JP2017224659A - Substrate storage container - Google Patents

Substrate storage container Download PDF

Info

Publication number
JP2017224659A
JP2017224659A JP2016117431A JP2016117431A JP2017224659A JP 2017224659 A JP2017224659 A JP 2017224659A JP 2016117431 A JP2016117431 A JP 2016117431A JP 2016117431 A JP2016117431 A JP 2016117431A JP 2017224659 A JP2017224659 A JP 2017224659A
Authority
JP
Japan
Prior art keywords
insertion member
storage container
filter
substrate storage
elastic piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016117431A
Other languages
Japanese (ja)
Other versions
JP6705090B2 (en
Inventor
啓之 志田
Hiroyuki Shida
啓之 志田
和正 大貫
Kazumasa Onuki
和正 大貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd, Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Priority to JP2016117431A priority Critical patent/JP6705090B2/en
Publication of JP2017224659A publication Critical patent/JP2017224659A/en
Application granted granted Critical
Publication of JP6705090B2 publication Critical patent/JP6705090B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Closures For Containers (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a substrate storage container which can easily insert and remove an insertion member with respect to a through hole.SOLUTION: The substrate storage container includes: a container body having an opening; and a lid body 3 covering the opening. The container body or the lid body 3 communicates the internal space of the substrate storage container 1 with the external space, through holes 30 (31, 32) through which an insertion member 5 can be inserted, and a holding portion 4 for holding the insertion member 5 are formed, and the holding portion 4 has an elastic piece 41 which is displaceable in a direction orthogonal to the insertion direction of the insertion member 5.SELECTED DRAWING: Figure 3

Description

本発明は、半導体ウェハなどの基板を収納する基板収納容器に関する。   The present invention relates to a substrate storage container for storing a substrate such as a semiconductor wafer.

従来、半導体の製造工程において、工場間・工程間の搬送や保管のために、半導体ウェハなどの基板を収納する基板収納容器が使用されている。   Conventionally, in a semiconductor manufacturing process, a substrate storage container for storing a substrate such as a semiconductor wafer has been used for transportation and storage between factories and between processes.

基板収納容器は、収納された基板が汚染されないように密封性が高いが、航空機での輸送や工程ベイ内での高速輸送などにより、基板収納容器の内外間に圧力差が生じることがあった。そのため、基板収納容器は、容器本体又は蓋体に内外の圧力差を調整する内圧調整機構を備えることが提案されている(特許文献1参照)。   The substrate storage container has high sealing performance so that the stored substrate is not contaminated, but there may be a pressure difference between the inside and outside of the substrate storage container due to transportation by aircraft or high-speed transportation in the process bay. . For this reason, it has been proposed that the substrate storage container includes an internal pressure adjusting mechanism for adjusting a pressure difference between the inside and the outside of the container main body or the lid (see Patent Document 1).

特許文献1には、この内圧調整機構を挿入部材5として、基板収納容器1の内部空間と外部空間とを連通し貫通穴30に挿入し、貫通穴30の周囲に設けられた保持部4で、挿入部材5を係止固定することが記載されている(図7参照)。   In Patent Document 1, this internal pressure adjusting mechanism is used as an insertion member 5, the internal space and the external space of the substrate storage container 1 are communicated and inserted into the through hole 30, and the holding portion 4 provided around the through hole 30 is used. It is described that the insertion member 5 is locked and fixed (see FIG. 7).

特開2006−024585号公報Japanese Patent Laid-Open No. 2006-024585

しかしながら、特許文献1に記載の保持部4は、挿入方向と略直交する方向には、あまり変位することがなく、挿入方向に沿って取外すことができず、挿入部材5の取外しが容易ではなかった。   However, the holding part 4 described in Patent Literature 1 is not displaced so much in a direction substantially orthogonal to the insertion direction, cannot be removed along the insertion direction, and the insertion member 5 is not easily removed. It was.

そこで、本発明は以上の課題に鑑みてなされたものであり、貫通穴に対して挿入部材を容易に着脱できる基板収納容器を提供することを目的とする。   Therefore, the present invention has been made in view of the above problems, and an object thereof is to provide a substrate storage container in which an insertion member can be easily attached to and detached from a through hole.

(1)本発明に係る一つの態様は、開口を有し基板を収納する容器本体と、前記開口をシール可能に覆う蓋体とを備える基板収納容器であって、前記容器本体又は前記蓋体は、前記基板収納容器の内部空間と外部空間とを連通し、かつ、挿入部材を挿入可能な貫通穴と、前記挿入部材を保持する保持部と、が形成され、前記保持部は、前記挿入部材の挿入方向と直交する方向に変位可能な弾性片を有すること。 (1) One aspect according to the present invention is a substrate storage container comprising a container main body having an opening and storing a substrate, and a lid that covers the opening in a sealable manner, the container main body or the lid Is formed with a through hole through which the internal space and the external space of the substrate storage container communicate with each other and into which the insertion member can be inserted, and a holding portion that holds the insertion member, It has an elastic piece that can be displaced in a direction perpendicular to the insertion direction of the member.

(2)上記(1)の態様において、前記保持部は、前記挿入部材の挿入方向と直交する方向以外に延びる弾性部を有してもよい。 (2) In the aspect of (1), the holding portion may include an elastic portion that extends in a direction other than a direction orthogonal to the insertion direction of the insertion member.

