JP2009098044A - 形状測定装置 - Google Patents

形状測定装置 Download PDF

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Publication number
JP2009098044A
JP2009098044A JP2007270963A JP2007270963A JP2009098044A JP 2009098044 A JP2009098044 A JP 2009098044A JP 2007270963 A JP2007270963 A JP 2007270963A JP 2007270963 A JP2007270963 A JP 2007270963A JP 2009098044 A JP2009098044 A JP 2009098044A
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JP
Japan
Prior art keywords
unit
test object
irradiation
light
slit light
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Pending
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JP2007270963A
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English (en)
Japanese (ja)
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JP2009098044A5 (enExample
Inventor
Tomoaki Yamada
智明 山田
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Nikon Corp
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Nikon Corp
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Priority to JP2007270963A priority Critical patent/JP2009098044A/ja
Publication of JP2009098044A publication Critical patent/JP2009098044A/ja
Publication of JP2009098044A5 publication Critical patent/JP2009098044A5/ja
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP2007270963A 2007-10-18 2007-10-18 形状測定装置 Pending JP2009098044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007270963A JP2009098044A (ja) 2007-10-18 2007-10-18 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007270963A JP2009098044A (ja) 2007-10-18 2007-10-18 形状測定装置

Publications (2)

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JP2009098044A true JP2009098044A (ja) 2009-05-07
JP2009098044A5 JP2009098044A5 (enExample) 2010-12-09

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ID=40701186

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JP2007270963A Pending JP2009098044A (ja) 2007-10-18 2007-10-18 形状測定装置

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JP (1) JP2009098044A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014006149A (ja) * 2012-06-25 2014-01-16 Nikon Corp 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、および形状測定プログラム
JP2017026584A (ja) * 2015-07-28 2017-02-02 ブラザー工業株式会社 三次元形状測定装置
WO2025203395A1 (ja) * 2024-03-27 2025-10-02 株式会社ニコン 形状測定システム、構造物の製造方法、構造物製造システム、及び形状測定方法
WO2025203396A1 (ja) * 2024-03-27 2025-10-02 株式会社ニコン 形状測定システム、構造物の製造方法、構造物製造システム、及び形状測定方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001324313A (ja) * 2000-05-16 2001-11-22 Koichi Nakano 三次元形状計測装置
JP2003185420A (ja) * 2001-10-10 2003-07-03 Murata Mfg Co Ltd 三次元形状測定方法、三次元形状測定装置
JP2004037251A (ja) * 2002-07-03 2004-02-05 Fotonikusu:Kk 表面形状測定装置および表面形状測定方法
JP2004309240A (ja) * 2003-04-04 2004-11-04 Olympus Corp ３次元形状測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001324313A (ja) * 2000-05-16 2001-11-22 Koichi Nakano 三次元形状計測装置
JP2003185420A (ja) * 2001-10-10 2003-07-03 Murata Mfg Co Ltd 三次元形状測定方法、三次元形状測定装置
JP2004037251A (ja) * 2002-07-03 2004-02-05 Fotonikusu:Kk 表面形状測定装置および表面形状測定方法
JP2004309240A (ja) * 2003-04-04 2004-11-04 Olympus Corp ３次元形状測定装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014006149A (ja) * 2012-06-25 2014-01-16 Nikon Corp 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、および形状測定プログラム
JP2017026584A (ja) * 2015-07-28 2017-02-02 ブラザー工業株式会社 三次元形状測定装置
WO2025203395A1 (ja) * 2024-03-27 2025-10-02 株式会社ニコン 形状測定システム、構造物の製造方法、構造物製造システム、及び形状測定方法
WO2025203396A1 (ja) * 2024-03-27 2025-10-02 株式会社ニコン 形状測定システム、構造物の製造方法、構造物製造システム、及び形状測定方法

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