JP2009136754A - Cleaning tank/device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multi-stage cleaning tank which is of a simple construction and can upgrade the cleanness of an object to be cleaned. <P>SOLUTION: This cleaning tank 3 comprises a finish-cleaning tank 17 which receives the supply of a cleaning fluid for cleaning the object to be cleaned 2 and finish-cleans the object 2, a rough-cleaning tank 18 which receives the inflow of the cleaning fluid overflowing the finish-cleaning tank 17 and rough-cleans the object 2, and an overflow tank 19 into which the cleaning fluid overflowing the rough-cleaning tank 18, flows. The finish-cleaning tank 17 is of an almost rectangular box-type and constructed in the way that the cleaning fluid overflows in the entire circumferential direction. In addition, the rough-cleaning tank 18 is of an almost rectangular box-type and constructed in the way that the cleaning fluid overflows in one direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a cleaning tank for cleaning various objects to be cleaned and a cleaning apparatus including the cleaning tank.

  Conventionally, in a manufacturing process of various parts (workpieces) such as electronic parts and metal parts, a work cleaning process is performed using a cleaning tank. As this type of cleaning tank, a multi-stage cleaning tank having a first cleaning tank and a second cleaning tank for cleaning a workpiece is known (see, for example, Patent Document 1).

  In the cleaning tank described in Patent Document 1, cleaning water is supplied from the water supply pipe to the first cleaning tank, and the cleaning water overflowing from the first cleaning tank flows into the second cleaning tank. Moreover, the washing water overflowing from the second washing tank flows into another tank. Moreover, the 1st washing tank of patent document 1 is formed in the substantially cubic box shape, and the washing water which overflowed from the partition plate which comprises one side of the 1st washing tank is 2nd. Flow into the washing tank. Similarly, the 2nd washing tank of patent documents 1 is also formed in the shape of a substantially cubic box, and the washing water which overflowed from the partition plate which constitutes one side of the 2nd washing tank is another. Flow into the tank.

JP 2001-54766 A

  In the multistage cleaning tank described in Patent Document 1, generally, the workpiece is finish-cleaned in the first cleaning tank to which cleaning water is supplied. However, in this cleaning tank, the cleaning water overflowing from the partition plate constituting one side of the first cleaning tank flows into the second cleaning tank. For this reason, dust or the like after cleaning the workpiece is difficult to collect on one side of the first cleaning tank, but dust or the like is present on the other side (particularly the corner) of the first cleaning tank facing the partition plate. It becomes easy to accumulate. Therefore, in the cleaning tank described in Patent Document 1, it is difficult to clean a workpiece that requires a high degree of cleaning.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a multistage cleaning tank capable of improving the degree of cleaning of an object to be cleaned and a cleaning apparatus including the cleaning tank with a simple configuration.

  In order to solve the above-described problems, the cleaning tank of the present invention is supplied with a cleaning liquid for cleaning the object to be cleaned and overflows from the finishing cleaning tank for performing the final cleaning of the object to be cleaned, and the finishing cleaning tank. The cleaning liquid flows in and the rough cleaning tank for rough cleaning of the object to be cleaned and the overflow tank in which the cleaning liquid overflowing from the rough cleaning tank flows are formed. The rough cleaning tank is configured to overflow in the circumferential direction, and the rough cleaning tank is formed in a substantially rectangular parallelepiped or substantially cubic box shape, and is configured to overflow the cleaning liquid in one direction.

  In the cleaning tank of the present invention, the finishing cleaning tank for performing the finishing cleaning is configured such that the cleaning liquid overflows in the entire circumferential direction. Therefore, it becomes difficult for the finishing washing tank to collect dust after washing the object to be washed. As a result, in the present invention, it becomes possible to improve the degree of cleaning of the object to be cleaned. In the cleaning tank of the present invention, the rough cleaning tank that does not require a high degree of cleaning is configured so that the cleaning liquid overflows in one direction. Therefore, in the present invention, the configuration of the cleaning tank can be simplified, and the cleaning tank can be downsized. Thus, in the cleaning tank of the present invention, it is possible to improve the degree of cleaning of an object to be cleaned with a simple configuration.

