JP2007152231A - Cleaning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning device excellent in environmental safety, capable of reducing the amount of a cleaning solvent used and capable of efficiently cleaning by steam and drying a work. <P>SOLUTION: In the cleaning device having a cleaning vessel 12 cleaning the work by using the cleaning solvent and a vapor generating vessel 52 arranged separated from the cleaning vessel 12 and generating vapor of the cleaning solvent, the cleaning vessel 12 is provided at least with a liquid cleaning area 16 installed in the lower part and cleaning the work by the liquid of the cleaning solvent, with a vapor cleaning area 18 installed in the intermediate part and cleaning the work by vapor, and with a vapor cooling area 20 installed in the upper part and liquifying the cleaning solvent by cooling the vapor of the cleaning solvent. A first pipe 54 is installed between the cleaning vessel 12 and the vapor generating vessel 52 for supplying vapor generated in the vapor generating vessel 52 to the vapor cleaning area 18, and the first pipe 54 is installed lower at the installing position 56 of the vapor generating vessel 14 than at the installing position 22 of the vapor cleaning area 18. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a cleaning apparatus, and more particularly to a cleaning apparatus capable of cleaning electronic parts, precision parts, metal parts, printed wiring boards, glass substrates and other various objects to be cleaned (workpieces).

  2. Description of the Related Art Conventionally, cleaning apparatuses for cleaning electronic parts, precision parts, metal parts, printed wiring boards, glass substrates, and other various objects to be cleaned (hereinafter referred to as “workpieces”) have been proposed. FIG. 5 is a schematic view showing a conventional cleaning apparatus proposed in Patent Document 1. As shown in FIG. The cleaning apparatus shown in FIG. 5 includes a steam generation tank 108 that generates a vapor 100A of a cleaning solvent 104 (hereinafter referred to as a cleaning solvent in the present invention), and a cleaning solvent generated in the steam generation tank 108. A steam cleaning zone 106 that performs steam cleaning by bringing the steam 100A into contact with the object 102 to be cleaned, and a drying zone 110 that performs drying of the object 102 to be cleaned after cleaning with the cleaning solvent vapor 100A using the low-temperature condensation coil 111 Is a cleaning device. The cleaning apparatus is provided with a radiator 120 that heats the cleaning solvent vapor 100A generated in the steam generation tank 108 as a heating unit, and sends the cleaning solvent vapor 100A heated by the radiator 120 to the vapor cleaning zone 106. It is configured. Since the temperature of the object to be cleaned 102 to be cleaned by this cleaning apparatus does not drop much, the cleaning solvent does not condense on the surface of the object to be cleaned 102 again. It is said that stains hardly occur and the consumption of cleaning solvent can be reduced.

  On the other hand, FIG. 6 is a schematic diagram showing a conventional cleaning apparatus proposed in Patent Document 2. In FIG. The cleaning apparatus shown in FIG. 6 has a work inlet / outlet 205 formed in the upper part, a cleaning tank 206 for storing the solvent 200A formed in the lower part, and a cooling means 207 disposed in the middle part. A tank main body 201 having a processing area 208 formed between the surface of the solvent 200A in the cleaning tank 206 is provided. And it is supposed that the natural loss by generation | occurrence | production of a vapor | steam can be reduced by having provided the vapor | steam supply means 215 which supplies the solvent vapor | steam 200a to the process area 208 only at the time of the vapor | steam cleaning of the workpiece | work 210.

In the cleaning apparatus of the form shown in FIG. 5 and FIG. 6, the workpiece pulled up after being cleaned in the cleaning solvent liquid is cleaned with the cleaning solvent vapor in the vapor cleaning zone, and then further provided above the workpiece. It is cooled and dried in the drying zone. In this drying zone, the cleaning solvent vapor is cooled and condensed to lower the vapor pressure of the cleaning solvent vapor, and the cleaning solvent droplets condensed on the surface of the workpiece are vaporized to perform drying.
JP 2000-318244 A JP 2005-74319 A

By the way, as a cleaning solvent used in the above-described cleaning apparatus, instead of conventional trichlorethylene or methylene chloride (methylene chloride represented by the chemical formula CH ₂ Cl ₂ ), HFC (Hydro Fluoro Carbon) or HFE (Hydro Fluoro Carbon) is used. There is a tendency to use expensive solvents such as fluorine-based solvents such as ether) and bromine-based solvents (main component n-propyl bromide). Therefore, the cleaning apparatus is required to be improved to further reduce the consumption amount of the cleaning solvent.

