JP2009285938A - Forming mold and method for producing the same - Google Patents

Forming mold and method for producing the same Download PDF

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JP2009285938A
JP2009285938A JP2008139659A JP2008139659A JP2009285938A JP 2009285938 A JP2009285938 A JP 2009285938A JP 2008139659 A JP2008139659 A JP 2008139659A JP 2008139659 A JP2008139659 A JP 2008139659A JP 2009285938 A JP2009285938 A JP 2009285938A
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glassy carbon
graphite
mold
exposed
glassy
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JP5183301B2 (en
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Yoshikazu Teranishi
義一 寺西
Kazumasa Nakamura
和正 中村
Yasuhiro Tanabe
靖博 田邊
Katsuyoshi Oishi
克嘉 大石
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Chuo University
Tokyo Metropolitan Industrial Technology Research Instititute (TIRI)
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Tokyo Metropolitan Industrial Technology Research Instititute (TIRI)
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a forming mold having high mold releasability and suitable in the case the aspect ratio of a rugged part is high using a glassy carbon member, and to provide a method for producing the same. <P>SOLUTION: In the forming mold 1, a glassy carbon member in which a graphite part 3 made of graphite is formed at the inside of a glassy carbon part 2 made of glassy carbon is used. The forming mold 1 has hole parts 11, 12, 13 in which both the graphite part 3 and glassy carbon part 2 are exposed at the side parts or bottom part. Further, the hole parts 11, 12, 13 are formed in such a manner that the graphite area to which the graphite part 3 is exposed in the side parts or the bottom part is made larger than the glassy carbon area to which the glassy carbon part 2 is exposed. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、ガラス状炭素からなるガラス状炭素部材を用いた成形型およびその製造方法に関する。   The present invention relates to a mold using a glassy carbon member made of glassy carbon and a method for producing the same.

従来、所定の成形加工によって、溝、凹み、凸部といった凹部または凸部のいずれか少なくとも一方からなる凹凸部を成形部材に設けた成形型が知られている。この種の成形型は、凹凸部に樹脂等の成形物を流し込むなどした後、成型物(転写物ともいう)を抜き取ることによって、成型物に対して所望の成形が行えるようになっている。しかしながら、幅や深さ等凹凸部の寸法が微細な場合や、凹みの大きさに比べて深さが深く、凹みのアスペクト比が大きい場合には、成型物自体が溝や凹みの中に残ってしまうことがあった。そのため、この種の成形型では、離型性を高めることが求められていた。   2. Description of the Related Art Conventionally, there has been known a mold in which an uneven portion including at least one of a concave portion or a convex portion such as a groove, a dent, or a convex portion is provided on a molding member by a predetermined molding process. In this type of mold, a molded product such as a resin is poured into the concavo-convex portion, and then the molded product (also referred to as a transfer product) is extracted, whereby desired molding can be performed on the molded product. However, if the dimensions of the concavo-convex part such as width and depth are fine, or if the depth is deeper than the size of the dent and the dent aspect ratio is large, the molded product itself remains in the groove or dent. There was a case. Therefore, in this type of mold, it has been demanded to improve releasability.

従来、成形型の離型性を高める技術として例えば、特許文献1,2,3に開示されている技術があった。特許文献1には、炭素またはフッ素を含有するイオンを処理物表面に注入するとともにフッ素含有炭素膜を形成することにより、潤滑性と離型性を兼備させることについて開示されている。また、特許文献2には、母材表面にイオンを注入することにより、母材表面を結晶が小さく緻密で均一になるようにして摩擦係数を低下させることが開示されている。さらに、特許文献3には、イオン注入によりアルカリ金属元素等を含む離型層を成形面に形成することにより、型に離型性を付与することが開示されている。
特開2005−048252号公報 特開2001−179420号公報 特開平8−119644号公報 特開平2−51412号公報
Conventionally, as a technique for improving mold releasability of a mold, there are techniques disclosed in Patent Documents 1, 2, and 3, for example. Patent Document 1 discloses that both lubricity and releasability are achieved by injecting ions containing carbon or fluorine into the surface of the object to be processed and forming a fluorine-containing carbon film. Patent Document 2 discloses that the coefficient of friction is reduced by implanting ions into the surface of the base material so that the base material surface is small, dense, and uniform. Further, Patent Document 3 discloses that a mold release property is imparted to a mold by forming a mold release layer containing an alkali metal element or the like on a molding surface by ion implantation.
Japanese Patent Laying-Open No. 2005-048552 JP 2001-179420 A JP-A-8-119644 JP-A-2-51412

ところで、黒鉛は表面の潤滑性が良好であるため、黒鉛からなる成形部材を用いることによって、成形型の離型性を高めることが可能になる。   By the way, since graphite has good surface lubricity, it is possible to improve the mold releasability of the mold by using a molded member made of graphite.

しかし、この成形型は成形部材が黒鉛からなるために脆弱であり、したがって強度が低く、繰り返し使用した場合に凹凸部がかけるなどして破損するおそれがあった。   However, this mold is fragile because the molded member is made of graphite, and therefore has a low strength, and when repeatedly used, there is a possibility that it will be damaged due to the projections and depressions.

一方、黒鉛とは結晶構造が異なるものの、強度の高い材質としてガラス状炭素が知られている。特許文献4には、ガラス状炭素からなる成形部材の内部を黒鉛にする技術について開示されている。   On the other hand, glassy carbon is known as a material having high strength, although the crystal structure is different from that of graphite. Patent Document 4 discloses a technique for making the inside of a molded member made of glassy carbon graphite.

しかし、特許文献4記載の従来技術では、離型性を高めるための黒鉛がガラス状炭素からなる部材(ガラス状炭素部材)の内側に閉じ込められてしまう。そのため、できあがった成形部材の表面に凹凸部を形成しても、離型性を高い成形型が得られない場合があった。   However, in the prior art described in Patent Document 4, graphite for enhancing the releasability is confined inside a member made of glassy carbon (glassy carbon member). For this reason, there is a case in which a mold having high releasability cannot be obtained even when the uneven portion is formed on the surface of the finished molded member.

