JP2009227430A - Sucking device and film sticking device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film sticking device certainly performing suction of a film and release of suction in sticking of the film. <P>SOLUTION: A film sticking part 10 of the film sticking device 100 has a closed space E formed between a cylindrical outer frame body 30 rotatably supported on a rotation shaft 20 and an inner frame body 40 rotatably supported on the rotation shaft 20 independently from the outer frame body 30. A film stage 50 feeds the film 51 to a cylinder surface of the outer frame body 30. A sticking stage 60 places a liquid crystal panel 61 for sticking the film 51 fed to the cylinder surface. The closed space E is divided to a first area F communicated with atmosphere and a second pressure-reduced area G by a first partition wall 34 of the outer frame body 30 and a second partition wall 41 of the inner frame body 40. Any one of the outer frame body 30 and the inner frame body 40 is rotated to contract or enlarge the first area F and the second area G, and the film 51 is sucked or suction-released. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a suction device and a film sticking device, and more particularly to a suction device used for sucking a film-like object and the like, and a film sticking device for sticking a film to a sticking target such as a display panel.

  Patent Document 1 describes a liquid crystal display element film sticking device for sticking a polarizing film to a liquid crystal panel. In the film sticking device for liquid crystal display elements, the liquid crystal panel is held on a table, the polarizing film is adsorbed to a support having a curved adsorption surface, and the end of the polarizing film is in contact with the end of the liquid crystal panel At this time, the suction release air is supplied from the suction holes of the support, and the liquid crystal panel is attached while the clean air is blown onto the polarizing film film.

  Patent Document 1 describes that the adsorption is sequentially released in the vicinity of a region where the liquid crystal panel and the adhesive layer of the polarizing film abut, but there is no description of the specific configuration.

  On the other hand, in Patent Document 2, a drum having a groove space partitioned by a gasket is inserted inside the chuck drum for adsorbing the polarizing film, and only the chuck drum is rotated and polarized light is reduced by reducing the groove space partitioned by the gasket. A technique for adhering a polarizing film to a liquid crystal display element by adsorbing the film and extinguishing the adsorbing action from the end of the polarizing film by reverse rotation is described.

JP 2001-42315 (paragraph 0049) JP-A-57-51776

  However, in the technique described in Patent Document 2, the groove space is fixed by a gasket, and when the film is adsorbed and released, unless the decompression of the groove space is adjusted with high accuracy, the film sticking position is shifted. There was a problem that.

  Moreover, in order to avoid the fall of a film, a sticking position shift, etc., as described in patent document 1, it is also considered to newly install an air blowing mechanism. However, in this case, there is a problem that dust trapped by air is mixed between the liquid crystal panel and the polarizing film. Further, there is a problem that air is generated between the liquid crystal panel and the polarizing film by blowing air, and bubbles are generated.

  An object of this invention is to provide the adsorption | suction apparatus which can use for attachment or conveyance of a film-like object, a powdery substance, etc. Moreover, an object of this invention is to provide the film sticking apparatus which can perform adsorption | suction and adsorption | suction cancellation | release of a film reliably at the time of sticking of a film.

In order to achieve the above object, the present invention provides a cylindrical outer frame that is rotatably supported by a rotation shaft, and is rotatably supported by the rotation shaft independently of the outer frame. A closed space formed between the cylindrical inner frame with a smaller diameter,
A first partition that is integrally supported by the outer frame and protrudes into the closed space, and a second partition that is integrally supported by the inner frame and protrudes into the closed space. And is divided into a first region and a second region,
The first region and the second region communicate with the outside through a plurality of slits arranged on the cylindrical surface of the outer frame, and the first region is atmospheric or pressurized via an air connection hole. An adsorbing device is provided, wherein the adsorbing device is connected to a system and the second region is depressurized by a depressurizing device through a depressurizing connection hole.

The present invention is a film sticking comprising: the above-described adsorption device; a film stage for supplying a film to the cylindrical surface of the outer frame; and a sticking stage for placing a sticking target for sticking the film supplied to the cylindrical surface. A device,
The film stage is brought close to the cylindrical surface of the outer frame, and at least one of the outer frame and the inner frame is rotated so that the second region is enlarged, and the film is moved through the slit to the outer side. A first step of adsorbing to the cylindrical surface of the frame;
First, the film is applied to the object to be applied by moving the application stage closer to the cylindrical surface of the outer frame and rotating at least one of the outer frame and the inner frame so that the second region is reduced. The film sticking apparatus is characterized by being operated including two steps.

  According to the suction device of the present invention, by rotating at least one of the outer frame and the inner frame to enlarge or reduce the second region that becomes the decompression space, the object is adsorbed on the surface of the outer frame, Alternatively, it can be inhaled into the second area and then removed from the surface of the outer frame, or can be discharged from the second area, such as attachment or transportation of a film-like object or powdered substance, etc. Can be used.

