JP2004078136A - Optical deflection method and device, method for manufacturing optical deflecting device, optical information processor provided with the optical deflecting device, image forming device image projecting and display device and optical transmitting device - Google Patents

Optical deflection method and device, method for manufacturing optical deflecting device, optical information processor provided with the optical deflecting device, image forming device image projecting and display device and optical transmitting device Download PDF

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JP2004078136A
JP2004078136A JP2002282858A JP2002282858A JP2004078136A JP 2004078136 A JP2004078136 A JP 2004078136A JP 2002282858 A JP2002282858 A JP 2002282858A JP 2002282858 A JP2002282858 A JP 2002282858A JP 2004078136 A JP2004078136 A JP 2004078136A
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optical
device
member
deflecting
shaped
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JP4307813B2 (en )
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Seiichi Kato
Takeshi Nanjo
Koichi Otaka
加藤 静一
南條 健
大高 剛一
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Ricoh Co Ltd
株式会社リコー
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<P>PROBLEM TO BE SOLVED: To provide an optical deflecting device of which the structure and control for performing optical deflection in a uniaxial or biaxial direction are simple and easy, in which stable operation and fast response are assured, the wavelength of incident light is not restricted, deterioration in mechanical strength is small, driving voltage is low, miniaturization and integration are possible at a low cost, and use environment is not restricted, an optical deflecting method, a method for manufacturing the optical deflecting device, an optical information processor provided with the optical deflecting device, an image forming device, an image projecting and display device and an optical transmitting device. <P>SOLUTION: A plate-shaped member 2 is arranged in a gap (G) formed between a supporting member 4 on a substrate 3 and a bamboo hat-shaped member 5 without being fixed onto the substrate 3 so that the plate-shaped member 2 is freely displaceable. Electric potential is given to an electrode 6 arranged opposite to the plate-shaped member 2 around the supporting member 4 on the substrate 3. A reflecting means 1 on the plate-shaped member 2 mounted with a tilt on the supporting member 4 changes the reflection direction of the incident light to perform optical deflection. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】 [0001]
【発明の属する技術分野】 BACKGROUND OF THE INVENTION
本発明は、光偏向方法並びに光偏向装置及びその光偏向装置の製造方法並びにその光偏向装置を具備する光情報処理装置及びその光偏向装置を具備する画像形成装置及びその光偏向装置を具備する画像投影表示装置及びその光偏向装置を具備する光伝送装置に関し、詳しくは、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向方法、並びに、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向装置及びその光偏向装置の製造方法、並びに、その光偏向装置を具備する光情報の処理を行なう光情報処理装置、及び、その光偏向装置を具備する電子写真プロセスで光書き込みを行なって画像を形成する画像形成装置、及び、その光偏向装置を具備する画像を投影して表示する画像投影表示装置、及び、その光偏向 The present invention comprises a method for producing the same, and an image forming apparatus and a light deflection device comprising an optical information processing apparatus and a light deflection device comprising the light deflector of the optical deflector method and the optical deflecting device and a light deflection device It relates to an optical transmission apparatus including an image projection display device and a light deflection device, particularly, light deflection method of performing optical deflection by changing the reflection direction of the incident light in a uniaxial or biaxial directions and the reflection direction of the incident light the change in uniaxial or biaxial directions manufacturing method of the optical deflector and the optical deflecting device performs optical deflector, and optical information processing apparatus for processing optical information, comprising the light deflecting device, and, the light image forming apparatus for forming an image by performing optical writing with the electrophotographic process having a deflection device, and an image projection display device for displaying by projecting an image comprising the optical deflecting device, and, the light deflection 置を具備する光信号の光路を決定して出力して伝送する光伝送装置に関する。 An optical transmission device to determine the optical path and transmitting the output of the optical signal having a location.
本発明は入射光に対する出射光の方向を変える光偏向装置の構成に関する。 The present invention relates to a structure of an optical deflector to vary the direction of the outgoing light to the incident light. 応用分野として、電子写真プロセスにおける光書込デバイス等の画像装置、及びプロジェクターなどの映像装置、及び電気信号伝達に変わる光通信・光接続機器などがある。 As an application field, an image device of the optical writing device and the like in an electrophotographic process, and video devices such as projectors, and the like optical communication, optical connection device to replace the electrical signal transmitting device.
【0002】 [0002]
【従来の技術】 BACKGROUND OF THE INVENTION
静電力を利用した光スイッチデバイスの入射光の反射方向を変えて光偏向を行う光偏向装置では、片持ち梁を静電力で撓ませて、入射光の反射方向を変えてスイッチするデバイス、及び、それを用いた光偏向システムは、既に公知である。 In optical deflector for performing optical deflection by changing the reflection direction of the incident light of the optical switch device using electrostatic force, a device to deflect the cantilever by an electrostatic force, to switch to change the reflection direction of the incident light, and optical deflection system using the same are already known. 又 、回折格子を静電力で駆動して光スイッチする素子も公知である(例えば 特許文献1、特許文献2、特許文献3、非特許文献1、非特許文献2 参照。)。 Further, elements that optical switch by driving the diffraction grating by an electrostatic force is also known (for example, Patent Document 1, Patent Document 2, Patent Document 3, Non-Patent Documents 1 and 2 reference.).
更に、デジタルマイクロミラーデバイスと一般的に称される「DMD」を一次元、又は、二次元に配置した光偏向システムを用いた画像形成装置も公知である(例えば 特許文献4 参照。)。 Further, a digital micromirror device and generally termed one-dimensional to "DMD", or, an image forming apparatus using an optical deflection system arranged in a two-dimensional also known (for example, see Patent Document 4.).
更に、デジタルマイクロミラーデバイスと一般的に称される「DMD」の素子構造として、ねじり梁型やカンチレバー梁型においては、ミラー部は傾斜されて用いられるが、ミラー部は少なくとも一箇所以上の固定端を有している構造となっている。 Furthermore, as the element structure of a digital micromirror device and generally termed "DMD", the torsion in the beam-type or a cantilever beam-type, but the mirror unit used by being inclined, the mirror unit is at least one place or more fixed it has a structure has an end.
然し、片持ち梁を利用した光スイッチやカンチレバー梁型のデジタルマイクロミラーデバイス(例えば 非特許文献3 参照。)と一般的に称されるDMDは、梁の安定性の確保が難しく、応答速度も遅い。 However, commonly referred DMD and digital micromirror device (for example, see Non-Patent Document 3.) Of the optical switch and a cantilever beam type using a cantilever are difficult to secure the beam stability, the response speed slow. 非特許文献3に示され該ねじり梁型やカンチレバー型のデジタルマイクロミラーデバイスにおいては、本発明同様ミラー部は傾斜されて用いられるが、本発明の光偏向装置と異なり、ミラー部は少なくとも一箇所以上の固定端を有している構造となっている。 In is in the non-patent document 3 the torsion beam type or a cantilever-type DMD, the present invention similar to the mirror unit is used is inclined, but unlike the optical deflecting device of the present invention, the mirror unit is at least one portion it has a structure having the above fixed end.
ねじり梁型のデジタルマイクロミラーデバイスと一般的に称されるDMDは、ねじり梁のヒンジ部の機械的強度が長期間使用時に変化して劣化する。 Digital micromirror device and commonly referred DMD torsion beam type, the mechanical strength of the hinge portion of the torsion beam is deteriorated changed to long-term use. 回折格子を静電力で駆動して光スイッチする素子は、使用される入射光の波長が制限される。 Element for optical switch by driving the diffraction grating by electrostatic force, the wavelength of the incident light used is limited.
又、両端固定型の梁を円筒状に撓み変形させて、高速に光偏向を行う素子も公知である(例えば 特許文献5 参照。)。 Further, by deforming the flexure beams across fixed to a cylindrical, elements for light deflection speed is also known (e.g. Patent Document 5 reference.). 然し、平行な空隙を電極間に有し、その静電引力による両端固定梁を円筒上に撓ませるために、高速に変形することがが可能で応答速度を速くすることは出来るが、両端が固定されているから、駆動電圧が片持ち梁等に比べ高くなっている。 However, having a parallel air gap between the electrodes, to deflect the ends fixed beam by the electrostatic attractive force on the cylindrical, the be transformed into a high speed faster can the response speed is possible, both ends from being fixed, the driving voltage is higher than a cantilever like.
【0003】 [0003]
そこで、同一出願人の発明者から、平行、又は、非平行な空隙を介した電極間に作用させる静電力により、ミラーが形成される両端固定梁を変形させ空隙を介して対向する基板に接触させ、光反射面に入射する入射光束の反射方向を変えることで光偏向する光偏向装置において、任意の基板上に窪み部を有し、且つ、該窪み部の任意の箇所に少なくとも二つ以上の電極を有し、該電極は互いに異なる電位を与えることが出来、且つ、該窪み部と空隙を介して対向する基板平面上部に光反射領域が設置された梁を有し、且つ、該梁及び該光反射領域が電気的に浮いている状態、即ち、接地されることがなく、且つ、任意の電位に接続されることがない光変調装置が提案されている。 Therefore, the contact of the same applicant inventors, parallel, or by electrostatic force acting between the electrodes through the non-parallel gap, the substrate opposed with a gap to deform the fixed-fixed beam mirror is formed are allowed, in the optical deflecting device for optical deflection by changing the reflection direction of the incident light beam incident on the light reflecting surface has a recess on any substrate, and at least two or more at any point of the depressions viewed portion has the electrode, the electrode can give different potentials, and has a beam reflecting region is installed in the substrate plane upper facing through the depressions viewed portion with a gap, and, the beams and conditions the light reflecting region is electrically floating, i.e., without being grounded, and, there is no optical modulator being connected to any potential have been proposed.
然し、同様に、梁の安定性を確保し、応答速度は速いが、両端固定梁型であるために、駆動電圧が片持ち梁等に比べ高くなっている。 However, likewise, to ensure the stability of the beam, the response speed is high, because it is both end fixed beam type, the driving voltage is higher than a cantilever like.
更に、2軸可動ミラー、及び、それを用いた表示装置も公知である(例えば 特許文献6 参照。)。 Furthermore, two-axis movable mirror, and a display device is also known using the same (for example, see Patent Document 6.). 上述の2 軸可動ミラー、及び、それを用いた表示装置は、磁性金属で構成されたスリ鉢状のミラー板を、永久磁石が配置されたミラー台に針状のピボットで磁力により固定し、ミラー台に形成した複数の電極に異なる電圧を印加して、ミラー板に静電気による電位差を発生させ、ミラー板を電極方向に近づくようにピボットの針状先端を中心にして回転させる2軸可動ミラーの光走査用ミラーである。 2-axis movable mirror described above, and a display device using it, the Sri pot-shaped mirror plate made of a magnetic metal, a needle-like pivot is fixed by a magnetic force to the mirror base in which a permanent magnet is disposed, different voltages to the plurality of electrodes formed on the mirror base by applying biaxial movable mirror in which the mirror plate to generate a potential difference due to static electricity, are rotated about the needle tip of the pivot so as to approach the mirror plate to the electrode direction it is a mirror of the optical scanning. 然し、上述の2軸可動ミラー、及び、それを用いた表示装置は、実質的に磁力によりミラー板がピボット部にてミラー台に固定させている複雑な構造となっていて、完全なフリー状態のミラー板ではない。 However, two-axis movable mirror described above, and, the display device using the same, have a complex structure which is substantially the mirror plate by magnetic force is fixed to the mirror base by a pivot portion, a complete free state not a mirror plate.
更に、ミラー板が磁性金属により構成され、且つ、ミラー台の下部に永久磁石を設置し、且つ、ミラー台を囲むように磁気ヨークを配置していることにより、デバイスの微細化が困難で、複数個配置して個別に動作を行うアレー化が出来ない欠点を有している。 Furthermore, the mirror plate is made of a magnetic metal, and, a permanent magnet was placed at the bottom of the mirror table, and, by being arranged magnetic yoke so as to surround the mirror table, difficult to miniaturize the device, It has the disadvantage that can not array of performing operations separately plurality placed. 又、磁性材料で構成されているため、装置の設置環境の磁力の影響を受けやすいので、使用環境が制限されることになる。 Further, because it is composed of a magnetic material, so susceptible to magnetic force of the installation environment of the apparatus, so that the use environment is limited.
それに対し、本発明においては、磁性材料を積極的に用いていないので、磁場の影響を受けにくい。 In contrast, in the present invention, it is not used a magnetic material positively less susceptible to magnetic fields.
従って、従来の入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向方法、並びに、光偏向装置、及び、その光偏向装置の製造方法、並びに、その光偏向装置を具備する光情報処理装置、及び、その光偏向装置を具備する画像形成装置、及び、その光偏向装置を具備する画像投影表示装置、及び、その光偏向装置を具備する光伝送装置は、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が複雑で作動が不安定で応答も遅く、使用する入射光の波長が制限され、機械的強度が長期間使用時に変化して劣化し、駆動電圧が高く大きなエネルギーが必要になり、微細化と集積化が困難でコスト高で、使用環境も制限されると言う不具合が生じていた。 Thus, the light deflection method of performing optical deflection by changing the reflection direction of a conventional incident light uniaxial or biaxial directions and the optical deflecting device, and a method of manufacturing the optical deflecting device, as well, the optical deflecting device optical information processing apparatus comprising, and an image forming apparatus including the optical deflecting device, and image projection display apparatus including the optical deflector, and optical transmission apparatus including the optical deflecting device is incident light slower reflection direction is unstable operation complicated in structure and control for optical deflection by changing the uniaxial or biaxial direction response is limited the wavelength of the incident light to be used, when using the mechanical strength for a long time changed deteriorated, large energy driving voltage is high is required, costly and difficult to miniaturize and integration have occurred a defect called use environment is limited.
【0004】 [0004]
【特許文献1】 [Patent Document 1]
特許第2941952号公報【特許文献2】 Japanese Patent No. 2941952 [Patent Document 2]
特許第3016871号公報【特許文献3】 Japanese Patent No. 3016871 [Patent Document 3]
特表平10−510374号公報【特許文献4】 JP Kohyo 10-510374 [Patent Document 4]
特開平6−138403号公報【特許文献5】 JP 6-138403 [Patent Document 5]
特開2000−2842号公報【特許文献6】 JP 2000-2842 Publication [Patent Document 6]
特開平8−220455号公報【非特許文献1】 JP-A-8-220455 [Non-Patent Document 1]
K. K. E. E. Petersen,”Applied Physics Letters”,1977,Vol. Petersen, "Applied Physics Letters", 1977, Vol. 31, No. 31, No. 8, pp521〜pp523 8, pp521~pp523
【非特許文献2】 Non-Patent Document 2]
D. D. M. M. Bloom,”Optics Letters”,Vol. Bloom, "Optics Letters", Vol. 7, No. 7, No. 9, pp688〜pp690 9, pp688~pp690
【非特許文献3】 Non-Patent Document 3]
L. L. J. J. Hornbeck,”Proc. SPIE”,1989, Vol. Hornbeck, "Proc. SPIE", 1989, Vol. 1150,pp. 1150, pp. 86−102 86-102
【0005】 [0005]
【発明が解決しようとする課題】 [Problems that the Invention is to Solve
そこで本発明の課題は、このような問題点を解決するものである。 Accordingly, an object of the present invention is to solve these problems. 即ち、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向方法並びに光偏向装置及びその光偏向装置の製造方法並びにその光偏向装置を具備する光情報処理装置及びその光偏向装置を具備する画像形成装置及びその光偏向装置を具備する画像投影表示装置及びその光偏向装置を具備する光伝送装置を提供することを目的とする。 That is, the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing the faster a stable response without wavelength of the incident light to be used is limited, mechanical strength is little change and deterioration in long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, the use environment is also not limited optical deflection method and an optical deflector and an optical deflection image projection display apparatus and an optical transmission device including the optical deflecting device comprises a production method and an image forming apparatus and a light deflection device comprising an optical information processing apparatus and a light deflection device comprising the light deflecting device of the apparatus an object of the present invention is to provide a.
【0006】 [0006]
本発明の目的を簡単に述べると、ミラーの偏向角の制御が容易かつ安定で、応答速度が速く、長期的な劣化が少なく、より低電圧で駆動でき、反射光のON/OFF比(画像機器におけるS/N比、映像機器におけるコントラスト比に相当)を向上でき、低コストにて微細化と集積化が可能で、かつ1軸又は2軸方向の光偏向を可能とする光偏向装置及び光偏向アレー、及びそれらを用いた画像形成装置、画像投影表示装置及び光伝送装置、及び光偏向装置の製造方法を提供することにある。 Objectives Briefly the present invention, control of the deflection angle of the mirror is easy and stable, high response speed, long-term degradation is small, can be driven at a lower voltage, of the reflected light ON / OFF ratio (image S / N ratio in equipment, equivalent to the contrast ratio of the video device) can be improved, and can be miniaturized and integrated at low cost, and an optical deflection device and to enable light deflection uniaxial or biaxial direction light deflection array, and an image forming apparatus using them, is to provide an image projection display apparatus and an optical transmission apparatus, and a manufacturing method of the optical deflection device.
【0007】 [0007]
【課題を解決するための手段】 In order to solve the problems]
上記目的を達成するために、請求項1の本発明は、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向方法において、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を、基板上に固定することなく上記基板上の支点部材上と笠形状の笠形状部材間に形成される空隙内に変位が自由の状態で配置して、上記基板上の上記支点部材の周囲に上記板形状部材と対向して配置した電極に電位を付与して、上記支点部材上に傾斜して載置する上記板形状部材上の上記反射手段で入射光の反射方向を変えて光偏向を行う光偏向方法であることを最も主要な特徴とする。 To achieve the above object, the present invention of claim 1 is an optical deflection method of performing optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction, a reflection means for reflecting the incident light on the surface combining plate-shaped member of a plate shape formed by thin film constituting the displacement in the gap formed between the umbrella-shaped member of the fulcrum member on the umbrella shape on the substrate without fixing on the substrate the free state in placed, by applying a potential to the electrode which is disposed to face the plate-shaped member around the fulcrum member on the substrate, on the plate-shaped member for placing inclined on said fulcrum member the most important feature is an optical deflection method of performing optical deflection by changing the reflection direction of the incident light by the reflecting means.
請求項2の本発明は、請求項1に記載の光偏向方法において、電極は、基板上の支点部材の周囲に板形状部材と対向して配列した複数個の各電極に異なる電位を付与して光偏向を行う光偏向方法であることを主要な特徴とする。 The present invention of claim 2 is the light deflection method according to claim 1, the electrode imparts a different potentials to a plurality of respective electrodes arranged to face the plate-shaped member around the fulcrum member on the substrate and primary, characterized in that an optical deflection method of performing optical deflection Te.
請求項3の本発明は、請求項1又は2に記載の光偏向方法において、電極に異なる電位を付与して、反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を基板上の斜面に接触して、入射光の反射方向を接触する位置で規定して変えて光偏向を行なう光偏向方法であることを主要な特徴とする。 Of the present invention of claim 3, in the optical deflection method according to claim 1 or 2, by applying different potentials to the electrodes, the plate-shaped member of a plate shape formed of a thin film in combination constitute the reflecting means on the surface in contact with the inclined surface on the substrate, is mainly characterized in that instead defines at a position contacting the reflection direction of the incident light is a light deflection method of performing optical deflection.
【0008】 [0008]
請求項4の本発明は、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向装置において、入射光を反射する反射手段と、上記反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材と、上記板形状部材を固定することなく載置する基板と、上記基板上の傾斜する上記板形状部材の変位時の支点となる支点部材と、上記支点部材上に上記板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材と、上記基板上の上記支点部材の周囲に上記板形状部材の裏面と対向して配置した電極とからなる光偏向装置であることを最も主要な特徴とする。 The present invention of claim 4 is the optical deflecting device for performing optical deflection by changing the reflection direction in uniaxial or biaxial direction of the incident light, a reflecting means for reflecting incident light, in combination constitute the reflecting means on the surface a plate-shaped member of a plate shape formed by a thin film, and a substrate for mounting without fixing the plate-shaped member, a fulcrum member as a fulcrum during the displacement of the plate-shaped member which is inclined on said substrate, said and umbrella-shaped member bevel-shaped displace said plate-shaped member on the fulcrum member forms a gap which is arranged in a free state, and the back side facing the plate-shaped member around the fulcrum member on the substrate the most important being a light deflecting apparatus comprising a placement the electrodes.
請求項5の本発明は、請求項4 に記載の光偏向装置において、反射手段の反射面は、平板で形成されている光偏向装置であることを主要な特徴とする。 The present invention of claim 5 is an optical deflector device according to claim 4, the reflecting surface of the reflecting means is mainly characterized in that an optical deflecting device is formed by a flat plate.
請求項6の本発明は、請求項4又は5に記載の光偏向装置において、反射手段は、アルミニウム系金属膜で形成されている光偏向装置であることを主要な特徴とする。 The present invention of claim 6 is an optical deflecting device according to claim 4 or 5, reflective means is mainly characterized in that an optical deflecting device is formed of aluminum-based metal film.
請求項7の本発明は、請求項4、5又は6に記載の光偏向装置において、板形状部材は、支点部材と接する個所の面形状に湾曲形状の湾曲形状部からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 7 is the optical deflecting device according to claim 4, 5 or 6, the plate-shaped member is a light deflection device comprising a curved portion of the curved shape to the surface shape of the portion in contact with the fulcrum member the main feature that.
請求項8の本発明は、請求項4、5、6又は7に記載の光偏向装置において、板形状部材は、外形が円形状である光偏向装置であることを主要な特徴とする。 The present invention of claim 8 is the optical deflecting device according to claim 4, 5, 6 or 7, the plate-shaped member is mainly characterized in that the outer shape is a light deflecting device is circular. 請求項9の本発明は、請求項4、5、6、7又は8に記載の光偏向装置において、板形状部材は、シリコン窒化膜からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 9 is the optical deflecting device of claim 4, 5, 6, 7 or 8, the plate-shaped member is mainly characterized in that an optical deflecting device made of a silicon nitride film.
請求項10の本発明は、請求項4、5、6、78 又は9に記載の光偏向装置において、反射手段又は板形状部材は、導電性を有する導電性領域を有して、上記導電性領域が電極と対向する光偏向装置であることを主要な特徴とする。 The present invention of claim 10 is the optical deflecting device of claim 4,5,6,78 or 9, the reflection means or plate-shaped member, electrically conductive regions having conductivity, the conductive region is mainly characterized in that an optical deflecting device which faces the electrode.
請求項11の本発明は、請求項4、5、6、7、8、9又は10に記載の光偏向装置において、基板は、窪み形状の窪み形状部からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 11 is the optical deflecting device of claim 4,5,6,7,8,9 or 10, the substrate main that the optical deflection apparatus comprising a recess-shaped portion of the recess shape and features.
【0009】 [0009]
請求項12の本発明は、請求項4、5、6、7、8、9、10又は11に記載の光偏向装置において、基板は、(100 )面方位を有するシリコン基板からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 12 is the optical deflecting device of claim 7, 8, 9, 10 or 11, the substrate is an optical deflection device comprising a silicon substrate having a (100) orientation a key feature that is.
請求項13の本発明は、請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と接する個所の面形状が円形状部である光偏向装置であることを主要な特徴とする。 The present invention of claim 13 is the optical deflecting device of claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member, the surface shape circle portion in contact with the plate-shaped member and primary, characterized in that an optical deflection device is a shaped part.
請求項14の本発明は、請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と点で接する円錐形状部である光偏向装置であることを主要な特徴とする。 The present invention of claim 14 is the optical deflecting device of claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member is a conical portion in contact with the plate-shaped member and the point and main feature that it is a certain optical deflection device.
請求項15の本発明は、請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と接する面が長方形の長方形状部である光偏向装置であることを主要な特徴とする。 The present invention of claim 15 is the optical deflecting device of claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member, the surface is rectangular rectangular in contact with plate-shaped member and primary, characterized in that an optical deflecting device is part.
請求項16の本発明は、請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と線で接する尾根の形状からなる尾根形状部である光偏向装置であることを主要な特徴とする。 The present invention of claim 16 is the optical deflecting device of claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member, the ridge-shaped contact with the plate-shaped member and the line and primary, characterized in that an optical deflection device is a ridge-shaped portion made.
請求項17の本発明は、請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と接する斜面を有する光偏向装置であることを主要な特徴とする。 The present invention of claim 17 is the optical deflecting device of claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member, the optical deflecting device having an inclined surface in contact with the plate-shaped member a key feature that is.
請求項18の本発明は、請求項4乃至17の何れか一項に記載の光偏向装置において、支点部材は、酸化シリコン膜又はシリコン窒化膜からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 18 is the optical deflecting device according to any one of claims 4 to 17, the fulcrum member has a key feature that the optical deflecting device made of a silicon oxide film or a silicon nitride film to.
請求項19の本発明は、請求項4乃至18の何れか一項に記載の光偏向装置において、笠形状部材は、板形状部材の外周に対応して複数個の各笠形状部材を所定間隔を空けて配置した光偏向装置であることを主要な特徴とする。 The present invention of claim 19 is the optical deflecting device according to any one of claims 4 to 18, umbrella-shaped member, the predetermined distance a plurality of the hat-shaped member corresponding to the outer periphery of the plate-shaped member and primary, characterized in that an optical deflection device which is arranged at a.
【0010】 [0010]
請求項20の本発明は、請求項4乃至18の何れか一項に記載の光偏向装置において、笠形状部材は、板形状部材の外周に対応する全領域に配置した光偏向装置であることを主要な特徴とする。 That the present invention of claim 20 is the optical deflecting device according to any one of claims 4 to 18, umbrella-shaped member is an optical deflecting device disposed in the entire area corresponding to the outer periphery of the plate-shaped member It is referred to as main features.
請求項21の本発明は、請求項4乃至20の何れか一項に記載の光偏向装置において、笠形状部材は、絶縁性を有する絶縁膜からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 21 is the optical deflecting device according to any one of claims 4 to 20, umbrella-shaped member includes a main feature in that an optical deflection device comprising an insulating film having insulating properties to.
請求項22の本発明は、請求項4乃至21の何れか一項に記載の光偏向装置において、笠形状部材は、入射光束に対し透光性を有する透光性膜からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 22 is the optical deflecting device according to any one of claims 4 to 21, umbrella-shaped member, a light deflection device comprising a transparent film having a light-transmitting property with respect to the incident light beam the main feature that there.
請求項23の本発明は、請求項4乃至22の何れか一項に記載の光偏向装置において、笠形状部材は、酸化シリコン膜からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 23 is the optical deflecting device according to any one of claims 4 to 22, umbrella-shaped member is mainly characterized in that an optical deflecting device made of a silicon oxide film.
請求項24の本発明は、請求項4乃至23の何れか一項に記載の光偏向装置において、笠形状部材は、入射光束に対し遮光性を有する遮光性膜からなる光偏向装置であることを主要な特徴とする。 That the present invention of claim 24 is the optical deflecting device according to any one of claims 4 to 23, umbrella-shaped member is an optical deflecting device comprising a light-shielding film having a light-shielding property to the incident light beam It is referred to as main features.
請求項25の本発明は、請求項4乃至24の何れか一項に記載の光偏向装置において、笠形状部材は、酸化クロム膜からなる光偏向装置であることを主要な特徴とする。 The present invention of claim 25 is the optical deflecting device according to any one of claims 4 to 24, umbrella-shaped member is mainly characterized in that an optical deflection apparatus comprising a chromium oxide film.
請求項26の本発明は、請求項4乃至25の何れか一項に記載の光偏向装置において、電極は、複数個の各電極からなり、板形状部材は電気的に浮いている光偏向装置であることを主要な特徴とする。 The present invention of claim 26 is the optical deflecting device according to any one of claims 4 to 25, the electrode consists of a plurality of the electrodes, the plate-shaped member is an optical deflecting device which is electrically floating a key feature that is.
請求項27の本発明は、請求項26に記載の光偏向装置において、複数個の各電極は、板形状部材の裏面と対向した斜面上に配置した光偏向装置であることを主要な特徴とする。 The present invention of claim 27 is the optical deflecting device of claim 26, the plurality of the electrodes, and the main feature that it is a light deflecting device disposed on the inclined surface opposed to the back surface of the plate-shaped member to.
請求項28の本発明は、請求項4乃至27の何れか一項に記載の複数個の光偏向装置において、一次元アレー状に配列した1次元光偏向アレーを形成した光偏向装置であることを主要な特徴とする。 The present invention of claim 28, it at a plurality of the optical deflecting device according to any one of claims 4 to 27, an optical deflection apparatus forming the one-dimensional light deflection array arranged in one-dimensional array form It is referred to as main features.
請求項29の本発明は、請求項4乃至28の何れか一項に記載の複数個の光偏向装置においては、2次元アレー状に配列した2次元光偏向アレーを形成した光偏向装置であることを主要な特徴とする。 The present invention of claim 29, at a plurality of optical deflecting device according to any one of claims 4 to 28 is the optical deflecting device forming a two-dimensional optical deflector array arranged in a two-dimensional array shape the main feature that.
【0011】 [0011]
請求項30の本発明は、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う請求項4乃至29の何れか一項に記載の光偏向装置の製造方法において、基板上に支点部材と電極を形成し、堆積して平坦化した第1 の犠牲層を介して上記反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、上記第1の犠牲層と上記第2 の犠牲層を除去する光偏向装置の製造方法であることを最も主要な特徴とする。 The present invention of claim 30 is the manufacturing method of the optical deflecting device according to any one of claims 4 to 29 perform varied light deflecting the reflection direction of the incident light in a uniaxial or biaxial direction, on the substrate to form a fulcrum member and the electrode, to form a plate-shaped member of the flattened first plate shape formed through a sacrificial layer of a thin film in combination constituting the reflecting means on the surface were deposited, further deposition did after patterning the umbrella-shaped member and the second sacrificial layer to a predetermined position patterned, it is a manufacturing method of the optical deflecting device of removing the first sacrificial layer and the second sacrificial layer of the most important feature.
請求項31の本発明は、請求項30に記載の光偏向装置の製造方法において、基板上に支点部材と電極を形成し、上記支点部材を突出させて堆積して平坦化した第1の犠牲層に重ねて堆積して平坦化した第3の犠牲層を介して上記反射手段を表面に組み合わせ構成する薄膜で形成された湾曲形状の湾曲形状部からなる板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、上記第1の犠牲層と上記第2の犠牲層と上記第3の犠牲層を除去する光偏向装置の製造方法であることを主要な特徴とする。 The present invention of claim 31, the first sacrifice of the manufacturing method of the optical deflection device, which forms the fulcrum member and the electrode on the substrate, and flattened deposited by projecting the fulcrum member according to claim 30 forming a third plate-shaped member made of curved portions of the curved shape via a sacrificial layer formed of a thin film combination constituting the reflecting means on the surface of the planarizing deposited superimposed on the layer, further deposition did after patterning the umbrella-shaped member to a second predetermined position where the sacrificial layer has been patterned, the optical deflecting device of removing the first sacrificial layer and the second sacrificial layer and the third sacrificial layer and main features methods of manufacturing.
請求項32の本発明は、請求項30に記載の光偏向装置の製造方法において、基板上に窪み形状部と上記窪み形状部内に斜面からなる支点部材と電極を形成し、堆積して平坦化した第1の犠牲層を介して上記反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、上記第1の犠牲層と第2の犠牲層を除去する光偏向装置の製造方法であることを主要な特徴とする。 The present invention of claim 32 is the manufacturing method of the optical deflection device of claim 30, forming a fulcrum member and the electrode made from a slant into the shaped portion recess on the substrate and the recess-shaped portion, the deposited planarization the first to form a plate-shaped member of a plate shape formed by a thin film of a combination constituting the reflecting means to the surface via the sacrificial layer, further predetermined position and the second sacrificial layer patterned deposited in after patterning the umbrella-shaped member, is mainly characterized in that is a manufacturing method of the optical deflecting device of removing the first sacrificial layer and the second sacrificial layer of.
請求項33の本発明は、請求項30、31又は32に記載の光偏向装置の製造方法において、笠形状部材の複数個の各笠形状部材間を空けて配置した所定間隔から犠牲層を除去する光偏向装置の製造方法であることを主要な特徴とする。 The present invention of claim 33, removed in the manufacturing method of the optical deflection device of claim 30, 31 or 32, the sacrificial layer from a predetermined distance that is spaced between the bevel-shaped member a plurality of bevel-shaped member and main feature that it is a method for manufacturing an optical deflector for.
請求項34の本発明は、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向装置を使用して光情報の処理を行なう光情報処理装置において、複数の上記請求項4乃至29の何れか一項に記載の光偏向装置と、複数の上記光偏向装置を各々独立に駆動する独立駆動手段とからなる光情報処理装置であることを最も主要な特徴とする。 The present invention of claim 34 is an optical information processing apparatus for processing optical information using an optical deflecting device performs changing the light deflecting the reflection direction of the incident light in a uniaxial or biaxial direction, a plurality of the above claims, an optical deflecting device according to any one of claim 4 to 29, and most important being a plurality of optical information processing apparatus comprising a separate drive means for each drive independently the optical deflecting device.