そこで、本発明は上記課題を解決するためになされたもので、ガラス状炭素部材を用いた離型性が高く、特に凹凸部のアスペクト比が大きい場合に適した成形型およびその製造方法を提供することを目的とする。   Accordingly, the present invention has been made to solve the above-described problems, and provides a mold and a method for manufacturing the mold that are highly releasable using a glassy carbon member and particularly suitable when the aspect ratio of the uneven portion is large. The purpose is to do.

上記課題を解決するため、本発明は、ガラス状炭素からなるガラス状炭素部の内側に黒鉛からなる黒鉛部が形成されているガラス状炭素部材を用いた成形型であって、側部または底部に黒鉛部およびガラス状炭素部がともに露出している凹凸部を有する成形型を特徴とする。   In order to solve the above-mentioned problem, the present invention is a molding die using a glassy carbon member in which a graphite part made of graphite is formed inside a glassy carbon part made of glassy carbon, and has a side part or a bottom part. And a mold having a concavo-convex portion in which both the graphite portion and the glassy carbon portion are exposed.

この成形型は、凹凸部の側部または底部に黒鉛部およびガラス状炭素部がともに露出しているため、離型性が高くなっている。   This mold has high releasability because both the graphite part and the glassy carbon part are exposed at the side or bottom of the uneven part.

また、本発明は、ガラス状炭素からなるガラス状炭素部の内側に黒鉛からなる黒鉛部が形成されているガラス状炭素部材を用いた成形型であって、ガラス状炭素部および黒鉛部がともに露出している凹凸部を有し、凹凸部の側部または底部のうちの黒鉛部が露出している黒鉛エリアが、ガラス状炭素部が露出しているガラス状炭素エリアよりも大きく形成されている成形型を提供する。   The present invention also relates to a mold using a glassy carbon member in which a graphite part made of graphite is formed inside a glassy carbon part made of glassy carbon, wherein both the glassy carbon part and the graphite part are The graphite area where the graphite part of the uneven part is exposed and the graphite part of the side part or the bottom part of the uneven part is exposed is formed larger than the glassy carbon area where the glassy carbon part is exposed. A mold is provided.

この成形型は、凹凸部の側部または底部に黒鉛部およびガラス状炭素部がともに露出し、しかも黒鉛エリアがガラス状炭素エリアよりも大きいため、離型性がより高くなっている。   In this mold, both the graphite part and the glassy carbon part are exposed at the side part or the bottom part of the concavo-convex part, and the graphite area is larger than the glassy carbon area.

また、上記成形型は、凹凸部のガラス状炭素部を通る部分の深さよりも黒鉛部を通る部分の深さが大きいことが好ましい。   Moreover, it is preferable that the said mold has the depth of the part which passes a graphite part larger than the depth of the part which passes the glassy carbon part of an uneven | corrugated | grooved part.

このようにすると、凹凸部の側部に露出する黒鉛エリアがガラス状炭素エリアよりも大きくなるため、上記成形型は、側部における離型性が高くなっている。   If it does in this way, since the graphite area exposed to the side part of an uneven | corrugated | grooved part becomes larger than a glassy carbon area, the said mold has the mold release property in a side part.

さらに、上記成形型は、ガラス状炭素部材として、直方体状に形成された直方体状炭素部材を用い、その直方体状炭素部材における1つの表面部だけに凹凸部が形成されているようにすることができる。   Furthermore, the said shaping | molding die uses the rectangular parallelepiped carbon member formed in the shape of a rectangular parallelepiped as a glassy carbon member, and it is made for the uneven | corrugated | grooved part to be formed only in one surface part in the rectangular parallelepiped carbon member. it can.

そのほか、ガラス状炭素部材として、直方体状に形成された直方体状炭素部材を用い、その直方体状炭素部材を構成する角部を含むガラス状炭素部および黒鉛部の一部が除去されることによって凹凸部が形成されているようにすることもできる。   In addition, as a glassy carbon member, a rectangular parallelepiped carbon member formed in the shape of a rectangular parallelepiped is used, and the glassy carbon part including the corners constituting the rectangular carbonaceous carbon member and a part of the graphite part are removed, thereby forming irregularities. The part can also be formed.

そして、本発明は、ガラス状炭素からなるガラス状炭素部の内側に黒鉛からなる黒鉛部が形成されているガラス状炭素部材を用いた成形型の製造方法であって、ガラス状炭素部材におけるガラス状炭素部および黒鉛部の一部を除去して、側部または底部に黒鉛部およびガラス状炭素部がともに露出している凹凸部を形成する成形型の製造方法を特徴とする。   And this invention is a manufacturing method of the shaping | molding die using the glassy carbon member in which the graphite part which consists of graphite is formed inside the glassy carbon part which consists of glassy carbon, Comprising: Glass in a glassy carbon member The present invention is characterized by a method for manufacturing a molding die in which a part of the carbon-like carbon part and the graphite part is removed to form a concavo-convex part in which both the graphite part and the glassy carbon part are exposed on the side part or the bottom part.

この製造方法では、ガラス状炭素部材のガラス状炭素部および黒鉛部の一部を除去することによって、離型性の高い成形型が得られる。   In this manufacturing method, a mold having high releasability can be obtained by removing a part of the glassy carbon part and the graphite part of the glassy carbon member.

また、上記製造方法では、ガラス状炭素で構成される基材を熱間等方圧加圧法(Hot Isostatic Pressing)処理することによって、基材を構成するガラス状炭素からなるガラス状炭素部の内側に黒鉛からなる黒鉛部を形成してガラス状炭素部材を形成することができる。   Moreover, in the said manufacturing method, the inside of the glassy carbon part which consists of glassy carbon which comprises a base material by carrying out the hot isostatic pressing method (Hot Isostatic Pressing) process of the base material comprised by glassy carbon A glassy carbon member can be formed by forming a graphite portion made of graphite.