  According to the film sticking apparatus of the present invention, the closed space formed between the outer frame body and the inner frame body has the first region communicating with the atmosphere by the first partition wall and the second partition wall, and the reduced pressure. The first and second regions can be reduced or enlarged by rotating at least one of the outer frame and the inner frame. As a result, when sticking the film, the suction force can be controlled easily, and the suction and release of the film can be reliably performed. The first region can be connected to a decompression system closer to the atmosphere than the second region, together with the atmospheric system and the pressurization system. As an example, when the first region is connected to a pressure system, it is effective for promoting film peeling when the adhesion between the film adsorbing surface and the film is too high. In addition, when the first region is connected to a decompression system that is closer to the atmosphere than the second region, it is effective in suppressing unintended peeling from the film adsorption surface when using a film with low flexibility. It is. In the following description, the hole connecting the first region and the outside is simply referred to as an atmospheric connection hole.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings.
(First embodiment)
FIG. 1 is a diagram showing a configuration of a film sticking apparatus according to the first embodiment of the present invention. The film sticking apparatus 100 includes a film sticking unit 10, a film stage 50, and a sticking stage 60. The film sticking unit 10 is supported by the rotating shaft 20 so as to be rotatable on the rotating shaft 20, and is supported by the rotating shaft 20 so as to be rotatable independently of the outer frame 30, and has a smaller diameter than the outer frame 30. A closed space E is formed between the outer frame body 30 and the inner frame body 40. The film stage 50 supplies the film 51 to the cylindrical surface of the outer frame body 30. The pasting stage 60 mounts a liquid crystal panel 61 to be pasted on which the film 51 supplied to the cylindrical surface is pasted. In the figure, the outer frame 30 rotates counterclockwise, the film 51 adsorbed on the outer frame 30 and the liquid crystal panel 61 on the pasting stage 60 come into contact with each other, and the film 51 is pasted on the liquid crystal panel 61. It shows the state to do.

  In the present embodiment, the film 51 is an optical film such as a polarizing plate or a retardation plate, or an optical film made of a flexible resin material. In addition, the liquid crystal panel 61 is an object to be pasted. However, in the film sticking apparatus 100 of the present invention, the sticking target may be a film that can be placed on the sticking stage 60. As an example, the sticking target is a substrate used in the LCD device, and may be, for example, a glass substrate with low flexibility or a PES film (polyethersulfone) with high flexibility.

  FIGS. 2A and 2B are views showing a side surface of the film sticking portion 10 and a cross section taken along line AB, respectively. The outer frame 30 is formed on a cylindrical surface (hereinafter, also referred to as a film suction surface) 31 with an adsorption groove 32 and an adsorption hole 33, and an outer frame 30 that is integrally supported by the outer frame 30 and protrudes into the closed space E. And a barrier (hereinafter referred to as a first partition wall) 34. The first partition wall 34 is formed with an atmospheric connection hole 34a for communicating with the outside and a decompression connection hole 34b connected to a decompression device (not shown). Further, as shown in FIG. 2B, the inner frame body 40 includes an inner barrier 41 (hereinafter referred to as a second partition wall) 41 that is integrally supported by the inner frame body 40 and protrudes into the closed space E. Have. In FIG. 2B, the suction holes 33 and the suction grooves 32 are omitted.

  As shown in FIG. 2B, the closed space E shown in FIG. 1 includes a first region F by a first partition wall 34 of the outer frame body 30 and a second partition wall 41 of the inner frame body 40. And a second region G. The first partition 34 slides on the outer surface (inner frame outer wall) 42 of the inner frame 40, and the second partition 41 slides on the inner surface (outer frame inner wall) 35 of the outer frame 30. To do. That is, the tip 34 c of the first partition wall 34 is in contact with the inner frame outer wall 42, and the tip 41 c of the second partition wall 41 is in contact with the outer frame body wall 35. The tips 34c and 41c are indicated by black circles in the figure, and the same applies to the subsequent figures, and the reference numerals are omitted. A closed space E is defined by the outer frame inner wall 35 and the inner frame outer wall 42.

  The first region F is maintained at atmospheric pressure because it communicates with the outside through the atmosphere connection hole 34a. The second region G becomes a decompression space decompressed by the decompression device via the decompression connection hole 34b. In the figure, directions in which the outer frame body 30 and the inner frame body 40 rotate through the rotation shaft 20 are indicated by arrows.

  FIGS. 3A and 3B are views showing a front surface of the film sticking portion 10 and a cross section taken along line CD, respectively. FIG. 2B shows the cross-sectional shapes of the suction groove 32 and the suction hole 33 formed on the film suction surface 31 of the outer frame 30. The suction force of the decompression space G acts on the film 51 through the suction holes 33 and the suction grooves 32, and the film 51 is sucked on the film suction surface 31 of the outer frame 30. In FIG. 5B, the suction groove 32 has a diameter larger than that of the suction hole 33, but the diameter and shape can be changed as appropriate.

  Next, with reference to FIG. 4, the principle by which the film sticking part 10 adsorb | sucks or cancels | releases the film 51 is demonstrated. First, in FIG. 2A, the closed space E is connected to the decompression connection hole 34b by the first partition wall 34 and the second partition wall 41 to the decompression device, and the decompression space G (hereinafter referred to as the second space). And the space F (hereinafter referred to as the atmospheric pressure space or the first region) F at which the atmospheric air connection hole 34a is opened and is at atmospheric pressure.

