JP4943876B2 - Thermal nanoimprint method - Google Patents

Thermal nanoimprint method Download PDF

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JP4943876B2
JP4943876B2 JP2007019442A JP2007019442A JP4943876B2 JP 4943876 B2 JP4943876 B2 JP 4943876B2 JP 2007019442 A JP2007019442 A JP 2007019442A JP 2007019442 A JP2007019442 A JP 2007019442A JP 4943876 B2 JP4943876 B2 JP 4943876B2
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mold
molding material
volume
thermal nanoimprint
nanoimprint method
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JP2008183813A (en
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光典 小久保
裕喜 杉浦
貴晴 田代
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Shibaura Machine Co Ltd
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Toshiba Machine Co Ltd
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Description

本発明は、熱可塑性樹脂の被成形材料に対して、型に形成した微細な凹凸パターンを転写する熱ナノインプリント方法に係り、さらに詳細には、微細な凹凸パターンを転写した後の製品のバリの発生を抑制した熱ナノインプリント方法に関する。   The present invention relates to a thermal nanoimprint method for transferring a fine concavo-convex pattern formed on a mold to a thermoplastic resin molding material. More specifically, the present invention relates to burrs of a product after transferring a fine concavo-convex pattern. The present invention relates to a thermal nanoimprint method in which generation is suppressed.

近年、型に形成したナノスケールの微細な凹凸パターンを、熱可塑性樹脂の被形成材料に転写する熱ナノインプリントが開発されている。この熱ナノインプリントは、基板上に熱可塑性樹脂の被形成材料を載置し加熱して十分に柔らかくなった後に、ナノスケールの微細な凹凸パターンを形成した型（モールド）を前記被形成材料へ押圧して、前記凹凸パターンの転写を行うものである（例えば特許文献１参照）。
特開２００１−２６０５２号公報 In recent years, thermal nanoimprints have been developed that transfer a nanoscale fine uneven pattern formed in a mold onto a thermoplastic resin forming material. In this thermal nanoimprint, after a thermoplastic resin forming material is placed on a substrate and heated to be sufficiently soft, a mold (mold) on which a nanoscale fine uneven pattern is formed is pressed against the forming material. Then, the concavo-convex pattern is transferred (for example, see Patent Document 1).
JP 2001-26052 A

熱可塑性樹脂の被形成材料を基板上に単に載置して加熱し、型によって前記被形成材料を押圧する構成においては、製品としての被形成材料の周縁部にバリが生じ、二次加工として前記バリを除去する必要がある。   In a configuration in which a thermoplastic resin forming material is simply placed on a substrate and heated, and the forming material is pressed by a mold, burrs are generated at the peripheral portion of the forming material as a product, and as a secondary processing It is necessary to remove the burrs.

本発明は、前述のごとき問題に鑑みてなされたもので、型に形成された微細な凹凸パターンを熱可塑性樹脂の被成形材料に転写する熱ナノインプリント方法であって、雌型に形成された凹部内に、体積が前記凹部の体積にほぼ等しい体積の被成形材料を配置し、前記型及び被成形材料を加熱すると共に前記型でもって前記被成形材料を押圧し、押圧した状態でもって前記型及び被成形材料の冷却を行い、その後に離型を行うことを特徴とするものである。   The present invention has been made in view of the above-described problems, and is a thermal nanoimprint method for transferring a fine uneven pattern formed on a mold to a thermoplastic resin molding material, and a recess formed on a female mold. A molding material having a volume substantially equal to the volume of the concave portion is disposed therein, the mold and the molding material are heated, the molding material is pressed with the mold, and the mold is pressed. The material to be molded is cooled, and then the mold release is performed.

また、前記熱ナノインプリント方法において、前記被成形材料は、上部周縁部に体積調整のための面取り部が形成してあることを特徴とするものである。   In the thermal nanoimprint method, the molding material is characterized in that a chamfered portion for volume adjustment is formed on the upper peripheral edge.

本発明によれば、型に形成した微細な凹凸パターンの転写は、熱可塑性樹脂の被成形材料を雌型の凹部内に収納して行うことができる。すなわち、前記被成形材料が前記凹部から突出することを抑制して転写を行うことができ、製品においてのバリの発生を抑制することができるものである。   According to the present invention, the transfer of the fine concavo-convex pattern formed on the mold can be performed by accommodating the molding material of the thermoplastic resin in the concave portion of the female mold. That is, it is possible to perform transfer while suppressing the material to be molded from protruding from the concave portion, and it is possible to suppress the occurrence of burrs in the product.

また、例えバリが発生したような場合であっても、発生量が少なく、小さなバリであるから、簡単に除去することができるものである。   Even if burrs are generated, the amount of generated burrs is small and the burrs can be easily removed.