この場合、熱間等方圧加圧法処理を行うときに、160Mpa〜200Mpaの範囲で加圧し、かつ1500℃〜2500℃の範囲で加熱することができ、160Mpa〜180Mpaの範囲で加圧し、かつ1500℃〜2000℃の範囲で加熱することもできる。   In this case, when performing the hot isostatic pressing method, the pressure can be increased within the range of 160 Mpa to 200 Mpa, and the heating can be performed within the range of 1500 ° C. to 2500 ° C., the pressure can be increased within the range of 160 Mpa to 180 Mpa, and It can also heat in the range of 1500 to 2000 degreeC.

また、熱間等方圧加圧法処理を行う前に、500℃〜1400℃の範囲で前記基材を加熱する事前熱処理を行うことが好ましい。   Moreover, before performing a hot isostatic pressing method process, it is preferable to perform the preliminary heat processing which heats the said base material in the range of 500 to 1400 degreeC.

以上詳述したように本発明によれば、ガラス状炭素部材を用いた離型性が高く、特に凹凸部のアスペクト比が大きい場合に適した成形型およびその製造方法を得ることができる。   As described above in detail, according to the present invention, it is possible to obtain a mold that is highly releasable using a glassy carbon member and that is particularly suitable when the aspect ratio of the concavo-convex portion is large, and a method for manufacturing the same.

以下、本発明の実施の形態について説明する。なお、同一要素には同一符号を用い、重複する説明は省略する。   Embodiments of the present invention will be described below. In addition, the same code | symbol is used for the same element and the overlapping description is abbreviate | omitted.

第1の実施形態
(成形型の構成)
図1は本発明の実施の形態に係る成形型1の斜視図、図2は図1のI-I線断面図である。また、図3は成形型1の平面図、図4は図2の要部を拡大した断面図である。成形型1は直方体状の本体部10における1つの平面部1aに、3種類の穴部11,12,13がそれぞれ2つずつ並べて形成されている。
First Embodiment (Configuration of Mold)
FIG. 1 is a perspective view of a mold 1 according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line II of FIG. 3 is a plan view of the mold 1 and FIG. 4 is an enlarged cross-sectional view of the main part of FIG. In the mold 1, three types of hole portions 11, 12, and 13 are formed side by side on one flat surface portion 1 a of a rectangular parallelepiped main body portion 10.

本体部10は、全表面がガラス状炭素からなるガラス状炭素部2で構成され、その内側に黒鉛からなる黒鉛部3が形成された2層構造を有している。本体部10は、後述する製造方法によって形成されるものである。図2、図3に示すように、本体部10は、黒鉛部3の周囲全体をガラス状炭素部2が被覆していて、黒鉛部3がガラス状炭素部2の内側に閉じ込められている。   The main body 10 has a two-layer structure in which the entire surface is composed of a glassy carbon part 2 made of glassy carbon, and a graphite part 3 made of graphite is formed inside thereof. The main body 10 is formed by a manufacturing method described later. As shown in FIGS. 2 and 3, in the main body 10, the entire periphery of the graphite part 3 is covered with the glassy carbon part 2, and the graphite part 3 is confined inside the glassy carbon part 2.

本体部10は、厚さがLMであり、そのうちの黒鉛部3からみて一方に位置する、すなわち、平面部1aを形成しているガラス状炭素部2の厚さがL0である。また、黒鉛部3の厚さはL2となっている。L0は概ねLMの数%から10%程度の厚さ、L2はLMの80%程度から90%程度を占める厚さとなっている。   The main body portion 10 has a thickness LM, and one of the main body portions 10 is located when viewed from the graphite portion 3, that is, the thickness of the glassy carbon portion 2 forming the flat portion 1a is L0. Moreover, the thickness of the graphite part 3 is L2. L0 is a thickness of about several to 10% of LM, and L2 is a thickness that occupies about 80% to 90% of LM.

穴部11,12,13はいずれも開口部の形状が縦横ともにW1の正方形であり、平面部1aからガラス状炭素部2を貫通して黒鉛部3の内部に届く長さを備えた凹部である。穴部11,12,13は、平面部1aと交差する方向に掘削してガラス状炭素部2と黒鉛部3の一部を除去することによって形成されていて、黒鉛部3の内部にそれぞれの底部11a、12a、13aが位置している。   Each of the holes 11, 12, and 13 is a concave portion having a length that reaches the inside of the graphite part 3 through the glassy carbon part 2 from the flat part 1 a through the square of W 1 in both vertical and horizontal directions. is there. The holes 11, 12, and 13 are formed by excavating in a direction intersecting with the plane portion 1 a and removing a part of the glassy carbon portion 2 and the graphite portion 3. Bottoms 11a, 12a, 13a are located.

そして、穴部11は平面部1aから底部11aまでの深さがL0+D1、穴部12は平面部1aから底部12aまでの深さがL0+D2、穴部13は平面部1aから底部13aまでの深さがL0+D3となっている。D1はL0と同じ大きさ、D2、D3はいずれもL0よりも大きく、しかもD2<D3<L2となっている。穴部11,12,13の深さはW1よりも大きくなっている。   The hole 11 has a depth L0 + D1 from the plane 1a to the bottom 11a, the hole 12 has a depth L0 + D2 from the plane 1a to the bottom 12a, and the hole 13 has a depth from the plane 1a to the bottom 13a. Is L0 + D3. D1 is the same size as L0, D2 and D3 are both larger than L0, and D2 <D3 <L2. The depths of the holes 11, 12, and 13 are larger than W1.

穴部11,12,13は、その側部に、黒鉛部3とガラス状炭素部2がともに露出しているが、深さD1が厚さL0と同じ大きさなので、穴部11におけるガラス状炭素部2の部分を通る深さと黒鉛部3を通る部分の深さが同じになっている。そのため、穴部11の側部のうちの、黒鉛部3が露出している黒鉛エリア11cの表面積が、ガラス状炭素部2が露出しているガラス状炭素エリア11dの表面積と同じ大きさになっている。しかし、底部11aは黒鉛部3の内部に形成されているため、穴部11内側全体の表面積を見ると、黒鉛部3の露出している部分の表面積がガラス状炭素部2の露出している部分の表面積よりも大きくなっている。   The holes 11, 12, and 13 have both the graphite part 3 and the glassy carbon part 2 exposed at the sides thereof, but since the depth D 1 is the same as the thickness L 0, the glass part in the hole 11 The depth passing through the carbon portion 2 and the depth passing through the graphite portion 3 are the same. Therefore, the surface area of the graphite area 11c where the graphite part 3 is exposed in the side part of the hole part 11 becomes the same size as the surface area of the glassy carbon area 11d where the glassy carbon part 2 is exposed. ing. However, since the bottom part 11a is formed inside the graphite part 3, the surface area of the exposed part of the graphite part 3 is exposed to the glassy carbon part 2 when the entire surface area inside the hole part 11 is viewed. It is larger than the surface area of the part.

