JP2009283906A - 半導体装置及びその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 77
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 77
- 239000001301 oxygen Substances 0.000 claims abstract description 77
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- 230000005669 field effect Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- 238000000137 annealing Methods 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 44
- 230000008569 process Effects 0.000 abstract description 27
- 239000000463 material Substances 0.000 description 20
- 230000001681 protective effect Effects 0.000 description 19
- 239000010410 layer Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 13
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 11
- 229920005591 polysilicon Polymers 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 239000003989 dielectric material Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 7
- 238000004377 microelectronic Methods 0.000 description 7
- 239000011241 protective layer Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229910021332 silicide Inorganic materials 0.000 description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000009417 prefabrication Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 150000002603 lanthanum Chemical class 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910015868 MSiO Inorganic materials 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823857—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823864—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate sidewall spacers, e.g. double spacers, particular spacer material or shape
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7843—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being an applied insulating layer
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- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】High-Kゲート誘電膜104の側面と接触するようにHigh-K誘電膜102を形成した後、酸素雰囲気中でアニールする。
【選択図】 図1
Description
Claims (5)
- 半導体基板にメタルゲート及び高誘電率ゲート誘電膜を有する電界効果トランジスタを形成し、
前記高誘電率ゲート誘電膜の側面を露出させた状態で高誘電率誘電膜を形成して前記高誘電率誘電膜を前記高誘電率ゲート誘電膜に接触させ、
酸素を含む雰囲気中でアニールすることにより前記高誘電率誘電膜を介して前記高誘電率ゲート誘電膜に酸素を導入することを特徴する半導体装置の製造方法。 - 前記アニール後に、前記高誘電率誘電膜を除去することを特徴する請求項1記載の半導体装置の製造方法。
- 前記アニール後に、前記高誘電率誘電膜上にシリコン窒化膜を形成することを特徴する請求項1記載の半導体装置の製造方法。
- 半導体基板にメタルゲート及び高誘電率ゲート誘電膜を有するpチャネルの電界効果トランジスタを形成し、
前記高誘電率ゲート誘電膜の側面を露出させた状態で高誘電率誘電膜を形成して前記高誘電率誘電膜を前記高誘電率ゲート誘電膜に接触させ、
酸素を含む雰囲気中でアニールすることにより前記高誘電率誘電膜を介して前記高誘電率ゲート誘電膜に酸素を導入し、前記pチャネルの電界効果トランジスタの閾値をシフトさせることを特徴する半導体装置の製造方法。 - 半導体基板の第1の領域に形成され、メタルゲート及び高誘電率ゲート誘電膜を有するpチャネルの電界効果トランジスタと、
前記半導体基板の第2の領域に形成され、メタルゲート及び高誘電率ゲート誘電膜を有するnチャネルの電界効果トランジスタと、
前記pチャネルの電界効果トランジスタの前記高誘電率ゲート誘電膜と接触するように前記第1の領域上に形成された高誘電率誘電膜と
を具備したことを特徴する半導体装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/124,794 US7932150B2 (en) | 2008-05-21 | 2008-05-21 | Lateral oxidation with high-K dielectric liner |
Publications (2)
Publication Number | Publication Date |
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JP2009283906A true JP2009283906A (ja) | 2009-12-03 |
JP2009283906A5 JP2009283906A5 (ja) | 2011-10-13 |
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Family Applications (1)
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JP2009064980A Pending JP2009283906A (ja) | 2008-05-21 | 2009-03-17 | 半導体装置及びその製造方法 |
Country Status (2)
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US (1) | US7932150B2 (ja) |
JP (1) | JP2009283906A (ja) |
Families Citing this family (14)
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US7256349B2 (en) * | 2004-08-11 | 2007-08-14 | 3M Innovative Properties Company | Telecommunications cable enclosure |
DE102010038744B4 (de) * | 2010-07-30 | 2012-08-30 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG | Erhöhung der Robustheit in einem Doppelverspannungsschichtenverfahren in einem Halbleiterbauelement durch Anwenden einer Nasschemie |
US8304306B2 (en) | 2011-03-28 | 2012-11-06 | International Business Machines Corporation | Fabrication of devices having different interfacial oxide thickness via lateral oxidation |