  In the present invention, it is preferable that a finishing cleaning tank is disposed inside the rough cleaning tank. If comprised in this way, it will become easy to miniaturize a washing tank.

  In the present invention, the cleaning tank is formed in a substantially rectangular parallelepiped or substantially cubic box shape, and further includes an intermediate cleaning tank in which the cleaning liquid overflowing from the finishing cleaning tank flows and the cleaning liquid overflows toward the rough cleaning tank. preferable. If comprised in this way, it will become possible to further improve the washing | cleaning degree of a to-be-cleaned object using an intermediate | middle washing tank.

  In the present invention, it is preferable that an intermediate cleaning tank is disposed inside the rough cleaning tank, and a finishing cleaning tank is disposed inside the intermediate cleaning tank. If comprised in this way, in order to improve the washing | cleaning degree of a to-be-washed | cleaned object, even if it is a case where an intermediate washing tank is used, it becomes possible to miniaturize a washing tank. Further, since the intermediate cleaning tank can be configured so that the cleaning liquid overflows in multiple directions, the dust after the object to be cleaned is not easily collected in the intermediate cleaning tank.

  Further, in order to solve the above-described problems, the cleaning tank of the present invention is supplied with a cleaning liquid for cleaning an object to be cleaned and a finish cleaning tank for performing a final cleaning of the object to be cleaned, and a finish cleaning tank. It has a rough cleaning tank for washing the overflowing cleaning liquid and performing rough cleaning of the object to be cleaned, and an overflow tank for flowing the cleaning liquid overflowing from the rough cleaning tank, so that the cleaning liquid overflows in all directions. The rough cleaning tank is configured so that the cleaning liquid overflows only in a predetermined direction.

  In the cleaning tank of the present invention, the finishing cleaning tank for performing the finishing cleaning is configured such that the cleaning liquid overflows in the entire circumferential direction. Therefore, the dust after the object to be cleaned is less likely to collect in the finishing cleaning tank. As a result, in the present invention, the degree of cleaning of the object to be cleaned can be improved. In the present invention, the rough cleaning tank that does not require a high degree of cleaning is configured such that the cleaning liquid overflows only in a predetermined direction. Therefore, in the present invention, the configuration of the cleaning tank can be simplified, and the cleaning tank can be downsized.

  The cleaning tank of the present invention can be used in a cleaning apparatus that cleans an object to be cleaned after being cleaned in a rough cleaning tank in a finishing cleaning tank. In this cleaning apparatus, it is possible to improve the degree of cleaning of an object to be cleaned with a simple configuration.

  In the present invention, the cleaning device preferably includes a circulation path for supplying the cleaning liquid discharged from the overflow tank to the finishing cleaning tank. If comprised in this way, a washing | cleaning liquid can be reused and the washing | cleaning cost of a to-be-cleaned object can be reduced.

  As described above, the cleaning tank and the cleaning apparatus according to the present invention can improve the degree of cleaning of an object to be cleaned with a simple configuration.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Schematic configuration of the cleaning device)
FIG. 1 is a schematic diagram for explaining a schematic configuration of a cleaning apparatus 1 according to an embodiment of the present invention.

  The cleaning apparatus 1 of this embodiment is an apparatus for cleaning various kinds of objects to be cleaned 2 (hereinafter referred to as workpieces 2) such as electronic parts, metal parts, printed wiring boards, and glass substrates. For example, the cleaning device 1 is a device for cleaning a lens driving mechanism of a camera that becomes the workpiece 2.

  As shown in FIG. 1, the cleaning device 1 includes a main body 4 having a cleaning tank 3 on the lower end side for immersing the workpiece 2 in the cleaning liquid, and steam for supplying the cleaning liquid vapor to the inside of the main body 4. The generation tank 5, the cooler 6 attached to the upper end side of the cleaning tank 3 for cooling and liquefying the vapor of the cleaning liquid, and the water separation for recovering the cleaning liquid liquefied by the cooler 6 and separating it from the water A tank 7 and a circulation path 9 for circulating and reusing the cleaning liquid discharged from the cleaning tank 3 are provided.

