JP2009080415A - Method of processing conductive material, method of forming conductive material, and processing device of conductive material - Google Patents

Method of processing conductive material, method of forming conductive material, and processing device of conductive material Download PDF

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JP2009080415A
JP2009080415A JP2007251127A JP2007251127A JP2009080415A JP 2009080415 A JP2009080415 A JP 2009080415A JP 2007251127 A JP2007251127 A JP 2007251127A JP 2007251127 A JP2007251127 A JP 2007251127A JP 2009080415 A JP2009080415 A JP 2009080415A
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conductive material
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silver
processing
tank
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Tomoyoshi Hyodo
知義 兵藤
Katsuhiko Tanaka
克彦 田中
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Fujifilm Corp
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<P>PROBLEM TO BE SOLVED: To suppress a defect such as bleeding or burr at a silver wire edge part of a conductive material by local runaway of developing after developing processing. <P>SOLUTION: A developing stop processing tank 18 is provided between a developing processing tank 16 storing a developer 16A and a fixing tank 20 storing a fixing solution 20A along a carrying direction of a photosensitive web 12. The developing stop processing tank 18 stores a stop solution of pH 5 or less. According to this, the photosensitive web 12 leaving the processing tank 16 is carried to the developing stop processing tank 18 and subjected to developing stop processing therein. Therefore, the developer 16A accompanied by the photosensitive web 12 never contacts with the fixing solution 20A, and a defect such as bleeding or burr at the silver line edge part of the conductive material by local runaway of developing can be suppressed. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、支持体上に少なくとも1層の銀塩含有層を有する導電性材料前駆体を露光し、現像処理することにより導電性パターンを形成させる導電性材料の処理方法、導電性材料形成方法及び導電性材料の処理装置に関する。   The present invention relates to a conductive material processing method and a conductive material forming method for forming a conductive pattern by exposing and developing a conductive material precursor having at least one silver salt-containing layer on a support. And an apparatus for processing a conductive material.

銀塩感光材料を露光して現像処理した後、表面抵抗低減処理を施した透光性導電膜として、近年PDP(プラズマディスプレイパネル)の電磁波シールド膜が知られている。   In recent years, an electromagnetic wave shielding film of a plasma display panel (PDP) has been known as a light-transmitting conductive film that has been subjected to exposure processing of a silver salt photosensitive material and development processing and then subjected to surface resistance reduction processing.

特許文献1には、細線等のパターンを銀塩感光材料に露光し、現像、めっき処理して導電性膜を得る方法が開示されている。この方法のなかで現像処理については、現像工程、定着工程、水洗・安定化処理工程の順で実施されることが記載されている。また、得られた現像済み材料を活性化処理、無電解銅めっき、連続電解めっきで処理し、最終的に所望の導電性を持つ透明導電性膜が得られることが記載されている。   Patent Document 1 discloses a method of obtaining a conductive film by exposing a silver salt photosensitive material to a pattern such as a fine line, developing, and plating. In this method, it is described that the development processing is performed in the order of a development step, a fixing step, and a washing / stabilization processing step. Further, it is described that the obtained developed material is processed by activation treatment, electroless copper plating, and continuous electrolytic plating to finally obtain a transparent conductive film having desired conductivity.

特許文献2には、乳剤層が実質的に最上層に配置され、乳剤層に酸化防止剤を含有する感光材料が開示されている。この感光材料では、物理現像やめっき処理が速やかに行われるために乳剤層上に保護層を設けないことが有利であることが記載されている。また、保護層を設けない弊害として、外圧による影響を受けやすく、カブリが起きやすいことが示唆されており、乳剤層に酸化防止剤を含有することで、外圧による影響を低減している。
特開2006−352073号公報 特開2006−228469号公報
Patent Document 2 discloses a light-sensitive material in which an emulsion layer is substantially disposed on the uppermost layer and the emulsion layer contains an antioxidant. In this photosensitive material, it is described that it is advantageous not to provide a protective layer on the emulsion layer because the physical development and the plating treatment are performed quickly. Further, it has been suggested that the adverse effect of not providing a protective layer is that it is easily affected by external pressure and fog is likely to occur, and by containing an antioxidant in the emulsion layer, the effect of external pressure is reduced.
JP 2006-352073 A JP 2006-228469 A

しかし、上記のような技術では、以下のような問題点がある。   However, the above technique has the following problems.

実際に特許文献2(特開2006−228469号公報)に記載された感光材料を用いて、特許文献1(特開2006−352073号公報)で述べられたような現像方法で現像したとき、概ね良好な銀線パターンをもつ透明導電性膜前駆体(めっき前の現像済み品という意味)が得られるが、現像後の定着初期又は現像後の定着槽入口でのスクイズ部において、予期しない現像の局部暴走による銀線エッジ部のにじみ、ギザギザ、樹状の銀析出、スジムラが発生する。これらの銀線エッジ部のにじみ、ギザギザ等の欠陥は現像後透過光で見ていてもよく判らない。しかし、透明導電性膜前駆体をめっきすると、上記の銀線エッジ部の欠陥がめっきで増幅され透過でも見えるようになって故障となる。現像装置における感光材料の搬送速度を2m/分、3m/分、12m/分と生産能力向上のために増速すると、特にスジムラが顕著に表れる。PDP(プラズマディスプレイパネル)の電磁波シールドフィルムとするには、透過で目視可能なムラは故障となり、改善が必要である。   When developing with the developing method described in Patent Document 1 (Japanese Patent Laid-Open No. 2006-352073) using the photosensitive material described in Patent Document 2 (Japanese Patent Laid-Open No. 2006-228469), it is generally A transparent conductive film precursor having a good silver line pattern (meaning developed product before plating) can be obtained, but unexpected development may occur at the initial stage of fixing after development or at the squeeze portion at the inlet of the fixing tank after development. Bleeding, jaggedness, dendritic silver deposition, and streaks occur at the edge of the silver wire due to local runaway. These silver wire edge blurs and jagged defects are not well understood even when viewed with transmitted light after development. However, when the transparent conductive film precursor is plated, the defects at the silver wire edge are amplified by the plating and become visible even when transmitted, resulting in a failure. When the speed of conveying the photosensitive material in the developing device is increased to 2 m / min, 3 m / min, and 12 m / min in order to improve the production capacity, stripes are particularly noticeable. In order to obtain an electromagnetic wave shielding film for a PDP (plasma display panel), unevenness that is visible through transmission becomes a failure and needs to be improved.

ここでいう「現像の局部暴走」とは、現像槽から出た感光材料がスクイズ仕切れずに同伴している現像液中にハロゲン化銀が微少量溶け込んでおり、この現像液が定着液と出会って現像液中の銀が感光材料の銀線上に局部的に析出する溶解物理現像の1種と推定している。保護層がない感光材料において特に現像の局部暴走が顕著に発現し、搬送速度が上がるとスクイズしきれず同伴する現像液が増えるので、ムラもひどくなる傾向がある。   Here, “development local runaway” means that a small amount of silver halide is dissolved in the developing solution accompanied by the photosensitive material from the developing tank without being squeezed, and this developing solution meets the fixing solution. Thus, it is presumed that the silver in the developer is one type of dissolution physical development in which the silver is locally deposited on the silver wire of the photosensitive material. In the light-sensitive material having no protective layer, local runaway of development is particularly prominent, and when the transport speed is increased, the developer cannot be squeezed and the accompanying developer increases, so that unevenness tends to become severe.

