JP2009300418A - 分光モジュール - Google Patents

分光モジュール Download PDF

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Publication number
JP2009300418A
JP2009300418A JP2008311045A JP2008311045A JP2009300418A JP 2009300418 A JP2009300418 A JP 2009300418A JP 2008311045 A JP2008311045 A JP 2008311045A JP 2008311045 A JP2008311045 A JP 2008311045A JP 2009300418 A JP2009300418 A JP 2009300418A
Authority
JP
Japan
Prior art keywords
light
spectroscopic
detection element
substrate
passage hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008311045A
Other languages
English (en)
Japanese (ja)
Inventor
Katsumi Shibayama
勝己 柴山
Tomohito Suzuki
智史 鈴木
Takafumi Yoshino
隆文 能野
Anna Ui
杏奈 宇井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP2008311045A priority Critical patent/JP2009300418A/ja
Priority to US12/464,259 priority patent/US8013993B2/en
Priority to DE102009021438A priority patent/DE102009021438A1/de
Publication of JP2009300418A publication Critical patent/JP2009300418A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
JP2008311045A 2008-05-15 2008-12-05 分光モジュール Pending JP2009300418A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008311045A JP2009300418A (ja) 2008-05-15 2008-12-05 分光モジュール
US12/464,259 US8013993B2 (en) 2008-05-15 2009-05-12 Spectroscopy module
DE102009021438A DE102009021438A1 (de) 2008-05-15 2009-05-15 Spektroskopiemodul

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008128687 2008-05-15
JP2008311045A JP2009300418A (ja) 2008-05-15 2008-12-05 分光モジュール

Publications (1)

Publication Number Publication Date
JP2009300418A true JP2009300418A (ja) 2009-12-24

Family

ID=41254193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008311045A Pending JP2009300418A (ja) 2008-05-15 2008-12-05 分光モジュール

Country Status (3)

Country Link
US (1) US8013993B2 (de)
JP (1) JP2009300418A (de)
DE (1) DE102009021438A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100017083A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
JP5205243B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器
JP5205241B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP5205238B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP2009300422A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP5207938B2 (ja) 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP2009300417A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュールの製造方法及び分光モジュール
JP5415060B2 (ja) * 2008-05-15 2014-02-12 浜松ホトニクス株式会社 分光モジュール
JP5205240B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュールの製造方法及び分光モジュール
JP5205242B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器の製造方法
JP5512961B2 (ja) * 2008-05-15 2014-06-04 浜松ホトニクス株式会社 分光モジュール及びその製造方法
JP5335729B2 (ja) 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール
JP5325829B2 (ja) 2010-04-01 2013-10-23 浜松ホトニクス株式会社 分光モジュール
DE102010040768B4 (de) 2010-09-14 2022-02-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Spektralzerlegungsvorrichtung und Herstellung derselben
JP2015106106A (ja) 2013-12-02 2015-06-08 セイコーエプソン株式会社 電子デバイスおよび電子機器

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JP2004191246A (ja) * 2002-12-12 2004-07-08 Matsushita Electric Ind Co Ltd 凹凸検出センサ
WO2004082023A1 (ja) * 2003-03-10 2004-09-23 Hamamatsu Photonics K.K. ホトダイオードアレイおよびその製造方法並びに放射線検出器
JP2004354176A (ja) * 2003-05-28 2004-12-16 Hamamatsu Photonics Kk 光検出器及びそれを用いた分光器
US20050230844A1 (en) * 2002-08-29 2005-10-20 Kinsman Larry D Flip-chip image sensor packages and methods of fabrication
JP2006030031A (ja) * 2004-07-16 2006-02-02 Hamamatsu Photonics Kk 分光器
JP2008098367A (ja) * 2006-10-11 2008-04-24 Hamamatsu Photonics Kk 固体撮像装置
WO2008149944A1 (ja) * 2007-06-08 2008-12-11 Hamamatsu Photonics K.K. 分光モジュール
WO2008149940A1 (ja) * 2007-06-08 2008-12-11 Hamamatsu Photonics K.K. 分光モジュール

