半導体装置。 - 請求項1記載の半導体装置において、
前記第三半導体領域は、前記第一半導体領域内に配置されている半導体装置。 - 請求項1記載の半導体装置において、
前記第二濃度は、前記第一濃度よりも少なくとも100倍高い半導体装置。 - 請求項2記載の半導体装置において、
前記第二濃度は、前記第一濃度よりも約1000倍高い半導体装置。 - 請求項5記載の半導体装置において、
前記第三半導体層は、更に、
前記第三半導体領域に隣接する前記第二ドーパント型を有するボディ接触領域と、前記第一半導体領域に隣接する前記第二ドーパント型を有するドレイン接触領域とを備える半導体装置。 - 請求項6記載の半導体装置において、
前記第三半導体層は、更に、前記第二半導体層に隣接し、かつ前記第二ドーパント型を有する第五半導体領域を備える半導体装置。 - 請求項7記載の半導体装置において、
前記第三半導体層は、更に、前記第五半導体領域に隣接し、かつ前記第二ドーパント型を有する分離接触領域を備える半導体装置。 - 請求項8記載の半導体装置において、
前記分離接触領域は、金属化により前記ドレイン接触領域に短絡されている半導体装置。 - 請求項8記載の半導体装置において、
前記分離接触領域は、金属化により前記ボディ接触領域に短絡されている半導体装置。 - 請求項8記載の半導体装置において、
前記分離接触領域は、電気的に浮遊されている半導体装置。 - 第一導電型の第一層と第二導電型の第二層とを有する半導体基板と、
前記基板上のエピタキシャル層であって、前記第二導電型の第一半導体領域と、前記第一半導体領域と前記半導体基板の前記第二層と間に前記第一導電型を有する第二半導体領域と、前記第二半導体領域の上方に前記第一導電型の第三半導体領域と、前記第三半導体領域に隣接する前記第二導電型の第四半導体領域と、前記第三半導体領域に隣接すると共に前記第四半導体領域に隣接する前記第二導電型のソース接触領域と、前記第三半導体領域に隣接する前記第二導電型のボディ接触領域と、前記第一半導体領域に隣接する前記第二導電型のドレイン接触領域とを有するエピタキシャル層と、
前記エピタキシャル層の前記第一半導体領域の少なくとも一部の上方と前記第三半導体領域の少なくとも一部の上方と設けられて、前記第四半導体領域に隣接し、更に前記ソース接触領域と反対の第四半導体領域の側面に存在するゲート電極と、
前記第四半導体領域及び前記ソース接触領域は前記第二導電型のドーパントでドープされ、前記第四半導体領域は第一濃度の前記ドーパントを有し、前記ソース接触領域は第二濃度の前記ドーパントを有し、前記第二濃度は前記第一濃度よりも高いマイクロ電子組立体。 - 請求項12記載のマイクロ電子組立体において、
前記第二濃度は、前記第一濃度よりも少なくとも100倍高いマイクロ電子組立体。 - 請求項13記載のマイクロ電子組立体において、
前記第二濃度は、前記第一濃度よりも約1000倍高いマイクロ電子組立体。 - 請求項14記載のマイクロ電子組立体において、
前記エピタキシャル層は、更に、前記半導体基板の前記第二層に隣接した前記第二導電型の第五半導体領域と、前記第五半導体領域に隣接した前記第二導電型の分離接触領域とを備えるマイクロ電子組立体。 - 半導体装置を構築する方法であって、
第一ドーパント型を有する半導体基板に第二ドーパント型を有する埋め込み層を形成するステップと、
前記埋め込み層上に前記第一ドーパント型を有するエピタキシャル半導体層を形成するステップと、
前記エピタキシャル半導体層に前記第二ドーパント型を有する第一半導体領域を形成するステップであって、前記第一ドーパント型の第二半導体領域は、前記第一半導体領域と前記埋め込み層との間の前記エピタキシャル半導体層に規定されるステップと、
前記エピタキシャル半導体層に前記第一ドーパント型を有する第三半導体領域を形成するステップと、
前記第一半導体領域の少なくとも一部の上方と前記第三半導体領域の少なくとも一部の上方とにゲート電極を形成するステップと、
前記第三半導体領域に隣接すると共に前記ゲート電極に隣接した前記エピタキシャル半導体層に第一濃度の前記第二ドーパント型を有する第四半導体領域を形成するステップと、
前記第三半導体領域に隣接すると共に前記第四半導体領域に隣接し、更に前記ゲート電極と反対の前記第四半導体領域の側面にある前記エピタキシャル半導体層に第二濃度の前記第二ドーパント型を有するソース接触領域を形成するステップであって、前記第二濃度は前記第一濃度よりも高いステップと、
前記第一半導体領域に隣接した前記エピタキシャル半導体層に前記第二ドーパント型を有するドレイン接触領域を形成するステップと、
前記第三半導体領域に隣接した前記エピタキシャル半導体層に前記第一ドーパント型を有するボディ接触領域を形成するステップと
を備える方法。 - 請求項15記載の方法法は、更に、
前記半導体基板の前記第二層に隣接した前記エピタキシャル半導体層に前記第二ドーパント型を有する第五半導体領域を形成するステップと、
前記第五半導体領域に隣接した前記エピタキシャル半導体層に前記第二ドーパント型を有する分離接触領域を形成するステップと
を備える方法。 - 請求項17記載の方法は、更に、
前記エピタキシャル半導体層に複数のトレンチ分離領域を形成するステップであって、第一の前記トレンチ分離領域は、前記第五半導体領域と第三半導体領域との間に存在し、第二の前記トレンチ分離領域は、前記ボディ接触領域と前記ソース接触領域との間に存在し、第三の前記トレンチ分離領域は、前記ゲート電極と前記ドレイン接触領域の間に存在する方法。 - 請求項18記載の方法において、