また、深さD2、D3はいずれも厚さL0よりも大きいので、穴部12,13では、側部における黒鉛エリア12c、13cの表面積が、ガラス状炭素エリア12d、13dの表面積よりも大きくなっている。   Further, since the depths D2 and D3 are both greater than the thickness L0, the surface areas of the graphite areas 12c and 13c at the side portions are larger than the surface areas of the glassy carbon areas 12d and 13d in the holes 12 and 13. ing.

そして、以上の構成を有する成形型1は、図12、図13に示すようにして使用することによって、所望の転写部61を製造することができる。   And the desired transcription | transfer part 61 can be manufactured by using the shaping | molding die 1 which has the above structure as shown in FIG. 12, FIG.

まず、図12に示すように、成形型1が内側に組み込める構造を備えた成型装置50を準備する。成型装置50は分解および組み立て自在の4つの壁部と、1つの底部とを有し、これらによって囲まれる空間(成形用空間ともいう)の底部上に成形型1を載せて成形型1を組み込めるようになっている。図12、図13では、成形用空間に成形型1を納めて成型装置50に成形型1を組み込んだ上、露出している穴部11と穴部13を図示しないカバー部材で塞ぎ、穴部12だけが平面部1a上に露出している状態を想定している。図示の都合上、成形型1と、後述する樹脂60だけを断面で示している。   First, as shown in FIG. 12, a molding apparatus 50 having a structure in which the molding die 1 can be incorporated inside is prepared. The molding apparatus 50 has four wall portions that can be disassembled and assembled and one bottom portion, and the molding die 1 can be assembled by placing the molding die 1 on the bottom of a space (also referred to as a molding space) surrounded by these. It is like that. 12 and 13, the mold 1 is placed in the molding space and the mold 1 is assembled into the molding apparatus 50, and the exposed hole 11 and hole 13 are closed with a cover member (not shown). It is assumed that only 12 is exposed on the flat portion 1a. For convenience of illustration, only the mold 1 and a resin 60 described later are shown in cross section.

次に、成形用空間に上側から樹脂60を流し込む。すると、図13に示すように、樹脂60は成形型1の平面部1aから穴部12の中に流れ込む。この樹脂60を硬化させた後、成型装置50を分解して、成形型1を樹脂60とともに成型装置50から取り外す。それから、成形型1を樹脂60から取り外すことにより、図14に示すような構造の転写物61を得ることができる。この転写物61は、穴部12に対応した2本の突起部61aを有している。   Next, the resin 60 is poured into the molding space from above. Then, as shown in FIG. 13, the resin 60 flows into the hole 12 from the flat portion 1 a of the mold 1. After the resin 60 is cured, the molding apparatus 50 is disassembled, and the mold 1 is removed from the molding apparatus 50 together with the resin 60. Then, by removing the mold 1 from the resin 60, a transfer product 61 having a structure as shown in FIG. 14 can be obtained. This transfer product 61 has two protrusions 61 a corresponding to the hole 12.

以上のように、成形型1は、3種類の穴部11,12,13を有するが、いずれも側部に黒鉛部3とガラス状炭素部2がともに露出している。そのため、穴部11,12,13の内側に転写物の材料が流し込まれたとき、例えば、前述のように、樹脂60が穴部12に流し込まれたとき、その樹脂60は、穴部12の側部において、黒鉛部3とガラス状炭素部2の双方に接触することになる。すると、樹脂60が黒鉛部3に接触することによって、転写物61を抜き取るときに黒鉛部3における良好な離型性が発揮される。したがって、成形型1は、離型の難しい穴部から転写物をうまく剥がすことができる。特に、穴部11,12,13は、開口部の大きさよりも深さが深くアスペクト比が高いので、成形型1はアスペクト比が高い突起等の凸部の成形用として好適である。   As described above, the mold 1 has the three types of holes 11, 12, and 13, both of which the graphite portion 3 and the glassy carbon portion 2 are exposed on the side portions. Therefore, when the material of the transferred material is poured into the holes 11, 12, and 13, for example, as described above, when the resin 60 is poured into the hole 12, the resin 60 In the side portion, both the graphite portion 3 and the glassy carbon portion 2 are brought into contact. As a result, the resin 60 comes into contact with the graphite portion 3, so that good releasability in the graphite portion 3 is exhibited when the transfer product 61 is extracted. Therefore, the mold 1 can successfully peel off the transferred material from the hole that is difficult to release. In particular, since the holes 11, 12, and 13 are deeper than the size of the opening and have a high aspect ratio, the mold 1 is suitable for forming convex portions such as protrusions having a high aspect ratio.

その上、穴部11,12,13は、側部または底部のうちの黒鉛エリアの表面積がガラス状炭素エリアの表面積よりも大きく形成されているため、黒鉛部3に接触する部分の面積の方がガラス状炭素部2に接触する部分の面積よりも大きくなる。穴部11の場合は、黒鉛に接触する部分の面積の方が底部の分だけ大きくなる。   In addition, since the surface area of the graphite area in the side part or the bottom part is larger than the surface area of the glassy carbon area, the hole parts 11, 12, 13 have a larger area in contact with the graphite part 3. Becomes larger than the area of the portion in contact with the glassy carbon portion 2. In the case of the hole 11, the area of the portion in contact with the graphite is increased by the amount corresponding to the bottom.

そのため、穴部11,12,13では、内側に入り込んだ転写物のうちの、黒鉛に接触する表面積の方がガラス状炭素に接触する表面積よりも大きくなり、黒鉛部3のより一層良好な離型性が発揮される。   Therefore, in the holes 11, 12, and 13, the surface area in contact with the graphite of the transferred material entering inside becomes larger than the surface area in contact with the glassy carbon, and the graphite portion 3 is further separated. Demonstrate its type.