(3)上記(1)又は(2)の態様において、前記弾性片は、前記挿入部材の挿入方向と平行な方向に屈曲されてもよい。 (3) In the above aspect (1) or (2), the elastic piece may be bent in a direction parallel to the insertion direction of the insertion member.

(4)上記(1)から(3)までのいずれか一つの態様において、前記弾性片の自由端は、前記挿入部材を係止固定する係止爪部と、前記弾性片自身を前記挿入部材の挿入方向と直交する方向に変位させる被操作部と、を有してもよい。 (4) In any one of the above aspects (1) to (3), the free end of the elastic piece includes a locking claw portion for locking and fixing the insertion member, and the elastic piece itself as the insertion member. And an operated portion that is displaced in a direction orthogonal to the insertion direction.

(5)上記(1)から(4)までのいずれか一つの態様において、前記挿入部材は、フィルタ部材であってもよい。 (5) In any one of the above aspects (1) to (4), the insertion member may be a filter member.

本発明によれば、貫通穴に対して挿入部材を容易に着脱できる基板収納容器を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the board | substrate storage container which can attach or detach an insertion member easily with respect to a through-hole can be provided.

本発明の実施形態に係る基板収納容器1を示す斜視図である。It is a perspective view which shows the substrate storage container 1 which concerns on embodiment of this invention. 蓋体3を示す説明図である。It is explanatory drawing which shows the cover body. 図2のA−A線で切断した保持部4付近を示す断面図である。It is sectional drawing which shows the holding part 4 vicinity cut | disconnected by the AA line of FIG. 図3の保持部4付近を示す斜視図である。It is a perspective view which shows the holding | maintenance part 4 vicinity of FIG. 挿入部材5の取外方法を示す説明図である。It is explanatory drawing which shows the removal method of the insertion member. 弾性片41の変形例(a),(b),(c)を示す断面図である。It is sectional drawing which shows the modification (a) of an elastic piece 41, (b), (c). 従来の保持部4を示す断面図である。It is sectional drawing which shows the conventional holding | maintenance part 4. FIG.

以下、本発明の実施形態について、図面を参照して詳細に説明する。なお、本明細書の実施形態においては、全体を通じて、同一の部材には同一の符号を付している。また、前後は、容器本体の開口側と背面側とを結ぶ方向を指し、左右は、容器本体の開口側から見た状態を指すものとする。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of the present specification, the same members are denoted by the same reference numerals throughout. The front and rear refer to the direction connecting the opening side and the back side of the container body, and the left and right refer to the state viewed from the opening side of the container body.

基板収納容器1について説明する。図1は、本発明の実施形態に係る基板収納容器1を示す斜視図である。
図1に示される基板収納容器1は、図示されない複数の基板、例えば、直径450mmのウェハなどを収納可能なものであり、容器本体2と、蓋体3とを備える。ただし、基板収納容器1は、基板を直接収納するのではなく、基板を収納したキャリアを収納するものであってもよい。
The substrate storage container 1 will be described. FIG. 1 is a perspective view showing a substrate storage container 1 according to an embodiment of the present invention.
A substrate storage container 1 shown in FIG. 1 can store a plurality of substrates (not shown), for example, a wafer having a diameter of 450 mm, and includes a container body 2 and a lid 3. However, the substrate storage container 1 may store a substrate storing a substrate, instead of storing the substrate directly.

容器本体2は、蓋体3により覆われる前面の開口(図示なし)と、天井面2aと、背面(図示なし)と、左右の側面2cと、底面(図示なし)とを有する略立方体のもので、いわゆるフロントオープンボックスタイプのものである。この開口は、後述する蓋体3により覆われる。   The container body 2 has a substantially cubic shape having an opening on the front surface (not shown) covered by the lid 3, a ceiling surface 2a, a back surface (not shown), left and right side surfaces 2c, and a bottom surface (not shown). The so-called front open box type. This opening is covered with a lid 3 to be described later.

蓋体3について説明する。図2は、蓋体3を示す説明図であり、(a)が正面図、(b)が側面図、(c)が底面図である。
図2(a)に示される蓋体3は、容器本体2の開口をシール可能な外形形状及び寸法で形成されるもので、開口(図示なし)を有する筐体3aと、筐体3aの開口を覆うカバープレート3bと、ラッチ機構3cとを有する。
The lid 3 will be described. 2A and 2B are explanatory views showing the lid 3, wherein FIG. 2A is a front view, FIG. 2B is a side view, and FIG. 2C is a bottom view.
The lid 3 shown in FIG. 2 (a) is formed with an outer shape and dimensions capable of sealing the opening of the container body 2, and includes a housing 3a having an opening (not shown) and an opening of the housing 3a. Cover plate 3b and latch mechanism 3c.

筐体3aは、一方に開口を有し、他方が容器本体2の開口と対向する略直方体の箱状である。筐体3aの側壁には、図2(b),(c)に示されるように容器本体2の開口の周縁との間に挟み込まれるガスケット3dが設けられている。   The housing 3 a has a substantially rectangular parallelepiped box shape having an opening on one side and the other facing the opening of the container body 2. As shown in FIGS. 2B and 2C, a gasket 3 d is provided on the side wall of the housing 3 a so as to be sandwiched between the periphery of the opening of the container body 2.

カバープレート3bは、筐体3aの開口を覆うものであり、ネジなどで筐体3aに固定される。   The cover plate 3b covers the opening of the housing 3a and is fixed to the housing 3a with screws or the like.

