JP2009240938A - Fan filter unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fan filter unit to be used in the conveyer in a clean room requiring a clean space which facilitates its attachment and attachment and removal of the dust removal filter, the chemical filter, etc. <P>SOLUTION: The fan filter unit has a chamber 3 containing a fan 1, motor 2 and a dust removal filter 4 and a chemical filter 5 and an attachment and removal door 7 in the side surface of the chamber. The dust removal filter or the chemical filter is fixed to fixing protrusions 9 of the inside surface of the chamber and the attachment and removal door 7. The frame portion 10 for the filter has protrusions 11, holes 14 and an opening 12. The configuration allows attachment and removal of the dust removal filter 4 or the chemical filter 5 from the opening, reduces the time for attachment of the filters to the structure and replacement of the filters and prevents wrong attachment of the filters. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a fan filter unit used for a transfer device in a clean room requiring a clean space such as a semiconductor factory or a food factory.

  Conventionally, this type of fan filter unit has been known as a laminated structure of a chamber and a dust filter on the ceiling surface of a transfer device (see, for example, Patent Document 1).

  Here, a specific configuration of the conventional fan filter unit will be described with reference to FIG.

As shown in the figure, the fan filter unit 100 includes a fan unit 116 including a fan 111 and a motor 112, a chamber 113 containing the fan unit 116, a chemical filter 114 detachable below the chamber 113, and a dust removal filter 115. Consists of The chemical filter 114 has a substantially C or B-shaped cross section, and is provided with a through hole 201 that penetrates the front and back. The frame portion of the dust filter 115 is provided with an upstream through hole 111 that penetrates the upstream side of the filter and a downstream through hole 112 that penetrates the downstream side. The fixing means 103 is fixed to the chamber 113 through the upstream through hole 101 while the chemical filter 114 is interposed in the chamber 113. The fan filter unit 100 is arranged on the top surface of the opening of the structure 130 provided with the opening, and is fixed to the edge of the opening by the body fixing metal fitting 104 and the metal fitting fixing means 105 arranged in the chamber 113. . The downstream through-hole 102 of the dust filter 115 is provided with a closing means 106 after the dust filter 115 is fixed to the chamber 113. The shape of the chemical filter 114 and the dust removal filter 115 is always the same as that of the chamber 113 and constitutes the fan filter unit 100.
Japanese Patent Laid-Open No. 62-157127

  In such a conventional laminated structure of the chamber 113 and the dust filter 115, when replacing the dust filter 115, first, the fan filter unit 100 is removed from the structure 130 by removing the main body fixing metal fitting 104 or the metal fitting fixing means 105. Further, since the filter fixing means 103 at a plurality of places are removed for replacement of the dust removal filter 115, there is a problem that it takes time to attach / detach the filter, and improvement of the filter attaching / detaching work is required.

  In addition, since the chemical filter is usually attached between the chamber containing the fan unit and the dust removal filter, there is a problem that it is necessary to remove the fan filter unit even when replacing the chemical filter. Improvement is required.

  Moreover, when attaching a dust removal filter or a chemical filter, there exists a subject which eliminates the difference in the stacking order of the filter of the same shape, and quickness of a lamination | stacking order confirmation is requested | required.

  In general, since the life of a chemical filter is shorter than that of a dust filter, there is a problem that the maintenance time frequently occurs, and improvement in maintainability is required.

  Also, since the clean room is installed on the top surface of the transport device, the top surface of the transport device is temporarily open during maintenance, so the cleanliness inside the device tends to decrease significantly and is re-installed. Later, there is a problem of recovery of the cleanliness of the transfer device, and a short recovery time is required.

  In general, since a plurality of chemical filters are combined and combined, a stacked structure of a chamber and a dust filter is provided, and there is a considerable mass. There is a problem in workability at the time of assembly, and weight reduction is required.

  Moreover, although the installation of the dust filter or the chemical filter is instructed by a label or the like, there is a problem that it can be installed upside down, and improvement of the upside down installation is required.

  In addition, there is a problem in mounting the dust removal filter or chemical filter on the square while checking the mounting surface, and it is required to improve the work reliably.

  Furthermore, touching the surface of the filter medium when handling a dust filter or chemical filter is a factor that degrades performance and requires careful consideration in handling, but there are problems in supporting the upper or lower surface of the frame. Therefore, a means for easily carrying the filter without touching the filter medium surface is required.

  The present invention solves such a conventional problem, and the dust filter and the chemical filter can be attached and detached from the side opening / closing door, and the chamber enclosed in the fan unit can be removed from the installation part. An object of the present invention is to provide a fan filter unit that can exchange filters, can incorporate various filters after mounting the device without enclosing each filter, and can exchange filters in a short time.