  However, conventional cleaning apparatuses do not always satisfy the above requirements, and in recent years, development of a cleaning apparatus that can perform the steam cleaning and drying of the workpiece more effectively has been particularly demanded. In particular, in the steam cleaning zone, improvements are required to maintain the cleaning solvent in a vapor state and perform steam cleaning more efficiently. In the drying zone, improvements are made to effectively cool and dry the workpiece. Is requested.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a cleaning apparatus that can reduce the consumption of a cleaning solvent and more effectively perform steam cleaning and drying of a workpiece. It is to provide.

  The cleaning apparatus of the present invention for solving the above problems includes a cleaning tank that cleans a workpiece using a cleaning solvent, a steam generation tank that is disposed separately from the cleaning tank and generates steam of the cleaning solvent. The cleaning tank is provided in a lower part of the cleaning tank and cleans the work with the cleaning solvent liquid, and is provided in a middle part of the cleaning tank with the cleaning solvent vapor. A steam cleaning area for cleaning the cleaning tank, a steam cooling area provided at the top of the cleaning tank for cooling the cleaning solvent vapor to liquefy the cleaning solvent, and a work inlet / outlet at the top thereof. A first pipe for supplying the steam generated in the steam generation tank to the steam cleaning area is provided between the cleaning tank and the steam generation tank, and the first pipe is connected to the steam cleaning area. ~ side Than the mounting position toward the mounting position of the vapor generating bath side, characterized in that it is provided so as to be lower.

  According to this invention, since the washing tank and the steam generation tank are separately arranged and both tanks are connected by the first pipe, the heat of the high-temperature steam generation tank is transmitted to the washing tank to prevent the washing tank from being warmed. be able to. Moreover, since the first pipe is provided so that the mounting position on the steam generation tank side is lower than the mounting position on the steam cleaning area side, the steam generated in the steam generation tank rises in the first pipe. Then, the liquid cleaning solvent having a high temperature condensed in the first pipe returns to the steam generation tank without entering the cleaning tank. This stabilizes the temperature of the cleaning solvent in the liquid cleaning area set to a predetermined temperature, so that the workpiece can be stably cleaned in the liquid cleaning area.

  In the cleaning apparatus of the present invention, it is preferable that the first pipe is made of a resin material.

  According to this invention, since the first pipe is made of a resin material having low thermal conductivity, the temperatures of both tanks (cleaning tank and steam generation tank) arranged on both sides of the first pipe are not disturbed. As a result, for example, it is possible to prevent fluctuations in the processing temperature due to the high temperature of the steam generation tank being transmitted to the cleaning tank, and to prevent a decrease in steam generation efficiency due to the temperature of the cleaning tank being transmitted to the steam generation tank. it can.

  In the cleaning apparatus of the present invention, in the cleaning tank, the recovery means for recovering the cleaning solvent liquefied in the steam cooling area and the cleaning solvent recovered by the recovery means are arranged separately from the cleaning tank. And a second pipe that is sent to the water separation tank. The water separation tank may be provided with a separation unit that separates water from the cleaning solvent collected by the collection unit.

  According to this invention, the cleaning solvent containing water can be recovered without being mixed with the cleaning solvent in the liquid cleaning area. As a result, it is possible to stably clean the workpiece in the liquid cleaning area.

  In the cleaning apparatus of the present invention, when a pipe is provided between the cleaning tank and the steam generation tank to send an excess amount of the cleaning solvent stored in the liquid cleaning area of the cleaning tank to the steam generation tank. In this case, the pipe may be provided with a water-sealed structure.

  According to this invention, since the piping has a water-sealed structure that can block temperature interference between both tanks, the processing conditions of both tanks are not changed, and the cleaning process is performed under stable conditions. Can do.

  In the cleaning apparatus of the present invention, a heating means may be provided on the wall surface of the cleaning tank on the steam cleaning area side near the boundary between the steam cleaning area and the steam cooling area.

  According to this invention, it is possible to suppress the cleaning solvent from condensing and liquefying on the wall surface, so that the steam cleaning can be performed in a stable state.

  In the cleaning apparatus of the present invention, a cooling heat sink is disposed on the steam cooling area side near the boundary between the steam cleaning area and the steam cooling area, and a heat pipe is connected to the heat sink. can do.

  According to this invention, since the steam can be efficiently cooled at the boundary between the steam cleaning area and the steam cooling area, the cleaning solvent can be efficiently recovered and regenerated by promoting liquefaction in the steam cooling area. it can.

  In the cleaning apparatus of the present invention, a heat insulating member may be provided on the wall surface of the cleaning tank near the boundary between the liquid cleaning area and the vapor cleaning area.

  According to the present invention, temperature interference between the high temperature of the steam cleaning area wall surface and the low temperature of the liquid cleaning area wall surface can be prevented, so that efficient cleaning in each area set to a predetermined temperature is achieved. Can be realized.

