CN107297357B - Chemical cleaning agent recovery device and spot cleaning system comprising same - Google Patents

Chemical cleaning agent recovery device and spot cleaning system comprising same Download PDF

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Publication number
CN107297357B
CN107297357B CN201710243510.5A CN201710243510A CN107297357B CN 107297357 B CN107297357 B CN 107297357B CN 201710243510 A CN201710243510 A CN 201710243510A CN 107297357 B CN107297357 B CN 107297357B
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cleaning agent
chemical cleaning
chemical
cleaning
recovery device
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CN107297357A (en
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金铉泰
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/14Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)

Abstract

The present invention relates to a chemical cleaner recovery apparatus having a flow disrupter and a spot cleaning system including the same, the spot cleaning system including: a storage tank storing a chemical cleaning agent; a cleaning chamber for receiving the chemical cleaning agent supplied from the storage tank and cleaning the object to be cleaned; a chemical cleaning agent recovery device which contains a chemical cleaning agent for cleaning the object to be cleaned and liquefies the vaporized chemical cleaning agent; and a ring blower for sucking the vaporized chemical cleaning agent in the cleaning chamber, blowing the chemical cleaning agent into the chemical cleaning agent recovery device, and blowing the residual gas recovered by the chemical cleaning agent recovery device into the cleaning chamber.