  The cleaning liquid used in the cleaning apparatus 1 is a volatile organic solvent such as a fluorine-based solvent such as HFC (hydrofluorocarbon), HFE (hydrofluoroether), or HCFC (hydrochlorofluorocarbon), dichloromethane, trichloroethylene, or the like. Or a bromine solvent such as 1-bromopropane. In the cleaning apparatus 1 of this embodiment, HFE is used as the cleaning liquid.

  The main body 4 is formed in a substantially rectangular parallelepiped hollow box shape, and includes the cleaning tank 3 on the lower end side as described above. On the upper surface of the main body portion 4, an opening 15 for carrying the workpiece 2 into the main body portion 4 and carrying out the workpiece 2 from the main body portion 4 is formed. Further, a steam cleaning space 16 for steam cleaning the workpiece 2 using steam of the cleaning liquid generated in the steam generation tank 5 is provided at a substantially intermediate position of the main body 4 in the vertical direction (that is, above the cleaning tank 3). Is formed.

  The cleaning tank 3 includes a finish cleaning tank 17 for performing the final cleaning by immersing the work 2 in the cleaning liquid, a rough cleaning tank 18 for performing the rough cleaning by immersing the work 2 in the cleaning liquid, and the rough cleaning tank 18. And an overflow tank 19 into which the overflowing cleaning liquid flows. An ultrasonic vibrator 20 for cleaning the immersed work 2 using ultrasonic waves is disposed on the bottom surface side of the finish cleaning tank 17, and the immersed work 2 is disposed on the bottom surface side of the rough cleaning tank 18. An ultrasonic transducer 21 for cleaning using ultrasonic waves is disposed. Further, one end side of the circulation path 9 is connected to the bottom surface of the overflow tank 19, and the other end side of the circulation path 9 is connected to the bottom surface of the finish cleaning tank 17. The detailed configuration of the cleaning tank 3 will be described later.

  A heater 22 for warming and evaporating the cleaning liquid is disposed inside the steam generation tank 5. Further, one end side of the pipe 23 is connected to the upper end side of the steam generation tank 5. The other end side of the pipe 23 is connected to the steam cleaning space 16. That is, the upper end side of the steam generation tank 5 is connected to the steam cleaning space 16 via the pipe 23, and the cleaning liquid vaporized by the heater 22 is supplied to the steam cleaning space 16. In this embodiment, the cleaning liquid flows from the rough cleaning tank 18 into the steam generation tank 5, and the steam generation tank 5 is replenished with the cleaning liquid.

  The cooler 6 is a Peltier element, for example, and is disposed so as to surround the periphery on the upper end side of the main body 4 (specifically, the periphery of the upper end of the steam cleaning space 16). The cooler 6 cools the inner wall of the main body 4 on the upper end side of the steam cleaning space 16. Therefore, the steam of the cleaning liquid in the steam cleaning space 16 is cooled and liquefied by the cooler 6 and is attached to the inner wall on the upper end side of the steam cleaning space 16. In the cleaning apparatus 1 of the present embodiment, the liquid cleaning liquid attached to the inner wall on the upper end side of the steam cleaning space 16 flows into the water separation tank 7 thereafter.

  Further, since the cooler 6 cools the inner wall on the upper end side of the steam cleaning space 16, the steam density decreases as the steam cleaning space 16 moves upward. Therefore, as will be described later, when the workpiece 2 after the steam cleaning is performed rises to the inner peripheral side of the cooler 6, the workpiece 2 enters a region having a low vapor density, and as a result, the workpiece 2 is dried. That is, the cooler 6 has a function of drying the workpiece 2 in addition to a function of cooling and liquefying the vapor of the cleaning liquid.

  In addition, since the cooler 6 also cools the air near the upper end, moisture contained in the air also condenses on the inner wall when the inner wall falls below the saturated water vapor pressure temperature. The water droplets which have condensed and adhered to the inner wall flow down along the inner wall and flow into the water separation tank 7 in the same manner as the cleaning liquid.