  In order to achieve the above object, a fan filter unit according to the present invention includes a fan unit including a fan and a motor, a chamber containing a dust filter or a chemical filter below the fan unit, a fixing unit for the dust filter, and a chamber. The fan filter unit has a dust filter attachment / detachment port and an attachment / detachment door on a side surface.

  By this means, the dust filter or chemical filter is taken out from the attachment / detachment door provided on the side surface before being attached to the structure. After the lightened fan unit is attached to the structure, the dust removal filter or chemical filter is attached to the attachment / detachment opening of the attachment / detachment door part. A fan filter unit to which a filter can be attached is obtained.

  Another means is to provide a plurality of fixing protrusions on the inner and outer surfaces of the chamber facing the inner surface and the removable door facing the inner and inner surfaces of the dust filter and chemical filter. It has a hole or a concave groove in the facing part.

  By this means, a fan filter unit can be obtained in which the stacking order can be quickly confirmed by adjusting the fixing protrusion to the perforated portion on the side surface of the dust filter or chemical filter, and the filter attaching / detaching operation can be improved.

  Another means is that a hole is provided on the lower surface of the frame portion of the dust filter and the chemical filter, and a protrusion is provided on the upper surface.

  By this means, a fan filter unit capable of improving the reverse installation of the filter can be obtained.

  Another means is a fan filter unit in which an elastic cushioning material is provided on the inner surface of the chamber and the detachable door provided with the fixing projections, with a predetermined thickness except for the fixing projections. .

  By this means, a fan filter unit capable of improving the attachment to the filter laminated structure can be obtained.

  Another means is to provide a groove on the side surface of the frame frame portion of the dust filter and chemical filter, and have a convex portion near the removable door on the inner surface of the chamber facing the groove.

  By this means, a fan filter unit capable of quickly confirming the filter stacking order can be obtained.

  Another means is to provide a flange protruding inward on the side perpendicular to the side having the detachable door at the bottom of the chamber, and corresponding to the hole provided in the lower surface of the dust filter inside the chamber of the flange. And a dust-proof filter mounted on the collar portion by sliding.

  By this means, a fan filter unit capable of replacing the filter in a short time can be obtained.

  Another means is to provide a flange protruding inward on the side perpendicular to the side having the detachable door at the bottom of the chamber, and corresponding to the hole provided in the lower surface of the dust filter inside the chamber of the flange. The dust removing filter is mounted on the collar portion by sliding.

  By this means, it is possible to obtain a fan filter unit that can perform the filter replacement work in a short time and can improve the filter attaching / detaching work.

  The other means is characterized in that the protrusion provided on the flange is provided with a displacement in a sliding direction when the dust filter is attached.

  By this means, a fan filter unit capable of preventing erroneous installation when replacing the filter is obtained.

  According to another means, when a plurality of protrusions provided on the flange portion are combined with a protrusion on one side and a protrusion on the opposite side facing each other, the interval between the protrusions is set for each pair. Is different.

  By this means, a fan filter unit capable of a reliable mounting operation at the time of filter replacement is obtained.

  Another means has an opening of a predetermined size on the side surface of the filter frame constituted by the rectangular frame having a surface separated from the filter medium surface.

  By this means, a fan filter unit can be obtained in which the filter can be easily carried.

  According to the present invention, the dust removal filter and the chemical filter can be taken out from the attachment / detachment opening on the side, the dust removal filter and the chemical filter can be removed before installation, and after installation, the weight is reduced to attach the dust removal filter and the chemical filter. It is possible to provide an effective fan filter unit that can be installed with a fan unit.

  Further, it is possible to provide a fan filter unit capable of fixing the dust removal filter and the chemical filter to the chamber without using a fixing means such as a screw.

  In addition, it is possible to provide an effective fan filter unit that can perform the installation direction and stacking order of the dust filter and the chemical filter without making a mistake.

  Further, when stacking the dust removal filter and the chemical filter, the resistance of the frame contact surface of the filter that is slipped from the side surface can be reduced, and a fan filter unit that can quickly attach and detach the dust removal filter and the chemical filter can be provided.

  Further, it is possible to provide an effective fan filter unit that can secure the airtightness of the chamber side surface of the dust removal filter or the chemical filter and can maintain the cleanliness of the downstream surface of the filter.

  In addition, it is possible to determine the mounting direction and the stacking order of the dust removal filter and the chemical filter, and to provide a fan filter unit that is effective in speeding up the maintenance work of the dust removal filter and the chemical filter.

