JP2009069424A - Optical deflector and optical deflector array, and image projection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To further improve an optical deflector configured to drive a planar member (mirror) movably mounted on a supporting point member by electrostatic force without using a torsion beam hinge. <P>SOLUTION: The optical deflector is equipped with a supporting point member 104, first and second electrodes 103a, 130b disposed interposing the supporting point member, and a conductive planar member having a light reflecting surface, wherein the planar member is movably mounted on the supporting point member as opposing to the first and second electrodes, and the planar member is displaced by inclining around the supporting point member toward the first electrode or the second electrode by electrostatic force induced by potential difference between the planar member and the first and second electrodes. The deflector has such a structure that a liquid receiving member 105 is disposed opposing to the planar member 107 and a liquid member 106 is held in a space between the planar member and the liquid receiving member. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an optical deflection apparatus and an optical deflection apparatus array that change the direction of outgoing light with respect to incident light, and an image projection apparatus such as a projection projector or a digital theater system that uses the optical deflection apparatus or optical deflection apparatus array as an optical switch means. About.

  Conventionally, many optical deflecting devices having a structure in which a plate-like member having a light reflecting surface (mirror) is supported by a spring rigid torsion beam hinge have been proposed (see, for example, Patent Document 1 and Patent Document 2). In recent years, a mirror device of an optical deflection apparatus using a liquid metal as a hinge has also been proposed (for example, see Non-Patent Document 1).

  The present applicant, on the other hand, movably places a plate-like member having a light reflecting surface on a fulcrum member without being supported by a hinge or the like, and includes an electrode group and a plate-like member disposed around the fulcrum member. An optical deflecting device has been proposed in which the plate-like member is rotated about the fulcrum member as a fulcrum and the inclination direction is switched by an electrostatic force acting between them (see, for example, Patent Document 3 and Patent Document 4). Around the plate-like member, a restricting member provided with a cap-shaped stopper on the top is arranged to restrict the rotation of the plate-like member.

Japanese translation of PCT publication No. 2002-525676 JP-T-2005-534048 JP 2004-78136 A JP 2006-113361 A Hongjun Zeng, “Tilting Micromirror With a Liquoid-Metal Pivot”, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 6, December, 2006, pp 1568-1575

  When the number of pixels is increased in an image projection device to improve the image quality, it is necessary to make the size of the light reflecting surface of the light deflection device used therefor finer. Further, in order to reduce the size of the projector for portable use, it is necessary to reduce the size of the light valve.

  In an optical deflecting device using a spring rigid torsion beam hinge, it is difficult to reduce the size of the hinge, and there is a limit to downsizing the device. In addition, when the torsion beam hinge is downsized, there are problems such as increased rigidity and increased distortion, and plastic deformation is likely to occur.

  In an optical deflecting device using a liquid metal as a hinge, the liquid metal has conductivity, but has a large surface tension and a large mechanical resistance to driving. In miniaturization of a high-density two-dimensional light deflector array used in an image projection apparatus, for example, a light reflection surface (mirror) of 10 μm square or less is required. In the configuration in which non-patent document 1 uses only the liquid metal as a fulcrum of the plate-like member, there is a problem that miniaturization is difficult. When the fulcrum is composed of only liquid metal, if a liquid metal having a low surface tension is used to reduce the size or reduce the mechanical resistance, the mirror causes unnecessary vibration due to deformation of the liquid metal. Further, since the mirror uses only liquid metal as a fulcrum, rotation of a plane parallel to the mirror substrate is likely to occur. In the two-dimensional optical deflector array, since the mirrors (plate members) are arranged close to each other, there is a problem that the mirrors come into contact with each other when rotation of a plane parallel to the substrate occurs.

  On the other hand, the optical deflecting device having a structure in which the plate-like member is movably mounted on the fulcrum member without using the torsion beam hinge by the present applicant has no hinge, so there is no problem as described above. It is easy to miniaturize the plate-like member. However, in order to restrict the rotation of the plate-like member, a stopper is provided on the upper part of the restriction member. When this stopper covers the plate-like member and the area occupied by the plate-like member is large, the incident light or reflected light is affected. There is a problem that gives.

