JP2009098044A5 - - Google Patents

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Publication number
JP2009098044A5
JP2009098044A5 JP2007270963A JP2007270963A JP2009098044A5 JP 2009098044 A5 JP2009098044 A5 JP 2009098044A5 JP 2007270963 A JP2007270963 A JP 2007270963A JP 2007270963 A JP2007270963 A JP 2007270963A JP 2009098044 A5 JP2009098044 A5 JP 2009098044A5
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JP
Japan
Prior art keywords
slit light
signal
shape measuring
irradiation
test object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007270963A
Other languages
English (en)
Japanese (ja)
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JP2009098044A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007270963A priority Critical patent/JP2009098044A/ja
Priority claimed from JP2007270963A external-priority patent/JP2009098044A/ja
Publication of JP2009098044A publication Critical patent/JP2009098044A/ja
Publication of JP2009098044A5 publication Critical patent/JP2009098044A5/ja
Pending legal-status Critical Current

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JP2007270963A 2007-10-18 2007-10-18 形状測定装置 Pending JP2009098044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007270963A JP2009098044A (ja) 2007-10-18 2007-10-18 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007270963A JP2009098044A (ja) 2007-10-18 2007-10-18 形状測定装置

Publications (2)

Publication Number Publication Date
JP2009098044A JP2009098044A (ja) 2009-05-07
JP2009098044A5 true JP2009098044A5 (enExample) 2010-12-09

Family

ID=40701186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007270963A Pending JP2009098044A (ja) 2007-10-18 2007-10-18 形状測定装置

Country Status (1)

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JP (1) JP2009098044A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014006149A (ja) * 2012-06-25 2014-01-16 Nikon Corp 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、および形状測定プログラム
JP6565428B2 (ja) * 2015-07-28 2019-08-28 ブラザー工業株式会社 三次元形状測定装置
WO2025203395A1 (ja) * 2024-03-27 2025-10-02 株式会社ニコン 形状測定システム、構造物の製造方法、構造物製造システム、及び形状測定方法
WO2025203396A1 (ja) * 2024-03-27 2025-10-02 株式会社ニコン 形状測定システム、構造物の製造方法、構造物製造システム、及び形状測定方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001324313A (ja) * 2000-05-16 2001-11-22 Koichi Nakano 三次元形状計測装置
JP2003185420A (ja) * 2001-10-10 2003-07-03 Murata Mfg Co Ltd 三次元形状測定方法、三次元形状測定装置
JP4138380B2 (ja) * 2002-07-03 2008-08-27 株式会社ナノテックス 表面形状測定装置および表面形状測定方法
JP4077754B2 (ja) * 2003-04-04 2008-04-23 オリンパス株式会社 ３次元形状測定装置

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