本発明は、かかる事情に鑑みてなされたものであり、銀線エッジ部のにじみ、ギザギザ等の欠陥の発生を抑制することができる導電性材料の処理方法、導電性材料形成方法及び導電性材料の処理装置を提供することである。   The present invention has been made in view of such circumstances, and a method for treating a conductive material, a method for forming a conductive material, and a conductive material capable of suppressing the occurrence of defects such as bleeding and jaggedness of silver wire edge portions. It is providing the processing apparatus.

上記課題を解決するために、請求項1に記載の発明は、支持体上に少なくとも1層の銀塩含有層を有する導電性材料前駆体を露光し、現像処理することにより導電性パターンを形成させる導電性材料の処理方法であって、現像処理後、前記導電性材料を定着処理する前に、pH5以下の停止液で満たされた現像停止処理槽に前記導電性材料を導入し、現像停止処理することを特徴としている。   In order to solve the above-mentioned problems, the invention according to claim 1 forms a conductive pattern by exposing and developing a conductive material precursor having at least one silver salt-containing layer on a support. A method of processing a conductive material to be developed, wherein after the development process and before the conductive material is fixed, the conductive material is introduced into a development stop treatment tank filled with a stop solution having a pH of 5 or less, and the development is stopped. It is characterized by processing.

請求項1に記載の発明によれば、支持体上に少なくとも1層の銀塩含有層を有する導電性材料前駆体を露光し、現像処理することにより導電性パターンが形成された導電性材料を得る。この導電性材料の処理方法において、現像処理後、導電性材料を定着処理する前に、pH5以下の停止液で満たされた現像停止処理槽に導電性材料を導入し、現像停止処理する。   According to the first aspect of the present invention, there is provided a conductive material having a conductive pattern formed by exposing and developing a conductive material precursor having at least one silver salt-containing layer on a support. obtain. In this conductive material processing method, after the development process and before the conductive material is fixed, the conductive material is introduced into a development stop treatment tank filled with a stop solution having a pH of 5 or less, and the development stop process is performed.

一般的に、現像後の定着初期又は現像後の定着槽入口でのスクイズ部において、現像液が定着液と出会って現像液中の銀が導電性材料の銀線上に局部的に析出する、いわゆる現像の局部暴走による銀線エッジ部のにじみ、ギザギザ、樹状の銀析出、スジムラが発生しやすい。本発明では、導電性材料を定着処理する前に、停止液で満たされた現像停止処理槽に導電性材料を導入し、現像停止処理を行うことで、現像の局部暴走による銀線エッジ部のにじみ、ギザギザ等の欠陥の発生を抑制することができる。   Generally, in the squeeze part at the fixing initial stage after development or at the fixing tank inlet after development, the developer encounters the fixer and the silver in the developer is locally deposited on the silver wire of the conductive material. Bleeding, jagged edges, dendritic silver deposits, and uneven stripes are likely to occur due to local runaway of development. In the present invention, before the conductive material is fixed, the conductive material is introduced into the development stop processing tank filled with the stop solution, and the development stop processing is performed, so that the silver wire edge portion due to local runaway of the development is caused. Generation of defects such as bleeding and jaggedness can be suppressed.

また、停止液はpH5以下が好ましく、pH5より大きくなると、現像液中の銀が導電性材料の銀線エッジ部に局部的に析出することを効果的に抑制することができない。   Further, the stop solution preferably has a pH of 5 or less. If the stop solution is higher than 5, it is not possible to effectively prevent the silver in the developer from locally depositing on the silver wire edge of the conductive material.

請求項2に記載の発明は、請求項1に記載の導電性材料の処理方法において、前記pHが1〜4であることを特徴としている。   According to a second aspect of the present invention, in the method for treating a conductive material according to the first aspect, the pH is 1 to 4.

請求項2に記載の発明によれば、停止液のpHが1〜4であるので、現像液中の銀が導電性材料の銀線エッジ部に局部的に析出することをさらに効果的に抑制することができる。   According to the second aspect of the present invention, since the pH of the stop solution is 1 to 4, it is more effectively suppressed that the silver in the developer is locally deposited on the silver wire edge portion of the conductive material. can do.

請求項3に記載の発明は、請求項1又は請求項2に記載の導電性材料の処理方法において、実質的に表面に保護層を設けない銀塩含有層を有する導電性材料前駆体を露光し、現像処理することを特徴としている。   According to a third aspect of the present invention, in the method for treating a conductive material according to the first or second aspect, the conductive material precursor having a silver salt-containing layer that is substantially not provided with a protective layer on the surface is exposed. And developing.

実質的に表面に保護層を設けない銀塩含有層を有する導電性材料前駆体を露光し、現像処理する場合、現像液中の銀が導電性材料の銀線上に局部的に析出する、いわゆる現像の局部暴走が発生しやすいが、請求項3に記載の発明では、実質的に表面に保護層を有しない導電性材料前駆体を処理する場合でも、現像の局部暴走による銀線エッジ部のにじみ、ギザギザ等の欠陥の発生を抑制することができる。ここで「実質的に表面に保護層を有しない」とは、表面の保護層の厚みが0.5μm以下若しくは表面に保護層を全く有しない場合をいう。   When a conductive material precursor having a silver salt-containing layer that does not substantially have a protective layer on the surface is exposed and developed, silver in the developer is locally deposited on the silver wire of the conductive material, so-called Although local runaway of the development is likely to occur, in the invention according to claim 3, even when the conductive material precursor having substantially no protective layer on the surface is processed, the silver line edge portion due to the local runaway of the development is processed. Generation of defects such as bleeding and jaggedness can be suppressed. Here, “substantially has no protective layer on the surface” means that the thickness of the protective layer on the surface is 0.5 μm or less or has no protective layer on the surface.

請求項4に記載の発明に係る導電性材料形成方法は、請求項1から請求項3までのいずれか1項に記載の導電性材料の処理方法により導電性材料前駆体を処理して発現された銀パターンに、めっき処理によって金属を所定量付与することを特徴としている。   The method for forming a conductive material according to a fourth aspect of the present invention is manifested by processing a conductive material precursor by the method for processing a conductive material according to any one of the first to third aspects. A predetermined amount of metal is imparted to the silver pattern by plating.

請求項4に記載の発明によれば、請求項1から請求項3までのいずれか1項に記載の導電性材料の処理方法により導電性材料前駆体を処理して発現された銀パターンに、めっき処理によって金属を所定量付与することにより、表面抵抗低減処理を施し、電磁波シールド膜を形成する。   According to the invention described in claim 4, the silver pattern expressed by processing the conductive material precursor by the conductive material processing method according to any one of claims 1 to 3, By applying a predetermined amount of metal by a plating process, a surface resistance reduction process is performed to form an electromagnetic wave shielding film.