  An object of the present invention is to further improve an optical deflection apparatus having a structure in which a plate-like member (mirror) is movably mounted on a fulcrum member without using a torsion beam hinge. The present invention also provides an optical deflector array in which such optical deflectors are arranged in an array in one or two dimensions, and an image projector using the optical deflector or the optical deflector array as an optical switch means. The purpose is to provide.

  The invention according to claim 1 comprises a fulcrum member, first and second electrodes disposed across the fulcrum member, and a conductive plate member having a light reflecting surface, the plate member Is movably mounted on the fulcrum member so as to face the first and second electrodes, and the plate-like member is supported by the electrostatic force due to a potential difference between the plate-like member and the first and second electrodes. In an optical deflection apparatus that tilts and displaces toward the first electrode side or the second electrode side with a member as a fulcrum, a liquid receiving member is provided facing the plate-like member, and liquid is provided in the space between the plate-like member and the liquid receiving member. The member is held.

  According to a second aspect of the present invention, in the optical deflection apparatus according to the first aspect, two or more liquid receiving members holding the liquid member are provided.

  According to a third aspect of the present invention, in the optical deflecting device according to the first aspect, two or more fulcrum members are arranged, a step portion is provided on the fulcrum member, and the liquid member is held using the step portion as a liquid receiving member. It is characterized by that.

  According to a fourth aspect of the present invention, in the optical deflecting device according to any one of the first to third aspects, the liquid member is a liquid having a low vapor pressure.

  According to a fifth aspect of the present invention, in the optical deflecting device according to any one of the first to fourth aspects, the liquid receiving member and the liquid member have conductivity.

  According to a sixth aspect of the present invention, in the optical deflecting device according to the fifth aspect, the liquid member is made of a material in which carbon or metal fine particles are mixed in a liquid.

  A seventh aspect of the present invention is the optical deflection device according to any one of the first to sixth aspects, wherein the movement of a plane parallel to the electrode of the plate member is restricted around the plate member. A restriction member is further provided.

  According to an eighth aspect of the present invention, in the optical deflecting device according to any one of the first to seventh aspects, each member is housed in a package, and a gas having a composition close to that of the liquid member is sealed in the package. And

  A ninth aspect of the invention is characterized by an optical deflector array in which a plurality of the optical deflectors according to any one of the first to eighth aspects are arranged in an array.

  A tenth aspect of the present invention is an optical deflection apparatus array in which a plurality of the optical deflection apparatuses according to any one of the first to seventh aspects are arranged in an array, and the optical deflection apparatus array is housed in a package. A gas having a composition close to that of the liquid member is sealed in a package.

  According to an eleventh aspect of the present invention, there is provided an image projection apparatus using the optical deflection apparatus according to any one of the first to eighth aspects as an optical switch means of a projection optical system.

  According to a twelfth aspect of the present invention, there is provided an image projection apparatus using the optical deflector array according to the ninth or tenth aspect as an optical switch means of a projection optical system.

  In the light deflecting device of the present invention, the plate-like member is movably constrained to the substrate side by a liquid substance (liquid member), and the light is deflected by the electrostatic force generated by the electrode group opposed to the plate-like member. To deflect. There is a liquid member on the substrate side of the plate-like member, and there is no member covering the light reflecting surface side, so that incident light and reflected light are not affected. Further, when the plate member is inclined with respect to the fulcrum member, the liquid member can be held in the space between the plate member and the liquid receiving member. Since there is a fulcrum member and a liquid receiving member, the inclination angle does not change due to deformation of the liquid member. The inclination angle is determined by the lengths of the fulcrum member and the plate member. Therefore, a stable light deflection angle can be obtained.

  In addition, by providing two or more liquid receiving members that hold the liquid member, it is possible to prevent rotation of a plane parallel to the substrate of the plate-like member. Further, by providing two or more fulcrum members, it is possible to prevent the rotating shaft of the plate-like member from being shaken due to expansion and contraction of the liquid member. Furthermore, by providing a fulcrum member with a paragraph part and using the paragraph part as a liquid receiving member, an increase in size can be prevented even if the fulcrum member has two or more places.

  Further, by providing the regulating member around the plate-like member, rotation of the plane of the plate-like member parallel to the substrate can be completely prevented. Since this regulating member does not need to be provided with a stopper at the top, it does not affect the incident light and reflected light on the plate-like member.