  In addition, when the dust filter is housed in the chamber, it can reduce the resistance of the filter frame contact surface that slides in from the side and the inner bottom of the chamber bottom, and provides a fan filter unit that can easily attach and remove the dust filter it can.

  In addition, it is possible to provide a fan filter unit that is effective in reducing the resistance of the inner flange that can push the filter to the side of the chamber facing the attachment / detachment port when the dust removal filter is housed in the chamber.

  In addition, it is possible to provide a fan filter unit that can smoothly slide the dust filter and the chemical filter and can prevent erroneous insertion of the dust filter and the chemical filter.

  In addition, it is possible to provide an effective fan filter unit that can avoid erroneous installation of a dust removal filter, a dust removal filter of a chemical filter, or a chemical filter.

  Further, according to the present invention, it is possible to provide an effective fan filter unit in which the opening on the side surface of the frame of the dust filter or chemical filter can be used as a handle, and the dust filter or chemical filter can be easily attached or detached.

  According to the first aspect of the present invention, there is provided a fan unit comprising a fan and a motor, a chamber containing a dust removal filter and a chemical filter below the fan unit, a fixing means for the dust removal filter, and an attachment of the dust removal filter to a side surface of the chamber. A fan filter unit having a degassing opening and a detachable door is provided, and a dust filter and a chemical filter can be detachable from the detachable opening on the side of the chamber in a short time without removing the fan filter unit from the structure.

  The fan filter unit according to claim 1, wherein a plurality of fixing protrusions are provided on a removable door facing the inner side surface and the inner side surface of the chamber, and a perforation disposed on a side surface of the dust filter or the frame of the chemical filter. It can be fixed by being applied to a part or a recess.

  In addition, the frame part of the dust filter or chemical filter has a hole or a concave groove in the facing part of the detachable door that faces the inner side surface and the inner side surface of the chamber, and has a predetermined interval and size. Incorrect insertion can be prevented.

  In addition, the frame portion of the plurality of dust filters or chemical filters is provided with a hole on the lower surface and a cylindrical or spherical protrusion on the upper surface, and the protrusion and the filter frame are in contact with each other. The area is reduced, smooth sliding is possible, and relative positioning of the dust filter and chemical filter can be achieved.

  In addition, the inner surface of the chamber and the detachable door provided with fixing protrusions has an elastic buffer material at a predetermined thickness except for the fixing protrusions, and the laminated dimensions of the dust filter and chemical filter Regardless, the airtightness between the chambers between the filters can be ensured.

  Further, the stacking order and direction of the dust removal filter and the chemical filter can be determined by the position of the concave groove on the side surface portion of the frame of the dust removal filter or the chemical filter and the position disposed in the vicinity of the removable door on the side surface without the chamber.

  In addition, there are protrusions in the sliding direction of the dust removal filter at a predetermined interval with respect to the dust removal filter frame sliding surface on the inner bottom of the chamber bottom, reducing the contact area between the protrusion and the chamber bottom, Can fit in smoothly.

  Further, the filter has a projection at a predetermined interval on the inner bottom of the chamber bottom in the width direction perpendicular to the sliding surface with respect to the sliding surface of the filter frame on the inner bottom of the chamber bottom. Can be carried out stably in a short time.

  2. The fan filter unit according to claim 1, wherein the protrusions on the inner bottom flange of the chamber bottom are arranged at a plurality of predetermined intervals with the protrusions on the opposite side of the filter frame. The direction can be defined and can be stored in a predetermined position in the chamber, and the airtightness of the elastic cushioning material on the inner surface of the chamber and the removable door can be kept uniform.

  The fan filter unit according to any one of claims 1 to 9, further comprising an opening having a predetermined size on a side surface of the filter frame constituted by a rectangular frame having a surface separated from the filter medium surface. Therefore, the ease of maintenance can be improved by using the frame portion of the dust filter or chemical filter as the handle.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, a fan filter unit 15 of the present invention includes a fan unit 6 including a fan 1 and a motor 2 in a box-shaped chamber 3 having a suction port on the top surface, and a lower portion of the fan unit 6. The dust filter 5 and the chemical filter 4 are provided. An attachment / detachment opening 17 for attaching / detaching the dust filter 5 or the chemical filter 4 is provided on one side surface of the chamber 3, and the opening of the attachment / detachment opening 17 is closed by the attachment / detachment door 7. Fixing protrusions 9 for fixing the dust filter 5 and the chemical filter 4 are provided on the side surface of the chamber 3 and the inside of the removable door 7. The chamber 3 and the detachable door 7 are fixed via fixing means 22. The elastic cushioning material 8 is disposed on the inner surface of the chamber 3 except for the fixing projection 9, and the elastic cushioning material 8 is disposed on the portion of the detachable door 7 except for the fixing projection 9. The inner dimension of the chamber 3 is larger than the outer dimension of the dust filter 5 (chemical filter 4), and smaller than the dimension obtained by adding the outer dimension of the dust filter 5 (chemical filter 4) to twice the thickness of the elastic buffer material 8.