  In the cleaning apparatus of the present invention, the cleaning tank is provided with an overflow tank that receives the cleaning solvent overflowed from the cleaning tank, and the cleaning solvent that has flowed into the overflow tank is circulated to the cleaning tank via a cooling unit. Can be configured.

  According to the present invention, since the cleaning solvent cooling circulation function is added while maintaining the total amount of the cleaning solvent in the liquid cleaning area constant, the cleaning solvent can be circulated and cooled, and the degree of freedom in cleaning the workpiece can be improved. it can.

  In the cleaning apparatus of the present invention, it is preferable that a free board ratio between the steam cooling area and the work entrance is 1.5 or more, and a cover is provided at the work entrance. According to this, since the leakage from the steam cooling area is prevented, the consumption of the cleaning solvent can be further reduced.

  According to the cleaning apparatus of the present invention, it is possible to prevent the heat of the high-temperature steam generation tank from being transmitted to the cleaning tank and warming the cleaning tank, so that cleaning in the liquid cleaning area, cleaning in the steam cleaning area, and The cleaning solvent can be efficiently recovered in the steam cooling area. Further, the steam generated in the steam generation tank rises in the first pipe and is supplied to the steam cleaning area, but the liquid cleaning solvent having a high temperature condensed in the first pipe does not enter the cleaning tank. Return to the steam generation tank. This can stabilize the temperature of the cleaning solvent in the liquid cleaning area set to a predetermined temperature. As a result, the workpiece can be stably cleaned in the liquid cleaning area, which can contribute to efficient use of the cleaning solvent.

  The best mode for carrying out the present invention will be described below with reference to the drawings. In addition, the washing | cleaning apparatus of this invention is not limited to the following description and drawing in the range which has the technical feature.

  FIG. 1 is a schematic front view showing an example of the cleaning apparatus of the present invention, FIG. 2 is a schematic plan view of the cleaning apparatus shown in FIG. 1, and FIG. 3 shows an example of a cover provided at a workpiece entrance / exit. FIG. 4 is a schematic plan view, and FIG. 4 is a schematic front view showing an example of a pipe form connecting the cleaning tank, the water separation tank, and the steam generation tank. As shown in FIGS. 1 and 2, the cleaning apparatus 10 of the present invention is disposed separately from the cleaning tank 12 for cleaning the workpiece 44 using a liquid and vapor cleaning solvent 46, and is also cleaned. It is an apparatus having a steam generation tank 52 for generating a vapor 48 of a solvent 46.

  The cleaning tank 12 is a processing tank for cleaning the workpiece 44. The cleaning tank 12 is provided in the lower part of the cleaning tank 12 and is provided in a liquid cleaning area 16 for cleaning the workpiece 44 with a liquid cleaning solvent 46, and in the middle of the cleaning tank 12. A steam cleaning area 18 provided to clean the workpiece 44 with the cleaning solvent vapor 48, a steam cooling area 20 provided at the upper part of the cleaning tank 12 for cooling and liquefying the cleaning solvent vapor 48, and an upper part thereof. And a work entrance 14.

  Between the cleaning tank 12 and the steam generation tank 52, a first pipe 54 for supplying the steam 48 generated in the steam generation tank 52 to the steam cleaning area 18 is provided. The first pipe 54 is provided so that the attachment position 56 on the steam generation tank 52 side is lower than the attachment position 22 on the steam cleaning area 18 side.

  The first pipe 54 only needs to have the above-described height attachment positions at both ends, and the pipe form is not particularly limited. However, as shown in the front view of FIG. It is preferable that the pipe is linearly connected so as to have a predetermined inclination between the two. The first piping 54 that is linearly connected to the cleaning device 12 in a front view easily sends the steam 48 generated in the steam generation tank 52 to the steam cleaning area 18 and condenses and liquefies in the first piping 54. The cleaning solvent that has been removed is prevented from entering the cleaning tank 12, and all of the solvent is returned to the steam generation tank 52. This prevents the high-temperature cleaning solvent liquefied in the first pipe 54 from being mixed with the cleaning solvent 46 in the liquid cleaning area 16 that is normally set to a predetermined temperature, so that the work 44 in the liquid cleaning area 16 is mixed. Cleaning can be performed in a stable state, and can contribute to efficient use of the cleaning solvent.

