JP2009123656A5 - - Google Patents

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Publication number
JP2009123656A5
JP2009123656A5 JP2007299326A JP2007299326A JP2009123656A5 JP 2009123656 A5 JP2009123656 A5 JP 2009123656A5 JP 2007299326 A JP2007299326 A JP 2007299326A JP 2007299326 A JP2007299326 A JP 2007299326A JP 2009123656 A5 JP2009123656 A5 JP 2009123656A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007299326A
Other versions
JP2009123656A (ja
JP5014080B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2007299326A external-priority patent/JP5014080B2/ja
Priority to JP2007299326A priority Critical patent/JP5014080B2/ja
Priority to US12/270,094 priority patent/US8071920B2/en
Priority to TW97143807A priority patent/TWI471054B/zh
Priority to KR1020080114290A priority patent/KR101470017B1/ko
Priority to CN200810176276XA priority patent/CN101442845B/zh
Publication of JP2009123656A publication Critical patent/JP2009123656A/ja
Publication of JP2009123656A5 publication Critical patent/JP2009123656A5/ja
Publication of JP5014080B2 publication Critical patent/JP5014080B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007299326A 2007-11-19 2007-11-19 面状ヒータ Expired - Fee Related JP5014080B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007299326A JP5014080B2 (ja) 2007-11-19 2007-11-19 面状ヒータ
US12/270,094 US8071920B2 (en) 2007-11-19 2008-11-13 Planar heater
TW97143807A TWI471054B (zh) 2007-11-19 2008-11-13 平面狀加熱器
KR1020080114290A KR101470017B1 (ko) 2007-11-19 2008-11-17 면상 히터
CN200810176276XA CN101442845B (zh) 2007-11-19 2008-11-19 面状加热器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007299326A JP5014080B2 (ja) 2007-11-19 2007-11-19 面状ヒータ

Publications (3)

Publication Number Publication Date
JP2009123656A JP2009123656A (ja) 2009-06-04
JP2009123656A5 true JP2009123656A5 (ja) 2010-12-09
JP5014080B2 JP5014080B2 (ja) 2012-08-29

Family

ID=40727041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007299326A Expired - Fee Related JP5014080B2 (ja) 2007-11-19 2007-11-19 面状ヒータ

Country Status (5)

Country Link
US (1) US8071920B2 (ja)
JP (1) JP5014080B2 (ja)
KR (1) KR101470017B1 (ja)
CN (1) CN101442845B (ja)
TW (1) TWI471054B (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4913695B2 (ja) * 2007-09-20 2012-04-11 東京エレクトロン株式会社 基板処理装置及びそれに用いる基板載置台
JP2009231401A (ja) * 2008-03-21 2009-10-08 Tokyo Electron Ltd 載置台構造及び熱処理装置
US9719169B2 (en) * 2010-12-20 2017-08-01 Novellus Systems, Inc. System and apparatus for flowable deposition in semiconductor fabrication
US10224182B2 (en) * 2011-10-17 2019-03-05 Novellus Systems, Inc. Mechanical suppression of parasitic plasma in substrate processing chamber
US9088085B2 (en) * 2012-09-21 2015-07-21 Novellus Systems, Inc. High temperature electrode connections
US10177014B2 (en) * 2012-12-14 2019-01-08 Applied Materials, Inc. Thermal radiation barrier for substrate processing chamber components
US9847222B2 (en) 2013-10-25 2017-12-19 Lam Research Corporation Treatment for flowable dielectric deposition on substrate surfaces
US10049921B2 (en) 2014-08-20 2018-08-14 Lam Research Corporation Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor
US10388546B2 (en) 2015-11-16 2019-08-20 Lam Research Corporation Apparatus for UV flowable dielectric
US9916977B2 (en) 2015-11-16 2018-03-13 Lam Research Corporation Low k dielectric deposition via UV driven photopolymerization
US10674566B2 (en) * 2017-03-02 2020-06-02 Coorstek Kk Planar heater
US10147610B1 (en) 2017-05-30 2018-12-04 Lam Research Corporation Substrate pedestal module including metallized ceramic tubes for RF and gas delivery
CN207995432U (zh) * 2018-04-13 2018-10-19 广州洲宗金属制品有限公司 一种钎焊式铝合金复合底板及发热盘
US11600470B2 (en) * 2019-12-27 2023-03-07 Applied Materials, Inc. Targeted heat control systems
US11699602B2 (en) * 2020-07-07 2023-07-11 Applied Materials, Inc. Substrate support assemblies and components

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5478429A (en) * 1993-01-20 1995-12-26 Tokyo Electron Limited Plasma process apparatus
JP3165938B2 (ja) * 1993-06-24 2001-05-14 東京エレクトロン株式会社 ガス処理装置
CN1066903C (zh) * 1995-07-26 2001-06-06 保定风帆集团有限责任公司 特种高温远红外定向强辐射器
US6066836A (en) * 1996-09-23 2000-05-23 Applied Materials, Inc. High temperature resistive heater for a process chamber
JPH11343571A (ja) * 1998-05-29 1999-12-14 Ngk Insulators Ltd サセプター
JP4641569B2 (ja) * 1998-07-24 2011-03-02 日本碍子株式会社 窒化アルミニウム質焼結体、耐蝕性部材、金属埋設および半導体保持装置
JP3434721B2 (ja) * 1998-11-30 2003-08-11 東芝セラミックス株式会社 封止端子
KR100334993B1 (ko) * 1998-12-01 2002-05-02 추후제출 히터
JP4697909B2 (ja) * 2000-05-25 2011-06-08 コバレントマテリアル株式会社 カーボンワイヤー発熱体封入ヒータ
EP1349429A3 (en) * 2002-03-25 2007-10-24 Tokyo Electron Limited Carbon wire heating object sealing heater and fluid heating apparatus using the same heater
JP4083512B2 (ja) * 2002-08-30 2008-04-30 東京エレクトロン株式会社 基板処理装置
CN2699613Y (zh) * 2004-05-08 2005-05-11 戴国胜 一种远红外电热装置
JP4756695B2 (ja) * 2006-02-20 2011-08-24 コバレントマテリアル株式会社 面状ヒータ
JP2007258585A (ja) * 2006-03-24 2007-10-04 Tokyo Electron Ltd 基板載置機構および基板処理装置
JP4913695B2 (ja) * 2007-09-20 2012-04-11 東京エレクトロン株式会社 基板処理装置及びそれに用いる基板載置台

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