  The water separation tank 7 separates water and the cleaning liquid by utilizing the difference between the specific gravity of water and the specific gravity of the cleaning liquid. In the water separation tank 7, the cleaning liquid liquefied by the cooler 6 flows from the upper surface side, and the cleaning liquid separated from the water is discharged from the bottom surface. The cleaning liquid discharged from the water separation tank 7 flows into the overflow tank 19.

  As shown in FIG. 1, the circulation path 9 has a pump 30 for sending the cleaning liquid discharged from the cleaning tank 3 (specifically, the overflow tank 19) toward the finishing cleaning tank 17, and toward the finishing cleaning tank 17. And a filter 31 that removes impurities such as dust contained in the cleaning liquid by filtering the cleaning liquid sent. The circulation path 9 includes a pipe 33 connected to the overflow tank 19 and a pipe 34 connected to the finish cleaning tank 17.

  One end side of the pipe 33 is connected to the bottom surface of the overflow tank 19 via a socket (not shown), and one end side of the pipe 34 is connected to the other end side of the pipe 33. The other end side of the pipe 34 is connected to the bottom surface of the finishing cleaning tank 17 via a socket (not shown). The pump 30 is disposed in the middle of the pipe 33, and the filter 31 is disposed in the middle of the pipe 34.

  The work 2 moves in the main body 4 while being held by a work holding jig (not shown) installed in the main body 4. That is, the workpiece holding jig is connected to a moving mechanism (not shown) installed in the main body 4 and moves in the main body 4 at least in the vertical direction and in the horizontal direction in FIG.

  In the cleaning apparatus 1 configured as described above, first, the workpiece 2 is immersed in the rough cleaning tank 18 to perform rough cleaning of the workpiece 2. Specifically, the ultrasonic vibrator 21 is driven to perform ultrasonic cleaning of the workpiece 2. Thereafter, the workpiece 2 is immersed in the finish cleaning tank 17 to perform finish cleaning of the workpiece 2. Specifically, the ultrasonic vibrator 20 is driven to perform ultrasonic cleaning of the workpiece 2. Thereafter, the workpiece 2 is subjected to steam cleaning in the steam cleaning space 16. Thereafter, the work 2 is moved to the inner peripheral side of the cooler 6 to dry the work 2.

(Structure of washing tank)
FIG. 2 is a plan view of the cleaning tank 3 shown in FIG.

  As described above, the cleaning tank 3 of the present embodiment includes the finish cleaning tank 17 used for finish cleaning, the rough cleaning tank 18 used for rough cleaning, and the overflow tank 19.

  As shown in FIGS. 1 and 2, the finish cleaning tank 17 is formed in a substantially rectangular parallelepiped box shape whose upper surface is open. In this embodiment, the finish cleaning tank 17 is formed by four side plates 51 which are welded and fixed to the bottom surface of the main body 4 in a state where the ends are in contact with each other. Moreover, the edge parts of the side plate 51 which contact | abut is mutually welded and fixed. The height of the side plate 51 is lower than the height of the four side plates 52 constituting the side surface of the main body 4. Note that both sides of the lower end portion of the side plate 51 (both inside and outside of the finish cleaning tank 17) may be welded to the bottom surface of the main body portion 4, or only one side of the lower end portion of the side plate 51 is the bottom surface of the main body portion 4. It may be welded to.

  As shown in FIGS. 1 and 2, the rough cleaning tank 18 is formed in a substantially rectangular parallelepiped box shape whose upper surface is open. In this embodiment, the three side plates 52 of the four side plates 52 and the two side plates 52 arranged opposite to each other in the vertical direction in FIG. The rough cleaning tank 18 is formed by one side plate 53 which is fixed by welding. Specifically, the rough cleaning tank 18 is formed by the two side plates 52 arranged in the vertical direction in FIG. 2, the one side plate 52 arranged in the right direction in FIG. 2, and the side plate 53. Further, the end portion of the side plate 53 is fixed to the side plate 52 by welding. The height of the side plate 53 is lower than the height of the side plate 51. Note that both sides of the lower end portion of the side plate 53 (both sides inside and outside the rough cleaning tank 18) may be welded to the bottom surface of the main body portion 4, or only one side of the lower end portion of the side plate 53 is the bottom surface of the main body portion 4. It may be welded to.