ラッチ機構3cは、出没することで、蓋体3を容器本体2に係止可能するもので、筐体3a内部に配置される。本実施形態では、ラッチ機構3cは、上下の2辺にそれぞれ2箇所設けられる。   The latch mechanism 3c is capable of locking the lid 3 to the container body 2 by appearing and retracting, and is disposed inside the housing 3a. In the present embodiment, the latch mechanism 3c is provided at two locations on the upper and lower sides.

ところで、本実施形態の蓋体3には、基板収納容器1の内部空間と外部空間とを連通し、かつ、挿入部材5を挿入可能な貫通穴30と、挿入部材5を保持する保持部4と、が形成されている(図2参照)。ただし、基板収納容器1の内部空間と外部空間とを連通する貫通穴30は、容器本体2に貫通穴20(図示なし)として形成されてもよく、基板収納容器1は、少なくとも1つの貫通穴20,30が形成されるとよい。また、貫通穴20,30は、容器本体2又は蓋体3にそれぞれ2箇所以上に形成されてもよい。   By the way, the lid 3 of the present embodiment communicates the internal space and the external space of the substrate storage container 1 and allows the insertion member 5 to be inserted, and the holding portion 4 that holds the insertion member 5. Are formed (see FIG. 2). However, the through hole 30 that communicates the internal space and the external space of the substrate storage container 1 may be formed in the container body 2 as a through hole 20 (not shown), and the substrate storage container 1 has at least one through hole. 20 and 30 may be formed. Further, the through holes 20 and 30 may be formed in the container body 2 or the lid body 3 at two or more locations, respectively.

図3は、図2のA−A線で切断した保持部4付近を示す断面図であり、図4は、図3の保持部4付近を示す斜視図である。
貫通穴30及び保持部4を説明する前に、挿入部材5について説明する。
3 is a cross-sectional view showing the vicinity of the holding portion 4 cut along the line AA in FIG. 2, and FIG. 4 is a perspective view showing the vicinity of the holding portion 4 in FIG.
Before describing the through hole 30 and the holding portion 4, the insertion member 5 will be described.

貫通穴30に挿入される挿入部材5としては、基板収納容器1の内部空間と外部空間との圧力差を調整する内圧調整機構、基板収納容器1の内部空間に気体を供給又は排出する弁機構(例えば、パージバルブ)などが挙げられる。このうち、内圧調整機構は、フィルタなどの微小な穴・空隙を有するもので構成される。本実施形態では、挿入部材5は、フィルタ部材(以下、「フィルタ部材5」という。)とする。   The insertion member 5 inserted into the through hole 30 includes an internal pressure adjusting mechanism that adjusts the pressure difference between the internal space and the external space of the substrate storage container 1, and a valve mechanism that supplies or discharges gas to the internal space of the substrate storage container 1. (For example, a purge valve). Among these, the internal pressure adjusting mechanism is configured with a minute hole / gap such as a filter. In the present embodiment, the insertion member 5 is a filter member (hereinafter referred to as “filter member 5”).

図3に示されるフィルタ部材5は、第1の接続部51と、第2の接続部52と、フィルタ54を保持するフィルタ収納部53とを有する。   The filter member 5 shown in FIG. 3 includes a first connection portion 51, a second connection portion 52, and a filter storage portion 53 that holds the filter 54.

第1の接続部51は、先端に向かって縮径する略円筒状のもので、フィルタ収納部53の一方の面に突設して形成されている。第1の接続部51の先端は、開口されており、フィルタ収納部53の内部に連通している。   The first connection portion 51 is a substantially cylindrical one that decreases in diameter toward the tip, and is formed to project from one surface of the filter storage portion 53. The front end of the first connection portion 51 is opened and communicates with the inside of the filter storage portion 53.

第2の接続部52は、先端に向かって縮径する略円筒状のもので、フィルタ収納部53の他方の面に突設して形成されている。第2の接続部52の先端は、フランジが形成されており、フランジの中心が開口されて、フィルタ収納部53の内部に連通している。   The second connection portion 52 is a substantially cylindrical one that decreases in diameter toward the tip, and is formed to project from the other surface of the filter storage portion 53. A flange is formed at the tip of the second connection portion 52, and the center of the flange is opened to communicate with the inside of the filter storage portion 53.

フィルタ収納部53は、略円板状のもので、1又は複数枚のフィルタ54を保持するように、内部が中空に形成されている。   The filter storage portion 53 has a substantially disk shape, and the inside is formed hollow so as to hold one or a plurality of filters 54.

フィルタ54は、四フッ化エチレン、ポリエステル繊維、多孔質フッ素膜又はガラス繊維などからなる分子ろ過フィルタ、あるいは活性炭素繊維などのろ材に化学吸着剤を担時させたケミカルフィルタが使用される。また、フィルタ54の表面又は裏面は、ポリプロピレンやポリエチレンなどで形成される格子状の保護部材が設けられている。   As the filter 54, a molecular filter made of tetrafluoroethylene, polyester fiber, porous fluorine film or glass fiber, or a chemical filter in which a chemical adsorbent is supported on a filter medium such as activated carbon fiber is used. Further, the front surface or the back surface of the filter 54 is provided with a lattice-shaped protective member made of polypropylene, polyethylene, or the like.