【0012】 [0012]
請求項35の本発明は、電子写真プロセスで光書き込みを行なって画像を形成する画像形成装置において、回動可能に保持されて形成画像を担持する画像担持体と、上記画像担持体上に光書き込みを行なって潜像を形成する上記請求項4乃至29の何れか一項に記載の光偏向装置からなる潜像形成手段と、上記潜像形成手段の上記光偏向装置によって形成された潜像を顕像化してトナー画像を形成する現像手段と、上記現像手段で形成されたトナー画像を被転写体に転写する転写手段とからなる画像形成装置であることを最も主要な特徴とする。 The present invention of claim 35 is an image forming apparatus for forming an image by performing optical writing with the electrophotographic process, an image carrying member for carrying the formed image is rotatably held, the light on the image bearing member a latent image forming means comprising an optical deflector device according to any one of the claims 4 to 29 to form a latent image by performing writing, the latent image formed by the optical deflection device of the latent image forming means a developing means for forming a toner image by visualizing the, the most important feature that the toner image formed by the developing means is an image forming apparatus comprising a transfer means for transferring the transfer object.
請求項36の本発明は、画像を投影して表示する画像投影表示装置において、画像投影データの入射光の反射方向を変えて光偏向を行なって画像を投影して表示する請求項4乃至29の何れか一項に記載の光偏向装置からなる光スイッチ手段と、上記光スイッチ手段が投影する画像を表示する投影スクリーンとからなる画像投影表示装置であることを最も主要な特徴とする。 The present invention of claim 36 is the image projection display device for displaying by projecting an image, according to claim 4 or 29 to change the reflection direction of the incident light of the image projection data for displaying by projecting an image by performing optical deflection an optical switching means comprising a light deflecting apparatus according to any one of, and most important, wherein the optical switching means is an image projection display apparatus comprising a projection screen for displaying an image to be projected.
請求項37の本発明は、光信号の光路を決定して出力して伝送する光伝送装置において、光信号を入力する光信号入力手段と、上記光信号入力手段からの光信号の入射光の反射方向を1軸又は2軸方向に変えて光偏向を行なって、各光信号の光路を決定する請求項4乃至29の何れか一項に記載の光偏向装置からなる光スイッチ手段と、上記光スイッチ手段からの光信号を出力する光信号出力手段とからなる光伝送装置であることを最も主要な特徴とする。 The present invention of claim 37 is an optical transmission device to determine the optical path and transmitting the output of the optical signal, an optical signal input means for inputting an optical signal, the incident light of the optical signal from the optical signal input means perform the light deflection by changing the reflection direction in uniaxial or biaxial direction and the optical switching means comprising a light deflecting apparatus according to any one of claims 4 to 29 for determining the optical path of the optical signal, the the most important feature is an optical transmission device comprising a light signal output means for outputting the optical signal from the optical switching means.
請求項38の本発明は、請求項37に記載の光偏向装置において、光スイッチ手段は、複数段の光偏向装置からなる光伝送装置であることを主要な特徴とする。 The present invention of claim 38 is the optical deflecting device of claim 37, the optical switch unit is mainly characterized in that an optical transmission device comprising a light deflecting device in a plurality of stages.
【0013】 [0013]
請求項39に記載の発明では、請求項4ないし12のいずれか1つに記載の光偏向装置において、前記支点部材は前記板形状部材と点で接触する4角錐形状であることを特徴とする。 The invention according to claim 39, in the optical deflecting device according to any one of claims 4 to 12, wherein the fulcrum member is characterized by a quadrangular pyramid shape in contact with the plate-shaped member and the point .
請求項40に記載の発明では、請求項39に記載の光偏向装置において、前記4角錐形状の支点部材の底面の大きさは、前記板形状部材の大きさにほぼ等しいことを特徴とする。 The invention according to claim 40, in the optical deflecting device of claim 39, the size of the bottom surface of the fulcrum member of the quadrangular pyramid shape, characterized in that approximately equal to the size of the plate-shaped member.
請求項41に記載の発明では、請求項4ないし16のいずれか1つに記載の光偏向装置において、前記板形状部材が静電引力により変位したとき、前記基板と点または線で接触することにより、入射光束の反射方向を決定することを特徴とする。 The invention according to claim 41, in the optical deflecting device according to any one of claims 4 to 16, when the plate-shaped member is displaced by electrostatic attraction, making contact with the substrate and the point or line by, and determines the reflection direction of the incident beam.
【0014】 [0014]
請求項42に記載の発明では、入射光の反射方向を複数の軸方向に変えて光偏向を行う光偏向装置において、入射光を反射する反射機能を有する板形状の板形状部材と、上記板形状部材を固定することなく載置する基板と、上記基板上の傾斜する上記板形状部材の変位時の支点となる支点部材と、上記支点部材上に上記板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材と、上記基板上の上記支点部材の周囲に上記板形状部材の裏面と対向して配置した電極とからなることを特徴とする。 The invention according to claim 42, in the optical deflecting device performs changing the light deflecting the reflection direction of the incident light into a plurality of axially, a plate-shaped member of a plate shape having a reflective function to reflect incident light, the plate a substrate for mounting without fixing the shaped member, a fulcrum member as a fulcrum during the displacement of the plate-shaped member which is inclined on said substrate, displacing the plate-shaped member on said fulcrum member has a free state and umbrella-shaped member bevel shape forming the disposed the air gap, characterized in that comprising a back surface opposite to the arranged electrodes of the fulcrum the plate-shaped member around the member on the substrate.
請求項43に記載の発明では、請求項42に記載の光偏向装置において、前記板形状部材は単層薄膜で形成されていることを特徴とする。 The invention according to claim 43, in the optical deflecting device of claim 42, wherein the plate-shaped member is characterized by being formed of a single layer film.
【0015】 [0015]
請求項44に記載の発明では、請求項42または43に記載の光偏向装置において、反射手段の反射面は、平板で形成されていることを特徴とする。 The invention according to claim 44, in the optical deflecting device of claim 42 or 43, the reflecting surface of the reflecting means, characterized in that it is formed by a flat plate.
請求項45に記載の発明では、請求項42ないし44のいずれか1つに記載の光偏向装置において、反射手段は、アルミニウム系金属膜で形成されていることを特徴とする。 The invention according to claim 45, in the optical deflecting device according to any one of claims 42 to 44, reflecting means, characterized in that it is formed of an aluminum-based metal film.
請求項46に記載の発明では、請求項42ないし45のいずれか1つに記載の光偏向装置において、板形状部材は、支点部材と接する個所の面形状に湾曲形状の湾曲形状部からなることを特徴とする。 The invention according to claim 46, in the optical deflecting device according to any one of claims 42 to 45, the plate-shaped member is made of a curved shape of the curved shape to the surface shape of the portion in contact with the fulcrum member the features.
【0016】 [0016]
請求項47に記載の発明では、請求項42ないし46のいずれか1つにに記載の光偏向装置において、板形状部材は、外形が円形状であることを特徴とする。 The invention according to claim 47, in the optical deflecting device according to any one of claims 42 to 46, the plate-shaped member is characterized in that the outer shape is circular. 請求項48に記載の発明では、請求項42ないし47のいずれか1つにに記載の光偏向装置において、反射手段又は板形状部材は、導電性を有する導電性領域を有して、上記導電性領域が電極と対向することを特徴とする。 The invention according to claim 48, in the optical deflecting device according to any one of claims 42 to 47, the reflecting means or plate-shaped member, electrically conductive regions having conductivity, the conductive sexual region is characterized by facing the electrode.
請求項49に記載の発明では、請求項42ないし48のいずれか1つにに記載の光偏向装置において、基板は、窪み形状の窪み形状部からなることを特徴とする。 The invention according to claim 49, in the optical deflecting device according to any one of claims 42 to 48, the substrate is characterized by comprising a recess-shaped portion of the recess shape.
【0017】 [0017]
請求項50に記載の発明では、請求項42ないし49のいずれか1つにに記載の光偏向装置において、基板は、(100)面方位を有するシリコン基板からなることを特徴とする。 The invention according to claim 50, in the optical deflecting device according to any one of claims 42 to 49, the substrate is characterized by comprising a silicon substrate having a (100) plane orientation.
請求項51に記載の発明では、請求項42ないし50のいずれか1つにに記載の光偏向装置において、支点部材は、板形状部材と接する個所の面形状が円形状部であることを特徴とする。 In the invention according to claim 51, characterized in that the optical deflecting device according to any one of claims 42 to 50, the fulcrum member, the surface shape of the portion in contact with the plate-shaped member is circular portion to.
請求項52に記載の発明では、請求項42ないし50のいずれか1つにに記載の光偏向装置において、支点部材は、板形状部材と点で接する円錐形状部であることを特徴とする。 The invention according to claim 52, in the optical deflecting device according to any one of claims 42 to 50, the fulcrum member may be a conical portion in contact with the plate-shaped member and the point.
【0018】 [0018]
請求項53に記載の発明では、請求項42ないし50のいずれか1つにに記載の光偏向装置において、支点部材は、板形状部材と接する面が長方形の長方形状部であることを特徴とする。 The invention according to claim 53, in the optical deflecting device according to any one of claims 42 to 50, the fulcrum member, said the surface in contact with the plate-shaped member has a rectangular shape of a rectangle to.
請求項54に記載の発明では、請求項42ないし50のいずれか1つに記載の光偏向装置において、前記支点部材は前記板状部材と点で接触する4角錐形状であることを特徴とする。 The invention according to claim 54, in the optical deflecting device according to any one of claims 42 to 50, wherein the fulcrum member is characterized by a quadrangular pyramid shape in contact with the plate-like member and the point .
請求項55に記載の発明では、請求項54に記載の光偏向装置において、前記4角錐形状の支点部材の底面の大きさは、前記板状部材の大きさにほぼ等しいことを特徴とする。 The invention according to claim 55, in the optical deflecting device of claim 54, the size of the bottom surface of the fulcrum member of the quadrangular pyramid shape, characterized in that approximately equal to the size of the plate-like member.
【0019】 [0019]
請求項56に記載の発明では、請求項42ないし53のいずれか1つに記載の光偏向装置において、前記板状部材が静電引力により変位したとき、前記基板と点または線で接触することにより、入射光束の反射方向を決定することを特徴とする。 The invention according to claim 56, in the optical deflecting device according to any one of claims 42 to 53, when the plate-like member is displaced by electrostatic attraction, making contact with the substrate and the point or line by, and determines the reflection direction of the incident beam.
請求項57に記載の発明では、請求項42ないし56のいずれか1つにに記載の光偏向装置において、支点部材は、板形状部材と接する斜面を有することを特徴とする。 The invention according to claim 57, in the optical deflecting device according to any one of claims 42 to 56, the fulcrum member is characterized by having a slope which is in contact with the plate-shaped member.
【0020】 [0020]
請求項58に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 58, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 状部材の電位を前記支点部材との接触により付与することを特徴とする。 The potential of Jo member, characterized in that provided by contact with the fulcrum member.
【0021】 [0021]
請求項59に記載の発明では、請求項58に記載の光偏向装置において、前記板状部材の上面全域が前記光反射領域であることを特徴とする。 The invention according to claim 59, in the optical deflecting device of claim 58, wherein the entire upper surface of the plate-like member is in the light reflecting region.
請求項60に記載の発明では、請求項58または59に記載の光偏向装置において、前記板状部材が誘電性を有する部材からなる誘電体層と、前記導電体層との積層により構成されていることを特徴とする。 The invention according to claim 60, in the optical deflecting device of claim 58 or 59, wherein the plate-like member and a dielectric layer made of a member having a dielectric, is composed of lamination of the conductor layer and said that you are.
【0022】 [0022]
請求項61に記載の発明では、請求項60に記載の光偏向装置において、前記誘電体層の比誘電率が3以上であることを特徴とする。 The invention according to claim 61, in the optical deflecting device of claim 60, wherein the dielectric constant of the dielectric layer is 3 or more.
請求項62に記載の発明では、請求項60または61に記載の光偏向装置において、前記板状部材の前記誘電体層はシリコン窒化膜により構成されることを特徴とする。 The invention according to claim 62, in the optical deflecting device of claim 60 or 61, wherein the dielectric layer of the plate-like member is characterized by being constituted by a silicon nitride film.
【0023】 [0023]
請求項63に記載の発明では、請求項58ないし62のいずれか1つに記載の光偏向装置において、前記板状部材の裏面側に対向する前記基板上に電極が複数形成され、該電極は前記支点部材の前記頂部と電気的に分離されていることを特徴とする。 The invention according to claim 63, in the optical deflecting device according to any one of claims 58 to 62, the electrode on the substrate opposite the back side of the plate-like member is formed with a plurality, the electrode is characterized in that it is the top and electrically separating said fulcrum member.
請求項64に記載の発明では、請求項63に記載の光偏向装置において、前記板状部材の前記導電体層の少なくとも一部が前記電極と対向していることを特徴とする。 The invention according to claim 64, in the optical deflecting device of claim 63, wherein at least a portion of the conductive layer of the plate-like member is opposite to the electrode.
【0024】 [0024]
請求項65に記載の発明では、請求項58ないし64のいずれか1つに記載の光偏向装置において、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が、円錐体であることを特徴とする。 The invention according to claim 65, in the optical deflecting device according to any one of claims 58 to 64, and the fulcrum member and the plate-shaped member is in contact with approximately point, the fulcrum member is conical characterized in that it is a body.
請求項66に記載の発明では請求項58ないし64のいずれか1つに記載の光偏向装置において、前記板状部材と前記支点部材とがほぼ点で接しており、かつ前記支点部材が、複数の斜面を有する多角錐体であることを特徴とする。 The optical deflection apparatus as claimed in any one of claims 58 to 64 in the invention of claim 66, wherein said plate-like member in contact fulcrum member and is at approximately point and the fulcrum member, a plurality characterized in that it is a polygonal pyramid having a slope.
【0025】 [0025]
請求項67に記載の発明では、請求項58ないし64のいずれか1つに記載の光偏向装置において、前記板状部材と前記支点部材とがほぼ線で接しており、かつ前記支点部材が、斜面を有し頂部が前記板状部材と線接触可能な稜を有する柱状体であることを特徴とする。 The invention according to claim 67, in the optical deflecting device according to any one of claims 58 to 64, wherein said plate-like member in contact with the fulcrum member and is substantially linear, and the fulcrum member, wherein the top portion has a slope is columnar body having the plate-like member and the line contact can edge.
請求項68に記載の発明では、請求項66または67に記載の光偏向装置において、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有することを特徴とする。 The invention according to claim 68, in the optical deflecting device of claim 66 or 67, wherein the beveled surface is formed corresponding to almost the entire area of ​​the plate-like member, for applying an electrostatic attraction on the slopes and having a plurality of electrodes.
【0026】 [0026]
請求項69に記載の発明では、請求項68に記載の光偏向装置において、前記板状部材が前記斜面からの静電引力により変位し、前記斜面へ接触することにより光偏向方向が規定されることを特徴とする。 The invention according to claim 69, in the optical deflecting device of claim 68, the light deflecting direction is defined by the plate-like member is displaced by electrostatic attraction from the slope into contact to the inclined surface it is characterized in.
請求項70に記載の発明では、請求項68に記載の光偏向装置において、前記斜面上に複数の凸部位が形成されており、かつ前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定されることを特徴とする。 The invention according to claim 70, in the optical deflecting device of claim 68, is formed with a plurality of convex parts on the inclined surface, and the plate-like member is displaced by electrostatic attraction from the slopes characterized in that the light deflecting direction is defined by contact to the convex portion.
【0027】 [0027]
請求項71に記載の発明では、請求項58ないし70のいずれか1つに記載の光偏向装置において、前記板状部材の近傍の雰囲気がほぼ真空であることを特徴とする。 The invention according to claim 71, in the optical deflecting device according to any one of claims 58 to 70, wherein the atmosphere in the vicinity of the plate-like member is substantially vacuum.
請求項72に記載の発明では、請求項58ないし70のいずれか1つに記載の光偏向装置において、前記板状部材の近傍の雰囲気が不活性な気体の雰囲気であることを特徴とする。 The invention according to claim 72, in the optical deflecting device according to any one of claims 58 to 70, wherein the atmosphere in the vicinity of the plate-like member is an atmosphere of inert gas.
【0028】 [0028]
請求項73に記載の発明では、請求項63ないし72のいずれか1つに記載の光偏向装置において、前記複数の電極に最大電位差が所定値以上になるようにそれぞれ任意の電位を与え、前記頂部に与える電位を、前記複数の電極に与える電位の最大値と最小値のいずれか一方の値と等しくすることを特徴とする。 The invention according to claim 73, in the optical deflecting device according to any one of claims 63 to 72, giving each arbitrary potential such that the maximum potential difference to the plurality of electrodes is equal to or higher than a predetermined value, the the potential applied to the top, characterized by equal to one value of the maximum value and the minimum value of the potential applied to the plurality of electrodes.
請求項74に記載の発明では、請求項63ないし72のいずれか1つに記載の光偏向装置において、前記複数の電極のうち、前記板状部材の変位の軸となる前記頂部を通る直線に関して、同じ側に存在する電極において最大電位差が所定値以上になるようにそれぞれ任意の電位を与え、前記頂部に与える電位を、前記複数の電極に与える電位の最大値と最小値の略中間値とすることを特徴とする。 The invention according to claim 74, in the optical deflecting device according to any one of claims 63 to 72, among the plurality of electrodes, with respect to a straight line passing through the top as the displacement of the axis of the plate-like member , the maximum potential difference in the electrode on the same side gives any potential respectively to be equal to or greater than the predetermined value, the potential applied to the top, a substantially intermediate value between the maximum value and the minimum value of the potential applied to the plurality of electrodes characterized in that it.
【0029】 [0029]
請求項75に記載の発明では、請求項58ないし74のいずれか1つに記載の光偏向装置において、前記導電体層はアルミニウム系金属膜であることを特徴とする。 The invention according to claim 75, in the optical deflecting device according to any one of claims 58 to 74, wherein the conductor layer is characterized by an aluminum-based metal film.
請求項76に記載の発明では、請求項75に記載の光偏向装置において、前記光反射領域は前記導電体層が兼ねることを特徴とする。 The invention according to claim 76, in the optical deflecting device of claim 75, wherein the light reflecting region, wherein the conductive layer also functions as.
請求項77に記載の発明では、請求項58ないし76のいずれか1つに記載の光偏向装置を複数、任意の基板上に1次元又は2次元アレー状に配置したことを特徴とする。 The invention according to claim 77, characterized in that a light deflection apparatus according to any one of claims 58 to 76 more, in a one-dimensional or two-dimensional array form on any substrate.
【0030】 [0030]
請求項78に記載の発明では、画像投影表示装置において、請求項58ないし76のいずれか一つに記載の光偏向装置、または請求項77に記載の光偏向アレーを、画像データに従って入射光の反射方向を切り替える光スイッチ手段として用い、スクリーン上に前記画像データによる画像を投影することを特徴とする。 The invention according to claim 78, in the image projection display apparatus, optical deflecting device according to any one of claims 58 to 76, or a light deflection array according to claim 77, of the incident light in accordance with image data used as an optical switching means for switching the reflection direction, and wherein the projecting the image by the image data on the screen. 請求項79に記載の発明では、請求項78に記載の画像投影表示装置において、前記光偏向装置の前記板状部材が中立位置にあるときの光反射面の法線方向が、重力の作用方向とほぼ同方向になるように配置することを特徴とする。 The invention according to claim 79, in the image projection display apparatus according to claim 78, the normal direction of the light reflecting surface when the plate-like member of the optical deflecting device is in the neutral position, the direction of action of gravity When characterized by arranging so as to be substantially in the same direction.
【0031】 [0031]
請求項80に記載の発明では、画像形成装置において、請求項77に記載の光偏向アレーを、ライン露光型の潜像形成手段として用いることを特徴とする。 The invention according to claim 80, in the image forming apparatus, a light deflection array according to claim 77, characterized by using as a latent image forming unit of a line exposure type.
請求項81に記載の発明では、請求項80に記載の画像形成装置において、前記光偏向装置の前記板状部材が中立位置にあるときの光反射面の法線方向が、重力の作用方向とほぼ同方向になるように配置することを特徴とする。 The invention according to claim 81, in the image forming apparatus according to claim 80, the normal direction of the light reflecting surface when the plate-like member of the optical deflecting device is in the neutral position, the direction of gravity It characterized in that it placed so as to be substantially in the same direction.
【0032】 [0032]
請求項82に記載の発明では、光伝送装置において、請求項68ないし76のいずれか1つに記載の光偏向装置を光スイッチ手段として用い、光情報の伝送を、1個の入出力ポートと複数の入出力ポート中の任意のポートとの間で切り替えることを特徴とする。 The invention according to claim 82, in the optical transmission apparatus, used as an optical switch unit optical deflecting device according to any one of claims 68 to 76, the transmission of light information, and one of the input and output ports and switches between any port in the plurality of input and output ports.
請求項83に記載の発明では、光伝送装置において、請求項77に記載の光偏向アレーを光スイッチ手段として用い、、光情報の伝送を、一方の入出力部の複数の入出力ポートの中の任意のポートと他方の入出力部の複数の入出力ポート中の任意のポートとの間でそれぞれ切り替えることを特徴とする。 The invention according to claim 83, in the optical transmission apparatus, the transmission of ,, light information used as an optical switch unit light deflection array according to claim 77, a plurality of input and output ports of one output unit and switches each between any port and the other any port in the plurality of input and output ports of the input and output portions of the.
請求項84に記載の発明では、請求項83に記載の光伝送装置において、前記光偏向装置の前記板状部材が中立位置にあるときの光反射面の法線方向が、重力の作用方向とほぼ同方向になるように配置することを特徴とする。 The invention according to claim 84, in the optical transmission apparatus according to claim 83, the normal direction of the light reflecting surface when the plate-like member of the optical deflecting device is in the neutral position, the direction of gravity It characterized in that it placed so as to be substantially in the same direction.
【0033】 [0033]
請求項85に記載の発明では、請求項58ないし76のいずれか1つに記載の光偏向装置の製造方法において、任意の基板上に、少なくとも、前記支点部材を形成する工程と、複数の電極及び前記支点部材の導電性を有する部材をパターン化して形成する工程と、第1の犠牲層を堆積及び平坦化する工程と、少なくとも1層からなる前記板状部材をパターン化する工程と、第2の犠牲層を堆積する工程と、第1の犠牲層及び第2の犠牲層をパターン化する工程と、該パターン化された第1及び第2の犠牲層の任意の個所に前記規制部材をパターン化する工程と、該パターン化された第1及び第2の犠牲層をエッチングにより除去する工程と、を有することを特徴とする。 The invention according to claim 85, in the manufacturing method of the optical deflection apparatus as claimed in any one of claims 58 to 76, on any substrate, at least, a step of forming the fulcrum member, a plurality of electrodes and a step of forming and patterning a member having conductivity of the fulcrum member, depositing and planarizing the first sacrificial layer, a step of patterning said plate-like member made of at least one layer, the depositing a second sacrificial layer of the steps of patterning the first sacrificial layer and the second sacrificial layer of, the regulating member at any point of the first and second sacrificial layers are the patterned and having a step of patterning, the steps of the first and second sacrificial layer is removed by etching, which is the patterned, a.
【0034】 [0034]
請求項86に記載の発明では、請求項77に記載の光偏向アレーの製造方法において、任意の基板上に複数の区画を、1次元または2次元状に密着させて形成し、各区画毎に、少なくとも、前記支点部材を形成する工程と、複数の電極及び前記支点部材の導電性を有する部材をパターン化して形成する工程と、第1の犠牲層を堆積及び平坦化する工程と、少なくとも1層からなる前記板状部材をパターン化する工程と、第2の犠牲層を堆積する工程と、第1の犠牲層及び第2の犠牲層をパターン化する工程と、該パターン化された第1及び第2の犠牲層の任意の個所に前記規制部材をパターン化する工程と、該パターン化された第1及び第2の犠牲層をエッチングにより除去する工程と、を有することを特徴とする。 The invention according to claim 86, in the manufacturing method of the optical deflection array according to claim 77, a plurality of partitions on any substrate, in close contact with the one-dimensional or two-dimensionally formed, each compartment at least said forming a fulcrum member, a step of forming and patterning a member having conductivity of the plurality of electrodes and said fulcrum member, depositing and planarizing the first sacrificial layer, at least one a step of patterning said plate-like member having a layer, depositing a second sacrificial layer, a step of patterning the first sacrificial layer and the second sacrificial layer of, first was the patterned 1 and a step of patterning the regulating member at any point of the second sacrificial layer, and having a the steps of the first and second sacrificial layer is removed by etching, which is the patterned.
【0035】 [0035]
請求項87に記載の発明では、請求項70に記載の光偏向装置の製造方法において、少なくとも、複数の電極上に薄膜を堆積させる工程と、該薄膜をパターン化し凸部位を形成する工程を有することを特徴とする。 In the invention according to claim 87, having in the manufacturing method of the optical deflecting device of claim 70, at least, a step of depositing a thin film on a plurality of electrodes, the step of forming a convex portion by patterning the thin film it is characterized in.
【0036】 [0036]
請求項88に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 88, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 板上に静電引力を作用させるための複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が円錐体であり、該円錐体の頂部が球状であることを特徴とする。 A plurality of electrodes for applying an electrostatic attraction on the plate, the potential of the plate-like member is the imparted by contact with the fulcrum member, and the plate-like member and the fulcrum member is in contact with approximately point cage, the fulcrum member is a cone, and wherein the top portion of the cone is spherical.
【0037】 [0037]
請求項89に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 89, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 板上に静電引力を作用させるための複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が、円錐体と、該円錐体底面の下に該底面の径と同径の底面を有する円柱とを合体させた形状であることを特徴とする。 A plurality of electrodes for applying an electrostatic attraction on the plate, the potential of the plate-like member is the imparted by contact with the fulcrum member, and the plate-like member and the fulcrum member is in contact with approximately point cage, the fulcrum member, and wherein the cone, that is a shape obtained by combining the a cylinder with a diameter and the bottom surface of the same diameter of the bottom surface under the cone bottom.
【0038】 [0038]
請求項90に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 90, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 板上に静電引力を作用させるための複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が円錐台形状であることを特徴とする。 A plurality of electrodes for applying an electrostatic attraction on the plate, the potential of the plate-like member is the imparted by contact with the fulcrum member, and the plate-like member and the fulcrum member is in contact with approximately point cage, characterized in that the fulcrum member is a frusto-conical.
【0039】 [0039]
請求項91に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 91, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 板上に静電引力を作用させるための複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が円錐台と、該円錐台底面の下に該底面の径と同径の底面を有する円柱とを合体させた形状であることを特徴とする。 A plurality of electrodes for applying an electrostatic attraction on the plate, the potential of the plate-like member is the imparted by contact with the fulcrum member, and the plate-like member and the fulcrum member is in contact with approximately point cage, wherein the fulcrum member is characterized with a truncated cone, that the shape obtained by combining the a cylinder with a diameter and the bottom surface of the same diameter of the bottom surface under the truncated cone bottom.
【0040】 [0040]
請求項92に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 92, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 板上に静電引力を作用させるための複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が円柱であることを特徴とする。 A plurality of electrodes for applying an electrostatic attraction on the plate, the potential of the plate-like member is the imparted by contact with the fulcrum member, and the plate-like member and the fulcrum member is in contact with approximately point cage, characterized in that the fulcrum member is a cylinder.
【0041】 [0041]
請求項93に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 93, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、かつ前記支点部材が、複数の斜面を有する多角錐体であり、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有し、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定され、前記凸部位は、電極上に複数の帯状に配列されていることを特徴とする。 Potential of Jo member is imparted by contact with the fulcrum member, the said plate-like member in contact fulcrum member and is at approximately point and the fulcrum member is a polygonal pyramid having a plurality of inclined surfaces, the slopes are formed corresponding to almost the entire area of ​​the plate-like member has a plurality of electrodes for applying an electrostatic attraction on the slope, a plurality of convex portions are formed on the inclined surface, the plate Jo member is displaced by electrostatic attraction from the slope, the light polarization direction by contacting the convex portion is defined, the convex portion is characterized by being arranged in a plurality of strip on the electrode .
【0042】 [0042]
請求項94に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 94, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、かつ前記支点部材が、複数の斜面を有する多角錐体であり、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有し、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定され、前記凸部位は複数の帯状に配列され、該凸部位の周囲の平坦部に前記電極を形成することを特徴とする。 Potential of Jo member is imparted by contact with the fulcrum member, the said plate-like member in contact fulcrum member and is at approximately point and the fulcrum member is a polygonal pyramid having a plurality of inclined surfaces, the slopes are formed corresponding to almost the entire area of ​​the plate-like member has a plurality of electrodes for applying an electrostatic attraction on the slope, a plurality of convex portions are formed on the inclined surface, the plate Jo member is displaced by electrostatic attraction from the slope, the light deflecting direction is defined by contact to the convex portion, the convex portion is arranged in a plurality of strip-shaped, the flat portion of the periphery of the convex portion and forming an electrode.
【0043】 [0043]
請求項95に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 95, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ線で接しており、かつ前記支点部材が、斜面を有し頂部が前記板状部材と線接触可能な稜を有する柱状体であり、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有し、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定され、前記凸部位は、電極上に複数の帯状に配列されていることを特徴とする。 Potential of Jo member is imparted by contact with the fulcrum member, the said plate-like member in contact with the fulcrum member and is substantially linear, and the fulcrum member, the plate member is the top has a slope and a line a columnar body having a contactable edges, wherein the beveled surface is formed corresponding to almost the entire area of ​​the plate-like member has a plurality of electrodes for applying an electrostatic attraction on the slope on the inclined surface a plurality of convex portions are formed, the plate-like member is displaced by electrostatic attraction from the slope, the light deflecting direction is defined by contact to the convex portion, the convex portion has a plurality on an electrode characterized in that it is arranged in a strip.
【0044】 [0044]
請求項96に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記 In the invention described in claim 96, by displacing by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper disposed, the 状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ線で接しており、かつ前記支点部材が、斜面を有し頂部が前記板状部材と線接触可能な稜を有する柱状体であり、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有し、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定され、前記凸部位は複数の帯状に配列され、該凸部位の周囲の平坦部に前記電極を形成することを特徴とする。 Potential of Jo member is imparted by contact with the fulcrum member, the said plate-like member in contact with the fulcrum member and is substantially linear, and the fulcrum member, the plate member is the top has a slope and a line a columnar body having a contactable edges, wherein the beveled surface is formed corresponding to almost the entire area of ​​the plate-like member has a plurality of electrodes for applying an electrostatic attraction on the slope on the inclined surface a plurality of convex portions are formed, the plate-like member is displaced by electrostatic attraction from the slope, the light deflecting direction is defined by contact to the convex portion, the convex portion is arranged in a plurality of strip It is, and forming the electrode on the flat part of the periphery of the convex portion.
【0045】 [0045]
請求項97に記載の発明では、請求項88ないし96のいずれか1つに記載の光偏向装置において、前記板状部材の上面全域が前記光反射領域であることを特徴とする。 The invention according to claim 97, in the optical deflecting device according to any one of claims 88 to 96, wherein the entire upper surface of the plate-like member is in the light reflecting region.
【0046】 [0046]
請求項98に記載の発明では、請求項88ないし97のいずれか1つに記載の光偏向装置において、前記板状部材が誘電性を有する部材からなる誘電体層と、前記導電体層との積層により構成されていることを特徴とする。 The invention according to claim 98, in the optical deflecting device according to any one of claims 88 to 97, a dielectric layer in which the plate-like member is made of a member having a dielectric, and the conductive layer characterized in that it is constituted by laminating.
【0047】 [0047]
請求項99に記載の発明では、請求項98に記載の光偏向装置において、前記誘電体層の比誘電率が3以上であることを特徴とする。 The invention according to claim 99, in the optical deflecting device of claim 98, wherein the dielectric constant of the dielectric layer is 3 or more.
【0048】 [0048]
請求項100に記載の発明では、請求項98または99に記載の光偏向装置において、前記板状部材の前記誘電体層はシリコン窒化膜により構成されることを特徴とする。 In the invention described in claim 100, the optical deflecting device of claim 98 or 99, wherein the dielectric layer of the plate-like member is characterized by being constituted by a silicon nitride film.
【0049】 [0049]
請求項101に記載の発明では、請求項88ないし100のいずれか1つに記載の光偏向装置において、前記電極は、前記板状部材の裏面側に対向する位置に設けられ、該電極は前記支点部材の前記頂部と電気的に分離されていることを特徴とする。 In the invention described in claim 101, the optical deflecting device according to any one of claims 88 to 100, wherein the electrode is provided at a position opposed to the back surface side of the plate-like member, the electrode is the characterized in that it is the top and electrically isolated fulcrum member.
【0050】 [0050]
請求項102に記載の発明では、請求項101に記載の光偏向装置において、前記板状部材の前記導電体層の少なくとも一部が前記電極と対向していることを特徴とする。 In the invention described in claim 102, the optical deflecting device of claim 101, wherein at least a portion of the conductive layer of the plate-like member is opposite to the electrode.
【0051】 [0051]
請求項103に記載の発明では、請求項88ないし102のいずれか1つに記載の光偏向装置において、前記規制部材は頂部のストッパの突出方向とは逆方向に突出した延長基部を下端部に有することを特徴とする。 In the invention described in claim 103, the optical deflecting device according to any one of claims 88 to 102, wherein the regulating member is a lower end portion of the extension base projecting in a direction opposite to the projecting direction of the stopper top characterized in that it has.
