JP2009177211A - 半導体素子およびその製造方法 - Google Patents
半導体素子およびその製造方法 Download PDFInfo
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- JP2009177211A JP2009177211A JP2009114735A JP2009114735A JP2009177211A JP 2009177211 A JP2009177211 A JP 2009177211A JP 2009114735 A JP2009114735 A JP 2009114735A JP 2009114735 A JP2009114735 A JP 2009114735A JP 2009177211 A JP2009177211 A JP 2009177211A
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009114735A JP2009177211A (ja) | 2003-02-07 | 2009-05-11 | 半導体素子およびその製造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003031416 | 2003-02-07 | ||
JP2009114735A JP2009177211A (ja) | 2003-02-07 | 2009-05-11 | 半導体素子およびその製造方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007089897A Division JP2007180589A (ja) | 2003-02-07 | 2007-03-29 | 半導体素子およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
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JP2009177211A true JP2009177211A (ja) | 2009-08-06 |
Family
ID=39022888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009114735A Pending JP2009177211A (ja) | 2003-02-07 | 2009-05-11 | 半導体素子およびその製造方法 |
Country Status (2)
Country | Link |
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JP (1) | JP2009177211A (zh) |
CN (4) | CN100533794C (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021070276A1 (ja) * | 2019-10-09 | 2021-04-15 | ウシオオプトセミコンダクター株式会社 | 半導体発光装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11233893A (ja) * | 1998-02-18 | 1999-08-27 | Sharp Corp | 半導体発光素子及びその製造方法 |
JP2002009004A (ja) * | 1999-11-15 | 2002-01-11 | Matsushita Electric Ind Co Ltd | 窒化物半導体の製造方法、窒化物半導体素子の製造方法、窒化物半導体素子、半導体発光素子及びその製造方法 |
JP2002009338A (ja) * | 2000-06-21 | 2002-01-11 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
JP2002314198A (ja) * | 2001-04-13 | 2002-10-25 | Sony Corp | 半導体レーザ |
WO2003005515A1 (fr) * | 2001-07-02 | 2003-01-16 | Nichia Corporation | Dispositif laser a semiconducteur gan et systeme d'information sur disque optique utilisant ce dispositif laser |
JP2003229638A (ja) * | 2002-02-05 | 2003-08-15 | Sumitomo Electric Ind Ltd | 窒化物系化合物半導体発光素子 |
JP2003273470A (ja) * | 2002-01-10 | 2003-09-26 | Sharp Corp | Iii族窒化物半導体レーザ素子 |
JP2004006886A (ja) * | 1997-11-26 | 2004-01-08 | Nichia Chem Ind Ltd | 窒化物半導体の成長方法及び窒化物半導体素子 |
JP2004022785A (ja) * | 2002-06-17 | 2004-01-22 | Sony Corp | 窒化ガリウム系半導体素子の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5719605A (en) * | 1996-11-20 | 1998-02-17 | Lexmark International, Inc. | Large array heater chips for thermal ink jet printheads |
EP0871228A3 (en) * | 1997-04-09 | 2001-10-24 | Matsushita Electric Industrial Co., Ltd. | Semiconductor substrate, semiconductor device and method of manufacturing the same |
JP2002033512A (ja) * | 2000-07-13 | 2002-01-31 | Nichia Chem Ind Ltd | 窒化物半導体発光ダイオード |
-
2004
- 2004-02-06 CN CN 200710147743 patent/CN100533794C/zh not_active Expired - Fee Related
- 2004-02-06 CN CN 200710147742 patent/CN100511742C/zh not_active Expired - Fee Related
- 2004-02-06 CN CN 200810008830 patent/CN101222116B/zh not_active Expired - Fee Related
- 2004-02-06 CN CN 200910005133 patent/CN101521254B/zh not_active Expired - Fee Related
-
2009
- 2009-05-11 JP JP2009114735A patent/JP2009177211A/ja active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004006886A (ja) * | 1997-11-26 | 2004-01-08 | Nichia Chem Ind Ltd | 窒化物半導体の成長方法及び窒化物半導体素子 |
JPH11233893A (ja) * | 1998-02-18 | 1999-08-27 | Sharp Corp | 半導体発光素子及びその製造方法 |
JP2002009004A (ja) * | 1999-11-15 | 2002-01-11 | Matsushita Electric Ind Co Ltd | 窒化物半導体の製造方法、窒化物半導体素子の製造方法、窒化物半導体素子、半導体発光素子及びその製造方法 |
JP2002009338A (ja) * | 2000-06-21 | 2002-01-11 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
JP2002314198A (ja) * | 2001-04-13 | 2002-10-25 | Sony Corp | 半導体レーザ |
WO2003005515A1 (fr) * | 2001-07-02 | 2003-01-16 | Nichia Corporation | Dispositif laser a semiconducteur gan et systeme d'information sur disque optique utilisant ce dispositif laser |
JP2003273470A (ja) * | 2002-01-10 | 2003-09-26 | Sharp Corp | Iii族窒化物半導体レーザ素子 |
JP2003229638A (ja) * | 2002-02-05 | 2003-08-15 | Sumitomo Electric Ind Ltd | 窒化物系化合物半導体発光素子 |
JP2004022785A (ja) * | 2002-06-17 | 2004-01-22 | Sony Corp | 窒化ガリウム系半導体素子の製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021070276A1 (ja) * | 2019-10-09 | 2021-04-15 | ウシオオプトセミコンダクター株式会社 | 半導体発光装置 |
Also Published As
Publication number | Publication date |
---|---|
CN101114688A (zh) | 2008-01-30 |
CN100511742C (zh) | 2009-07-08 |
CN101521254B (zh) | 2011-06-01 |
CN100533794C (zh) | 2009-08-26 |
CN101521254A (zh) | 2009-09-02 |
CN101222116B (zh) | 2010-06-23 |
CN101114687A (zh) | 2008-01-30 |
CN101222116A (zh) | 2008-07-16 |
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