  The suction holes b <b> 1 to b <b> 4 communicating with the decompression space G suck the film 51 on the film suction surface 31 when the film 51 supplied from the film stage 50 is disposed. On the other hand, the suction holes b <b> 5 to b <b> 8 located in the atmospheric pressure space F cannot suck the film 51. FIG. 2A shows a state in which the film 51 is adsorbed to the film adsorption surface 31 through the adsorption holes b1 to b4.

  Here, when at least one of the outer frame body 30 and the inner frame body 40 is rotated, the relative positions of the first partition wall 34 and the second partition wall 41 change. Therefore, the space volume (space area) between the decompression space G and the atmospheric pressure space F in the closed space E changes, that is, expands or contracts.

  FIG. 4B shows a state in which the outer frame body 30 is rotated in the direction in which the volume of the decompression space G is reduced. At this time, the suction holes 33 communicating with the decompression space G are the suction holes b1 and the suction holes b2. That is, the film part a <b> 1-a <b> 2 located here is held by the film adsorption surface 31.

  On the other hand, in the suction holes b <b> 3 to b <b> 5 communicating with the atmospheric pressure space F, the film portions a <b> 3 to a <b> 4 located here are not sucked by the film suction surface 31. Thus, in the film sticking part 10, the film 51 can be desorbed (adsorption and desorption).

  Hereinafter, operation | movement of the film sticking apparatus 100 is explained in full detail using FIGS. 5 and 6 show an operation of adsorbing the film 51 to the film sticking unit 10 (hereinafter referred to as a first step). 7 and 8 show an operation of releasing the suction of the film 51 sucked by the film sticking unit 10 and sticking it to the liquid crystal panel 61 (hereinafter referred to as a second step).

  First, the first step will be described. In the first step, the film stage 50 is moved closer to the film suction surface 31 of the outer frame body 30 and the outer frame body 30 is rotated in one direction so that the second region G is enlarged. Further, the film stage 50 is moved in the same direction as the moving direction of the film adsorption surface 31, and the film 51 is adsorbed to the film adsorption surface 31 of the outer frame body 30 through the adsorption holes 33 and the adsorption grooves 32. Here, the “same direction” refers to a direction along a tangent line between the film stage 50 and the outer frame 30.

  Hereinafter, the first step will be specifically described. First, as shown in FIG. 5, before the film 51 is adsorbed, the second partition wall 41 is positioned closer to the first partition wall 34 than the suction hole b1, and all the suction holes are in a non-depressurized state. . In this state, the film 51 and the film adsorption surface 31 of the outer frame 30 are brought into contact with each other.

  Subsequently, as shown in FIG. 6A, the inner frame body 40 is rotated counterclockwise to between the suction holes b1 and b2. Thereafter, the inner frame 40 is moved (leftward) and moved in the directions of the arrows shown in the figure while interlocking the film stage 50 on which the film 51 is mounted and the outer frame 30 with the position maintained. Rotate (clockwise). Therefore, the film 51 is held on the film adsorption surface 31 of the outer frame 30 as shown in FIG.

  In this way, the film 51 placed on the film stage 50 is held on the film suction surface 31 by the suction grooves 32 connected to the decompression space G in a decompressed state. Here, although the example which rotates the inner side frame 40 in order to adsorb | suck the film 51 with the adsorption | suction hole b1, the inner frame 40 mounted the film 51, maintaining that position, without implementing this operation | movement. The film stage 50 and the outer frame 30 are interlocked and moved (leftward) and rotated (clockwise) in the directions of the arrows shown in FIG. The film 51 may be held.

  Next, the second step will be described. In the second step, the affixing stage 60 is moved closer to the film adsorption surface 31 of the outer frame 30, and the outer frame 30 is rotated in the reverse direction (counterclockwise) so that the second region G is reduced. The stage 60 is moved in the same direction as the moving direction of the fim suction surface 31, and the film 51 is attached to the liquid crystal panel 61. Here, the “same direction” refers to a direction at a tangent line between the sticking stage 60 and the outer frame 30.

  Hereinafter, the second step will be specifically described. First, as shown in FIG. 7A, the outer frame 30 and the inner frame 30 are arranged so that the volume (area) of the decompression space G formed between the second partition wall 41 and the first partition wall 34 does not change. The frame body 40 is interlocked to rotate and move while holding the film 51 on the film adsorption surface 31 to the film application start position of the liquid crystal panel 61 placed on the application stage 60. Abut. At this time, the alignment (alignment) between the film 51 and the liquid crystal panel 61 may be a known optical method or mechanical method.

  Subsequently, as shown in FIG. 4B, the inner frame 40 is attached to the outer frame 30 adsorbing the film 51 and the sticking stage 60 while holding the above position. The film 51 is attached to the liquid crystal panel 61 by rotating and moving in conjunction with each other. In such a 2nd process, the film 51 hold | maintained at the film adsorption surface 31 of the outer side frame 30 peels easily from the film adsorption surface 31 by the atmospheric pressure space F maintained at atmospheric pressure (adsorption release). it can.

