JP5079269B2 - Conveying device and production apparatus for film with plating film - Google Patents

Description

  The present invention relates to a transport device for transporting a strip-like long film in a fixed direction and a manufacturing apparatus for a film with a plating film, and in particular, an electroplating bath or film for forming a plating film on a film conductive surface while transporting a film. The present invention relates to a transport apparatus provided with a submerged roller in a liquid tank such as a cleaning liquid tank for cleaning the film and a manufacturing apparatus for a film with a plating film.

  Conventionally, when continuously plating a strip-like long film, the film is continuously passed through the plating bath while being transported in a certain direction with low tension.

  In such an apparatus, the submerged roller disposed in the plating bath is rotated by applying a force from the outside to suppress the slip between the film and the submerged roller. For example, in the apparatus described in Patent Document 1, a blade is provided in a portion of the processing bath that does not contact the film of the submerged roller, and the submerged roller is rotated by spraying the vane with the liquid. However, in the configuration in which liquid is sprayed on the blades, it is very difficult to synchronize the rotation speed of the submerged roller with the film conveyance speed, and it is almost impossible to cope with the change to an arbitrary conveyance speed. . For this reason, slip between the film and the submerged roller cannot be suppressed, and scratches are generated on the film surface.

Moreover, in the apparatus described in Patent Document 2, a driving device provided outside the plating bath and a shaft portion of the submerged roller are operatively coupled by a chain to rotate the submerged roller. In this device, the chain reciprocates between the treatment liquid in the plating bath and the air, so the treatment liquid adhering to the chain is transferred and attached to the rotary drive components in the air that rotate the chain, causing moisture to evaporate. Precipitates are generated. For this reason, the movement of the driving device becomes unstable, the corrosion of the driving device proceeds, and deposits adhere to the film (product to be plated) or become a major factor that causes scratches on the film surface.
JP-A-10-147897 JP 2000-64089 A

  This invention is made | formed in view of this situation, The objective is the manufacturing apparatus of the conveying apparatus and plating film with a plating film which can suppress that a film | membrane surface generate | occur | produces a damage | wound even if it conveys a film with low tension. Is to provide.

In order to solve the above-mentioned problem, the transport device according to the first aspect of the present invention is a transport device that transports a belt-shaped film in a certain direction, and is transported in a certain direction in the liquid in the liquid tank. A submerged roller that contacts and feeds the film, the submerged roller comprising: a cylindrical body that is in contact with the film; a shaft that is fixedly supported by the liquid tank; and a cylindrical body that is fixed to the cylindrical body. And a side body that is rotatably supported by the shaft body via a bearing, and exhausts air inside the cylindrical body to both ends of the cylindrical body. For this purpose, a plurality of apertures are provided .

According to the first aspect of the present invention, the submerged roller provided in the liquid in the liquid tank is fixed to the cylindrical body that is in contact with the film, the shaft body fixedly supported by the liquid tank, and the cylindrical body. A side body is provided that closes both ends of the cylindrical body and is rotatably supported by the shaft through a bearing. When the film transported in a certain direction comes into contact with the cylindrical body, the cylindrical body rotates in the film transport direction by the rotation of the side body supported by the shaft body via the bearing. By using a cylindrical body, it is possible to reduce the weight and rotate it with less force, and the submerged roller rotates stably even when the film is conveyed with low tension. This makes it possible to synchronize the rotation speed of the submerged roller with the conveyance speed of the film, suppress slippage between the film and the cylindrical body, and suppress the occurrence of scratches on the film surface. Moreover, it is possible to change the rotation speed of the submerged roller to an arbitrary conveyance speed, and even if the conveyance speed is changed, slip between the film and the cylindrical body is suppressed. Further, since the submerged roller is not connected to an external driving device, the liquid does not adhere to the driving device and deposits do not adhere, and the rotation of the submerged roller can be stabilized.

In addition, a plurality of holes for discharging the air inside the cylindrical body are provided at both ends of the cylindrical body, and when the submerged roller is immersed in the liquid tank, the air inside the submerged roller is opened. The liquid is discharged from the hole into the liquid tank, and the air inside the liquid roller is replaced with the liquid in the liquid tank. Thereby, it is suppressed that the liquid in a liquid tank permeates into the inside of a submerged roller from the clearance of a bearing, and an air layer and a liquid layer are made and rotation of a submerged roller becomes unstable.

According to a second aspect of the present invention, there is provided the conveying apparatus according to the first aspect, wherein a spiral groove is formed on a peripheral surface of the cylindrical body that contacts the film.

