JP2009164385A - 裏面照射型撮像素子 - Google Patents

裏面照射型撮像素子 Download PDF

Info

Publication number
JP2009164385A
JP2009164385A JP2008001250A JP2008001250A JP2009164385A JP 2009164385 A JP2009164385 A JP 2009164385A JP 2008001250 A JP2008001250 A JP 2008001250A JP 2008001250 A JP2008001250 A JP 2008001250A JP 2009164385 A JP2009164385 A JP 2009164385A
Authority
JP
Japan
Prior art keywords
photoelectric conversion
center
light
conversion element
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008001250A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009164385A5 (enrdf_load_stackoverflow
Inventor
Masamitsu Hashimoto
正光 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP2008001250A priority Critical patent/JP2009164385A/ja
Publication of JP2009164385A publication Critical patent/JP2009164385A/ja
Publication of JP2009164385A5 publication Critical patent/JP2009164385A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
JP2008001250A 2008-01-08 2008-01-08 裏面照射型撮像素子 Pending JP2009164385A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008001250A JP2009164385A (ja) 2008-01-08 2008-01-08 裏面照射型撮像素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008001250A JP2009164385A (ja) 2008-01-08 2008-01-08 裏面照射型撮像素子

Publications (2)

Publication Number Publication Date
JP2009164385A true JP2009164385A (ja) 2009-07-23
JP2009164385A5 JP2009164385A5 (enrdf_load_stackoverflow) 2010-08-05

Family

ID=40966653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008001250A Pending JP2009164385A (ja) 2008-01-08 2008-01-08 裏面照射型撮像素子

Country Status (1)

Country Link
JP (1) JP2009164385A (enrdf_load_stackoverflow)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6444098A (en) * 1987-08-12 1989-02-16 Fujikura Ltd Superconducting electromagnetic shielding material
JP2010199668A (ja) * 2009-02-23 2010-09-09 Sony Corp 固体撮像装置および電子機器
US7989908B2 (en) * 2006-12-27 2011-08-02 Dongbu Hitek Co., Ltd. Image sensor and method for manufacturing the same
JP2012169530A (ja) * 2011-02-16 2012-09-06 Sony Corp 固体撮像装置、および、その製造方法、電子機器
US8928795B2 (en) 2010-02-25 2015-01-06 Nikon Corporation Backside illumination image sensor and image-capturing device
JP2016048801A (ja) * 2015-12-02 2016-04-07 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
JP2016096359A (ja) * 2016-02-10 2016-05-26 キヤノン株式会社 固体撮像装置
JP2017055127A (ja) * 2016-10-28 2017-03-16 ソニー株式会社 固体撮像装置、および電子機器
US9601539B2 (en) 2010-03-31 2017-03-21 Sony Corporation Solid-state imaging device, method of manufacturing the same, and electronic equipment
JP2017143517A (ja) * 2017-02-09 2017-08-17 株式会社ニコン 撮像素子および撮像装置
US9893106B2 (en) 2013-05-24 2018-02-13 Sony Corporation Solid-state imaging device and electronic apparatus
JP2018129525A (ja) * 2018-03-28 2018-08-16 ソニー株式会社 固体撮像装置、および電子機器
WO2019038999A1 (ja) * 2017-08-24 2019-02-28 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置およびその製造方法
WO2021215303A1 (ja) * 2020-04-20 2021-10-28 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子および電子機器
WO2023149154A1 (ja) * 2022-02-03 2023-08-10 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子、電子機器