  In the second step shown in FIG. 5B, the outer frame 30 is rotated in the reverse direction (counterclockwise), and the sticking stage 60 is moved in the same direction as the moving direction of the fim suction surface 31. However, the present invention is not limited to this, and the outer frame 30 may be rotated in the reverse direction without moving the sticking stage 60. That is, the peeling of the film 51 from the film adsorption surface 31 depends on the relative positional relationship between the outer frame 30 and the pasting stage 60.

  Next, an adhesive layer that can be easily bonded to the liquid crystal panel 61 is provided on the outer film surface of the film adsorption surface 31. If the adhesive layer and the liquid crystal panel 61 come into contact with each other, the film 51 becomes the outer frame. It peels from 30 film adsorption surfaces 31, and is affixed on the liquid crystal panel 61 as shown in FIG.

  The film sticking apparatus according to the present embodiment has the following effects. That is, the closed space E is divided into a first region F that becomes an atmospheric pressure space and a second region G that is decompressed by the first partition wall 34 and the second partition wall 41, and these spaces are As the outer frame 30 and / or the inner frame 40 are rotated, they are reduced or enlarged. That is, the film 51 can be attached to the liquid crystal panel 61 by easily controlling the pressure state of these spaces by the rotation of the frame.

  Further, the film 51 is held on the film adsorption surface 31 in the decompression space, and is smoothly separated from the film adsorption surface 31 in the atmospheric pressure space when the film is applied. As a result, the film 51 and the liquid crystal panel 61 can be attached with high accuracy at a specified position. Further, since the film 51 can be attached to the liquid crystal panel 61 without applying unnecessary tension, the film 51 is not wrinkled.

  Furthermore, since the film 51 is reliably held on the film adsorption surface 31 from the start of application to the end of application, the film 51 does not fall during application and does not need to be held by air blowing. For this reason, the film 51 and the liquid crystal panel 61 can be attached without bubbles.

  In order to make the application state more suitable, an elastic body such as rubber or resin having a hardness of about 20 to 40 degrees may be used for the film adsorption surface 31 and the application stage 60. The reason is as follows. The liquid crystal panel 61 has undulations having a height difference of about 50 μm on the glass surface due to member distortion, apparatus distortion, and the like. On the other hand, by giving elasticity to the film adsorbing surface 31 and the sticking stage 60, the film 51 and the liquid crystal panel 61 follow the swell and the sticking pressure is applied uniformly, so that bubbles are less likely to enter. That is, the film 51 can be suitably applied to an object to be applied with poor flatness.

  Further, in recent years, with the reduction in weight of the liquid crystal panel 61, the glass substrate that is the base material of the liquid crystal panel 61 has also been made thinner. There are also effects such as prevention of cracking and chipping. In addition, it is possible to use a lower glass by preventing air bubbles from being mixed, and it is also possible to reduce the weight by using a thinner glass.

In consideration of application to the liquid crystal panel 61 having a diagonal size of 2 inches to 23 inches, a polarizing plate for liquid crystal that is generally commercially available using a glass plate having a size corresponding to the liquid crystal panel 61 within the range. The polarizing plate sticking test using was performed. At this time, if the vacuum pressure for adsorbing the polarizing plate is a vacuum level of about −0.2 kgf / cm ² or more, it has been confirmed that the polarizing plate can be suitably applied without dropping at the time of application.

  Moreover, since pressure reduction control is possible using the 1st partition 34 of the outer side frame 30, and the 2nd partition 41 of the inner side frame 40, it is not necessary to employ | adopt many mechanical valves for an apparatus. For this reason, a reduction in the manufacturing cost of the device and a reduction in the failure rate can be realized.

  In addition, the size (length) of the plurality of films 51 can be accommodated only by changing the relative angles of the outer frame 30 and the inner frame 40 and changing the volumes of the decompression space G and the atmospheric pressure space F. Thereby, the cost at the time of manufacturing a liquid crystal display device can be reduced.

  In the film sticking apparatus 100, the first region (atmospheric pressure space) F may be connected to a decompression system closer to the atmosphere than the second region (decompression space) G together with the atmospheric system and the pressurization system. If it does in this way, when the 1st field F is connected to a pressurization system as an example, it is effective in promoting exfoliation of a film when the adhesion power of film adsorption surface 31 and film 51 is too high. is there. Moreover, when the 1st area | region F is connected to the pressure reduction system nearer to air | atmosphere than the 2nd area | region G, when using a film with a low flexibility, etc., the unintentional peeling from the film adsorption surface 31 is suppressed. It is effective.

  Here, the liquid crystal panel 61 to which the film 51 is stuck by the film sticking apparatus 100 is used for a liquid crystal display device. In addition, the liquid crystal display device has a liquid crystal filled between a pair of glass substrates having display electrodes, and a polarizing plate is attached on the glass surface, and then a display circuit board is attached and the backlight is attached. It is built in the chassis.