一般的に、現像後の定着初期又は現像後の定着槽入口でのスクイズ部において、現像の局部暴走による銀線エッジ部のにじみ、ギザギザ、樹状の銀析出、スジムラが発生した場合、銀線エッジ部のにじみ、ギザギザ等の欠陥は現像後透過光で見ていてもよく判らないが、銀パターンをめっき処理すると、銀線エッジ部の欠陥がめっきで増幅され透過でも見えるようになる。本発明では、現像処理後の現像停止処理により、銀線エッジ部の欠陥の発生を抑制することができるので、めっき処理により、銀線エッジ部の欠陥が透過で見えるようになることを抑制できる。   In general, in the squeeze part at the initial stage of fixing after development or at the inlet of the fixing tank after development, if the silver wire edge blurs, jagged, dendritic silver deposits, or streaks occur due to local runaway of development, Although defects such as blurring and jagged edges can be seen with the transmitted light after development, when the silver pattern is plated, defects at the edge of the silver wire are amplified by plating and can be seen through. In the present invention, since the development stop process after the development process can suppress the occurrence of defects at the silver wire edge portion, the plating process can prevent the defects at the silver wire edge portion from becoming visible. .

請求項5に記載の発明は、支持体上に少なくとも1層の銀塩含有層を有する導電性材料前駆体を露光し、現像処理することにより導電性パターンを形成させる導電性材料の処理装置であって、現像処理を行う現像処理槽と前記導電性材料が定着処理される定着処理槽との間に設けられ、前記導電性材料がpH5以下の停止液に浸漬され、現像停止処理される現像停止処理槽を有することを特徴としている。   The invention according to claim 5 is an apparatus for processing a conductive material that forms a conductive pattern by exposing and developing a conductive material precursor having at least one silver salt-containing layer on a support. A development processing tank that is provided between a development processing tank for performing a development process and a fixing processing tank for fixing the conductive material, and in which the conductive material is immersed in a stop solution having a pH of 5 or less, and development is stopped. It has a stop processing tank.

請求項5に記載の発明によれば、支持体上に少なくとも1層の銀塩含有層を有する導電性材料前駆体を露光し、現像処理することにより導電性パターンが形成された導電性材料を得る。この導電性材料の処理装置において、現像処理後、導電性材料を定着処理する前に、導電性材料を現像停止処理槽内のpH5以下の停止液に浸漬することにより、現像停止処理する。   According to the invention described in claim 5, the conductive material having a conductive pattern formed by exposing and developing a conductive material precursor having at least one silver salt-containing layer on a support. obtain. In this conductive material processing apparatus, after the development process, before the conductive material is fixed, the conductive material is immersed in a stop solution having a pH of 5 or less in the development stop processing tank to stop the development.

一般的に、現像後の定着初期又は現像後の定着槽入口でのスクイズ部において、現像液が定着液と出会って現像液中の銀が導電性材料の銀線上に局部的に析出する、いわゆる現像の局部暴走による銀線エッジ部のにじみ、ギザギザ、樹状の銀析出、スジムラが発生しやすい。本発明では、導電性材料を定着処理する前に、停止液で満たされた現像停止処理槽に導電性材料を導入し、現像停止処理を行うことで、現像の局部暴走による銀線エッジ部のにじみ、ギザギザ等の欠陥の発生を抑制することができる。   Generally, in the squeeze part at the fixing initial stage after development or at the fixing tank inlet after development, the developer encounters the fixer and the silver in the developer is locally deposited on the silver wire of the conductive material. Bleeding, jagged edges, dendritic silver deposits, and uneven stripes are likely to occur due to local runaway of development. In the present invention, before the conductive material is fixed, the conductive material is introduced into the development stop processing tank filled with the stop solution, and the development stop processing is performed, so that the silver wire edge portion due to local runaway of the development is caused. Generation of defects such as bleeding and jaggedness can be suppressed.

また、停止液は、pH5以下が好ましく、更に好ましくは4以下である。pH5より大きくなると、現像液中の銀が導電性材料の銀線エッジ部に局部的に析出することを効果的に抑制することができない。   Further, the stop solution preferably has a pH of 5 or less, more preferably 4 or less. When the pH is higher than 5, it is impossible to effectively suppress the silver in the developer from locally depositing on the edge of the silver wire of the conductive material.

請求項6に記載の発明は、請求項5に記載の導電性材料の処理装置において、実質的に表面に保護層を設けない銀塩含有層を有する導電性材料前駆体を露光し、現像処理することを特徴としている。   According to a sixth aspect of the present invention, in the conductive material processing apparatus according to the fifth aspect, the conductive material precursor having a silver salt-containing layer substantially not provided with a protective layer on the surface is exposed and developed. It is characterized by doing.

実質的に表面に保護層を設けない銀塩含有層を有する導電性材料前駆体を露光し、現像処理する場合、現像液中の銀が導電性材料の銀線上に局部的に析出する、いわゆる現像の局部暴走が発生しやすいが、請求項6に記載の発明では、実質的に表面に保護層を有しない導電性材料前駆体を処理する場合でも、現像の局部暴走による銀線エッジ部のにじみ、ギザギザ等の欠陥の発生を抑制することができる。   When a conductive material precursor having a silver salt-containing layer that does not substantially have a protective layer on the surface is exposed and developed, silver in the developer is locally deposited on the silver wire of the conductive material, so-called Although local runaway of the development is likely to occur, in the invention according to claim 6, even when the conductive material precursor having substantially no protective layer on the surface is processed, the silver line edge portion due to the local runaway of the development is processed. Generation of defects such as bleeding and jaggedness can be suppressed.

以上説明したように、本発明によれば、現像処理後に、現像の局部暴走により導電性材料の銀線エッジ部ににじみ、ギザギザ等の欠陥が発生することを抑制することができる。   As described above, according to the present invention, after development processing, it is possible to suppress the occurrence of defects such as jaggedness due to local runaway of development due to bleeding in the silver wire edge portion of the conductive material.

本発明の実施の形態を図面に基づいて説明する。   Embodiments of the present invention will be described with reference to the drawings.

図1には、本発明に係る導電性材料の処理方法が適用される導電性材料の処理装置が示されている。この処理装置は、支持フィルム上に銀塩含有層としてハロゲン化銀乳剤層を有する導電性材料前駆体を露光した後に配置され、露光が施された導電性材料前駆体の現像・定着・洗浄等を行う装置である。   FIG. 1 shows a conductive material processing apparatus to which a conductive material processing method according to the present invention is applied. This processing apparatus is disposed after exposing a conductive material precursor having a silver halide emulsion layer as a silver salt-containing layer on a support film, and developing, fixing, washing, etc. of the exposed conductive material precursor It is a device that performs.

図1に示されるように、処理装置10では、帯状の支持フィルム上にハロゲン化銀乳剤層を有する感光ウエブ12が複数の支持ロール14にガイドされた状態で一定方向に搬送される。この感光ウエブ12は、図示しない露光装置により所望の細線状のパターン露光が施されたものである。   As shown in FIG. 1, in the processing apparatus 10, a photosensitive web 12 having a silver halide emulsion layer on a belt-like support film is conveyed in a fixed direction while being guided by a plurality of support rolls 14. The photosensitive web 12 has been subjected to a desired fine line pattern exposure by an exposure apparatus (not shown).