そして、成形型1は、黒鉛部3の外側にガラス状炭素部2が形成されている。ガラス状炭素部2はガラス状炭素から形成され、強度が高い。そのため、成形型1において、他の部材に接触する機会の多い外表面部分の強度を高めることができる。すなわち、成形型1は、繰り返し使用しても摩耗や損傷が生じ難く耐久性が良好になっている。   In the mold 1, a glassy carbon part 2 is formed outside the graphite part 3. The glassy carbon part 2 is formed from glassy carbon and has high strength. Therefore, in the mold 1, the strength of the outer surface portion that frequently contacts other members can be increased. That is, the mold 1 is less likely to be worn or damaged even when used repeatedly and has good durability.

(成形型の製造方法)
次に、成形型1の製造方法について、図11を参照して説明する。まず、ガラス状炭素で構成される本体部10と同じ形状を備えた基材1Aを準備する。基材1Aは例えば、縦幅10mm,横幅20mm、厚さは3〜5mmのものを用いることができる。基材1Aは約1000℃で予め所定の熱処理(事前熱処理)が行われたものを用いる。基材1Aは、上記とは異なる寸法でもよい。例えば、縦幅15mm,横幅25mm、厚さは8〜10mmのものを用いてもよい。また、事前熱処理の温度は約1000℃でなくてもよく、例えば約800℃や約1200℃でもよい。
(Manufacturing method of mold)
Next, the manufacturing method of the shaping | molding die 1 is demonstrated with reference to FIG. First, a base material 1A having the same shape as that of the main body 10 made of glassy carbon is prepared. As the base material 1A, for example, a material having a vertical width of 10 mm, a horizontal width of 20 mm, and a thickness of 3 to 5 mm can be used. As the base material 1A, one that has been subjected to a predetermined heat treatment (pre-heat treatment) at about 1000 ° C. in advance is used. The substrate 1A may have a dimension different from the above. For example, a material having a length of 15 mm, a width of 25 mm, and a thickness of 8 to 10 mm may be used. Further, the temperature of the pre-heat treatment does not have to be about 1000 ° C., and may be, for example, about 800 ° C. or about 1200 ° C.

この基材1Aを図11に示すように、所定の密閉炉55の中に収納する。そして、密閉炉55の中にアルゴン等のガスを導入しながら150Mpa〜200Mpaの圧力で加圧するとともに、1500℃〜2500℃の温度(好ましくは1700℃〜2000℃の温度)で加熱して熱間等方圧加圧法(Hot Isostatic Pressing;HIPともいう)処理する。すると、基材1Aの内部が黒鉛になり、前述の本体部10を得ることができる。   As shown in FIG. 11, the base material 1 </ b> A is stored in a predetermined sealed furnace 55. And while introducing gas, such as argon, in the closed furnace 55, it pressurizes with the pressure of 150 Mpa-200 Mpa, and it heats at the temperature of 1500 degreeC-2500 degreeC (preferably temperature of 1700 degreeC-2000 degreeC), and is hot. An isotropic pressure pressing method (also referred to as HIP) is performed. Then, the inside of the base material 1A becomes graphite, and the above-described main body portion 10 can be obtained.

得られた本体部10は、図15に示すようになっていて、黒鉛部3の周囲全体をガラス状炭素部2が被覆している。また、黒鉛部3は図16に示すような略球状の結晶を有している。図17には、2500℃、200Mpaの条件でHIP処理した場合の本体部10に対するX線を用いた分析結果が示されている。図17に示すように、HIP処理により、本体部10の内部が黒鉛部3になっていることがわかる。なお、(a)はHIP処理していない基材の分析結果、(b)は2500℃、200Mpaの条件でHIP処理した場合の本体部10の外側(ガラス状炭素部2)の分析結果、(c)は同じく本体部10の内部(黒鉛部3)の分析結果を示している。   The obtained main body portion 10 is configured as shown in FIG. 15, and the entire periphery of the graphite portion 3 is covered with the glassy carbon portion 2. Moreover, the graphite part 3 has a substantially spherical crystal as shown in FIG. FIG. 17 shows an analysis result using X-rays for the main body 10 when the HIP process is performed under the conditions of 2500 ° C. and 200 MPa. As shown in FIG. 17, it can be seen that the inside of the main body portion 10 is the graphite portion 3 by the HIP process. In addition, (a) is the analysis result of the base material which is not HIP-treated, (b) is the analysis result of the outside (glassy carbon part 2) of the main body 10 when HIP-treated at 2500 ° C. and 200 MPa. c) shows the analysis result of the inside of the main body part 10 (graphite part 3).

続いて、本体部10の平面部1aにおいて、所定の装置を用いてガラス状炭素部2および黒鉛部3の一部を掘削して除去し、穴部11,12,13を形成すると、成形型1が得られる。   Subsequently, in the flat surface portion 1a of the main body portion 10, a part of the glassy carbon portion 2 and the graphite portion 3 is excavated and removed by using a predetermined device to form the holes 11, 12, and 13, thereby forming a mold. 1 is obtained.

上記の製造方法では、HIP処理した後の本体部に穴部を形成して、成形型1を製造しているが、次のようにして成形型1を製造してもよい。まず、図18(a)に示すように、本体部10に穴部25,25を形成し、それからその本体部10にHIP処理を行う。すると、図18(b)に示すように、穴部の側部がガラス状炭素部2で覆われた成形型が得られる。この成形型の穴部の側部および底部におけるガラス状炭素部2を除去すると、図18(c)に示すように穴部の側部にガラス状炭素部2と黒鉛部3が露出している成形型26が得られる。   In the manufacturing method described above, the hole 1 is formed in the main body after the HIP process to manufacture the mold 1, but the mold 1 may be manufactured as follows. First, as shown in FIG. 18A, holes 25 and 25 are formed in the main body 10, and then HIP processing is performed on the main body 10. Then, as shown in FIG.18 (b), the shaping | molding die with which the side part of the hole part was covered with the glassy carbon part 2 is obtained. When the glassy carbon part 2 at the side part and bottom part of the hole part of the mold is removed, the glassy carbon part 2 and the graphite part 3 are exposed at the side part of the hole part as shown in FIG. A mold 26 is obtained.