【0052】 [0052]
請求項104に記載の発明では、光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前 In the invention described in claim 104, by displacement by electrostatic attraction in accordance with the potential applied to a member having a light reflecting region, the light deflecting a light beam incident on the light reflection region is deflected by changing the reflection direction in the device, a substrate, a plurality of the regulating member includes a fulcrum member, and a plate-like member has a stopper at the top each of the plurality of restricting members are provided on each of the plurality of end portions of the substrate, the fulcrum member has a configured top of a member having conductivity, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, at least a portion to have a conductive layer formed of a conductive member made of a member that the contact point in contact with at least the top portion of the back surface is conductive, movably in the space between the said substrate and said fulcrum member stopper It is located in, before 板状部材の電位を前記支点部材との接触により付与する光偏向装置を複数、任意の基板上に1次元又は2次元アレー状に配置し、前記光偏向装置の前記基板を円形とし、隣接する基板同士の前記規制部材の位置を一致させ、両規制部材を一体化して複合規制部材とすることを特徴とする。 The optical deflecting devices for applying an electric potential of the plate-like member by contact with the fulcrum member plurality, arranged in a one-dimensional or two-dimensional array form on any substrate, the substrate of the light deflection device is circular, adjacent the position of the regulating member of the boards is matched, characterized in that a composite regulating member by integrating both regulating members.
【0053】 [0053]
請求項105に記載の発明では、請求項104に記載の光偏向アレーにおいて、前記規制部材もしくは複合規制部材を、前記基板の円周上に等間隔に6個配置し、前記光偏向装置を2次元的に最稠密に配列したことを特徴とする。 In the invention described in claim 105, an optical deflector array according to claim 104, the regulating member or the composite regulating member, equidistantly arranged six on the circumference of said substrate, said light deflector 2 dimensionally, characterized in that the highest densely arranged.
【0054】 [0054]
請求項106に記載の発明では、請求項104または105に記載の光偏向アレーにおいて、前記規制部材は頂部のストッパの突出方向とは逆方向に突出した延長基部を下端部に有することを特徴とする。 In the invention described in claim 106, an optical deflector array according to claim 104 or 105, wherein the regulating member and characterized in that it has a lower end portion of the extension base projecting in a direction opposite to the projecting direction of the stopper top to.
【0055】 [0055]
請求項107に記載の発明では、請求項104ないし106のいずれか1つに記載の光偏向アレーにおいて、前記複合規制部材は、隣接する2個の基板の境界線上に、両基板に等分に跨って基板上に横たわる平板状の基部の対向する両端に、直立部を設け、両直立部の頂部に、前記境界線と逆方向に突出するストッパをそれぞれ設けた形であることを特徴とする。 In the invention described in claim 107, an optical deflector array according to any one of claims 104 to 106, the composite regulating member, on the boundary of two adjacent substrates, equally on both substrates the opposite ends of a flat base overlying the substrate over, the upright portion is provided, at the top of both the uprights, characterized in that the stopper projecting to the boundary line and the opposite direction is a form of respectively .
【0056】 [0056]
請求項108に記載の発明では、請求項104ないし106のいずれか1つに記載の光偏向アレーにおいて、前記複合規制部材は、隣接する2個の基板の境界線上に、両基板に等分に跨って基板上に直立部を設け、該直立部の頂部に、双方向に突出するストッパを有することを特徴とする。 In the invention described in claim 108, an optical deflector array according to any one of claims 104 to 106, the composite regulating member, on the boundary of two adjacent substrates, equally on both substrates across the upright portion is provided on a substrate, the top of the straight Tatsubu, characterized by having a stopper projecting in both directions.
【0057】 [0057]
請求項109に記載の発明では、任意の基板上に、少なくとも、前記支点部材を形成する工程と、複数の電極及び前記支点部材の導電性を有する部材をパターン化して形成する工程と、第1の犠牲層を堆積及び平坦化する工程と、少なくとも1層からなる前記板状部材をパターン化する工程と、第2の犠牲層を堆積する工程と、第1の犠牲層及び第2の犠牲層をパターン化する工程と、該パターン化された第1及び第2の犠牲層の任意の個所に前記規制部材をパターン化する工程と、該パターン化された第1及び第2の犠牲層をエッチングにより除去する工程と、を有する請求項128ないし143のいずれか1つに記載の光偏向装置の製造方法を特徴とする。 In the invention described in claim 109, on any substrate, at least, a step of forming the fulcrum member, a step of forming and patterning a member having conductivity of the plurality of electrodes and said fulcrum member, first depositing and planarizing the sacrificial layer, a step of patterning said plate-like member made of at least one layer, depositing a second sacrificial layer, the first sacrificial layer and the second sacrificial layer of etching a step of patterning and a step of patterning said regulating member at any point of the first and second sacrificial layers are the patterned, the first and second sacrificial layers, which are the patterned wherein the manufacturing method of the optical deflection apparatus as claimed in any one of claims 128 to 143 and a step, the is removed by.
【0058】 [0058]
請求項110に記載の発明では、請求項109に記載の光偏向装置の製造方法において、前記支点部材の頂部は、前記平坦化された第1の犠牲層より突出していることを特徴とする。 In the invention described in claim 110, in the manufacturing method of the optical deflection device of claim 109, the top of the fulcrum member is characterized in that protrudes from the first sacrificial layer in which the flattened.
【0059】 [0059]
請求項111に記載の発明では、任意の基板上に複数の区画を、1次元または2次元状に密着させて形成し、各区画毎に、少なくとも、前記支点部材を形成する工程と、複数の電極及び前記支点部材の導電性を有する部材をパターン化して形成する工程と、第1の犠牲層を堆積及び平坦化する工程と、少なくとも1層からなる前記板状部材をパターン化する工程と、第2の犠牲層を堆積する工程と、第1の犠牲層及び第2の犠牲層をパターン化する工程と、該パターン化された第1及び第2の犠牲層の任意の個所に前記規制部材をパターン化する工程と、該パターン化された第1及び第2の犠牲層をエッチングにより除去する工程と、を有する請求項144ないし148のいずれか1つに記載の光偏向アレーの製造方法を特徴とする。 In the invention described in claim 111, a plurality of partitions on any substrate, in close contact with the one-dimensional or two-dimensionally formed, for each partition, at least, a step of forming the fulcrum member, a plurality of forming a member having a conductive electrode and said fulcrum member and patterning, depositing and planarizing the first sacrificial layer, a step of patterning said plate-like member made of at least one layer, depositing a second sacrificial layer, a step of patterning the first sacrificial layer and the second sacrificial layer of, the regulating member at any point of the first and second sacrificial layers are the patterned a step of patterning and a step of removing by etching the first and second sacrificial layers, which are the patterned, the manufacturing method of the optical deflection array according to any one of claims 144 to 148 having a and features.
【0060】 [0060]
請求項112に記載の発明では、請求項111に記載の光偏向アレーの製造方法において、前記支点部材の頂部は、前記平坦化された第1の犠牲層より突出していることを特徴とする。 In the invention described in claim 112, in the production method of the optical deflection array of claim 111, the top of the fulcrum member is characterized in that protrudes from the first sacrificial layer in which the flattened.
【0061】 [0061]
【発明の実施の形態】 DETAILED DESCRIPTION OF THE INVENTION
次に、本発明の実施の形態を図面を参照して詳細に説明する。 Next, detailed description of the embodiments of the present invention with reference to the drawings.
図1及び図2は本発明の第1の実施形態に係る光偏向装置の断面図、及び平面図であり、入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行う光偏向装置0は、入射光を反射する反射面を備えた反射手段1と、反射手段1を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材2と、板形状部材2を固定することなく載置する基板3の(100)面方位を有するシリコン基板3bと、基板3の上記(100)面方位を有するシリコン基板3b上の傾斜する板形状部材2の変位時の支点となる支点部材4と、支点部材4上に板形状部材2を変位が自由の状態で配置される空隙(G)を形成する笠形状の笠形状部材5と、基板3の上記(100)面方位を有するシリコン基板3b上の支点部材4の周囲に板形状部材2の裏面 Sectional view of the optical deflecting device according to the first embodiment of FIGS. 1 and 2 the invention, and a plan view, one axis the reflection direction of the incident light, or, for optical deflection by changing the two directions optical deflecting device 0, fixed to the reflecting means 1 having a reflecting surface that reflects incident light, a plate-shaped member 2 of a plate shape formed of a thin film in combination constitute the reflecting means 1 to the surface, the plate-shaped member 2 comprising a silicon substrate 3b, a fulcrum when the displacement plate-shaped member 2 which is inclined on the silicon substrate 3b having the (100) plane orientation of the substrate 3 having the (100) plane orientation of the substrate 3 for mounting without a fulcrum member 4, and the bevel shape member 5 bevel shape displacement plate-shaped member 2 on the fulcrum member 4 to form a gap (G) arranged in a free state, the (100) plane orientation of the substrate 3 the rear surface of the plate-shaped member 2 around the fulcrum member 4 on the silicon substrate 3b having 対向して配置した電極6とからなり、反射手段1と板形状部材2を、基板3の上記(100)面方位を有するシリコン基板3b上に固定することなく基板3の上記(100)面方位を有するシリコン基板3b上の支点部材4上と笠形状部材5間に形成される空隙(G)内に変位が自由の状態で配置して、基板3の上記(100)面方位を有するシリコン基板3b上の支点部材4の周囲に板形状部材2と対向して配置した電極6に電位を付与して、支点部材4上に傾斜して載置する板形状部材2上の反射手段1で入射光の反射方向を変えて光偏向を行うようにしたので、入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強 Consists oppositely disposed electrodes 6 which, reflecting means 1 and the plate-shaped member 2, the (100) plane orientation of the substrate 3 without being fixed on a silicon substrate 3b having the (100) plane orientation of the substrate 3 silicon substrate displacement in the gap (G) formed between the fulcrum member 4 and on the umbrella-shaped member 5 on the silicon substrate 3b is arranged in a free state, having the (100) plane orientation of the substrate 3 having an around the fulcrum member 4 on 3b by applying a potential to electrode 6 arranged plate-shaped member 2 and opposite to the incident in the reflecting means 1 on the plate-shaped member 2 is placed to be inclined on the fulcrum member 4 since to perform the light deflection by changing the reflection direction of light, one-axis the reflection direction of the incident light, or, 2 axially varied easily simple structure and control for light deflection operation is also stable response faster, without the wavelength of the incident light to be used is limited, mechanical strength が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で歩留も高く低コストで、使用環境も制限されない。 There little change deterioration in long-term use, resource saving low driving voltage, with miniaturization and integration possible yield is high cost, is not used environment restrictions.
【0062】 [0062]
反射手段1を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材2は、後述するように、薄膜で形成されているので、重量が低減されて、待機時に板形状部材2が笠形状部材5に衝突した場合の衝撃や、動作時に板形状部材2が基板3に接触した場合の衝撃が低減されて、機械的強度が長期間使用時にも変化と劣化が少ない光偏向装置0を提供することが出来るようになっている。 Plate-shaped member 2 of a plate shape formed of a thin film in combination constitute the reflecting means 1 to the surface, as described later, because it is formed by a thin film, the weight is reduced, the plate-shaped member 2 is coping during standby impact or in the case of a collision in the shaped member 5, when the plate-shaped member 2 is reduced impact when contacted to the substrate 3 operation, the optical deflecting device 0 changes little deterioration even when used mechanical strength for a long time It has to be able to provide.
基板3は、微細化のことを考慮するとシリコン、及び、ガラス等の、一般に半導体プロセスや液晶プロセスにて用いられているものが望ましい。 Substrate 3 takes into account a silicon that miniaturization, and, of glass or the like, generally those used in the semiconductor process and a liquid crystal process is desirable.
更に、光偏向装置0における基板3は、駆動系回路と同一基板に形成して簡単な構成と低コスト化を考慮して、上記(100)面方位を有するシリコン基板3bで形成されている。 Furthermore, the substrate 3 in the optical deflecting device 0 is formed in the drive system circuit and the same substrate in consideration of the simple construction and low cost, it is formed of a silicon substrate 3b having the (100) surface orientation.
笠形状部材5は、板形状部材2の変位する可動範囲を任意の空隙(G)に制限するように、笠形状で、板形状部材2の外周に対応して複数個の各笠形状部材5a 、笠形状部材5a 、笠形状部材5a 、笠形状部材5a を所定の間隔(g)を空けて4隅に配置されている。 Umbrella-shaped member 5, plate-shaped movable range of the displacement of the member 2 to limit any gap (G), with umbrella shape, plate-shaped member 2 of a plurality of the umbrella-shaped member 5a corresponding to the outer periphery 1, umbrella-shaped member 5a 2, umbrella-shaped member 5a 3, is arranged a bevel-shaped member 5a 4 at the four corners with a predetermined spacing (g). 又は、図示しないが、笠形状部材5は、板形状部材2の外周に対応する全領域に配置される。 Or, although not shown, umbrella-shaped member 5 is disposed in the entire area corresponding to the outer periphery of the plate-shaped member 2.
笠形状部材5は、酸化シリコン膜5d、又は、酸化クロム膜5fにより形成されている。 Umbrella-shaped member 5, the silicon oxide film 5d, or are formed by the chromium oxide film 5f. 従って、光偏向装置0を、図示しない1次元光偏向アレー10、又は、2次元光偏向アレー20のようにアレー化した時に、反射手段1の反射面1aの反射領域の面積割合を最大にするために極力薄膜、及び、省スペースで構成でき、且つ、機械的強度が強くなっている。 Accordingly, the optical deflecting device 0, the one-dimensional optical deflector array 10, not shown, or, when an array of as two-dimensional optical deflector array 20, to maximize the area ratio of the reflection area of ​​the reflecting surface 1a of the reflecting means 1 utmost thin films for, and can be configured in a space-saving, and mechanical strength is strong.
支点部材4は、板形状部材2が変位する時の支点となり、後述するように、光偏向装置0に求められる性能に応じて任意の形状が選択される。 Fulcrum member 4 becomes a fulcrum when the plate-shaped member 2 is displaced, as will be described later, any shape depending on the performance required for the optical deflecting device 0 is selected. 支点部材4は、酸化シリコン膜4f、又は、シリコン窒化膜4gで形成されているから機械的強度が強くなっている。 Fulcrum member 4, a silicon oxide film 4f, or the mechanical strength from being formed in the silicon nitride film 4g is strong. 但し、支点部材4を通して、板形状部材2の電位を取る場合は、各種金属膜等の導電性材料で形成される。 However, through the fulcrum member 4, when taking the potential of the plate-shaped member 2 is formed of a conductive material such as various metal film.
【0063】 [0063]
図3と図4は構成及び動作説明図であり、同図において、板形状部材2の表面に組み合わせ構成された反射手段1の少なくとも光反射領域の反射面1aは、平板で形成されている。 3 and 4 are constructed and operational illustrations, reference numeral reflecting surface 1a of the at least a light reflection area of ​​the reflecting means 1 which is combined structure on the surface of the plate-shaped member 2 is formed of a flat plate. 図3に、反射手段1の上記反射面1aが、平板である場合の光反射の模式図を、図4に、反射手段1の上記反射面1aが、図示のように凸形状である場合の光反射の模式図を示す。 3, the reflecting surface 1a of the reflecting means 1, a schematic diagram of an optical reflection in the case is a flat plate, in FIG. 4, the reflecting surface 1a of the reflecting means 1, when a convex shape as shown It shows a schematic view of an optical reflector.
図3に示すように、反射手段1の上記反射面1aが、平板であることにより、光反射領域に入射した光束は反射方向を揃えて反射することが可能で、反射光を拡散することなく目的の反射方向にのみ光変更が可能となり、光偏向装置0を、図示しない各光情報処理装置100、画像形成装置200、画像投影表示装置300、及び、光伝送装置400等に用いる場合にも、隣接素子への影響を抑制され、重要である。 As shown in FIG. 3, by the reflecting surface 1a of the reflecting means 1 is a flat plate, the light beams incident on the light reflection region can be reflected align the reflection direction, without diffusing the reflected light it is possible to light only change the direction of reflection of the object, the optical deflecting device 0, the optical information processing apparatus 100 which is not shown, the image forming apparatus 200, the image projection display apparatus 300, and, even when used in an optical transmission device 400 and the like , it is suppressed the influence on the adjacent elements is important. 尚、反射手段1の上記反射面1aの平面性としては、曲率半径Raが数m以上であることが望まれる。 As the plane of the reflecting surface 1a of the reflecting means 1, it is desired radius of curvature Ra is not less than the number m.
他方、図4に示すように、仮に、反射手段1の上記反射面1aが、図示のように凸形状を示していた場合、光反射領域に入射した光束は、反射方向を拡散して反射してしまうため、隣接素子への影響が顕著となる。 On the other hand, as shown in FIG. 4, if, the reflecting surface 1a of the reflecting means 1, if showed a convex shape as shown, a light beam incident on the light reflecting region is reflected by diffuse reflection direction for thus, it becomes significant influence on the adjacent elements. このことは、特に、図示しない上記画像形成装置200や上記画像投影表示装置300等において、反射光を、更に、拡大光学系にて光書込み、及び、表示させる場合等に顕著となる。 This is particularly in such the image forming apparatus 200 and the image projection display apparatus 300 (not shown), the reflected light, further, the optical writing at magnification optical system, and becomes significant or when displaying. 図5乃至図8は本発明の第2の実施形態の断面図、平面図、動作説明図、及び湾曲形状部がない場合の欠点を示す図であり、各図において、板形状部材2は、支点部材4と接する個所の面形状に湾曲形状の湾曲形状部2aが形成されている(図5と図6を参照)。 5-8 is a sectional view of a second embodiment of the present invention, a plan view, a diagram illustrating operation explanatory diagram, and the disadvantages in the absence of curved portions, in each figure, the plate-shaped member 2, fulcrum member 4 at a location of the surface shape in contact with the curved portion 2a of the curved shape is formed (see Figure 5 and Figure 6). 上記湾曲形状部2aを形成する方法は、後述する。 Method of forming the curved portion 2a will be described later.
上記湾曲形状部2aは、これを支点部材4の近傍の板形状部材2に配置することにより、静電引力により板形状部材2が傾斜変位する時に、板形状部材2の変位時に上記湾曲形状部2aを中心とした変位が可能となり、板形状部材2がずれることを抑制することが出来る。 The curved portion 2a, by placing it in the plate-shaped member 2 in the vicinity of the fulcrum member 4, by electrostatic attraction when a plate-shaped member 2 is inclined displacement, the curved portion during the displacement of the plate-shaped member 2 2a displacement allows centering on, it is possible to prevent the plate-shaped member 2 is displaced. 言い換えると、支点部材4に対する板形状部材2の位置決めが自発的に容易となる。 In other words, positioning of the plate-shaped member 2 is easily spontaneously against the fulcrum member 4.
それにより、図7に示すように、板形状部材2の変位時に、板形状部材2が笠形状部材5の側面に接触することを抑制する。 Thereby, as shown in FIG. 7, when the displacement of the plate-shaped member 2, prevents the plate-shaped member 2 is in contact with the side surface of the umbrella-shaped member 5.
他方、図8に示すように、仮に、上記湾曲形状部2aが無い場合には、板形状部材2が、図示の矢印C方向の位置にずれる等の不具合が発生し、それによる反射性能は低下し、支点部材4とその部位の機械的磨耗の発生が顕著となり機械的強度が低下する。 On the other hand, as shown in FIG. 8, if, when the curved portion 2a is absent, a plate-shaped member 2 is, trouble occurs such as shifts in the direction of arrow C position shown, reduced reflection performance by it and, the occurrence of mechanical wear of the site and the fulcrum member 4 the mechanical strength becomes significant decreases.
【0064】 [0064]
図9乃至図12は本発明の第3の実施形態の断面図、平面図、及び支点部材の構成例を示す斜視図であり、各図において、支点部材4は、板形状部材2と接する個所の面形状が円形状部4aである円柱形状4a であり、上述のように、上記酸化シリコン膜4f、又は、上記シリコン窒化膜4gで形成されているから機械的強度が強くなっている。 9 to 12 are cross-sectional view of a third embodiment of the present invention, is a perspective view showing a plan view, and a configuration example of a fulcrum member, in each figure, the fulcrum member 4, a portion in contact with the plate-shaped member 2 a cylindrical 4a 1 surface shape of a circular portion 4a, as described above, the silicon oxide film 4f, or the mechanical strength from being formed in the silicon nitride film 4g is becoming stronger. 同様に、支点部材4を通して、板形状部材2の電位を取る場合は、各種金属膜等の導電性材料で形成される。 Similarly, through the fulcrum member 4, when taking the potential of the plate-shaped member 2 is formed of a conductive material such as various metal film.
図11に示すように、支点部材4は、上記円柱形状4a である。 As shown in FIG. 11, the fulcrum member 4 is the cylindrical 4a 1.
然し、図12に示すように、板形状部材2に近い個所において斜面4dの斜面4d を有し、上記円形状部4aの接触面積を極力低下させる形状でも良い。 However, as shown in FIG. 12, the plate in the shape member 2 places closer to having a slope 4d 1 slope 4d, it may be shaped to reduce as much as possible the contact area of the circular portion 4a.
従って、支点部材4は、板形状部材2と接触する領域において、上記円形状部4aを有することから、静電引力に作用する方向に対応した任意の方向へ、反射手段1を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材2を傾斜変位させることが容易に可能となり、板形状部材2と支点部材4の接触面積を低下させて2軸方向の光偏向が容易となる。 Thus, the fulcrum member 4, in the region in contact with the plate-shaped member 2, combined structure since it has the circular portion 4a, in an arbitrary direction corresponding to the direction acting on the electrostatic attraction, the reflecting means 1 to the surface a plate-shaped member 2 of a plate shape formed by a thin film becomes possible to easily be inclined displacement, it is easy to light deflection biaxial direction by reducing the contact area of ​​the plate-shaped member 2 and the fulcrum member 4.
図13乃至図16は本発明の第4の実施形態の断面図、平面図、及び支点部材の構成例を示す斜視図であり、各図において、支点部材4は、板形状部材2に接する支点部位がほぼ点で接する円錐形状部4bであり、上述のように、上記酸化シリコン膜4f、又は、上記シリコン窒化膜4gで形成されているから機械的強度が強くなっている。 13 to 16 are cross-sectional view of a fourth embodiment of the present invention, is a perspective view showing a plan view, and a configuration example of a fulcrum member, in each figure, the fulcrum member 4, the fulcrum in contact with the plate-shaped member 2 sites are conical portion 4b in contact with approximately point, as described above, the silicon oxide film 4f, or the mechanical strength from being formed in the silicon nitride film 4g is becoming stronger. 同様に、支点部材4を通して、板形状部材2の電位を取る場合は、各種金属膜等の導電性材料で形成される。 Similarly, through the fulcrum member 4, when taking the potential of the plate-shaped member 2 is formed of a conductive material such as various metal film.
図15に示すように、支点部材4の上記円錐形状4bは、頂点が点形状4b を有する。 As shown in FIG. 15, the tapered shape 4b of the fulcrum member 4, the vertex has a point-shaped 4b 1.
然し、図16に示すように、板形状部材2に近い個所において、頂点近傍が丸みを有する丸形状4b でも良い。 However, as shown in FIG. 16, the location close to the plate-shaped member 2 may vertices neighboring even round shape 4b 2 having rounded.
従って、支点部材4が、図示のような上記円錐形状部4bであることから、支点部材4の支点部位の基板3側の機械的強度を強めることが出来、且つ、板形状部材2の変位は、板形状部材2の端部における基板3の上面との接触部2dで規定されるので、接触面積を極力低減して板形状部材2の基板3への固着や接触帯電を抑制できる。 Thus, the fulcrum member 4, since it is the cone-shaped portion 4b as shown, can enhance the mechanical strength of the substrate 3 side of the fulcrum portion of the fulcrum member 4, and the displacement of the plate-shaped member 2 is , since it is defined by the contact portions 2d of the upper surface of the substrate 3 at the end of the plate-shaped member 2, it avoids the locking or contact charging as much as possible reduce the contact area to the substrate 3 of the plate-shaped member 2.
又、同様に、支点部材4が、板形状部材2と接触する領域において点形状を有することから、静電引力に作用する方向に対応した任意の方向へ板形状部材2を傾斜変位させることが容易となる。 Similarly, the fulcrum member 4, since it has a point-shaped in a region in contact with the plate-shaped member 2, be inclined displacing the plate-shaped member 2 in any direction corresponding to a direction that acts on electrostatic attraction easy to become.
【0065】 [0065]
図17と図18は本発明の第5の実施形態の断面図、及び平面図であり、同図において、支点部材4は、板形状部材2に接する支点部材4の支点部位の面が長方形の長方形状部4cであり、上述のように、上記酸化シリコン膜4f、又は、上記シリコン窒化膜4gで形成されているから機械的強度が強くなっている。 Figure 17 and Figure 18 is a sectional view of a fifth embodiment of the present invention, and a plan view, in the figure, the fulcrum member 4, the fulcrum portion of the fulcrum member 4 in contact with the plate-shaped member 2 faces a rectangular a rectangular portion 4c, as described above, the silicon oxide film 4f, or the mechanical strength from being formed in the silicon nitride film 4g is becoming stronger. 同様に、支点部材4を通して、板形状部材2の電位を取る場合は、各種金属膜等の導電性材料で形成される。 Similarly, through the fulcrum member 4, when taking the potential of the plate-shaped member 2 is formed of a conductive material such as various metal film. 従って、板形状部材2に接する支点部材4の上記長方形状部4cが長方形であることから、支点部材4の短尺方向への支点部材4の傾斜変位、即ち、1軸方向の板形状部材2の静電引力による傾斜変位を安定して起こすことが出来る。 Accordingly, the rectangular portion 4c of the fulcrum member 4 in contact with the plate-shaped member 2 from being rectangular, inclined displacement of the fulcrum member 4 in the short direction of the fulcrum member 4, i.e., 1 in the axial direction of the plate-shaped member 2 inclination displacement due to electrostatic attraction it is possible to cause stable.
図19乃至図22は本発明の第6の実施形態の断面図、平面図、及び支点部材の構成例を示す斜視図であり、支点部材4は、板形状部材2に接する支点部材4の支点部位がほぼ線で接する上記斜面4dの斜面4d を有する尾根の形状からなる尾根形状部4eであり、上述のように、上記酸化シリコン膜4f、又は、上記シリコン窒化膜4gで形成されているから機械的強度が強くなっている。 19 to 22 is a cross-sectional view of a sixth embodiment of the present invention, is a perspective view showing a plan view, and a configuration example of a fulcrum member, the fulcrum member 4, the fulcrum of the fulcrum member 4 in contact with the plate-shaped member 2 sites are ridge-shaped portion 4e consisting ridge shape having an inclined surface 4d 2 of the inclined surface 4d in contact with substantially linear, as described above, the silicon oxide film 4f, or are formed in the silicon nitride film 4g mechanical strength is made stronger from. 同様に、支点部材4を通して、板形状部材2の電位を取る場合は、各種金属膜等の導電性材料で形成される。 Similarly, through the fulcrum member 4, when taking the potential of the plate-shaped member 2 is formed of a conductive material such as various metal film.
図21に示すように、支点部材4の上記尾根形状部4eの支点部位は線を頂点とする線形状4e であるが、図22に示すように、頂点近傍が丸みを有する丸形状4e でも良い。 As shown in FIG. 21, the fulcrum portion of the ridge-shaped portion 4e of the fulcrum member 4 is a line-shaped 4e 1 to vertex line, as shown in FIG. 22, a round shape 4e 2 vertices vicinity has a rounded But good.
板形状部材2に接する支点部材4の上記尾根形状部4eの支点部位がほぼ線で接していることから、支点部材4の上記尾根形状部4eと板形状部材2の接触面積を低減して1軸方向の板形状部材2の静電引力による傾斜変位を安定して起こすことが出来る。 Since the fulcrum portion of the ridge-shaped portion 4e of the fulcrum member 4 in contact with the plate-shaped member 2 is in contact with substantially linear, by reducing the contact area of ​​the ridge-shaped portion 4e and the plate-shaped member 2 of the fulcrum member 4 1 axial direction of the plate-shaped tilt displacement due to electrostatic attraction of the member 2 stably that can cause it.
又、支点部材4の上記尾根形状部4eが上記斜面4dの斜面4d を有する尾根状形状であることから、支点部材4の機械的強度を強め、且つ、板形状部材2の変位は板形状部材2の端部における基板3の上面との上記接触部2dで規定されるので、接触面積を極力低減して板形状部材2の基板3への固着や接触帯電を抑制できる。 Further, since the ridge-shaped portion 4e of the fulcrum member 4 is ridge-shaped shape having an inclined surface 4d 2 of the inclined surfaces 4d, strengthen the mechanical strength of the fulcrum member 4, and the displacement of the plate-shaped member 2 is a plate-shaped since defined by the contact portions 2d of the upper surface of the substrate 3 at the end of the member 2, as much as possible reduce the contact area avoids the locking or contact charging to the substrate 3 of the plate-shaped member 2.
【0066】 [0066]
図23と図24において、静電引力を作用させるための電極6は、少なくとも2個以上、例えば、図示のように電極6a 、電極6a 、電極6a 、電極6a の4個が、板形状部材2の裏側に対向する支点部材4が形成された基板3上に形成されており、且つ、板形状部材2は電気的に浮いている。 In FIGS. 23 and 24, electrodes 6 for applying the electrostatic attraction, at least two, for example, electrodes 6a 1 as shown, electrodes 6a 2, electrodes 6a 3, 4 pieces of electrodes 6a 4 is, is formed on the substrate 3 of the fulcrum member 4 is formed to be opposed to the back side of the plate-shaped member 2, and a plate-shaped member 2 is electrically floating. 電極6a 、電極6a 、電極6a 、電極6a の材質としては、導電性などを考慮すると、アルミニウム系金属や窒化チタンやチタン等の金属が望ましい。 Electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, as the material of the electrode 6a 4, when considering the conductivity, metals such as aluminum metal and titanium nitride or titanium is desirable.
図示のように、基板3に形成された2個以上の、例えば、電極6a 、電極6a 、電極6a 、電極6a の4個間の電位差に起因した静電引力を、板形状部材2を誘電的に経由して板形状部材2と電極6の各電極6a 、電極6a 、電極6a 、電極6a の間に働かせ、板形状部材2を目的の方向へ変位させることが出来る。 As shown, the two or more formed on the substrate 3, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, the electrostatic attractive force caused by the potential difference between the four electrodes 6a 4, plate-shaped member each electrode 6a 1 of 2 via dielectrically plate-shaped member 2 and the electrode 6, the electrode 6a 2, electrodes 6a 3, worked between the electrodes 6a 4, it is possible to displace the plate-shaped member 2 in the desired direction can.
更に、引き続き支点部材4がを中心として対向する電極6の各電極6a 、電極6a 、電極6a 、電極6a へ任意の電圧を印加することにより、板形状部材2の変位方向を高速で変えることが出来る。 Furthermore, subsequently fast the electrodes 6a 1 of the electrodes 6 fulcrum member 4 faces around the electrode 6a 2, electrodes 6a 3, by applying an arbitrary voltage to the electrodes 6a 4, the displacement direction of the plate-shaped member 2 it can vary.
更に、電極6の複数の各電極6a 、電極6a 、電極6a 、電極6a 間に任意に電位差を生じさせることが出来、それにより板形状部材2の傾斜の向きを2軸方向で高精度に制御されて、光偏向を行う構造と制御が更に簡単容易で作動が安定で応答も更に速く出来る。 Furthermore, each of the plurality of electrodes 6a 1 of the electrode 6, the electrode 6a 2, electrodes 6a 3, optionally can cause a potential difference between the electrodes 6a 4, whereby the orientation of the plate-shaped member 2 inclined in two axial directions is controlled with high accuracy, the structure and control can easily easier for optical deflection operation is stable response can also be faster.
図25と図26において、反射手段1の上記反射面1aの光反射領域、又は、板形状部材2の少なくとも一部に導電性を有する導電性領域2bが形成され、且つ、上記導電性領域2bの少なくとも一部が、電極6と対向している。 In FIGS. 25 and 26, the light reflecting region of the reflecting surface 1a of the reflecting means 1, or, is formed a conductive region 2b having conductivity in at least a portion of the plate-shaped member 2, and, said conductive region 2b At least a portion of, and faces the electrode 6. 上記導電性領域2bの材質としては、導電性などを考慮すると、アルミニウム系金属や窒化チタンやチタン等の金属が望ましい。 Examples of the material of the conductive region 2b, when considering the conductivity, metals such as aluminum metal and titanium nitride or titanium is desirable. 更に、上記導電性領域2bにより反射手段1の上記反射面1aの光反射領域を兼ねて低コスト化する場合には、反射性能が良好であることが望ましく、その場合には、特に、上記アルミニウム系金属1bが望ましい。 Furthermore, when the cost also serves as a light reflecting area of ​​the reflecting surface 1a of the reflecting means 1 by the conductive region 2b, it is desirable reflection performance is good, in this case, in particular, the aluminum system metal 1b is desirable.