処理装置10には、感光ウエブ12の搬送方向に沿って上流側から下流側の順に、現像液16Aが貯留された現像処理槽16と、停止液18Aが貯留された現像停止処理槽18と、定着液20Aが貯留された定着槽20と、純水(洗浄液)22Aが貯留された第1水洗槽22と、純水(洗浄液)24Aが貯留された第2水洗槽24と、感光ウエブ12を乾燥させる乾燥装置26と、が配設されている。乾燥装置26には、千鳥状に配置された3本の支持ロール14に感光ウエブ12が巻き掛けられており、3本の支持ロール14より搬送方向上流側と搬送方向下流側で感光ウエブ12の表面に温風を吹き付ける温風発生装置28が配設されている。   The processing apparatus 10 includes, in order from the upstream side to the downstream side in the conveyance direction of the photosensitive web 12, a development processing tank 16 in which the developer 16A is stored, a development stop processing tank 18 in which the stop liquid 18A is stored, The fixing tank 20 in which the fixing liquid 20A is stored, the first water washing tank 22 in which pure water (cleaning liquid) 22A is stored, the second water washing tank 24 in which pure water (cleaning liquid) 24A is stored, and the photosensitive web 12. And a drying device 26 for drying. In the drying device 26, the photosensitive web 12 is wound around three support rolls 14 arranged in a staggered manner, and the photosensitive web 12 is disposed upstream and downstream in the transport direction from the three support rolls 14. A hot air generator 28 for blowing hot air on the surface is disposed.

処理装置10では、感光ウエブ12は現像処理槽16の上部に配置された支持ロール14を経て現像処理槽16に搬送される。現像処理槽16内には、下方側の2本の液中ターンバー30と、上方側の2本の支持ロール32とが千鳥状に配置されている。感光ウエブ12は、搬送方向上流側の液中ターンバー30と2本の支持ロール32と搬送方向下流側の液中ターンバー30に掛け渡された状態で支持されている。その際、2本の液中ターンバー30に対し、感光ウエブ12はハロゲン化銀乳剤層が非接触となるように支持され、方向転換される。   In the processing apparatus 10, the photosensitive web 12 is conveyed to the development processing tank 16 through a support roll 14 disposed on the upper part of the development processing tank 16. In the developing tank 16, two lower liquid turn bars 30 and two upper support rolls 32 are arranged in a staggered manner. The photosensitive web 12 is supported in a state of being stretched over the submerged turn bar 30 on the upstream side in the transport direction, the two support rolls 32, and the submerged turn bar 30 on the downstream side in the transport direction. At this time, the photosensitive web 12 is supported by the two submerged turn bars 30 so that the silver halide emulsion layer is not in contact with the turn bar 30, and the direction is changed.

液中ターンバー30には、周面に軸方向に複数のスリット(図示省略)が形成されており、複数のスリットから所定量の現像液16Aが噴射されることにより、感光ウエブ12が液中ターンバー30から浮揚し、非接触となる。感光ウエブ12のハロゲン化銀乳剤層はウエット状態で軟膜のため、スリットから噴射される現像液16Aの量が強すぎて軟膜を破壊しないように所定の噴射量に調整することが望ましい。現像処理槽16内を搬送された感光ウエブ12は、現像処理槽16の上部と現像停止処理槽18の上部に配置された2本の支持ロール34を経て次の現像停止処理槽18に導入される。支持ロール34と感光ウエブ12を挟んで対向する位置には押圧ロール36が配設されている。   The submerged turn bar 30 is formed with a plurality of slits (not shown) in the axial direction on the peripheral surface, and a predetermined amount of developer 16A is ejected from the plurality of slits, so that the photosensitive web 12 is submerged in the submerged turn bar. It floats from 30 and becomes non-contact. Since the silver halide emulsion layer of the photosensitive web 12 is a soft film in the wet state, it is desirable that the amount of the developer 16A sprayed from the slit is too strong to be adjusted to a predetermined spray amount so as not to break the soft film. The photosensitive web 12 conveyed in the development processing tank 16 is introduced into the next development stop processing tank 18 through two support rolls 34 disposed on the upper part of the development processing tank 16 and the development stop processing tank 18. The A pressing roll 36 is disposed at a position facing the support roll 34 and the photosensitive web 12 therebetween.

現像停止処理槽18内には、下方側に液中ターンバー38が配置されており、液中ターンバー38で感光ウエブ12はハロゲン化銀乳剤層が非接触となるように支持され、方向転換される。液中ターンバー38には、周面に軸方向に複数のスリット(図示省略)が形成されており、複数のスリットから所定量の停止液18Aが噴射されることにより、感光ウエブ12が液中ターンバー38から浮揚し、非接触となる。現像停止処理槽18内を搬送された感光ウエブ12は、現像停止処理槽18の上部と定着槽20の上部に配置された2本の支持ロール34を経て次の定着槽20に導入される。   A submerged turn bar 38 is disposed in the development stop processing tank 18 on the lower side, and the submerged turn bar 38 supports and changes the direction of the photosensitive web 12 so that the silver halide emulsion layer is not in contact. . The submerged turn bar 38 is formed with a plurality of slits (not shown) in the axial direction on the peripheral surface, and a predetermined amount of stop liquid 18A is ejected from the plurality of slits, whereby the photosensitive web 12 is submerged in the submerged turn bar. It floats from 38 and becomes non-contact. The photosensitive web 12 conveyed in the development stop processing tank 18 is introduced into the next fixing tank 20 through two support rolls 34 disposed on the top of the development stop processing tank 18 and the fixing tank 20.

以下、上記の現像処理槽16と同様に、感光ウエブ12は、定着槽20内に配置された2個の液中ターンバー40でハロゲン化銀乳剤層が非接触の状態で方向転換され、2本の支持ロール34を経て次の第1水洗槽22に導入される。液中ターンバー40は、周面に軸方向に形成された複数のスリットから所定量の定着液20Aが噴射されるものであり、これにより感光ウエブ12が液中ターンバー40から浮揚し、非接触となる。   Thereafter, similar to the development processing tank 16 described above, the photosensitive web 12 is redirected by two submerged turn bars 40 disposed in the fixing tank 20 so that the silver halide emulsion layer is not contacted, It is introduced into the next first washing tank 22 through the support roll 34. The submerged turn bar 40 is configured such that a predetermined amount of the fixing solution 20A is ejected from a plurality of slits formed in the axial direction on the peripheral surface, whereby the photosensitive web 12 floats from the submerged turn bar 40 and is not contacted. Become.