(Second Embodiment)
FIG. 9 is a diagram showing a configuration of a film sticking apparatus according to the second embodiment of the present invention. The figure (a) shows the front of film sticking part 10A, and the figure (b) is a figure showing the section which followed the HI line. Moreover, Fig.10 (a) shows the side surface of 10 A of film sticking parts, The figure (b) and (c) are figures which show the cross section along a JK line. 10 A of film sticking parts differ from the said film sticking part 10 by the point which makes a space with the sticking frame 70 in addition to the outer side frame 30 and the inner side frame 40.

  That is, as shown in FIG. 9B, the film sticking portion 10A causes the outer frame 30, the inner frame 40, and the sticking frame 70, which are rotatably supported by the rotating shaft 20, to contact each other, A closed space E for controlling the state is formed.

  As shown in FIGS. 9B and 10A, the sticking frame body 70 includes the closed space E positioned inside the sticking frame body 70, and suction grooves 32 disposed on the film suction surface 71. A plurality of adsorption holes (adsorption hole b1 and adsorption hole b2) are arranged. That is, the sticking frame body 70 has the suction grooves and suction holes and the film suction surface 71, and it is not necessary to provide suction holes in the outer frame body 30. Note that the sticking frame body 70 corresponds to an extended portion that extends outward from the inner frame body 40 in the axial direction of the rotating shaft 20.

  Next, operation | movement of 10 A of film sticking parts is demonstrated. As shown in FIG. 10B, the closed space E is partitioned by the partition walls 34 and 41 into a second region G that is a decompressed space and a first region F that is an atmospheric pressure space. Therefore, the suction hole c2 and the suction hole c3 located in the decompression space can hold the film 51 if the film 51 is disposed in the suction groove 32 disposed in the film suction surface 71. On the other hand, since the suction holes c1 and c4 located in the atmospheric pressure space are in a non-depressurized state, the film 51 cannot be sucked.

  That is, in FIG. 6B, when at least one of the outer frame body 30 and the inner frame body 40 is rotated, the relative position of the first partition wall 34 and the second partition wall 41 changes. The space volume of the atmospheric pressure space changes. As described above, FIGS. 4A and 4B show a state in which the volume of the decompressed space and the atmospheric pressure space changes.

  FIG. 10C shows a state in which the outer frame body 30 and the sticking frame body 70 are rotated in the same direction in synchronization with each other, here, the frame bodies 30 and 70 are rotated in a direction to reduce the volume of the decompression space. Is shown. Here, the suction hole connected to the decompression space is c2, and the film 51 is held on the film suction surface 71 by the suction groove d2 located here. On the other hand, since the suction holes c1, c3, and c4 connected to the atmospheric pressure space are at atmospheric pressure (or pressure), the suction grooves d1, d3, and d4 located on the film suction surface 71 are also at atmospheric pressure (or pressure). It becomes. For this reason, the film 51 is not adsorbed. In this way, the film 51 can be attached and detached at the film attaching portion 10A.

  Therefore, the film 51 held on the film suction surface 71 of the sticking frame 70 can be easily peeled from the film suction surface 71 by the space in the non-depressurized state. Here, an adhesive layer that can be easily bonded to the liquid crystal panel 61 is provided on the outer film surface of the film adsorbing surface 71. If the adhesive layer and the liquid crystal panel 61 come into contact with each other, the film 51 is attached to the adhesive frame. It peels from the film adsorption surface 71 of the body 70 and is affixed to the liquid crystal panel 61.

  Thus, according to the present embodiment, after the outer frame body 30 and the inner frame body 40 are manufactured, if the pasting frame body 70 that matches the width of the film 51 is prepared, it is matched to the width of the film 51. Various pasting frames 70 can also be exchanged.

(Third embodiment)
FIG. 11 is a diagram showing a configuration of a film sticking apparatus according to the third embodiment of the present invention. The film sticking part 10B here is different from the film sticking parts 10 and 10A of the first and second embodiments in the arrangement positions of the decompression connection hole and the air connection hole. That is, in the film pasting part 10B, the decompression connection hole 41b and the air connection hole 41a are respectively arranged at positions facing the side surfaces of the second partition wall 41, not the first partition wall 34.

  In the film sticking part 10B, the external decompression connection hole and the external atmospheric connection hole can be provided in the inner frame body 40 by providing the decompression connection hole 41b and the atmospheric connection hole 41a in the second partition wall 41. That is, the outer frame 30 rotates greatly when the film 51 is applied (the operation range is large), but the inner frame 40 has a smaller operation range than the outer frame 30. For this reason, when the external decompression connection hole and the external air connection hole are provided in the inner frame body 40, the configuration of the connection pipe with the outside becomes simple and easy, and further, the connection pipe can be reduced in size and extended in life. it can. Therefore, the manufacturing and maintenance costs of the apparatus can be reduced.

