JP2009113004A - Cleaning method and cleaning apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning method and a cleaning apparatus enabling enhancement of the effects of ultrasonic cleaning in cleaning by utilizing both an ultrasonic cleaning method and a jet cleaning method. <P>SOLUTION: The cleaning apparatus S recovers the cleaning solution having overflown the cleaning vessel 1 and circulates it. The cleaning solution recovered is jetted from a shower head 35 around work W immersed in the cleaning solution within the cleaning vessel 1 so as to carry out the jet cleaning process. An ultrasonic oscillator 14 for ultrasonic cleaning is arranged in the cleaning vessel 1. Because the pump 31 for circulation of the overflowing flow and the ultrasonic oscillator 14 operate alternately, the independent ultrasonic cleaning process without jetting from the shower head 35 is feasible. Since not allowing ultrasonic waves to be carried away by the shower flow of the cleaning solution, such an independent ultrasonic cleaning process can achieve high effects of the ultrasonic cleaning. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a cleaning method and a cleaning apparatus for immersing and cleaning a work (object to be cleaned) in a cleaning tank storing a cleaning liquid such as a non-aqueous solvent.

Conventionally, as a cleaning method for cleaning a workpiece such as an electronic component, a precision component, or a substrate with a cleaning liquid such as a non-aqueous solvent in a cleaning tank, cleaning methods such as Patent Documents 1 and 2 have been proposed. In the cleaning method of Patent Document 1, the cleaning liquid in which the work is immersed starts to be vibrated with ultrasonic waves, and then the cleaning liquid is ejected from the nozzle toward the work. The workpiece and the nozzle are swung while the ultrasonic vibration and the cleaning liquid are ejected to enhance the cleaning effect. In the cleaning method of Patent Document 2, the workpiece is immersed in the cleaning liquid in the liquid cleaning area in the cleaning tank, and the workpiece is cleaned by applying ultrasonic vibration. Further, the workpiece is steam cleaned in a steam cleaning area provided above the liquid cleaning area in the cleaning tank, or the workpiece is washed away by flowing a cleaning agent from a shower pipe on the upper cover of the cleaning tank. When the cleaning liquid exceeds the capacity of the liquid cleaning area, it flows into the overflow tank, and the overflowed cleaning liquid is circulated and returned to the cleaning tank again.
JP 2006-272238 A JP 2007-152231 A

  However, in the cleaning method of Patent Document 1, since ultrasonic vibration and cleaning liquid are ejected at the same time, the ultrasonic vibration is caused to flow by the jet of cleaning liquid, so that the ultrasonic vibration becomes less effective and effective ultrasonic cleaning is performed. There was a problem that it was not possible. That is, when ultrasonic waves are generated from the ultrasonic generator disposed on the bottom surface of the cleaning tank 1 to the workpiece, the ultrasonic waves interfere with the circulation generated in the cleaning liquid in the tank by the cleaning liquid ejected from the nozzle. However, there is a problem that the cleaning effect of both is reduced.

  Further, in the cleaning method of Patent Document 2, since the overflowing cleaning liquid is circulated through the cooling unit, there is a problem that the ultrasonic wave transmittance is low by the amount of the cleaning liquid being low, and the ultrasonic cleaning effect is reduced. there were. A fluorinated solvent is used as the cleaning liquid.

  In view of the above problems, an object of the present invention is to provide a cleaning method and a cleaning apparatus capable of enhancing the effect of ultrasonic cleaning when cleaning is performed using both the ultrasonic cleaning method and the jet cleaning method. There is.

  In order to solve the above problems, in the present invention, an ultrasonic cleaning method in which a cleaning liquid in which a work is immersed in a cleaning tank is ultrasonically vibrated, and a jet of the cleaning liquid toward the work immersed in the cleaning liquid In the cleaning method using both of the jet cleaning method for supplying the liquid, at least the ultrasonic cleaning step for cleaning by the ultrasonic cleaning method in a state where the supply of the jet is stopped, and the cleaning by the jet cleaning method are performed. The jet cleaning process is alternately performed.