その後、感光ウエブ12は、第1水洗槽22内の液中ターンバー42でハロゲン化銀乳剤層が非接触の状態で方向転換され、第1水洗槽22の上部に配置された支持ロール34を経て第2水洗槽24に導入される。さらに、感光ウエブ12は、第2水洗槽24内の液中ターンバー44でハロゲン化銀乳剤層が非接触の状態で方向転換される。液中ターンバー42、44は、周面に軸方向に形成された複数のスリットから所定量の純水22A、24Aが噴射されるものであり、これにより感光ウエブ12が液中ターンバー42、44から浮揚し、非接触となる。   Thereafter, the photosensitive web 12 is redirected by the submerged turn bar 42 in the first washing tank 22 in a non-contact state with the silver halide emulsion layer, and passes through a support roll 34 disposed on the upper part of the first washing tank 22. It is introduced into the second water washing tank 24. Further, the direction of the photosensitive web 12 is changed by the submerged turn bar 44 in the second washing tank 24 while the silver halide emulsion layer is not in contact. The submerged turn bars 42 and 44 are configured such that a predetermined amount of pure water 22A and 24A is ejected from a plurality of slits formed in the axial direction on the peripheral surface, whereby the photosensitive web 12 is ejected from the submerged turn bars 42 and 44. Levitation and non-contact.

第2水洗槽24の出口には、感光ウエブ12の両面に対向するように複数(本実施形態では2対)のエアーナイフ46が配置されている。第2水洗槽24から出た感光ウエブ12はエアーナイフ46から吹き出されるエアーにより純水24Aが掻き落とされ、上部に配置された支持ロール34を経て乾燥装置26に搬送される。   A plurality of (two pairs in this embodiment) air knives 46 are arranged at the outlet of the second water rinsing tank 24 so as to face both surfaces of the photosensitive web 12. The pure water 24A is scraped off by the air blown from the air knife 46 from the photosensitive web 12 that has come out of the second water washing tank 24, and is conveyed to the drying device 26 through the support roll 34 that is disposed at the top.

乾燥装置26では、温風発生装置28から発生する温風により感光ウエブ12の両面が乾燥され、感光ウエブ12は乾燥装置26の上部に配置された支持ロール14を経て搬送される。図示していないが処理装置10は感光ウエブ12を一定のテンションで搬送できるようにトルク調整機構を持っている。   In the drying device 26, both surfaces of the photosensitive web 12 are dried by the warm air generated from the warm air generating device 28, and the photosensitive web 12 is conveyed through the support roll 14 disposed on the upper portion of the drying device 26. Although not shown, the processing apparatus 10 has a torque adjusting mechanism so that the photosensitive web 12 can be conveyed with a constant tension.

このような処理装置10では、複数の支持ロール14、32、34と液中ターンバー30、38、40、42、44等によって、感光ウエブ12が現像処理槽16、現像停止処理槽18、定着槽20、第1水洗槽22、第2水洗槽24内を搬送されることで、現像、現像停止、定着、洗浄の各処理が行われる。これによって、細線メッシュ状の現像銀画像(導電膜)が形成された感光ウエブ12が得られる。   In such a processing apparatus 10, the photosensitive web 12 is developed into the development processing tank 16, the development stop processing tank 18, and the fixing tank by a plurality of support rolls 14, 32, 34 and submerged turn bars 30, 38, 40, 42, 44. 20, development, development stop, fixing, and washing are performed by being conveyed through the first washing tank 22 and the second washing tank 24. As a result, a photosensitive web 12 on which a fine-line mesh developed silver image (conductive film) is formed is obtained.

処理装置10には、現像処理槽16と定着槽20との間に、停止液18Aが貯留された現像停止処理槽18が配置されている。停止液18Aは、pH5以下であり、pH1以上pH4以下が好ましく、pH2以上pH3以下がより好ましい。停止液のpHが、pH1以上pH5以下の範囲を外れると、現像液中の銀が導電性材料の銀線エッジ部に局部的に析出することを効果的に抑制することができなくなる。停止液18Aとして、例えば、酢酸、コハク酸、マレイン酸、クエン酸等が用いられる。本実施形態では、5%酢酸が用いられている。   In the processing apparatus 10, a development stop processing tank 18 in which a stop liquid 18 </ b> A is stored is disposed between the development processing tank 16 and the fixing tank 20. The stop solution 18A has a pH of 5 or less, preferably from pH 1 to pH 4, and more preferably from pH 2 to pH 3. If the pH of the stop solution is out of the range of pH 1 or more and pH 5 or less, it becomes impossible to effectively suppress the silver in the developer from locally depositing on the silver wire edge portion of the conductive material. For example, acetic acid, succinic acid, maleic acid, citric acid or the like is used as the stop liquid 18A. In this embodiment, 5% acetic acid is used.

ここで、現像・定着・洗浄の各処理は、銀塩写真フィルム、印刷製版用フィルム、フォトマスク用エマルジョンマスク等に用いられる現像処理技術を適用することができる。現像液、定着液、洗浄液もこれらに準じて適宜適用することができる。例えば、現像液としては、特に限定しないが、PQ現像液、MQ現像液、MAA現像液等を用いることもでき、例えば、富士フイルム社製のCN−16、CR−56、CP45X、FD−3、パピトール、KODAK社製のC−41、E−6、RA−4、D−19、D−72などの現像液、又はそのキットに含まれる現像液、また、D−85などのリス現像液を用いることができる。なお、定着処理は、未露光部分の銀塩を除去して安定化させる目的で行われる。   Here, development processing techniques used for silver salt photographic films, printing plate-making films, photomask emulsion masks, and the like can be applied to the development, fixing, and washing processes. A developing solution, a fixing solution, and a cleaning solution can be appropriately applied according to these. For example, the developer is not particularly limited, but PQ developer, MQ developer, MAA developer and the like can also be used. For example, CN-16, CR-56, CP45X, FD-3 manufactured by FUJIFILM Corporation. Developers such as C-41, E-6, RA-4, D-19, and D-72 manufactured by KODAK, Papitol, or a developer included in the kit, and a lith developer such as D-85 Can be used. The fixing process is performed for the purpose of removing and stabilizing the silver salt in the unexposed part.

本実施形態では、感光ウエブ12のハロゲン化銀乳剤層の表面に保護層が設けられていない。また、感光ウエブ12を搬送するときの張力は、3N/m以上、150N/m以下とすることが好ましい。張力を3N/m未満にすると、支持ロール14、34等が回転しなくなり、フィルムに傷がつく場合がある。また150N/mを超えると、感光ウエブ12に皺が発生して液中ターンバー表面にフィルムが接触して現像銀画像に傷をつける場合がある。   In this embodiment, a protective layer is not provided on the surface of the silver halide emulsion layer of the photosensitive web 12. Further, the tension when the photosensitive web 12 is conveyed is preferably 3 N / m or more and 150 N / m or less. If the tension is less than 3 N / m, the support rolls 14, 34, etc. may not rotate, and the film may be damaged. On the other hand, if it exceeds 150 N / m, wrinkles may occur on the photosensitive web 12, and the film may come into contact with the surface of the turnbar in the liquid and damage the developed silver image.

次に、本実施形態の導電性材料の処理方法が適用される処理装置10の作用について説明する。   Next, the operation of the processing apparatus 10 to which the conductive material processing method of the present embodiment is applied will be described.