  Further, in the optical deflecting device of the present invention, the fulcrum of the plate-like member is not limited to the liquid, and further the conductivity of the liquid is not ensured. Therefore, since it is not necessary to limit the liquid member to liquid metal, a substance having a small surface tension can be used for the liquid member, and even if the plate-like member is downsized, the mechanical resistance is small and the tilt displacement can be easily performed. Can do.

  In addition, if the liquid member is made conductive together with the liquid receiving member so that electric conduction with the plate member can be ensured even through the liquid member, the plate member can be changed even if the plate member is separated from the fulcrum member due to vibration or the like. A potential can be applied. In this case, an increase in the surface tension of the liquid member can be prevented by using a material in which carbon or metal fine particles are mixed in the liquid as the liquid member.

  Further, the optical deflecting device or the optical deflecting device array of the present invention has a package structure, and the gas of the material having the same or similar composition as the liquid member is sealed in the package, thereby suppressing the vaporization of the liquid member.

  The light deflecting device or the light deflecting device array of the present invention provides an image projection display device that has good pixel brightness control by ON / OFF control, can operate at high speed, and has high long-term reliability. it can.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each drawing, the same code | symbol is used in principle for the same element or a corresponding element.

  FIG. 1 is a configuration diagram of an embodiment of an optical deflecting device according to the present invention, in which (a) is a schematic perspective view in a state in which a plate-like member is omitted so that the structure can be easily understood, and (b) is a plate-like member. It is the same schematic perspective view of the state which mounted. In addition, although AB, CD, and EF in FIG.1 (b) are sectional lines, respectively, this is mentioned later.

  In FIG. 1, reference numeral 101 denotes a substrate such as silicon. An insulating film 102 of an oxide film is formed on the substrate 101, a fulcrum member 104 is formed on the insulating film 102, and the fulcrum member 104 is sandwiched therebetween. Electrodes 103a and 103b are formed, and a landing member 108 is formed outside the electrodes 103a and 103b. Reference numeral 107 denotes a conductive plate-like member having a light reflecting region on the surface, and has a structure that is rotatably supported like a seesaw with the vertex of the fulcrum member 104 as a fulcrum as shown in FIG. The inclination angle of the plate-like member 107 is generally arcsin (inverse sine), which is a value obtained by dividing the height of the fulcrum member 104 by half the length of the plate-like member 107.

  The plate-like member 107 is inclined and displaced in the first or second direction by an electrostatic force between the electrodes 103a and 103b of the plate-like member 107 in response to application of a voltage, and comes into contact with the landing member 108 (FIG. ), (B)). Therefore, the plate-shaped member 107 and the electrodes 103a and 103b are not in contact with each other and are not electrically short-circuited. The plate member 107 does not use a torsion beam hinge, and no restoring force is generated.

  In the light deflector having such a configuration, a member 105 different from the fulcrum member 104 is provided on the insulating film 102 so as to face the plate member 107, and a liquid substance is interposed between the member 105 and the plate member 107. The liquid member 106 is disposed. Here, the member 105 holding the liquid member 106 is referred to as a liquid receiving member.

  2A and 2B are cross-sectional views taken along the line E-F of FIG. 1B, in which FIG. 2A is a view in which the liquid member 106 is omitted, and FIG. 2B is a state in which the liquid member 106 is held by the liquid receiving member 105. FIG.

  As shown in FIG. 2, the fulcrum member 104 and the liquid receiving member 105 are different in height. That is, the height of the liquid receiving member 105 is lower than the height of the fulcrum member 104. For this reason, a space | gap arises between the plate-shaped members 107 (FIG. 2 (a)). Accordingly, the liquid member 106 can be held and disposed in the gap by the liquid receiving member 105 (FIG. 2B). The liquid amount of the liquid member 106 can be designed easily. Even if the amount of liquid changes, the inclination angle of the plate-like member 107 is determined by the height of the fulcrum member 104, so that the inclination angle does not vary.

  The fulcrum member 104 is a conductor, but the liquid receiving member 105 is not necessarily a conductor. In addition, the liquid member 106 can be a conductive material, but need not necessarily be conductive. Application of a potential to the plate member 107 can be performed by contact with the fulcrum member 104.