According to the second aspect of the present invention, since the spiral groove is formed on the peripheral surface of the cylindrical body that comes into contact with the film, the liquid accompanying (attached) to the surface during the transport of the film is removed from the spiral shape. A flow is allowed to escape to the side of the cylinder along the groove, and a film holding force is generated at the shoulder of the groove where the film and the cylinder come into contact. Thereby, the slip between the film and the submerged roller is further suppressed, and the occurrence of scratches on the film surface is suppressed.

According to a third aspect of the present invention, in the transfer device according to the first or second aspect , the shaft body penetrates the cylindrical body.

According to invention of Claim 3 , the shaft body has penetrated the cylindrical body, and the side body is supported by the shaft body via the bearing. Thereby, the configuration of the submerged roller can be simplified and the cost can be reduced.

According to a fourth aspect of the present invention, in the conveyance device according to any one of the first to third aspects, the bearing is a resin rolling bearing or a sliding bearing.

According to the fourth aspect of the present invention, the bearing is a resin rolling bearing or a sliding bearing, and it is possible to smoothly rotate the side body and the cylindrical body supported by the shaft body via the bearing. .

According to a fifth aspect of the present invention, in the conveyance device according to any one of the first to fourth aspects, the axial movement of the side body is restricted on both sides of the bearing in the shaft body. It is characterized in that a regulating plate is provided.

According to the fifth aspect of the present invention, the restriction plate is provided on both sides of the bearing in the shaft body, so that the movement of the side body in the axial direction is restricted.

An apparatus for producing a film with a plating film according to the invention of claim 6 is an electrolytic plating bath in which a conductive surface of a belt-shaped film is brought into contact with a cathode feeding roller, and a plating film is formed on the conductive surface from an electrolytic plating bath; It has the washing tank which wash | cleans the said film in the downstream of the said electrolytic plating bathtub, and the conveying apparatus of any one of Claim 1 to 5 in the said electrolytic plating bathtub or the said washing tank. It is a feature.

According to invention of Claim 6 , since the conveying apparatus of any one of Claim 1 to Claim 5 is provided in the electroplating bath or the washing tank, the electroplating bath or the washing tank It becomes possible to synchronize the rotation speed of the submerged roller provided in the liquid with the transport speed of the film. For this reason, the slip of a film and a cylindrical body is suppressed and generation | occurrence | production of the damage | wound of a film surface is suppressed. Moreover, it is possible to change the rotation speed of the submerged roller to an arbitrary conveyance speed, and even if the conveyance speed is changed, slip between the film and the cylindrical body is suppressed. Further, since the submerged roller is not connected to an external driving device, the plating solution or the like does not adhere to the driving device and deposits do not adhere, and the rotation of the submerged roller can be stabilized.

  Since the present invention is configured as described above, even if a belt-like film is conveyed with low tension, the rotation of the submerged roller in the liquid tank is stabilized and slippage between the submerged roller and the film is suppressed. And the occurrence of scratches on the film surface can be suppressed.

  Embodiments of the present invention will be described with reference to the drawings. In addition, the same code | symbol is provided to the member which has the substantially same function throughout all the drawings, and the overlapping description may be abbreviate | omitted.

  FIG. 1 is a schematic configuration diagram showing a film-coated film manufacturing apparatus 10 on which a cleaning apparatus 200A according to an embodiment of the present invention is mounted.

  As shown in FIG. 1, the film-coated film manufacturing apparatus 10 includes an exposure device 12, a developing device 14, an electrolytic plating device 16, a post-processing device 17, and a winding device 19.

  First, the exposure apparatus 12 will be described. The exposure apparatus 12 carries a desired thin line pattern (for example, a lattice shape, a honeycomb shape) while conveying a light-transmitting photosensitive web 18 made of a strip-like long wide film provided with a silver salt-containing layer as a material to be plated. Etc.) is a device that performs exposure. By this pattern exposure, a patterned thin metal silver portion is formed in the exposed portion of the silver salt-containing layer of the photosensitive web 18.

  The exposure device 12 is provided with a plurality of conveyance roller pairs 20 along the conveyance path of the light-transmissive photosensitive web 18, and these conveyance roller pairs 20 are constituted by drive rollers and nip rollers.