処理装置10では、複数の支持ロール14、32、34と液中ターンバー30、38、40、42、44等によって、感光ウエブ12が現像処理槽16、現像停止処理槽18、定着槽20、第1水洗槽22、第2水洗槽24内を搬送される。これにより、感光ウエブ12に現像、現像停止、定着、洗浄の各処理が行われる。そして、感光ウエブ12を乾燥装置26により乾燥させることで、細線メッシュ状の現像銀画像(導電膜)が形成された感光ウエブ12(導電性材料)が得られる。処理装置10により処理されて得られた感光ウエブ12は、透光性電磁波シールド膜に好適に使用できる。すなわち、処理装置10により感光ウエブ12を処理して発現された細線メッシュ状の銀パターンに、Cu、Agなどのめっき処理によって金属を所定量付与することで、透光性電磁波シールド膜が形成される。   In the processing apparatus 10, the photosensitive web 12 is developed into a development processing tank 16, a development stop processing tank 18, a fixing tank 20, and a first tank by a plurality of support rolls 14, 32, 34 and submerged turn bars 30, 38, 40, 42, 44, etc. The inside of the 1 water washing tank 22 and the 2nd water washing tank 24 is conveyed. As a result, each process of development, development stop, fixing, and washing is performed on the photosensitive web 12. Then, the photosensitive web 12 is dried by the drying device 26 to obtain the photosensitive web 12 (conductive material) on which a fine-line mesh-shaped developed silver image (conductive film) is formed. The photosensitive web 12 obtained by processing by the processing apparatus 10 can be suitably used for a light-transmitting electromagnetic wave shielding film. That is, a light-transmitting electromagnetic wave shielding film is formed by applying a predetermined amount of metal to a thin-line mesh silver pattern expressed by processing the photosensitive web 12 by the processing apparatus 10 by plating treatment of Cu, Ag or the like. The

この処理装置10では、現像処理槽16と定着槽20との間に、停止液18Aが貯留された現像停止処理槽18が配置されており、現像処理槽16を出た感光ウエブ12は、現像停止処理槽18内に搬送され、現像停止処理が行われる。   In this processing apparatus 10, a development stop processing tank 18 in which a stop solution 18 A is stored is disposed between the development processing tank 16 and the fixing tank 20, and the photosensitive web 12 that has exited the development processing tank 16 is developed. It is conveyed into the stop processing tank 18 and development stop processing is performed.

現像処理槽16と定着槽20との間に現像停止処理槽18を設けない場合、現像後の定着初期又は現像後の定着槽入口でのスクイズ部において、現像の局部暴走(溶解物理現象の1種)により銀線エッジ部のにじみ、ギザギザ、樹状の銀析出、スジムラが発生しやすい。これらの銀線エッジ部のにじみ、ギザギザ等の欠陥は現像後透過光で見ていてもよく判らないが、透明導電性膜前駆体(めっき前の現像済み品)をめっきすると、上記の銀線エッジ部の欠陥がめっきで増幅され透過でも見えるようになる。PDP(プラズマディスプレイパネル)の電磁波シールドフィルムとするには、透過で目視可能なムラは故障となる。特に、保護層がない感光ウエブにおいては、現像の局部暴走が顕著に発現し、搬送速度が上がるとスクイズしきれず同伴する現像液が増えるので、ムラもひどくなる傾向がある。   In the case where the development stop processing tank 18 is not provided between the development processing tank 16 and the fixing tank 20, local runaway of development (1 of dissolution physics phenomenon) in the squeeze part at the initial stage of fixing after development or at the inlet of the fixing tank after development. Depending on the type, bleeding of the edge of the silver wire, jaggedness, dendritic silver deposition, and uneven stripes are likely to occur. Blemish and jagged defects on these silver wire edges can be seen with the transmitted light after development, but when the transparent conductive film precursor (developed product before plating) is plated, the above silver wire Edge defects are amplified by plating and can be seen through. In order to obtain an electromagnetic wave shielding film for a PDP (plasma display panel), unevenness that is visible through transmission becomes a failure. In particular, in a photosensitive web without a protective layer, local runaway of development develops remarkably, and as the transport speed increases, the developer that can be squeezed and increases, the unevenness tends to become severe.

本実施形態の処理装置10では、現像処理槽16と定着槽20との間に現像停止処理槽18が配置されており、現像処理槽16を出た感光ウエブ12は、現像停止処理槽18内に搬送され、現像停止処理が行われる。これにより、現像の局部暴走、すなわち現像液中に微少量溶け込んでいるハロゲン化銀が定着液と接触し、現像液中の銀が感光ウエブ12の銀線上に局部的に析出する現象を抑制できる。このため、感光ウエブ12の銀線エッジ部のにじみ、ギザギザ等の欠陥の発生を抑制することができ、滑らかな銀線エッジ部を得ることができる。   In the processing apparatus 10 of the present embodiment, a development stop processing tank 18 is disposed between the development processing tank 16 and the fixing tank 20, and the photosensitive web 12 that has exited the development processing tank 16 is in the development stop processing tank 18. The development stop process is performed. As a result, local runaway of the development, that is, a phenomenon in which a small amount of silver halide dissolved in the developer comes into contact with the fixing solution and silver in the developer is locally deposited on the silver wire of the photosensitive web 12 can be suppressed. . For this reason, it is possible to suppress the occurrence of defects such as blurring and jaggedness of the silver wire edge portion of the photosensitive web 12, and a smooth silver wire edge portion can be obtained.

また、感光ウエブ12は、ハロゲン化銀乳剤層の表面に保護層が設けられていない。ハロゲン化銀乳剤層の表面に実質的に保護層を設けない場合には、現像液中の銀が導電性材料の銀線上に局部的に析出する、いわゆる現像の局部暴走が発生しやすい。しかし、処理装置10では、表面に保護層を全く設けない感光ウエブ12、又は保護層の厚みが極めて薄い(例えば、保護層の厚みが0.5μm以下の)感光ウエブでも、現像の局部暴走による銀線エッジ部のにじみ、ギザギザ等の欠陥の発生を抑制することができる。   The photosensitive web 12 is not provided with a protective layer on the surface of the silver halide emulsion layer. When a protective layer is not substantially provided on the surface of the silver halide emulsion layer, so-called local runaway of development is likely to occur, in which silver in the developer is locally deposited on the silver wire of the conductive material. However, in the processing apparatus 10, even if the photosensitive web 12 has no protective layer on the surface, or the photosensitive web has a very thin thickness (for example, the protective layer has a thickness of 0.5 μm or less), it is caused by local runaway of development. It is possible to suppress the occurrence of defects such as bleeding and jaggedness at the edge of the silver wire.

次に、処理装置10を用いて、感光ウエブ12に銀線エッジ部の状態を調べる実験を行った。   Next, an experiment for examining the state of the silver wire edge portion on the photosensitive web 12 using the processing apparatus 10 was performed.

処理装置10の現像、現像停止、定着、水洗、乾燥等の各工程は、表1に示す条件等に設定した(水準1)。この条件等にて、現像、現像停止、定着、水洗、乾燥等の各工程を行い、現像後の銀線エッジ部(ふち)のギザギザの発生状態、めっき後の銀線エッジ部(ふち)のギザギザの発生状態を調べた。この実験では、停止液はpH2.5である。また、感光ウエブ12は、ハロゲン化銀乳剤層の表面に保護層を設けないものを用いた。なお、めっきは電解めっきによりCuを析出させた。   Each process such as development, development stop, fixing, water washing, and drying of the processing apparatus 10 was set to the conditions shown in Table 1 (level 1). Under these conditions, development, development stop, fixing, washing, drying, etc. are performed, the jaggedness of the silver wire edge (edge) after development, and the silver wire edge (edge) after plating The state of occurrence of jaggedness was examined. In this experiment, the stop solution has a pH of 2.5. The photosensitive web 12 used was a silver halide emulsion layer having no protective layer on the surface. Note that Cu was deposited by electrolytic plating.