  The plate-like member 107 is merely movably mounted on the fulcrum member 104, but the plate-like member 107 is anti-fixed to the fulcrum member 104 by the adhesion force of the liquid member 106 on the liquid receiving member 105. As a result, the plate-like member 107 can freely rotate around the fulcrum member 104 to the vicinity of the electrode 103a or 103b on the substrate 101. In addition, the plate member 107 does not come off the fulcrum member 104 due to the adhesive force of the liquid member 106.

  When the upper surface of the liquid receiving member 105 is formed as a recess, the area in contact with the liquid member 106 can be increased. By making the surface state of the surface of the plate-like member 107 in contact with the top of the fulcrum member 104 and the liquid member 106 into a state where the surface energy is high, the plate-like member 107 can be prevented from coming off from the fulcrum member 104 more.

  For the liquid member 106, silicon, fluorine oil, perfluoropolyether, hydrofluoroether, fluorine alcohol, water, or the like can be used. In particular, a liquid having a low vapor pressure such as perfluoropolyether is preferable. In terms of adhesion, when the liquid member 106 includes a carboxyl group, it is preferable to use a base bond with the conductive metal portion of the plate member 107. Furthermore, silane coupling can also be used.

  A metal that becomes a liquid such as gallium or mercury has a surface tension that is too large, and when the plate-like member 107 is downsized, an electrostatic force sufficient for driving cannot be obtained, which is not suitable for the liquid member 106. There is also a problem of environmental pollution at the time of disposal.

  In the configuration example of FIG. 1, the liquid receiving member 105 that holds the liquid member 106 is provided in two places, but generally two or more places are preferable. Since there are two or more liquid receiving members 105 that hold the liquid member 106, rotation of a plane parallel to the substrate 1014 of the plate member 107 can be prevented. If there is a rotation of a plane parallel to the substrate 101 of the plate-like member 107, a problem occurs that the plate-like member 107 described later comes into contact with an adjacent plate-like member when the plate-like member 107 is arranged on the array.

  Further, the liquid receiving member 105 and the liquid member 106 may be made conductive. As a result, even if the plate member 107 is separated from the fulcrum member 104 due to vibration or the like, the liquid receiving member 105 can be electrically connected to the plate member 107 via the liquid member 106. In this case, for example, the liquid member 106 can be made of a material obtained by mixing carbon or metal fine particles with the previous material.

  FIG. 4 shows a configuration example of an optical deflector array in which a plurality of the optical deflectors of FIG. 1 are arranged two-dimensionally. In FIG. 4, reference numeral 107 denotes a plate-like member of one light deflecting device. When the optical deflection device is used as an optical switch means for image display or image formation, a configuration in which a plurality of optical deflection devices are arranged in a two-dimensional array as schematically shown in FIG. Below the optical deflector array, there is a semiconductor memory device (SRAM or the like) in which a plurality of semiconductor memory elements are similarly arranged two-dimensionally, and one optical deflector (optical light) is placed in one semiconductor memory element (memory cell). Deflection elements) are facing each other. Depending on the application, a plurality of light deflecting devices can be arranged in a one-dimensional array.

  5A and 5B are configuration diagrams of another embodiment of the optical deflecting device according to the present invention, in which FIG. 5A is a schematic perspective view in a state in which the plate-like member is omitted, and FIG. 5B is a state in which the plate-like member is placed. It is the same schematic perspective view. In this embodiment, the fulcrum members 104 are provided at two locations, and steps are provided on the respective fulcrum members 104 to form the liquid receiving members 105. The rest is basically the same as the configuration of FIG. Note that the fulcrum member 104 is not limited to two places, and may be more than that.

  Since there are two or more fulcrum members 104, even if the liquid member 106 contracts, the plate member 107 is positioned by contacting the fulcrum member 104, and the rotation of the rotation shaft of the plate member 107 can be prevented. A longer distance between the fulcrum members 104 is preferable for preventing blurring.

  Further, as shown in FIG. 5, if a step is provided on the fulcrum member 104 and the stepped portion is used as the liquid receiving member 105, an increase in size can be prevented even if there are two or more fulcrum members 104. The liquid receiving member 105 may be provided separately.