Description

Chemical cleaning agent recovery device and spot cleaning system comprising same
Technical Field
The present invention relates to a chemical cleaning agent recovery apparatus and a spot cleaning system including the same, and more particularly, to a chemical cleaning agent recovery apparatus having a flow disrupter capable of minimizing waste of a chemical cleaning agent by increasing a recovery rate of a highly volatile chemical cleaning agent (cleaning chemical) for cleaning a cleaning object, and a spot cleaning system including the same.
Background
If foreign matter such as dust adheres to the surface of a lens (lens) used in a camera or the like, the amount of transmitted light is reduced by the foreign matter for an image captured by the light transmitted through the lens module, so that the captured image becomes dark as a whole or a shadow of the foreign matter appears.
Therefore, a lens cleaning operation for cleaning foreign substances attached to the surface of the lens is required in the lens manufacturing process, and such a cleaning operation is generally performed by air blowing (air blow) or a chemical cleaning agent.
Since the chemical cleaning agent used in the cleaning operation generally has a strong volatility, there is a problem in that a large amount of the chemical cleaning agent is vaporized and wasted in the cleaning operation.
Also, the chemical cleaning agent wasted by vaporization causes an increase in the cost of the cleaning work, and thus also causes a problem of an increase in the manufacturing cost of the lens.
[ Prior art documents ]
[ patent document ]
(patent document 0001) KR 10-1562206B1
Disclosure of Invention
Technical problem to be solved by the invention
The present invention has been made to solve the conventional problems, and an object of the present invention is to provide a chemical cleaning agent recovery apparatus including a Flow Disturbance Objects (Flow Disturbance Objects) capable of improving a recovery rate of a highly volatile chemical cleaning agent used for cleaning a cleaning object such as a lens (used in a camera or the like) to minimize waste of the chemical cleaning agent, and a stain cleaning system including the same.
However, the object of the present invention is not limited thereto, and those skilled in the art can clearly understand other objects not mentioned from the following description.
Technical scheme
To achieve the above object, the present invention provides a chemical cleaning agent recovery apparatus having a flow disrupter, comprising:
a main body having a housing space for capturing a chemical cleaning agent used for cleaning an object to be cleaned; a condensation pipe provided in the main body, for condensing the vaporized chemical cleaning agent collected in the storage space by maintaining the atmosphere in the storage space at a temperature equal to or lower than a liquefaction point of the chemical cleaning agent; a plurality of turbulence bodies which are provided in the form of particles in the housing space and which cause the vaporized chemical cleaning agent to flow in a turbulent manner so as to increase the retention time of the vaporized chemical cleaning agent; and a discharge pipe for discharging the liquefied chemical cleaning agent to the outside of the housing space.
The flow disturbance body is a spherical body, and a gap is formed between the plurality of flow disturbance bodies.
The flow disturbing body is characterized in that it is tightly filled in the housing space.
The flow disturbing body is characterized by being made of a metal material.
The flow disturbing body is characterized in that it is in contact with the condensation pipe.
A spot cleaning system including a chemical cleaning recovery device having a flow disrupter, comprising:
a storage tank storing a chemical cleaning agent; a cleaning chamber for receiving the chemical cleaning agent supplied from the storage tank and cleaning the object to be cleaned; a chemical cleaning agent recovery device which contains a chemical cleaning agent for cleaning the object to be cleaned and liquefies the vaporized chemical cleaning agent; and a ring blower for sucking the vaporized chemical cleaning agent in the cleaning chamber, blowing the chemical cleaning agent into the chemical cleaning agent recovery device, and blowing the residual gas recovered by the chemical cleaning agent recovery device into the cleaning chamber.
A discharge pipe and a supply pipe which are provided at a lower portion of the clean room and face each other, wherein the discharge pipe discharges a chemical cleaning agent used for cleaning the clean room from the clean room and moves the chemical cleaning agent to the chemical cleaning agent recovery device; and a supply pipe for supplying the residual gas recovered by the chemical cleaning agent recovery device to the cleaning chamber.
The discharge pipe is connected in series to the ring blower and the chemical cleaning agent recovery device corresponding to the suction direction of the ring blower, and the supply pipe is connected in series to the ring blower and the chemical cleaning agent recovery device corresponding to the discharge direction of the ring blower.
Advantageous effects
The chemical cleaning agent recovery device provided with the flow disturbing body and the spot cleaning system comprising the same have the following effects:
first, the amount of the vaporized chemical cleaning agent captured can be increased by increasing the residence time of the vaporized chemical cleaning agent in the chemical cleaning agent recovery apparatus.
Second, the vaporized chemical detergent is not released to the outside, but the recovery rate of the chemical detergent can be maximized with circulation.
Third, the vaporized chemical cleaning agent generated in the cleaning operation of the cleaning object is condensed and restored to the storage tank, so that the waste of the cleaning solution can be minimized.
Fourth, by condensing and reducing the vaporized chemical cleaning agent, waste of the chemical cleaning agent can be minimized, and thus cleaning cost and manufacturing cost of the cleaning object can be reduced.
Drawings
Fig. 1 is a layout view of a spot cleaning system according to a first embodiment of the invention.
Fig. 2 is a perspective view of a chemical cleaning agent recovery apparatus according to a first embodiment of the present invention.
Fig. 3 is a sectional view of a chemical cleaning agent recovery apparatus according to a first embodiment of the present invention.
Fig. 4 is a side view and a partial detailed view showing the lower portion of the cleaning chamber according to the first embodiment of the present invention.
Description of reference numerals:
the structure of the system is as follows:
10: cleaning an object;
110: a clean room; 120: a storage tank;