(Fourth embodiment)
FIG. 12 is a diagram showing a configuration of a film sticking apparatus according to the fourth embodiment of the present invention. Here, the film sticking portion 10C is arranged in the vicinity thereof so that the two types of connection holes sandwich the first partition wall 34 as shown in FIGS.

  That is, in the film pasting portion 10C, the decompression connection hole 34b and the atmosphere connection hole 34a are not provided on the side surface of the partition wall, but are provided in the vicinity thereof so as to sandwich the first partition wall 34. As a result, the two types of connection holes 34a and 34b can be easily processed, and the manufacturing cost of the apparatus can be reduced.

(Fifth embodiment)
FIGS. 13A and 13B are views showing the configuration of a film sticking apparatus according to the fifth embodiment of the present invention. Here, the film pasting portion 10D has two types of connection holes arranged in the vicinity thereof so as to sandwich the second partition wall 41 therebetween.

  In the film pasting portion 10D, the external decompression connection hole and the external atmospheric connection hole can be provided in the inner frame body 40 by providing the decompression connection hole 41b and the atmospheric connection hole 41a in the vicinity of the second partition wall 41. it can.

  Therefore, in the film sticking part 10D, similarly to the film sticking part 10B described above, the configuration of the connection pipe with the outside can be simplified, and further, the connection pipe can be reduced in size and extended in life. In addition, the two types of connection holes can be easily processed, and the manufacturing and maintenance costs of the apparatus can be reduced.

  In each of the above embodiments, a plurality of arrangements of two types of connection holes are shown. However, the present invention is not limited to this, and these may be combined as appropriate. As an example, of the two types of connection holes, one connection hole may be disposed on the side surface of the partition wall, and the other connection hole may be disposed near the partition wall.

(Sixth embodiment)
FIG. 14 is a diagram showing a configuration of a film sticking apparatus according to the sixth embodiment of the present invention. In the film sticking part 10E here, the first partition 34 of the outer frame body 30 and the second partition wall 41 of the inner frame body 40 are arranged in two sets, and are different from the above embodiments. Yes. In the film sticking part 10E, as shown to the same figure (a), it becomes possible to divide two decompression spaces and two atmospheric pressure spaces. Note that the number of the respective partition walls 34 and 41 may be further increased, and the arrangement positions of the decompression connection holes and the atmosphere connection holes may be appropriately selected from the arrangements shown in the above embodiments.

  Hereinafter, the operation of the film sticking unit 10E will be described with reference to FIGS. First, as shown in FIG. 14B, the film f1 mounted on the film stage s1, the film f2 mounted on the film stage s2, and the film adsorption surface 31 of the outer frame 30 are brought into contact with each other.

  Subsequently, as shown in FIG. 15A, the film stage s1, the film stage s2, and the outer frame 30 are synchronized and moved in the direction of the arrow, and the film suction surface 31 is also rotated in the direction of the arrow. . As a result, the films f1 and f2 disposed on the film stages s1 and s2 are simultaneously held on the film suction surface 31.

  FIG. 14A is a view showing the positional relationship between the first partition wall 34 and the second partition wall 41 when the film is held. As described above, the films f1 and f2 are respectively held by the suction holes b1 to b4 and the suction holes b5 to b8 located in the decompression space formed by the first partition wall 34 and the second partition wall 41.

  Next, as shown in FIG. 15 (b), the film sticking stage t1 and the sticking stage t2 mounted on the facing surfaces are mounted with the liquid crystal panel p1 and the liquid crystal panel p2 and moved to the film sticking start position, as shown in FIG. To do. Furthermore, the application stage t1 and the application stage t2 are synchronized and moved in the direction of the arrow in FIG. 15B, and the film suction surface 31 is also rotated in the direction of the arrow. Thereafter, as shown in FIG. 15B, the film held on the film adsorption surface 31 is peeled off from the film adsorption surface 31 and attached to the liquid crystal panel.

  According to the present embodiment, the film can be attached and detached and the film can be attached in one operation, and the processing capacity per unit time can be increased up to twice. As a result, the cost for manufacturing the liquid crystal display device can be reduced.

  In each of the above embodiments, the suction groove 32 is a simple hole, but the present invention is not limited to this, and a porous body 31a may be further disposed in the suction groove 32 as shown in FIG. As shown in 16 (b), a fine pore 31 b may be used in the suction groove 32. That is, by adsorbing the film by the porous body 31a (FIG. (A)) or the fine pore body 31b (FIG. (B)) in which small-diameter holes are arranged in the adsorption groove 32, the film directly contacts the film. Each adsorbing site that adsorbs becomes fine.

  Therefore, the damage to the film due to the adsorption site is also reduced, making it difficult to see and reducing the degree (or not occurring). Therefore, defective products can be reduced and yield can be improved. In addition, damage refers to a phenomenon in which an adsorption portion of an object rises due to adsorption, or the shape of the adsorption portion remains on the film surface as a trace.