  As shown in FIGS. 1 and 2, the overflow tank 19 is formed in an elongated, substantially rectangular parallelepiped box shape whose upper surface is open. In this embodiment, the overflow tank 19 is formed by the two side plates 52 arranged in the vertical direction in FIG. 2, the one side plate 52 arranged in the left direction in FIG. 2, and the side plate 53. That is, the overflow tank 19 is disposed adjacent to the rough cleaning tank 18.

  As described above, a part of the other end side of the circulation path 9 is connected to the bottom surface of the finish cleaning tank 17, and the cleaning liquid discharged from the overflow tank 19 and passing through the filter 31 is supplied to the finish cleaning tank 17. . Therefore, when cleaning the workpiece 2, the finish cleaning tank 17 is filled with the cleaning liquid. When the cleaning liquid is further supplied to the finishing cleaning tank 17 filled with the cleaning liquid, the cleaning liquid overflows from the finishing cleaning tank 17.

  In this embodiment, as shown in FIG. 2, the finish cleaning tank 17 is disposed inside the rough cleaning tank 18. That is, the rough cleaning tank 18 is disposed so as to surround the finish cleaning tank 17. Therefore, the cleaning liquid overflowing from the finishing cleaning tank 17 flows into the rough cleaning tank 18. Specifically, the cleaning liquid in the finishing cleaning tank 17 overflows from the four side plates 51 in the entire circumferential direction of the finishing cleaning tank 17 and flows into the rough cleaning tank 18.

  Since the cleaning liquid overflowing from the finish cleaning tank 17 flows into the rough cleaning tank 18, the rough cleaning tank 18 is filled with the cleaning liquid when the workpiece 2 is cleaned. When the cleaning liquid further flows into the rough cleaning tank 18 filled with the cleaning liquid, the cleaning liquid overflows from the rough cleaning tank 18. As described above, the height of the side plate 53 is lower than the height of the side plate 51. Therefore, the cleaning liquid overflowing from the rough cleaning tank 18 flows into the overflow tank 19. Specifically, since the left side surface of the rough cleaning tank 18 and the right side surface of the overflow tank 19 in FIG. 2 are configured by a common side plate 53, the cleaning liquid overflowing from the rough cleaning tank 18 is viewed from above the side plate 53. 2 overflows in the left direction and flows into the overflow tank 19. That is, in this embodiment, the cleaning liquid overflows from the rough cleaning tank 18 in one direction.

  Further, the cleaning liquid flowing into the overflow tank 19 is then supplied to the finishing cleaning tank 17 via the circulation path 9 as described above.

(Main effects of this form)
As described above, in this embodiment, the finish cleaning tank 17 that performs finish cleaning is configured such that the cleaning liquid overflows in the entire circumferential direction. Therefore, the dust after cleaning the workpiece 2 is less likely to accumulate in the finish cleaning tank 17. As a result, in this embodiment, it is possible to improve the degree of cleaning of the workpiece 2.

  In this embodiment, the rough cleaning tank 18 that performs rough cleaning that does not require a high degree of cleaning is configured such that the cleaning liquid overflows in one direction. Therefore, the configuration of the cleaning tank 3 can be simplified, and the cleaning tank 3 can be downsized. In particular, in this embodiment, since the finish cleaning tank 17 is disposed inside the rough cleaning tank 18, the cleaning tank 3 can be downsized in the left-right direction of FIG.

  In this embodiment, the cleaning device 1 includes a circulation path 9 that supplies the cleaning liquid discharged from the overflow tank 19 to the finishing cleaning tank 17. Therefore, the cleaning liquid from which impurities are removed by the filter 31 can be reused, and the cleaning cost of the workpiece 2 can be reduced.

(Modification 1 of the washing tank)
FIG. 3: is a figure which shows the modification of the washing tank 3 concerning embodiment of this invention, (A) is a top view, (B) is sectional drawing which shows the outline of the EE cross section of (A). is there.

