JP2009088348A - 半導体製造装置 - Google Patents
半導体製造装置 Download PDFInfo
- Publication number
- JP2009088348A JP2009088348A JP2007257768A JP2007257768A JP2009088348A JP 2009088348 A JP2009088348 A JP 2009088348A JP 2007257768 A JP2007257768 A JP 2007257768A JP 2007257768 A JP2007257768 A JP 2007257768A JP 2009088348 A JP2009088348 A JP 2009088348A
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- JP
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- Prior art keywords
- lamp
- substrate
- heating
- wafer
- heating unit
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 238000010438 heat treatment Methods 0.000 claims abstract description 64
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 230000005855 radiation Effects 0.000 abstract description 8
- 239000007789 gas Substances 0.000 description 23
- 229910052736 halogen Inorganic materials 0.000 description 23
- 150000002367 halogens Chemical class 0.000 description 23
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
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- 239000007769 metal material Substances 0.000 description 4
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- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
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- 239000003990 capacitor Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
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- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
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- 125000006850 spacer group Chemical group 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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Images
Abstract
【解決手段】基板加熱手段としてランプ加熱ユニット17を具備する半導体製造装置に於いて、前記ランプ加熱ユニットのランプ1が基板44に対向する加熱部と該加熱部に連続する端部を具備し、該端部は該端部からの輻射熱を反射する端部カバーで覆われた。
【選択図】図1
Description
又、本発明は以下の実施の態様を含む。
2 加熱部
4 発熱線
6 垂直端部
7 絶縁端子部
17 ランプ加熱ユニット
18 サセプタ
37 筒状電極
38 プラズマ生成領域
43 筒状磁石
55 反射ブロック
56 ランプ収納溝
57 空冷空間
58 冷却管
59 端部カバー
60 絶縁材
64 冷却空気吐出ノズル
Claims (1)
- 基板加熱手段としてランプ加熱ユニットを具備する半導体製造装置に於いて、前記ランプ加熱ユニットのランプが基板に対向する加熱部と該加熱部に連続する端部を具備し、該端部は該端部からの輻射熱を反射する端部カバーで覆われたことを特徴とする半導体製造装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007257768A JP5465828B2 (ja) | 2007-10-01 | 2007-10-01 | 基板処理装置及び半導体デバイスの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007257768A JP5465828B2 (ja) | 2007-10-01 | 2007-10-01 | 基板処理装置及び半導体デバイスの製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009088348A true JP2009088348A (ja) | 2009-04-23 |
JP2009088348A5 JP2009088348A5 (ja) | 2010-11-18 |
JP5465828B2 JP5465828B2 (ja) | 2014-04-09 |
Family
ID=40661355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007257768A Active JP5465828B2 (ja) | 2007-10-01 | 2007-10-01 | 基板処理装置及び半導体デバイスの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5465828B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012231001A (ja) * | 2011-04-26 | 2012-11-22 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
KR101331420B1 (ko) | 2011-03-04 | 2013-11-21 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 반도체 장치의 제조 방법 |
JPWO2020188816A1 (ja) * | 2019-03-20 | 2020-09-24 | ||
KR20230098443A (ko) * | 2021-12-24 | 2023-07-04 | (주)보부하이테크 | 용접 결함 및 크랙 발생을 개선한 히터 구조 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154618A (ja) * | 1985-12-26 | 1987-07-09 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
JPS6454294U (ja) * | 1987-09-24 | 1989-04-04 | ||
JPH08292667A (ja) * | 1995-04-21 | 1996-11-05 | Tec Corp | 加熱定着装置 |
JP2000114196A (ja) * | 1998-08-06 | 2000-04-21 | Ushio Inc | 光照射式加熱装置の冷却構造 |
JP2000306857A (ja) * | 1999-02-16 | 2000-11-02 | Ushio Inc | 光照射式加熱処理装置 |
JP2002190452A (ja) * | 2000-10-10 | 2002-07-05 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法並びに熱処理装置及び熱処理方法 |
-
2007
- 2007-10-01 JP JP2007257768A patent/JP5465828B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154618A (ja) * | 1985-12-26 | 1987-07-09 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
JPS6454294U (ja) * | 1987-09-24 | 1989-04-04 | ||
JPH08292667A (ja) * | 1995-04-21 | 1996-11-05 | Tec Corp | 加熱定着装置 |
JP2000114196A (ja) * | 1998-08-06 | 2000-04-21 | Ushio Inc | 光照射式加熱装置の冷却構造 |
JP2000306857A (ja) * | 1999-02-16 | 2000-11-02 | Ushio Inc | 光照射式加熱処理装置 |
JP2002190452A (ja) * | 2000-10-10 | 2002-07-05 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法並びに熱処理装置及び熱処理方法 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101331420B1 (ko) | 2011-03-04 | 2013-11-21 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 반도체 장치의 제조 방법 |
US9236246B2 (en) | 2011-03-04 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and a method of manufacturing a semiconductor device |
US9472424B2 (en) | 2011-03-04 | 2016-10-18 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and a method of manufacturing a semiconductor device |
JP2012231001A (ja) * | 2011-04-26 | 2012-11-22 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
JPWO2020188816A1 (ja) * | 2019-03-20 | 2020-09-24 | ||
WO2020188816A1 (ja) * | 2019-03-20 | 2020-09-24 | 株式会社Kokusai Electric | 基板処理装置、処理容器、反射体及び半導体装置の製造方法 |
JP7227350B2 (ja) | 2019-03-20 | 2023-02-21 | 株式会社Kokusai Electric | 基板処理装置、処理容器、反射体及び半導体装置の製造方法 |
KR20230098443A (ko) * | 2021-12-24 | 2023-07-04 | (주)보부하이테크 | 용접 결함 및 크랙 발생을 개선한 히터 구조 |
KR102656121B1 (ko) * | 2021-12-24 | 2024-04-12 | (주)보부하이테크 | 용접 결함 및 크랙 발생을 개선한 히터 구조 |
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JP5465828B2 (ja) | 2014-04-09 |
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