このように、フィルタ部材5は、フィルタ54を挟んで非対称形状であるが、第1の接続部51の先端開口と第2の接続部52の先端開口は、フィルタ収納部53の内部にそれぞれ連通しているため、フィルタ54を介して、基板収納容器1の外部空間から内部空間に流入する気体をろ過することができる。   As described above, the filter member 5 has an asymmetric shape with the filter 54 interposed therebetween, but the tip opening of the first connection portion 51 and the tip opening of the second connection portion 52 communicate with the inside of the filter storage portion 53, respectively. Therefore, the gas flowing from the external space of the substrate storage container 1 into the internal space can be filtered through the filter 54.

なお、フィルタ部材5は、フィルタ収納部53の中央付近で分割された2つの部材であらかじめ形成され、相対するフィルタ収納部53間にフィルタ54を収納し、周縁部を溶着や接着することで形成される。このとき、フィルタ54は、異なる性能のものを組合わせて使用することが好ましい。例えば、分子ろ過フィルタとケミカルフィルタとを組合わせることで、基板は、パーティクル汚染のみならず有機ガス汚染からも防止される。   The filter member 5 is formed in advance by two members divided in the vicinity of the center of the filter housing portion 53, and is formed by housing the filter 54 between the opposing filter housing portions 53 and welding or bonding the peripheral edge portions. Is done. At this time, it is preferable to use a combination of filters having different performances. For example, by combining a molecular filtration filter and a chemical filter, the substrate is prevented not only from particle contamination but also from organic gas contamination.

つづいて、貫通穴30及び保持部4について説明する。
図3に示される貫通穴30は、第1の貫通穴31と、第2の貫通穴32とで形成されている。
Next, the through hole 30 and the holding part 4 will be described.
The through hole 30 shown in FIG. 3 is formed by a first through hole 31 and a second through hole 32.

第1の貫通穴31は、フィルタ部材5の第1の接続部51を挿入可能な大きさで、筐体3aに設けられる。具体的には、第1の貫通穴31は、カバープレート3bに向かって立設された円筒33の中心に形成されている。この第1の貫通穴31に、フィルタ部材5の第1の接続部51が挿入される。   The first through hole 31 has a size that allows the first connection portion 51 of the filter member 5 to be inserted, and is provided in the housing 3a. Specifically, the first through hole 31 is formed at the center of a cylinder 33 erected toward the cover plate 3b. The first connection portion 51 of the filter member 5 is inserted into the first through hole 31.

ここで、第1の貫通穴31は、フィルタ部材5の第1の接続部51のみが挿入可能で、第2の接続部52が挿入できない寸法又は形状に形成しておくと、フィルタ部材5の取付け方向を統一することができる。   Here, if the first through hole 31 is formed in a size or shape in which only the first connection portion 51 of the filter member 5 can be inserted and the second connection portion 52 cannot be inserted, The mounting direction can be unified.

第2の貫通穴32は、第1の貫通穴31に相対し、フィルタ部材5のフィルタ収納部53を挿入可能な大きさで、カバープレート3bに設けられている。具体的には、第2の貫通穴32は、図4に示されるように筐体3aに向かって延びる周壁42の内周として形成されている。   The second through-hole 32 is opposed to the first through-hole 31 and is provided in the cover plate 3b so that the filter housing portion 53 of the filter member 5 can be inserted. Specifically, the second through hole 32 is formed as the inner periphery of the peripheral wall 42 extending toward the housing 3a as shown in FIG.

この周壁42は、フィルタ部材5を取付けるときのガイド及び位置決めの役割を果たすもので、保持部4の一部を構成している。周壁42は、筐体3a側に向かって直径が小さくなっており、また、周壁42の一部は、切欠かれている。この切欠かれた部分には、後述する弾性片41が、外方から第2の貫通穴32の内側に向かって伸びている(図4参照)。   The peripheral wall 42 plays a role of guiding and positioning when the filter member 5 is attached, and constitutes a part of the holding portion 4. The diameter of the peripheral wall 42 is reduced toward the housing 3a, and a part of the peripheral wall 42 is notched. In the notched portion, an elastic piece 41 described later extends from the outside toward the inside of the second through hole 32 (see FIG. 4).

一方、図3に示される保持部4は、周壁42の一部と、弾性片41とで構成されている。弾性片41は、カバープレート3bの所定位置に一端が接続され、他端が自由端となっている。この弾性片41の自由端は、弾性部41aと、係止爪部41bと、被操作部41cとで形成されている。   On the other hand, the holding portion 4 shown in FIG. 3 includes a part of the peripheral wall 42 and an elastic piece 41. One end of the elastic piece 41 is connected to a predetermined position of the cover plate 3b, and the other end is a free end. The free end of the elastic piece 41 is formed by an elastic portion 41a, a locking claw portion 41b, and an operated portion 41c.

弾性部41aは、カバープレート3b側から筐体3a側に向かって、略U字に形成されている。言い換えると、弾性部41aは、フィルタ部材5の挿入方向と直交する方向以外に延びている。更に言い換えると、弾性片41は、挿入部材5の挿入方向と平行な方向に屈曲されている。このように弾性部41aが形成されることで、弾性片41は、フィルタ部材5の挿入方向と略直交する方向に弾性変形し、変位可能になっている。   The elastic part 41a is formed in a substantially U shape from the cover plate 3b side toward the housing 3a side. In other words, the elastic part 41 a extends in a direction other than the direction orthogonal to the insertion direction of the filter member 5. In other words, the elastic piece 41 is bent in a direction parallel to the insertion direction of the insertion member 5. By forming the elastic portion 41a in this way, the elastic piece 41 is elastically deformed in a direction substantially orthogonal to the insertion direction of the filter member 5 and can be displaced.