  Further, as shown in FIG. 17, a ball 36 may be provided in the suction groove 32. In addition, the figure (a) has shown that the adsorption hole 33 is a pressure-reduced state, and the figure (b) has shown that the adsorption hole 33 is air | atmosphere or a pressurization state. Since the ball 36 is provided in the suction groove 32, the ball 36 jumps out of the film suction surface 31 when the film is peeled off, so that the film can be easily peeled off. Further, even when the suction hole 33 is pressurized through an air connection hole when the film is peeled off, the ball 36 functions as a valve and prevents the pressurized gas from leaking from the suction groove 32. .

  When the suction hole 33 is in the decompression space, the ball 36 is lifted by overcoming the spring 37 and pulled in from the film suction surface 31 as shown in FIG. Done via.

  When the suction hole 33 is in the atmosphere or in a pressurized space, the ball 36 is pressed against the ball receiver 39 by a spring 37 provided therein, as shown in FIG. And the gas 36 is prevented from leaking, and the ball 36 is exposed from the film adsorbing surface to forcibly peel off the film.

  Thus, by providing a mechanism for forcibly peeling the film, the film can be easily peeled even when the film sticks to the film adsorption surface 31 due to static electricity or the like. Furthermore, even if auxiliary means for film peeling such as pressurized (blow) gas is used, it is possible to prevent gas leakage from the adsorption groove 32 where film peeling has been completed. Winding or the like can be prevented. Therefore, there is an effect that the yield can be increased by reducing the film peeling failure due to the sticking of the film and reducing the defective products due to the rolled up dust.

  Furthermore, as shown in FIG. 18, the suction groove 32 may include a ball 36 and a porous body 31a. In addition, the same figure (a) shows that the adsorption hole 33 is in a pressure-reduced state, and the same figure (b) shows that the adsorption hole 33 is in a pressurized state. By providing the ball 36 in the suction groove 32, the ball 36 functions as a valve when the suction hole 33 is pressurized by peeling the film, and the pressurized gas is prevented from leaking from the suction groove 32.

  When the suction hole 33 is in the reduced pressure space, the ball 36 is pushed up by a spring 37 and the film is sucked through the bypass hole 38 as shown in FIG. Further, when the suction hole 33 is in the atmospheric pressure space (here, the pressurized space), as shown in FIG. To keep airtight and prevent pressurized gas leakage.

  In this way, even when an auxiliary means for film peeling such as pressurized (blow) gas is used, it is possible to prevent gas leakage from the adsorption groove 32 where the film has been peeled off, and to take up dust due to gas leakage, etc. Can be prevented. Therefore, the yield can be improved by reducing the number of defective products due to the rolled up dust.

  As described above, in the film sticking apparatus of the present invention, the following modes can be adopted.

  A plurality of sets of the first region and the second region are formed. Since a plurality of films can be adsorbed on the cylindrical surface, the efficiency can be increased.

  An atmosphere connection hole and a decompression connection hole may be formed in the first partition. An air connection hole and a decompression connection hole are formed in the second partition wall. In this case, since the operation range of the second partition is smaller than that of the first partition, the configuration of the pipe connected to the atmosphere connection hole and the decompression connection hole can be simplified. In addition, you may form an air | atmosphere connection hole and a pressure reduction connection hole in the 1st and 2nd partition, respectively.

  An air connection hole and a decompression connection hole are formed along the axial direction of the rotating shaft. There is no need to process the first and second partition walls, and the air connection hole and the decompression connection hole can be easily formed.

  A porous body or a microporous body is disposed on the surface of the slit. In this case, the film is not damaged when adsorbing the film.

  The slit can be closed by a ball valve biased by a spring. Since the film adsorbed on the cylindrical surface is forcibly separated from the cylindrical surface by the ball valve, when the adsorbing power is reduced, the film can be reliably desorbed.

  The outer frame includes an axially extending portion that extends outward from the inner frame in the axial direction of the rotation shaft, and a slit is formed in the axially extending portion. In this case, since the film is adsorbed to the axially extending portion, various films can be attached only by preparing the axially extending portion corresponding to the width of the film.

  The cylindrical surface of the outer frame body or the cylindrical surface of the axially extending portion is formed of an elastic body. In this case, the film can be suitably applied even if the object to be applied has undulations.

  A display panel can be adopted as an object to be attached. Moreover, an optical film or a protective film can be adopted as the film. Examples of the optical film include a polarizing film and a retardation film.

  The film sticking part of the film sticking apparatus can also be used for purposes other than film sticking. For example, by enlarging or reducing the second area that becomes the decompression space, the object is adsorbed on the surface of the outer frame, or sucked into the second area, and then separated from the surface of the outer frame. Or it can discharge | emit from a 2nd area | region, and it can utilize as an adsorption | suction apparatus which can use for attachment or conveyance of a film-like object, a powdery substance, etc.

  As mentioned above, although this invention was demonstrated based on the suitable embodiment, the adsorption | suction apparatus and film sticking apparatus of this invention are not limited only to the structure of the said embodiment, Various from the structure of the said embodiment. Modifications and changes are also included in the scope of the present invention.