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DE3509131A1 (de) * 1985-03-14 1986-09-18 Fa. Carl Zeiss, 7920 Heidenheim Verfahren zur justierten montage der optischen bauteile eines optischen geraetes
JP2592081B2 (ja) 1987-12-28 1997-03-19 スズキ株式会社 自動二輪車等のマフラ
DE4038638A1 (de) 1990-12-04 1992-06-11 Zeiss Carl Fa Diodenzeilen-spektrometer
JPH04287001A (ja) 1991-03-15 1992-10-12 Sekinosu Kk 光回折格子の製造方法
JPH06167637A (ja) 1992-11-30 1994-06-14 Hitachi Ltd 多芯光コネクタ
JPH08145794A (ja) 1994-11-17 1996-06-07 Shimadzu Corp 分光器
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DE19717015A1 (de) 1997-04-23 1998-10-29 Inst Mikrotechnik Mainz Gmbh Miniaturisiertes optisches Bauelement sowie Verfahren zu seiner Herstellung
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JP2003139611A (ja) 2001-11-06 2003-05-14 Olympus Optical Co Ltd 分光光度計
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JP5182093B2 (ja) 2006-09-06 2013-04-10 株式会社ニコン 光学装置、露光装置、並びにデバイス製造方法
CN101542251B (zh) 2007-06-08 2012-09-26 浜松光子学株式会社 分光器
KR20100017083A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
JP5415060B2 (ja) 2008-05-15 2014-02-12 浜松ホトニクス株式会社 分光モジュール
JP5207938B2 (ja) 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP5512961B2 (ja) 2008-05-15 2014-06-04 浜松ホトニクス株式会社 分光モジュール及びその製造方法
JP5205243B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器
JP5205238B2 (ja) 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP5205240B2 (ja) 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュールの製造方法及び分光モジュール

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000065642A (ja) * 1998-03-11 2000-03-03 Gretag Macbeth Ag スペクトロメ―タ
US20050230844A1 (en) * 2002-08-29 2005-10-20 Kinsman Larry D Flip-chip image sensor packages and methods of fabrication
JP2004191246A (ja) * 2002-12-12 2004-07-08 Matsushita Electric Ind Co Ltd 凹凸検出センサ
WO2004082023A1 (ja) * 2003-03-10 2004-09-23 Hamamatsu Photonics K.K. ホトダイオードアレイおよびその製造方法並びに放射線検出器
JP2004354176A (ja) * 2003-05-28 2004-12-16 Hamamatsu Photonics Kk 光検出器及びそれを用いた分光器
JP2006030031A (ja) * 2004-07-16 2006-02-02 Hamamatsu Photonics Kk 分光器
JP2008098367A (ja) * 2006-10-11 2008-04-24 Hamamatsu Photonics Kk 固体撮像装置
WO2008149944A1 (ja) * 2007-06-08 2008-12-11 Hamamatsu Photonics K.K. 分光モジュール
WO2008149940A1 (ja) * 2007-06-08 2008-12-11 Hamamatsu Photonics K.K. 分光モジュール

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JPN6009025094; Ｈ．Ｗ．　Ｔｅｉｃｈｍａｎｎ，　ｅｔ．ａｌ．: '"Ｒｅｐｌｉｚｉｅｒｔｅｒ　ｍｉｋｒｏ-ｏｐｔｉｓｃｈｅｒ　Ｓｅｎｓｏｒ　ｆｕｅｒ　ｄｉｅ　ｉｎｄｕｓｔｒｉｅｌｌｅ　Ｓｐｅｋｔｒａｌｓｅｎｓｏｒｉｋ"' ｔｍ-Ｔｅｃｈｎｉｓｃｈｅｓ　Ｍｅｓｓｅｎ Ｖｏｌ．６８，　Ｎｏ．５, 200105, ｐｐ．２００-２０３ *

Also Published As

Publication number Publication date
DE102009021438A1 (de) 2009-12-03
US8013993B2 (en) 2011-09-06
US20090290164A1 (en) 2009-11-26

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