130: a separation tank; 140: a ring blower;
150: a chemical cleaning agent recovery unit; 160: a Chiller (beller);
partial structure of the cleaning chamber:
111: a discharge pipe; 112: a supply pipe;
113: a shower head; 114: a cooling water supply pipe;
115: a discharge pipe;
partial structure of chemical cleaning agent recovery device:
151: a main body; 152: a condenser tube;
153: a partition plate; 154: a cooling water supply pipe;
155: a flow disrupter; 156: a discharge pipe;
157: and a condensate discharge pipe.
Detailed Description
Preferred embodiments of the present invention, which can embody the objects of the present invention, are described in detail below with reference to the accompanying drawings. In describing the embodiments of the present invention, the same names and the same symbols are used for the same structures, and additional description thereof will be omitted.
The overall structure of a spot cleaning system according to one embodiment of the invention is illustrated by the layout diagram of the spot cleaning system according to the first embodiment of the invention of fig. 1.
The cleaning chamber 110 is a component that provides a space into which the cleaning object 10 is introduced and cleaned. The cleaning chamber 110 may be implemented by any structure as long as it is a unit that can clean the cleaning target object 10. For example, the cleaning object 10 may be cleaned by providing a plurality of Shower heads 113(Shower nozzles) in the cleaning chamber 110 and spraying a chemical cleaner at a high pressure through the Shower heads 113. In this case, as a Chemical cleaning agent for cleaning the cleaning object 10, hydrofluoroether (HFE Chemical) may be used in the cleaning chamber 110.
The storage tank 120 stores a chemical cleaning agent therein, and supplies the chemical cleaning agent to the inside of the cleaning chamber 110 when cleaning is performed in the cleaning chamber 110. The shape, size, etc. of the reservoir 120 can be implemented in a variety of shapes and sizes depending on the use and the location where the spot cleaning system is installed.
The separation tank 130 is connected to the cleaning chamber 110 and the storage tank 120, which spray cleaning liquid to clean the cleaning object. The separation tank 130 can reduce the chemical cleaning agent that is not vaporized and flows in a liquid state among the chemical cleaning agents injected to clean the cleaning object 10, separate moisture, impurities, and the like from the chemical cleaning agent, and reduce the separated chemical cleaning agent to the storage tank 120.
The separation tank 130 may be any device as long as it can separate water and impurities from the chemical cleaning agent and can separate pure chemical cleaning agent, but a water separation tank is preferably used.
The chemical cleaning agent vaporized in the cleaning chamber 110 is forcibly sucked by a Ring Blower 140(Ring Blower) to be described later, and is discharged from the cleaning chamber 110 through a discharge pipe 111 to be sent to the chemical cleaning agent recovery apparatus 150.
The ring blower 140 forcibly sucks the vaporized chemical cleaning agent existing in the cleaning chamber 110 to blow the chemical cleaning agent into a chemical cleaning agent recovery device 150 described below, and blows the gas remaining after the chemical cleaning agent is recovered by the chemical cleaning agent recovery device 150 into the cleaning chamber 110. Any air blowing device other than ring blower 140 may be used as long as it can achieve the above object.
The chemical cleaning agent recovery device 150 is connected to the cleaning chamber 110, sucks and stores the chemical cleaning agent vaporized in the cleaning chamber 110, liquefies the vaporized chemical cleaning agent, and returns the liquefied chemical cleaning agent to the storage tank 120. The structure of the chemical cleaning agent recovery apparatus 150 will be described in detail with reference to fig. 2 and 3.
The gas remaining after the liquefaction of the chemical cleaning agent recovery apparatus 150 is sucked again by the ring blower 140 and supplied again to the cleaning chamber 110 through the supply pipe 112. The non-liquefied gas is not discharged to the outside but circulated in the system, so that the non-liquefied chemical cleaning agent can be recovered in the circulation process, thereby improving the recovery rate of the chemical cleaning agent.
The discharge pipe 111 and the supply pipe 112 provided in the cleaning chamber 110, and the ring blower 140 will be described in detail with reference to fig. 4.
Hereinafter, the chemical cleaning agent recovery apparatus 150 according to the first embodiment of the present invention will be described in detail with reference to the perspective view and the exploded view of the chemical cleaning agent recovery apparatus of fig. 2 and 3.
An accommodation space is formed inside the main body 151, and a chemical cleaning agent used for cleaning the cleaning object 10 in the cleaning chamber 110 is trapped in the accommodation space.
The housing space of the main body 151 is provided with a condenser tube 152. The cooling water flows inside the condensation duct 152 so that the atmosphere of the housing space is maintained at a temperature below the liquefaction point of the chemical cleaning agent. As the atmosphere of the housing space is maintained below the liquefaction point, vaporized chemical cleaning agent trapped in the housing space is condensed.
The condenser tube 152 is connected to a cooler 160 (chiller). The cooler 160 is a device for continuously reducing the temperature of the cooling water flowing through the condensation duct 152, and any device may be used as long as it can achieve the purpose. In general, a place where industrial water is supplied is generally a use environment where cold water is not easily supplied, and therefore, such a device for continuously reducing the temperature of cooling water is required.
The housing space of the main body 151 is provided with one or more partitions 153. A plurality of holes are formed on the separators 153 and gas may pass through between the separators. The partition 153 increases the residence time of the vaporized chemical cleaning agent trapped in the receiving space.
The flow disrupter 155 is a plurality of particles provided in the housing space of the main body. The flow disrupter 155 causes the vaporized chemical cleaning agent trapped in the storage space to flow turbulently (turbulently), thereby increasing the retention time of the vaporized chemical cleaning agent. The vaporized chemical cleaning agent is condensed due to the atmosphere in the housing space while the vaporized chemical cleaning agent stays in the housing space, and thus the vaporized chemical cleaning agent that has not been condensed cannot be discharged from the housing space due to the turbulent flow of the flow disturbing body 155, but stays and is condensed, thereby maximizing the recovery rate of the chemical cleaning agent.