  In addition, although it is preferable that the 1st piping 54 inclines linearly by the front view from the steam generation tank 52 to the washing tank 12, the attachment position by the side of the steam generation tank 14 rather than the attachment position 22 by the side of the steam cleaning area 18 If 56 is lower, it may be stepped or stepped in front view. If the first pipe 54 piped in such a stepped shape or stepped shape is not a U-shaped water-sealed structure like a third pipe 58 described later, the same effect as the first pipe 54 inclined linearly is obtained. Can be played. In the present application, “front view” indicates a form when the cleaning apparatus of the present invention is represented by a front view as shown in the figure, and “plan view” indicates that the present invention is The form when the washing | cleaning apparatus of invention is represented with the top view is shown. FIG. 2 is a plan view when the cover 14a is removed.

  On the other hand, the shape of the first pipe 54 in a plan view of the cleaning device 10 is not particularly limited, but may be a straight pipe as shown in FIG. It may be piped while being bent so as to be along. Therefore, the first pipe 54 may be a pipe that is bent in a plan view and linear or stepped in a front view.

  The height difference between the attachment positions 22 and 56 at both ends of the first pipe is not particularly limited as long as it has a height difference within a range in which the above-described effect is achieved.

  The number, the inner diameter, the material, and the like of the first pipe 54 are selected according to the type and amount of the steam 48 fed into the cleaning tank 12. For example, when using a large cleaning tank 12 that needs to feed a large amount of steam, it is necessary to provide a large number of first pipes 54 having a large inner diameter.

  Further, since an organic solvent is usually used as the cleaning solvent 46, a material that is stable with respect to the cleaning solvent is selected as the material of the first pipe 54. For example, a metal-based or resin-based material is used. preferable. Of these, the first pipe 54 made of a resin material is preferably used. Since the first pipe 54 made of a resin material has a lower thermal conductivity than a metal system such as steel, the temperatures of both tanks (the washing tank 12 and the steam generation tank 52) disposed on both sides of the first pipe 54 are low. It will not be disturbed. As a result, for example, it is possible to prevent fluctuations in the processing temperature due to the high temperature of the steam generation tank being transmitted to the cleaning tank, and to prevent a decrease in steam generation efficiency due to the temperature of the cleaning tank being transmitted to the steam generation tank. it can. The first pipe 54 may be entirely made of a resin material, or a part thereof may be a pipe made of a resin material, and the other part may be a metal pipe. When a metal pipe is used in part, it is desirable to cover the pipe with a heat insulating material so that the vapor in the pipe does not condense at a low outside temperature. Examples of the heat insulating material include rubber sponge.

  On the other hand, when the first pipe 54 made of a metal material such as steel is used, it is desirable to prevent the influence of outside air temperature by covering the pipe with a heat insulating material or the like. It is more desirable to provide a resin pipe with low conductivity. By doing so, similarly to the above, it is possible to prevent fluctuations in the processing temperature, to prevent a decrease in steam generation efficiency, and to prevent condensation of steam in the piping.

  As shown in FIG. 1, the cleaning tank 12 mainly includes a lower liquid cleaning area 16, an intermediate steam cleaning area 18, and an upper steam cooling area 20. Further, a work entrance 14 is provided at the upper part thereof, and the work 44 is taken in and out of the work and is subjected to a cleaning process.

  The opening above the cleaning tank 12 is covered with a cover 14a. The cover 14a is formed with a workpiece entrance / exit 14 having a size that allows the workpiece 44 to be taken in and out. By providing such a cover 14a in the cleaning tank 12, it is possible to prevent mist droplets from being scattered and to reduce the amount of vapor transpiration. In addition, the cleaning solvent to be evaporated from the vapor cooling area 20 into the environment adheres to the cover 14 a and is cooled, liquefied, and dropped into the cleaning tank 12. Thereby, consumption of an expensive cleaning solvent can be suppressed more. The method for attaching the cover 14a is not particularly limited, but it is preferable to fix the cover 14a by a simple method such as clamping so that the cover 14a can be easily removed during maintenance. Also, the material of the cover is not particularly limited, and can be formed of metal or resin.

  The form of the cover 14a is large enough to cover the opening above the cleaning tank 12, as shown in FIGS. 3A and 3B. In the case of this embodiment, the cover 14a has a quadrangular shape as shown in the figure. It is formed. The workpiece entrance / exit 14 may be any size and shape that allows the workpiece 44 to be taken in and out. In the cover 14a shown in FIG. 3, a recess 15 is formed in the work entrance 14 and a shower pipe 45 is arranged there. In FIG. 3A, since one shower pipe 45 is disposed, the cleaning solvent 46 can be concentrated and applied to one surface of the workpiece. On the other hand, in FIG. 3B, since the four shower pipes 45 are arranged, the cleaning solvent 46 can be concentrated on both surfaces of the workpiece.