  As shown in FIG. 3, the cleaning tank 3 according to the modified example 1 is an intermediate that performs intermediate cleaning of the workpiece 2 between the rough cleaning and the finishing cleaning in addition to the finishing cleaning tank 17, the rough cleaning tank 18, and the overflow tank 19. A cleaning tank 60 is provided. Hereinafter, the configuration of the cleaning tank 3 shown in FIG. 3 will be briefly described. In FIG. 3, the same components as those described above are denoted by the same reference numerals.

  The intermediate cleaning tank 60 is configured in substantially the same manner as the finishing cleaning tank 17 described above. That is, the intermediate cleaning tank 60 is formed in a substantially rectangular parallelepiped box shape whose upper surface is opened by four side plates 71 which are welded and fixed to the bottom surface of the main body portion 4 in a state where the end portions are in contact with each other. Yes. Moreover, the edge parts of the side plate 71 which contact | abuts are mutually welded and fixed. The height of the side plate 71 is lower than the height of the side plate 51 and higher than the height of the side plate 53.

  In the cleaning tank 3 shown in FIG. 3, the intermediate cleaning tank 60 is disposed so as to surround the finish cleaning tank 17. That is, the finish cleaning tank 17 is disposed inside the intermediate cleaning tank 60. Therefore, the cleaning liquid overflowing from the finishing cleaning tank 17 flows into the intermediate cleaning tank 60. Specifically, the cleaning liquid in the finishing cleaning tank 17 overflows from the four side plates 51 in the entire circumferential direction of the finishing cleaning tank 17 and flows into the intermediate cleaning tank 60.

  Further, since the intermediate cleaning tank 60 is filled with the cleaning liquid when the workpiece 2 is cleaned, the cleaning liquid overflows from the intermediate cleaning tank 60 when the cleaning liquid flows into the intermediate cleaning tank 60. Here, in the cleaning tank 3 shown in FIG. 3, the intermediate cleaning tank 60 is disposed inside the rough cleaning tank 18, and the height of the side plate 71 is lower than the height of the side plate 51. Therefore, the cleaning liquid overflowing from the intermediate cleaning tank 60 flows into the rough cleaning tank 18. Specifically, the cleaning liquid in the intermediate cleaning tank 60 overflows from the four side plates 71 in the entire circumferential direction of the intermediate cleaning tank 60 and flows into the rough cleaning tank 18.

  Note that the cleaning liquid overflows in one direction from the rough cleaning tank 18 and flows into the overflow tank 19 in the same manner as described above.

  In the washing tank 3 shown in FIG. That is, in the cleaning tank 3 shown in FIG. 3, rough cleaning in the rough cleaning tank 18, intermediate cleaning in the intermediate cleaning tank 60, and finish cleaning in the finish cleaning tank 17 are performed. It can be raised further.

  In addition, the cleaning tank 3 shown in FIG. 3 has a structure in which the intermediate cleaning tank 60 is disposed inside the rough cleaning tank 18, so that the cleaning tank 3 can be downsized in the left-right direction of FIG. Become. Moreover, since the intermediate cleaning tank 60 is configured so that the cleaning liquid overflows in the entire circumferential direction, like the finishing cleaning tank 17, dust is less likely to accumulate in the intermediate cleaning tank 60.

(Modification 2 of the washing tank)
FIG. 4: is a figure which shows the other modification of the washing tank 3 concerning embodiment of this invention, (A) is a top view, (B) is a cross section which shows the outline of the FF cross section of (A). FIG.

  In the cleaning tank 3 shown in FIG. 3, an intermediate cleaning tank 60 is disposed so as to surround the finish cleaning tank 17. In addition, for example, as in the cleaning tank 3 shown in FIG. 4, the intermediate cleaning tank 80 may be disposed adjacent to the finishing cleaning tank 17. Hereinafter, the configuration of the cleaning tank 3 shown in FIG. 4 will be briefly described. In FIG. 4, the same components as those described above are denoted by the same reference numerals. In the following, the configuration of the cleaning tank 3 will be described with the vertical direction in FIG. 4A as the “front-rear direction” and the horizontal direction in FIG. 4A as the “left-right direction”.