図示のように、基板3に形成された2個以上の、例えば、電極6の複数の各電極6a 、電極6a 、電極6a 、電極6a 間の電位差に起因した静電引力を、上記導電性領域2bを経由して板形状部材2と電極6の複数の各電極6a 、電極6a 、電極6a 、電極6a 間に働かせ、より低い駆動電圧で板形状部材2を目的の方向へ変位させることが出来る。 As shown, the two or more formed on the substrate 3, for example, each of the plurality of electrodes 6a 1 of the electrode 6, the electrode 6a 2, electrodes 6a 3, the electrostatic attractive force caused by the potential difference between the electrodes 6a 4, each of the plurality of electrodes 6a 1 of the plate-shaped member 2 and the electrode 6 via the conductive region 2b, the electrode 6a 2, electrodes 6a 3, worked between the electrodes 6a 4, the purpose of the plate-shaped member 2 at a lower driving voltage it can be displaced in the direction.
更に、引き続き支点部材4の支点部位を中心として電極6の複数の対向する各電極6a 、電極6a 、電極6a 、電極6a へ任意の電圧を印加することにより、板形状部材2の変位方向を高速で変えることが出来る。 Furthermore, subsequently the electrodes 6a 1 a plurality of opposing electrodes 6 about the fulcrum portion of the fulcrum member 4, the electrode 6a 2, electrodes 6a 3, by applying an arbitrary voltage to the electrodes 6a 4, the plate-shaped member 2 the displacement direction can be changed at a high speed.
更に、電極6の複数の対向する各電極6a 、電極6a 、電極6a 、電極6a 間に任意に電位差を生じさせることが出来、それにより板形状部材2の傾斜の向きを2軸方向で高精度に制御することが出来る。 Furthermore, the electrodes 6a 1 a plurality of counter electrodes 6, the electrode 6a 2, electrodes 6a 3, optionally can cause a potential difference between the electrodes 6a 4, thereby biaxial orientation of the plate-shaped member 2 tilting it can be controlled with high accuracy in the direction.
【0067】 [0067]
図27と図28において、光偏向装置0は、入射光を反射する反射手段1と、反射手段1を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材2と、板形状部材2を固定することなく載置する基板3と、基板3上の傾斜する板形状部材2の変位時の支点となる支点部材4と、支点部材4上に板形状部材2を変位が自由の状態で配置される空隙(G)を形成する笠形状の笠形状部材5の笠形状部材5a 、笠形状部材5a 、笠形状部材5a 、笠形状部材5a と、基板3上の支点部材4の周囲に板形状部材2の裏面と対向して配置した電極6a 、電極6a 、電極6a 、電極6a とからなる(図27を参照)。 In Figures 27 and 28, the optical deflecting device 0, the reflecting means 1 that reflects incident light, a plate-shaped member 2 of a plate shape formed of a thin film in combination constitute the reflecting means 1 to the surface, the plate-shaped member 2 the substrate 3 for mounting without fixing, the fulcrum member 4 serving as a fulcrum when the displacement plate-shaped member 2 which is inclined on the substrate 3, on the fulcrum member 4 a plate-shaped member 2 by displacement of the free state umbrella-shaped member 5a 1 bevel shape bevel shaped member 5 forming the disposed the air gap (G), umbrella-shaped member 5a 2, umbrella-shaped member 5a 3, the umbrella-shaped member 5a 4, the fulcrum member 4 on the substrate 3 electrodes 6a 1 was placed in the back side facing the plate-shaped member 2 around the electrode 6a 2, electrodes 6a 3, made of the electrode 6a 4 Metropolitan (see Figure 27).
そして、光偏向装置0においては、板形状部材2は、固定端を有していないので、その初期の位置を、基板3上の支点部材4上と笠形状の笠形状部材5の笠形状部材5a 、笠形状部材5a 、笠形状部材5a 、笠形状部材5a 間に形成される空隙(G)内に制限されて変位が自由であるから、電極6a 、電極6a 、電極6a 、電極6a より最も遠ざかる配置を記載した(図28を参照)。 Then, the optical deflecting device 0, the plate-shaped member 2, so does not have a fixed end, the initial position, umbrella-shaped member of the umbrella-shaped member 5 of the fulcrum member 4 above the umbrella shape on a substrate 3 5a 1, umbrella-shaped member 5a 2, umbrella-shaped member 5a 3, since the displacement is limited to the gap formed between the umbrella-shaped member 5a 4 (G) is free, the electrode 6a 1, electrodes 6a 2, electrode 6a 3, describing the farthest place from the electrode 6a 4 (see Figure 28).
図29と図30において、光偏向装置0は、初期状態から、板形状部材2を支点部材4上に設置するために、リセット動作を行う。 29 and FIG. 30, the optical deflecting device 0 is the initial state, to install the plate-shaped member 2 on the fulcrum member 4, the reset operation is performed.
リセット動作においては、電極6a 、電極6a 、電極6a 、電極6a よりの電位をそれぞれ電極6a =X(V)、電極6a =0(V)、電極6a =X/2(V)、電極6a =X/2(V)とすることにより、図示の白抜き矢印線で示したような静電引力分布が得られ、白抜き矢印線の大きさにより静電引力の大小を示した。 In the reset operation, the electrode 6a 1, electrodes 6a 2, electrodes 6a 3, respectively electrodes 6a the potential of the electrode 6a 4 1 = X (V) , the electrode 6a 2 = 0 (V), the electrode 6a 3 = X / 2 (V), by the electrode 6a 4 = X / 2 (V ), the illustrated electrostatic attraction distribution as shown by a white arrow line is obtained, the electrostatic attractive force by the size of the white arrow line showed the large and small.
図示の矢印M方向に板形状部材2が傾斜し、板形状部材2の少なくとも一部、例えば、板形状部材2の端部の上記接触部2dが基板3と接触して、図示のように方向を規定して、リセット方向に反射光が得られる。 Arrow M direction shown in the plate-shaped member 2 is inclined, at least a portion of the plate-shaped member 2, for example, the contact portions 2d of the ends of the plate-shaped member 2 is in contact with the substrate 3, the direction as shown defining a reflected light is obtained in the reset direction.
尚、ここで印加されるX(V)は、板形状部材2と各電極6a 、電極6a 、電極6a 、電極6a との間の距離、及び、静電容量などにより決定され、通常の板形状部材2の変位、即ち、支点部材4の支点部位を中心とした傾斜を起こす電圧Y(V)よりやや大きい電圧となる。 Incidentally, X (V) to be applied here, the plate-shaped member 2 and the electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, the distance between the electrodes 6a 4, and is determined by an electrostatic capacitance, normal plate-shaped member 2 of the displacement, that is, slightly larger than the voltage Y (V) causing tilting around the fulcrum portion of the fulcrum member 4.
【0068】 [0068]
図31と図32において、次に、電極6a 、電極6a 、電極6a 、電極6a よりの電位をそれぞれ電極6a =Y/2(V)、電極6a =Y/2(V)、電極6a =Y(V)、電極6a =0(V)とすることにより、リセット方向と反対方向に高速に図示の矢印N方向に板形状部材2が傾斜し、板形状部材2の少なくとも一部、例えば、板形状部材2の端部の上記接触部2dが基板3と接触して、図示のように方向を規定して、光偏向を行う。 In Figures 31 and 32, then, the electrode 6a 1, electrodes 6a 2, electrodes 6a 3, respectively electrodes 6a the potential of the electrode 6a 4 1 = Y / 2 ( V), the electrode 6a 2 = Y / 2 (V ), the electrode 6a 3 = Y (V), by the electrode 6a 4 = 0 (V), the plate-shaped member 2 is inclined in the direction of arrow N shown in a high speed in the direction opposite to the reset direction, the plate-shaped member 2 at least a portion of, for example, contact the contact portions 2d of the ends of the plate-shaped member 2 and the substrate 3, defines a direction as shown, for optical deflection.
即ち、支点部材4の支点部位を中心とし対向する電極6a 、電極6a 、電極6a 、電極6a へ任意の電圧を印加することにより、板形状部材2の変位方向を高速で変えることが出来る。 That is, the electrode 6a 1 facing around the fulcrum portion of the fulcrum member 4, the electrode 6a 2, electrodes 6a 3, by applying an arbitrary voltage to the electrodes 6a 4, changing the displacement direction of the plate-shaped member 2 at a high speed It can be.
図33と図34において、電極6a 、電極6a 、電極6a 、電極6a の電位をそれぞれ電極6a =Y/2(V)、電極6a =0(V)、電極6a =Y/2(V)、電極6a =Y(V)とすることにより、図31と図32の光偏向(1)とは軸を変えて、高速に板形状部材2が図示の矢印O方向に傾斜変位し、板形状部材2の少なくとも一部、例えば、板形状部材2の端部の上記接触部2dが基板3と接触して、方向を規定して、光偏向(2)を行う。 In FIGS. 33 and 34, the electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, respectively electrodes 6a the potential of the electrode 6a 4 1 = Y / 2 ( V), the electrode 6a 2 = 0 (V), the electrode 6a 3 = Y / 2 (V), by the electrode 6a 4 = Y (V), by changing the axis to the light deflector (1) of FIG. 31 and FIG. 32, an arrow O direction of the fast to the plate-shaped member 2 is shown inclined displaced, at least a portion of the plate-shaped member 2, for example, the contact portions 2d of the ends of the plate-shaped member 2 is in contact with the substrate 3, defines a direction, for optical deflector (2).
即ち、板形状部材2の傾斜の向きを2軸方向で高精度に制御することが出来る。 That is, it is possible to control the orientation of the plate-shaped member 2 inclined with high precision in two axial directions.
以上のように、電極6の2個以上の電極6a 、電極6a 、電極6a 、電極6a 間に異なる電位を与えることにより、板形状部材2が静電引力により変位し、即ち、支点部材4の支点部位を中心に傾斜し、入射する光束が反射方向を変えることが出来る。 As described above, two or more electrodes 6a 1 of the electrode 6, the electrode 6a 2, electrodes 6a 3, by giving different potentials between the electrodes 6a 4, plate-shaped member 2 is displaced by electrostatic attraction, i.e., tilted about the fulcrum portion of the fulcrum member 4, the light beam incident can change the direction of reflection.
尚、支点部材4の図示しない上記斜面4dの少なくとも一部に板形状部材2を接触させて光偏向を行うことにより、接触時の衝撃を面で受けることが出来、板形状部材2に及ぼす衝撃を緩和することが出来る。 Incidentally, by contacting the plate-shaped member 2 on at least a portion of the inclined surface 4d (not shown) of the fulcrum member 4 by performing optical deflection, can be subjected to impact during contact with the surface, the impact on the plate-shaped member 2 it is possible to mitigate the. 又、支点部材4の図示しない上記斜面4dにより板形状部材2の傾斜の向きを規定でき、傾斜の制御性及び安定性を向上する。 Also, by the inclined surface 4d (not shown) of the fulcrum member 4 can define the orientation of the plate-shaped member 2 tilting to improve the controllability and stability of the slope.
【0069】 [0069]
図35において、次に、異なる電極6、例えば、電極6a と電極6a 間に異なる電位を与えることにより、静電引力が発生する原理を、板形状部材2上に上記導電性領域2bを配置した効果を含めて、リセット動作時を例に説明する。 In Figure 35, then, different electrodes 6, for example, by providing different potentials between the electrodes 6a 1 and the electrode 6a 2, the principle of electrostatic attraction occurs, the conductive region 2b on the plate-shaped member 2 including the placed effect, explaining the reset operation in the example. 電極6a には、正電位X(V)が印加され、電極6a には0(V)が印加されている。 The electrodes 6a 1, a positive potential X (V) is applied to the electrode 6a 2 0 (V) is applied. この時、両電極6a と電極6a と電気的に浮いている板形状部材2の間には静電引力が発生し、板形状部材2を電極側に変位させるのであるが、まず電極6a に印加された正電位により電極6a には正電荷が現れる。 At this time, the electrostatic attraction between the electrodes 6a 1 and the electrode 6a 2 and electrically floating are plate-shaped member 2 is generated, but it is to displace the plate-shaped member 2 on the electrode side, first electrode 6a positive charge appears on the electrode 6a 1 by the applied positive potential to one. そして空隙(G)を介して板形状部材2に誘電的に負電荷が発生し、同時に上記導電性領域2bにおいて導電的に効率よく負電荷が広がる。 The dielectrically negative charge is generated in the plate-shaped member 2 with a gap (G), electrically conductively efficient negative charge spreads in the electrically conductive region 2b at the same time. 逆に言うと、上記導電性領域2bにより効率的に板形状部材2に負電荷を発生させる。 Conversely, to generate efficiently a negative charge to the plate-shaped member 2 by the conductive region 2b. この時、板形状部材2と上記導電性領域2bは電気的に浮いているので、電極6a に空隙(G)を介して対向する板形状部材2と上記導電性領域2bには模式的には正電荷が広がる。 At this time, since the plate-shaped member 2 and the conductive regions 2b are electrically floating, schematically the plate-shaped member 2 and the conductive region 2b opposing each other via the electrodes 6a 2 gap (G) is the positive charge is spread. その正電荷に対応するように、電極6a には模式的に負電荷が発生する、電極6a は実際には接地されているが、模式的に考えた場合はそのようになる。 So as to correspond to the positive charge, schematically negative charge is generated in the electrodes 6a 2, but actually the electrodes 6a 2 is grounded, when considered schematically is that way. それにより、電極6a 上部に位置する板形状部材2においても静電引力が発生する。 Thereby, the electrostatic attractive force is generated even in the plate-shaped member 2 is located in the electrode 6a 2 top.
上記説明は一連の流れにて説明したが、必ずしも一連の流れにより起こる訳ではなく、両電極6a と電極6a の電位差がそれらの現象を同時進行的に発生させる。 The above description has been described in sequential flow, not necessarily caused by sequential flow, the potential difference between the electrodes 6a 1 and the electrode 6a 2 generates the these phenomena simultaneously progressively.
尚、実際には、電気的に浮いている板形状部材2と上記導電性領域2bは電極6a と電極6a の間の任意の電位となり、任意の電位と電極6a の電位差による静電引力、及び、任意の電位と電極6a の電位差による静電引力が発生することとなる。 In practice, the plate-shaped member 2 and the conductive regions 2b are electrically floated be any potential between the electrodes 6a 1 and the electrode 6a 2, electrostatic by any potential and electrodes 6a 1 of the potential difference attraction, and, so that the electrostatic attraction by any potential and electrodes 6a 2 of the potential difference is generated.
この任意の電位は空隙(G)、及び、電極6a と電極6a の面積などの構造的要因により異なる。 This optional potential gap (G), and differ by structural factors, such as the area of the electrode 6a 1 and the electrode 6a 2. このようにして発生した静電引力により、板形状部材2が、電極6a 、又は、電極6a 側に変位する。 By electrostatic attraction generated in this manner, the plate-shaped member 2 is, electrodes 6a 1, or displaced in the electrode 6a 2 side.
【0070】 [0070]
図36と図37において、光偏向装置0において、支点部材4の上記斜面4dの斜面4d が、板形状部材2のほぼ全域に対応して形成され、且つ、上記斜面4dの上記斜面4d 上に静電引力を作用させるための電極6の少なくとも2個以上の、例えば、電極6a 、電極6a 、電極6a 、電極6a を有する。 In Figures 36 and 37, in the optical deflecting device 0, slopes 4d 3 of the inclined surface 4d of the fulcrum member 4 are formed corresponding to almost the entire area of the plate-shaped member 2, and, the slope 4d 3 of the inclined surface 4d at least two or more electrodes 6 for applying an electrostatic attraction on having, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, an electrode 6a 4. 上記斜面4dの上記斜面4d 上からなる支点部材4の材質としては、同様に、上記酸化シリコン膜4f、又は、上記シリコン窒化膜4gである。 As the material of the fulcrum member 4 made on the slopes 4d 3 of the inclined surface 4d, likewise, the silicon oxide film 4f, or is the above silicon nitride film 4g.
図示のように、支点部材4の支点部位に近づくにつれ、電極6を板形状部材2に近接して設置でき、それにより、より大きな静電引力を発生させることが出来る。 As shown, as it approaches the fulcrum portion of the fulcrum member 4, it can be installed close to the electrode 6 in the plate-shaped member 2, whereby it is possible to generate a larger electrostatic attraction. 言い換えると、より低電圧で板形状部材2の変位を可能とする。 In other words, to allow displacement of the plate-shaped member 2 at a lower voltage.
又、電極6a 、電極6a 、電極6a 、電極6a の全面に接触して、板形状部材2を変位させることが出来るので、接触時の衝撃を分散させることが出来て機械的強度が長期間使用時にも変化と劣化が更に少なくなる。 The electrode 6a 1, electrodes 6a 2, electrodes 6a 3, in contact with the entire surface of the electrode 6a 4, it is possible to displace the plate-shaped member 2, the mechanical strength can be dispersed impact at the time of contact There change and degradation is further reduced to a long period of time during use. 又、電極6a 、電極6a 、電極6a 、電極6a の全面に接触して板形状部材2を変位させることにより、板形状部材2の変位方向の制御が容易となり、作動が更に安定で応答も更に速くなる。 The electrode 6a 1, electrodes 6a 2, electrodes 6a 3, in contact with the entire surface of the electrode 6a 4 by displacing the plate-shaped member 2, it is easy to control the displacement direction of the plate-shaped member 2, operation is more stable in also faster response.
図38と図39において、光偏向装置0において、反射手段1の上記反射面1aの光反射領域、又は、板形状部材2の少なくとも一部に導電性を有する上記導電性領域2bが形成され、且つ、上記導電性領域2bの少なくとも一部が電極6a 、電極6a 、電極6a 、電極6a と対向している。 In Figures 38 and 39, in the optical deflecting device 0, the light reflecting region of the reflecting surface 1a of the reflecting means 1, or the above conductive region 2b having conductivity in at least a portion of the plate-shaped member 2 is formed, and, at least some of the conductive regions 2b are electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, faces the electrode 6a 4.
上記導電性領域2bの材質としては、導電性などを考慮すると、アルミニウム系金属や窒化チタンやチタン等の金属が望ましい。 Examples of the material of the conductive region 2b, when considering the conductivity, metals such as aluminum metal and titanium nitride or titanium is desirable.
基板3に形成された電極6の2個以上の、例えば、電極6a 、電極6a 、電極6a 、電極6a 間の電位差に起因した静電引力を、上記導電性領域2bを経由して板形状部材2と電極6の、例えば、電極6a 、電極6a 、電極6a 、電極6a 間に働かせ、より低い駆動電圧で、板形状部材2を目的の方向へ変位させることが出来る。 Two or more electrodes 6 formed on the substrate 3, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, the electrostatic attractive force caused by the potential difference between the electrodes 6a 4, via the conductive region 2b Te of plate-shaped members 2 and the electrode 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, worked between the electrodes 6a 4, at a lower driving voltage, it is possible to displace the plate-shaped member 2 in the desired direction can.
更に、引き続き、支点部材4の支点部位を中心として対向する電極6の、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a へ任意の電圧を印加することにより、板形状部材2の変位方向を高速で変えることが出来る。 Furthermore, subsequently, the electrode 6 opposite about the fulcrum portion of the fulcrum member 4, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or, by applying an arbitrary voltage to the electrodes 6a 4, plate-shaped the displacement direction of the member 2 can be varied at high speed.
更に、電極6の複数の、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a 間に任意に電位差を生じさせることが出来る。 Furthermore, the plurality of electrodes 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or can cause a potential difference optionally between electrodes 6a 4.
【0071】 [0071]
図40と図41において、光偏向装置0は、基板3上に形成された窪み形状の窪み形状部3aを有し、且つ、上記窪み形状部3aの任意の箇所に支点部材4の上記斜面4dの上記斜面4d 、及び、電極6の、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a を有し、且つ、笠形状部材5を上記基板5の平面上部に有し、且つ、笠形状部材5と上記窪み形状部3aにより構成される空隙(G)に板形状部材2を有し、且つ、板形状部材2は電気的に浮いており、且つ、支点部材4と板形状部材2が接触する個所、即ち、支点部材4の頂点が、基板3の上面より窪み形状部3a側に低く形成されている。 In FIGS. 40 and 41, the optical deflecting device 0 has a recess-shaped portion 3a of recess shape formed on a substrate 3, and, the recess anywhere shape portion 3a of the fulcrum member 4 above the inclined surface 4d of the inclined surface 4d 4 and, the electrode 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or has an electrode 6a 4, and, have a bevel shape member 5 in the plane upper part of the substrate 5 and, and, the gap (G) constituted by umbrella-shaped member 5 and the recess-shaped portion 3a has a plate-shaped member 2, and a plate-shaped member 2 is electrically floating, and, the fulcrum member 4 a plate-shaped member points to 2 contacts, i.e., the apex of the fulcrum member 4 is formed lower on the shaped portion 3a side recessed from the upper surface of the substrate 3.
窪み形状部3a、及び、支点部材4は、基板3をエッチング加工することにより形成されるが、基板3上に厚く絶縁膜3cを形成後、これを加工しても良い。 Recess shaped portion 3a and, fulcrum member 4 is formed by the substrate 3 is etched, after forming a thick insulating film 3c on the substrate 3 may be processed it. 支点部材4の頂点、即ち、板形状部材2の変位の支点部位は、上記加工時に基板3の表面より低く形成することが可能である。 Apex of the fulcrum member 4, i.e., the fulcrum portion of the displacement of the plate-shaped member 2 can be formed lower than the surface of the substrate 3 during the process.
尚、上記該光偏向装置0の製造方法は後述するが、板形状部材2の可動範囲を制限する空隙(G)の下方部を基板3の上記窪み形状部3aに構成されているため、笠形状部材5の高さを低く出来る。 Since the manufacturing method of the optical deflection device 0 will be described later, that is configured to lower portion of the gap (G) for limiting a movable range of the plate-shaped member 2 to the recess-shaped portion 3a of the substrate 3, Ryu the height of the shaped member 5 can be lowered.
笠形状部材5は、板形状部材2を空隙(G)に留めるために衝突等の衝撃を受ける。 Umbrella-shaped member 5, shock of collision or the like in order to fasten the plate-shaped member 2 into the gap (G).
そのため、機械的強度を高めることが重要で、笠形状部材5を低く形成することは、笠形状部材5自体の自立安定につながり、ひいては機械的強度を高めることになる。 Therefore, it is important to increase the mechanical strength, to form lower bevel-shaped member 5 leads to self stabilize bevel shaped member 5 itself, so that consequently increase the mechanical strength.
又、後述する製造方法により歩留まりも向上し、光偏向装置0の空隙(G)は、基板3に形成した上記窪み形状部3aの深さと図示しない第2の犠牲層7bの膜厚により規定することが出来、図示しない第1犠牲層7aの平坦化の割合に大きく依存しないため、但し、基板3に至る平坦化は少なくとも必要で、空隙(G)の高さの制御性を向上でき、駆動電圧、及び、リセット電圧の制御性が良くなった。 Also improves yield by the manufacturing method described later, the optical deflecting device 0 of the gap (G) is defined by the thickness of the second sacrificial layer 7b not depth and illustrated above recess-shaped portion 3a is formed on the substrate 3 it can, because it does not depend largely on the ratio of the flattening of the first sacrificial layer 7a (not shown), however, flattened leading to the substrate 3 is at least required, can improve the controllability of the height of the gap (G), the drive voltage, and to better control of the reset voltage.
【0072】 [0072]
図42乃至図44は本発明の第11の実施形態を示す光偏向装置の一単位の断面図、平面図、及び集合状態を示す平面図である。 FIGS. 42 to 44 are cross-sectional view of one unit of the optical deflection apparatus according to the eleventh embodiment of the present invention, it is a plan view showing a plan view, and the set state. 各図において、光偏向装置0において、板形状部材2が、図示のように外形が円形状である(図43を参照)。 In each figure, the optical deflecting device 0, the plate-shaped member 2 is, the outer shape as shown is circular (see Figure 43).
板形状部材2が図示のように円形状であることから、板形状部材2に組み合わされた反射手段1の上記反射面1aの反射領域にて反射した反射光が円形となり、光偏向装置0を具備する図示しない上記画像形成装置200、及び、図示しない上記画像投影装置300等における1画素を円形状とすることが出来る。 Since the plate-shaped member 2 is circular, as shown, the reflected light reflected by the reflecting region of the reflecting surface 1a of the reflecting means 1 combined in a plate-shaped member 2 is circular, the optical deflecting device 0 the image forming apparatus 200 (not shown) comprising, and one pixel in such the image projection apparatus 300 (not shown) can be a circular shape. それにより、隣接画素の隙間部をドット状に点在させることが出来る(図44を参照)。 Thereby, it is possible to intersperse clearance of adjacent pixels in a dot shape (see Figure 44). 従って、矩形な板形状部材2による矩形な画素形状の隣接画素の隙間部が線状の筋となるのと異なり、高精彩な画像を得ることが出来る。 Therefore, the gap of the adjacent pixels of a rectangular pixel shape by a rectangular plate-shaped member 2 is different as a linear streaks, can be obtained a high-definition image.
図45と図46は他の実施形態の断面図、及び平面図であり、この光偏向装置0においては、笠形状部材5が、板形状部材2の外周に対応する任意の個所に、例えば、笠形状部材5a 、笠形状部材5a 、笠形状部材5a 、笠形状部材5a が間隔(g)を空けて複数個設置されている。 Figure 45 and Figure 46 is a sectional view of another embodiment, and a plan view, in the optical deflecting device 0, umbrella-shaped member 5, an arbitrary point corresponding to the outer periphery of the plate-shaped member 2, for example, umbrella-shaped member 5a 1, umbrella-shaped member 5a 2, umbrella-shaped member 5a 3, umbrella-shaped member 5a 4 is a plurality placed at intervals (g). 後述する光偏向装置0の製造方法における、図示しない犠牲層7のエッチング除去を複数の間隔(g)部から開始することが可能なので、図示しない上記犠牲層7のエッチング除去時に要する時間を短縮化できる。 In the manufacturing method of the optical deflecting device 0 to be described later, since it is possible to start the etching removal of the sacrificial layer 7 (not shown) from a plurality of intervals (g) unit, shorten the time required for the etching removal of the sacrificial layer 7 (not shown) it can.
エッチング除去時には、板形状部材2や基板3がエッチング液に晒されるので、そのエッチング時間が短くなることにより、歩留の向上が得られる。 During etching away, since the plate-shaped member 2 and the substrate 3 is exposed to the etchant, by the etching time is shortened, improving the yield can be obtained.
【0073】 [0073]
図47と図48は第13の実施形態の断面図、及び平面図であり、光偏向装置0においては、笠形状部材5が、板形状部材2の外周に対応する個所全領域に設置されている。 Figure 47 and Figure 48 is a sectional view of the thirteenth embodiment, and a plan view, in the optical deflecting device 0, umbrella-shaped member 5, it is installed in place the entire region corresponding to the outer periphery of the plate-shaped member 2 there. 笠形状部材5が、板形状部材2の全周に渡って連続配置されていることから、板形状部材2が機械的に可動範囲を制限された空隙(G)よりはみ出し、光偏向装置0が故障することを極力低減するから、作動が更に安定で機械的強度が長期間使用時にも変化と劣化が更に少なくすることが出来る。 Is umbrella-shaped member 5, because it is continuously arranged along the entire circumference of the plate-shaped member 2, protrudes from the void plate-shaped member 2 is limited mechanically movable range (G), the optical deflection device 0 because as much as possible to reduce to a fault, operation is more stable mechanical strength long term changes degradation during use can be further reduced.
次に、光偏向装置0における笠形状部材5が絶縁性を有する絶縁膜5bにより構成されている。 Next, umbrella-shaped member 5 in the optical deflecting device 0 is constituted by an insulating film 5b having an insulating property. 前述のように、笠形状部材5は、板形状部材2を任意の空隙(G)に留めるために、板形状部材2と接触する。 As described above, umbrella-shaped member 5, in order to keep the plate-shaped member 2 in any air gap (G), in contact with the plate-shaped member 2. そのため、笠形状部材5が導電性であると、電気的に浮いている板形状部材2の電位が変動する危険性が高い。 Therefore, when the umbrella-shaped member 5 is a conductive, high risk potential of the plate-shaped member 2 which is electrically floating varies. 即ち、板形状部材2が笠形状部材5に接触した場合でも、電気的に浮いている板形状部材2の電荷が笠形状部材5を経由して移動しないので板形状部材2の電位が変動することを抑制できる。 That is, the plate-shaped member 2 even when in contact with the umbrella-shaped member 5, so electrically floating electrical charge of the plate-shaped member 2 does not move through the umbrella-shaped member 5 is the potential of the plate-shaped member 2 varies it can be suppressed.
次に、光偏向装置0において、笠形状部材5が、入射光束に対し透光性を有する透光性膜5cにより構成されて、特に、上記酸化シリコン膜5dにより構成されている。 Then, the optical deflecting device 0, umbrella-shaped member 5, formed of a transparent film 5c having a light-transmitting property with respect to the incident light beam, in particular, is constituted by the silicon oxide film 5d. 笠形状部材5を上記透光性膜5cとすることにより、板形状部材2と組み合わせ構成される反射手段1の上記反射面1aの光反射領域の笠形状部材5と重なる領域からの反射光も寄与させることが出来るので、1素子における反射光の面積、及び、光量を増加させることが出来る。 The umbrella-shaped member 5 is in the above transparent film 5c, also the light reflected from the region overlapping the umbrella-shaped member 5 of the light reflecting region of the reflecting surface 1a of the reflecting means 1 constructed in combination with plate-shaped member 2 it is possible to contribute, the area of ​​the reflected light in the first element, and can increase the amount of light. 即ち、ON光量が増大するから、光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も更に速くさせることが出来る、 That is, since ON light amount is increased, the structure and control operation more simple and easy to perform optical deflection can be also more rapidly further stable response,
更に、笠形状部材5を上記酸化シリコン膜5dとすることにより、高い絶縁性と高い透光性を両立した笠形状部材5を提供でき、後述する光偏向装置0の製造方法において、微細化と集積化の作製が可能となり、構造と制御が更に簡単容易で作動が更に安定で応答も更に速く、微細化と集積化が更に可能で更に低コスト化が出来る。 Further, by the shade shape member 5 and the silicon oxide film 5d, can provide shade shaped member 5 having both high insulation properties and high light-transmitting property, the manufacturing method of the optical deflecting device 0 to be described later, a fine Preparation of integration is possible, the structure and control are more easily easy operation even faster yet stable response, miniaturization and integration can further possible further cost reduction.
【0074】 [0074]
次に、光偏向装置0における笠形状部材5が、入射光束に対し遮光性を有する遮光性膜5eにより構成されて、特に、酸化クロム膜5fにより構成されている。 Next, the umbrella-shaped member 5 in the optical deflecting device 0, is constituted by a light-shielding film 5e having a light-shielding property to the incident light beam, in particular, is constituted by chromium oxide film 5f. 笠形状部材5を上記遮光性膜5eとすることにより、笠形状部材5に入射した光束の望まれない方向への反射を抑制することができる。 The umbrella-shaped member 5 is in the above light-shielding film 5e, it is possible to suppress reflection in the direction undesired light beam incident on the umbrella-shaped member 5. それにより、目的方向への光偏向の迷光を低下させることが出来る。 Thereby, it is possible to reduce the stray light deflection to the desired direction. 迷光は、目的方向への光偏向を行っていない場合にも生じる成分なので、OFF光量が抑制されて、光偏向を行う構造と制御が更に簡単容易で作動が更に安定になる。 Stray light, because component occurring even when not subjected to optical deflection to the desired direction, and OFF light is suppressed, the structure and control operation more simple and easy to perform optical deflection becomes more stable.
更に、笠形状部材5を上記酸化クロム膜5fとすることにより、高い絶縁性と高い遮光性を両立した笠形状部材5を提供でき、後述する光偏向装置0の製造方法において、微細化と集積化の作製が可能となり、光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も更に速く、更に低コストとなる。 Further, by the shade shape member 5 and the chromium oxide film 5f, it can provide shade shaped member 5 having both high insulation and high light-shielding property, in the manufacturing method of the optical deflecting device 0 to be described later, a fine integrated becomes possible to produce reduction, structural control is more simple and easy to perform optical deflection operation is more stable even faster response, a further low cost.
次に、光偏向装置0において、板形状部材2が、シリコン窒化膜2cにより構成され、且つ、板形状部材2に組み合わせ構成される反射手段1の上記反射面1aの光反射領域が高い導電性を有し、且つ、高い反射性を有する上記アルミニウム系金属膜1bにより構成されている。 Then, the optical deflecting device 0, the plate-shaped member 2 is constituted by a silicon nitride film 2c, and the light reflecting region of the reflecting surface 1a of the combination constituted reflecting means 1 to the plate-shaped member 2 is highly conductive It has, and is constituted by the aluminum-based metal film 1b having high reflectivity.