  The liquid cleaning area 16 is an area provided in the lower part of the cleaning tank 12 and for cleaning the workpiece 44 with the liquid cleaning solvent 46. The liquid cleaning area 16 has a capacity sufficient to immerse one or more workpieces 44 in the cleaning solvent 46. As shown in FIG. 1, an ultrasonic transducer 60 may be provided at the bottom. The ultrasonic transducer 60 can be operated as necessary to improve the cleaning efficiency of the workpiece 44. Moreover, you may provide the temperature control means for performing temperature control. For example, when the ultrasonic vibrator 60 is operated, the temperature of the cleaning solvent 46 rises. Therefore, as shown in FIG. 1, a predetermined number of thermo modules 62 (Peltier elements) for keeping the temperature constant are provided. May be. Such a thermo module 62 is an element utilizing the Peltier effect, and has an advantage that no noise is generated because there is no movable part.

  Various types of thermo modules 62 can be used. For example, a Peltier element or a cooling fan can be used alone or in combination. In particular, it is desirable to cool the thermo module 64 by arranging it near the upper work entrance 14.

  The liquid cleaning area 16 can be constituted by a main tank 37 that stores a certain amount of the cleaning solvent 46 and an overflow tank 38 that receives the cleaning solvent 46 that has overflowed from the main tank 37. For example, when the main tank 37 is rectangular as shown in FIGS. 1 and 2, the overflow tank 38 may be provided on the four sides or on one side, and is not particularly limited. By adopting such a structure, the cleaning solvent 46 can always be a constant amount, and only the excess amount of the cleaning solvent 46 overflows into the overflow tank 38, so that the cleanliness of the liquid in the main tank 37 is stabilized, As a result, stable liquid cleaning can be achieved. Reference numeral 39A denotes a liquid level gauge of the main tank 37, and reference numeral 39B denotes a liquid level of the overflow tank 38.

  The cleaning solvent 46 that overflows the main tank 37 and flows into the overflow tank 38 may be circulated to the cleaning tank 12 via the cooling unit 40. An example of the cooling unit 40 at this time is a heat exchanger. Further, the circulation of the overflowed cleaning solvent 46 can be returned to the liquid cleaning area 16 again via the circulation pump 41 and the filter 42. With this configuration, the degree of freedom in cleaning the workpiece 44 can be improved. For example, the cleaning efficiency may be improved by directly contacting one or a plurality of nozzles 43 attached to the tip of the circulation path with the work 44 immersed in the main tank 37, or the cleaning cooled by the cooling unit 40. By cooling the work 44 by applying the solvent 46 to the work 44, it is possible to improve the steam cleaning efficiency when it is subsequently pulled up to the steam cleaning area 18. This circulating flow rate can be arbitrarily set.

  The steam cleaning area 18 is an area that is provided in an intermediate portion of the cleaning tank 12 and cleans the workpiece 44 with the cleaning solvent vapor 48. Similarly to the liquid cleaning area 16, the vapor cleaning area 18 has a capacity sufficient to expose one or a plurality of workpieces 44 to the cleaning solvent vapor 48 atmosphere. In this steam cleaning area 18, cleaning solvent vapor 48 is supplied in contact with the workpiece 44 in a saturated state. The steam 48 is steam that has been raised in the first pipe 54 by the steam generated in the steam generation tank 52. The vapor 48 thus supplied contacts the surface of the work 44 and condenses, whereby the work 44 is cleaned.

  As shown in FIG. 1, it is preferable to provide heating means such as a heater 30 on the wall surface 31 of the steam cleaning area 18 (the inner wall surface or the outer wall surface of the intermediate portion of the cleaning tank 12). By providing such a heating means, it is possible to suppress the vapor 48 of the cleaning solvent from condensing and liquefying on the wall surface 31, so that the steam cleaning can be performed in a stable state. The heating means is preferably provided on the steam cleaning area 18 side near the boundary between the steam cleaning area 18 and the steam cooling area 20. By providing the heating means at this position, it is possible to prevent the cool air in the steam cooling area 20 from passing through the wall surface and lowering the temperature of the wall surface of the steam cleaning area 18, and as a result, the steam 48 is condensed on the wall surface 31. And can be prevented from liquefying. As a heating means, various things can be mentioned, for example, a planar heater, a pipe heater, etc. can be mentioned. These heating means can be provided along the inner wall surface or the outer wall surface in consideration of resistance to the cleaning solvent and the like.