前記第二濃度は、前記第一濃度よりも少なくとも100倍高い方法。 - 請求項19記載の方法は、更に、
前記第二半導体領域を前記第二ドーパント型でドープするステップを備える方法。 - 請求項19に記載の方法において、
前記第一ドーパント型はP型であり、前記第二ドーパント型はN型である方法。
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Application Number | Priority Date | Filing Date | Title |
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US11/264,068 US7276419B2 (en) | 2005-10-31 | 2005-10-31 | Semiconductor device and method for forming the same |
PCT/US2006/040873 WO2008076092A2 (en) | 2005-10-31 | 2006-10-18 | Semiconductor device and method for forming the same |
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JP2009521131A true JP2009521131A (ja) | 2009-05-28 |
JP2009521131A5 JP2009521131A5 (ja) | 2009-12-03 |
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JP2008550308A Pending JP2009521131A (ja) | 2005-10-31 | 2006-10-18 | 半導体装置とその形成方法 |
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US (1) | US7276419B2 (ja) |
EP (1) | EP1966826A4 (ja) |
JP (1) | JP2009521131A (ja) |
KR (1) | KR20080073313A (ja) |
TW (1) | TWI409946B (ja) |
WO (1) | WO2008076092A2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010258226A (ja) * | 2009-04-24 | 2010-11-11 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
JP2011108758A (ja) * | 2009-11-13 | 2011-06-02 | Fujitsu Semiconductor Ltd | 高耐圧mosトランジスタおよび半導体集積回路装置、高耐圧半導体装置 |
JP2013145792A (ja) * | 2012-01-13 | 2013-07-25 | Toshiba Corp | 半導体装置 |
JP2014143363A (ja) * | 2013-01-25 | 2014-08-07 | Rohm Co Ltd | nチャネル二重拡散MOS型トランジスタおよび半導体複合素子 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100875159B1 (ko) * | 2007-05-25 | 2008-12-22 | 주식회사 동부하이텍 | 반도체 소자 및 그의 제조 방법 |
KR20090007053A (ko) * | 2007-07-13 | 2009-01-16 | 매그나칩 반도체 유한회사 | 고전압 소자 및 그 제조방법 |
JP5338433B2 (ja) * | 2008-09-30 | 2013-11-13 | 富士電機株式会社 | 窒化ガリウム半導体装置およびその製造方法 |
US8471340B2 (en) * | 2009-11-30 | 2013-06-25 | International Business Machines Corporation | Silicon-on-insulator (SOI) structure configured for reduced harmonics and method of forming the structure |
US8698244B2 (en) * | 2009-11-30 | 2014-04-15 | International Business Machines Corporation | Silicon-on-insulator (SOI) structure configured for reduced harmonics, design structure and method |
TWI668864B (zh) * | 2018-08-09 | 2019-08-11 | 江啟文 | 具有電流路徑方向控制的半導體結構 |
CN117457747B (zh) * | 2023-12-22 | 2024-06-04 | 粤芯半导体技术股份有限公司 | 一种嵌入式闪存工艺的demos结构及其制备方法 |
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US5387553A (en) * | 1992-03-24 | 1995-02-07 | International Business Machines Corporation | Method for forming a lateral bipolar transistor with dual collector, circular symmetry and composite structure |
