JP2009231271A5 - - Google Patents

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Publication number
JP2009231271A5
JP2009231271A5 JP2009026423A JP2009026423A JP2009231271A5 JP 2009231271 A5 JP2009231271 A5 JP 2009231271A5 JP 2009026423 A JP2009026423 A JP 2009026423A JP 2009026423 A JP2009026423 A JP 2009026423A JP 2009231271 A5 JP2009231271 A5 JP 2009231271A5
Authority
JP
Japan
Prior art keywords
side wall
peripheral side
vertically above
positioned vertically
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009026423A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009231271A (ja
JP5369733B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2009026423A external-priority patent/JP5369733B2/ja
Priority to US12/366,907 priority Critical patent/US8753475B2/en
Priority to KR1020090009977A priority patent/KR101094976B1/ko
Priority to JP2009026423A priority patent/JP5369733B2/ja
Priority to CN2009100069203A priority patent/CN101505574B/zh
Priority to TW98104108A priority patent/TWI415526B/zh
Publication of JP2009231271A publication Critical patent/JP2009231271A/ja
Publication of JP2009231271A5 publication Critical patent/JP2009231271A5/ja
Publication of JP5369733B2 publication Critical patent/JP5369733B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009026423A 2008-02-08 2009-02-06 プラズマ処理装置 Expired - Fee Related JP5369733B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US12/366,907 US8753475B2 (en) 2008-02-08 2009-02-06 Plasma processing apparatus
KR1020090009977A KR101094976B1 (ko) 2008-02-08 2009-02-06 플라즈마 처리 장치
JP2009026423A JP5369733B2 (ja) 2008-02-27 2009-02-06 プラズマ処理装置
TW98104108A TWI415526B (zh) 2008-02-08 2009-02-09 電漿處理裝置
CN2009100069203A CN101505574B (zh) 2008-02-08 2009-02-09 等离子体处理设备

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008045697 2008-02-27
JP2008045697 2008-02-27
JP2009026423A JP5369733B2 (ja) 2008-02-27 2009-02-06 プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2009231271A JP2009231271A (ja) 2009-10-08
JP2009231271A5 true JP2009231271A5 (enExample) 2012-03-22
JP5369733B2 JP5369733B2 (ja) 2013-12-18

Family

ID=41246406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009026423A Expired - Fee Related JP5369733B2 (ja) 2008-02-08 2009-02-06 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP5369733B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5377587B2 (ja) * 2011-07-06 2013-12-25 東京エレクトロン株式会社 アンテナ、プラズマ処理装置及びプラズマ処理方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002299240A (ja) * 2001-03-28 2002-10-11 Tadahiro Omi プラズマ処理装置
JP3723783B2 (ja) * 2002-06-06 2005-12-07 東京エレクトロン株式会社 プラズマ処理装置
JP2004200307A (ja) * 2002-12-17 2004-07-15 Tokyo Electron Ltd プラズマ処理装置
JP4563729B2 (ja) * 2003-09-04 2010-10-13 東京エレクトロン株式会社 プラズマ処理装置
JP2005123406A (ja) * 2003-10-16 2005-05-12 Tokyo Electron Ltd プラズマエッチング方法。

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