  Moreover, it is preferable to provide a heat insulating member 36 on the wall surface near the boundary between the liquid cleaning area 16 and the vapor cleaning area 18. By providing the heat insulating member 36 on the wall surface in the vicinity of the boundary, temperature interference between the high temperature of the steam cleaning area wall surface and the low temperature of the liquid cleaning area wall surface can be made difficult. Cleaning can be realized. In addition, it is preferable to provide the heat insulating member 35 also on the wall surface near the boundary between the steam cleaning area 18 and the steam cooling area 20. With respect to the installation method of these heat insulating members 35 and 36, for example, when a resin member (for example, polyacetal or the like) that has low thermal conductivity and is resistant to a cleaning solvent is used as the heat insulating member, a continuous metal wall surface is used. It can be provided to block sex.

  The steam cooling area 20 is an area provided at the upper part of the cleaning tank 12 to cool and liquefy the steam of the cleaning solvent. The steam cooling area 20 may have such a height and size that vapor that cannot be liquefied does not escape from the work entrance 14 into the environment, and the height and size are designed based on the entire capacity of the cleaning tank 12. Is done. Specifically, in the present embodiment, the free board ratio of the height H of the steam cooling area 20 with respect to the short side L of the opening is ensured to be 1.5 or more.

  In the steam cooling area 20, the steam is cooled and liquefied by the cooled inner wall surface. Such liquefaction lowers the vapor pressure in the vapor cooling area 20 and vaporizes the droplets condensed on the surface of the workpiece 44, and as a result, the workpiece 44 is dried. In the present invention, since the heating means 30 and the heat insulating member 36 are provided so as to prevent a temperature drop in the steam cleaning area 18, the temperature of the work 44 is maintained high, and even if the heat of vaporization is deprived during drying, There is an advantage that the temperature does not drop too much, and no spots due to recondensation occur. Further, since the heat sink 32 is provided so as to lower the temperature of the steam cooling area 20, the droplets condensed on the surface of the work 44 can be quickly vaporized by lowering the vapor pressure.

  As shown in FIGS. 1 and 2, a predetermined number of thermo modules 64 (Peltier elements) are provided on the wall surface of the steam cooling area 20 at appropriate portions. The thermo module 64 is provided to cool the temperature in the area to a temperature at which the vapor 48 is liquefied. For example, as shown in FIGS. 1 and 2, a plurality of thermo modules 64 are preferably provided.

  Further, it is preferable to provide a heat sink 32 on the steam cooling area 20 side near the boundary between the steam cleaning area 18 and the steam cooling area 20. The heat sink 32 is a processed member made of a metal material such as aluminum or copper having good thermal conductivity. In the cleaning apparatus 10, the heat sink 32 is disposed near the boundary between the steam cleaning area 18 and the steam cooling area 20. In addition, since the work 44 to be taken in and out is not disturbed, the steam cleaning area 18 can perform more efficient steam cleaning, and the steam cooling area 20 can perform more efficient drying and steam liquefaction. In particular, it is preferably used in that liquefaction can be performed efficiently.

  The heat sink 32 is connected to a heat pipe 34 as shown in FIG. The shape of the heat sink 32 may be any shape as long as it does not hinder the loading and unloading of the workpiece, and the shape is not particularly limited. In the present embodiment, as shown in FIG. An annular heat sink 32 is disposed along the inner wall of the tank 12. Further, although not shown, two heat sinks 32 may be arranged in parallel along the inner wall of the cleaning tank 12.

  As the heat pipe 34, various commercially available ones can be used. For example, a conventionally known general heat pipe may be used, or “Heat Lane (registered trademark)” (TS Heattronics). A meandering capillary heat pipe called “manufactured by Co., Ltd.” may be used. These heat pipes 34 are preferably connected to a thermo module 64 provided in the steam cooling area 20, and heat exchange can be performed by the thermo module 64 to cool the heat sink 32.

  The cleaning solvent liquefied in the vapor cooling area 20 can be recovered by the recovery means 24. The steam 48 is liquefied on the inner wall surface of the steam cooling area 20 and flows down the inner wall surface. The collecting means 24 may be provided so as to receive the cleaning solvent flowing down the inner wall surface. For example, as shown in FIG. 1, it is preferable to form a tray 50 along the inner wall surface. With the receiving tray 50, the cleaning solvent liquefied in the steam cooling area 20 can be recovered.

  The recovered cleaning solvent 46 is sent to the water separation tank 28 arranged separately from the cleaning tank 12 through the second pipe 26. As shown in FIGS. 2 and 4, the water separation tank 28 is provided with separation means for separating water from the cleaning solvent 46 recovered by the recovery means 24. Separation means is not particularly limited. For example, when an organic solvent having a specific gravity greater than that of water is used as a cleaning solvent, it is possible to wash with water that causes stains by a simple method of providing a partition plate 29 that partitions the center of the water tank. The solvent 46 can be separated. By providing the recovery means 24 and the water separation layer 28, it is possible to prevent the cleaning solvent containing water from being mixed with the cleaning solvent in the liquid cleaning area. As a result, the workpiece 44 can be cleaned in the liquid cleaning area 18 in a stable state.