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170959A (ja) * 1987-01-08 1988-07-14 Matsushita Electronics Corp カラ−固体撮像装置
JP2003018476A (ja) * 2001-07-02 2003-01-17 Dainippon Printing Co Ltd 撮像装置
JP2003338615A (ja) * 2002-05-20 2003-11-28 Sony Corp 固体撮像装置
JP2004235621A (ja) * 2003-01-06 2004-08-19 Koji Eto 裏面照射型撮像素子
JP2005347708A (ja) * 2004-06-07 2005-12-15 Sony Corp 固体撮像素子及びその製造方法
JP2006019588A (ja) * 2004-07-02 2006-01-19 Sony Corp 固体撮像装置及びその製造方法
JP2006032497A (ja) * 2004-07-13 2006-02-02 Sony Corp 固体撮像素子と固体撮像装置、固体撮像素子の製造方法
JP2006080457A (ja) * 2004-09-13 2006-03-23 Sony Corp 固体撮像素子及びその製造方法
JP2006191023A (ja) * 2004-12-30 2006-07-20 Dongbuanam Semiconductor Inc Ｃｍｏｓイメージセンサおよびその製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170959A (ja) * 1987-01-08 1988-07-14 Matsushita Electronics Corp カラ−固体撮像装置
JP2003018476A (ja) * 2001-07-02 2003-01-17 Dainippon Printing Co Ltd 撮像装置
JP2003338615A (ja) * 2002-05-20 2003-11-28 Sony Corp 固体撮像装置
JP2004235621A (ja) * 2003-01-06 2004-08-19 Koji Eto 裏面照射型撮像素子
JP2005347708A (ja) * 2004-06-07 2005-12-15 Sony Corp 固体撮像素子及びその製造方法
JP2006019588A (ja) * 2004-07-02 2006-01-19 Sony Corp 固体撮像装置及びその製造方法
JP2006032497A (ja) * 2004-07-13 2006-02-02 Sony Corp 固体撮像素子と固体撮像装置、固体撮像素子の製造方法
JP2006080457A (ja) * 2004-09-13 2006-03-23 Sony Corp 固体撮像素子及びその製造方法
JP2006191023A (ja) * 2004-12-30 2006-07-20 Dongbuanam Semiconductor Inc Ｃｍｏｓイメージセンサおよびその製造方法

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6444098A (en) * 1987-08-12 1989-02-16 Fujikura Ltd Superconducting electromagnetic shielding material
US7989908B2 (en) * 2006-12-27 2011-08-02 Dongbu Hitek Co., Ltd. Image sensor and method for manufacturing the same
JP2010199668A (ja) * 2009-02-23 2010-09-09 Sony Corp 固体撮像装置および電子機器
USRE46729E1 (en) 2009-02-23 2018-02-20 Sony Corporation Solid-state imaging device and electronic apparatus having a light blocking part
US8493452B2 (en) 2009-02-23 2013-07-23 Sony Corporation Solid-state imaging device and electronic apparatus having a light blocking part
USRE46769E1 (en) 2009-02-23 2018-03-27 Sony Corporation Solid-state imaging device and electronic apparatus having a light blocking part
US11979672B2 (en) 2010-02-25 2024-05-07 Nikon Corporation Backside illumination image sensor and image-capturing device
US9184197B2 (en) 2010-02-25 2015-11-10 Nikon Corporation Backside illumination image sensor and image-capturing device
US8928795B2 (en) 2010-02-25 2015-01-06 Nikon Corporation Backside illumination image sensor and image-capturing device
US9466633B2 (en) 2010-02-25 2016-10-11 Nikon Corporation Backside illumination image sensor and image-capturing device
US10777595B2 (en) 2010-02-25 2020-09-15 Nikon Corporation Backside illumination image sensor and image-capturing device
US9704902B2 (en) 2010-02-25 2017-07-11 Nikon Corporation Backside illumination image sensor and image-capturing device
US11601624B2 (en) 2010-02-25 2023-03-07 Nikon Corporation Backside illumination image sensor and image-capturing device
US10204949B2 (en) 2010-02-25 2019-02-12 Nikon Corporation Backside illumination image sensor and image-capturing device
US9601539B2 (en) 2010-03-31 2017-03-21 Sony Corporation Solid-state imaging device, method of manufacturing the same, and electronic equipment
US9666632B2 (en) 2010-03-31 2017-05-30 Sony Corporation Solid-state imaging device, method of manufacturing the same, and electronic equipment
JP2012169530A (ja) * 2011-02-16 2012-09-06 Sony Corp 固体撮像装置、および、その製造方法、電子機器
US11894406B2 (en) 2013-05-24 2024-02-06 Sony Group Corporation Solid-state imaging device and electronic apparatus
US11569286B2 (en) 2013-05-24 2023-01-31 Sony Corporation Solid-state imaging device and electronic apparatus
US9893106B2 (en) 2013-05-24 2018-02-13 Sony Corporation Solid-state imaging device and electronic apparatus
US10615207B2 (en) 2013-05-24 2020-04-07 Sony Corporation Solid-state imaging device and electronic apparatus
US10319769B2 (en) 2013-05-24 2019-06-11 Sony Corporation Solid-state imaging device and electronic apparatus
JP2016048801A (ja) * 2015-12-02 2016-04-07 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
JP2016096359A (ja) * 2016-02-10 2016-05-26 キヤノン株式会社 固体撮像装置
JP2017055127A (ja) * 2016-10-28 2017-03-16 ソニー株式会社 固体撮像装置、および電子機器
JP2017143517A (ja) * 2017-02-09 2017-08-17 株式会社ニコン 撮像素子および撮像装置
WO2019038999A1 (ja) * 2017-08-24 2019-02-28 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置およびその製造方法
JP2018129525A (ja) * 2018-03-28 2018-08-16 ソニー株式会社 固体撮像装置、および電子機器
WO2021215303A1 (ja) * 2020-04-20 2021-10-28 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子および電子機器
WO2023149154A1 (ja) * 2022-02-03 2023-08-10 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子、電子機器