  In the cleaning tank 3 shown in FIG. 4, the intermediate cleaning tank 80 is formed in a substantially rectangular parallelepiped box shape whose upper surface is open. Specifically, it opposes in the front-rear direction with one side plate 81 welded and fixed to the bottom surface of the main body 4 with the front-rear ends in contact with the two side plates 52 arranged to face each other in the front-rear direction. Two side plates 82 that are arranged and welded and fixed to the bottom surface of the main body 4 with the right end in contact with the side plate 81, and the front and rear ends in contact with the left ends of the two side plates 82 The intermediate cleaning tank 80 is formed by a single side plate 83 that is welded and fixed to the bottom surface of the main body 4. That is, the intermediate cleaning tank 80 is surrounded by the rough cleaning tank 18 from three directions. The front and rear ends of the side plate 81 are welded to the side plate 52, the right end of the side plate 82 is welded to the side plate 81, and the front and rear ends of the side plate 83 are welded to the left end of the side plate 82.

  As shown in FIG. 4B, the height of the side plate 81 is lower than the height of the side plate 51. The height of the side plate 83 is lower than the height of the side plate 81 and higher than the height of the side plate 53. The height of the side plate 82 is substantially the same as the height of the side plate 83. Note that the height of the side plate 82 may be higher or lower than the height of the side plate 83.

  In the cleaning tank 3 shown in FIG. 4, the side plate 81 is arranged on the left side of the finish cleaning tank 17. In the cleaning tank 3, the finish plate 17 is used to surround the finish cleaning tank 17. An overflow tank 89 is formed. Therefore, the cleaning liquid overflowing from the finish cleaning tank 17 flows into the overflow tank 89. Specifically, the cleaning liquid in the finishing cleaning tank 17 overflows from the four side plates 51 in the entire circumferential direction of the finishing cleaning tank 17 and flows into the overflow tank 89.

  Moreover, since the overflow tank 89 is filled with the cleaning liquid when the workpiece 2 is cleaned, the cleaning liquid overflows from the overflow tank 89 when the cleaning liquid flows into the overflow tank 89. Specifically, the cleaning liquid in the overflow tank 89 overflows leftward from above the side plate 81 and flows into the intermediate cleaning tank 80 and the rough cleaning tank 18.

  Furthermore, since the intermediate cleaning tank 80 is filled with the cleaning liquid when the workpiece 2 is cleaned, the cleaning liquid overflows from the intermediate cleaning tank 80 when the cleaning liquid flows into the intermediate cleaning tank 80. Specifically, the cleaning liquid in the intermediate cleaning tank 80 overflows from above the side plates 82 and 83 in the front-rear direction and the left direction (that is, three directions) and flows into the rough cleaning tank 18. Note that the cleaning liquid overflows in one direction from the rough cleaning tank 18 and flows into the overflow tank 19 in the same manner as described above.

  The cleaning tank 3 shown in FIG. 4 can also obtain the same effects as those described above. Further, in the cleaning tank 3 shown in FIG. 4, the intermediate cleaning tank 80 is disposed adjacent to the finishing cleaning tank 17. Therefore, even when the intermediate cleaning tank 80 is used to improve the degree of cleaning of the workpiece 2, the cleaning tank 3 can be downsized in the front-rear direction. Furthermore, since the intermediate cleaning tank 80 is configured so that the cleaning liquid overflows in three directions, dust does not easily accumulate in the intermediate cleaning tank 80.

(Other embodiments)
The above-described embodiments and modifications are examples of preferred embodiments of the present invention, but are not limited thereto, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment and the modification described above, the finish cleaning tank 17, the rough cleaning tank 18, and the intermediate cleaning tanks 60 and 80 are formed in a substantially rectangular parallelepiped box shape. In addition, for example, the finish cleaning tank 17, the rough cleaning tank 18, and / or the intermediate cleaning tanks 60 and 80 may be formed in a substantially cubic box shape.

  Further, even when the finishing cleaning tank 17, the rough cleaning tank 18, and / or the intermediate cleaning tanks 60 and 80 are formed so that the shape when viewed from above is a circle, an ellipse, a triangle, or a polygon more than a pentagon. good. In this case, the finishing cleaning tank 17 is configured so that the cleaning liquid overflows in the entire circumferential direction, and the rough cleaning tank 18 may be configured so that the cleaning liquid overflows only in a predetermined direction. If comprised in this way, the effect similar to the form mentioned above can be acquired.