  In the present embodiment, the first pipe 54 that is inclined and the second pipe 26 that connects the recovery means 24 and the water separation layer 28 are provided, so that the cleanliness free from dust and the like is maintained. The washed cleaning solvent 44 can be returned to the steam generation tank 52. That is, when dust or the like adhering to the workpiece 44 falls into the liquid cleaning area 16 provided in the lower part of the cleaning tank 12 during cleaning, the cleaning solvent becomes dirty and is returned to the steam generation tank 52. And it becomes difficult to keep clean.

  As shown in FIGS. 1 to 4, the steam generation tank 52 is a tank that generates steam by heating the cleaning solvent 46 with heating means such as a heater 53. A liquid level gauge 39 </ b> C may be provided on the side wall of the steam generation tank 52.

  As shown in FIG. 1, the cleaning solvent overflowed from the predetermined amount of cleaning solvent stored in the liquid cleaning area 16 sends the increased amount of liquid to the steam generation tank 52 through the fourth pipe 27. In this way, even when the vapor 48 is liquefied on the wall 31 or the like and the liquid amount in the overflow tank 38 is increased, a balance between the liquid amount in the cleaning tank 12 and the liquid amount in the steam generation tank 52 is ensured. be able to.

  In the present invention, as shown in FIG. 1, when the overflowing cleaning solvent flows directly into the steam generation tank 52, the fourth pipe 27 connecting the cleaning tank 12 and the steam generation tank 52 is as shown in FIG. It is desirable to have a water seal structure such as a U-shape. Since the fourth pipe 27 has a water-sealed structure, particularly high-temperature steam in the steam generation tank 52 is prevented from flowing back to the cleaning tank 12, so that interference between both tanks can be blocked. As a result, it is possible to perform processing under stable conditions without changing the processing conditions of both tanks.

  Further, a filter (not shown) for removing dust and the like may be provided in the fourth pipe 27. By interposing such a filter, even if dust or the like adhering to the work 44 falls into the liquid cleaning area 16 provided in the lower part of the cleaning tank 12 during cleaning, the cleaning solvent becomes dirty. By passing through the filter, dust and the like are removed, and the cleaning solvent in the steam generation tank 52 can be kept clean.

  As described above, in the cleaning apparatus 10 of the present invention, the cleaning tank 12 and the steam generation tank 52 are separately arranged and both tanks are connected by the first pipe 54, so that the heat of the high-temperature steam generation tank 52 is cleaned. It is possible to prevent the cleaning tank 12 from being warmed by being transmitted to the tank 12. Moreover, since the 1st piping 54 is provided so that the attachment position 56 by the side of the steam generation tank 52 may become lower than the attachment position 22 by the side of the steam cleaning area 18, the steam generated in the steam generation tank 52 is The first pipe 54 rises and is easily supplied into the steam cleaning area 18, but the liquid cleaning solvent having a high temperature condensed in the first pipe 54 does not enter the cleaning tank 12, and enters the steam generation tank 52. Return to. This stabilizes the temperature of the cleaning solvent in the liquid cleaning area set to a predetermined temperature, so that the workpiece can be stably cleaned in the liquid cleaning area.

  Examples of the cleaning solvent used in the cleaning apparatus 10 of the present invention include various solvents such as fluorine-based solvents such as HFC (Hydro Fluoro Carbon) and HFE (Hydro Fluoro Ether), bromine. A system solvent or the like is used. Although many of these cleaning solvents are relatively expensive, the cleaning apparatus 10 of the present invention can further reduce the consumption of the cleaning solvent and prevent the cleaning solvent from escaping into the environment. Therefore, it can be preferably used.

  Further, the steam generated in the steam generation tank 52 is supplied to the steam cleaning area 18 while rising in the first pipe 54. The liquid cleaning solvent having a high temperature condensed in the first pipe 54 is supplied to the cleaning tank 12. Therefore, the high temperature cleaning solvent liquefied in the first pipe 54 may be mixed with the cleaning solvent in the liquid cleaning area 16 that is normally set to a predetermined temperature. Absent. As a result, there is an effect that the cleaning of the workpiece 44 in the liquid cleaning area 16 can be performed in a stable state.

  Further, as shown in FIG. 4, since the pipe 66 in the steam generation tank 52 is exposed to the high-temperature steam of the cleaning solvent, the pipe 66 made of a material having heat resistance and solvent resistance is selected. As an example, a pipe made of tetrafluoroethylene is preferably used. Reference numeral 67 denotes an injection port.

