JP2009145307A5 - - Google Patents

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Publication number
JP2009145307A5
JP2009145307A5 JP2007325953A JP2007325953A JP2009145307A5 JP 2009145307 A5 JP2009145307 A5 JP 2009145307A5 JP 2007325953 A JP2007325953 A JP 2007325953A JP 2007325953 A JP2007325953 A JP 2007325953A JP 2009145307 A5 JP2009145307 A5 JP 2009145307A5
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JP
Japan
Prior art keywords
polarized light
linearly polarized
vibration direction
light component
setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007325953A
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English (en)
Japanese (ja)
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JP5212779B2 (ja
JP2009145307A (ja
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Priority to JP2007325953A priority Critical patent/JP5212779B2/ja
Priority claimed from JP2007325953A external-priority patent/JP5212779B2/ja
Publication of JP2009145307A publication Critical patent/JP2009145307A/ja
Publication of JP2009145307A5 publication Critical patent/JP2009145307A5/ja
Application granted granted Critical
Publication of JP5212779B2 publication Critical patent/JP5212779B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007325953A 2007-12-18 2007-12-18 表面検査装置および表面検査方法 Active JP5212779B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007325953A JP5212779B2 (ja) 2007-12-18 2007-12-18 表面検査装置および表面検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007325953A JP5212779B2 (ja) 2007-12-18 2007-12-18 表面検査装置および表面検査方法

Publications (3)

Publication Number Publication Date
JP2009145307A JP2009145307A (ja) 2009-07-02
JP2009145307A5 true JP2009145307A5 (cg-RX-API-DMAC7.html) 2011-05-19
JP5212779B2 JP5212779B2 (ja) 2013-06-19

Family

ID=40916047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007325953A Active JP5212779B2 (ja) 2007-12-18 2007-12-18 表面検査装置および表面検査方法

Country Status (1)

Country Link
JP (1) JP5212779B2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011099822A (ja) * 2009-11-09 2011-05-19 Nikon Corp 表面検査方法および表面検査装置
JP2020088676A (ja) * 2018-11-28 2020-06-04 ソニーセミコンダクタソリューションズ株式会社 センサ及び制御方法
CN109856155A (zh) * 2019-01-18 2019-06-07 北京兆维电子(集团)有限责任公司 一种基于偏振光的液晶显示屏表面检测装置及方法
JP7824801B2 (ja) * 2022-03-25 2026-03-05 東レエンジニアリング株式会社 欠陥検査装置及び欠陥検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4853758B2 (ja) * 2004-06-16 2012-01-11 株式会社ニコン 表面検査装置および表面検査方法
JP4802481B2 (ja) * 2004-11-09 2011-10-26 株式会社ニコン 表面検査装置および表面検査方法および露光システム

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