(変形例1)
前述した成形型1は、開口部の形状が正方形の穴部11,12,13が形成されている。本発明は、図5、6に示すように、開口部の形状が横幅W1、縦幅W2(W1<W2)の長方形の穴部21,22,23が形成されている成形型20についても適用がある。穴部21,22,23はいずれも側部における黒鉛エリアの表面積が、ガラス状炭素エリアの表面積よりも大きくなっている。そのため、成形型20も成形型1と同様の良好な離型性を備えている。また、表面がガラス状炭素で覆われているから、繰り返し使用しても摩耗や損傷が生じ難く耐久性が良好になっている。
(Modification 1)
In the mold 1 described above, the holes 11, 12, 13 having a square opening are formed. As shown in FIGS. 5 and 6, the present invention is also applicable to a mold 20 in which rectangular holes 21, 22, and 23 having a width W1 and a width W2 (W1 <W2) are formed. There is. In each of the holes 21, 22 and 23, the surface area of the graphite area at the side is larger than the surface area of the glassy carbon area. Therefore, the mold 20 also has the same good releasability as the mold 1. Further, since the surface is covered with glassy carbon, wear and damage hardly occur even when used repeatedly, and durability is improved.

(変形例2)
また、本実施の形態は、図7に示すように、開口部の形状が平面渦巻き状に形成された穴部24(深さはD0+D2)が形成されている成形型25についても適用がある。穴部24も、側部における黒鉛エリアの表面積が、ガラス状炭素エリアの表面積よりも大きくなっているため、成形型25も成形型1と同様の良好な離型性を備えている。また、表面がガラス状炭素で覆われているから、繰り返し使用しても摩耗や損傷が生じ難く耐久性が良好になっている。
(Modification 2)
Further, as shown in FIG. 7, the present embodiment is also applicable to a mold 25 in which a hole 24 (depth is D0 + D2) in which the shape of the opening is formed in a plane spiral shape is formed. Since the surface area of the graphite area at the side portion of the hole 24 is larger than the surface area of the glassy carbon area, the mold 25 has the same good releasability as the mold 1. Further, since the surface is covered with glassy carbon, wear and damage hardly occur even when used repeatedly, and durability is improved.

第2の実施形態
第1の実施形態では、本体部10の平面部1aから平面部1aと交差する方向に掘削することによって、ガラス状炭素部2と黒鉛部3の一部を除去して穴部を設けていた。第2の実施形態では、平面部1aの4つの角部を削り取って除去することで凹部を設けている。図8、図9には、このようにして製造した成形型30が開示されている。
Second Embodiment In the first embodiment, the glassy carbon part 2 and the graphite part 3 are partially removed by excavating from the flat part 1a of the main body part 10 in a direction intersecting the flat part 1a. Department was established. In 2nd Embodiment, the recessed part is provided by scraping off and removing the four corners of the plane part 1a. 8 and 9 disclose the mold 30 manufactured in this way.

成形型30は、図8、図9に示すように、本体部10の4つの角部を縦横W3、W4で深さD5のサイズで除去して凹部40を形成するとともに、角部の間を縦横W3、W3で除去して凹部41を形成することで、凸部31を形成したものである。D5は前述のLMの約40%程度の大きさである。   As shown in FIGS. 8 and 9, the mold 30 is formed by removing the four corners of the main body 10 in the size of the depth D5 in the vertical and horizontal directions W3 and W4 and forming the recesses 40, and between the corners. The convex part 31 is formed by removing the vertical and horizontal W3 and W3 to form the concave part 41. D5 is about 40% of the above-mentioned LM.

成形型30では、凹部40、41を形成することで得られる側部31a,31bおよび底部31cには、ガラス状炭素部2と黒鉛部3が共に露出している。しかも、側部31a,31b,底部31cの表面積のうち、黒鉛エリアの表面積がガラス状炭素エリアの表面積よりも大きくなっている(黒鉛部3の露出部分にはドットを付している)。   In the mold 30, both the glassy carbon part 2 and the graphite part 3 are exposed at the side parts 31 a and 31 b and the bottom part 31 c obtained by forming the concave parts 40 and 41. Moreover, among the surface areas of the side portions 31a, 31b, and the bottom portion 31c, the surface area of the graphite area is larger than the surface area of the glassy carbon area (the exposed portion of the graphite portion 3 is marked with dots).

このような成形型30を用いて成形加工を行うと、転写物のうちの、黒鉛部3に接触する表面積の方がガラス状炭素部2に接触する表面積よりも大きくなる。したがって、成形型30を用いて成形加工を行うと、転写物をうまく剥がすことができる。凹部40、41において、2つの側部31a,31bおよび底部31cの3つの部分ともに、黒鉛エリアの表面積がガラス状炭素エリアの表面積よりも大きく、しかも、奥まった部分の角部32が黒鉛部3で囲まれているから、剥がし難い部分も剥がれ易くとりわけ良好な離型性を発揮できる。さらに、凸部31の外側部分はガラス状炭素で覆われているから、繰り返し使用しても摩耗や損傷が生じ難く耐久性が良好である。   When molding is performed using such a mold 30, the surface area in contact with the graphite part 3 in the transferred material is larger than the surface area in contact with the glassy carbon part 2. Therefore, when the molding process is performed using the molding die 30, the transferred material can be peeled off successfully. In the recesses 40 and 41, the surface area of the graphite area is larger than the surface area of the vitreous carbon area in all of the three portions of the two side portions 31a and 31b and the bottom portion 31c. Since it is surrounded by, it is easy to peel off the part which is hard to peel off, and particularly good releasability can be exhibited. Furthermore, since the outer part of the convex part 31 is covered with glassy carbon, even if it is used repeatedly, wear and damage are unlikely to occur and durability is good.