  Further, the cleaning apparatus according to the present invention includes a cleaning tank for immersing the work in the cleaning liquid, an ultrasonic oscillation means for vibrating the cleaning liquid in the cleaning tank by ultrasonic waves, and the work immersed in the cleaning liquid. A jet flow generating means for generating a jet of cleaning liquid to be directed, and a control means for controlling the ultrasonic wave oscillation means and the jet flow generation means, wherein the control means pauses at least the jet flow generation means, An ultrasonic single cleaning process for operating one ultrasonic oscillation means and a jet cleaning process for operating the jet generating means are performed.

  In the cleaning method and the cleaning apparatus of the present invention, since both the ultrasonic cleaning method and the jet cleaning method are used, it is possible to perform effective cleaning as compared with the case of cleaning with only one. Further, in the ultrasonic single cleaning process, since the generation of the jet flow is stopped, the ultrasonic vibration is efficiently propagated to the workpiece without flowing in the flow of the cleaning liquid. Therefore, the advantage of ultrasonic vibration can be improved and effective ultrasonic cleaning can be performed. Further, dirt (dust etc.) washed off from the work in the ultrasonic cleaning process moves from around the work in the jet cleaning process. For this reason, since dirt does not stay around the work, the work can be effectively cleaned.

  In the present invention, in the jet cleaning step, the jet of the cleaning liquid may be supplied while being vibrated by ultrasonic waves. Moreover, you may perform washing | cleaning only by a jet.

  In the cleaning method according to the present invention, it is preferable that the cleaning liquid is a fluorinated solvent, and the cleaning liquid in the cleaning tank is adjusted to a temperature of 35 ° C. or higher and 45 ° C. or lower when performing the ultrasonic cleaning method. That is, in the cleaning apparatus according to the present invention, it is preferable that the cleaning liquid is a fluorinated solvent and includes temperature adjusting means for maintaining the cleaning liquid in the cleaning tank at a temperature of 35 ° C. or higher and 45 ° C. or lower. In the case of a fluorinated solvent, it is preferable that the temperature of the cleaning liquid is kept at a temperature of 35 ° C. or higher because the temperature tends to be able to propagate ultrasonic vibrations effectively. On the other hand, even if the temperature is too high, the efficiency of propagation of vibration is lowered, so it is desirable to keep it at 45 ° C. or lower.

  In the cleaning apparatus to which the present invention is applied, as the ultrasonic wave oscillating means, a first ultrasonic wave generating means installed on the bottom of the cleaning tank, and the second ultrasonic wave generating means formed integrally with the jet flow generating means. Ultrasonic control means, and in the ultrasonic cleaning process, the control means includes only the first ultrasonic generation means, or the first ultrasonic generation means and the second ultrasonic generation means. It is preferable that both are operated, and in the jet cleaning step, the second ultrasonic wave generating means is operated or stopped.

  In the cleaning apparatus according to the present invention, it is preferable that the cleaning tank has an overflow portion including a plurality of cutout portions in which an upper end edge is cut out. In this way, since the cleaning liquid concentrates and flows out in the notch, the flow rate of the cleaning liquid at the time of overflow increases, and dust floating on the surface of the cleaning liquid easily flows out from the cleaning tank. In particular, if the corner portion of the cleaning tank is a notch, the dust collected on the corners of the cleaning tank can easily flow out of the cleaning tank. That is, when the cleaning tank is a rectangular parallelepiped, it is preferable that a corner portion at the upper edge of the cleaning tank is a valley portion of the notch. If it does in this way, garbage can be efficiently discharged from a washing tub.

  In the present invention, since both the ultrasonic cleaning method and the jet cleaning method are used, it is possible to perform effective cleaning as compared with the case of cleaning with only one. Further, in the ultrasonic single cleaning process, the generation of the jet flow is stopped, so that the ultrasonic vibration propagates without flowing in the flow of the cleaning liquid. Therefore, the advantage of ultrasonic vibration can be improved and effective ultrasonic cleaning can be performed.

  Hereinafter, an embodiment of a cleaning apparatus and a cleaning method to which the present invention is applied will be described with reference to the drawings.