US9041116B2 (en) | 2012-05-23 | 2015-05-26 | International Business Machines Corporation | Structure and method to modulate threshold voltage for high-K metal gate field effect transistors (FETs) |
US8704332B2 (en) | 2012-06-13 | 2014-04-22 | International Business Machines Corporation | Metal oxide semiconductor field effect transistor (MOSFET) gate termination |
US9093380B2 (en) * | 2013-06-05 | 2015-07-28 | Texas Instruments Incorporated | Dielectric liner added after contact etch before silicide formation |
US9466492B2 (en) | 2014-05-02 | 2016-10-11 | International Business Machines Corporation | Method of lateral oxidation of NFET and PFET high-K gate stacks |
US9536794B2 (en) | 2015-03-27 | 2017-01-03 | International Business Machines Corporation | Techniques for dual dielectric thickness for a nanowire CMOS technology using oxygen growth |
US10593801B2 (en) * | 2015-04-10 | 2020-03-17 | Samsung Electronics Co., Ltd. | Semiconductor devices and methods of fabricating the same |
US10062693B2 (en) | 2016-02-24 | 2018-08-28 | International Business Machines Corporation | Patterned gate dielectrics for III-V-based CMOS circuits |
US10593600B2 (en) | 2016-02-24 | 2020-03-17 | International Business Machines Corporation | Distinct gate stacks for III-V-based CMOS circuits comprising a channel cap |
US10147875B1 (en) * | 2017-08-31 | 2018-12-04 | Micron Technology, Inc. | Semiconductor devices and electronic systems having memory structures |
CN109216200B (zh) * | 2018-07-27 | 2021-05-18 | 上海集成电路研发中心有限公司 | 一种基于体硅全包围栅极SOI FinFET的制作方法 |
US11728405B2 (en) * | 2019-09-28 | 2023-08-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stress-inducing silicon liner in semiconductor devices |
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US5904517A (en) * | 1998-07-08 | 1999-05-18 | Advanced Micro Devices, Inc. | Ultra thin high K spacer material for use in transistor fabrication |
WO2005074037A1 (ja) * | 2004-01-28 | 2005-08-11 | Nec Corporation | 半導体装置の製造方法 |
JP2007123662A (ja) * | 2005-10-31 | 2007-05-17 | Renesas Technology Corp | 半導体装置の製造方法および半導体装置 |
WO2008132026A1 (en) * | 2007-05-01 | 2008-11-06 | International Business Machines Corporation | Threshold adjustment for high-k gate dielectric cmos |
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US7220635B2 (en) * | 2003-12-19 | 2007-05-22 | Intel Corporation | Method for making a semiconductor device with a metal gate electrode that is formed on an annealed high-k gate dielectric layer |
US7323423B2 (en) * | 2004-06-30 | 2008-01-29 | Intel Corporation | Forming high-k dielectric layers on smooth substrates |
US7488656B2 (en) * | 2005-04-29 | 2009-02-10 | International Business Machines Corporation | Removal of charged defects from metal oxide-gate stacks |
US8338887B2 (en) * | 2005-07-06 | 2012-12-25 | Infineon Technologies Ag | Buried gate transistor |
US20070141798A1 (en) * | 2005-12-20 | 2007-06-21 | Intel Corporation | Silicide layers in contacts for high-k/metal gate transistors |
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2008
- 2008-05-21 US US12/124,794 patent/US7932150B2/en not_active Expired - Fee Related
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2009
- 2009-03-17 JP JP2009064980A patent/JP2009283906A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US5904517A (en) * | 1998-07-08 | 1999-05-18 | Advanced Micro Devices, Inc. | Ultra thin high K spacer material for use in transistor fabrication |
WO2005074037A1 (ja) * | 2004-01-28 | 2005-08-11 | Nec Corporation | 半導体装置の製造方法 |
JP2007123662A (ja) * | 2005-10-31 | 2007-05-17 | Renesas Technology Corp | 半導体装置の製造方法および半導体装置 |
WO2008132026A1 (en) * | 2007-05-01 | 2008-11-06 | International Business Machines Corporation | Threshold adjustment for high-k gate dielectric cmos |
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US20090289306A1 (en) | 2009-11-26 |
US7932150B2 (en) | 2011-04-26 |
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