  According to the above configuration, the dust filter 5 or the chemical filter 4 can be taken out from the side surface of the chamber 3 by detaching the detachable door 7. Thus, according to the structure of Embodiment 1 of this invention, a main body can be removed and installed at the time of installation in a structure, and the filter unit 15 reduced in weight can be installed easily.

  Further, the filter can be replaced quickly without removing the fan filter unit 15 from the structure after the fan filter unit 15 is installed.

  As shown in FIGS. 1, 2, and 4, the present invention relates to a fixing projection 9 provided on the inner surface of the chamber 3, a removable door 7 provided with a plurality of fixing projections 9, and a filter frame 10. It consists of the hole part 13 provided in the side surface. The fixing protrusion 9 of the chamber 3 and the hole 13 of the frame frame 10 of the filter are disposed at opposing positions. The fixing projection 9 of the detachable door 7 and the hole 13 of the filter frame 10 are disposed at opposing positions.

  According to such a configuration, when the dust filter 5 or the chemical filter 4 is attached to the chamber 3, the end surface of the dust filter 5 or the chemical filter 4 is connected to the fixing protrusion 9 provided on the inner wall surface of the chamber 3. Since the holes 13 are attached so as to be fitted, the filters (the dust removal filter 5 and the chemical filter 4) can be guided to a predetermined position. Furthermore, one end face of the dust filter 5 or the chemical filter 4 can be guided to a predetermined position on the fixing projection 9 of the detachable door 7.

  Thus, the fixing protrusion 9 provided on the inner wall surface of the chamber 3 and the fixing protrusion 9 provided on the removable door 7 serve as a guide for the dust filter 5 or the chemical filter 4, and the dust filter 5 or chemical filter The end face of 4 can be fixed securely.

  The chamber 3 and the detachable door 7 are provided with fixing projections 9 and the filter frame frame portion 10 is provided with a hole 13. Conversely, the chamber 3 and the detachable door 7 are provided with holes 13 and the filter frame frame portion. 10 may be provided with a fixing projection 9.

  As shown in FIGS. 2 and 3, the upper surface of the frame frame portion 10 of the dust filter 5 and the chemical filter 4 has a plurality of protrusions 11 and a plurality of holes 14 on the lower surface. The protrusions 11 are arranged at predetermined intervals. Similarly, the holes 14 are arranged at predetermined intervals. The plurality of protrusions 11 disposed on the upper surface of the frame frame portion 10 of the dust filter 5 correspond to the positions of the plurality of holes 14 disposed on the lower surface of the frame frame portion 10 of the chemical filter 4 laminated on the upper portion.

  According to such a configuration, the projection frame 11 and the hole 14 of the frame frame portion 10 of the dust removal filter 5 and the chemical filter 4 are brought into an engaged state, and can be stacked at a predetermined position.

  The dust filter 5 and the chemical filter 4 are in the chamber 3, and when the chemical filter 4 is taken out, the frame frame portion 10 of the chemical filter 4 rides on the protrusion 11 of the frame frame portion 10 of the dust filter 5. Thus, since the contact area of the frame 10 is remarkably reduced, the removal and attachment can be performed smoothly.

  Further, the elastic cushioning material 8 comes into pressure contact with the dust removing filter 5 and the frame frame portion 10 of the chemical filter 4, so that the dust removing filter 5 and the chemical filter 4 can be fixed.

  In addition, the elastic cushioning material 8 disposed on the detachable door 7 is also in pressure contact with the dust filter 5 and the frame frame portion 10 of the chemical filter 4, so that the dust filter 5 and the chemical filter 4 can be fixed.

  Moreover, since it is press-contacted by the elastic buffer material 8, the space on the fan unit 6 side and the airtightness on the dust removal filter 5 blowout surface side can be ensured.

  As shown in FIGS. 2 and 5, a groove 20 is provided at an arbitrary position on the side surface of the frame frame portion 10 of the dust filter 5 or the chemical filter 4, and a convex shape is formed on the inner surface of the chamber 3 facing the groove 20. The portion 21 is provided near the detachable door 7 of the detachable port 17. Since the convex portion 21 has a shape that allows the concave groove 20 of the frame frame portion 10 to slide, the stacking order and direction can be confirmed, filter replacement can be speeded up, and stacking misinstallation can be improved.

