JP2009208852A5 - - Google Patents

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Publication number
JP2009208852A5
JP2009208852A5 JP2008050418A JP2008050418A JP2009208852A5 JP 2009208852 A5 JP2009208852 A5 JP 2009208852A5 JP 2008050418 A JP2008050418 A JP 2008050418A JP 2008050418 A JP2008050418 A JP 2008050418A JP 2009208852 A5 JP2009208852 A5 JP 2009208852A5
Authority
JP
Japan
Prior art keywords
mounting table
rotating mechanism
paste
application
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008050418A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009208852A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008050418A priority Critical patent/JP2009208852A/ja
Priority claimed from JP2008050418A external-priority patent/JP2009208852A/ja
Publication of JP2009208852A publication Critical patent/JP2009208852A/ja
Publication of JP2009208852A5 publication Critical patent/JP2009208852A5/ja
Pending legal-status Critical Current

Links

JP2008050418A 2008-02-29 2008-02-29 ペースト塗布装置 Pending JP2009208852A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008050418A JP2009208852A (ja) 2008-02-29 2008-02-29 ペースト塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008050418A JP2009208852A (ja) 2008-02-29 2008-02-29 ペースト塗布装置

Publications (2)

Publication Number Publication Date
JP2009208852A JP2009208852A (ja) 2009-09-17
JP2009208852A5 true JP2009208852A5 (cg-RX-API-DMAC7.html) 2011-04-14

Family

ID=41182398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008050418A Pending JP2009208852A (ja) 2008-02-29 2008-02-29 ペースト塗布装置

Country Status (1)

Country Link
JP (1) JP2009208852A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5320551B2 (ja) * 2009-01-08 2013-10-23 株式会社日立ハイテクノロジーズ プロキシミティ露光装置、プロキシミティ露光装置の基板位置決め方法、及び表示用パネル基板の製造方法
JP2011164402A (ja) * 2010-02-10 2011-08-25 Shin-Etsu Chemical Co Ltd ペリクルの製造方法
JP5897263B2 (ja) * 2011-03-18 2016-03-30 株式会社日立製作所 ペースト塗布ヘッド，ペースト塗布装置及びペースト塗布方法
CN103547964B (zh) * 2012-05-21 2015-02-04 Wi-A株式会社 工作台旋转装置以及具备该装置的摩擦装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2700050B2 (ja) * 1994-10-04 1998-01-19 ヒーハイスト精工株式会社 縦横移動旋回テーブル機構
JP3122708B2 (ja) * 1994-12-26 2001-01-09 日立テクノエンジニアリング株式会社 ペースト塗布機
JPH09323056A (ja) * 1996-06-05 1997-12-16 Hitachi Techno Eng Co Ltd ペースト塗布機
JP3919320B2 (ja) * 1998-02-19 2007-05-23 株式会社日本マイクロニクス 検査ステージ
JPH11245128A (ja) * 1998-02-26 1999-09-14 Thk Co Ltd ２軸平行・１軸旋回運動案内機構およびこれを用いた２軸平行・１軸旋回テーブル装置
JP4485138B2 (ja) * 2003-03-31 2010-06-16 日本トムソン株式会社 ２軸直動・旋回案内ユニット及びそれを用いたテーブル装置
JP3604686B1 (ja) * 2003-06-03 2004-12-22 株式会社ファースト ４軸ＸＹθテーブルとその制御方法
JP2004160640A (ja) * 2003-07-28 2004-06-10 Thk Co Ltd 移動テーブル装置
JP2006237485A (ja) * 2005-02-28 2006-09-07 Yaskawa Electric Corp アライメント装置
JP2007310019A (ja) * 2006-05-16 2007-11-29 Nsk Ltd 位置決めテーブル装置

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