  The exposure apparatus 12 is provided with a supply unit at the most upstream part in the transport direction. A magazine 22 for storing a long and wide light-transmitting photosensitive web 18 wound in a roller shape is set in the supply section. The light transmissive photosensitive web 18 is provided with a drawing roller 22A for pulling out the light transmissive photosensitive web 18 and transporting it toward the downstream side.

  An exposure unit 24 is provided on the downstream side in the transport direction from the supply unit. The exposure unit 24 exposes the light transmissive photosensitive web 18. The exposure unit 24 may be a continuous surface exposure unit using a photomask or a scanning exposure unit using a laser beam. This scanning exposure unit includes a monochromatic high light source such as a gas laser, a light emitting diode, a semiconductor laser, a semiconductor laser, or a second harmonic light source (SHG) that combines a solid state laser using a semiconductor laser and a nonlinear optical crystal. A scanning exposure method using density light can be preferably applied. Further, as the scanning exposure unit, a scanning exposure method using a KrF excimer laser, ArF excimer laser, F2 laser, or the like can also be applied.

  Further, in order to make the scanning exposure unit compact and inexpensive, a second harmonic generation light source (SHG) combining a semiconductor laser, a semiconductor laser, or a solid-state laser and a nonlinear optical crystal may be applied for exposure. Good. In order to design a device that is particularly compact, inexpensive, long-life, and highly stable, it is preferable to apply a semiconductor laser.

Specifically, as a laser light source of the scanning exposure unit, a blue semiconductor laser having a wavelength of 430 to 460 nm (announced by Nichia Chemical at the 48th Applied Physics Related Conference in March 2001), a semiconductor laser (oscillation wavelength about 1060 nm) a waveguide-like inverted domain structure about 530nm green laser taken out by wavelength conversion by the SHG crystal of LiNbO ₃ having a wavelength of about 685nm of the red semiconductor laser (Hitachi type No.HL6738MG), a wavelength of about 650nm A red semiconductor laser (Hitachi type No. HL6501MG) or the like can be preferably applied.

  The exposure apparatus 12 is not limited to the above-described configuration, and a normal exposure apparatus used for a silver salt photographic film, photographic paper, a printing plate making film, a photomask emulsion mask, or the like can be applied.

  Next, the developing device 14 will be described. The developing device 14 is disposed on the downstream side in the transport direction of the exposure device 12 and is a device that develops, fixes, and cleans the light-transmitting photosensitive web 18 that has been subjected to a desired fine line pattern exposure.

  The developing device 14 is provided with a developing tank 26, a bleach-fixing tank 28, and a water washing tank 30 in order from the upstream side in the transport direction. The water washing tank 30 includes a first water washing tank 30A, a second water washing tank 30B, It consists of the 3rd water washing tank 30C and the 4th water washing tank 30D. For example, a predetermined amount of developer 26L is stored in the developing tank 26, a predetermined amount of bleach-fixing liquid 28L is stored in the bleach-fixing tank 28, and a cleaning liquid 30L is stored in the first washing tank 30A to the fourth washing tank 30D. Is stored in a predetermined amount. The photosensitive web 18 is conveyed through the liquid in the processing tanks 26 to 30 by the rollers and guides in the processing tanks 26 to 30 so that the development, fixing, and cleaning processes are performed. In addition, on the most upstream side of the developing tank 26, a carry-in roller pair 32 including a driving roller 32A and a driven roller 32B is disposed. The carry-in roller pair 32 is a photosensitive web 18 carried out from the exposure device 12. Is guided into the developer 26L.

  Here, the development, fixing, and washing processes can be performed by ordinary development processing techniques used for silver salt photographic films, printing plate-making films, photomask emulsion masks, and the like. The developing solution 26L, the bleach-fixing solution 28L, and the cleaning solution 30L can be appropriately applied according to these. For example, the developer 26L is not particularly limited, but PQ developer, MQ developer, MAA developer, and the like can also be used. For example, CN-16, CR-56, CP45X, FD- manufactured by Fuji Film Co., Ltd. 3. Developer such as C-41, E-6, RA-4, D-19, D-72 manufactured by Papitor, KODAK, or a developer included in the kit, or lith development such as D-85 A liquid can be used. The fixing process is performed for the purpose of removing and stabilizing the silver salt in the unexposed part.

  Further, the developer 26L can contain an image quality improver for the purpose of improving the image quality. Examples of the image quality improver include nitrogen-containing heterocyclic compounds such as benzotriazole. In addition, it is also preferable to use polyethylene glycol, particularly when a lith developer is used.