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US6693339B1 (en) * | 2003-03-14 | 2004-02-17 | Motorola, Inc. | Semiconductor component and method of manufacturing same |
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2005
- 2005-10-31 US US11/264,068 patent/US7276419B2/en active Active
-
2006
- 2006-10-18 KR KR1020087013091A patent/KR20080073313A/ko not_active Application Discontinuation
- 2006-10-18 EP EP06851955.2A patent/EP1966826A4/en not_active Withdrawn
- 2006-10-18 JP JP2008550308A patent/JP2009521131A/ja active Pending
- 2006-10-18 WO PCT/US2006/040873 patent/WO2008076092A2/en active Application Filing
- 2006-10-30 TW TW095139951A patent/TWI409946B/zh active
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JP2000260988A (ja) * | 1999-03-12 | 2000-09-22 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JP2001168210A (ja) * | 1999-10-27 | 2001-06-22 | Texas Instr Inc <Ti> | 集積回路用ドレイン拡張型トランジスタ |
JP2003197791A (ja) * | 2001-12-28 | 2003-07-11 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
WO2004042826A2 (en) * | 2002-10-31 | 2004-05-21 | Freescale Semiconductor, Inc. | Semiconductor component comprising a resur transistor and method of manufacturing same |
JP2007027641A (ja) * | 2005-07-21 | 2007-02-01 | Toshiba Corp | 半導体装置及びその製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010258226A (ja) * | 2009-04-24 | 2010-11-11 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
JP2011108758A (ja) * | 2009-11-13 | 2011-06-02 | Fujitsu Semiconductor Ltd | 高耐圧mosトランジスタおよび半導体集積回路装置、高耐圧半導体装置 |
JP2013145792A (ja) * | 2012-01-13 | 2013-07-25 | Toshiba Corp | 半導体装置 |
JP2014143363A (ja) * | 2013-01-25 | 2014-08-07 | Rohm Co Ltd | nチャネル二重拡散MOS型トランジスタおよび半導体複合素子 |
US9812565B2 (en) | 2013-01-25 | 2017-11-07 | Rohm Co., Ltd. | N-channel double diffusion MOS transistor with p-type buried layer underneath n-type drift and drain layers, and semiconductor composite device |
Also Published As
Publication number | Publication date |
---|---|
EP1966826A4 (en) | 2013-06-19 |
US7276419B2 (en) | 2007-10-02 |
TWI409946B (zh) | 2013-09-21 |
TW200725889A (en) | 2007-07-01 |
KR20080073313A (ko) | 2008-08-08 |
EP1966826A2 (en) | 2008-09-10 |
US20070096225A1 (en) | 2007-05-03 |
WO2008076092A2 (en) | 2008-06-26 |
WO2008076092A3 (en) | 2009-02-12 |
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