(Structure of the cleaning device)
FIG. 1 is a schematic configuration diagram of a cleaning apparatus of the present invention. Note that FIG. 1 also shows an ultrasonic oscillator 36 (second ultrasonic oscillator) described in a later-described modification.

  As shown in FIG. 1, a cleaning apparatus S to which the present invention is applied includes a cleaning tank 1 that can store a cleaning liquid for cleaning a workpiece W up to a predetermined liquid level, and an overflow flow of the cleaning liquid from the cleaning tank 1. An overflow tank 2 to be received and a main piping system 3 for returning the cleaning liquid of the overflow tank 2 to the cleaning tank 1 are provided. In addition, the cleaning device S is configured to generate water for the work W using the cleaning liquid vapor, the cooling coil 5 for condensing the cleaning liquid vapor at a position above the cleaning tank 1, and the water for separating the water from the coagulated liquid. The water separation tank 6 and the control panel 7 (control device) are provided.

  The cleaning liquid in this embodiment is a non-aqueous solvent, and as such a cleaning liquid, for example, a fluorine-based solvent such as HFC (hydrofluorocarbon) or HFE (hydrofluoroether) is used.

  FIG. 2 is a perspective view of the cleaning tank 1 used in the cleaning apparatus S of the present invention. As shown in FIG. 2, the cleaning tank 1 is a rectangular parallelepiped processing tank. The upper edge 11 of the cleaning tank 1 is an overflow portion in which a large number of notches 12 are formed, and has a jagged shape on all four sides. The jagged peaks 12a and valleys 12b are approximately the same height on all four sides. In the present embodiment, the corners 11 a at the four corners of the upper edge 11 of the cleaning tank 1 are all valleys 12 b of the notches 12.

  In FIG. 1 again, gaps 13 are provided in four directions above the upper edge 11 of the cleaning tank 1, and the overflow flow exceeding the upper edge 11 of the cleaning tank 1 flows out from the gap 13 in four directions. It is like that.

  The overflow tank 2 is a wide groove provided along the outer periphery of the cleaning tank 1. In the present embodiment, the cleaning liquid flowing out from at least one side out of the cleaning liquid overflowing from the four sides of the cleaning tank 1 is also configured to flow into the steam generation tank 4.

  The upper space 1a of the cleaning tank 1 can be sealed except for the gap 13 serving as an overflow flow path, and is used as a steam cleaning area. An ultrasonic oscillator 14 (first ultrasonic oscillator) and a heater 15 (temperature controller) are provided at the bottom of the cleaning tank 1 in which the cleaning liquid is stored. The workpiece W is carried into and out of the cleaning tank 1 through the inside of the cooling coil 5 in a state of being attached to a mounting jig (not shown). That is, the workpiece W is immersed in the cleaning liquid while being attached to the mounting jig, or is pulled up to the upper space 1a on the surface of the cleaning liquid. Although not shown in the drawings, the mechanism for moving the mounting jig includes, for example, a hanging member that suspends the mounting jig in the cleaning tank 1 or the upper space 1a, and a lifting arm that lifts and lowers the hanging member. .

  The cleaning liquid introduced into the cleaning tank 1 is vibrated by the ultrasonic oscillator 14 and cleans the workpiece W by an ultrasonic cleaning method. The excitation frequency by the ultrasonic oscillator 14 is adjusted to the most effective frequency according to the type of the workpiece W and the state of dirt to be cleaned. In this embodiment, it is performed in the range of approximately 40 to 200 kHz.

  The cleaning liquid is heated by the heater 15. Thus, the temperature of the cleaning liquid is adjusted so that the ultrasonic vibration has a high transmittance in the cleaning tank 1. For example, when HFC (hydrofluorocarbon) or HFE (hydrofluoroether) is used as the cleaning liquid, the temperature of the cleaning liquid is adjusted to 35 ° C. to 45 ° C. at which the transmittance of ultrasonic vibration is highest. That is, when a fluorinated solvent is used as the cleaning liquid, the higher the temperature of the cleaning liquid tends to propagate ultrasonic vibrations effectively, it is preferable to maintain the cleaning liquid at a temperature of 35 ° C. or higher. On the other hand, even if the temperature is too high, the efficiency of propagation of vibration is lowered, so it is desirable to keep it at 45 ° C. or lower.