The figure which shows the structure of the film sticking apparatus which concerns on the 1st Embodiment of this invention. (A) And (b) is a figure which shows the side surface and cross section of a film sticking part, respectively. (A) And (b) is a figure which shows the front and cross section of a film sticking part, respectively. (A) And (b) is a figure explaining the principle of adsorption | suction of a film by a film sticking part, and adsorption | suction cancellation | release. The figure which shows the state of the film sticking part before adsorb | sucking a film. (A) And (b) is a figure which shows operation | movement of the film sticking part at the time of adsorb | sucking a film following FIG. (A) And (b) is a figure which shows operation | movement of the film sticking part at the time of releasing adsorption | suction of the film | membrane adsorbed following FIG. The figure which shows the state of the film sticking part which adsorbed | released adsorption | suction of the film following FIG. (A) And (b) The figure which shows the structure of the film sticking apparatus which concerns on the 2nd Embodiment of this invention. (A)-(c) is a figure which shows operation | movement of the film sticking part shown in FIG. The figure which shows the structure of the film sticking apparatus which concerns on the 3rd Embodiment of this invention. (A) And (b) is a figure which shows the structure of the film sticking apparatus which concerns on the 4th Embodiment of this invention. (A) And (b) is a figure which shows the structure of the film sticking apparatus which concerns on the 5th Embodiment of this invention. (A) And (b) is a figure which shows the structure of the film sticking apparatus which concerns on the 6th Embodiment of this invention. (A) And (b) is a figure which shows operation | movement of the film sticking part shown in FIG. (A) And (b) is a figure which shows the example which has arrange | positioned the porous body or the microporous body to the adsorption | suction groove | channel, respectively. (A) And (b) is a figure which shows the example which has arrange | positioned the ball valve in the adsorption | suction groove | channel, respectively. (A) And (b) is a figure which shows the example which has arrange | positioned the ball valve and the porous body in the adsorption | suction groove | channel, respectively.

Explanation of symbols

10: Film sticking part 20: Rotating shaft 30: Outer frame 34: First partition (outer barrier)
40: inner frame 41: second partition wall (inner barrier)
50: Film stage 51: Film 60: Pasting stage 61: Liquid crystal panel 100: Film pasting apparatus E: Closed space F: First region (atmospheric pressure space)
G: 2nd area | region (decompression space)

Claims (14)

A cylindrical outer frame that is rotatably supported by a rotating shaft; and a cylindrical inner frame that is rotatably supported by the rotating shaft independently of the outer frame and has a smaller diameter than the outer frame. Having a closed space formed between,
A first partition that is integrally supported by the outer frame and protrudes into the closed space, and a second partition that is integrally supported by the inner frame and protrudes into the closed space. And is divided into a first region and a second region,
The first region and the second region communicate with the outside through a plurality of slits arranged on the cylindrical surface of the outer frame, and the first region is atmospheric or pressurized via an air connection hole. An adsorption apparatus connected to a system, wherein the second region is decompressed by a decompression device through a decompression connection hole.   The adsorption device according to claim 1, wherein a plurality of sets of the first region and the second region are formed.   The adsorption device according to claim 1 or 2, wherein the atmosphere connection hole and the decompression connection hole are formed in the first partition wall.   The adsorption device according to claim 1 or 2, wherein the atmosphere connection hole and the decompression connection hole are formed in the second partition wall.   The adsorption device according to claim 1 or 2, wherein the atmosphere connection hole and the decompression connection hole are formed in the first and second partition walls, respectively.   The adsorption device according to claim 1 or 2, wherein the atmosphere connection hole and the decompression connection hole are formed along an axial direction of the rotation shaft.   The adsorption | suction apparatus as described in any one of Claims 1-6 by which the porous body or the microporous body is arrange | positioned on the surface of the said slit.   The suction device according to claim 1, wherein the slit can be closed by a ball valve biased by a spring.   The adsorption | suction apparatus as described in any one of Claims 1-8 in which the cylindrical surface of the said outer side frame is formed with the elastic body.   The said outer frame is equipped with the axial direction extension part extended outside the said inner side frame in the axial direction of a rotating shaft, The said slit is formed in this axial direction extension part. The adsorption apparatus as described in any one.   The adsorption | suction apparatus of Claim 10 with which the cylindrical surface of the said axial direction extension part is formed with the elastic body. The adhering device according to any one of claims 1 to 11, a film stage for supplying a film to the cylindrical surface of the outer frame body, and an affixing for placing an affixing target to affix the film supplied to the cylindrical surface A film sticking device comprising a stage,
The film stage is brought close to the cylindrical surface of the outer frame, and at least one of the outer frame and the inner frame is rotated so that the second region is enlarged, and the film is moved through the slit to the outer side. A first step of adsorbing to the cylindrical surface of the frame;
First, the film is applied to the object to be applied by moving the application stage closer to the cylindrical surface of the outer frame and rotating at least one of the outer frame and the inner frame so that the second region is reduced. The film sticking apparatus characterized by operating including 2 processes.   The film sticking apparatus according to claim 12, wherein the sticking target is a display panel, and the film is an optical film or a protective film.   The film sticking apparatus according to claim 13, wherein the optical film is a polarizing film or a retardation film.

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