The flow disrupter 155 may be comprised of particles of various shapes, and is preferably a sphere. The shape of the fluid disturbance body 155 is expressed by particles, but the size is not limited to be as small as the millet of the grain, and may be a size of a stone level (about 5cm in diameter) or a size of a palm level (about 15cm in diameter), and may be a size larger than this, if necessary. Moreover, not all of the plurality of fluid disturbance bodies 155 filling the housing space have the same shape.
That is, it is sufficient that the flow disturbing body 155 forms a gap, the gas passes through the formed gap, and the vaporized chemical cleaning agent trapped in the housing space is turbulently agitated by the diffuse reflection surface formed on the surface of the flow disturbing body 155.
The plurality of flow disruptors 155 are tightly filled in the housing space. The tight filling means that the flow disturbing body 155 cannot be filled in the housing space any more, and is not filled completely in a manner of a void where gas does not flow in the housing space. If the flow disruptors 155 are tightly packed, the turbulence formation zone increases, so that the residence time of the chemical cleaner increases.
The flow disrupter 155 is preferably made of a metal. In particular, among metals, metals having high thermal conductivity are preferable. The surface temperature of the flow disrupter 155 is preferably equal to or lower than the liquefaction point. The vaporized chemical detergent in contact with the flow disrupters 155 is condensed by heat exchange with the flow disrupters 155, thereby maximizing the recovery rate of the chemical detergent.
Preferably, the flow disruptors 155 contact the condenser tube 152, thereby transferring heat absorbed from the chemical cleaner to the condenser tube 152. That is, it is preferable that the heat absorbed from the chemical cleaning agent is transferred to the condenser pipe 152 by contact between the flow disturbance bodies 155, compared to a method in which the heat absorbed from the chemical cleaning agent is transferred to the condenser pipe 152 by the gas trapped in the housing space by the flow disturbance bodies 155.
The chemical cleaning agent condensed in the main body 151 is discharged to the outside of the receiving space through a discharge pipe 156 provided at a lower portion of the main body 151. The discharge pipe 156 is connected to the separation tank 130, and separates only pure chemical detergent in the gas condensed in the separation tank 130, thereby being reduced to the storage tank 120.
Further, since the outer wall of the main body 151 is cooler than the atmosphere, water vapor can be condensed on the outer wall, and a condensed liquid discharge pipe 157 that collects and discharges the water vapor may be further provided.
The gas remaining in the chemical cleaning agent recovery apparatus 150 without being condensed is sucked by the ring blower 140 and transferred to the cleaning chamber 110 again through the supply pipe 112 provided at the lower portion of the cleaning chamber 110.
The structure of the vaporized chemical cleaning agent circulating in the cleaning chamber 110 is observed through a side view of the lower portion of the cleaning chamber according to the first embodiment of the present invention and a partially detailed view of fig. 4.
The discharge pipe 111 and the supply pipe 112 are formed to face each other at a lower portion of the cleaning chamber 110. In general, since the chemical cleaning agent molecules are heavier than gas molecules in the atmosphere, a discharge pipe 111 for discharging the chemical cleaning agent used for cleaning is preferably provided at a lower portion of the cleaning chamber 110.
Since Hydrofluoroether (HFE) used as a chemical cleaner is highly volatile, the vaporized Hydrofluoroether (HFE) can be released to the outside of the system when the cleaning chamber 110 is opened, and thus the inside of the cleaning chamber 110 should be in a low pressure state compared to the atmospheric pressure or Clean Room pressure of the cleaning chamber 110.
The chemical cleaning agent for cleaning in the cleaning chamber 110 is discharged through the discharge pipe 111 due to the strong suction force of the ring blower 140, and the gas remaining after the recovery of the chemical cleaning agent recovery device 150 is strongly supplied to the lower portion of the cleaning chamber 110 through the supply pipe 112, and at this time, the strong flow of the gas occurs in the lower space of the cleaning chamber 110, so that the pressure is reduced compared to the other space of the cleaning chamber 110. Therefore, the fluid existing in the cleaning chamber 110 moves to the lower portion of the cleaning chamber 110 and flows to the discharge pipe 112.
A cooling water supply pipe 114 connected to the cooler 160 is provided at a lower portion of the cleaning chamber 110 so that the chemical cleaning agent for cleaning is liquefied during the exhaust.
The chemical cleaning agent in a liquid state in the fluid that is not discharged to the discharge pipe 111 is discharged to the outside of the cleaning chamber 110 through the discharge pipe 115 provided at the lower portion of the cleaning chamber 110. The discharge pipe 115 is connected to the separation tank 130, and pure chemical detergent in the condensed gas is separated in the separation tank 130 to be reduced to the storage tank 120.
The discharge pipe 111 connects the cleaning chamber 110 and the chemical cleaning agent recovery apparatus 150, the ring blower 140 is connected to the chemical cleaning agent recovery apparatus 150 in series with the connection to the cleaning chamber 110 and the chemical cleaning agent recovery apparatus 150 corresponding to the suction direction, and is connected to the supply pipe 112 of the cleaning chamber 110 in series corresponding to the discharge direction of the ring blower 140. Thus, the circulation of the chemical cleaning agent between the cleaning chamber 110 and the chemical cleaning agent recovery apparatus 150 is realized by the ring type blower 140, so that the chemical cleaning agent does not flow out to the outside of the system, and the recovery rate of the chemical cleaning agent is maximized.
As described above, according to the preferred embodiments of the present invention, it is obvious to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit or scope of the present invention, in addition to the embodiments described above. Accordingly, the above embodiments are not limitative, but illustrative. Accordingly, the invention is not limited by the foregoing description, but may be modified within the scope and equivalents of the appended claims.