上記シリコン窒化膜2cの板形状部材2は、高い絶縁破壊電圧を有し、且つ、長期的な劣化、即ち、繰り返し変位に伴う疲労に対する耐性も高いので極力軽量、及び、薄膜化でき、それにより高い周波数における駆動が可能な、即ち、数10kHz以上の高速動作が可能となる。 Plate-shaped member 2 of the silicon nitride film 2c has a high breakdown voltage, and long-term degradation, i.e., as much as possible light because resistance is high with respect to fatigue due to repeated displacement, and can be thinned, thereby which can be driven at high frequency, i.e., allows the number 10kHz or more high-speed operation.
又、反射手段1の上記反射面1aの光反射領域を高い反射性能と高い導電性を両立する上記アルミニウム系金属膜1bとすることにより、上記導電性領域2bと兼ねることができ、それにより、光偏向装置0の光偏向動作、即ち、板形状部材2の変位を、より高い反射光量を得ながら低電圧にて行うことが出来る。 Further, by setting the aluminum metal film 1b to achieve both high reflection performance and high conductivity light reflection area of ​​the reflecting surface 1a of the reflecting means 1, can also serve as the above conductive region 2b, whereby, light deflection operation of the optical deflecting device 0, i.e., the displacement of the plate-shaped member 2, it is possible to perform at a low voltage while achieving a higher amount of reflected light.
【0075】 [0075]
図49と図50において、光偏向装置0は、複数個を1次元アレー形状に配列した1次元光偏向アレー10として、図示しない上記画像形成装置200における図示しない潜像形成手段202等に使用することが出来る(図49を参照)。 In Figure 49 and Figure 50, the optical deflecting device 0, as a one-dimensional light deflection array 10 having an array of a plurality of one-dimensional array shape, used for latent image forming unit 202 or the like (not shown) in the image forming apparatus 200, not shown it is possible (see Figure 49). 更に、上記1次元光偏向アレー10を複数組み合わせて、2次元アレー形状に配列した2次元光偏向アレー20として、図示しない上記画像投影表示装置300における光スイッチ手段301等に使用することが出来る(図50を参照)。 Furthermore, by combining a plurality of said one-dimensional optical deflector array 10, as a two-dimensional array shape two-dimensional optical deflector array 20 arranged in, can be used in optical switching means 301, etc. in the image projection display apparatus 300 (not shown) ( see Figure 50).
【0076】 [0076]
図51乃至図59において、光偏向装置0は、次のように、基板3上に支点部材4と電極6の複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a を形成し、堆積して平坦化した上記第1の犠牲層7aを介して反射手段1を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材2を形成して、更に、堆積した上記第2の犠牲層7bとをパターン化した所定の位置に笠形状部材5をパターン化した後に、上記第1の犠牲層7aと上記第2の犠牲層7bをエッチングにより除去するから、入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動 In Figure 51 to Figure 59, the optical deflecting device 0, as follows: a plurality of fulcrum member 4 and the electrode 6 on the substrate 3, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or electrode 6a 4 was formed, to form a plate-shaped member 2 of the flattened above plate-shaped formed a reflecting means 1 through the first sacrificial layer 7a in thin film combination constituting the surface is deposited, further deposition after patterning the umbrella-shaped member 5 in the above second predetermined position patterned and sacrificial layer 7b of the first sacrificial layer 7a and the second sacrificial layer 7b from is removed by etching, the incident 1 axial reflection direction of light, or, 2 axially structure and control operation easy easy to perform the light deflection by changing the faster a stable response without wavelength of the incident light to be used is limited, mechanical strength is little change and deterioration in a long period of time during use, drive 電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置0の製造方法を提供することが出来るようになった。 Resource-saving low-voltage, can be miniaturized and integrated low cost has become possible to provide a manufacturing method of the optical deflection device 0 use environment is also not limited.
基板上支点部材形成工程(a )において、上記(100)面方位を有するシリコン基板3bの基板3上に、支点部材4を構成する上記酸化シリコン膜4fがプラズマCVD法により堆積され、その後、面積階調を有するパターンを形成したフォトマスクを用いた写真製版法やレジストパターン形成後熱変形させる写真製版法により、支点部材4の形状とほぼ同形状の任意の膜厚を有するレジストパターンを形成し、その後、ドライエッチング法の手法により目的形状の支点部材4が形成される。 In the substrate on the fulcrum member forming step (a 1), on a substrate 3 of silicon substrate 3b having the (100) plane orientation, the silicon oxide film 4f constituting a fulcrum member 4 is deposited by a plasma CVD method, thereafter, by photolithography and forming a resist pattern after photolithography to thermal deformation using a photo mask formed with a pattern having an area gradation, a resist pattern having an arbitrary thickness substantially the same shape as the shape of the fulcrum member 4 and, thereafter, the fulcrum member 4 object shape is formed by the technique of the dry etching method.
尚、上記(100)面方位を有するシリコン基板3b上に2μm程度の酸化シリコン膜を形成し、その上層1μm程度にて同様の加工を行っても良い。 The above (100) surface orientation to form a silicon oxide film of about 2μm on a silicon substrate 3b with, may be subjected to the same processing at the upper layer 1μm about.
又、支点部材4の支点部位の頂点における高さは、およそ1μmである(図51を参照)。 The height at the apex of the fulcrum portion of the fulcrum member 4 is approximately 1 [mu] m (see Figure 51).
【0077】 [0077]
電極形成工程(a )において、電極6の複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a を窒化チタン(TiN)膜の薄膜で形成する。 In the electrode formation step (a 2), a plurality of electrodes 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or to form the electrodes 6a 4 with a thin film of titanium nitride (TiN) film.
TiN薄膜は、TiをターゲットとしたDCマグネトロンスパッタ法により、厚さ0.01μmに成膜し、写真製版法、及び、ドライエッチング法の手法により複数の、例えば、電極6a 、電極6a 、電極6a 、電極6a としてパターン化した(図52を参照)。 TiN thin film by DC magnetron sputtering with a target of Ti, is deposited to a thickness of 0.01 [mu] m, photolithography, and, of the plurality by a method of dry etching, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, the patterned as electrodes 6a 4 (see Figure 52).
保護膜形成工程(a )において、電極6の複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a の保護膜6bとして、プラズマCVD法によるシリコン窒化膜を膜厚0.2μmで形成した(図53を参照)。 In the protective film formation step (a 3), a plurality of electrodes 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or, as a protective film 6b of the electrode 6a 4, film a silicon nitride film by plasma CVD method It was formed in a thickness 0.2 [mu] m (see Figure 53).
第1の犠牲層形成工程(a )において、非晶質なシリコン膜をスパッタ法により2μm堆積させ、CMP技術を用いて処理時間制御にて平坦化した。 In the first sacrificial layer forming step (a 4), the amorphous silicon film is 2μm deposited by sputtering, and flattened by the processing time control using CMP techniques. この時、支点部材4の頂点上に残る非晶質シリコン膜の膜厚を0.1μmとなる時間にて処理した。 In this case, were treated film thickness of the amorphous silicon film remaining on the apex of the fulcrum member 4 at 0.1μm and composed time. 残存する非晶質シリコン膜が上記第1の犠牲層7aである。 Amorphous silicon film remaining is the first sacrificial layer 7a.
尚、上記第1の犠牲層7aとしては、上記膜以外にもポリイミド膜や感光性有機膜、一般的に半導体プロセスにて用いられるレジスト膜や多結晶シリコン膜などを用いることも出来、平坦化の手法としては、熱処理によるリフロー法やドライエッチングによるエッチバック法を用いることも出来る(図54を参照)。 The above as the first sacrificial layer 7a, can also be used as the resist film or a polycrystalline silicon film used in addition to the above film or a polyimide film photosensitive organic film, typically a semiconductor process, planarization as the method can also be used etch-back method by a reflow method or a dry etching by heat treatment (see Figure 54).
反射手段と板形状部材形成工程(a )において、板形状部材2となる上記シリコン窒化膜2cをプラズマCVD法により厚さ0.2μmで堆積させ、引き続き、反射手段1の上記反射面1aの光反射領域を兼ねる上記導電性領域2bとなる上記アルミニウム系金属膜1bを0.05μmの厚さでスパッタリング技術により堆積させた。 In the reflection means and the plate-shaped member forming step (a 5), the silicon nitride film 2c of the plate-shaped member 2 is deposited in a thickness of 0.2μm by a plasma CVD method, subsequently, the reflecting means 1 of the reflecting surface 1a the aluminum-based metal film 1b serving as the conductive regions 2b serving as a light reflecting area was deposited by sputtering techniques to a thickness of 0.05 .mu.m. その後、上記導電性領域2b、及び、板形状部材2をそれぞれ写真製版法、及び、ドライエッチング法によりパターン化した(図55を参照)。 Thereafter, the conductive regions 2b and, respectively photolithography plate-shaped member 2, and was patterned by dry etching (see FIG. 55).
【0078】 [0078]
第2の犠牲層形成工程(a )において、非晶質なシリコン膜をスパッタ法により1μm堆積させ、上記第2の犠牲層7bとした。 In the second sacrificial layer forming step (a 6), an amorphous silicon film is 1μm by sputtering, and with the second sacrificial layer 7b. 尚、上記第2の犠牲層7bとしては、上記膜以外にもポリイミド膜や感光性有機膜、一般的に半導体プロセスにて用いられるレジスト膜や多結晶シリコン膜などを用いることも出来る(図56を参照)。 Incidentally, as the second sacrificial layer 7b, the layer other than the polyimide film or a photosensitive organic film is also generally resist film or a polycrystalline silicon film or the like can also be used for use in a semiconductor process (Fig. 56 see).
笠形状部材パターン化工程(a )において、光偏向装置0を個別に分離し、反射手段1を組み合わせ構成する板形状部材2の周囲に、図示しない笠形状部材5を配置するために、写真製版法、及び、ドライエッチング法により、上記第1の犠牲層7a、及び、上記第2の犠牲層7bを同時に、反射手段1を組み合わせ構成する板形状部材2よりやや広くパターン化した(図57を参照)。 In umbrella-shaped member patterning step (a 7), a light deflection device 0 individually separated, around the plate-shaped member 2 which constitute a combination of reflecting means 1, in order to place the umbrella-shaped member 5, not shown, photo plate making method, and, by a dry etching method, the first sacrificial layer 7a and, the second sacrificial layer 7b at the same time, a slightly wider patterned than the plate-shaped member 2 which constitute a combination of reflecting means 1 (FIG. 57 see).
笠形状部材形成工程(a )において、笠形状部材5を構成する上記酸化シリコン膜5dをプラズマCVD法により厚さ0.8μmで堆積させ、写真製版法、及び、ドライエッチング法により、パターン化して、笠形状部材5を形成した。 In bevel shaped member forming step (a 8), the silicon oxide film 5d constituting the umbrella-shaped member 5 is deposited with a thickness 0.8μm by a plasma CVD method, photolithography, and, by a dry etching method, and patterned Te, to form a bevel-shaped member 5. 尚、笠形状部材5は、図示のような形状に留まらず、図60、又は、図61に図示するような形状を取ることも出来る(図58を参照)。 Incidentally, umbrella-shaped member 5, not only the shape as shown, Figure 60, or may also take the shape as shown in FIG. 61 (see Figure 58).
犠牲層除去工程(a )において、残存する上記第1の犠牲層7a、及び、上記第2の犠牲層7bを、ウェットエッチング技術により開口部を通してエッチング除去し、反射手段1を組み合わせ構成する板形状部材2を可動範囲が制限された空隙(G)に配置して、光偏向装置0が完成する。 In the sacrificial layer removing step (a 9), the remaining first sacrificial layer 7a, and the second sacrificial layer 7b, is removed by etching through the openings by a wet etching technique, constituting a combination of the reflecting means 1 plate the shaped member 2 placed in the air gap in which the movable range is restricted (G), the optical deflection device 0 is completed.
尚、笠形状部材5が、板形状部材2の外周に対応して複数個の例えば、各笠形状部材5a 1、笠形状部材5a 2、笠形状部材5a 3、笠形状部材5a を所定の間隔(g)を空けて配置することにより、間隔(g)部には上記犠牲層7の上記第1の犠牲層7a、及び、上記第2の犠牲層7bが、3次元的に露出しているので、エッチングがより短時間で終了できる(図59を参照)。 Incidentally, umbrella-shaped member 5, the plurality corresponding to the outer periphery of the plate-shaped member 2, for example, the umbrella-shaped member 5a 1, umbrella-shaped member 5a 2, umbrella-shaped member 5a 3, umbrella-shaped member 5a 4 a predetermined by spaced (g), the first sacrificial layer 7a of the sacrificial layer 7 to the spacing (g) unit, and, the second sacrificial layer 7b is exposed three-dimensionally because there, the etching can be completed in a shorter time (see Figure 59).
【0079】 [0079]
図62乃至図71は本発明の他の実施形態に係る光偏向装置の製造手順を示す図であり、光偏向装置0は、次のように、基板3上に支点部材4と電極6を複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a を形成し、支点部材4を突出させて堆積して平坦化した上記第1の犠牲層7aに重ねて堆積して平坦化した第3の犠牲層7cを介して反射手段1を表面に組み合わせ構成する薄膜で形成された湾曲形状の上記湾曲形状部2aからなる板形状部材2を形成して、更に、堆積した上記第2の犠牲層7bとをパターン化した所定の位置に笠形状部材5をパターン化した後に、上記犠牲層7の上記第1の犠牲層7aと上記第2の犠牲層7bと上記第3の犠牲層7cをエッチングにより除去するから、静電引力により板 Figure 62 through Figure 71 are views showing the manufacturing steps of the optical deflector according to another embodiment of the present invention, the optical deflecting device 0, as follows, a plurality of fulcrum members 4 and the electrode 6 on the substrate 3 pieces, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or to form an electrode 6a 4, it is deposited by projecting fulcrum member 4 is deposited on top to flatten the above first sacrificial layer 7a forming a plate-shaped member 2 made of the curved shape portion 2a of the flattened third curved shape formed by a thin film of a combination constituting the reflecting means 1 to the surface via the sacrificial layer 7c Te was further deposited after patterning the umbrella-shaped member 5 in place of the patterned and the second sacrificial layer 7b, the first sacrificial layer 7a and the second sacrificial layer 7b and the third of the sacrificial layer 7 since the sacrificial layer 7c of removing by etching, the plate by electrostatic attraction 形状部材2が傾斜変位する時に、板形状部材2の変位時に上記湾曲形状部2aを中心とた変位が可能となり、板形状部材2がずれることを抑制し、言い換えると、支点部材4に対する板形状部材2の位置決めが自発的に容易となり、板形状部材2の変位時に、板形状部材2が笠形状部材5の側面に接触することを抑制して、入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置0の製造方法を提供することが出来るようになった。 When the shaped member 2 is inclined displacement enables displacements and around the curved portion 2a when the displacement of the plate-shaped member 2, and prevent the plate-shaped member 2 is shifted, in other words, plate-shaped for the fulcrum member 4 member 2 positioning is facilitated spontaneously, upon displacement of the plate-shaped member 2, and prevent the plate-shaped member 2 is in contact with the side surface of the umbrella-shaped member 5, one axis the reflection direction of the incident light, or, 2 axially structure and control operation easy easy to perform the light deflection by changing more stable faster response without wavelength of the incident light to be used is limited, and change during use the mechanical strength for a long time deterioration even less, the driving voltage is low resource saving, in a possible miniaturization and integration cost, has become possible to provide a manufacturing method of the optical deflection device 0 use environment is also not limited.
基板上支点部材形成工程(b )において、上記(100)面方位を有するシリコン基板3bの基板3上に、支点部材4を構成する上記酸化シリコン膜4fがプラズマCVD法により堆積され、その後、面積階調を有するパターンを形成したフォトマスクを用いた写真製版法やレジストパターン形成後熱変形させる写真製版法により、支点部材4の形状とほぼ同形状の任意の膜厚を有するレジストパターンを形成し、その後、ドライエッチング法の手法により目的形状の支点部材4が形成される。 In the substrate on the fulcrum member forming step (b 1), on a substrate 3 of silicon substrate 3b having the (100) plane orientation, the silicon oxide film 4f constituting a fulcrum member 4 is deposited by a plasma CVD method, thereafter, by photolithography and forming a resist pattern after photolithography to thermal deformation using a photo mask formed with a pattern having an area gradation, a resist pattern having an arbitrary thickness substantially the same shape as the shape of the fulcrum member 4 and, thereafter, the fulcrum member 4 object shape is formed by the technique of the dry etching method.
尚、上記(100)面方位を有するシリコン基板3b上に2μm程度の酸化シリコン膜を形成し、その上層1μm程度にて同様の加工を行っても良い。 The above (100) surface orientation to form a silicon oxide film of about 2μm on a silicon substrate 3b with, may be subjected to the same processing at the upper layer 1μm about.
又、支点部材4の支点部位の頂点における高さは、およそ1μmである(図62を参照)。 The height at the apex of the fulcrum portion of the fulcrum member 4 is approximately 1 [mu] m (see Figure 62).
【0080】 [0080]
電極形成工程(b )において、電極6の複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a を窒化チタン(TiN)膜の薄膜で形成する。 In the electrode formation step (b 2), a plurality of electrodes 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or to form the electrodes 6a 4 with a thin film of titanium nitride (TiN) film.
TiN薄膜は、TiをターゲットとしたDCマグネトロンスパッタ法により、厚さ0.01μmに成膜し、写真製版法、及び、ドライエッチング法の手法により複数の、例えば、電極6a 、電極6a 、電極6a 、電極6a としてパターン化した(図63を参照)。 TiN thin film by DC magnetron sputtering with a target of Ti, is deposited to a thickness of 0.01 [mu] m, photolithography, and, of the plurality by a method of dry etching, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, the patterned as electrodes 6a 4 (see Figure 63).
保護膜形成工程(b )において、電極6の複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a の上記保護膜6bとして、プラズマCVD法によるシリコン窒化膜を膜厚0.2μmで形成した(図64を参照)。 In the protective film formation step (b 3), a plurality of electrodes 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or, as the protective film 6b of the electrode 6a 4, a silicon nitride film by plasma CVD method It was formed to have a film thickness of 0.2 [mu] m (see Figure 64).
第1の犠牲層形成工程(b )において、非晶質なシリコン膜をスパッタ法により2μm堆積させ、CMP技術を用いて支点部材4が露出し、更に、時間をオーバーさせて平坦化した。 In the first sacrificial layer forming step (b 4), the amorphous silicon film is 2μm deposited by sputtering to expose the fulcrum member 4 by using the CMP technique, it was further flattened by over time. この時、支点部材4、及び、上記保護膜6bとの研磨選択性の高いCMP条件とすることにより、支点部材4の頂点近傍では支点部位が残存し、非晶質シリコン膜がやや低く残存する。 At this time, the fulcrum member 4, and, by a high CMP condition abrasive selectivity between the protective film 6b, fulcrum portion is left in a vicinity of an apex of the fulcrum member 4, an amorphous silicon film remains slightly lower . 支点部材4の支点部位が約0.2μm突出した。 Fulcrum portion of the fulcrum member 4 is about 0.2μm projects. 残存する非晶質シリコン膜が上記第1の犠牲層7aである。 Amorphous silicon film remaining is the first sacrificial layer 7a. 尚、上記第1の犠牲層7aとしては、上記膜以外にもポリイミド膜や感光性有機膜、一般的に半導体プロセスにて用いられるレジスト膜や多結晶シリコン膜などを用いることも出来、平坦化の手法としては、ドライエッチングによるエッチバック法を用いることも出来る(図65を参照)。 The above as the first sacrificial layer 7a, can also be used as the resist film or a polycrystalline silicon film used in addition to the above film or a polyimide film photosensitive organic film, typically a semiconductor process, planarization as the method can also be used etch-back method by dry etching (see FIG. 65).
【0081】 [0081]
第3の犠牲層形成工程(b )において、非晶質なシリコン膜をスパッタ法により0.1μm堆積させ、上記第3の犠牲層7cとした(図66を参照)。 In the third sacrificial layer forming step (b 5), an amorphous silicon film is 0.1μm by sputtering, and with the third sacrificial layer 7c (see Figure 66).
反射手段と板形状部材形成工程(b )において、板形状部材2となる上記シリコン窒化膜2cをプラズマCVD法により厚さ0.2μmで堆積させ、引き続き、反射手段1の上記反射面1aの光反射領域を兼ねる上記導電性領域2bとなる上記アルミニウム系金属膜1bを0.05μmの厚さでスパッタリング技術により堆積させた。 In the reflection means and the plate-shaped member forming step (b 6), the silicon nitride film 2c of the plate-shaped member 2 is deposited in a thickness of 0.2μm by a plasma CVD method, subsequently, the reflecting means 1 of the reflecting surface 1a the aluminum-based metal film 1b serving as the conductive regions 2b serving as a light reflecting area was deposited by sputtering techniques to a thickness of 0.05 .mu.m. その後、上記導電性領域2b、及び、板形状部材2をそれぞれ写真製版法、及び、ドライエッチング法によりパターン化した(図67を参照)。 Thereafter, the conductive regions 2b and, respectively photolithography plate-shaped member 2, and was patterned by dry etching (see FIG. 67).
第2の犠牲層形成工程(b )において、非晶質なシリコン膜をスパッタ法により1μm堆積させ、上記第2の犠牲層7bとした。 In the second sacrificial layer forming step (b 7), an amorphous silicon film is 1μm by sputtering, and with the second sacrificial layer 7b. 尚、上記第2の犠牲層7bとしては、上記膜以外にもポリイミド膜や感光性有機膜、一般的に半導体プロセスにて用いられるレジスト膜や多結晶シリコン膜などを用いることも出来る(図68を参照)。 Incidentally, as the second sacrificial layer 7b, the layer other than the polyimide film or a photosensitive organic film is also generally resist film or a polycrystalline silicon film or the like can also be used for use in a semiconductor process (Fig. 68 see).
笠形状部材パターン化工程(b )において、光偏向装置0を個別に分離し、反射手段1を組み合わせ構成する板形状部材2の周囲に、図示しない笠形状部材5を配置するために、写真製版法、及び、ドライエッチング法により、上記第1の犠牲層7a、及び、上記第2の犠牲層7b、上記第3の犠牲層7cを同時に、反射手段1を組み合わせ構成する板形状部材2よりやや広くパターン化した(図69を参照)。 In umbrella-shaped member patterning step (b 8), a light deflection device 0 individually separated, around the plate-shaped member 2 which constitute a combination of reflecting means 1, in order to place the umbrella-shaped member 5, not shown, photo plate making method, and, by a dry etching method, the first sacrificial layer 7a, and the second sacrificial layer 7b, the third sacrificial layer 7c simultaneously, than the plate-shaped member 2 which constitute a combination of the reflecting means 1 a slightly wider patterned (see Figure 69).
笠形状部材形成工程(b )において、笠形状部材5を構成する上記酸化シリコン膜5dをプラズマCVD法により厚さ0.8μmで堆積させ、写真製版法、及び、ドライエッチング法により、パターン化して、笠形状部材5を形成した。 In bevel shaped member forming step (b 9), the silicon oxide film 5d constituting the umbrella-shaped member 5 is deposited with a thickness 0.8μm by a plasma CVD method, photolithography, and, by a dry etching method, and patterned Te, to form a bevel-shaped member 5. 尚、笠形状部材5は、図示のような形状に留まらず、図60、又は、図61に図示するような形状を取ることも出来る(図70を参照)。 Incidentally, umbrella-shaped member 5, not only the shape as shown, Figure 60, or may also take the shape as shown in FIG. 61 (see Figure 70).
犠牲層除去工程(b 10 )において、残存する上記第1の犠牲層7a、上記第2の犠牲層7b、及び、上記第3の犠牲層7cを、ウェットエッチング技術により開口部を通してエッチング除去し、反射手段1を組み合わせ構成する板形状部材2を可動範囲が制限された空隙(G)に配置して、光偏向装置0が完成する。 In the sacrificial layer removing step (b 10), the remaining first sacrificial layer 7a, the second sacrificial layer 7b, and the third sacrificial layer 7c, is removed by etching through the openings by a wet etching technique, the plate-shaped member 2 which constitute a combination of reflecting means 1 disposed in the gap in which the movable range is restricted (G), the optical deflection device 0 is completed. 尚、笠形状部材5が、板形状部材2の外周に対応して複数個の例えば、各笠形状部材5a 、笠形状部材5a 、笠形状部材5a 、笠形状部材5a を所定の間隔(g)を空けて配置することにより、間隔(g)部には上記犠牲層7の上記第1の犠牲層7a、上記第2の犠牲層7b、及び、上記第3の犠牲層7cが、3次元的に露出しているので、エッチングがより短時間で終了できる(図71を参照)。 Incidentally, umbrella-shaped member 5, the plurality corresponding to the outer periphery of the plate-shaped member 2, for example, the umbrella-shaped member 5a 1, umbrella-shaped member 5a 2, umbrella-shaped member 5a 3, umbrella-shaped member 5a 4 a predetermined by spaced (g), the first sacrificial layer 7a of the sacrificial layer 7 to the spacing (g) portion, the second sacrificial layer 7b, and the third sacrificial layer 7c is since the exposed three-dimensionally, the etching can be completed in a shorter time (see Figure 71).
【0082】 [0082]
図72乃至図80は本発明の更に他の実施形態に係る光偏向装置の製造手順を示す図であり、この光偏向装置0は、次のように、基板3上に上記窪み形状部3aと上記窪み形状部3a内に上記斜面4dの斜面4d からなる支点部材4と電極6の複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a を形成し、堆積して平坦化した上記第1の犠牲層7aを介して反射手段1を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材2を形成して、更に、堆積した上記第2の犠牲層7bとをパターン化した所定の位置に笠形状部材5をパターン化した後に、上記第1の犠牲層7aと上記第2の犠牲層7bをエッチングにより除去するから、笠形状部材5の高さが低くなり、笠形状部材5自体の自立安定につ Figure 72 through Figure 80 is a further diagram showing the manufacturing procedure of the optical deflector according to another embodiment of the present invention, the optical deflecting device 0, as follows, and the recess-shaped portion 3a on the substrate 3 a plurality of fulcrum member 4 and the electrode 6 made of slopes 4d 4 of the inclined surface 4d in the recess-shaped portion 3a, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or to form an electrode 6a 4, deposited forming a plate-shaped member 2 of the flattened above plate-shaped formed a reflecting means 1 through the first sacrificial layer 7a in thin film combination constituting the surface and, further, the deposited the second sacrifice after patterning the umbrella-shaped member 5 in place of the patterned and a layer 7b, the first sacrificial layer 7a and the second sacrificial layer 7b from it is removed by etching, the height of the umbrella-shaped member 5 is lowered, self-supporting stability of the umbrella-shaped member 5 itself Nitsu がり、入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置0の製造方法を提供することが出来るようになった。 Shy, uniaxial reflection direction of the incident light, or biaxial directions to the structure and control operation easy easy to perform the light deflection by changing the faster a stable response without wavelength of the incident light to be used is limited mechanical strength changes deteriorated further less long term use, the drive voltage is low resource saving, in a possible miniaturization and integration cost, a manufacturing method of the optical deflection device 0 use environment is also not limited now it is possible to provide.
基板上窪み形状部と支点部材形成工程(c )において、上記(100)面方位を有するシリコン基板3bの基板3上に、面積階調や濃度階調を有するパターンを形成したフォトマスクを用いた写真製版法により、上記窪み形状部3a、及び、支点部材4の形状とほぼ同形状の任意の膜厚を有するレジストパターンを形成し、その後、ドライエッチング法の手法により上記(100)面方位を有するシリコン基板3bの基板3上をエッチング加工する。 Use the substrate recess-shaped portion and the fulcrum member forming step (c 1), on a substrate 3 of silicon substrate 3b having the (100) plane orientation, a photomask formed with a pattern having an area gradation or gray scale the stomach photolithography, the recess-shaped portion 3a, and a resist pattern having an arbitrary thickness substantially the same shape as the shape of the fulcrum member 4, then, the (100) surface orientation by a method of dry etching the upper substrate 3 of silicon substrate 3b having etching process. その後、上記(100)面方位を有するシリコン基板3bの基板3との絶縁性を取るために、支点部材4を構成する上記酸化シリコン膜4fを約1μmプラズマCVD法により堆積させる。 Then, to take the insulation between the substrate 3 of silicon substrate 3b having the (100) plane orientation is deposited by about 1μm plasma CVD method the silicon oxide film 4f constituting a fulcrum member 4. 以上の工程により、目的形状の上記窪み形状部3a、及び、支点部材4が形成される。 Through the above process, object shape of the recess-shaped portion 3a, and the fulcrum member 4 is formed.
尚、上記(100)面方位を有するシリコン基板3b上に2μm程度の酸化シリコン膜を形成し、その上層1μm程度にて同様の加工を行っても良い。 The above (100) surface orientation to form a silicon oxide film of about 2μm on a silicon substrate 3b with, may be subjected to the same processing at the upper layer 1μm about. 上記窪み形状部3aの最大深さは、およそ3μmであり、支点部材4の支点部位の頂点における深さはおよそ0.3μmである(図72を参照)。 The maximum depth of the recess-shaped portion 3a is approximately 3 [mu] m, the depth at the apex of the fulcrum portion of the fulcrum member 4 is approximately 0.3 [mu] m (see Figure 72).
【0083】 [0083]
電極形成工程(c )において、電極6の複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a を窒化チタン(TiN)膜の薄膜で形成する。 In the electrode forming step (c 2), a plurality of electrodes 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or to form the electrodes 6a 4 with a thin film of titanium nitride (TiN) film. TiN薄膜は、TiをターゲットとしたDCマグネトロンスパッタ法により、厚さ0.01μmに成膜し、写真製版法、及び、ドライエッチング法の手法により複数の、例えば、電極6a 、電極6a 、電極6a 、電極6a としてパターン化した(図73を参照)。 TiN thin film by DC magnetron sputtering with a target of Ti, is deposited to a thickness of 0.01 [mu] m, photolithography, and, of the plurality by a method of dry etching, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, the patterned as electrodes 6a 4 (see Figure 73).
保護膜形成工程(c )において、電極6の複数個、例えば、電極6a 、電極6a 、電極6a 、又は、電極6a の上記保護膜6bとして、プラズマCVD法によるシリコン窒化膜を膜厚0.2μmで形成した(図74を参照)。 In the protective film forming step (c 3), a plurality of electrodes 6, for example, electrodes 6a 1, electrodes 6a 2, electrodes 6a 3, or, as the protective film 6b of the electrode 6a 4, a silicon nitride film by plasma CVD method It was formed to have a film thickness of 0.2 [mu] m (see Figure 74).
第1の犠牲層形成工程(c )において、非晶質なシリコン膜をプラズマCVD法により2μm堆積させ、CMP技術を用いて上記(100)面方位を有するシリコン基板3bの基板3、及び、上記保護膜6bをエッチングストップ層として研磨し平坦化した。 In the first sacrificial layer forming step (c 4), an amorphous silicon film is 2μm deposited by plasma CVD, the substrate of the silicon substrate 3b having the (100) plane orientation by using the CMP technique 3 and, the protective layer 6b was polished and flattened as an etching stop layer.
この時、該エッチングストップ層の効果により、上記窪み形状部3a内の非晶質なシリコン膜はオーバー研磨をほとんど生じることなく高い制御性を有して平坦化が可能である。 In this case, the effect of the etching stop layer, an amorphous silicon film in the recess shaped portion 3a is capable of flattening a high controllability without hardly causing the over-polishing.
支点部材4の支点部位の頂点上に残る非晶質シリコン膜の膜厚はおよそ0.2μmとなった。 The film thickness of the amorphous silicon film remaining on the apex of the fulcrum portion of the fulcrum member 4 has become approximately 0.2 [mu] m. 上記窪み形状部3a内に残存する非晶質シリコン膜が上記第1の犠牲層7aである。 Amorphous silicon film remaining within the recess-shaped portion 3a is the first sacrificial layer 7a. 尚、上記第1の犠牲層7aとしては、上記膜以外にもポリイミド膜や感光性有機膜、一般的に半導体プロセスにて用いられるレジスト膜や、多結晶シリコン膜などを用いることも出来、平坦化の手法としては、熱処理によるリフロー法やドライエッチングによるエッチバック法を用いることも出来る(図75を参照)。 The above as the first sacrificial layer 7a, polyimide film or a photosensitive organic layer in addition to the above film, a resist film and used in general semiconductor process, it can also be used as the polycrystalline silicon film, flat as a method of reduction, it may be used an etch-back method by a reflow method or a dry etching by heat treatment (see Figure 75).
反射手段と板形状部材形成工程(c )において、板形状部材2となる上記シリコン窒化膜2cをプラズマCVD法により厚さ0.2μmで堆積させ、引き続き、反射手段1の上記反射面1aの光反射領域を兼ねる上記導電性領域2bとなる上記アルミニウム系金属膜1bを0.05μmの厚さでスパッタリング技術により堆積させた。 In the reflection means and the plate-shaped member forming step (c 5), the silicon nitride film 2c of the plate-shaped member 2 is deposited in a thickness of 0.2μm by a plasma CVD method, subsequently, the reflecting means 1 of the reflecting surface 1a the aluminum-based metal film 1b serving as the conductive regions 2b serving as a light reflecting area was deposited by sputtering techniques to a thickness of 0.05 .mu.m. その後、上記導電性領域2b、及び、板形状部材2をそれぞれ写真製版法、及び、ドライエッチング法によりパターン化した(図76を参照)。 Thereafter, the conductive regions 2b and, respectively photolithography plate-shaped member 2, and was patterned by dry etching (see FIG. 76).