  The main piping system 3 is provided with a pump 31 (jet generation means) and a filter 32 for dust removal. One end of the main piping system 3 is connected to the bottom of the overflow tank 2, and when the pump 31 is operated, the cleaning liquid in the overflow tank 2 is sucked into the piping of the main piping system 3. The suctioned cleaning liquid is sent out to the cleaning tank 1 from the other end of the main piping system 3 after dust and the like are removed and purified when passing through the filter 32. In addition, each piping which comprises the main piping system 3 can be provided with a valve as needed, and each piping can be closed or opened as needed.

  It is also effective to provide a sub-pipe 8 that branches from the pump 31 and leads to the bottom of the cleaning tank 1 through a valve 81 and a filter 82. After the ultrasonic cleaning process and the jet cleaning process are completed, when the work W is pulled up to the upper space 1a, the main piping system 3 is stopped, and after the cleaning liquid is filtered and circulated through the sub piping system 8, the sub piping system 8 is By stopping and reopening the main piping system 3 and pulling it up from the washing tank while putting the shower on the workpiece W, it is possible to prevent the reattachment of dust. In addition, after pulling up from the washing tank 1, the shower unit 34 mentioned below is returned in a washing tank, and the workpiece | work W is rinse-washed when the cleaning agent vapor | steam from the steam generation tank 4 condenses. Thus, by combining the main pipe 3 and the sub pipe 8, it is possible to prevent dust from accumulating at the bottom of the cleaning tank 1 when the jet flow is stopped, and to efficiently discharge dust floating on the liquid surface to the overflow tank 2. be able to.

  The other end of the main piping system 3 extends from the upper space 1a side into the cleaning tank 1, and a shower unit 34 (jet generation means) is connected to the tip portion 33 thereof. The shower unit 34 has a shower head 35 disposed to face the workpiece W, and a plurality of cleaning liquid ejection holes are formed on the surface of the shower head 35 on the workpiece W side. In addition, the shower unit 34 moves in synchronization with the jig for mounting the workpiece W by a moving mechanism (not shown) while being connected to the main piping system 3 in the cleaning tank 1 and the upper space 1a. Thereby, even when the workpiece W is immersed in the cleaning liquid, the state in which the shower head 35 and the workpiece W are arranged to face each other is maintained. The shower unit 34 configured in this way functions as a jet generating means together with the pump 31.

  That is, when the pump 31 is operated in a state where the shower unit 34 is immersed in the cleaning liquid, the cleaning liquid is ejected from the shower head 35 toward the work W, and a jet directed toward the work W is generated in the cleaning liquid. Therefore, a jet cleaning method (shower cleaning method) using such a jet can be performed. Moreover, when the shower unit 34 having such a configuration is used, the configuration of the apparatus is simplified compared to a configuration in which a large number of shower tubes are arranged around the work W to discharge the cleaning liquid.

  The upper space 1 a of the cleaning tank 1 is connected to the steam generation tank 4 by a flow path 13 a connected to the gap 13. Since the flow path 13a extends obliquely downward from the upper edge 11 of the cleaning tank 1, the overflow flow exceeding the upper edge 11 naturally flows into the steam generation tank 4 side. A heater 41 is provided at the bottom of the steam generation tank 4. The cleaning liquid flowing into the steam generating tank 4 is heated by the heater 41, and cleaning liquid vapor is generated. The generated cleaning liquid vapor rises through the flow path 13 a and is supplied to the upper space 1 a of the cleaning tank 1.

  The cleaning liquid introduced into the steam generation tank 4 circulates in the circulation passage 45 provided with the pump 42 and the filters 43 and 44. When the cleaning liquid passes through the filters 43 and 44, dust and harmful substances are removed and purified, and then returned to the steam generation tank 4. The filter 44 is a dust removal filter similar to the filter 32 provided in the main piping system 3, and dust that has fallen from the workpiece W and floated in the cleaning liquid is removed by the filter 44.