  In the developing device 14, the photosensitive web 18 that has passed through the liquid in each of the processing tanks 26 to 30 is discharged from the developing device 14 without being dried.

  Next, the electroplating apparatus 16 will be described. The electrolytic plating apparatus 16 performs electroplating on the photosensitive web 18 that has been exposed and developed to form a fine-line-shaped metallic silver portion, and carries conductive fine particles on the metallic silver portion to perform plating (conductive property). This is an apparatus for forming a metal part.

  In the electroplating apparatus 16, a moisture removing device 40 </ b> A that removes moisture from the photosensitive web 18 after passing through the washing tank 30 is disposed on the upstream side in the conveyance direction of the photosensitive web 18. In the moisture removing device 40A, air knife devices 42 and 44 are arranged on both sides of the photosensitive web 18, and the air knife is blown from both sides of the photosensitive web 18 to remove moisture adhering to the photosensitive web 18.

  As shown in FIG. 2, the photosensitive web 18 that has passed through the moisture removing device 40 </ b> A is guided by the support roller 46 and the support roller 48, and is conveyed to the cathode power supply roller 50 </ b> A that supplies power while being in contact with the metal silver portion of the photosensitive web 18. Is done. An elastic roller 52A that presses and contacts the metallic silver portion of the photosensitive web 18 against the cathode power supply roller 50A is disposed at a position facing the cathode power supply roller 50A across the photosensitive web 18. The elastic roller 52A is provided with an elastic layer made of rubber or the like on the outer peripheral surface of a core metal supported rotatably. Urethane rubber or the like is used as the elastic layer. By pressing the elastic roller 52A, the photosensitive web 18 and the cathode power supply roller 50A can be brought into close contact with each other.

A plating tank 60A filled with a plating solution 61 is disposed on the downstream side in the transport direction of the photosensitive web 18 from the cathode power supply roller 50A. A submerged roller 62A is provided in the plating solution 61 of the plating tank 60A, and the photosensitive web 18 is wound around the peripheral surface of the submerged roller 62A. In this step, the metallic silver portion of the photosensitive web 18 brought into contact with the cathode power supply roller 50A is conveyed by the submerged roller 62A in the plating solution 61 of the plating tank 60A. A case 64A in which copper balls are stacked and filled is used as an anode electrode, and the cathode electrode is used as a cathode power supply roller 50A, and power is supplied from a DC power source (rectifier) 66A to form a layered plating film on the photosensitive web 18. In this embodiment, the DC power supply 66A supplies power from the cathode power supply roller 50A to the case 64A that is an anode electrode, and a plating film is formed on the photosensitive web 18 so as to have a current density of 0.2 to 10 A / dm ^2. To do.

  Here, as the electroplating treatment, for example, an electroplating technique used in a printed wiring board can be applied, and the electroplating is preferably electrolytic copper plating. In the present embodiment, an electrolytic copper plating bath solution is applied as the plating solution 61. Examples of the electrolytic copper plating bath include a copper sulfate bath, a copper pyrophosphate bath, and a copper borofluoride bath. Chemical species contained in the electrolytic copper plating solution include copper sulfate and copper chloride, sulfuric acid to improve the stability and conductivity of the plating solution, and to increase the uniform electrodeposition, acceleration of dissolution of the anode and auxiliary effect of additives Examples of additives for improving chlorine and bath stabilization and plating denseness include polyethylene oxide and bipyridine.

  A circulation pipe (not shown) is connected to the lower part of the plating tank 60A, and the plating solution 61 in the plating tank 60A is supplied to the circulation pipe and passes through a filter (not shown). The foreign matter is removed and returned to the plating tank 60A.

  As shown in FIG. 2, a cleaning tank 70A filled with cleaning water 71 for cleaning the photosensitive web 18 is disposed downstream of the plating tank 60A in the conveying direction of the photosensitive web 18. Two rollers 74 and 76 for conveying the photosensitive web 18 in the air are provided substantially horizontally above the plating tank 60A and above the cleaning tank 70A. The rollers 74 and 76 are driven to rotate as the photosensitive web 18 moves. A submerged roller 72A is provided in the cleaning water 71 in the cleaning tank 70A, and the photosensitive web 18 is wound around the peripheral surface of the submerged roller 72A. As a result, the photosensitive web 18 passes through the plating solution 61 of the plating tank 60A, is guided by the two rollers 74 and 76, and is conveyed into the cleaning water 71 of the cleaning tank 70A. The photosensitive web 18 that has passed through the cleaning tank 70A is guided and conveyed by the submerged roller 72A and the support roller 80 disposed above.