【0084】 [0084]
第2の犠牲層形成工程(c )において、非晶質なシリコン膜をスパッタ法により1μm堆積させ、上記第2の犠牲層7bとした。 In the second sacrificial layer forming step (c 6), an amorphous silicon film is 1μm by sputtering, and with the second sacrificial layer 7b. 尚、上記第2の犠牲層7bとしては、上記膜以外にもポリイミド膜や感光性有機膜、一般的に半導体プロセスにて用いられるレジスト膜や多結晶シリコン膜などを用いることも出来る(図77を参照)。 Incidentally, as the second sacrificial layer 7b, the layer other than the polyimide film or a photosensitive organic film is also generally resist film or a polycrystalline silicon film or the like can also be used for use in a semiconductor process (Fig. 77 see).
笠形状部材パターン化工程(c )において、光偏向装置0を個別に分離し、反射手段1を組み合わせ構成する板形状部材2の周囲に、図示しない笠形状部材5を配置するために、写真製版法、及び、ドライエッチング法により、上記第1の犠牲層7a、及び、上記第2の犠牲層7bを同時に、反射手段1を組み合わせ構成する板形状部材2よりやや広くパターン化した(図78を参照)。 In umbrella-shaped member patterning step (c 7), a light deflection device 0 individually separated, around the plate-shaped member 2 which constitute a combination of reflecting means 1, in order to place the umbrella-shaped member 5, not shown, photo plate making method, and, by a dry etching method, the first sacrificial layer 7a and, the second sacrificial layer 7b at the same time, a slightly wider patterned than the plate-shaped member 2 which constitute a combination of reflecting means 1 (FIG. 78 see).
笠形状部材形成工程(c )において、笠形状部材5を構成する上記酸化シリコン膜5dをプラズマCVD法により厚さ0.8μmで堆積させ、写真製版法、及び、ドライエッチング法により、パターン化して、笠形状部材5を形成した。 In bevel shaped member forming step (c 8), the silicon oxide film 5d constituting the umbrella-shaped member 5 is deposited with a thickness 0.8μm by a plasma CVD method, photolithography, and, by a dry etching method, and patterned Te, to form a bevel-shaped member 5. 尚、笠形状部材5は、図示のような形状に留まらず、図60、又は、図61に図示するような形状を取ることも出来る(図79を参照)。 Incidentally, umbrella-shaped member 5, not only the shape as shown, Figure 60, or may also take the shape as shown in FIG. 61 (see Figure 79).
犠牲層除去工程(c )において、残存する上記第1の犠牲層7a、及び、上記第2の犠牲層7bを、ウェットエッチング技術により開口部を通してエッチング除去し、反射手段1を組み合わせ構成する板形状部材2を可動範囲が制限された空隙(G)に配置して、光偏向装置0が完成する。 In the sacrificial layer removing step (c 9), the remaining first sacrificial layer 7a, and the second sacrificial layer 7b, is removed by etching through the openings by a wet etching technique, constituting a combination of the reflecting means 1 plate the shaped member 2 placed in the air gap in which the movable range is restricted (G), the optical deflection device 0 is completed.
尚、笠形状部材5が、板形状部材2の外周に対応して複数個の例えば、各笠形状部材5a 1、笠形状部材5a 2、笠形状部材5a 3、笠形状部材5a を所定の間隔(g)を空けて配置することにより、間隔(g)部には上記犠牲層7の上記第1の犠牲層7a、及び、上記第2の犠牲層7bが露出しているので、エッチングがより短時間で終了できる(図80を参照)。 Incidentally, umbrella-shaped member 5, the plurality corresponding to the outer periphery of the plate-shaped member 2, for example, the umbrella-shaped member 5a 1, umbrella-shaped member 5a 2, umbrella-shaped member 5a 3, umbrella-shaped member 5a 4 a predetermined by spaced (g), the first sacrificial layer 7a of the sacrificial layer 7 to the spacing (g) unit, and, since the second sacrificial layer 7b is exposed, the etching It can be completed in a shorter time (see Figure 80).
【0085】 [0085]
図81において、電子写真プロセスで光書き込みを行なって画像を形成する上記画像形成装置200は、図示の矢印(V)方向に回動可能に保持されて形成画像を担持する画像担持体201のドラム形状の感光体と、帯電手段205で均一に帯電された上記画像担持体201のドラム形状の感光体上を、上記1次元光偏向アレー10の複数個の各光偏向装置0を各々独立に駆動する独立駆動手段101とからなる上記光情報処理装置100からなる上記潜像形成手段202で光書き込みを行なって潜像を形成し、上記潜像形成手段202の上記1次元光偏向アレー10の各光偏向装置0によって形成された潜像を現像手段203で顕像化してトナー画像を形成し、上記現像手段203で形成されたトナー画像を転写手段204で被転写体(P In Figure 81, the image forming apparatus 200 for forming an image by performing optical writing with the electrophotographic process, the drum of the image carrier 201 which carries a rotatably held in the formed image by the arrow shown (V) direction driving a photoreceptor shape, the uniformly charged photoreceptor on a drum shape of the image bearing member 201 by the charging unit 205, each independently a plurality of respective optical deflecting device 0 of the one-dimensional optical deflector array 10 in the latent image forming unit 202 comprising the above optical information processing apparatus 100 comprising a separate drive means 101 Metropolitan for by performing optical writing to form a latent image, each of the one-dimensional optical deflector array 10 of the latent image forming unit 202 and the latent image formed by the light deflection device 0 is visualized by the developing means 203 to form a toner image, a transfer member the toner image formed by the developing unit 203 by the transfer means 204 (P の転写紙に転写して、被転写体(P)の転写紙に転写されたトナー画像を定着手段206で定着した後に、被転写体(P)の転写紙を排紙トレイ207に排紙して収納される。 And transferred to a transfer paper, after fixing the toner image transferred to the transfer sheet of the transfer member (P) by the fixing means 206, and discharges the transfer sheet of the transfer member (P) to the discharge tray 207 It is housed Te.
他方、トナー画像を上記転写手段204で被転写体(P)の転写紙に転写した後の上記画像担持体201のドラム形状の感光体は、クリーニング手段208でクリーニングされて次工程の画像形成に備えるようになっている。 On the other hand, the photoconductor of the image drum shape of the support 201 after the toner image has been transferred onto the transfer sheet of the transfer member (P) by the transfer means 204 is cleaned by the cleaning unit 208 to the image formation of the next step It has become so equipped.
【0086】 [0086]
上記潜像形成手段202における上記光情報処理装置100は、光源102からの入射光束(R)は第1のレンズシステム103を介して、上記1次元光偏向アレー10の複数個の各光偏向装置0に照射され、上記1次元光偏向アレー10の複数個の各上記光変調装置0は、上記独立駆動手段101により、画像情報に応じて独立して個々の入射光を反射する反射手段1を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材2を、基板3上に固定することなく基板3上の支点部材4上と笠形状の笠形状部材5間に形成される空隙(G)内に変位が自由の状態で配置して、基板3上の支点部材4の周囲に板形状部材2と対向して配置した電極6に電位を付与して、支点部材4上に傾斜して載置する板形状部材2上の反射手段1で入 The optical information processing apparatus 100 in the latent image forming unit 202, the incident light beam from the light source 102 (R) via the first lens system 103, a plurality of the optical deflecting device of the one-dimensional optical deflector array 10 0 is irradiated in a plurality each of the light modulating device 0 of the one-dimensional optical deflector array 10, by the independent drive means 101, independently in accordance with image information reflecting means 1 for reflecting individual incident light the plate-shaped member 2 of a plate shape formed by thin film combination constituting the surface, voids are formed between the umbrella-shaped member 5 of the fulcrum member 4 above the umbrella-shaped substrate 3 without being fixed on a substrate 3 ( and G) the displacement is arranged in a free state, the electrode 6 arranged plate-shaped member 2 and opposite to the periphery of the fulcrum member 4 on the substrate 3 by applying a potential, inclined on the fulcrum member 4 penetration by the reflecting means 1 on the plate-shaped member 2 for mounting Te 光の反射方向を変えて光偏向を行なって、反射手段1を通じて入射光束(R)を第2のレンズシステム104を通じて上記画像担持体201のドラム形状の感光体上の表面に、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制して、結像する。 Perform the light deflection by changing the reflection direction of light, on the surface of the photosensitive member in the form of a drum of the image bearing member 201 the incident light flux (R) through a second lens system 104 via the reflecting means 1, and control structure simple easy, and stray light, by suppressing the reflected light from the adjacent element that occurs when the reflected direction disturbed, imaged.
尚、上記1次元光偏向アレー10は、シリコンウエハーを基板として、上述の製造方法と同様の方法で形成した。 Incidentally, the one-dimensional optical deflector array 10, a silicon wafer as a substrate, was formed in the same manner as the manufacturing method described above.
従って、入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行う構造と光書込み時のON、及び、OFF等の制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制でき、作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置0を具備して、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制する光偏向装置0を具備する上記光情報処理装置100、及び、光書き込み時のON/OFF制御が良好で高速動作が可能で、且つ、長期的な信頼性が高く、低電圧で駆動され、S Therefore, one-axis the reflection direction of the incident light, or structure and ON when the optical writing for performing varied light deflection in two axial directions, and is easy easy to control the OFF or the like, and stray light, the reflection direction disturbed can suppress the reflected light from the adjacent element that occurs when the actuation is faster stable response without wavelength of the incident light to be used is limited, also changes less deterioration during use the mechanical strength for a long period of time, drive voltage is low resource saving, low cost and can be miniaturized and integrated, comprises a light deflecting device 0 use environment is also not limited, a simple easy to control the structure, and stray light, the reflection direction disturbed the optical information processing apparatus 100 includes a suppress light deflecting device 0 the reflected light from the adjacent element that occurs when the and, enables oN / OFF control is good high-speed operation at the time of the optical writing, and long-term Do reliable, is driven at a low voltage, S N比も向上出来る高速で高精彩な画像を形成する上記画像形成装置200を提供することが出来るようになった。 N ratio also has become possible to provide the image forming apparatus 200 for forming a high-definition image at high speed can be improved.
【0087】 [0087]
図82において、画像を投影して表示する上記画像投影表示装置300は、投影画像データの入射光束(R)の反射方向を変えて光偏向を行なって画像を投影する、上記2次元光偏向アレー20の複数個の各光偏向装置0を各々独立に駆動する上記独立駆動手段101とからなる上記光情報処理装置100からなる光スイッチ手段301の各上記光変調装置0が画像を投影スクリーン302に投影して表示するようになっている。 In Figure 82, the image projection display apparatus 300 for displaying by projecting an image, to project an image by performing optical deflection by changing the reflection direction of the incident light beam of the projection image data (R), the two-dimensional optical deflector array the plurality of projection screens 302 each said optical modulation device 0 is the image of the optical switch means 301 composed of the optical information processing apparatus 100 having the above independent driving means 101 that drives each independently of each optical deflection device 0 20 projected to have so as to display.
上記光スイッチ手段301における上記光情報処理装置100は、上記光源102からの入射光束(R)を上記2次元偏向アレー20に配列された複数個の各光偏向装置0に照射して、上記独立駆動手段101により所望の画像のデータを各々の板形状部材2に組み合わせ構成された反射手段1により反射し、投影レンズ105、及び、絞り106を介して上記投影スクリーン302に、構造と画像投影データの表示、即ち、画素の明暗時のON、及び、OFF等の制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制して、投影する。 The optical information processing apparatus 100 in the optical switching means 301 irradiates a plurality of the optical deflecting device 0 which are arranged an incident light flux (R) in the two-dimensional deflection array 20 from the light source 102, the independent driving means 101 by reflected by the reflecting means 1 which is combined configuration data of a desired image to each of the plate-shaped member 2, the projection lens 105 and, in the projection screen 302 through the aperture 106, the structure and the image projection data display, i.e., oN during light and dark pixels, and is easy easy to control the OFF or the like, and stray light, by suppressing the reflected light from the adjacent element that occurs when the reflected direction disturbed projects.
カラー表示を行うためには、上記光源102の前に回転カラーホール107を設けたり、又、性能向上のためにマイクロレンズアレー108を用いることも出来る。 To perform color display, a rotary color hole 107 may be provided in front of the light source 102, also it can be used a micro-lens array 108 in order to improve the performance.
尚、上記2次元光偏向アレー20は、シリコンウエハーを基板として、上述の製造方法と同様の方法で形成した。 Incidentally, the two-dimensional optical deflector array 20, a silicon wafer as a substrate, was formed in the same manner as the manufacturing method described above.
従って、入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行う構造と画像投影データの表示、即ち、画素の明暗時のON、及び、OFF等の制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制でき、作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置0を具備して、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制する上記光情報処理装置100、及び、画像の明暗制御時のON/OFF制御が良好で高速動作が可能で、且つ、長期的な信頼性が高く、低電圧で Therefore, one-axis the reflection direction of the incident light, or, 2 axially changing the display of the structure and image projection data for optical deflector, i.e., ON during light and dark pixels, and is a simple and easy control of the OFF etc. and, stray light, which occurs when the reflected direction disturbed can suppress the reflection light from the adjacent element, actuated faster stable response without wavelength of the incident light to be used is limited, the mechanical strength for a long time also little change and deteriorate during use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, comprises a light deflecting device 0 use environment is also not limited, a simple easy to control the structure and stray light, suppress the reflected light from the adjacent element that occurs when the reflected direction disturbed the optical information processing apparatus 100, and a oN / OFF control when dark control of the image can be satisfactorily fast operation, and has high long-term reliability, a low voltage 動され、コントラスト比も向上出来るので、高輝度でありながら高いコントラストを有する高精細な画像を投影して表示する上記画像投影表示装置300を提供することが出来るようになった。 It is dynamic, since it improves the contrast ratio, it has become possible to provide the image projection display apparatus 300 for displaying by projecting high-definition images having a high contrast while a high luminance.
【0088】 [0088]
図83において、光信号の光路を決定して出力して伝送する光伝送装置400は、光信号を入力する光信号入力手段401と、上記光信号入力手段401からの光信号の入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行なって、各光信号の光路を決定する上記2次元光偏向アレー20の光偏向装置0からなる光スイッチ手段402と、上記光スイッチ手段402からの光信号を出力する光信号出力手段403とからなり、光信号の光路を決定して出力して伝送するようになっている。 In Figure 83, the optical transmission apparatus 400 for transmitting to determine the optical path of the optical signal output, an optical signal input means 401 for inputting a light signal, the reflection of incident light of the optical signal from the optical signal input means 401 1 the axial direction, or, perform the light deflection instead of 2 axially, an optical switch means 402 formed of a light deflection device 0 of the two-dimensional optical deflector array 20 to determine the optical path of the optical signals, the optical switch made of a light signal output means 403 for outputting the optical signal from the means 402, to determine the optical path of the optical signal is adapted to transmit output.
上記光スイッチ手段402は、上記光信号入力手段401が有する1個、又は、複数個の信号入力伝達ポート401a、例えば、信号入力伝達ポート401a 、信号入力伝達ポート401a 、信号入力伝達ポート401a から入力された光情報信号を、2段に配置された各上記2次元光偏向アレー20の2次元光偏向アレー20aと2次元光偏向アレー20bに配列された複数個の各光偏向装置0により1軸、又は、2軸方向に偏向され、所定の出力ポートを選択し決定して、複数の信号出力伝達ポート403a、例えば、信号出力伝達ポート403a 、信号出力伝達ポート403a 、信号出力伝達ポート403a を有する上記光信号出力手段403から出力して、構造と出力光情報信号のポートを決定する選択等の制御 Said optical switching means 402, one of the optical signal input means 401 has or a plurality of signal input transmission ports 401a, for example, the signal input transmission port 401a 1, the signal input transmission port 401a 2, signal input transmission port 401a the optical information signal input from the 3, a plurality of the optical deflecting device arranged in a two-dimensional optical deflector array 20a and the two-dimensional light deflection array 20b each arranged in two stages the two-dimensional optical deflector array 20 0 1 axis, or by two axially deflected, to determine and select the predetermined output ports, a plurality of signal output transmission ports 403a, for example, the signal output transfer port 403a 1, the signal output transfer port 403a 2, the signal output output from the optical signal output means 403 having a transfer port 403a 3, control of the selection or the like for determining the port structure as output optical information signal が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制して、伝送する。 Is simple easy and stray light, by suppressing the reflected light from the adjacent element that occurs when the reflected direction disturbed, transmitted.
上記光スイッチ手段402は、上記2次元光偏向アレー20を2段に配置して、光偏向角を大きく取っているが、選択するポートの数等によっては、上記2次元光偏向アレー20は1個でも良い。 It said optical switching means 402, by placing the two-dimensional optical deflector array 20 in two stages, but is taking a large light deflection angle, depending Suto port to be selected, the two-dimensional optical deflector array 20 1 it may be a number.
又、各上記2次元光偏向アレー20の2次元光偏向アレー20aと2次元光偏向アレー20bに配列された、複数個の各光偏向装置0を同時に、且つ、独立して駆動制御するための制御装置402aの各制御装置402a と各制御装置402a がそれぞれ具備されている。 Further, each of the two-dimensional light are arranged in a two-dimensional optical deflector array 20a and the two-dimensional light deflection array 20b of the deflection array 20, a plurality of each of the optical deflecting device 0 at the same time, and, for driving and controlling independently each controller 402a 1 and the control apparatus 402a 1 of the control device 402a are provided, respectively.
従って、入射光の反射方向を1軸、又は、2軸方向に変えて光偏向を行う構造と出力光情報信号のポートを決定する選択等の制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制でき、作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置0を具備して、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制し、2軸方向の光偏向を容易に正確に行なうことが出来、各ポートの選択の制御が良好で隣接ポートへの迷光、を抑制して、高速な光路切替が可能で、長期的な信頼性が高く Therefore, one-axis the reflection direction of the incident light, or, 2 axially varied is simple easy control of the selection or the like for determining the port structure as output optical information signal for light deflection, and stray light, the reflection direction disturbance can suppress the reflection light from the adjacent element that occurs when the actuation is faster stable response without wavelength of the incident light to be used is limited, less deterioration and change in use mechanical strength for a long time , the drive voltage is low resource saving, low cost and can be miniaturized and integrated, comprises a light deflecting device 0 use environment is also not limited, a simple easy to control the structure, and stray light, the reflection direction the reflected light from the adjacent element that occurs when turbulence is suppressed, the light deflection in the two-axis directions easily and accurately it is possible to perform, stray light to the adjacent port has good control of the selection of each port, by suppressing , enables high-speed optical path switching, high long-term reliability 低電圧で駆動され、同一基板上に集積化が出来るので、小型でありながら高速で誤動作の少ない光信号の光路を決定して出力して伝送する上記光伝送装置400を提供することが出来るようになった。 Is driven at a low voltage, because integrated on the same substrate can be, so that it is possible to provide the optical transmission device 400 and transmits the output to determine the optical path of the small optical signal malfunctions in high speed while being small Became.
【0089】 [0089]
図84は本発明の第16の実施形態を示す光偏向装置の主要部を説明するための平面図である。 Figure 84 is a plan view illustrating a main part of the optical deflecting device showing a sixteenth embodiment of the present invention.
図85は図84のA−A'線断面図である。 Figure 85 is a section along the line A-A 'of FIG 84.
図において、支点部材4は、板形状部材2に接する支点部位がほぼ点で接する四角錐形状であり、上述のように、上記酸化シリコン膜、又は、上記シリコン窒化膜で形成されているから機械的強度が強くなっている。 In the figure, the fulcrum member 4 is a quadrangular pyramid shape fulcrum portion contacting the plate-shaped member 2 is in contact with approximately point, as described above, the silicon oxide film, or from being formed in the silicon nitride film machine strength has become stronger. 頂部はとがっていても構わないが、先端部を半球状にしておけば、応力集中が弱められる。 Top is may also be pointed, if the tip hemispherical, stress concentration is weakened.
【0090】 [0090]
図86は本発明の第17の実施形態を示す光偏向装置の主要部を説明するための平面図である。 Figure 86 is a plan view illustrating a main part of the optical deflecting device showing a seventeenth embodiment of the present invention.
図87は図86のA−A'線断面図である。 Figure 87 is a section along the line A-A 'of FIG 86.
図において、支点部材4は板形状部材2に接する支点部位がほぼ点で接する四角錐形状である点では上記と同様であるが、異なる点は、四角錐の底面の大きさが板形状部材2とほぼ同程度の大きさになっている点である。 In the figure, but in terms fulcrum member 4 is quadrangular pyramid fulcrum portion contacting the plate-shaped member 2 is in contact with approximately point is similar to the above, it differs from, pyramid bottom size the plate-shaped member 2 When is a point that is about the same order of magnitude. したがって、板形状部材2が静電力を受けて傾斜したとき、板形状部材2の裏面が支点部材4の4つの斜面の内の1つの斜面に密接し、非常に安定した位置を保つ。 Therefore, when the plate-shaped member 2 is inclined by receiving an electrostatic force, in close contact with one slope of the rear surface of the plate-shaped member 2 is of the four inclined surfaces of the fulcrum member 4, maintaining a very stable position.
【0091】 [0091]
図88は本発明の第18の実施形態を示す光偏向装置の主要部を説明するための平面図である。 Figure 88 is a plan view illustrating a main part of the optical deflecting device showing the eighteenth embodiment of the present invention.
図において、符号6a ないし6a は8つの電極を示す。 In the figure, to no code 6a 1 6a 8 shows the eight electrodes.
光偏向装置0は図43に示した実施形態と同様、外形と板形状部材2が円形に構成されている。 Similar to the embodiment the optical deflecting device 0 shown in FIG. 43, outer and the plate-shaped member 2 is configured in a circular shape. この実施形態においては、支点部材4が8角錐に形成されている。 In this embodiment, the fulcrum member 4 is formed on the 8 pyramid. 8つの電極6a 〜6a は8角錐の各斜面に対応して設けられていて、互いに絶縁されている。 Eight electrodes 6a 1 ~6a 8 is provided in correspondence with each slope of 8 pyramid, they are insulated from each other. いま仮に、電極6a 〜6a =Y/2(V)、電極6a =Y(V)、6a =Y/2(V)、電極6a =0(V)とすることにより、板形状部材2は電極6a と板形状部材2の間、及び、板形状部材2と電極6a の間に働く静電引力に引かれるが、両者の中間に別の斜面があるため、電極6a の側に傾斜する。 Suppose, electrodes 6a 1 ~6a 5 = Y / 2 (V), the electrode 6a 6 = Y (V), 6a 7 = Y / 2 (V), by the electrode 6a 8 = 0 (V), the plate during the shaped member 2 electrode 6a 6 and the plate-shaped member 2 and, although drawn to the electrostatic attractive force acting between the plate-shaped member 2 and the electrode 6a 8, because of the different slopes to both the intermediate electrode 6a inclined to 7 side.
【0092】 [0092]
8角錐の底面の大きさを板形状部材2の大きさにほぼ等しくしておくと、板形状部材2の裏面が傾斜部に当接密着して光の反射方向が安定する。 If you leave substantially equal to the size of 8 pyramid bottom to the size of the plate-shaped member 2, the rear surface of the plate-shaped member 2 is reflection direction of the abutting contact with the light is stabilized to the inclined portion. なお、図43では笠形状部材5が円形の基板の全周に設けられているが、本実施形態では離散的に4カ所に設けられている。 Although bevel-shaped member 5 in Figure 43 is provided on the entire circumference of the circular substrate, in the present embodiment is provided discretely four places. どちらにする方がよいかは、アレーに構成する場合の全体の構成の都合で決めればよい。 Whether it is better to either it may be determined by the convenience of the entire configuration of the case that make up the array.
本実施形態においては、支点部材4は多角錐であれば、例えば6角錐でも、7角錐でも、或いは10角錐でも構わない。 In the present embodiment, the fulcrum member 4 if pyramid, for example, be a hexagonal pyramid, at 7 pyramid, or may be a 10 pyramids. 6角錐の場合は3つの軸方向に変えて光偏向を行うことができる。 For hexagonal pyramid can be performed light deflection instead of the three axial directions. 同様に、8角錐であれば4軸、10角錐であれば5軸方向に変えて光偏向を行うことができる。 Similarly, it is possible to perform the light deflection instead of 5 axially If 4 axes, 10 pyramid if 8 pyramid.
更に言えば、支点部材4は円錐形状であっても、電極6を互いに絶縁された例えば8個のように、任意数の複数の電極に分割すれば、板形状部材2の傾斜位置での安定性に不安はあるが、上記と同じ作用をさせることができる。 More, also fulcrum member 4 is a conical shape, so that the electrode 6 has been for example eight to insulated from each other, if divided into a plurality of electrodes of any number, stability of the inclined position of the plate-shaped member 2 there is anxiety in sex, but may be the same effect as described above.
【0093】 [0093]
図89は本発明の第19の実施形態を示す光偏向装置の主要部を説明するための平面図である。 Figure 89 is a plan view illustrating a main part of the optical deflecting device showing a nineteenth embodiment of the present invention.
図90は図89のA−A'線断面図である。 Figure 90 is a section along the line A-A 'of FIG 89.
本実施形態では、板形状部材2が単層の部材で構成される。 In the present embodiment, the plate-shaped member 2 is composed of members of a single layer. 例えば、アルミニュウムのように、それ自体反射率の高い材質を用いることによって、別途の反射手段を組み合わせることなく、目的の機能を達成することができる。 For example, as aluminum, by using a material having higher itself reflectance without combining a separate reflecting means, it is possible to achieve the desired functionality.
【0094】 [0094]
図91は本発明の第20の実施形態を説明するための図であり、図91(a)は光偏向装置の上面図、図91(b)はそのA−A'線の断面図である。 Figure 91 is a diagram for explaining the 20th embodiment of the present invention, FIG. 91 (a) is a top view of the optical deflecting device, FIG. 91 (b) is a sectional view of the line A-A ' . なお、煩雑さを避けるため、断面図は、切断端面のみを示す。 In order to avoid complication, sectional view shows only the cut end face. 以下すべての断面図においても同様である。 The same applies to all of the cross section below. 以下の説明においては、これまで板形状部材と呼んでいた部材を単に板状部材と呼ぶ。 In the following description, simply referred to as a plate-shaped member a member which is called a plate-shaped member past. また、笠形状部材は規制部材と呼ぶことにする。 Further, umbrella-shaped member will be referred to as the regulating member.
【0095】 [0095]
図91において、符号2100は光偏向装置、符号2101は基板、符号2102は規制部材、符号2103は支点部材、符号2104は板状部材をそれぞれ示す。 In Figure 91, reference numeral 2100 is an optical deflector, reference numeral 2101 denotes a substrate, reference numeral 2102 regulating member, reference numeral 2103 a fulcrum member, reference numeral 2104 a plate-like member, respectively.
基板2101の材質は任意でもよいが、微細化のことを考慮するとシリコンあるいはガラス等、一般に半導体プロセスや液晶プロセスにて用いられているものが望ましい。 The material of the substrate 2101 may be arbitrary, consideration of silicon or glass to a fine, generally those used in the semiconductor process and a liquid crystal process is desirable. また、本発明においては後述の駆動系回路と同一基板に形成することを考慮すると(100)面方位を有するシリコン基板が望ましい。 The silicon substrate having the consideration to the (100) orientation to form a drive system circuit and the same substrate will be described later in the present invention is desired. 規制部材2102は、一端にストッパ2102aを有した形状で複数配置されている。 Restricting member 2102 has a plurality arranged in a shape having a stopper 2102a on one end. 規制部材2102の材質としては、アレー化した時の反射領域の面積割合を最大にするために極力薄膜及び省スペースで構成でき、かつ機械的強度が強いことが望まれる。 As the material of the regulating member 2102, the area ratio of the reflective region when the array of configurable as much as possible thin and space-saving in order to maximize, and it is desired mechanical strength is high. さらに、規制部材2102によるミラー性能の低下を抑制するために、透光性を有するシリコン酸化膜等が望まれるが、乱反射の原因になるおそれがあるときは、規制部材2102の表面に光吸収性の処理をしてもよい。 Furthermore, in order to suppress the lowering of mirror performance by regulating member 2102, a silicon oxide film or the like having a light transmissive property is desirable, when there is a risk that causes diffuse reflection, light absorption on the surface of the regulating member 2102 it may be a process.
【0096】 [0096]
支点部材2103は円錐体であるが、板状部材2104が変位する時の支点となるので、支点となり得る形状であれば、その形は問わない。 While the fulcrum member 2103 is cone, since the fulcrum when the plate-like member 2104 is displaced, have a shape which can be a fulcrum, its shape is not limited. 支点部材2103の少なくとも板状部材2104と接する頂部2103aは導電性である。 Top 2103a in contact with at least a plate-like member 2104 of the fulcrum member 2103 is conductive. 支点部材2103の材質としては、導電性及び機械的強度を考慮すると、低抵抗な結晶シリコン膜や多結晶シリコン膜、または金属膜、またはタングステンシリサイドやチタンシリサイドなどの金属シリサイド膜、またはシリコン酸化膜やシリコン窒化膜の絶縁膜と金属膜の積層が望ましい。 As the material of the fulcrum member 2103, considering the conductivity and mechanical strength, low-resistance crystalline silicon film or a polycrystalline silicon film or a metal film or a tungsten silicide or titanium silicide, etc. of the metal silicide film, or a silicon oxide film, lamination of the insulating film and the metal film or a silicon nitride film is desirable. 但し、絶縁膜と金属膜の積層の場合には板状部材2104へ電位を付与するために電位供給線と該金属膜を接続する接続孔が必要となる。 However, connecting holes are required for connecting the potential supply line and the metal film in order to impart a potential to the plate member 2104 in the case of a lamination of the insulating film and the metal film. 板状部材2104は、固定端を有していない。 Plate member 2104 does not have a fixed end. 板状部材2104は、基板2101と支点部材2103と規制部材2102およびストッパ2102aとで可動範囲が所定の空間に制限されており、後述する製造方法により形成される。 Plate member 2104, the movable range in the substrate 2101 and the fulcrum member 2103 and the regulating member 2102 and the stopper 2102a are limited to a predetermined space, is formed by the manufacturing method described later. 板状部材2104は、部材全体が導電体層である。 Plate member 2104, the entire member is a conductive body layer. ただし、後述の静電引力を作用させる都合上、上面または裏面、あるいは部材全体、すなわち、少なくとも一部に、導電性の部材からなる導電体層を有していればよい。 However, for convenience the action of electrostatic attraction described later, the top surface or back surface or the entire member, i.e., at least a portion, may have a conductive layer made of a conductive member.
【0097】 [0097]
板状部材2104の裏面側の少なくとも支点部材2103と接する接触部2104aは導電性である。 Contact portion 2104a which is in contact with at least the fulcrum member 2103 of the rear surface side of the plate-like member 2104 is conductive. 接触部2104aは前述の導電体層と一体でもよいし、別体でもよい。 Contact portion 2104a is may be integral with the above-mentioned conductive layer may be a separate body. ただし、別体の場合は双方を電気的に接続しておく必要がある。 However, in the case of separate it is necessary to electrically connect both. 板状部材2104の材質としては、導電性及び機械的強度を考慮すると、アルミニウムやクロムやチタンや金や銀などの金属膜であることが望ましい。 The material of the plate member 2104, considering the conductivity and mechanical strength, it is preferable that the metal film such as aluminum or chromium or titanium or gold or silver. 板状部材2104の上面2104b全域を光反射領域にする場合には、反射性能の良好なアルミニウム系金属膜であることが好ましい。 When the top surface 2104b entire area of ​​the plate-like member 2104 in the light reflection region is preferably a good aluminum metal film of reflective performance. また、板状部材2104は前述のように可動範囲を制限されており、ほぼ支点部材2103を中心とした傾斜変位のみが起こるように規制部材2102が配置されている。 Further, the plate-like member 2104 is limited to the movable range as described above, are disposed regulating member 2102 so inclined only displaced around the substantially fulcrum member 2103 occurs. さらに、板状部材2104は、少なくとも光反射領域2104bにおいて平板であることが望まれる。 Further, the plate-like member 2104 is desired to be flat at least reflecting region 2104b. 板状部材2104が平板であることにより光反射領域に入射した光束は反射方向をそろえて反射することが可能で、光偏向装置を画像形成装置や画像投影表示装置、あるいは、光伝送装置に用いる場合は光学的特性を維持する上で重要である。 The light beam incident on the light reflection region by a plate-like member 2104 is flat plate can be reflected aligned reflection direction, the optical deflecting device the image forming apparatus or image projection display device, or use in an optical transmission device If is important in maintaining the optical properties. なお、板状部材2104の平面性としては曲率半径Raが数メートル以上であることが望まれる。 As the plane of the plate member 2104 is desired that the radius of curvature Ra of more than a few meters. 光反射領域2104bの光反射機能に着目するときは単に光反射面と呼ぶことがある。 When attention is focused on the light reflecting function of the light reflecting region 2104b is sometimes simply referred to as a light reflecting surface.