Similar Documents

Publication Publication Date Title
JP2009164385A (ja) 裏面照射型撮像素子
KR101893325B1 (ko) 고체 촬상 장치와 그 제조 방법, 및 전자 기기
JP4826111B2 (ja) 固体撮像素子および固体撮像素子の製造方法および画像撮影装置
JP4507769B2 (ja) 固体撮像素子、カメラモジュール及び電子機器モジュール
KR102650235B1 (ko) 고체 촬상 소자 및 그 제조 방법 및 전자 기기
TWI532160B (zh) 固態影像感測裝置及固態影像感測裝置之製造方法
KR102586247B1 (ko) 고체 촬상 장치, 촬상 장치
CN101689557B (zh) 固态摄像装置
US8415602B2 (en) Solid-state imaging device and electronic apparatus having an element isolator in a semiconductor substrate
JP4950703B2 (ja) 固体撮像素子
JP4751865B2 (ja) 裏面照射型固体撮像素子及びその製造方法
TW201535695A (zh) 固態影像感測裝置
KR100791346B1 (ko) 이미지 센서 제조 방법 및 이에 따라 제조된 이미지 센서
WO2014002826A1 (ja) 固体撮像素子、固体撮像素子の製造方法、及び、電子機器
CN102651376A (zh) 固体摄像装置及其制造方法以及电子设备
JP2012033583A (ja) 固体撮像素子及びその製造方法、並びに撮像装置
JP2008227250A (ja) 複合型固体撮像素子
JP2010278472A (ja) 固体撮像装置の製造方法
JP5287923B2 (ja) 固体撮像素子および固体撮像素子の製造方法及び画像撮影装置
JP4404561B2 (ja) Ｍｏｓ型カラー固体撮像装置
JP2005347707A (ja) 固体撮像素子及びその製造方法
JP2011014773A (ja) 固体撮像装置およびその製造方法
JP5282797B2 (ja) 固体撮像素子および固体撮像素子の製造方法及び画像撮影装置
CN104170088B (zh) 固态成像设备和电子装置
JP2004186311A (ja) Ｍｏｓ型イメージセンサ及びデジタルカメラ

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100621

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100621

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20100621

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20100708

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100720

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100827

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20101012