  A pair of liquid squeezing rollers 82 that are in pressure contact with the front and back of the photosensitive web 18 are disposed on the upper side of the plating tank 60 </ b> A and upstream of the roller 74 in the transport direction. In addition, a pair of liquid squeezing rollers 84 that are in pressure contact with the front and back of the photosensitive web 18 are disposed above the cleaning tank 70 </ b> A and upstream of the support roller 80 in the transport direction. The liquid squeezing rollers 82 and 84 are driven to rotate as the photosensitive web 18 moves. The peripheral surface of the liquid squeezing roller 82 is in contact with the plating solution 61, and the peripheral surface of the liquid squeezing roller 84 is in contact with the cleaning water 71. The liquid squeezing rollers 82 and 84 are always used in a wet state.

  Below the rollers 74 and 76, cleaning devices 200A and 202A for cleaning the rollers 74 and 76 are provided. The cleaning apparatuses 200 </ b> A and 202 </ b> A include a bowl-shaped cleaning liquid receiving tank 204 filled with cleaning water 205, and the lower portions of the rollers 74 and 76 are immersed in the cleaning water 205. The amount of the cleaning water 205 is kept constant by overflowing the cleaning water 205 by the overflow weir 206 on the side of the cleaning liquid receiving tank 204. The cleaning water 205 overflowed from the cleaning liquid receiving tank 204 is discharged through the discharge pipe 210. A supply pipe 216 for supplying cleaning water 205 is connected to the cleaning liquid receiving tank 204. A cleaning water management tank 220 is disposed above the cleaning liquid receiving tank 204, and the cleaning water 205 in the cleaning water management tank 220 is branched into a plurality of supply pipes 216 and supplied to each cleaning liquid receiving tank 204. The

  In the electroplating apparatus 16 having the above-described configuration, first, the belt-like long and wide photosensitive web 18 is conveyed in the direction of the arrow, and the water adhering to the photosensitive web 18 is removed by the air knife apparatuses 42 and 44. Thereafter, the metallic silver portion of the photosensitive web 18 is brought into contact with the cathode power supply roller 50A at the nip portion between the cathode power supply roller 50A and the elastic roller 52A, and then conveyed to the plating tank 60A. At that time, a case 64A in which copper balls are stacked and filled is used as an anode electrode, and a cathode power supply roller 50A is used as a cathode electrode. . Further, after passing through the plating tank 60 </ b> A, the photosensitive web 18 is guided by rollers 74 and 76 and conveyed to the cleaning tank 70 </ b> A, and the plating solution adhering to the photosensitive web 18 is washed with the washing water 71.

  Although illustration is omitted, in the electroplating apparatus 16, a plurality of units each including a moisture removing apparatus 40A, a cathode feeding roller 50A, a plating tank 60A, and a cleaning tank 70A are arranged (in this embodiment, 8 units). ), The above-described steps are repeated a plurality of times, whereby copper plating having a predetermined thickness is formed on the photosensitive web 18.

  Further, a plurality of units including a moisture removing device 40B for performing nickel plating, a cathode power supply roller 50B, a plating tank 60B, and a cleaning tank 70B are arranged on the downstream side of the photosensitive web 18 in the conveying direction. (In this embodiment, 8 units) By repeating the same process as described above a plurality of times, nickel plating having a predetermined thickness is formed on the photosensitive web 18.

  In such an electroplating apparatus 16, submerged rollers 62A, 62B, 72A, and 72B are provided in plating tanks 60A and 60B and cleaning tanks 70A and 70B, respectively. Since the submerged rollers 62A, 62B, 72A, and 72B have the same configuration, an example of the submerged roller 62A will be described with reference to FIGS.

  As shown in FIGS. 3 and 4, the submerged roller 62 </ b> A includes a columnar shaft body 152 fixedly supported by a frame 166 and a cylindrical body 154 through which the shaft body 152 is inserted. Both ends of the cylindrical body 154 are closed by side bodies 156, and the side bodies 156 are supported by the shaft body 152 via bearings 158. That is, the shaft body 152 is configured to penetrate the side body 156 via the bearing 158.

  A plurality of circular openings 160 are formed at predetermined intervals on both ends of the peripheral surface of the cylindrical body 154. A spiral groove 162 is formed on the peripheral surface of the cylindrical body 154 that contacts the photosensitive web 18 closer to the center than the opening 160. Further, at both ends of the bearing 158 of the shaft body 152, a restriction plate 164 that restricts the movement (walk) of the side body 156 in the axial direction is provided so as to be in contact with the ball of the bearing 158.