【0098】 [0098]
図92は本発明の第21の実施形態を示す図である。 Figure 92 is a diagram showing a twenty-first embodiment of the present invention. 図92(a)は光偏向装置の上面図であり、図92(b)はA−A'線の断面図である。 Figure 92 (a) is a top view of the optical deflecting device, FIG. 92 (b) is a cross-sectional view of line A-A '.
同図において、符号2100〜2104は第20の実施形態と同様である。 In the figure, reference numeral 2100 to 2,104 is similar to the embodiment of the 20. 板状部材2104は、誘電性を有する部材からなる誘電体層2201と導電性を有する部材からなる導電体層2202の積層により構成され、かつ板状部材2104の少なくとも支点部材2103の頂部2103aと接する接触部2104aにおいては導電体層2202のみにより構成されている。 The plate-like member 2104 is constructed by laminating conductor layer 2202 composed of a member having a dielectric layer 2201 and the conductivity comprising a member having a dielectric and in contact with the top 2103a of at least fulcrum member 2103 of plate member 2104 It is composed of only the conductive layer 2202 at the contact portion 2104a. 導電体層2202は、図91における板状部材2104と同様な構成で良い。 Conductive layer 2202 may be the same configuration as the plate-shaped member 2104 in FIG. 91. 誘電体層2201は、比誘電率が3以上と高い誘電性を有することが望ましく、比誘電率が6〜8と高い誘電性を示しかつ機械的強度が大きいシリコン窒化膜により構成されることが望ましい。 The dielectric layer 2201 is desirably dielectric constant has 3 or more and high dielectric property, relative dielectric constant are constituted by shown and high mechanical strength silicon nitride film with high dielectric and 6-8 desirable. 符号2203は、誘電体層2201に形成された開口部位を示し、接触部2104aが頂部2103aと接触できるようにしている。 Reference numeral 2203 denotes an opening portion formed in the dielectric layer 2201, the contact portion 2104a is to be in contact with the top 2103a. 開口部位2203は、写真製版技術によるパターン化で形成されている。 Opening segments 2203 are formed by patterning by photolithography.
【0099】 [0099]
図93は本発明の第22の実施形態を示す図である。 Figure 93 is a diagram showing a twenty-second embodiment of the present invention. 図93(a)は光偏向装置の上面図であり、図93(b)はB−B'線の断面図である。 Figure 93 (a) is a top view of the optical deflecting device, FIG. 93 (b) is a cross-sectional view of line B-B '.
同図において、符号2100〜2104は第20の実施形態と同様である。 In the figure, reference numeral 2100 to 2,104 is similar to the embodiment of the 20. 図において静電引力を作用させるための電極2301が基板2101上に4個設けられている。 Electrodes 2301 for applying an electrostatic attraction is provided four on the substrate 2101 in FIG. 電極2301は、支点部材2103に構成された導電性の頂部と電気的に分離されている。 Electrode 2301 is electrically conductive top and electrically isolated structure to the fulcrum member 2103. 電極2301の材質としては、第20の実施形態と同様、後述する製造方法により作製可能であることが望ましく、導電性などを考慮すると、アルミニウム系金属や窒化チタンやチタン等の金属が望ましく、板状部材2104に構成された導電体層の少なくとも一部が電極2301と対向している。 The material of the electrode 2301, similarly to the 20th embodiment, it is desirable can be manufactured by a manufacturing method described later, when considering the conductive metal it is desirable, such as aluminum metal and titanium nitride or titanium, the plate At least a portion of the conductive layer formed on Jo member 2104 faces the electrode 2301. それにより基板2101に形成された4個の電極2301のいずれかに与える電位と支点部材2103を経由して付与された板状部材2104の電位との電位差に起因した静電引力を、両者の間に働かせ、板状部材2104を目的の方向へ変位(傾斜)させることが出来る。 Whereby electrostatic attraction caused by the potential difference between the potential of the plate-like member 2104 granted via potential and the fulcrum member 2103 to be applied to any of the four electrodes 2301 formed on substrate 2101, both during to exert, displace the plate member 2104 in the desired direction (tilt) is to be is possible. さらに、引き続き支点部材2103を中心として対向する電極2301の他の部分へ任意の電位を印加することにより、板状部材2104の変位方向を高速で変えることが出来る。 Further, subsequently by applying any potential to other parts of the electrode 2301 facing around the fulcrum member 2103 can change the displacement direction of the plate-like member 2104 at a high speed. さらに、4個の電極2301のそれぞれに与える電位を任意に切り替えることにより板状部材2104の傾斜の向きを2軸方向で高精度に制御することが出来る。 Furthermore, it can be controlled by switching the potential applied to each of the four electrodes 2301 arbitrarily the direction of inclination of the plate-like member 2104 with high precision in two axial directions.
【0100】 [0100]
図94は本発明の第23の実施形態を示す図である。 Figure 94 is a diagram showing a twenty-third embodiment of the present invention. 図94(a)は光偏向装置の上面図であり、図94(b)はB−B'線の断面図である。 Figure 94 (a) is a top view of the optical deflecting device, FIG. 94 (b) is a cross-sectional view of line B-B '.
図95は支点部材の変型例を示す図である。 Figure 95 is a diagram showing a modified example of the fulcrum member.
図94において、2100〜2102は第20の実施形態と同様である。 In Figure 94, from 2100 to 2102 is similar to the embodiment of the 20th. 規制部材2102の配置は第20の実施形態と異なるが基本構成は同じである。 Arrangement of the regulating member 2102 differs from the twentieth embodiment are the same basic structure. 図94には支点部材2401が示されている。 It has been shown fulcrum member 2401 in FIG. 94. 第22の実施形態までは、支点部材2103が単なる円錐体であったが、本実施形態の支点部材2401は、板状部材2104が支点部材2401に線状で接しており、かつ支点部材2401が斜面を有する尾根形状であり、したがって、板状部材2104は、前記接触線で規定される1軸方向のみの変位が得られる。 Until 22nd embodiment of, the fulcrum member 2103 is a mere cone fulcrum member 2401 of this embodiment, the plate-like member 2104 is in contact with the fulcrum member 2401 linear, and the fulcrum member 2401 a ridge shape having an inclined surface, thus, the plate-like member 2104, displacement of only one axial direction defined by the line of contact is obtained. 支点部材2401の材質としては第1の実施例における支点部材2103の材質と同様である。 As the material of the fulcrum member 2401 is similar to the material of the fulcrum member 2103 in the first embodiment.
【0101】 [0101]
図95(a)に示すように、支点部材2401は鉛直断面が点を頂部とする逆V字型形状の角柱を代表とするが、図95(b)に示すように、頂部近傍が丸みを有する形状でも良い。 As shown in FIG. 95 (a), but the fulcrum member 2401 typified by prisms inverted V-shape the vertical section to the point with the top, as shown in FIG. 95 (b), near the top is rounded it may be a shape having. あるいは図95(c)に示すように断面が5角形であっても差し支えない。 Or cross section as shown in FIG. 95 (c) no problem even pentagon. 要は、板状部材2104と線接触できるような稜を持った柱状体であればよい。 In short, it may be a columnar body having a ridge that allows contact with the plate-like member 2104 lines. 図94及び図95に示すように、板状部材2104に接する支点部材2401が線状で接していることから、支点部材2401と板状部材2104の接触面積を低減して板状部材2104の静電引力による1軸方向の傾斜変位を安定して起こすことが出来る。 As shown in FIG. 94 and FIG. 95, since the fulcrum member 2401 in contact with the plate-like member 2104 is in contact with a linear, by reducing the contact area of ​​the fulcrum member 2401 and the plate-like member 2104 of the plate-like member 2104 static it can be stably cause tilting displacement of one axial direction by the electrostatic attraction. 支点部材2401が斜面を有する尾根形状であることから、支点部材2401の機械的強度を強めることが出来る。 Since the fulcrum member 2401 is ridge shaped with a slope, it is possible to enhance the mechanical strength of the fulcrum member 2401. 板状部材1204の変位は、基板上面における板状部材の端部との接触部位2402、もしくは、規制部材2102のストッパ2102aの少なくともいずれか一方で規制されるので、板状部材2104と他部材との接触面積を極力低減して板状部材2104の基板その他への固着を抑制できる。 Displacement of the plate-like member 1204 contact portion 2402 between the ends of the plate-shaped member of the upper surface of the substrate, or because it is regulated by at least one of the stopper 2102a of the regulating member 2102, and another member plate-like member 2104 as much as possible the fixation of the substrate to the other by reducing the plate-like member 2104 contact area can be suppressed in.
【0102】 [0102]
図96は本発明の第24の実施形態を示す図である。 Figure 96 is a diagram showing a 24th embodiment of the present invention. 図96(a)は光偏向装置の上面図であり、図96(b)はB−B'線の断面図である。 Figure 96 (a) is a top view of the optical deflecting device, FIG. 96 (b) is a cross-sectional view of line B-B '.
同図において、符号2100〜2102及び2104は第20の実施形態と同様で、符号2301は第22の実施形態と同様である。 In the figure, reference numeral 2100 to 2102 and 2104 similar to the embodiment of the 20, reference numeral 2301 is the same as the 22nd embodiment. 符号601は支点部材、符号602は導電部材、符号603は絶縁性膜をそれぞれ示す。 Reference numeral 601 denotes each fulcrum member, reference numeral 602 is a conductive member, numeral 603 is an insulating film.
光偏向装置2100の支点部材601の斜面が、板状部材2104のほぼ全域に対応して形成され、かつ斜面上に静電引力を作用させるための電極2301を4個有する。 Slope of the fulcrum member 601 of the optical deflector 2100 is formed to correspond to substantially the entire plate-like member 2104, and to four perforated electrodes 2301 for applying an electrostatic attraction on a slope. 支点部材601の材質としては、601の斜面上に電極2301が構成されるため、電極間を電気的に分離する目的で絶縁性であることが望ましい。 As the material of the fulcrum member 601, the electrode 2301 on the slopes of 601 is configured, it is preferable that the purpose of insulating to electrically isolate the electrodes. その場合、板状部材2104に電位を付与するために支点部材601の頂部601aは導電性を有する導電部材602で形成することが必要である。 In that case, the top portion 601a of the fulcrum member 601 to impart a potential to the plate-like member 2104 is necessary to form a conductive member 602 having conductivity. さらに導電部材602は電極2301と同一膜により同時に形成されることが望ましい。 Further the conductive member 602 is preferably formed simultaneously by the same and the electrode 2301 film.
【0103】 [0103]
電極2301全面に接触して板状部材2104を変位させるため、板状部材2104と電極2301間の電気的短絡を防止する目的で、第21の実施形態に示したように板状部材2104の裏面に誘電体層2201を構成するか、もしくは、電極2301上に絶縁性膜603を構成することが必要である。 Since contact with the electrode 2301 over the entire surface to displace the plate member 2104, for the purpose of preventing an electrical short between the plate member 2104 and the electrode 2301, the back surface of the plate member 2104, as shown in 21 of the embodiment in either forming the dielectric layer 2201, or it is necessary to configure the insulating layer 603 over the electrode 2301. 絶縁性膜603は絶縁性を有するシリコン酸化膜、または、シリコン窒化膜であることが望ましい。 Insulating film 603 is a silicon oxide film having an insulating property, or it is desirable that the silicon nitride film. さらに、絶縁性膜603は板状部材2104への電位付与を妨げないようにするために、導電部材602の部分にて開口していることが必要となる。 Furthermore, the insulating film 603 in order not to disturb the potential applied to the plate member 2104, it is necessary that an opening at the portion of the conductive member 602. 図において、頂部601aに近づくにつれ電極2301を板状部材2104に近接して設置でき、それにより、より大きな静電引力を発生させることが出来る。 In the figure, an electrode 2301 as it approaches the top 601a can be installed in close proximity to the plate-like member 2104, whereby it is possible to generate a larger electrostatic attraction. 言い換えると、より低電圧で板状部材2104の変位を可能とする。 In other words, to allow displacement of the plate-like member 2104 at a lower voltage. この実施例においては斜面に面接触して板状部材2104を変位させることが出来るので、接触時の衝撃を分散させることが出来る。 It is possible to displace the plate member 2104 in surface contact with the inclined surface in this embodiment, it is possible to disperse the impact at the time of contact. 斜面に面接触して板状部材2104を変位させることにより、板の変位方向の制御が容易となる。 By displacing the plate-shaped member 2104 in surface contact with the inclined surface, it is easy to control the displacement direction of the plate.
【0104】 [0104]
図97は本発明の第25の実施形態を示す図である。 Figure 97 is a diagram showing a 25th embodiment of the present invention. 図97(a)は光偏向装置の上面図であり、図97(b)はB−B'線の断面図である。 Figure 97 (a) is a top view of the optical deflecting device, FIG. 97 (b) is a cross-sectional view of line B-B '.
図97において、符号2100〜2102及び2104は第20の実施形態と同様である。 In Figure 97, reference numeral 2100 to 2102 and 2104 are similar to the embodiment of the 20th. 符号2301は第22の実施形態と同様である。 Reference numeral 2301 is the same as the 22nd embodiment. 符号601及び602は第24の実施形態と同様である。 Code 601 and 602 are similar to the embodiment of the 24th. 符号604は斜面上の電極2301を部分的に覆う絶縁性膜を示す。 Reference numeral 604 denotes an insulating film covering the electrode 2301 on the slope partially.
絶縁性膜604の材質に関しては第24の実施形態に示した絶縁性膜603と同様である。 With respect to the material of the insulating film 604 is similar to the insulating film 603 shown in the twenty-fourth embodiment. 電極上の絶縁性膜604は斜面上の任意の部位において多数の凸部位701を有しており、凸部位701への板状部材2104の接触により光偏向方向が規定される。 Insulating film 604 on the electrode has a number of convex portions 701 at any site on the slope, the light deflecting direction is defined by the contact of the plate member 2104 to the protrusion 701. 凸部位701は後述の製造方法により、絶縁性膜603のような絶縁性膜をパターン化して形成されることが望ましい。 The protrusion 701 by the manufacturing method described below, an insulating film to be formed by patterning is desirable as an insulating film 603. 凸部位701の大きさ及び高さ及び間隔は、板状部材2104が弾性変形により凹部位の電極2301へ接触しない範囲で任意の形状として、静電引力と板状部材の剛性の関係から設計することができる。 The size and height and spacing of the protrusion 701, the plate-like member 2104 as any shape in a range not contacting the concave position of the electrode 2301 by elastic deformation, designed from the relationship of the rigid electrostatic attraction and the plate-like member be able to. 板状部材2104が充分に硬い材質及び厚膜の場合、板状部材は弾性変形しにくいので、凸部位701の大きさは出来る限り小さくし、高さも低くし、間隔は広くすることができる。 If the plate-like member 2104 is sufficiently hard material and thick, since the plate-like member is not easily elastically deformed, the size of the protrusion 701 is as small as possible, even lower height can be widely spacing. それにより板状部材2104との接触面積を極力低減することが出来、長期にわたる駆動時の固着の可能性を低減できる。 Whereby it is reduced as much as possible the contact area between the plate member 2104, it is possible to reduce the possibility of long-term fixation at the time of driving.
【0105】 [0105]
図98は、本発明の第26の実施形態を示す図である。 Figure 98 is a diagram showing a 26th embodiment of the present invention.
この実施形態において、符号2100ないし2103は第20の実施形態と同様である。 In this embodiment, to no code 2100 2103 is similar to the embodiment of the 20th. 符号2201〜2203は第21の実施形態と同様である。 Reference numeral 2201 to 2203 are the same as those of the embodiment 21. 符号800a、800b、800c、800dは、第22の実施形態に示した電極2301と同等の電極を示す。 Code 800a, 800b, 800c, 800 d shows the same electrode and the electrode 2301 shown in the 22nd embodiment. 符号801及び802は支点部材2103の構成要素を示し、符号801は絶縁層、符号802は導電層を示す。 Code 801 and 802 represent the components of the fulcrum member 2103, reference numeral 801 denotes an insulating layer, reference numeral 802 denotes a conductive layer. 電極800a、800b、800c、800dは、誘電体層2201と導電体層2202とからなる板状部材2104に対向して配置されており、材質は第22の実施形態に示した電極2301の材質と同様である。 Electrodes 800a, 800b, 800c, 800 d are disposed to face the plate-like member 2104 made of a dielectric layer 2201 and the conductive layer 2202 Tokyo, material is a material of the electrodes 2301 shown in the embodiment of the 22 it is the same. 支点部材2103の頂部2103aは、絶縁性のシリコン酸化膜を材質とする絶縁層801と導電性の導電層802との積層により構成されている。 Top of the fulcrum member 2103 2103a is constituted by stacking an insulating layer 801 and the conductivity of the conductive layer 802 that the material of the insulating silicon oxide film. 導電層802は電極800a、800b、800c、800dと同時にパターン化されて形成された同一材質の部材である。 The conductive layer 802 electrodes 800a, 800b, 800c, which is member of the same material that is formed by 800d simultaneously patterned.
【0106】 [0106]
図98(a)は、第26の実施形態に用いる光偏向装置2100の上面図である。 Figure 98 (a) is a top view of the optical deflecting device 2100 used in the embodiment of the 26th. 図98(b)は、初期状態の光偏向装置2100のA−A'線及びB−B'線の断面図である。 Figure 98 (b) is a sectional view of A-A of the optical deflecting device 2100 in an initial state 'line and line B-B'. 図98(c−1)は、リセット動作前の光偏向装置2100のA−A'線上及びC−C'線上の断面図である。 Figure 98 (c-1) is a sectional view of the A-A 'line and C-C' line of the reset operation prior to the optical deflector 2100. 図98(c−2)は、リセット動作後の光偏向装置2100のA−A'線上及びC−C'線上の断面図である。 Figure 98 (c-2) is a sectional view of the A-A 'line and C-C' line of the optical deflecting device 2100 after the reset operation. 図98(d)は一方向へ光偏向した場合の光偏向装置2100のA−A'線上及びC−C'線上の断面図である。 Figure 98 (d) is a sectional view of the A-A 'line and C-C' line of the optical deflecting device 2100 in the case of light deflection in one direction. 図98(e)は、偏向軸を変えて光偏向した場合の光偏向装置2100のA−A'線上及びC−C'線上の断面図を示す。 Figure 98 (e) shows a sectional view of the A-A 'line and C-C' line of the optical deflecting device 2100 in the case of light deflection by changing the deflection axis.
【0107】 [0107]
図98(b)において、初期の光偏向装置2100は、板状部材2104が固定端を有していないので、その位置は所定空間内では自由である。 In FIG. 98 (b), the initial optical deflecting device 2100, since the plate-like member 2104 does not have a fixed end, its position is freely within a predetermined space. そこで、図98(b)においては、電極から最も遠ざかる配置を記載した。 Therefore, in FIG. 98 (b), described the farthest place from the electrode. この図のように、板状部材2104が基板2101上のすべての電極から等距離にあるとき、板状部材2104と頂部2103aとの接触の有無にかかわらず、板状部材2104は中立位置にあると呼ぶことにする。 As in this figure, when the plate-like member 2104 is equidistant from all the electrodes on the substrate 2101, or without contact between the plate member 2104 and a top 2103a, the plate-like member 2104 is in the neutral position It will be referred to as. 図98(c−1)には、板状部材2104が支点部材2103に接触前を示してある。 Figure 98 (c-1), the plate-like member 2104 are shown before contact with the fulcrum member 2103. また、図98(c−2)には、板状部材2104が支点部材2103に接触後を示してある。 Further, FIG. 98 (c-2), the plate-like member 2104 are shown after contact with the fulcrum member 2103. 初期状態から、板状部材2104を支点部材2103に接触させるために、図98(c−1)及び図98(c−2)におけるリセット動作を行う。 From the initial state, in order to contact the plate-like member 2104 to pivot member 2103, the reset operation is performed in FIG. 98 (c-1) and FIG. 98 (c-2).
【0108】 [0108]
リセット動作においては、電極800a、800bの電位をX(V)とし、電極800c、800d 、導電層802の電位を0(V)とする。 In the reset operation, the electrodes 800a, the potential of 800b as X (V), the electrode 800c, 800 d, the potential of the conductive layer 802 and 0 (V). 図98(c−1)の支点部材2103に板状部材2104が接触する前は板状部材が電気的に浮いている状態なので、図98(c−1)における下向きの白抜き矢印で示したような静電引力分布が得られる。 Since before the plate-like member 2104 is brought into contact with the fulcrum member 2103 in FIG. 98 (c-1) a state where the plate-shaped member is electrically floating, indicated by a downward white arrow in FIG. 98 (c-1) electrostatic attraction distribution as can be obtained. 以降、白抜き矢印の大きさにより静電引力の大小を模式的に示す。 Later, it shows the magnitude of the electrostatic attraction schematically by the size of the white arrow. すなわち、電気的に浮いている板状部材2104を経由して電極800a、800bと電極800c、800d間に静電引力が作用し、板状部材2104が基板2101表面に垂直に引き寄せられる。 That is, electrically floating electrode through the plate-like member 2104 are 800a, 800b and the electrode 800c, the electrostatic attractive force acts between 800 d, the plate-like member 2104 is drawn perpendicular to the substrate 2101 surface. その後、図98(c−2)の支点部材2103に板状部材2104が接触した後は、板状部材2104の電位が支点部材2103の電位と等しくなるため、板状部材2104と電極800c、800dの間には反発力は作用しても静電引力は作用せず、板状部材2104と電極800a、800bの間には強い静電引力が作用する。 Thereafter, the plate-like member 2104 is brought into contact with the fulcrum member 2103 in FIG. 98 (c-2), since the potential of the plate-like member 2104 is equal to the potential of the fulcrum member 2103, the plate member 2104 and the electrode 800c, 800 d does not act electrostatic attraction also acts repulsive force between the plate-like member 2104 and the electrode 800a, a strong electrostatic attraction between 800b acts. そのため板状部材2104が電極800a、800bのある側に傾斜し、板状部材2104の端部2104cが基板2101と接触して方向を規制されて、特定の方向に反射光が得られる。 Therefore the plate member 2104 electrodes 800a, inclined on the side of 800b, is restricted to a direction end 2104c of the plate-like member 2104 is in contact with the substrate 2101, the reflected light can be obtained in a particular direction. この状態をリセット状態とし、このときの反射光の方向をリセット方向と呼ぶ。 This state is the reset state, referred to the direction of the reflected light at this time the reset direction.
【0109】 [0109]
ここで印加される電位X(V)は、板状部材2104と電極との距離及び静電容量などにより決定され、通常の板状部材2104の変位、すなわち、支点部材2103を中心とした傾斜をひき起こす限界の電圧Z(V)よりやや大きい電圧とする。 Here the potential applied X (V) is determined by such as the distance and the capacitance between the plate member 2104 and the electrode, the displacement of the normal of the plate-like member 2104, i.e., the slope around the fulcrum member 2103 and slightly larger than the voltage Z (V) of the limit cause. この電圧(実際には後述のように電位差)をこの実施例における所定の電位差と呼ぶ。 The voltage (actually a potential difference as described below in) is referred to as a predetermined potential difference in this embodiment. 次に図98(d)において、電極800a、800bの電位を0(V)、 電極800c、800dの電位をX(V)に切り替えることにより、リセット方向と反対方向に高速に板状部材2104が傾斜変位し、板状部材2104の端部2104dが基板2101と接触して方向を規制されて、図のように”光偏向1”の状態になる。 Referring now to FIG. 98 (d), the electrode 800a, the potential of 800b 0 (V), the electrode 800c, by switching the potential of 800d to X (V), the plate-like member 2104 at a high speed in a direction opposite to the reset direction inclined displacement, is restricted to a direction end 2104d of the plate-like member 2104 is in contact with the substrate 2101, the state of which "light deflection 1" in FIG.
【0110】 [0110]
それぞれの電極及び導電層に、正負の極性にかかわらず、同じ値のバイアス電圧を加算しても、各部位の間の電位差が同じなので動作は変わらない。 Each of the electrodes and the conductive layer, whether positive or negative polarity, even by adding the bias voltage of the same value, the potential difference between the respective portions does not change the operation because it is the same. すなわち、静電引力は、電位そのもので発生するのではなく、対向する部材の間に存在する電位差で発生するものである。 In other words, the electrostatic attractive force, instead of occurring at a potential itself is intended to occur at a potential difference that exists between the opposing members. なお、この例では支点部材2103の導電層802には0(V)の電位を与えたままにして、電極側の電位を切り替えているが、板状部材2104の変位を単にリセット方向と反対方向に切り替えるだけなら、電位の与え方を逆の関係にしても同じ動作が得られる。 In this example, the conductive layer 802 of the fulcrum member 2103 to remain gave potential of 0 (V), but switches the potential of the electrode side, just the opposite direction to the reset direction displacement of the plate-like member 2104 if only switched to the same operation can be obtained even if the way given potential inversely related. すなわち、電極800a、800bにはX(V)の電位を、電極800c、800dには0(V)の電位を与えたままにしておき、導電層802にリセット時は0(V)の電位を与えて、”光偏向1”の状態への動作時にはX(V)の電位に切り替えるようにしてもよい。 That is, the electrode 800a, the potential of the X (V) in 800b, the electrode 800c, the 800d Leave gave potential of 0 (V), the potential of the reset the conductive layer 802 0 (V) given, when operating the states of the "light deflecting 1" may be switched to the potential of the X (V). 板状部材2104は、電極との間に電位差のある側、もしくは電位差のより大きい側に強い静電引力を受けてその方向に傾斜する。 Plate member 2104 receives a strong electrostatic attraction of potential side or larger side of the potential difference between the electrodes is inclined in that direction. すなわち、支点部材2103を中心として対向する電極へ任意の電位を印加し、導電層802の電位をいずれかの電極の電位と等しくすることにより、板状部材2104の変位方向を高速で変えることが出来る。 In other words, any potential is applied to the counter electrode around the fulcrum member 2103, a potential of the conductive layer 802 by equalizing the potential of one of electrodes, is possible to change the displacement direction of the plate-like member 2104 at a high speed can. これらのことは以後の実施例においても同様のことがいえる。 These things can be said that the same in the subsequent examples.
【0111】 [0111]
次に図98(e)において、電極800a、800c及び支点部材802の電位を0(V)、電極800b、800dの電位をX(V)とすることにより、図98(d)の光偏向とは軸を変えて、高速に板状部材2104が傾斜変位し、板状部材2104の端部2104eが基板2101と接触して方向を規制されて、「光偏向2」の状態になる。 Referring now to FIG. 98 (e), the electrodes 800a, 800c and the potential of the fulcrum member 802 0 (V), the electrode 800b, by the potential of the 800d and X (V), the light deflection in FIG 98 (d) is changing the shaft, high speed plate-like member 2104 is inclined displacement, is restricted to a direction end 2104e of the plate-like member 2104 is in contact with the substrate 2101, a state of "light deflecting 2". この軸方向においても、上記のように電極、あるいは、導電層に与える電位を切り替えることで、板状部材2104を逆方向に反転傾斜させ、「光偏向3」の状態にさせることができる。 In this axially, electrodes as described above or, by switching the potential applied to the conductive layer, is inverted inclined plate member 2104 in the opposite direction, can be brought into a state of "light deflecting 3". したがって、板状部材2104は初期位置以外に3つの態位をとることができる。 Thus, the plate-like member 2104 can take three states position other than the initial position. すなわち、板状部材2104の傾斜の向きを2軸方向で高精度に制御することが出来る。 That is, it is possible to control the orientation of the inclination of the plate-like member 2104 with high precision in two axial directions. 以上のように、複数の電極に異なる電位を与えることにより、板状部材2104が静電引力により変位し、すなわち、支点を中心に傾斜し、入射する光束の反射方向を初期位置も含めて合計4方向に変えることが出来る。 As described above, the total by giving different potentials to the plurality of electrodes, the plate-like member 2104 is displaced by electrostatic attraction, i.e., tilted about a fulcrum, including the initial position the reflection direction of the light beam incident 4 can be changed in direction.
【0112】 [0112]
次に、図98(c−1)のリセット動作時のように電気的に浮いている板状部材2104を、異なる電極800a、800b、800c、800d及び導電層802に異なる電位を与えることにより静電引力を発生させて変位させる原理を、図99に簡単に説明する。 Next, the static by providing plate-shaped member 2104 that is electrically floating as reset operation of FIG. 98 (c-1), different electrodes 800a, 800b, 800c, different potentials to 800d and the conductive layer 802 the principle of displacing by generating electrostatic attraction, briefly described in FIG. 99. なお、図99における説明では、板状部材2104上に導電体層2202を配置した効果も含めて記載する。 In the description of FIG. 99, described, including the effect of arranging the conductor layer 2202 on the plate-like member 2104.
【0113】 [0113]
図99は、図98における光偏向装置2100の、リセット動作時のD−D'線の断面図である。 Figure 99 is the optical deflecting device 2100 in FIG. 98 is a cross-sectional view of line D-D 'of the reset operation.
同図において、電極800bには正電位X(V)が印加され、電極800dには0(V)が印加されている。 In the figure, the electrode 800b positive potential X (V) is applied to the electrode 800 d 0 (V) is applied. この時両電極800b、800dと電気的に浮いている板状部材2104の間には静電引力が発生し、板状部材2104を電極側に変位させるのであるが、まず電極800bに印加された正電位により電極800bには正電荷が現れる。 In this case both electrodes 800b, the electrostatic attraction between the plate member 2104 that floats to 800d electrically generated, although to displace the plate-like member 2104 toward the electrode, it was first applied to the electrode 800b the positive potential to the electrode 800b positive charge appears. そして空隙901を介して誘電体層2201に誘電的に負電荷が発生し、同時に導電体層2202において導電的に効率よく負電荷が広がる。 The dielectrically negative charge is generated in the dielectric layer 2201 through the gap 901, conductive and efficiently negative charge spreads in the conductive layer 2202 at the same time. 逆に言うと、導電体層2202により効率的に誘電体層2201に負電荷を発生させる。 Conversely, the conductive layer 2202 to generate a negative charge efficiently dielectric layer 2201.
【0114】 [0114]
この時、誘電体層2201と導電体層2202は電気的に浮いているので、電極800dに空隙901を介して対向する誘電体層2201と導電体層2202には模式的には正電荷が広がる。 At this time, since the dielectric layer 2201 and the conductive layer 2202 is electrically floating, positive charge spread in schematic in the dielectric layer 2201 and the conductive layer 2202 which face each other with a gap 901 to electrode 800d . その正電荷に対応するように、電極800dには模式的に負電荷が発生する。 So as to correspond to the positive charge, schematically negative charge is generated in the electrodes 800 d. 電極800dは実際には0(V)であるが、模式的に考えた場合はそのようになる。 Although the electrode 800d is actually a 0 (V), when considered schematically is that way. それにより電極800d上部に位置する板状部材においても静電引力が発生する。 Whereby an electrostatic attractive force is generated even in the plate-shaped member positioned on the electrode 800d top. 上記説明は一連の流れにて説明したが、必ずしも一連の流れにより起こる訳ではなく、電極800bと800dの電位差がそれらの現象を同時進行的に発生させる。 The above description has been described in sequential flow, not necessarily mean that caused by sequential flow, the potential difference between the electrodes 800b and 800d generates the these phenomena simultaneously progressively. 実際には、電気的に浮いている誘電体層2201と導電体層2202は電極800bと電極800dの間の特定の電位となり、該特定の電位と電極800bの電位差による静電引力及び該特定の電位と電極800dの電位差による静電引力が発生することとなる。 In practice, the dielectric layer 2201 and the conductive layer 2202 that electrically floating become certain potential between the electrodes 800b and the electrode 800 d, the electrostatic attraction and the particular Potentiometric of the specific potential and the electrode 800b so that the electrostatic attraction due to the potential difference between the potential and the electrode 800d occurs. この特定の電位は空隙901及び電極800b、800dの面積などの構造的要因により定まる。 This particular potential gap 901 and the electrode 800b, determined by structural factors, such as the area of ​​800 d. このようにして発生した静電引力により板状部材2104が電極側に傾斜変位する。 Thus the plate-like member 2104 by electrostatic attraction generated by the inclined displaced toward the electrode.
【0115】 [0115]
図100は、本発明の第8の実施例を示す図である。 Figure 100 is a diagram showing an eighth embodiment of the present invention.
図100(a)は、図98(a)同様、第26の実施形態に示したものと同じ光偏向装置2100の上面図である。 Figure 100 (a), similarly FIG 98 (a), a top view of the same optical deflector 2100 as that shown in the embodiment of the 26th. 図100(b)は、図98(b)同様、初期状態の光偏向装置2100のA−A'線及びB−B'線の断面図である。 Figure 100 (b) is, FIG 98 (b) Similarly, a cross-sectional view of A-A of the optical deflecting device 2100 in an initial state 'line and line B-B'. 図100(c−1)及び図100(c−2)は、図98(c−1)及び図98(c−2)同様、それぞれリセット動作前と後の光偏向装置2100のA−A'線上及びC−C'線上の断面図である。 Figure 100 (c-1) and FIG. 100 (c-2) is, FIG. 98 (c-1) and FIG. 98 (c-2) Similarly, A-A of the optical deflecting device 2100 before and after the reset operation, respectively ' it is a cross-sectional view on the line and C-C 'line. 図100(d)は、一方向へ光偏向した場合の光偏向装置2100のA−A'線上及びC−C'線上の断面図である。 Figure 100 (d) is a sectional view of the A-A 'line and C-C' line of the optical deflecting device 2100 in the case of light deflection in one direction. 図100(e)は、偏向軸を変えて光偏向した場合の光偏向装置2100のA−A'線上及びC−C'線上の断面図である。 Figure 100 (e) is a sectional view of the A-A 'line and C-C' line of the optical deflecting device 2100 in the case of light deflection by changing the deflection axis.