  The configuration of an optical deflector array in which a plurality of optical deflectors in FIG. 5 are two-dimensionally arranged is the same as that in FIG.

  Here, an example of a manufacturing process of the optical deflector shown in FIG. 1 will be described with reference to FIGS. Here, it is assumed that the dimension of the plate member 107 is 10 μm square, the height of the fulcrum member 104 is 0.87 μm, and the inclination angle of the plate member 107 is 10 °. 6 to 8, the AB and CD cross sections correspond to the AB and CD cross sections of FIG.

  Step (a): As the substrate 101, an Si substrate provided with an LSI of a control circuit necessary for driving control of the plate member 107 is used. A silicon oxide film to be the insulating film 102 is formed on the Si substrate 101.

  Step (b): An Al—Si film to be the electrode 103 and the landing member 108 is formed on the insulating film 102 to a thickness of 0.2 μm by sputtering. The organic resist is patterned by photolithography, and etching is performed by a RIE (Reactive Ion Etching) method using a mixed gas of Cl2 + BCl3 to form the electrode 103, the landing member 108, and the like.

  Step (c): An Al—Si film to be the fulcrum member 104 is formed to a thickness of 1 μm. The organic resist is patterned by photolithography using a mask having gradation, and the fulcrum member 104 is formed by performing etching by the RIE method using a mixed gas of Cl2 + BCl3. Similarly, a portion 105 ′ that becomes a liquid receiving member is formed.

  Step (d): An organic resist to be the sacrificial layer 201 is applied. The organic resist is patterned by photolithography to open a portion 105 ′ which becomes the liquid receiving member 105, and etching is performed by the RIE method using a mixed gas of Cl2 + BCl 3 to form the liquid receiving member 105.

  Step (e): Amorphous Si is formed to a thickness of 0.1 μm by a plasma CVD method using a mixed gas of SiH 4 and H 2. That is, when an organic material is used for the sacrificial layer 201, a protective layer 202 against sacrificial layer etching is formed before the liquid member is applied.

  Step (f): A liquid to be the liquid member 106 is formed. For example, perfluoropolyether is applied. A liquid-repellent fluorocarbon film is formed, and the surface of the liquid receiving member is irradiated with ultraviolet rays using a photomask, and the liquid repellency is lost only at that portion. When the material of the liquid member is applied, the liquid member 106 can be selectively formed only on the liquid receiving member 105.

  Step (g): An Al alloy to be the plate-like member 107, for example, an alloy of Al and Ti is formed to a thickness of 0.2 μm by sputtering. The organic resist is patterned by photolithography and etched by the RIE method using a mixed gas of Cl2 and BCl3. Further, amorphous Si is etched by RIE using CF4. Thereby, the plate-like member 107 is formed.

  Step (h): Ashing the organic resist of the sacrificial layer 201 with O 2 plasma. At this time, the amorphous Si protective layer 202 serves to protect the organic liquid from being damaged by the O 2 plasma. Next, the amorphous Si is removed by etching with plasma of a mixed gas of SF6 and O2. When the amorphous Si is removed, the liquid spreads between the plate-like member 107 and the liquid receiving member 105 and becomes the liquid member 106.

  The manufacturing process of the optical deflecting device shown in FIG. 5 is basically the same as described above, and the description thereof is omitted.

  FIG. 9 is a configuration diagram of still another embodiment of the optical deflecting device according to the present invention, in which (a) is a schematic perspective view in a state in which the plate-like member is omitted, and (b) is a plate-like member placed thereon. It is the same schematic perspective view of a state. In this embodiment, there are provided restriction members 109 for restricting the movement of the surfaces parallel to the electrode groups 103 a and 103 b of the plate-like member 107, that is, the surfaces parallel to the substrate 101, at the four corners of the substrate 101. The rest is basically the same as the configuration of FIG. Note that the regulating member 109 can be similarly provided for the optical deflector shown in FIG. There is no stopper that restricts the rotation of the plate-like member 107 on the upper side of the restriction member 109, and the incident light and reflected light on the plate-like member 107 are not affected.