係止爪部41bは、フィルタ部材5を保持部4に係止固定するもので、筐体3a側よりもカバープレート3b側が、第2の貫通穴32の中心方向に突出している。係止爪部41bは、フィルタ部材5のフィルタ収納部53の外縁を係止する。このため、周壁42と、係止爪部41bとの最大間隔は、フィルタ部材5のフィルタ収納部53の最大直径よりも小さく形成される。   The locking claw portion 41 b locks and fixes the filter member 5 to the holding portion 4, and the cover plate 3 b side protrudes toward the center of the second through hole 32 rather than the housing 3 a side. The locking claw portion 41 b locks the outer edge of the filter storage portion 53 of the filter member 5. For this reason, the maximum distance between the peripheral wall 42 and the locking claw portion 41 b is formed smaller than the maximum diameter of the filter storage portion 53 of the filter member 5.

被操作部41cは、弾性片41自身をフィルタ部材5の挿入方向と略直交する方向に変位させるもので、作業者の指、ロボットハンド、治具などにより、第2の貫通穴32の外側(弾性片41の一端側)に押圧される。   The operated portion 41c is for displacing the elastic piece 41 itself in a direction substantially perpendicular to the insertion direction of the filter member 5, and is outside the second through hole 32 (by an operator's finger, robot hand, jig, etc.). It is pressed to one end side of the elastic piece 41.

ここで、フィルタ部材(挿入部材)5を蓋体3から取外す取外方法について説明する。図5は、挿入部材5の取外方法を示す説明図である。
まず、弾性片41の被操作部41cを、カバープレート3bの第2の貫通穴32の外側に押圧することで、弾性片41をフィルタ部材5の挿入(取外)方向と略直交する方向に変位させる。すると、係止爪部41bもフィルタ部材5の挿入(取外)方向と略直交する方向に変位し、係止が解除される。このとき、フィルタ収納部53が取外し可能な位置になるまで、係止爪部41bを変位させるとよい。
Here, a removal method for removing the filter member (insertion member) 5 from the lid 3 will be described. FIG. 5 is an explanatory view showing a method of removing the insertion member 5.
First, the operated portion 41c of the elastic piece 41 is pressed to the outside of the second through hole 32 of the cover plate 3b, so that the elastic piece 41 is substantially perpendicular to the insertion (detachment) direction of the filter member 5. Displace. Then, the locking claw portion 41b is also displaced in a direction substantially perpendicular to the insertion (detachment) direction of the filter member 5, and the locking is released. At this time, it is preferable to displace the locking claw portion 41b until the filter storage portion 53 is in a detachable position.

つづいて、フィルタ部材5の第2の接続部52を指や治具などで保持し引抜くことで、フィルタ部材5の第1の接続部51を、筐体3aの第1の貫通穴31から取外し、更に引抜くことで、フィルタ部材5を第2の貫通穴32から取外す。このとき、フィルタ収納部53が係止爪部41bを超えた時点で、被操作部41cへの押圧を解除してもよい。   Subsequently, by holding and pulling out the second connection portion 52 of the filter member 5 with a finger or a jig, the first connection portion 51 of the filter member 5 is removed from the first through hole 31 of the housing 3a. The filter member 5 is removed from the second through hole 32 by removing and further pulling out. At this time, the pressure on the operated portion 41c may be released when the filter storage portion 53 exceeds the locking claw portion 41b.

このように、フィルタ部材5は、蓋体3の貫通穴30から抜出され取外される。これにより、取外しの途中でフィルタ部材5の向きを変更する必要がなくなり、フィルタ部材5の取外しが容易になる。   Thus, the filter member 5 is extracted from the through hole 30 of the lid 3 and removed. Thereby, it becomes unnecessary to change the direction of the filter member 5 in the middle of removal, and removal of the filter member 5 becomes easy.

次に、フィルタ部材(挿入部材)5を蓋体3に取付ける取付方法について説明するが、基本的に上述した取外方法と逆の手順で行えばよい。
まず、弾性片41の被操作部41cを、カバープレート3bの第2の貫通穴32の外側に押圧することで、弾性片41をフィルタ部材5の挿入方向と略直交する方向に変位させる。このとき、フィルタ収納部53を取付け可能な位置になるまで、係止爪部41bを変位させる。
Next, an attachment method for attaching the filter member (insertion member) 5 to the lid 3 will be described. However, the procedure may be basically performed in the reverse order of the above-described removal method.
First, the elastic piece 41 is displaced in a direction substantially orthogonal to the insertion direction of the filter member 5 by pressing the operated portion 41c of the elastic piece 41 to the outside of the second through hole 32 of the cover plate 3b. At this time, the locking claw portion 41b is displaced until it reaches a position where the filter storage portion 53 can be attached.