  The cylindrical body 154 is formed of a resin, and for example, polyvinyl chloride, polypropylene, or a fluororesin (for example, PTFE (polytetrafluoroethylene)) is used. The resin is appropriately selected from the chemical resistance of the plating solution 61 used.

  As the bearing 158, a resin rolling bearing, a sliding bearing, or the like is used. PTFE (polytetrafluoroethylene) and polypropylene are desirable as materials for rolling bearings because of their chemical resistance, and sliding bearings are resistant to chemicals, dust, and deposit resistance (precipitation of deposits). NTN bearing FL3700 is desirable. Further, by using a chemical-resistant resin as the material of the bearing 158, it is possible to stabilize the rotation of the submerged roller 62A even if the submerged roller 62A is disposed in the plating solution 61.

  As shown in FIG. 5, the dimensional shape of the spiral groove 162 formed on the peripheral surface of the cylindrical body 154 has a pitch of 1 to 10 mm, preferably 2 to 3 mm, and a groove width of 1 to 5 mm, preferably 1.1 to. The depth of 2 mm and the groove 162 is set to 0.1 to 3 mm, preferably 0.2 to 0.5 mm. Further, the radius of the outer peripheral surface of the cylindrical body 154 and the shoulder arc R1 above the groove 162 and the radius of the bottom arc R2 of the groove 162 are set to 0.2 to 1 mm, preferably 0.3 to 0.6 mm.

  In such a submerged roller 62A, the side body 156 is supported by the shaft body 152 that is fixedly supported via the bearing 158, and the side body 156 at both ends and the cylindrical body 154 supported by these rotate. As a result, when the photosensitive web 18 conveyed in a certain direction comes into contact with the peripheral surface of the cylindrical body 154, the cylindrical body 154 is driven by the photosensitive web 18 and smoothly rotates in the conveying direction. By using the cylindrical body 154, it is possible to reduce the weight and rotate it with less force. Even if the photosensitive web 18 is conveyed with low tension, the submerged roller 62A rotates stably and sends the photosensitive web 18. be able to.

  Thereby, the rotation speed of the submerged roller 62A can be synchronized with the conveyance speed of the photosensitive web 18, the slip between the photosensitive web 18 and the cylindrical body 154 is suppressed, and the occurrence of scratches on the surface of the photosensitive web 18 is suppressed. Can do. In addition, the rotation speed of the submerged roller 62A can be changed to an arbitrary conveyance speed. Even if the conveyance speed is changed, the surface of the photosensitive web 18 is not damaged due to slippage between the photosensitive web 18 and the cylindrical body 154. Can be suppressed. In addition, since the submerged roller 62A is not connected to an external driving device, it is possible to suppress the deposit of the plating solution 61 and the deposit on the components of the driving device. For this reason, the rotation of the submerged roller 62A is stabilized, and slippage with the photosensitive web 18 can be suppressed.

  A plurality of apertures 160 are provided at both ends of the peripheral surface of the cylindrical body 154. When the submerged roller 62A is immersed in the plating tank 60A, the air inside the cylindrical body 154 is plated from the apertures 160. It is discharged into the tank 60 </ b> A, and the air inside the cylindrical body 154 is replaced with the plating solution 61. Thereby, it is suppressed that the plating solution 61 enters the inside of the submerged roller 62A from the gap between the bearings 158 to form an air layer and a processing liquid layer, and the rotation of the submerged roller 62A becomes unstable.

  Further, since the spiral groove 162 is formed on the peripheral surface of the cylindrical body 154, the plating solution 61 accompanying (attached) to the surface when the photosensitive web 18 is conveyed is placed along the spiral groove 162 to the side. A flow to escape occurs. As a result, the holding force of the photosensitive web 18 is generated at the shoulder portion of the groove 162 where the photosensitive web 18 and the cylindrical body 154 come into contact, and the photosensitive web 18 can be conveyed without slipping with the submerged roller 62A. Generation of scratches on the surface of the web 18 can be suppressed.

  Although the configuration and operation of the submerged roller 62A have been described with reference to FIGS. 3 to 5, the submerged rollers 62B, 72A, and 72B have the same configuration as the submerged roller 62A, and the same operation is obtained.