  FIG. 10 shows a configuration example of an optical deflector array in which a plurality of the optical deflectors of FIG. 9 are two-dimensionally arranged. By providing the regulating member 109, the movement of each plate-like member 107 parallel to the substrate can be completely prevented. Further, as described above, since the regulating member 109 does not have a stopper member that covers the plate-like member 107, it does not affect incident light and reflected light.

  Hereinafter, an example of a manufacturing process of the optical deflector shown in FIG. 9 will be described with reference to FIGS. Here, the plate-like member 107 is assumed to have a dimension of 10 μm square, the fulcrum member 104 has a height of 0.87 μm, and the plate-like member 107 has an inclination angle of 10 °. 11 to 13, cross sections AB and CD correspond to the AB and CD sections of FIG. 9B.

  Step (a): As the substrate 101, an Si substrate provided with an LSI of a control circuit necessary for driving control of the plate member 107 is used. A silicon oxide film to be the insulating film 102 is formed on the Si substrate 101.

  Step (b): An Al—Si film to be the electrode 103 and the landing member 108 is formed on the insulating film 102 to a thickness of 0.2 μm by sputtering. The organic resist is patterned by photolithography, and etching is performed by a RIE (Reactive Ion Etching) method using a mixed gas of Cl2 + BCl3 to form the electrode 103, the landing member 108, and the like.

  Step (c): An Al—Si film to be the fulcrum member 104 is formed to a thickness of 1 μm. The organic resist is patterned by photolithography using a mask having gradation, and the fulcrum member 104 is formed by etching by RIE using a mixed gas of Cl2 + BCl3. Similarly, a portion 105 ′ that becomes the liquid receiving member 105 is formed.

  Step (d): An organic resist to be the sacrificial layer 201 is applied. The organic resist is patterned by photolithography to open a portion that becomes the liquid receiving member 105, and etching is performed by the RIE method using a mixed gas of Cl2 + BCl3 to form the liquid receiving member 105.

  Step (e): Amorphous Si is deposited to a thickness of 0.1 μm by plasma CVD using a mixed gas of SiH 4 and H 2 to form the liquid receiving member 105.

  Step (f): A liquid to be the liquid member 106 is formed. For example, perfluoropolyether is applied. A liquid-repellent fluorocarbon film is formed, and the surface of the liquid receiving member is irradiated with ultraviolet rays using a photomask, and the liquid repellency is lost only at that portion. When the liquid member material is applied, the liquid member 106 can be selectively formed only on the liquid receiving member 105.

  Step (g): An Al alloy to be the plate member 107, for example, an alloy of Al and Ti is formed into a film with a thickness of 0.2 μm by sputtering. The organic resist is patterned by photolithography and etched by the RIE method using a mixed gas of Cl2 and BCl3. Further, the amorphous Si is etched by RIE using CF4. Thereby, the plate-like member 107 is formed.

  Step (h): An organic resist to be the sacrificial layer 203 is applied. A hole for a regulating member is opened (204) in the organic resist.

  Step (i): The regulating member 109 is formed in the opening 204. For example, a silicon oxide film having a thickness of 0.2 μm is formed by plasma CVD using a mixed gas of SiH 4 and N 2 O. Patterning is performed by photolithography of an organic resist, and etching is performed by RIE using CF4 and H2.

  Step (j): Ashing the organic resists of the sacrificial layers 201 and 203 with O 2 plasma. At this time, the amorphous Si protective layer 202 serves to protect the organic liquid from being damaged by the O 2 plasma. Next, etching is performed with plasma of a mixed gas of SF6 and O2, and amorphous Si of the protective layer 202 is removed. When the amorphous Si is removed, the liquid spreads between the plate-like member 107 and the liquid receiving member 105 and becomes the liquid member 106. The plate-like member 107 is inclined in either the left or right direction, but the direction may be arbitrary before driving.

  14A and 14B are configuration diagrams of still another embodiment of the optical deflecting device according to the present invention, in which FIG. 14A is a schematic perspective view illustrating the configuration of the first substrate, and FIG. 14B is a schematic diagram illustrating the configuration of the second substrate. (C) is a typical perspective view which shows the structure after joining a 1st board | substrate and a 2nd board | substrate.