Claims (7)

1. A spot cleaning system, comprising:
a storage tank storing a chemical cleaning agent;
a cleaning chamber for receiving the chemical cleaning agent supplied from the storage tank to clean the cleaning object;
a chemical cleaning agent recovery device that stores a chemical cleaning agent for cleaning the cleaning target object and liquefies the vaporized chemical cleaning agent;
a ring blower which sucks the vaporized chemical cleaning agent existing in the cleaning chamber and blows the chemical cleaning agent recovery device, and blows the gas remaining after the recovery by the chemical cleaning agent recovery device into the cleaning chamber;
a separation tank for separating moisture and impurities from the liquefied chemical cleaning agent supplied from the cleaning chamber and the chemical cleaning agent recovery device, and supplying the chemical cleaning agent from which the moisture and impurities have been separated to the storage tank,
wherein the chemical cleaning agent recovery apparatus comprises:
a main body having a housing space for capturing a chemical cleaning agent used for cleaning an object to be cleaned;
a condensation pipe provided in the main body, the condensation pipe maintaining an atmosphere of the housing space at a temperature equal to or lower than a liquefaction point of the chemical cleaning agent so as to condense the vaporized chemical cleaning agent trapped in the housing space;
a plurality of flow disturbance bodies which are provided in the receiving space in a granular form and cause the vaporized chemical cleaning agent to perform turbulent flow so that the retention time of the vaporized chemical cleaning agent is increased; and
a discharge pipe that discharges the liquefied chemical cleaning agent to the outside of the housing space.
2. The spot cleaning system of claim 1,
the flow disturbing body is a spherical body, so that a gap is formed between the plurality of flow disturbing bodies.
3. The spot cleaning system of claim 1,
the flow disturbing body is tightly filled in the accommodating space.
4. The spot cleaning system of claim 1,
the flow disturbing body is made of metal.
5. The spot cleaning system of claim 1,
the flow disrupter is in contact with the condenser tube.
6. The spot cleaning system of claim 1,
a discharge pipe and a supply pipe which are opposite to each other are arranged at the lower part of the cleaning chamber, wherein,
the discharge pipe that discharges the chemical cleaning agent used in the cleaning of the cleaning chamber from the cleaning chamber and moves the chemical cleaning agent to the chemical cleaning agent recovery device;
the supply pipe supplies the gas remaining after the recovery by the chemical cleaning agent recovery device to the cleaning chamber.
7. The spot cleaning system of claim 6,
the discharge pipe connects the ring blower and the chemical detergent recovery device in series corresponding to a suction direction of the ring blower, and the supply pipe connects the ring blower and the chemical detergent recovery device in series corresponding to a discharge direction of the ring blower.
CN201710243510.5A 2016-04-15 2017-04-14 Chemical cleaning agent recovery device and spot cleaning system comprising same Active CN107297357B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020160045859A KR101698559B1 (en) 2016-04-15 2016-04-15 Cleaning chemical recovery apparatus comprising flow disturbance objects and spot cleaner system including the same
KR10-2016-0045859 2016-04-15

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CN107297357B true CN107297357B (en) 2020-12-18

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KR101998254B1 (en) * 2017-03-27 2019-10-01 김현태 Spot Cleaner System
KR102163293B1 (en) * 2018-10-10 2020-10-08 (주)엘케이시스템즈 Flux cleaning system for semiconductor wafer
KR102163298B1 (en) * 2018-10-10 2020-10-08 (주)엘케이시스템즈 Flux cleaning method for semiconductor wafer

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DE1751489A1 (en) * 1968-06-07 1971-07-08 Aluminium U Metallwarenfabrik Heat exchanger for the liquefaction or evaporation of refrigerants
JP3248994B2 (en) * 1993-08-18 2002-01-21 東静電気株式会社 Cleaning and drying equipment for parts
KR101562206B1 (en) 2014-10-20 2015-10-22 김현태 Spot cleaning system

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