(変形例)
本実施の形態は、成形型30のほか、図10に示す成形型35についても適用することができる。成形型35は、4つの角部のうち、隣り合う角部をまとめて幅W4、深さD5で削り取って凹部43を形成するとともに、凹部43の間の部分を幅W5、深さD5で凹部43と同じ方向に削り取って凹部44を形成して凸部36を形成したものである。
(Modification)
This embodiment can be applied not only to the mold 30 but also to the mold 35 shown in FIG. The forming die 35 scrapes adjacent corners out of four corners together with a width W4 and a depth D5 to form a recess 43, and a portion between the recesses 43 has a width W5 and a depth D5. The concave portion 44 is formed by scraping in the same direction as 43 to form the convex portion 36.

この成形型35の場合も、凹部43、44を形成することで得られる側部36aおよび底部36bには、ガラス状炭素部2と黒鉛部3が共に露出し、黒鉛エリアの表面積がガラス状炭素エリアの表面積よりも大きくなっているから、成形型30と同様の良好な離型性を発揮できる。さらに、凸部36の外側部分はガラス状炭素で覆われているから、繰り返し使用しても摩耗や損傷が生じ難く耐久性が良好である。   Also in the case of this mold 35, the glassy carbon part 2 and the graphite part 3 are both exposed at the side part 36a and the bottom part 36b obtained by forming the concave parts 43 and 44, and the surface area of the graphite area is glassy carbon. Since it is larger than the surface area of the area, the same good releasability as the mold 30 can be exhibited. Furthermore, since the outer part of the convex part 36 is covered with glassy carbon, even if it is used repeatedly, wear and damage are unlikely to occur and durability is good.

以上の説明は、本発明の実施の形態についての説明であって、この発明を限定するものではなく、様々な変形例を容易に実施することができる。又、各実施形態における構成要素、機能、特徴あるいは方法ステップを適宜組み合わせて構成される装置又は方法も本発明に含まれるものである。   The above description is the description of the embodiment of the present invention, and does not limit the present invention, and various modifications can be easily implemented. In addition, an apparatus or method configured by appropriately combining components, functions, features, or method steps in each embodiment is also included in the present invention.

例えば、以上の各実施の形態では、直方体状の本体部10を例にとって説明しているが、平板状の本体部を用いてもよいし、球状の本体部を用いてもよい。   For example, in each of the above embodiments, the rectangular parallelepiped main body 10 has been described as an example, but a flat main body may be used, or a spherical main body may be used.

第1の実施の形態に係る成形型の一例を示す斜視図である。It is a perspective view which shows an example of the shaping | molding die concerning 1st Embodiment. 図1のI-I線断面図である。It is the II sectional view taken on the line of FIG. 成形型の平面図である。It is a top view of a shaping | molding die. 図2の要部を拡大した断面図である。It is sectional drawing to which the principal part of FIG. 2 was expanded. 変形例に係る成形型の平面図である。It is a top view of the shaping | molding die which concerns on a modification. 図5のVI-VI線断面図である。FIG. 6 is a sectional view taken along line VI-VI in FIG. 5. 別の変形例に係る成形型の平面図である。It is a top view of the shaping | molding die which concerns on another modification. 第2の実施の形態に係る成形型の一例を示す平面図である。It is a top view which shows an example of the shaping | molding die concerning 2nd Embodiment. 同じく、成形型の斜視図である。Similarly, it is a perspective view of a mold. 変形例に係る成形型の斜視図である。It is a perspective view of the shaping | molding die concerning a modification. 第1の実施の形態に係る成形型の製造工程の一例を示す図である。It is a figure which shows an example of the manufacturing process of the shaping | molding die concerning 1st Embodiment. 第1の実施の形態に係る成形型を用いた成形工程の一例を示す図である。It is a figure which shows an example of the shaping | molding process using the shaping | molding die concerning 1st Embodiment. 図12の後続の工程を示す図である。FIG. 13 is a diagram showing a step subsequent to FIG. 12. 第1の実施の形態に係る成形型を用いて製造される転写物の一例を示す図である。It is a figure which shows an example of the transcription | transfer material manufactured using the shaping | molding die concerning 1st Embodiment. 本発明の実施の形態に係るガラス状炭素部材の一例を示し、(a)は断面図、(b)は(a)の要部拡大図である。An example of the glassy carbon member which concerns on embodiment of this invention is shown, (a) is sectional drawing, (b) is a principal part enlarged view of (a). 黒鉛部の結晶構造を示す図である。It is a figure which shows the crystal structure of a graphite part. HIP処理した場合の本体部に対するX線を用いた分析結果を示す図である。It is a figure which shows the analysis result using the X-ray with respect to the main-body part at the time of HIP processing. 成形型の別の製造工程の一例を示す図で、(a)は穴部を設けた本体部を示し、(b)はHIP処理した場合の本体部を示し、(c)は完成した成形型を示す断面図である。It is a figure which shows an example of another manufacturing process of a shaping | molding die, (a) shows the main-body part which provided the hole part, (b) shows the main-body part at the time of HIP processing, (c) is the completed shaping | molding die FIG.

符号の説明Explanation of symbols

1、20、25、26、30、35…成形型、2…ガラス状炭素部、3…黒鉛部、11、12,13、21、22,23、24…穴部、11c、12c、13c…黒鉛エリア、11d、12d、13d…ガラス状炭素エリア、31、36…凸部、40、41、44…凹部、50…成型装置、61…転写物。   DESCRIPTION OF SYMBOLS 1, 20, 25, 26, 30, 35 ... Mold, 2 ... Glassy carbon part, 3 ... Graphite part, 11, 12, 13, 21, 22, 23, 24 ... Hole part, 11c, 12c, 13c ... Graphite area, 11d, 12d, 13d ... glassy carbon area, 31, 36 ... convex, 40, 41, 44 ... concave, 50 ... molding device, 61 ... transcript.