また、比較例として、現像処理槽16と定着槽20との間に現像停止処理槽18を設けず、現像処理後に現像停止処理を行わない場合についても、同様に現像後の銀線エッジ部(ふち)のギザギザの発生状態、めっき後の銀線エッジ部(ふち)のギザギザの発生状態を調べた(水準2)。   In addition, as a comparative example, the case where the development stop tank 18 is not provided between the development tank 16 and the fixing tank 20 and the development stop process is not performed after the development process is also performed. The occurrence state of jagged edges of the edges and the occurrence state of jagged edges of the silver wire edges (edges) after plating were examined (level 2).

Figure 2009080415
Figure 2009080415

表1に示されるように、現像処理後に現像停止処理を行った場合(水準1)には、現像後、めっき後ともに、銀線エッジ部(ふち)のギザギザが発生しないことが確認された。一方、現像処理後に現像停止処理を行わない場合(水準2)には、現像後、めっき後ともに、銀線エッジ部(ふち)のギザギザが発生することが確認された。従って、処理装置10によれば、現像の局部暴走による感光ウエブ12の銀線エッジ部のギザギザの発生を抑制できることがわかった。   As shown in Table 1, it was confirmed that when the development stop process was performed after the development process (level 1), the jagged edges of the silver wire edge (edge) did not occur both after development and after plating. On the other hand, when the development stop process was not performed after the development process (level 2), it was confirmed that the jagged edges of the silver wire edge (edge) occurred both after development and after plating. Therefore, it has been found that the processing apparatus 10 can suppress the generation of jagged edges of the silver wire edge of the photosensitive web 12 due to local runaway of development.

一方、特開2000−352826号公報には、平版印刷用原板の現像処理装置において、現像工程を経た原板を停止又は洗浄する手段を設けた構成が開示されている。しかしながら、レントゲン用感材やリスフィルムや黒白ネガ感材のようにハロゲン化銀乳剤を塗布した写真感光材料を現像・定着・水洗・乾燥して銀像を得る自動現像装置においては、現像と定着の間に停止を入れるような自動現像装置は知られていないし、公知資料も無い。銀塩感光材料を現像してめっき工程の前駆体を得るような本発明のような構成では特に見当たらない。   On the other hand, Japanese Patent Application Laid-Open No. 2000-352826 discloses a configuration in which a development processing apparatus for an original plate for lithographic printing is provided with means for stopping or washing the original plate that has undergone the development process. However, in an automatic developing device that obtains a silver image by developing, fixing, washing and drying a photosensitive material coated with a silver halide emulsion, such as an X-ray sensitive material, a lithographic film, or a black and white negative sensitive material, development and fixing There is no known automatic developing apparatus that puts a stop in between, and there is no known document. In the structure of the present invention in which the silver salt photosensitive material is developed to obtain a precursor of the plating process, it is not particularly found.

写真感光材料では処理後に得られた銀線パターンの上にめっきなどでさらに金属等の導電性物質を付与する後工程がないので、現像から定着への移動時に現像液が残存し定着で溶解物理現像(現像の局部暴走)が起っても後工程で増幅されることがない。保護層があるので、現像液のスクイズムラがあっても溶解物理現像ムラなどが緩和されて目立たない。また、溶解物理現像は均一に起れば現像濃度が向上するというメリットがあり、定着槽に入ると実質的に定着液で停止されるので、従来はレントゲン用感材やリスフィルムを現像処理する自動現像装置の現像と定着の間に停止浴が挿入されることはなかった。   In photographic photosensitive materials, there is no post-process to apply a conductive material such as metal on the silver wire pattern obtained after processing by plating. Even if development (development local runaway) occurs, it is not amplified in a later process. Since there is a protective layer, even if there is a squimminess of the developing solution, the dissolved physical development unevenness is alleviated and is not noticeable. In addition, when dissolved physical development occurs uniformly, there is a merit that the development density is improved, and when entering the fixing tank, it is substantially stopped by the fixing solution, so conventionally, the X-ray sensitive material and the lith film are developed. No stop bath was inserted between the development and fixing of the automatic developing device.

しかるに現像後の後工程がめっき工程であり、僅かな現像ムラがめっき工程で増幅され透過光による目視検査で視認されるようになったため、本発明の処理装置10のように現像停止処理槽18を設けることが有効になった。   However, since the post-development process is a plating process, and slight development unevenness is amplified in the plating process and is visually recognized by visual inspection using transmitted light, the development stop processing tank 18 as in the processing apparatus 10 of the present invention. It became effective to provide.

次に、感光ウエブ12について説明する。感光ウエブ12は、例えば、光透過性支持体上に銀塩が含有した銀塩含有層(本実施形態では、ハロゲン化銀乳剤層)を設けた、感光材料からなる長尺幅広フレキシブル基材である。また、本実施形態では、銀塩含有層上には実質的に保護層が設けられていないが、銀塩含有層上には保護層が設けられていてもよく、この保護層とは例えばゼラチンや高分子ポリマーといったバインダーからなる層を意味し、擦り傷防止や力学特性を改良する効果を発現するために銀塩含有層上に形成される。保護層の厚みは0.02〜20μmであることが好ましく、より好ましくは0.1〜10μmであり、さらに好ましくは0.3〜3μmである。   Next, the photosensitive web 12 will be described. The photosensitive web 12 is, for example, a long and wide flexible base material made of a photosensitive material provided with a silver salt-containing layer (in this embodiment, a silver halide emulsion layer) containing a silver salt on a light-transmitting support. is there. In this embodiment, a protective layer is not substantially provided on the silver salt-containing layer. However, a protective layer may be provided on the silver salt-containing layer. And a layer made of a binder such as a polymer, and is formed on the silver salt-containing layer in order to exhibit the effects of preventing scratches and improving mechanical properties. It is preferable that the thickness of a protective layer is 0.02-20 micrometers, More preferably, it is 0.1-10 micrometers, More preferably, it is 0.3-3 micrometers.

これらの銀塩含有層や保護層の組成などは、銀塩写真フィルム、印画紙、印刷製版用フィルム、フォトマスク用エマルジョンマスク等に適用されるハロゲン化銀乳剤層(銀塩含有層)や保護層を適宜適用することができる。   The composition of these silver salt-containing layers and protective layers includes silver halide emulsion layers (silver salt-containing layers) and protective layers applied to silver salt photographic films, photographic paper, printing plate-making films, emulsion masks for photomasks, etc. Layers can be applied as appropriate.

特に、感光ウエブ12(感光材料)としては、銀塩写真フィルム(銀塩感光材料)が好ましく、白黒銀塩写真フィルム(白黒銀塩感光材料)が最もよい。また、銀塩含有層に適用する銀塩としては、特にハロゲン化銀が最も好適である。   In particular, as the photosensitive web 12 (photosensitive material), a silver salt photographic film (silver salt photosensitive material) is preferable, and a black and white silver salt photographic film (black and white silver salt photosensitive material) is the best. The silver salt applied to the silver salt-containing layer is most preferably silver halide.