  In this embodiment, the first substrate 101 provided with the electrodes 103a and 103b, the fulcrum member 104, the liquid receiving member 105 holding the liquid member 106, and the like, and the second substrate 110 formed with the regulating member 109, the plate member 107, and the like. And a gas having a composition similar to that of the liquid member 106 are sealed in the package.

  Here, an optical deflector having a package structure in which a first substrate having the electrodes 103a and 103b, the fulcrum member 104, and the like and a second substrate on which the regulating member 109, the plate-like member 107, and the like are formed is bonded by the present applicant. Previously filed as Japanese Patent Application No. 2007-45591. Such a package structure can also be achieved in an optical deflecting device in which the plate-like member of the present invention is movably restrained by a substrate via a liquid member. By enclosing a gas of the same material as or close to that of the liquid member 106 in the package, the evaporation of the liquid member 106 can be prevented. When encapsulating, it may be a liquid, and may be gasified after encapsulating. Since it is mounted on the package, the liquid member 106 at the top of the liquid receiving member 105 is not vaporized and lost by condensation by using a gas material as the atmosphere in the package. As the liquid member 106, perfluoropolyether, hydrofluoroether or the like having a low vapor pressure is suitable.

  A Si substrate or the like is used as the first substrate 101. On the first substrate 101, electrodes 103a and 103b, a fulcrum member 104, a liquid receiving member 105, and a landing member 108 are formed via an insulating film 102 such as a silicon oxide film. Further, a liquid member 106 is formed by applying a liquid such as perfluoropolyether or hydrofluoroether to the liquid receiving member 105 by an inkjet method or the like.

  As the second substrate 110, a substrate made of a material that is transparent with respect to the incident light wavelength, that is, has a high transmittance, is used in order to serve also as a transparent package of the optical deflecting device. For example, a substrate such as borosilicate glass, quartz glass, or plastic is used. A regulating member 109 and a plate member 107 are provided on the second substrate 110, and a member 111 for reducing the contact area between the substrate 110 and the plate member 107 is formed. Note that the plate member 107 may be provided on the first substrate 101 side as described above.

  Such first substrate 101 and second substrate 110 face each other as shown in FIG. 14C and are joined by anodic bonding or adhesion. For example, when the second substrate 110 is borosilicate glass, anodic bonding with the first substrate 101 is possible. However, the temperature is set in accordance with the vaporization condition of the liquid member 106. For example, the temperature is set to about 200 ° C. Further, adhesion with an epoxy resin or the like is also possible. During this joining, a gas having a composition close to that of the liquid member 106 is sealed.

  Although not shown in FIG. 14C, in the state where the first substrate 101 and the second substrate 110 are joined, the motion space of the plate-like member 107 is in a confidential state by the respective substrates 101 and 110 and the joined portions. Sealed. The second substrate 110 also serves as a transparent package for sealing this secret. Therefore, it is not necessary to perform packaging using a dedicated package container or a transparent window member, and the apparatus cost can be reduced accordingly. In addition, since the first substrate 101 and the second substrate 110 that are separately processed are joined, it is easy to improve the yield as compared with a case where the whole is integrally manufactured by an LSI process or the like. In addition, the liquid member 106 can be prevented from evaporating by sealing the liquid member 106 and a gas having a high composition as described above.

  Since the configuration of the optical deflector array in which a plurality of optical deflectors shown in FIG. 14 are two-dimensionally arranged is the same as that in FIG. 10, the illustration is omitted. In addition, it is also possible to seal this optical deflection | deviation apparatus and an array in a package container. Also in this case, it is possible to prevent evaporation of the liquid member 106 by enclosing a gas of the same material as or close to that of the liquid member 106.

  The light deflecting device or the light deflecting device array according to the present invention is suitable as an optical switch means of an image projecting device. FIG. 15 schematically shows such an image projection apparatus.

  In FIG. 15, 1100 is a projection device, and 1110 is a projection screen. Light having a certain divergence angle from the light source 1101 enters the light deflecting device 1103 of the present invention through the rotating color filter 1102 and is reflected by the plate member. Here, the reflected light from the plate member is irradiated to the projection screen 1110 through the lenses 1104 and 1106 in the first tilt direction of the plate member. This is the ON state of the optical switch. However, in the second tilt direction of the plate-like member, the reflected light from the plate-like member is blocked by the light blocking member 1105 that is a diaphragm and is not irradiated onto the projection screen 1110. This is the OFF state of the optical switch. When the light deflecting device 1103 is arranged in a two-dimensional array, an image can be formed on the projection screen 1110 by such ON and OFF.