Claims (10)

ガラス状炭素からなるガラス状炭素部の内側に黒鉛からなる黒鉛部が形成されているガラス状炭素部材を用いた成形型であって、
側部または底部に前記黒鉛部および前記ガラス状炭素部がともに露出している凹凸部を有することを特徴とする成形型。
A mold using a glassy carbon member in which a graphite part made of graphite is formed inside a glassy carbon part made of glassy carbon,
A mold having a concavo-convex part in which both the graphite part and the glassy carbon part are exposed at a side part or a bottom part.
ガラス状炭素からなるガラス状炭素部の内側に黒鉛からなる黒鉛部が形成されているガラス状炭素部材を用いた成形型であって、
前記ガラス状炭素部および前記黒鉛部がともに露出している凹凸部を有し、
前記凹凸部の側部または底部のうちの前記黒鉛部が露出している黒鉛エリアが、前記ガラス状炭素部が露出しているガラス状炭素エリアよりも大きく形成されていることを特徴とする成形型。
A mold using a glassy carbon member in which a graphite part made of graphite is formed inside a glassy carbon part made of glassy carbon,
The glassy carbon part and the graphite part have an uneven part that is exposed,
Molding characterized in that the graphite area where the graphite part of the side part or bottom part of the uneven part is exposed is formed larger than the glassy carbon area where the glassy carbon part is exposed. Type.
前記凹凸部の前記ガラス状炭素部を通る部分の深さよりも前記黒鉛部を通る部分の深さが大きいことを特徴とする請求項1または2記載の成形型。   The mold according to claim 1 or 2, wherein a depth of a portion passing through the graphite portion is greater than a depth of a portion passing through the glassy carbon portion of the uneven portion. 前記ガラス状炭素部材として、直方体状に形成された直方体状炭素部材を用い、該直方体状炭素部材における1つの表面部だけに前記凹凸部が形成されていることを特徴とする請求項1〜3のいずれか一項記載の成形型。   A rectangular parallelepiped carbon member formed in the shape of a rectangular parallelepiped is used as the glassy carbon member, and the uneven portion is formed only on one surface portion of the rectangular parallelepiped carbon member. The mold according to any one of the above. 前記ガラス状炭素部材として、直方体状に形成された直方体状炭素部材を用い、該直方体状炭素部材を構成する角部を含む前記ガラス状炭素部および前記黒鉛部の一部が除去されることによって前記凹凸部が形成されていることを特徴とする請求項1〜4のいずれか一項記載の成形型。   As the glassy carbon member, a rectangular parallelepiped carbon member formed in a rectangular parallelepiped shape is used, and a part of the glassy carbon part and the graphite part including corner portions constituting the rectangular parallelepiped carbon member are removed. The mold according to claim 1, wherein the uneven portion is formed. ガラス状炭素からなるガラス状炭素部の内側に黒鉛からなる黒鉛部が形成されているガラス状炭素部材を用いた成形型の製造方法であって、
前記ガラス状炭素部材における前記ガラス状炭素部および前記黒鉛部の一部を除去して、側部または底部に前記黒鉛部および前記ガラス状炭素部がともに露出している凹凸部を形成することを特徴とする成形型の製造方法。
A method for producing a mold using a glassy carbon member in which a graphite part made of graphite is formed inside a glassy carbon part made of glassy carbon,
Removing a part of the glassy carbon part and the graphite part in the glassy carbon member to form a concavo-convex part in which the graphite part and the glassy carbon part are both exposed at a side part or a bottom part; A method for manufacturing a forming mold.
前記ガラス状炭素で構成される基材を熱間等方圧加圧法(Hot Isostatic Pressing)処理することによって、前記基材を構成するガラス状炭素からなるガラス状炭素部の内側に黒鉛からなる黒鉛部を形成して前記ガラス状炭素部材を形成することを特徴とする請求項6記載の成形型の製造方法。   Graphite made of graphite on the inner side of the glassy carbon portion made of glassy carbon constituting the substrate by subjecting the substrate made of glassy carbon to a hot isostatic pressing method (Hot Isostatic Pressing) The manufacturing method of the shaping | molding die of Claim 6 which forms a part and forms the said glassy carbon member. 前記熱間等方圧加圧法処理を行うときに、160Mpa〜200Mpaの範囲で加圧し、かつ1500℃〜2500℃の範囲で加熱することを特徴とする請求項7記載の成形型の製造方法。   The method for producing a mold according to claim 7, wherein when the hot isostatic pressing method is performed, pressurization is performed in a range of 160 Mpa to 200 Mpa and heating is performed in a range of 1500 ° C to 2500 ° C. 前記熱間等方圧加圧法処理を行うときに、160Mpa〜180Mpaの範囲で加圧し、かつ1500℃〜2000℃の範囲で加熱することを特徴とする請求項7記載の成形型の製造方法。   The method for producing a mold according to claim 7, wherein when performing the hot isostatic pressing method, pressurization is performed in a range of 160 Mpa to 180 Mpa and heating is performed in a range of 1500 ° C to 2000 ° C. 前記熱間等方圧加圧法処理を行う前に、500℃〜1400℃の範囲で前記基材を加熱する事前熱処理を行うことを特徴とする請求項7〜9のいずれか一項記載の成形型の製造方法。   The molding according to any one of claims 7 to 9, wherein a preliminary heat treatment is performed to heat the substrate in a range of 500 ° C to 1400 ° C before the hot isostatic pressing method treatment. Mold manufacturing method.
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JPH02270508A (en) * 1989-04-12 1990-11-05 Ibiden Co Ltd Black lead mold for molding plastic
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JP2008001077A (en) * 2006-06-26 2008-01-10 Matsushita Electric Ind Co Ltd Carbon mold and its manufacturing method

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JPS63162205A (en) * 1986-12-25 1988-07-05 Ibiden Co Ltd Graphite mold for plastic molding
JPH0251412A (en) * 1988-08-15 1990-02-21 Kobe Steel Ltd Production of graphite crystal having high orientation characteristic
JPH02212106A (en) * 1989-02-13 1990-08-23 Ibiden Co Ltd Mold for molding plastic
JPH02270508A (en) * 1989-04-12 1990-11-05 Ibiden Co Ltd Black lead mold for molding plastic
JP2002255566A (en) * 2001-02-26 2002-09-11 Toshiba Mach Co Ltd Die for forming glass and method for manufacturing product of formed glass
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020116584A1 (en) * 2018-12-07 2020-06-11 ニプロ株式会社 Device for processing glass member

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