  As shown in FIG. 5, a flange 16 is formed inside the bottom of the chamber 3, and the dust filter 5 is held by the flange 16. A flange protrusion 23 is provided on the flange portion 16 of the chamber 3 so as to face the hole 14 provided on the lower surface of the frame frame portion 10 of the dust filter 5.

  According to such a configuration, the chamber 3 and the dust removal filter 5 are arranged at predetermined positions when the flange protrusions 23 and the holes 14 are engaged. Further, when the dust removal filter 5 is attached, the frame frame portion 10 of the dust removal filter 5 moves on the flange projection 23. However, since the contact area with the frame frame portion 10 of the dust removal filter 5 is small, the removal and attachment are short. Can be exchanged on time.

  As shown in FIG. 3, the dust filter 5, the projection 11 of the chemical filter 4, and the gap between the opposing hole and the projection 11 arranged in the filter 3 width direction of the filter 3 are set to a predetermined interval. Therefore, it is possible to avoid an installation direction error of the dust removal filter 5 or the chemical filter 4.

  As shown in FIG. 2, the opening provided in the side surface of the frame frame 10 of the dust filter 5 or the chemical filter 4 can be used as a handle, so that the dust filter 5 or the chemical filter 4 can be taken out and attached during maintenance. Easy to do.

  The fan filter unit dust filter and chemical filter can be attached and removed from the side of the fan filter unit without removing the fan filter unit from the installation part of the structure, and the dust filter and chemical filter maintenance work can be used. Applicable to.

Side surface sectional drawing which shows the structure of Embodiment 1 of this invention The perspective view which shows the dust removal filter of Embodiment 1 of this invention. The top view which shows the dust removal filter and chemical filter of Embodiment 1 of this invention The perspective view of the removable door of Embodiment 1 of this invention Plan sectional drawing which shows the structure of Embodiment 1 of this invention Sectional drawing which shows the structure of the conventional fan filter unit

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fan 2 Motor 3 Chamber 4 Chemical filter 5 Dust removal filter 6 Fan unit 7 Removable door 8 Elastic shock absorbing material 9 Fixing projection part 10 Frame frame part 11 Protrusion part 12 Opening part 13 Hole part 14 Hole 15 Fan filter unit 16 Gutter part 17 Removable port 20 Groove 21 Convex part 23 Gutter projection

Claims (9)

A fan filter unit comprising: a fan unit comprising a fan and a motor; a chamber containing a dust filter and a chemical filter below the fan unit; a fixing means for the dust filter; an attachment / detachment port for the dust filter on the side of the chamber; A plurality of fixing protrusions are provided on the inner surface of the chamber and the detachable door facing the inner surface, and a hole is formed in a frame portion of the dust filter or chemical filter in a facing portion of the detachable door facing the inner surface of the chamber and the inner surface. Or the fan filter unit of Claim 1 which has a ditch | groove. The fan filter unit according to claim 1, wherein a hole is provided on a lower surface of the frame portion of the dust filter and the chemical filter, and a protrusion is provided on the upper surface. 4. The fan filter unit according to claim 2, wherein an elastic buffer material is provided on a portion of the inner surface provided with the protrusion for fixing the chamber and the detachable door with a predetermined thickness except for the protrusion. 5. The fan filter unit according to any one of claims 1 to 4, wherein a concave groove is provided on a side surface of a frame frame portion of the dust removal filter and the chemical filter, and a convex portion is provided in the vicinity of the removable door on the inner surface of the chamber facing the concave groove. Provide a flange projecting inward on the side perpendicular to the side having the detachable door at the bottom of the chamber, and provide a protrusion at a position corresponding to the hole provided in the lower surface of the dust filter inside the chamber of the flange. The fan filter unit according to claim 3, wherein the dust filter is mounted by sliding on the flange. The fan filter unit according to claim 6, wherein the protrusion provided on the flange is provided to be shifted from a sliding direction when the dust filter is attached. With respect to the plurality of protrusions provided on the collar part, when the protrusions on one side and the protrusions on the opposite side facing each other are combined into one set, the interval between the protrusions is different for each set. The fan filter unit according to claim 7. The fan filter unit according to any one of claims 1 to 8, wherein the fan filter unit has an opening of a predetermined size on a side surface of a filter constituted by a rectangular frame having a surface separated from the filter medium surface.

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