  On the other hand, the filter 43 is for adsorbing and removing decomposition products in the cleaning liquid, and for example, an activated alumina filter is used. When the cleaning liquid introduced into the steam generation tank 4 is heated to a high temperature by the heater 41, harmful decomposition products (for example, perfluoroisobutylene, hydrogen fluoride, etc.) may be generated. Such decomposition products can be removed. In addition, when using an activated alumina filter, it is desirable that the flow rate of the cleaning liquid in the circulation channel 45 be 2 L / min or less. The activated alumina filter adsorbs the decomposition product of the fluorinated solvent, but its adsorption power is not so high, so that the adsorption effect of the decomposition product can be enhanced by slowing the flow rate of the cleaning liquid. The activated alumina filter easily generates dust, but the dust is removed by the filter 44.

  A cooling coil 5 is provided in the upper space 1 a into which the cleaning liquid vapor is introduced, and the vapor of the cleaning liquid aggregates on the surface of the cooling coil 5. This agglomerated liquid is collected in the pipe 51 and introduced into the water separation tank 6. A partition plate 61 is provided at the center of the water separation tank 6, and a pipe 51 is connected to a section of the water separation tank 6 partitioned by the partition plate 61. A pipe 52 extending into the overflow tank 2 is connected to the other compartment. In this case, when a fluorinated solvent having a specific gravity greater than that of water is used as the cleaning liquid, the water having a lower specific gravity is separated on the cleaning liquid in the section on the pipe 51 side and does not flow to the section on the pipe 52 side. Therefore, water can be separated from the cleaning liquid by utilizing the difference in specific gravity between water and the cleaning liquid. The collected cleaning liquid is returned to the overflow tank 2 from the pipe 52 and recirculated. The pipe 51 has a slope inclined downward from the cooling coil 5 toward the water separation tank 6 so that the coagulated liquid naturally flows into the water separation tank 6. Further, the pipe 52 has a slope inclined downward from the water separation tank 6 toward the overflow tank 2 so that the separated water naturally flows into the cleaning tank 1.

  The control panel 7 (control device) outputs the control signal to the pump 31 and the ultrasonic oscillator 14 of the main piping system 3 to control the pump 31 and the ultrasonic oscillator 14 to operate at a predetermined timing. Further, by controlling the heaters 15, 41 or the pump 42 with the control panel 7, the temperature of the cleaning liquid in the cleaning tank 1 can be adjusted or the cleaning liquid vapor can be supplied from the steam generation tank 4.

(Cleaning method and main effects)
Next, a method for cleaning the workpiece W by the cleaning apparatus S of the present embodiment will be described. In the present embodiment, the workpiece W is introduced into the cleaning tank 1 and the workpiece W is immersed in the cleaning liquid, and cleaning is performed using both the ultrasonic cleaning method and the jet cleaning method. Further, in this embodiment, as described below, an ultrasonic single cleaning process in which cleaning is performed by an ultrasonic cleaning method in a state where supply of the jet flow by the shower head 35 is stopped, and a jet generated by the shower head 35 are used. A jet cleaning process for cleaning by the jet cleaning method is alternately performed.

  In the cleaning apparatus of this configuration, when the cleaning liquid is jetted from the shower head 35 to the work W side and the cleaning liquid is caused to flow around the work W when the ultrasonic wave is being oscillated from the ultrasonic oscillator 14, the cleaning liquid flows superbly. In some cases, a sound wave is applied, and the ultrasonic vibration does not work well so that effective ultrasonic cleaning cannot be performed. Therefore, in the present embodiment, the control panel 7 operates the ultrasonic oscillator 14 and the pump 31 alternately. When such control is performed, when the ultrasonic oscillator 14 is operating, the pump 31 is stopped, the supply of the cleaning liquid to the shower unit 34 is stopped, and the cleaning liquid from the shower head 35 to the workpiece W side is stopped. The ejection stops (ultrasonic single cleaning process).