  Therefore, according to the cleaning device 10 of the present invention, the consumption of the cleaning solvent can be reduced, and the workpiece can be more effectively cleaned and dried with steam. This cleaning device 10 can clean electronic parts, precision parts, metal parts, printed wiring boards, glass substrates and other various objects to be cleaned (workpieces) very efficiently and at low cost.

It is a schematic front view which shows an example of the washing | cleaning apparatus of this invention. It is a schematic plan view of the washing | cleaning apparatus shown in FIG. It is a schematic plan view which shows the example of the cover provided in a workpiece | work entrance. It is a schematic front view which shows an example of the piping form which connects a washing tank, a water separation tank, and a steam generation tank. It is the schematic which shows the conventional washing | cleaning apparatus proposed by patent document 1. FIG. It is the schematic which shows the conventional washing | cleaning apparatus proposed by patent document 2. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Cleaning apparatus 12 Cleaning tank 14 Work entrance / exit 14a Cover 15 Recess 16 Liquid cleaning area 18 Steam cleaning area 20 Steam cooling area 22 Installation position on the steam cleaning area side 24 Collection means 26 2nd piping 27 4th piping 28 Water separation tank 29 Separation means (partition plate)
30 Heater 31 Wall surface 32 Heat sink for cooling 34 Heat pipe 35, 36 Thermal insulation member 37 Main tank 38 Overflow tank 39A, 39B, 39C Level gauge 40 Cooling unit 41 Circulating pump 42 Filter 43 Nozzle 44 Work 45 Shower piping 46 Cleaning solvent 48 Steam 50 Receptacle 52 Steam generation tank 53 Heater 54 First piping 56 Installation position on the steam generation tank side 58 Third piping 60 Ultrasonic vibrator 62, 64 Thermo module 66 Heat resistant piping 67 Inlet

Claims (9)

A cleaning tank that cleans the workpiece using a cleaning solvent; and a steam generation tank that is disposed separately from the cleaning tank and generates steam of the cleaning solvent;
The cleaning tank is provided in a lower part of the cleaning tank and cleans the work with the cleaning solvent liquid, and is provided in an intermediate portion of the cleaning tank with a steam for cleaning the work with the cleaning solvent vapor. A cleaning area, a steam cooling area that is provided at the top of the cleaning tank and cools the steam of the cleaning solvent to liquefy the cleaning solvent, and further includes a work inlet / outlet at the top thereof,
Between the cleaning tank and the steam generation tank, a first pipe for supplying the steam generated in the steam generation tank to the steam cleaning area is provided,
The cleaning apparatus according to claim 1, wherein the first pipe is provided so that the attachment position on the steam generation tank side is lower than the attachment position on the steam cleaning area side.   The cleaning apparatus according to claim 1, wherein the first pipe is made of a resin material. The cleaning tank includes a recovery means for recovering the cleaning solvent liquefied in the steam cooling area, and a cleaning solvent recovered by the recovery means is sent to a water separation tank arranged separately from the cleaning tank. 2 pipes are provided,
The cleaning apparatus according to claim 1, wherein the water separation tank is provided with a separation unit that separates water from the cleaning solvent recovered by the recovery unit.   If a pipe is provided between the cleaning tank and the steam generation tank to send an excess amount of the cleaning solvent stored in the liquid cleaning area of the cleaning tank to the steam generation tank, the pipe is water-sealed. The cleaning apparatus according to claim 1, wherein the cleaning apparatus is provided with a structure.   The heating means is provided in the wall surface of the said washing tank in the steam washing area side vicinity of the boundary of the said steam washing area and the said steam cooling area, The Claim 1 characterized by the above-mentioned. Cleaning device.   6. A heat sink for cooling is disposed on the side of the steam cooling area near the boundary between the steam cleaning area and the steam cooling area, and a heat pipe is connected to the heat sink. The cleaning apparatus according to any one of the above.   The cleaning apparatus according to claim 1, wherein a heat insulating member is provided on a wall surface of the cleaning tank in the vicinity of a boundary between the liquid cleaning area and the vapor cleaning area.   The cleaning tank is provided with an overflow tank that receives a cleaning solvent overflowed from the cleaning tank, and the cleaning solvent that has flowed into the overflow tank is circulated to the cleaning tank through a cooling unit. Item 8. The cleaning device according to any one of Items 1 to 7. The cleaning apparatus according to any one of claims 1 to 8, wherein a free board ratio between the steam cooling area and the workpiece inlet / outlet is 1.5 or more, and a cover is provided at the workpiece inlet / outlet.

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