  As described above, the light deflecting device or the light deflecting device array of the present invention can be used as an optical switch means of a display device for image projection data (that is, bright / dark display of pixels). In this case, brightness control of the pixels (that is, ON / OFF control of the optical switch) is good, stray light (reflected light from adjacent elements generated when the reflection direction is disturbed) can be suppressed, and high-speed operation is possible. Long-term reliability is high, the device can be driven at a low voltage, and the contrast ratio can be improved.

The figure which shows one Example of the optical deflection | deviation apparatus which concerns on this invention. The figure which shows the height relationship of the fulcrum member and the liquid receiving member by which the liquid member is hold | maintained. The figure which shows the inclination transition of a plate-shaped member. The schematic diagram of the optical deflection | deviation apparatus array which has arrange | positioned the optical deflection | deviation apparatus of FIG. 1 two-dimensionally. The figure which shows another Example of the optical deflection | deviation apparatus which concerns on this invention. Process drawing explaining an example of the manufacturing method of the optical deflection | deviation apparatus of FIG. Process drawing following FIG. Process drawing following FIG. The figure which shows another Example of the optical deflection | deviation apparatus which concerns on this invention. FIG. 10 is a schematic diagram of an optical deflector array in which a plurality of optical deflectors of FIG. 9 are arranged two-dimensionally. Process drawing explaining an example of the manufacturing method of the optical deflection | deviation apparatus of FIG. Process drawing following FIG. Process drawing following FIG. The figure which shows another Example of the optical deflection | deviation apparatus which concerns on this invention. 1 is a schematic diagram of an image projection apparatus in which an optical deflection apparatus of the present invention is used.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 Substrate 102 Insulating film 103a, 103b Electrode 104 Support point member 105 Liquid receiving member 106 Liquid member 107 Plate member 108 Landing member 109 Restricting member 110 Second substrate

Claims (12)

A fulcrum member; first and second electrodes disposed across the fulcrum member; and a conductive plate member having a light reflecting surface, wherein the plate member is the first and second electrodes. The plate-like member is movably mounted on the fulcrum member so as to face the first electrode side with the fulcrum member as a fulcrum by electrostatic force due to a potential difference between the plate-like member and the first and second electrodes. Alternatively, in the optical deflecting device that is inclined and displaced toward the second electrode side,
An optical deflecting device comprising a liquid receiving member facing the plate-like member and holding the liquid member in a space between the plate-like member and the liquid receiving member.   2. The optical deflecting device according to claim 1, wherein two or more liquid receiving members holding the liquid member are provided.   2. The optical deflection apparatus according to claim 1, wherein two or more fulcrum members are arranged, a step portion is provided on the fulcrum member, and the liquid member is held using the step portion as a liquid receiving member. .   4. The optical deflection apparatus according to claim 1, wherein the liquid member is a liquid having a low vapor pressure. 5.   5. The optical deflecting device according to claim 1, wherein the liquid receiving member and the liquid member have conductivity. 6.   6. The optical deflection apparatus according to claim 5, wherein the liquid member is made of a material in which carbon or metal fine particles are mixed in a liquid.   7. The optical deflecting device according to claim 1, further comprising a regulating member that regulates movement of a surface of the plate-like member parallel to the electrode around the plate-like member. An optical deflecting device.   8. The optical deflection apparatus according to claim 1, wherein each member is housed in a package, and a gas having a composition close to that of the liquid member is sealed in the package.   9. An optical deflector array comprising a plurality of the optical deflectors according to claim 1 arranged in an array.   An optical deflector array in which a plurality of optical deflectors according to any one of claims 1 to 7 are arranged in an array, wherein the optical deflector array is housed in a package and has a composition close to that of the liquid member. An optical deflector array, wherein gas is sealed in a package.   An image projection apparatus using the optical deflection apparatus according to claim 1 as an optical switch means of a projection optical system.   An image projection apparatus using the light deflection apparatus array according to claim 9 as an optical switch means of a projection optical system.

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