  If the ultrasonic cleaning process and the jet cleaning process are alternately performed a plurality of times, even if dirt (dust etc.) dropped by the ultrasonic cleaning in the ultrasonic cleaning process stays around the workpiece, the jet cleaning process Since the dirt moves from the periphery of the workpiece W when the above is performed, the dirt does not reattach to the workpiece W, so that the dirt on the workpiece W can be effectively removed.

  Further, when the above cleaning method is performed by the cleaning apparatus S of the present embodiment, the cleaning liquid passes over the upper edge 11 of the cleaning tank 1 as the cleaning liquid is supplied from the shower head 35 to the cleaning tank 1 in the jet cleaning process. At this time, the cleaning liquid intensively flows out from the notch 12 formed in the upper edge 11. Therefore, since the flow velocity of the overflow flow is faster than when the upper edge 11 is linear, dust or the like floating on the surface of the cleaning liquid easily flows out from the cleaning tank 1. In the present embodiment, since the corner portion 11a is the valley portion 12b of the notch 12, dust and the like accumulated at the four corners can flow out. Therefore, dust floating in the cleaning tank 1 can be reduced, and reattachment of dust to the workpiece W can be suppressed.

  In this embodiment, the temperature of the cleaning liquid is adjusted by the heater 15 immediately before or after the ultrasonic cleaning process, and the temperature of the cleaning liquid in the cleaning tank 1 is set to 35 ° C. or higher and 45 ° C. or lower. When the cleaning liquid is a fluorine-based solvent such as HFC or HFE, the ultrasonic transmission is highest at 35 ° C. or higher and 45 ° C. or lower, so that the effect of ultrasonic cleaning is enhanced by adjusting the temperature in this way. Can do.

  After the ultrasonic cleaning process and the jet cleaning process are finished, the workpiece W is pulled up to the upper space 1a. At this time, after the main piping system 3 is stopped and the cleaning liquid is circulated through the sub piping system 8 for a while, the sub piping system 8 is stopped, the main piping system 3 is opened again, and the shower W is put on the workpiece W from the cleaning tank 1. By pulling up, the reattachment of dust can be further prevented. After being lifted from the cleaning tank 1, the shower unit 34 returns to the cleaning tank 1, and the workpiece W is rinsed by the condensation of the cleaning agent vapor from the steam generation tank 4. After the steam cleaning is completed, the workpiece W is placed at the position of the cooling coil 5 and subjected to a drying process.

  In the above embodiment, the following modifications may be made.

(Modification 1)
As shown in FIG. 1, the shower head 35 may be provided with an ultrasonic oscillator 36 (second ultrasonic oscillator) integrally. Specifically, the ultrasonic oscillator 36 is attached in the vicinity of the nozzle of the shower head 35, and the ultrasonic wave is used to vibrate the jet generated by the shower head 35 using the ultrasonic oscillator 36. Since the ultrasonic wave oscillated from the oscillator 36 and the cleaning liquid ejected from the shower head 35 are in the same direction, the ultrasonic vibration and the flow of the cleaning liquid are synergistic and effective cleaning can be performed. In addition, it is preferable to vibrate the cleaning liquid ejected from the shower head 35 with high-frequency (for example, 430 kHz or more) ultrasonic waves by the ultrasonic oscillator 36.

  It is also possible to output a control signal from the control panel 7 to the ultrasonic oscillator 36 to control the operation timing. At this time, when the ultrasonic oscillator 36 and the pump 31 are operated, as a result, the cleaning liquid is ejected from the shower head 35 toward the work W, and cleaning by the jet cleaning method is performed. Further, the cleaning liquid ejected from the shower head 35 is vibrated by the ultrasonic oscillator 36.

  In this way, minute dust that could not be removed by a simple cleaning liquid flow can be dropped from the workpiece W. At this time, the control panel 7 sets the excitation frequency of the ultrasonic oscillator 36 to a high frequency (430 kHz or more). In this way, the use of high-frequency ultrasonic waves increases the cleaning effect.

  Note that the ultrasonic oscillator 36 may be operated after the workpiece W is pulled up to the upper space 1a on the surface of the cleaning liquid.

(Modification 2)
During the jet cleaning process, the ultrasonic oscillator 14 may be in a stopped state or in an operating state.