つづいて、フィルタ部材5の第2の接続部52を保持し、カバープレート3bの第2の貫通穴32に、フィルタ部材5の第1の接続部51を先頭にして挿入する。フィルタ部材5を挿入していくと、フィルタ収納部53が周壁42にガイドされながら、筐体3aの第1の貫通穴31に第1の接続部51が挿入される。フィルタ部材5を更に挿入し、フィルタ収納部53が係止爪部41bを超えた時点で、被操作部41cへの押圧を解除する。   Subsequently, the second connection portion 52 of the filter member 5 is held, and the first connection portion 51 of the filter member 5 is inserted into the second through hole 32 of the cover plate 3b with the first connection portion 51 at the head. As the filter member 5 is inserted, the first connecting portion 51 is inserted into the first through hole 31 of the housing 3 a while the filter housing portion 53 is guided by the peripheral wall 42. When the filter member 5 is further inserted and the filter storage portion 53 exceeds the locking claw portion 41b, the pressure on the operated portion 41c is released.

被操作部41cへの押圧が解除されると、弾性片41は、第2の貫通穴32の中心方向に変位し、フィルタ収納部53の外縁の一部は、係止爪部41bに係止され、また、フィルタ収納部53の外縁のうち係止されていないその他の部分は、周壁42に保持される。   When the pressure on the operated portion 41c is released, the elastic piece 41 is displaced toward the center of the second through hole 32, and a part of the outer edge of the filter storage portion 53 is locked to the locking claw portion 41b. In addition, other portions of the outer edge of the filter storage portion 53 that are not locked are held by the peripheral wall 42.

このように、フィルタ部材5は、蓋体3の貫通穴30に挿入され取付けられる。そのため、蓋体3を備える基板収納容器1の外側に突出する部分がなく、搬送中に装置や他の容器と衝突して、フィルタ部材5が外れたり破損したりすることがなく、また、基板収納容器1を梱包しても、梱包袋を破損することがない。   Thus, the filter member 5 is inserted and attached to the through hole 30 of the lid 3. Therefore, there is no portion that protrudes outside the substrate storage container 1 having the lid 3, and the filter member 5 does not come off or break due to collision with the apparatus or another container during transportation. Even if the storage container 1 is packed, the packing bag is not damaged.

ここで、弾性片41の変形例について説明する。図6は、弾性片41の変形例(a),
(b),(c)を示す断面図である。
図6(a)に示される弾性片41は、弾性部141aが略N字状に形成されているものである。この弾性部141aは、挿入部材5の挿入方向と直交する方向以外に延びており、挿入部材5の挿入方向と平行な方向に2度屈曲されている。これにより、変位量を大きくすることができる。
Here, a modified example of the elastic piece 41 will be described. FIG. 6 shows a modification (a) of the elastic piece 41,
It is sectional drawing which shows (b) and (c).
An elastic piece 41 shown in FIG. 6A has an elastic portion 141a formed in a substantially N shape. The elastic portion 141 a extends in a direction other than the direction orthogonal to the insertion direction of the insertion member 5, and is bent twice in a direction parallel to the insertion direction of the insertion member 5. Thereby, the amount of displacement can be increased.

一方、図6(b)に示される弾性片41は、上記実施形態とは逆に弾性部241aが筐体3a側からカバープレート3b側に向かって、略U字状に形成されているものである。この弾性部241aも、挿入部材5の挿入方向と直交する方向以外に延びており、挿入部材5の挿入方向と平行な方向に屈曲されている。これらの弾性部141a,241aを有する弾性片41であっても、フィルタ部材5を保持部4に保持することができる。   On the other hand, in the elastic piece 41 shown in FIG. 6B, the elastic portion 241a is formed in a substantially U shape from the housing 3a side to the cover plate 3b side, contrary to the above embodiment. is there. The elastic portion 241 a also extends in a direction other than the direction orthogonal to the insertion direction of the insertion member 5 and is bent in a direction parallel to the insertion direction of the insertion member 5. Even with the elastic piece 41 having these elastic portions 141 a and 241 a, the filter member 5 can be held by the holding portion 4.

また、図6(c)に示される弾性片41は、少なくとも一対となって、挿入部材5’を保持部4に保持するものである。この場合、弾性片41は、筐体3aの外面などに直接に形成され、挿入部材5’は、筐体3aの外面の凹部又は穴部などの保持部4に保持される。   Further, at least a pair of elastic pieces 41 shown in FIG. 6C hold the insertion member 5 ′ on the holding portion 4. In this case, the elastic piece 41 is formed directly on the outer surface or the like of the housing 3a, and the insertion member 5 'is held by the holding portion 4 such as a recess or a hole on the outer surface of the housing 3a.

以上のとおり、本発明の実施形態に係る基板収納容器1は、開口を有する容器本体2と、開口をシール可能に覆う蓋体3とを備える基板収納容器1であって、容器本体2又は蓋体3は、基板収納容器1の内部空間と外部空間とを連通し、かつ、挿入部材5を挿入可能な貫通穴20,30と、挿入部材5を保持する保持部4と、が形成され、保持部4は、挿入部材5の挿入方向と直交する方向に変位可能な弾性片41を有する。   As described above, the substrate storage container 1 according to the embodiment of the present invention is the substrate storage container 1 including the container main body 2 having an opening and the lid body 3 that covers the opening in a sealable manner. The body 3 is formed with through holes 20 and 30 through which the internal space and the external space of the substrate storage container 1 are communicated and into which the insertion member 5 can be inserted, and a holding portion 4 that holds the insertion member 5. The holding part 4 has an elastic piece 41 that can be displaced in a direction orthogonal to the insertion direction of the insertion member 5.