図１を参照するに、概念的、概略的に示すように、本発明の実施形態に係る熱ナノインプリント装置１は、素材台３を備えており、この素材台３上には成形用の凹部５を備えた雌型７が装着してある。前記凹部５は、凹部５の底部側よりも上部の開口部側が僅かに大きくなるように抜き勾配が設定してある。そして、前記素材台３には、前記雌型７及び前記凹部５内の熱可塑性樹脂からなる被成形材料９を加熱し、かつ冷却するための加熱・冷却手段１１が備えられている。前記被成形材料９の体積は前記凹部５の体積にほぼ等しく形成してある。   Referring to FIG. 1, as conceptually and schematically, a thermal nanoimprint apparatus 1 according to an embodiment of the present invention includes a material table 3, and a molding recess 5 is provided on the material table 3. A female die 7 having the above is mounted. The draft angle of the concave portion 5 is set so that the upper opening side is slightly larger than the bottom side of the concave portion 5. The material base 3 is provided with heating / cooling means 11 for heating and cooling the molding material 9 made of the thermoplastic resin in the female mold 7 and the recess 5. The volume of the molding material 9 is substantially equal to the volume of the recess 5.

前記素材台３の上方位置には、当該素材台３と対向するスタンパ台１３が上下動自在に備えられており、このスタンパ台１３の下面には、前記雌型７における前記凹部５に対応する部分に微細な凹凸パターン１５を形成したスタンパ（型）１７が取付けてある。そして、前記スタンパ台１３には前記スタンパ１７の加熱，冷却を行うための加熱・冷却手段１９が備えられている。   A stamper table 13 facing the material table 3 is provided at a position above the material table 3 so as to be movable up and down. A lower surface of the stamper table 13 corresponds to the recess 5 in the female mold 7. A stamper (mold) 17 on which a fine uneven pattern 15 is formed is attached to the portion. The stamper base 13 is provided with heating / cooling means 19 for heating and cooling the stamper 17.

以上のごとき構成において、前記雌型７における凹部５の体積にほぼ等しい体積に予め形成した被成形材料９を前記凹部５内に配置し、素材台３に備えた加熱・冷却手段１１によって雌型７及び被成形材料９を加熱すると共に、スタンパ台１３に備えた加熱・冷却手段１９によってスタンパ１７を加熱する。そして、前記被成形材料９が十分に軟化した後、スタンパ台１３を下降してスタンパ１７の下面に備えた凹凸パターン１５でもって前記被成形材料９を押圧すると、被成形材料９は前記凹部５内に充填されると共に、前記凹凸パターン１５が被成形材料９の上面に転写される。   In the configuration as described above, the molding material 9 formed in advance in a volume substantially equal to the volume of the recess 5 in the female mold 7 is disposed in the recess 5, and the female mold is formed by the heating / cooling means 11 provided in the material table 3. 7 and the molding material 9 are heated, and the stamper 17 is heated by the heating / cooling means 19 provided in the stamper base 13. Then, after the molding material 9 is sufficiently softened, when the stamping base 13 is lowered and the molding material 9 is pressed by the concave / convex pattern 15 provided on the lower surface of the stamper 17, the molding material 9 becomes the concave portion 5. The concave / convex pattern 15 is transferred onto the upper surface of the molding material 9 while being filled therein.

この際、前記被成形材料９の体積は前記凹部５の体積にほぼ等しく予め形成してあるので、図２に示すように、前記雌型７の上面とスタンパ１７の下面との間の微少間隙２１内に被成形材料９の一部がはみ出すことなく成形加工（転写加工）することができるものである。すなわち前記微少間隙２１に被成形材料１９の一部がはみ出すことによるバリの発生を抑制することができるものである。   At this time, the volume of the molding material 9 is formed in advance so as to be substantially equal to the volume of the recess 5, so that a minute gap between the upper surface of the female die 7 and the lower surface of the stamper 17 is formed as shown in FIG. The molding material 9 can be molded (transferred) without protruding part of the molding material 9. That is, it is possible to suppress the generation of burrs due to a part of the molding material 19 protruding into the minute gap 21.

なお、前記微少間隙２１に、バリが発生したような場合であっても、量は少ないものであり、簡単に除去することができるものである。   Even when burrs are generated in the minute gap 21, the amount is small and can be easily removed.

前述のごとくスタンパ１７によって被成形材料１９を押圧した状態にあるとき、素材台３に備えた加熱・冷却手段１１及びスタンパ台１３に備えた加熱・冷却手段１９によって全体の冷却を行うことにより、前記被成形材料１９の硬化が行われる。その後、スタンパ台１３を上昇して離型を行うことにより、前記凹部５の形状に形成され、かつ上面に凹凸パターン１５が転写された製品が得られるものである。   When the molding material 19 is pressed by the stamper 17 as described above, the entire cooling is performed by the heating / cooling means 11 provided in the material table 3 and the heating / cooling means 19 provided in the stamper table 13. The molding material 19 is cured. Thereafter, the stamper base 13 is lifted and released to obtain a product formed in the shape of the recess 5 and having the concavo-convex pattern 15 transferred to the upper surface.