(Modification 3)
During the ultrasonic single cleaning process in the first modification, the ultrasonic oscillator 36 may be in a stopped state or in an operating state.

(Modification 4)
In the above embodiment, the following modifications may be made. In the steam cleaning process, when the workpiece W is heated together with the cleaning liquid, the cleaning agent steam is less likely to condense and the effect of the steam cleaning is low. Therefore, a cooling tub is provided in the cleaning device S, and before the steam cleaning process, the workpiece W pulled up from the cleaning liquid is immersed in the cooling tub at one end, or a part of the overflow flow is introduced into a low-temperature tank to be cooled. The temperature of the workpiece W may be lowered by applying the cleaning liquid supplied from the tank to the workpiece W.

  Further, in the above embodiment, the shower unit 34 has a structure in which the shower head 35 is disposed opposite to both sides of the workpiece W. However, depending on the shape of the workpiece W, the workpiece W is disposed on both sides of the shower head 35. Alternatively, a structure in which the cleaning liquid is ejected from both surfaces of the shower head 35 may be employed. This configuration has the advantage that only one shower head 35 is required.

It is a block diagram of the washing | cleaning apparatus to which this invention is applied. It is a perspective view of the washing tank of the washing device to which the present invention is applied.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Washing tank 2 Overflow tank 3 Main piping system 4 Steam generating tank 5 Cooling coil 6 Water separation tank 7 Control panel 8 Sub piping system 11 Upper edge 11a Corner part 12 Notch 12a Mountain part 12b Valley part 13a Flow path 14 Ultrasonic oscillation Child (first ultrasonic wave generating means)
15 Heater 31 Pump (jet generation means)
32 Filter 33 Tip 34 Shower unit (jet generation means)
35 Shower head 36 Ultrasonic oscillator (second ultrasonic generator)
41 Heater 43, 44 Filter 45 Circulation channel 51, 52 Piping 81 Valve 82 Filter S Cleaning device W Workpiece

Claims (6)

Cleaning using both an ultrasonic cleaning method in which the cleaning liquid in which the work is immersed in the cleaning tank is ultrasonically vibrated and a jet cleaning method in which a jet of the cleaning liquid is supplied toward the work immersed in the cleaning liquid In the method
A cleaning method characterized in that at least an ultrasonic single cleaning step for cleaning by the ultrasonic cleaning method in a state where supply of the jet flow is stopped and a jet cleaning step for cleaning by the jet cleaning method are alternately performed. . The cleaning method according to claim 1,
In the jet cleaning step, the cleaning liquid is supplied while being vibrated by ultrasonic waves. The cleaning method according to claim 1 or 2,
The cleaning liquid is a fluorinated solvent,
When performing the ultrasonic cleaning method, the cleaning liquid in the cleaning tank is adjusted to a temperature of 35 ° C. or higher and 45 ° C. or lower. A cleaning tank for immersing the workpiece in the cleaning liquid;
An ultrasonic oscillating means for vibrating the cleaning liquid in the cleaning tank by ultrasonic;
Jet generating means for generating a jet of cleaning liquid toward the workpiece immersed in the cleaning liquid;
Control means for controlling the ultrasonic oscillation means and the jet generation means,
The control means executes at least an ultrasonic single cleaning process for operating the first ultrasonic oscillation means in a state where the jet generating means is stopped and a jet cleaning process for operating the jet generating means. A cleaning device characterized by. The cleaning apparatus according to claim 4, wherein
As the ultrasonic oscillating means, the first ultrasonic generating means installed on the bottom of the cleaning tank, and the second ultrasonic oscillating means formed integrally with the jet generating means,
In the ultrasonic single cleaning step, the control means operates only the first ultrasonic generation means, or both the first ultrasonic generation means and the second ultrasonic generation means, and the jet cleaning. In the process, the second ultrasonic wave generating means is operated or stopped. The cleaning apparatus according to claim 4 or 5,
The cleaning apparatus according to claim 1, wherein the cleaning tank includes an overflow portion including a plurality of cutout portions having upper end edges cut out.

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