JP2009222475A5 - - Google Patents
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- Publication number
- JP2009222475A5 JP2009222475A5 JP2008065383A JP2008065383A JP2009222475A5 JP 2009222475 A5 JP2009222475 A5 JP 2009222475A5 JP 2008065383 A JP2008065383 A JP 2008065383A JP 2008065383 A JP2008065383 A JP 2008065383A JP 2009222475 A5 JP2009222475 A5 JP 2009222475A5
- Authority
- JP
- Japan
- Prior art keywords
- arm
- facing
- composite sensor
- sensor according
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 9
- 239000002131 composite material Substances 0.000 claims 6
- 230000001133 acceleration Effects 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008065383A JP2009222475A (ja) | 2008-03-14 | 2008-03-14 | 複合センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008065383A JP2009222475A (ja) | 2008-03-14 | 2008-03-14 | 複合センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009222475A JP2009222475A (ja) | 2009-10-01 |
JP2009222475A5 true JP2009222475A5 (zh) | 2011-03-31 |
Family
ID=41239429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008065383A Pending JP2009222475A (ja) | 2008-03-14 | 2008-03-14 | 複合センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2009222475A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5655501B2 (ja) * | 2010-01-05 | 2015-01-21 | セイコーエプソン株式会社 | 振動素子、振動子、および電子機器 |
JP5772286B2 (ja) | 2011-06-24 | 2015-09-02 | セイコーエプソン株式会社 | 屈曲振動片及び電子機器 |
JP2013024721A (ja) | 2011-07-21 | 2013-02-04 | Seiko Epson Corp | 振動ジャイロ素子、ジャイロセンサー及び電子機器 |
US9840409B2 (en) * | 2015-01-28 | 2017-12-12 | Invensense, Inc. | Translating Z axis accelerometer |
JP6780467B2 (ja) * | 2016-11-24 | 2020-11-04 | セイコーエプソン株式会社 | 物理量センサー、電子機器及び移動体 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2869514B2 (ja) * | 1993-10-29 | 1999-03-10 | 日本航空電子工業株式会社 | 1軸角速度/加速度センサ |
JP2002243450A (ja) * | 2001-02-16 | 2002-08-28 | Victor Co Of Japan Ltd | 角速度センサ、加速度センサ及び角速度/加速度兼用センサ |
JP4774733B2 (ja) * | 2004-12-03 | 2011-09-14 | パナソニック株式会社 | 複合センサ |
JP2007256235A (ja) * | 2006-03-27 | 2007-10-04 | Matsushita Electric Ind Co Ltd | 慣性力センサ |
JP2007256234A (ja) * | 2006-03-27 | 2007-10-04 | Matsushita Electric Ind Co Ltd | 慣性力センサ |
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2008
- 2008-03-14 JP JP2008065383A patent/JP2009222475A/ja active Pending
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