  Next, as shown in FIG. 1, the photosensitive web 18 that has been plated is subjected to a washing unit 114 containing a cleaning solution 115 (water) for removing the plating solution and a plating film through a roller 125 that can detect the film tension. After passing through the rust prevention treatment part 116 containing the rust prevention treatment liquid 117 to be protected, it is conveyed to the water washing part 118 containing the cleaning liquid 119 (water) for removing the excessive rust prevention treatment liquid. Further, the plated photosensitive web 18 passes through a drying process section 120 having a drying furnace for removing moisture, passes through a speed adjusting section 121, passes through a balance roller section 122, and is adjusted in tension, and then passed through an accumulator 123. The roll film 124A is used. Thus, a film with a plating film is obtained.

  The substantial film transport tension is preferably 5 N / m or more and 200 N / m or less. When the tension was actually less than 5 N / m, the film began to meander and the control of the conveyance path was not successful. On the other hand, when it exceeds 200 N / m, the plated film metal on which the film is formed has internal distortion, which causes problems such as curling of the product.

  In this way, plating (conductive metal portion) is formed on the fine-line metal silver portion of the photosensitive web 18. By such a process, a film with a plating film can be obtained.

  Note that the number of plating tanks of the electrolytic plating apparatus 16 may be increased by 8 sets or more according to a desired plating film thickness (thickness of the conductive metal portion). A desired plating film thickness (thickness of the conductive metal portion) can be easily obtained according to this number.

  Next, the photosensitive web 18 will be described. The photosensitive web 18 as a material to be plated is, for example, a long and wide flexible base material made of a photosensitive material in which a silver salt-containing layer containing a silver salt (for example, silver halide) is provided on a light-transmitting support. . Further, a protective layer may be provided on the silver salt-containing layer, and this protective layer means a layer made of a binder such as gelatin or a high molecular polymer, and exhibits an effect of preventing scratches and improving mechanical properties. In order to do so, it is formed on the silver salt-containing layer. It is preferable that the thickness of a protective layer is 0.02-20 micrometers, More preferably, it is 0.1-10 micrometers, More preferably, it is 0.3-3 micrometers.

  The composition of these silver salt-containing layers and protective layers includes silver halide emulsion layers (silver salt-containing layers) and protective layers applied to silver salt photographic films, photographic paper, printing plate-making films, emulsion masks for photomasks, etc. Layers can be applied as appropriate.

  In particular, as the photosensitive web 18 (photosensitive material), a silver salt photographic film (silver salt photosensitive material) is preferable, and a black and white silver salt photographic film (black and white silver salt photosensitive material) is the best. The silver salt applied to the silver salt-containing layer is most preferably silver halide.

  On the other hand, as the light-transmitting support, a single-layer plastic film or a multilayer film in which two or more layers are combined can be applied. Examples of the raw material for the plastic film include polyesters such as polyethylene terephthalate (PET) and polyethylene naphthalate; polyolefins such as polyethylene (PE), polypropylene (PP), polystyrene, and EVA; polyvinyl chloride, polyvinylidene chloride, and the like. In addition, use polyetheretherketone (PEEK), polysulfone (PSF), polyethersulfone (PES), polycarbonate (PC), polyamide, polyimide, acrylic resin, triacetylcellulose (TAC), etc. Can do.

  Among these, from the viewpoint of transparency, heat resistance, ease of handling, and cost, the plastic film as the support is a polyethylene terephthalate film or cellulose triacetate film that is usually applied to silver salt photographic films (silver salt photosensitive materials). In addition, a polyimide film is preferable. Particularly preferred is a polyethylene terephthalate film.

  Moreover, since the electromagnetic shielding material for displays requires transparency, it is desirable that the support has high transparency. In this case, the total visible light transmittance of the light transmissive support is preferably 70 to 100%, more preferably 85 to 100%, and particularly preferably 90 to 100%.

  For example, the width of the photosensitive web 18 is preferably 50 cm or more, and the thickness is preferably 50 to 200 μm.

  Further, after exposure / development, the photosensitive web 18 is formed with a metallic silver portion in the exposed portion. The mass of the metallic silver contained in the metallic silver portion is the silver contained in the exposed portion before the exposure. It is preferable that it is a content rate of 50 mass% or more with respect to the mass of 80 mass% or more. If the mass of silver contained in the exposed portion is 50% by mass or more with respect to the mass of silver contained in the exposed portion before exposure, it is preferable because high electroconductivity can be obtained in subsequent electrolytic plating treatment.