これにより、保持部4の弾性片41が、挿入部材5の挿入方向と直交する方向に変位するため、挿入部材5の挿入方向を途中で変更する必要がなくなり、挿入部材5の着脱作業性を向上させることができる。また、挿入部材5の着脱作業は、複雑な動作ではないため、挿入部材5の着脱作業を自動化することも可能になる。   Thereby, since the elastic piece 41 of the holding part 4 is displaced in the direction orthogonal to the insertion direction of the insertion member 5, it is not necessary to change the insertion direction of the insertion member 5 in the middle. Can be improved. Further, since the attaching / detaching operation of the insertion member 5 is not a complicated operation, the attaching / detaching operation of the inserting member 5 can be automated.

本実施形態では、保持部4は、挿入部材5の挿入方向と直交する方向以外に延びる弾性部41aを有する。これにより、弾性片41は、小さい力であっても、挿入方向と直交する方向への変位が容易になるし、変位量を大きくすることができる。   In the present embodiment, the holding portion 4 includes an elastic portion 41 a that extends in a direction other than the direction orthogonal to the insertion direction of the insertion member 5. Thereby, even if the elastic piece 41 is a small force, the displacement in the direction orthogonal to the insertion direction is facilitated, and the amount of displacement can be increased.

本実施形態では、弾性片41は、挿入部材5の挿入方向と平行な方向に屈曲されている。これにより、弾性片41は、小さい力であっても、挿入方向と直交する方向への変位が容易になる。   In the present embodiment, the elastic piece 41 is bent in a direction parallel to the insertion direction of the insertion member 5. Thereby, even if it is small force, the elastic piece 41 becomes easy to displace to the direction orthogonal to an insertion direction.

本実施形態では、弾性片41の自由端は、挿入部材5を係止固定する係止爪部41bと、弾性片41自身を挿入部材5の挿入方向と直交する方向に変位させる被操作部41cと、を有する。これにより、保持部4は、被操作部41cが挿入部材5の挿入方向と直交する方向に押圧されることで、係止爪部41bが変位し、挿入部材5が係止又は解除されるから、挿入部材5の着脱が可能になる。   In this embodiment, the free end of the elastic piece 41 includes a locking claw portion 41b that locks and fixes the insertion member 5, and an operated portion 41c that displaces the elastic piece 41 itself in a direction orthogonal to the insertion direction of the insertion member 5. And having. As a result, the holding portion 4 is pressed by the operated portion 41c in a direction orthogonal to the insertion direction of the insertion member 5, so that the locking claw portion 41b is displaced and the insertion member 5 is locked or released. The insertion member 5 can be attached and detached.

本実施形態では、挿入部材5は、フィルタ部材である。これにより、基板収納容器1の内部空間と外部空間との圧力差を調整することができる。   In the present embodiment, the insertion member 5 is a filter member. Thereby, the pressure difference between the internal space and the external space of the substrate storage container 1 can be adjusted.

以上、本発明の好ましい実施形態について詳述したが、本発明は上述した実施形態に限定されるものではなく、特許請求の範囲に記載された本発明の要旨の範囲内において、種々の変形、変更が可能である。   The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above-described embodiments, and various modifications may be made within the scope of the gist of the present invention described in the claims. It can be changed.

1 基板収納容器
2 容器本体、2a 天井面、2c 側面
20 貫通穴
3 蓋体、3a 筐体、3b カバープレート、3c ラッチ機構、3d ガスケット
30 貫通穴、31 第1の貫通穴、32 第2の貫通穴、33 円筒
4 保持部
41 弾性片、41a 弾性部、41b 係止爪部、41c 被操作部
42 周壁
5,5’ フィルタ部材(挿入部材)
51 第1の接続部、52 第2の接続部、53 フィルタ収納部、54 フィルタ
141a,241a 弾性部
DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container main body, 2a Ceiling surface, 2c Side surface 20 Through hole 3 Lid body, 3a housing | casing, 3b Cover plate, 3c Latch mechanism, 3d Gasket 30 Through hole, 31 1st through hole, 32 2nd Through hole, 33 cylinder 4 holding part 41 elastic piece, 41a elastic part, 41b locking claw part, 41c operated part 42 peripheral wall 5, 5 'filter member (insertion member)
51 1st connection part, 52 2nd connection part, 53 Filter storage part, 54 Filter 141a, 241a Elastic part

Claims (5)

開口を有し基板を収納する容器本体と、前記開口をシール可能に覆う蓋体とを備える基板収納容器であって、
前記容器本体又は前記蓋体は、
前記基板収納容器の内部空間と外部空間とを連通し、かつ、挿入部材を挿入可能な貫通穴と、
前記挿入部材を保持する保持部と、が形成され、
前記保持部は、前記挿入部材の挿入方向と直交する方向に変位可能な弾性片を有する
ことを特徴とする基板収納容器。
A substrate storage container comprising a container body that has an opening and stores a substrate, and a lid that covers the opening in a sealable manner,
The container body or the lid is
A through hole through which the internal space and the external space of the substrate storage container communicate, and an insertion member can be inserted;
A holding portion for holding the insertion member is formed,
The holding portion includes an elastic piece that can be displaced in a direction orthogonal to an insertion direction of the insertion member.
前記保持部は、前記挿入部材の挿入方向と直交する方向以外に延びる弾性部を有する
ことを特徴とする請求項1に記載の基板収納容器。
The substrate storage container according to claim 1, wherein the holding portion includes an elastic portion that extends in a direction other than a direction orthogonal to the insertion direction of the insertion member.
前記弾性片は、前記挿入部材の挿入方向と平行な方向に屈曲されている
ことを特徴とする請求項1又は2に記載の基板収納容器。
The substrate storage container according to claim 1, wherein the elastic piece is bent in a direction parallel to an insertion direction of the insertion member.
前記弾性片の自由端は、
前記挿入部材を係止固定する係止爪部と、
前記弾性片自身を前記挿入部材の挿入方向と直交する方向に変位させる被操作部と、を有する
ことを特徴とする請求項1から3までのいずれか1項に記載の基板収納容器。
The free end of the elastic piece is
A locking claw portion for locking and fixing the insertion member;
The substrate storage container according to any one of claims 1 to 3, further comprising: an operated portion that displaces the elastic piece itself in a direction orthogonal to an insertion direction of the insertion member.
前記挿入部材は、フィルタ部材である
ことを特徴とする請求項1から4までのいずれか1項に記載の基板収納容器。
The substrate insertion container according to any one of claims 1 to 4, wherein the insertion member is a filter member.
JP2016117431A 2016-06-13 2016-06-13 Substrate storage container Active JP6705090B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016117431A JP6705090B2 (en) 2016-06-13 2016-06-13 Substrate storage container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016117431A JP6705090B2 (en) 2016-06-13 2016-06-13 Substrate storage container