  In the embodiment described above, the cleaning tank 3 includes two cleaning tanks, a finishing cleaning tank 17 and a rough cleaning tank 18. In addition, the cleaning tank 3 according to the modification includes three cleaning tanks, that is, a finishing cleaning tank 17, a rough cleaning tank 18, and intermediate cleaning tanks 60 and 80. In addition, for example, the number of cleaning tanks provided in the cleaning tank 3 may be four or more. That is, the cleaning tank 3 may include two or more intermediate cleaning tanks such as a first intermediate cleaning tank and a second intermediate cleaning tank. Moreover, in the form and modification mentioned above, although the washing tank 3 is provided with the overflow tank 19, the washing tank 3 does not need to be provided with the overflow tank 19.

  In the embodiment described above, the embodiment of the present invention has been described by taking the cleaning apparatus 1 in which a fluorine-based solvent, a chlorine-based solvent or a bromine-based solvent is used as the cleaning liquid, but the configuration of the cleaning tank 3 of the present invention is described. Can be applied to a cleaning apparatus in which a hydrocarbon solvent, a pure water solvent or pure water is used as the cleaning liquid.

It is the schematic for demonstrating schematic structure of the washing | cleaning apparatus concerning embodiment of this invention. It is a top view of the washing tank shown in FIG. It is a figure which shows the modification of the washing tank concerning embodiment of this invention, (A) is a top view, (B) is sectional drawing which shows the outline of the EE cross section of (A). It is a figure which shows the other modification of the washing tank concerning embodiment of this invention, (A) is a top view, (B) is sectional drawing which shows the outline of the FF cross section of (A).

Explanation of symbols

1 Cleaning device 2 Workpiece (object to be cleaned)
3 Washing tank 9 Circulation route 17 Finish washing tank 18 Coarse washing tank 19 Overflow tank 60, 80 Intermediate washing tank

Claims (7)

A cleaning liquid for cleaning the object to be cleaned is supplied and a finishing cleaning tank for performing the final cleaning of the object to be cleaned, and the cleaning liquid overflowing from the finishing cleaning tank flows in and rough cleaning of the object to be cleaned is performed. A rough cleaning tank for performing, and an overflow tank into which the cleaning liquid overflowing from the rough cleaning tank flows,
The finishing cleaning tank is formed in a box shape, and is configured so that the cleaning liquid overflows in the entire circumferential direction.
The rough washing tank is formed in a substantially rectangular parallelepiped or substantially cubic box shape, and is configured so that the washing liquid overflows in one direction.   The cleaning tank according to claim 1, wherein the finishing cleaning tank is disposed inside the rough cleaning tank.   An intermediate cleaning tank is formed, which is formed in a substantially rectangular parallelepiped or substantially cubic box shape, and further includes an intermediate cleaning tank in which the cleaning liquid overflowing from the finish cleaning tank flows and the cleaning liquid overflows toward the rough cleaning tank. Item 3. A cleaning tank according to item 1 or 2.   The cleaning tank according to claim 3, wherein the intermediate cleaning tank is disposed inside the rough cleaning tank, and the finish cleaning tank is disposed inside the intermediate cleaning tank. A cleaning liquid for cleaning the object to be cleaned is supplied and a finishing cleaning tank for performing the final cleaning of the object to be cleaned, and the cleaning liquid overflowing from the finishing cleaning tank flows in and rough cleaning of the object to be cleaned is performed. A rough cleaning tank for performing, and an overflow tank into which the cleaning liquid overflowing from the rough cleaning tank flows,
The finishing cleaning tank is configured so that the cleaning liquid overflows in the entire circumferential direction, and the rough cleaning tank is configured so that the cleaning liquid overflows only in a predetermined direction. .   A cleaning apparatus comprising the cleaning tank according to claim 1, wherein the object to be cleaned after being cleaned in the rough cleaning tank is cleaned in the finishing cleaning tank.   The cleaning apparatus according to claim 6, further comprising a circulation path for supplying the cleaning liquid discharged from the overflow tank to the finishing cleaning tank.

Images