ところで、前記被成形材料９の体積が前記凹部５の体積にほぼ等しくなるように調整するには、前記凹部５の形状にほぼ近似して形成した被成形材料９の上面周縁に、図３（Ａ）に示すように、体積調整のための面取り部９Ｃを上部周縁に形成することによって容易に調整することができるものである。なお、前記面取り部９Ｃの形状としてはＣ面取りに限ることなく、Ｒ面取りでもよく、また図３（Ｂ）に示すように、断面形状が凹状を呈するＲ面取りとすることも可能である。さらには、図３（Ｃ）に示すように、被成形材料９の上部周縁部に段部を形成し、この段部を面取部の１例とすることができる。すなわち、体積調整のための面取り部の形状としては、前記形状に限ることなく、種々の形状とすることができるものである。   By the way, in order to adjust the volume of the molding material 9 so as to be substantially equal to the volume of the concave portion 5, the periphery of the upper surface of the molding material 9 formed so as to approximate the shape of the concave portion 5 is shown in FIG. As shown to A), it can adjust easily by forming the chamfering part 9C for volume adjustment in an upper periphery. The shape of the chamfered portion 9C is not limited to C chamfering, but may be R chamfering, or may be R chamfering having a concave cross section as shown in FIG. Further, as shown in FIG. 3C, a stepped portion is formed on the upper peripheral edge of the molding material 9, and this stepped portion can be taken as an example of a chamfered portion. That is, the shape of the chamfered portion for volume adjustment is not limited to the above shape, and various shapes can be used.

以上のごとき説明より理解されるように、成形後の製品におけるバリの発生を抑制することができるので、バリ取り加工の二次加工が不要となるものであり、生産性向上を図ることができるものである。   As can be understood from the above description, since the generation of burrs in a product after molding can be suppressed, secondary processing of deburring is not necessary, and productivity can be improved. Is.

本発明に係る熱ナノインプリント装置を概念的、概略的に示した説明図である。It is explanatory drawing which showed notionally and schematically the thermal nanoimprint apparatus which concerns on this invention. 被成形材料の押圧状態を示す説明図である。It is explanatory drawing which shows the press state of a molding material. 被成形材料の形状説明図である。It is shape explanatory drawing of a to-be-molded material.

符号の説明Explanation of symbols

３ 素材台
５ 凹部
７ 雌型
９ 被成形材料
１３ スタンパ台
１５ 凹凸パターン
１７ スタンパ 3 Material stand 5 Recess 7 Female mold 9 Molding material 13 Stamper base 15 Concave / convex pattern 17 Stamper

Claims (2)

型に形成された微細な凹凸パターンを熱可塑性樹脂の被成形材料に転写する熱ナノインプリント方法であって、雌型に形成された凹部内に、体積が前記凹部の体積にほぼ等しい体積の被成形材料を配置し、前記型及び被成形材料を加熱すると共に前記型でもって前記被成形材料を押圧し、押圧した状態でもって前記型及び被成形材料の冷却を行い、その後に離型を行うことを特徴とする熱ナノインプリント方法。   A thermal nanoimprint method for transferring a fine concavo-convex pattern formed on a mold onto a thermoplastic resin molding material, wherein the molding has a volume substantially equal to the volume of the concave portion in the concave portion formed in the female mold. Disposing the material, heating the mold and the molding material, pressing the molding material with the mold, cooling the mold and the molding material in the pressed state, and then releasing the mold The thermal nanoimprint method characterized by this. 請求項１に記載の熱ナノインプリント方法において、前記被成形材料は、上部周縁部に体積調整のための面取り部が形成してあることを特徴とする熱ナノインプリント方法。   The thermal nanoimprint method according to claim 1, wherein the material to be molded has a chamfered portion for volume adjustment formed on an upper peripheral edge.
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WO2013168634A1 (en) 2012-05-08 2013-11-14 旭化成株式会社 Transfer method and thermal nanoimprint device

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JP6065498B2 (en) * 2012-09-26 2017-01-25 凸版印刷株式会社 Method for producing cellulose nanofiber laminate
JP6790620B2 (en) * 2016-09-07 2020-11-25 富士ゼロックス株式会社 Manufacturing method of molded products, manufacturing method of optical members

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JPH1086163A (en) * 1996-09-18 1998-04-07 Okura Ind Co Ltd Manufacture of artificial warble tone molded article
JP4209602B2 (en) * 2001-06-22 2009-01-14 株式会社名機製作所 Optical product press molding apparatus and press molding method
JP2006007435A (en) * 2004-06-22 2006-01-12 Konica Minolta Holdings Inc Molding method and molding apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013168634A1 (en) 2012-05-08 2013-11-14 旭化成株式会社 Transfer method and thermal nanoimprint device
EP2979845A1 (en) 2012-05-08 2016-02-03 Asahi Kasei E-materials Corporation Transfer method and thermal nanoimprinting apparatus

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