Publications (2)

Publication Number Publication Date
JP2017224659A true JP2017224659A (en) 2017-12-21
JP6705090B2 JP6705090B2 (en) 2020-06-03

Family

ID=60687050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016117431A Active JP6705090B2 (en) 2016-06-13 2016-06-13 Substrate storage container

Country Status (1)

Country Link
JP (1) JP6705090B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190085841A (en) * 2018-01-11 2019-07-19 구뎅 프리시젼 인더스트리얼 코포레이션 리미티드 Quick Release Purge Valve and Substrate Container Using Same
JP7432488B2 (en) 2020-11-20 2024-02-16 信越ポリマー株式会社 board storage container

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11233607A (en) * 1998-02-10 1999-08-27 Kakizaki Mamufacuturing Co Ltd Tin-plate storing container
JP2004103937A (en) * 2002-09-11 2004-04-02 Shin Etsu Polymer Co Ltd Substrate container
JP2004193272A (en) * 2002-12-10 2004-07-08 Shin Etsu Polymer Co Ltd Substrate housing vessel, and cleaning method of filter holding member thereof
JP2006024585A (en) * 2004-07-06 2006-01-26 Shin Etsu Polymer Co Ltd Substrate housing container

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11233607A (en) * 1998-02-10 1999-08-27 Kakizaki Mamufacuturing Co Ltd Tin-plate storing container
JP2004103937A (en) * 2002-09-11 2004-04-02 Shin Etsu Polymer Co Ltd Substrate container
JP2004193272A (en) * 2002-12-10 2004-07-08 Shin Etsu Polymer Co Ltd Substrate housing vessel, and cleaning method of filter holding member thereof
JP2006024585A (en) * 2004-07-06 2006-01-26 Shin Etsu Polymer Co Ltd Substrate housing container

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190085841A (en) * 2018-01-11 2019-07-19 구뎅 프리시젼 인더스트리얼 코포레이션 리미티드 Quick Release Purge Valve and Substrate Container Using Same
KR102187973B1 (en) 2018-01-11 2020-12-08 구뎅 프리시젼 인더스트리얼 코포레이션 리미티드 Quick Release Purge Valve and Substrate Container Using Same
JP7432488B2 (en) 2020-11-20 2024-02-16 信越ポリマー株式会社 board storage container

Also Published As

Publication number Publication date
JP6705090B2 (en) 2020-06-03

Similar Documents

Publication Publication Date Title
JP7108004B2 (en) Substrate container valve assembly
US5291923A (en) Door opening system and method
JP5268142B2 (en) Mask blank storage case, mask blank storage method, and mask blank storage body
EP2909110B1 (en) Reticle pod with cover to baseplate alignment system
JP5213440B2 (en) Substrate container and actuating subassembly for substrate container
KR102385686B1 (en) Quick-release valve module, reticle pod provided with quick-release valve module, and method for quickly providing quick-release valve module on a reticle pod
EP0591085A1 (en) Gas purge system for isolation enclosure for contamination sensitive items
JP6705090B2 (en) Substrate storage container
US20110215012A1 (en) Disk holding device
JP2009240938A (en) Fan filter unit
WO2017090143A1 (en) Substrate housing container
JP2007285161A (en) Air cleaner
JP3199387U (en) Housing device for housing screws and screwdrivers
JP2007157507A (en) Ionizer with part extension device
JP5416154B2 (en) Substrate storage container, glass substrate storage body with film, mask blank storage body, and transfer mask storage body
JP2007220283A (en) Disk-holding device
US5271516A (en) Isolation structure for contamination sensitive items
TWI684849B (en) Battery case
JP2005153963A (en) Storage container, and method for manufacturing the same
JP2022082232A (en) Substrate housing container
JP4801981B2 (en) Substrate storage container, glass substrate storage body with film, mask blank storage body, and transfer mask storage body
JP4616588B2 (en) Substrate storage container
JP2005297982A (en) Board storage container with rotation preventive member and packaging method for board storage container
JP2020138263A (en) Detachable tool of oil filter case
WO2010001460A1 (en) Wafer container

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190409

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200107

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20191226

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200217

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200414

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200416

R150 Certificate of patent or registration of utility model

Ref document number: 6705090

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250