一方、光透過性支持体としては、単層のプラスチックフィルムや、これを2層以上組み合わせた多層フィルムを適用することができる。プラスチックフィルムの原料としては、例えば、ポリエチレンテレフタレート(PET)、及びポリエチレンナフタレートなどのポリエステル類;ポリエチレン(PE)、ポリプロピレン(PP)、ポリスチレン、EVAなどのポリオレフィン類;ポリ塩化ビニル、ポリ塩化ビニリデンなどのビニル系樹脂;その他、ポリエーテルエーテルケトン(PEEK)、ポリサルホン(PSF)、ポリエーテルサルホン(PES)、ポリカーボネート(PC)、ポリアミド、ポリイミド、アクリル樹脂、トリアセチルセルロース(TAC)などを用いることができる。   On the other hand, as the light-transmitting support, a single-layer plastic film or a multilayer film in which two or more layers are combined can be applied. Examples of the raw material for the plastic film include polyesters such as polyethylene terephthalate (PET) and polyethylene naphthalate; polyolefins such as polyethylene (PE), polypropylene (PP), polystyrene, and EVA; polyvinyl chloride, polyvinylidene chloride, and the like. In addition, use polyetheretherketone (PEEK), polysulfone (PSF), polyethersulfone (PES), polycarbonate (PC), polyamide, polyimide, acrylic resin, triacetylcellulose (TAC), etc. Can do.

これらの中でも、透明性、耐熱性、取り扱いやすさ及び価格の点から、支持体としてのプラスチックフィルムは、銀塩写真フィルム(銀塩感光材料)に通常適用されるポリエチレンテレフタレートフィルムやセルロールトリアセテートフィルム、また、その他、ポリイミドフィルムであることが好ましい。特に、ポリエチレンテレフタレートフィルムであることが最も好ましい。   Among these, from the viewpoint of transparency, heat resistance, ease of handling, and cost, the plastic film as the support is a polyethylene terephthalate film or cellulose triacetate film that is usually applied to silver salt photographic films (silver salt photosensitive materials). In addition, a polyimide film is preferable. Particularly preferred is a polyethylene terephthalate film.

また、ディスプレイ用の電磁波遮蔽材では透明性が要求されるため、支持体の透明性は高いことが望ましい。この場合における光透過性支持体の全可視光透過率は70〜100%が好ましく、さらに好ましくは85〜100%であり、特に好ましくは90〜100%である。   Moreover, since the electromagnetic shielding material for displays requires transparency, it is desirable that the support has high transparency. In this case, the total visible light transmittance of the light transmissive support is preferably 70 to 100%, more preferably 85 to 100%, and particularly preferably 90 to 100%.

感光ウエブ12の幅は、例えば、50cm以上とし、厚みは50〜200μmとすることがよい。   The width of the photosensitive web 12 is, for example, 50 cm or more, and the thickness is preferably 50 to 200 μm.

なお、本実施形態では、光透過性電磁波遮蔽材料を製造する装置及び製造方法について説明したが、これに限られず、例えば、その他工業品などの微細な導電性金属部からなる細線状パターンを有する光透過性導電性材料の製造装置及び製造方法としても適用することができる。   In addition, although this embodiment demonstrated the apparatus and manufacturing method which manufacture a light-transmitting electromagnetic wave shielding material, it is not restricted to this, For example, it has a fine line pattern which consists of fine electroconductive metal parts, such as other industrial goods The present invention can also be applied as a manufacturing apparatus and a manufacturing method of a light transmissive conductive material.

本発明の一実施形態における導電性材料の処理方法が適用された処理装置を示す概略構成図である。It is a schematic block diagram which shows the processing apparatus with which the processing method of the electroconductive material in one Embodiment of this invention was applied.

符号の説明Explanation of symbols

10 処理装置
12 感光ウエブ(導電性材料前駆体、導電性材料)
16 現像処理槽
16A 現像液
18 現像停止処理槽
18A 停止液
20 定着槽
20A 定着液
10 Processing Device 12 Photosensitive Web (Conductive Material Precursor, Conductive Material)
16 Development processing tank 16A Developer 18 Development stop processing tank 18A Stopping liquid 20 Fixing tank 20A Fixing liquid

Claims (6)

支持体上に少なくとも1層の銀塩含有層を有する導電性材料前駆体を露光し、現像処理することにより導電性パターンを形成させる導電性材料の処理方法であって、
現像処理後、前記導電性材料を定着処理する前に、pH5以下の停止液で満たされた現像停止処理槽に前記導電性材料を導入し、現像停止処理することを特徴とする導電性材料の処理方法。
A conductive material processing method for forming a conductive pattern by exposing and developing a conductive material precursor having at least one silver salt-containing layer on a support,
After the development process, before the conductive material is fixed, the conductive material is introduced into a development stop treatment tank filled with a stop solution having a pH of 5 or lower, and the development stop process is performed. Processing method.
前記pHが1〜4であることを特徴とする請求項1に記載の導電性材料の処理方法。   The said pH is 1-4, The processing method of the electroconductive material of Claim 1 characterized by the above-mentioned. 実質的に表面に保護層を設けない銀塩含有層を有する導電性材料前駆体を露光し、現像処理することを特徴とする請求項1又は請求項2に記載の導電性材料の処理方法。   The method for treating a conductive material according to claim 1 or 2, wherein the conductive material precursor having a silver salt-containing layer substantially not provided with a protective layer is exposed and developed. 請求項1から請求項3までのいずれか1項に記載の導電性材料の処理方法により導電性材料前駆体を処理して発現された銀パターンに、めっき処理によって金属を所定量付与することを特徴とする導電性材料形成方法。   Applying a predetermined amount of metal to the silver pattern expressed by processing the conductive material precursor by the conductive material processing method according to any one of claims 1 to 3 by plating. A method for forming a conductive material. 支持体上に少なくとも1層の銀塩含有層を有する導電性材料前駆体を露光し、現像処理することにより導電性パターンを形成させる導電性材料の処理装置であって、
現像処理を行う現像処理槽と前記導電性材料が定着処理される定着処理槽との間に設けられ、前記導電性材料がpH5以下の停止液に浸漬され、現像停止処理される現像停止処理槽を有することを特徴とする導電性材料の処理装置。
A conductive material processing apparatus for forming a conductive pattern by exposing and developing a conductive material precursor having at least one silver salt-containing layer on a support,
A development stop processing tank provided between a development processing tank for performing a development process and a fixing processing tank for fixing the conductive material, wherein the conductive material is immersed in a stop solution having a pH of 5 or less, and the development stop processing is performed. An apparatus for treating a conductive material, comprising:
実質的に表面に保護層を設けない銀塩含有層を有する導電性材料前駆体を露光し、現像処理することを特徴とする請求項5に記載の導電性材料の処理装置。   6. The conductive material processing apparatus according to claim 5, wherein the conductive material precursor having a silver salt-containing layer substantially not provided with a protective layer is exposed and developed.
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