  In order to impart conductivity to the metal silver portion formed by the exposure and development processing, the above-described electroplating apparatus 16 performs an electrolytic plating process for supporting the conductive metal particles on the metal silver portion. That is, in the apparatus 10 for producing a film with a plating film, a light-transmitting photosensitive web 18 provided with a silver salt-containing layer is used as a material to be plated, and the silver salt-containing layer is exposed and developed to be plated. As a desired fine-line metal silver portion is formed. Since this fine line-shaped metallic silver part is formed by exposing and developing the silver salt-containing layer, it becomes a fine line-shaped metallic silver part patterned with very fine fine lines. When electroplating is performed on such a light-transmitting photosensitive web 18, conductive particles are supported on the fine-line metal silver portion, which becomes the conductive metal portion. For this reason, the electromagnetic wave shielding material obtained has a fine line-shaped metal part patterned with very fine fine lines and a large area light transmission part.

  In the apparatus 10 for producing a film with a plating film having the above-described configuration, the submerged rollers 62A, 72A, 62B, and 72B for conveying the photosensitive web 18 are provided. In particular, it can be conveyed without slipping with the submerged rollers 62A, 72A, 62B, 72B, and the occurrence of scratches on the surface of the photosensitive web 18 can be suppressed. Therefore, it is possible to continuously form a high-quality plating film with few scratches on the surface of the photosensitive web 18 while conveying the long and wide photosensitive web 18 with low tension. For this reason, the manufacturing apparatus 10 of the film with a plating film which has high productivity with an inexpensive installation is realizable.

  In the above embodiment, the submerged rollers 62A, 62B, 72A and 72B are disposed in the plating tanks 60A and 60B and the cleaning tanks 70A and 70B, but the present invention is not limited to this configuration. For example, the present invention can also be applied to a submerged roller disposed in a liquid tank containing a general-purpose processing liquid or cleaning liquid.

It is a schematic longitudinal cross-sectional view which shows the manufacturing apparatus of the film with a plating film in one Embodiment of this invention. It is a schematic block diagram which shows the plating tank arrange | positioned by the electrolytic plating apparatus used with the manufacturing apparatus shown in FIG. 1, and a washing tank vicinity. It is a perspective view which shows the submerged roller provided in the plating tank shown in FIG. It is sectional drawing which shows the submerged roller provided in the plating tank shown in FIG. It is an expanded sectional view which shows the surrounding surface of the cylindrical body of a submerged roller.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Film production apparatus with plating film 16 Electrolytic plating apparatus 18 Photosensitive web (film)
60A plating tank (liquid tank)
60B plating tank (liquid tank)
62A Submerged roller 62B Submerged roller 61 Plating solution (liquid)
70A Cleaning tank (liquid tank)
70B Cleaning tank (liquid tank)
71 Washing water (liquid)
72A Submerged roller 72B Submerged roller 152 Shaft body 154 Cylindrical body 156 Side body 158 Bearing 160 Open hole 162 Groove

Claims (6)

A transport device for transporting a belt-shaped film in a certain direction,
In the liquid in the liquid tank, provided with a submerged roller to send in contact with the film conveyed in a certain direction,
The submerged roller is
A cylindrical body in contact with the film;
A shaft fixedly supported in the liquid tank;
A side body which is fixed to the cylindrical body and closes both ends of the cylindrical body, and which is rotatably supported by the shaft body via a bearing;
It is configured to have,
A conveying device , wherein a plurality of openings for discharging air inside the cylindrical body are provided at both ends of the cylindrical body . The conveying device according to claim 1, wherein a spiral groove is formed on a peripheral surface of the cylindrical body that contacts the film . The conveying device according to claim 1, wherein the shaft body passes through the cylindrical body . The said bearing is a resin-made rolling bearing or a sliding bearing, The conveying apparatus of any one of Claim 1- Claim 3 characterized by the above-mentioned. The restriction plate which restricts the movement of the axial direction of the side body is provided in the both sides of the bearing in the shaft body, The statement given in any 1 paragraph of Claims 1-4 characterized by things. Conveying device. An electroplating bath in which the conductive surface of the belt-shaped film is brought into contact with the cathode feeding roller, and a plating film is formed on the conductive surface from an electroplating bath;
A washing tank for washing the film on the downstream side of the electrolytic plating bath;
The conveying apparatus according to any one of claims 1 to 5, wherein the electrolytic plating bath or the cleaning tank is used.
An apparatus for producing a film with a plating film, comprising:

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