【0116】 [0116]
図100(b)の初期状態及び図100(c−1)、図100(c−2)のリセット動作は図98と似ているが電位の与え方は異ならせてある。 Initial and diagram of FIG. 100 (b) 100 (c-1), the reset operation of FIG. 100 (c-2) is similar to FIG. 98 are made different from how given potential. 電極800aの電位をY(V)、電極800c、800d、及び、導電層802の電位を略Y/2 (V)、電極800bの電位を0(V)とする。 The potential of the electrode 800a Y (V), the electrode 800c, 800 d, and substantially the potential of the conductive layer 802 Y / 2 (V), the potential of the electrode 800b and 0 (V). 板状部材2104が支点部材2103に接触していない場合でも、図98で説明したリセット動作とほぼ同様の現象により、板状部材2104は支点部材2103に接触し、導電層802から略Y/2 (V)の電位が与えられる。 Even if the plate-like member 2104 is not in contact with the fulcrum member 2103, by substantially the same phenomenon as the reset operation described in FIG. 98, the plate-like member 2104 is in contact with the fulcrum member 2103, approximately Y / 2 from the conductive layer 802 potential of (V) is given.
電極800c、800dは板状部材と同じ電位が与えられているので両者の間のは静電引力は働かない。 Electrodes 800c, 800 d is the electrostatic attraction does not work for between them so that given the same potential as the plate-like member. 電極800bと板状部材、および、板状部材2104と電極800aの間の電位差はともに略Y/2 (V)となり、電極と板状部材との間に強い静電引力が働き、板状部材2104は電極800a、800bのある側に傾斜する。 Electrodes 800b and the plate member, and acts a strong electrostatic attraction between the plate potential difference between member 2104 and the electrode 800a are both substantially Y / 2 (V), and the electrode and the plate member, the plate-like member 2104 tilts electrodes 800a, on the side of 800b. この状態をリセット状態とする。 This state will be referred to the reset state.
【0117】 [0117]
図100(d)において、電極800cの電位をY(V)、電極800a、800b、及び、導電層802の電位を略Y/2 (V)、電極800dの電位を0(V)とすることにより、リセット方向と反対方向に高速に板状部材2104が傾斜変位し、板状部材2104の端部2104dが基板2101と接触して方向を規制されて、”光偏向1”の状態になる。 In FIG. 100 (d), the potential of the electrode 800c Y (V), the electrode 800a, 800b, and substantially the potential of the conductive layer 802 Y / 2 (V), the potential of the electrode 800d and 0 (V) Accordingly, the plate member 2104 is inclined displaced at high speed in a direction opposite to the reset direction, is restricted to a direction end 2104d of the plate-like member 2104 is in contact with the substrate 2101, a state of "light deflecting 1". それぞれの電極及び導電層に、正負の極性にかかわりなく、一定値のバイアス電位を加算しても動作は全く同じである。 Each of the electrodes and the conductive layer, irrespective of the positive or negative polarity, which is exactly the same work by adding a bias potential having a constant value. すなわち隣接する2つの電極へ大小異なる任意の電位を印加し、残りの2つの電極と導電層802には前記大小の電位の中間の電位を与えることにより、板状部材2104の変位方向を高速で変えることが出来る。 That applies two adjacent large and small different arbitrary potential to the electrodes, by the remaining two electrodes and the conductive layer 802 to provide an intermediate potential of the potential of the large and small, the displacement direction of the plate-like member 2104 at a high speed it can be changed. ここで印加される電位Y(V)は、所定値のことであり、次の条件で定める。 Here the potential applied Y (V) is that of a predetermined value, determined under the following conditions. すなわち、導電層802に与える電位Y/2(V)が板状部材2104の変位を引き起こす限界の電圧Z(V)よりやや大きい電位となるように設定する。 In other words, the potential Y / 2 applied to the conductive layer 802 (V) is set to be slightly greater potential than the voltage Z (V) of the limit causing a displacement of the plate member 2104.
【0118】 [0118]
次に図100(e)において、電極800bの電位をY(V)、電極800a、800c、及び、導電層802の電位を略Y/2(V)、800dの電位を0(V)とすることにより、図100(d)の光偏向とは軸を変えて、高速に板状部材2104が傾斜変位し、板状部材2104の端部2104eが基板2101と接触して方向を規制されて、「光偏向2」の状態となる。 Referring now to FIG. 100 (e), the potential of the electrode 800b Y (V), the electrode 800a, 800c, and approximately Y / 2 the potential of the conductive layer 802 (V), the potential of 800d to 0 (V) it allows changing the axis to the light deflector of FIG. 100 (d), high speed and the plate-like member 2104 is inclined displacement, is restricted to a direction end 2104e of the plate-like member 2104 is in contact with the substrate 2101, a state of "light deflection 2". すなわち、板状部材の傾斜の向きを2軸方向で高精度に制御することが出来る。 That is, it is possible to control the orientation of the inclination of the plate-like member with high precision in two axial directions. 以上のように、複数の電極間に異なる電位を与えることにより、板状部材2104が静電引力により支点を中心に傾斜し、入射する光束の反射方向を変えることが出来る。 As described above, by providing different potentials between the electrodes, the plate-like member 2104 is tilted about a fulcrum by electrostatic attraction, it is possible to change the reflection direction of the incident light beam. 以下に、光偏向のための静電引力の作用を、図100(d)を例に簡単に述べると、支点部材802を略Y/2(V)とすることにより板状部材の電位も略Y/2(V)となる。 Hereinafter, the effects of electrostatic attraction for light deflection, Describing briefly example FIG 100 (d), the potential of the plate-like member by the fulcrum member 802 substantially Y / 2 (V) and substantially Y / 2 to become (V). そのため、電極800a、800bに対向する部位においては同電位なので静電引力はほぼ作用しない。 Therefore, the electrode 800a, the electrostatic attraction so the same potential in the portion facing the 800b does not act substantially. それに対し、電極800c、800dに対向する部位においては電位差が略Y/2(V)生じるので、それぞれほぼ同等の静電引力 すなわち略Y/2(V)の電位差に対応する静電引力が作用し、板状部材が”光偏向1”方向へ傾斜する。 In contrast, the electrode 800c, the potential difference occurs approximately Y / 2 (V) in a portion facing to 800 d, the electrostatic attractive force corresponding to the potential difference substantially equal electrostatic attraction i.e. approximately Y / 2 (V), each action and, the plate-like member to be inclined to the "light deflecting 1" direction. 図100(e)においても、軸が異なるが同様に、板状部材が”光偏向2”方向へ傾斜する。 Also in FIG. 100 (e), the shaft is different but similarly, the plate-like member to be inclined to the "light deflecting 2" direction. 本実施例では、最大電位を与える電極と最小電位を与える電極とが、板状部材の変位の軸となる、支点部材の頂部を通る直線に関して同じ側に存在していることが条件である。 In this embodiment, the electrodes provide an electrode and the minimum potential that gives the maximum potential becomes the axis of displacement of the plate-like member, it is a condition that exists on the same side with respect to a straight line passing through the top of the fulcrum member. 電極数が4個の場合は隣接する電極が条件になる。 If the number of electrodes of the four adjacent electrodes becomes conditions.
【0119】 [0119]
次にこの実施例の光偏向方式の利点を、図100(d)を例に説明する。 Next will be described the advantages of the light deflection system of the embodiment, FIG. 100 (d) is an example. 図100(d)において、電極800c、800dにはそれぞれY(V)、0(V)が印加されているので、仮に板状部材2104が傾斜変位の過程で支点部材2103から離れ、板状部材2104が電気的に浮いた状態となっても、図99に記載のように電極800c、800dに対向する板状部材には静電引力を発生させることが出来る。 In FIG. 100 (d), the electrode 800c, each of the 800 d Y (V), since 0 (V) is applied, if the plate-like member 2104 away from the fulcrum member 2103 in the course of the inclined displacement, the plate-like member 2104 also becomes an electrically floating state, the electrode 800c, as described in FIG. 99, the plate-like member opposed to 800d can generate an electrostatic attraction. それにより、目的方向への光偏向を達成できる。 This allows achieving a light deflection to the desired direction. すなわち、利点として安定した光偏向を可能とすることが出来る。 That is, it is possible to enable stable light deflector as an advantage. 特に、光偏向装置の使い方が図とは上下が逆であった場合において、この効果は顕著に出る。 Particularly, in the case use of the optical deflecting device it is vertically was contrary to the figure, this effect out significantly. すなわち、このような使い方の場合は、装置に何も電位が印加されていない場合は、常に板状部材2104が支点部材2103から離れた状態になっているからである。 That is, in the case of such use, if anything potential device is not applied is always because the plate-like member 2104 is in a state away from the fulcrum member 2103.
さらに、他の利点は、後述の第29の実施例と組み合わせることによって得られる。 Furthermore, another advantage is obtained by combining a 29th embodiment described later.
【0120】 [0120]
次に、図100(f)を用いて、第27の実施形態の変形実施形態を説明する。 Next, with reference to FIG. 100 (f), illustrating a variation of the embodiment of the 27th. 電極800aの電位をX(V)、電極800b、800cの電位を略X/2(V)、電極800dの電位を0(V)とし、導電層802の電位を0(V)とする。 The potential of the electrode 800a X (V), the electrode 800b, substantially X / 2 the potential of 800c (V), the potential of the electrode 800d and 0 (V), the potential of the conductive layer 802 and 0 (V). ここで示す電位X(V)は、第26の実施形態で説明したものと同じである。 Here shows potential X (V) are the same as those described in the twenty-sixth embodiment.
板状部材2104は、電極800aとの間に大きな電位差があるため強い静電引力が働き、電極800b、800cとの間には小さい電位差があるため弱い静電引力が働き、電極800dとの間には電位差がないため静電引力が働かない。 Plate member 2104 may serve strong electrostatic attraction because of the large potential difference between the electrodes 800a, the electrode 800b acts weak electrostatic attraction because there is a small potential difference between 800c, between the electrode 800d It does not work electrostatic attraction because there is no difference in the electric potential. したがって、板状部材2104は図100(f)のように電極800aの方向に傾斜し、板状部材2104の対角線上の端点2104fにおいて基板2101と接する。 Thus, the plate-like member 2104 is inclined toward the electrode 800a as shown in FIG. 100 (f), in contact with the substrate 2101 in end point 2104f diagonal of the plate member 2104. すなわち、図100(d)、図100(e)に示す変位方向は、いずれもほぼ正方形で示す板状部材2104の辺の方向への傾斜であったが、変形実施形態で得られる傾斜方向は板状部材2104の対角線方向への傾斜である。 That is, FIG. 100 (d), the displacement direction shown in FIG. 100 (e), which were both inclined in the direction of the sides of the plate-like member 2104 shown in substantially square, gradient direction obtained in the modified embodiment the inclination of the diagonal of the plate member 2104. この実施形態でも、電極への電位の与え方で4通りの傾斜方向が得られる。 In this embodiment, the inclination direction of the four types in the way given the potential of the electrode is obtained.
【0121】 [0121]
実施形態27と変型実施形態は同じ構成で、印加電位の組み合わせ方を変えているだけなので、制御次第で光の反射方向を合計8方向に切り替えることができる。 In alternative embodiment the same configuration as the embodiment 27, since only changes how to combine the applied potential, it is possible to switch the reflection direction of light in total of eight directions depending control. 第26の実施形態と変型実施形態を組み合わせた制御を行っても同様の効果が得られる。 Performs control combining a modified embodiment and 26th embodiment similar effect can be obtained. 電極800b、800cに与える略X/2(V)という電位は電位0(V)の板状部材2104との間で弱い静電引力を発生させるので、板状部材2104の剛性が小さい場合はたわみが発生するおそれもある。 Electrodes 800b, since the potential of approximately X / 2 (V) applied to the 800c generates a weak electrostatic attraction between the plate-shaped member 2104 of the potential 0 (V), when the rigidity of the plate-like member 2104 is small deflection there is also likely to occur. そのような構成の場合は、電極800b、800cに与える電位を小さくするか、導電層802と同電位の0(V)としてもよいし、あるいは、電源から切り離して、電気的に浮いた状態にしてもよい。 For such a structure, the electrode 800b, or to reduce the potential applied to 800c, may be used as the 0 (V) of the conductive layer 802 at the same potential, or disconnect from the power source, and an electrically floating state it may be. 電極800b、800cに与える電位を、略X/2(V)とするか、電気的に浮いた状態にした場合は、導電層802に与える電位を0(V)からX(V)に切り換えるだけで板状部材2104の傾斜方向を逆側の電極800d側に反転させることができる。 Electrodes 800b, the potential applied to 800c, or approximately X / 2 (V), if you in an electrically floating state, only by switching the potential applied to the conductive layer 802 from 0 (V) to X (V) in it is possible to reverse the inclination direction of the plate-like member 2104 to the electrode 800d side of the opposite side. 以上述べた各例から分かるように、板状部材2104の光反射面の法線を傾けたい場合、その方向にある電極と、板状部材2104との間の電位差が最大になるように与えることが基本である。 As it can be seen from the examples mentioned above, if you want to tilt the normal of light-reflecting surface of the plate member 2104, to provide the electrode in that direction, such that a potential difference between the plate-like member 2104 is maximized There is a basic. このときの電極数は1個の場合と2個の場合があるのは既述の通りである。 Number of electrodes in this case are as described above it is there are cases when the one and two. 板状電極2104と隣り合う2個の電極との間に、同時に所定の電位差を与える場合は板状電極2104が辺の方向へ傾斜し、1個の電極との間に所定の電位差を与えれば、対角線方向へ傾斜する。 Between the two electrodes adjacent to the plate electrode 2104, a plate-shaped electrode 2104 when applying a predetermined potential difference is inclined toward the sides at the same time, it is given a predetermined potential difference between one electrode , inclined to the diagonal direction.
【0122】 [0122]
次に、光偏向装置2100の形状について述べる。 Next, we describe the shape of the optical deflector 2100. これまでの説明では理解を容易にするために、板状部材がほぼ正方形である場合について説明してきたが、本発明の構成はこれに限定されるものではない。 For ease of understanding in the above description, although the plate-like member has been described for the case where substantially square, configuration of the present invention is not limited thereto. また、基板上の電極の数も最大4個までで説明してきたが、これも4個に限定されるものではない。 Also, it has been described in up to several even up to 4 electrodes on a substrate, which is also not limited to four.
図101は、本発明の第28の実施形態を説明する図である。 Figure 101 is a diagram for explaining the 28th embodiment of the present invention. 図101において、外形その他が円形に構成されているが、符号2100ないし2104は第1の実施例と同様である。 In Figure 101, the external shape other is configured in a circular, to no code 2100 2104 is the same as in the first embodiment. ただし、支点部材2103は板状部材の直径より小さめの底面を有する円錐体状に示されている。 However, the fulcrum member 2103 is shown in cone shape having a smaller bottom surface than the diameter of the plate-like member. 符号800aないし800hは、円錐体状の支点部材2103の側面に分割して設けられた8個の電極であり、各電極は相互に絶縁されている。 It is no reference numeral 800a 800h are eight electrode provided by dividing the side face of the cone-shaped fulcrum member 2103, the electrodes are insulated from each other.
【0123】 [0123]
電極800aの電位をX(V)、電極800eの電位を0(V)とし、その他の電極をたとえば電気的に浮いた状態にしておく。 The potential of the electrode 800a X (V), the potential of the electrode 800e and 0 (V), leaving the other electrode for example in an electrically floating state. 支点部材2103の導電層802に仮に0(V)の電位を与えると、板状部材2104は電極800aとの間の大きな電位差により、電極800aの方向に傾斜する。 Given the potential of the tentatively 0 (V) to the conductive layer 802 of the fulcrum member 2103, the plate-like member 2104 by a large potential difference between the electrodes 800a, inclined in the direction of the electrode 800a. また、導電層802に仮にX(V)の電位を与えると、板状部材2104は逆に電極800eの方向に傾斜する。 Further, given a potential of if X (V) in the conductive layer 802, the plate-like member 2104 is inclined toward the electrode 800e reversed. このようにして、電極及び導電層に与える電位の組合せで、板状部材2104は、電極のあるすべての方向に傾斜させることが可能になる。 Thus, a combination of the potential applied to the electrodes and the conductive layer, the plate-like member 2104, it is possible to tilt in all directions with the electrodes. したがって、光の反射方向として8方向を選択的に設定することができる。 Therefore, it is possible to set the eight directions selectively direction as the light reflecting direction. 上記説明では支点部材2103を円錐体として説明したが、正8角錐体にしても構わない。 In the above description has described the fulcrum member 2103 as cones, but may also be positive 8 pyramid. 第23の実施形態と類似の考え方で、動作時に板状部材2104を支点部材の斜面に沿わせるように構成する場合は、円錐体の側面より角錐体の側面の方が傾斜方向の設定が安定する。 23 In embodiment similar to the concept of, when configured to be along the plate-like member 2104 on the slopes of the fulcrum member during operation, setting the inclination direction towards the side surface of the pyramid from the side surface of the cone is stable to. 本実施例では8個の電極で説明したが、その個数は角錐体が作れる範囲で全く自由である。 It described in eight electrodes in this embodiment, but the number is quite free to the extent that pyramid can make. すなわち、第23の実施形態に用いた柱状体の代わりに、上記に示した角錐体を、板状部材のほぼ全域に対応して斜面を有するように設置し、各斜面には互いに絶縁された電極を斜面の数だけ設ければ、任意の数の偏向方向を有する安定した光偏向装置が得られる。 That is, instead of the columnar body used in the embodiment of the 23, the pyramid shown above, was placed so as to have a slope corresponding to substantially the entire plate-like member, and each inclined surface being insulated from each other by providing the electrodes as the number of slopes, stable optical deflection device having the polarization direction of any number can be obtained.
【0124】 [0124]
第27の実施形態における電位の与え方は、最大電位を与える電極と最小電位を与える電極とが、板状部材の変位の軸となる支点部材の頂部を通る直線に関して同じ側に存在していることが条件であると述べた。 Way of giving potential in the embodiment of the 27th, the electrodes provide an electrode and the minimum potential that gives the maximum potential is present on the same side with respect to a straight line passing through the top of the fulcrum member serving as the axis of displacement of the plate-like member it was said to be conditions. 電極数が4個の場合は隣接する電極であることが必須であるが、電極数が6個以上の場合は必ずしも隣接している必要がなくなる。 Although when the number of electrodes of the four it is essential that a neighboring electrode, if the number of electrodes is 6 or more always adjacent need not have. すなわち、最大電位を与える電極と最小電位を与える電極との間に、他の電極が1個以上入っていても構わない。 That is, between the electrodes to provide an electrode and the minimum potential that gives the maximum potential and the other electrode may be contained one or more. 電極数が6個の場合は1個しか間に入り得ないが、電極数が8個の場合は、最大2個まで間に入り得る。 If the number of electrodes is six but not enter between only one, if the number of electrodes is eight, it may fall between up to two. このように電位を与えると、板状部材の変位は力関係により、電位差を与えた両電極の中間に向けて傾斜する。 Thus it gives the potential displacement of the plate-like member by the force relationship, inclined towards the middle of the electrodes with a potential difference. 間に挟まっている電極数が奇数、すなわち、1個もしくは3個なら、板状部材は中間の電極の斜面に接触して安定する。 The number of electrodes is sandwiched between odd, i.e., if one or three, plate-like member is stably in contact with the inclined surface of the intermediate electrode. したがって、この、間に挟まった電極には電位を与えないで電気的に浮いた状態にしておけば、最大の電位差が隣接同士の電極にかかることがなく、放電や、短絡のおそれがなく安定した動作が期待できる。 Therefore, this, if the state of the electrically floating without giving a potential to the caught electrodes while, no maximum potential difference that according to the electrode of the adjacent one another, discharge and stable without any risk of short-circuit the operation can be expected.
【0125】 [0125]
図102は本発明の第29の実施形態を説明する図である。 Figure 102 is a diagram for explaining the 29th embodiment of the present invention. この実施形態では、光偏向装置2100を任意の基板上にアレー状に並べて光偏向アレー1200とした。 In this embodiment, the light deflection array 1200 of light deflecting device 2100 are arranged in an array in any substrate. 図102(a)は上面図であり、102(b)はA−A'線の断面図である。 Figure 102 (a) is a top view, 102 (b) is a cross-sectional view of line A-A '. 図では、1次元に並べた状態を示しているが、2次元に並べても構わない。 In the figure, there is shown a state in which arrayed one-dimensionally, it may be arranged in two dimensions. 光偏向装置2100を集積化することにより、光偏向装置2100を同時にかつ独立に駆動制御して光偏向させることができる。 By integrating the optical deflecting device 2100, it is possible to light deflection by the drive control simultaneously and independently the optical deflecting device 2100. このように集積化してアレー状に並べたときの個別の光偏向装置2100を便宜上”素子”と呼ぶことがある。 Thus it may be called for convenience "element" individual optical deflecting device 2100 when aligned integrated in an array.
【0126】 [0126]
次に、第30の実施形態を説明する。 Next, the thirtieth embodiment. この実施形態における光偏向装置は、第20ないし第29の実施形態における光偏向装置2100の板状部材2104の近傍の雰囲気がほぼ真空である。 Optical deflecting device of this embodiment, the atmosphere in the vicinity of the plate-shaped member 2104 of the optical deflector 2100 in the embodiment of the 20th to 29th is substantially vacuum. 真空状態を形成する方法としては、光偏向装置2100をパッケージ化する際に、真空封止することにより達成可能である。 As a method for forming a vacuum state, when packaging the optical deflecting device 2100, it can be achieved by vacuum sealing. 図102にほぼ真空状態とする利点を図98に示す光偏向装置2100を複数1次元アレー化した実施例30の場合を例として説明する。 It is described as an example in Example 30 in which the optical deflecting device 2100 and a plurality one-dimensional array of which is shown in Figure 98 the advantage of substantially vacuum state in FIG. 102. 前述のように、図102の光偏向アレー1200の各素子において、2101及び2102は図91と同様である。 As described above, in each element of the optical deflection array 1200 in FIG. 102, 2101 and 2102 are the same as in FIG 91. 2201〜2203は図92と同様である。 2201-2203 is the same as FIG. 92. 800a、800b、800c、800d及び801、802は図98と同様である。 800a, 800b, 800c, the 800d and 801 and 802 is the same as FIG. 98. 図102(a)は、実施形態30の光偏向アレー1200の上面図である。 Figure 102 (a) is a top view of an optical deflection array 1200 of embodiment 30. 図102(b)は、各素子が任意の光偏向を行っている場合の光偏向アレー1200のA−A'線の断面図である。 Figure 102 (b) is a sectional view of line A-A 'of the light deflection array 1200 where each element is performing any light deflection.
【0127】 [0127]
図102(b)は板状部材2104の近傍の雰囲気が通常の大気である場合を模式的に示している。 Figure 102 (b) shows a case atmosphere in the vicinity of the plate-like member 2104 is normal atmospheric schematically. 一つの素子(左端の素子)の板状部材2104が傾斜変位したことにより板状部材2104直下の大気が圧力を受け、隣接する素子(中央の素子)へ浮力を及ぼすことになる。 Receiving the atmospheric pressure immediately below the plate-like member 2104 by a plate-like member 2104 of one element (leftmost element) is inclined displacement, it would exert a buoyancy to the adjacent element (central element). それにより、隣接する素子は白抜き矢印で示した目的の方向への変位を妨げられることになる。 Thereby, adjacent elements will be impeded displacement in the direction of the target indicated by the outline arrow. 板状部材2104の近傍の雰囲気をほぼ真空にすることにより、光偏向アレー1200においては、上記浮力の影響を抑制することができる。 By substantially vacuum atmosphere in the vicinity of the plate-like member 2104, the light deflection array 1200, it is possible to suppress the influence of the buoyancy. 単体の光偏光装置においては、空気中の埃などが入らないように装置周囲をカバーで覆うようにパッケージ化した場合、電圧印加による板状部材2104の急速な傾斜の変化に対して雰囲気の気体が粘性抵抗となり、わずかな応答遅れが生ずることを防ぐことができる。 In single optical polarizer, when the dust in the air is packaged so as to cover with a cover of the device around not to enter, the atmosphere with respect to rapid changes in the inclination of the plate-like member 2104 due to the voltage applied gas There becomes viscous resistance, it is possible to prevent the slight response delay occurs.
【0128】 [0128]
次に、第31の実施形態を説明する。 Next, an embodiment of the 31. この実施形態の光偏向装置2100は、板状部材2104の近傍の雰囲気が不活性な気体である。 Optical deflecting device 2100 of this embodiment, the atmosphere in the vicinity of the plate member 2104 is an inert gas. 不活性な気体としては、窒素、アルゴン、ヘリウム、ネオンなどがあり、その中では比較的安価であり安全な窒素が望ましい。 The inert gas, nitrogen, argon, helium, include neon, in which the relatively inexpensive and safe nitrogen is desired. 不活性な気体雰囲気を形成する方法としては、光偏向装置2100をパッケージ化する際に、不活性気体中において封止することにより達成可能である。 As a method for forming an inert gas atmosphere, when packaging the optical deflecting device 2100, it can be achieved by sealing in inert gases. 板状部材の近傍の雰囲気を該不活性な気体とする利点は、雰囲気中の水分を低減することができ、それにより、板状部材が傾斜変位し基板へ接触した時の接触点及び支点部材と板状部材の接触点における固着を抑制できることである。 The advantage of the atmosphere in the vicinity of the plate-like member and the inert gas can reduce the moisture in the atmosphere, whereby the contact point and the fulcrum member when the plate member in contact to the inclined displaced substrate it is to avoids the locking at the point of contact the plate-shaped member with. ただし、封入気体が板状部材2104の変位に対して粘性抵抗となるおそれがあれば、なるべく低圧にして封入することが望ましい。 However, it sealed gas if there is a possibility that the viscous resistance to displacement of the plate-like member 2104, it is desirable to enclose as much as possible to a low pressure.
【0129】 [0129]
画像投影表示装置に本発明を適用した実施例を、図103を用いて説明する。 An embodiment in which the present invention is applied to an image projection display apparatus will be described with reference to Figure 103. 図103は本発明の光偏向アレー1200を、画像投影表示装置に適用した例を説明する図である。 Figure 103 is a diagram for explaining an example of the light deflection array 1200, is applied to an image projection display apparatus of the present invention. 同図において、符号1300は画像投影表示装置、符号1301は光スイッチ手段、符号1302は光源、符号1303はレンズ、符号1304は絞り、符号1305は回転カラーホール、符号1306はマイクロレンズアレー、符号1310は投影スクリーンをそれぞれ示す。 In the figure, reference numeral 1300 the image projection display apparatus, reference numeral 1301 an optical switching means, reference numeral 1302 denotes a light source, reference numeral 1303 denotes a lens, reference numeral 1304 denotes a stop, reference numeral 1305 rotary color hole, reference numeral 1306 microlens array, reference numeral 1310 It shows a projection screen, respectively.
光偏向装置2100または光偏向アレー1200のいずれも、画像投影データの表示(すなわち画素の明暗表示)装置の光スイッチ手段として用いることができる。 Any of the optical deflecting device 2100 or the light deflection array 1200, a display of the image projection data (i.e. brightness display pixels) can be used as an optical switch means of the apparatus. したがって、画素の明暗制御(すなわち光スイッチのON/OFF制御)が良好で、迷光(反射方向が乱れた時に発生する隣接素子からの反射光)を抑制でき、高速な動作が可能で、長期的な信頼性が高く、低電圧で駆動でき、かつコントラスト比を向上できる。 Therefore, a good contrast control of the pixel (i.e. ON / OFF control of the optical switch), the stray light can be suppressed (light reflected from adjacent elements that occurs when the reflection direction is disturbed), can operate at a high speed, long-term Do reliable, driven by low voltage and can improve the contrast ratio. この実施例では光偏向アレー1200を用いている。 And using optical deflection array 1200 in this embodiment.
【0130】 [0130]
画像を投影して表示する画像投影表示装置1300は、投影画像データの入射光束(R)の反射方向を変えて光偏向を行なって画像を投影する光偏向アレー1200からなる光スイッチ手段1301が画像を投影スクリーン1310に投影して表示するようになっている。 Image projection display device for displaying by projecting an image 1300, the optical switching means 1301 made of a light deflection array 1200 by changing the reflection direction of the incident light beam of the projection image data (R) projects an image by performing optical deflection image projected to have so as to display on the projection screen 1310. 上記光スイッチ手段1301は、光源1302からの入射光束(R)が光偏向アレー1200に照射され、光偏向アレー1200内の各素子の板状部材2104の光反射面により反射し、投影レンズ1303、及び、絞り1304を介して上記投影スクリーン1310に投影する。 Said optical switching means 1301, the incident light beam from the light source 1302 (R) is irradiated to the light deflection array 1200, reflected by the light reflecting surface of the plate member 2104 of each element of the optical deflection array 1200, a projection lens 1303, and, via a throttle 1304 to project to the projection screen 1310. カラー表示を行うためには、上記光源1302の前に回転カラーホール1305を設けてもよい。 To perform color display, a rotary color hole 1305 may be provided in front of the light source 1302. 性能向上のためにマイクロレンズアレー1306を用いることも出来る。 It can also be used microlens array 1306 in order to improve the performance. したがって、入射光の反射方向を変えて光偏向を行う、構造が簡単で応答も速く、使用する入射光(R)の波長が制限されることなく、駆動電圧が低く作動が安定で信頼性も高く、製造工程が少なく低コストの光偏向アレー1200を具備する画像投影表示装置1300を提供することが出来るようになった。 Thus, for optical deflection by changing the reflection direction of the incident light, faster response structure is simple, without the wavelength of incident light used (R) is limited, operating the driving voltage is low stable and reliable high, has become possible to provide an image projection display device 1300 having a low-cost optical deflection array 1200 manufacturing steps is few.
【0131】 [0131]
次に、画像投影表示装置における光偏向アレー1200の好ましい配置の仕方について説明する。 Will now be described how the preferred arrangement of the light deflection array 1200 in the image projection display apparatus. すなわち、光偏向アレー1200の各素子の、板状部材2104の中立位置における光反射面の法線方向が重力の作用方向とほぼ同方向になるように配置する。 That is, each element of the optical deflection array 1200, the normal direction of the light reflecting surface in the neutral position of the plate-like member 2104 is disposed to be substantially the same direction as the direction of gravity. 本発明の光偏向アレー1200を画像投影表示装置に用いる場合、このように配置することにより、基板表面2101に形成された支点部材に板状部材2104が接触する場合に板状部材2104に重力が作用するので、どの電極の方向への板状部材2104の傾斜も、重力が均等に作用し、偏りがない。 When using a light deflection array 1200 of the present invention to an image projection display device, by arranging like this, gravity plate member 2104 when the plate member 2104 as the fulcrum member formed on the substrate surface 2101 comes into contact because they act, the inclination of the plate-like member 2104 in the direction of which electrode, gravity acts equally, there is no bias. それにより、板状部材2104が傾斜変位する場合にさらに安定した動作、すなわち、長期信頼性や繰り返し再現性のある動作を得ることが出来る。 Thus, operation of the plate-like member 2104 was more stable when the slope displacement, i.e., it is possible to obtain a long-term reliability and repeatedly reproducible operation. 本発明の光偏向装置2100は偏向ミラーに相当する板状部材が固定端を有していないので、より効果的である。 Since the optical deflecting device 2100 of the present invention the plate-like member corresponding to the deflection mirror does not have a fixed end, it is more effective. なお、図103は一般的な使い方を説明する図であるため、光偏向アレー1200の各素子の板状部材2104の中立位置の向きについて特定の方向を示していないが、この配置を採用する場合は、必要に応じて、中間に反射鏡などを使えば目的を達成することができる。 Since FIG. 103 is a diagram illustrating the general use, if there will direction of the neutral position of the plate member 2104 of each element of the optical deflection array 1200 does not indicate the specific direction, adopting this arrangement It may optionally be able to achieve the object with such intermediate the reflector. また、光偏向アレーの代わりに光偏向装置を用いる場合でも、同様に上記配置は有効である。 Also, even when using a light deflecting device in place of the optical deflector array, likewise the arrangement is effective.
【0132】 [0132]
画像形成装置に本発明を適用した実施例を、図104を用いて説明する。 An embodiment in which the present invention is applied to an image forming apparatus will be described with reference to FIG. 104.
図104は、本発明の光偏向アレー1200を複写機等の画像形成装置に適用した例を示す図である。 Figure 104 is a diagram showing an example of applying the light deflection array 1200 to the image forming apparatus such as a copying machine of the present invention. 図において、画像形成装置1400 は、主な機能ブロックとして、ドラム形状の感光体の画像担持体1401と、潜像形成手段1402と、現像手段1403と、転写手段1404と、帯電手段1405と、定着手段1406と、排紙トレイ1407と、クリーニング手段1408とからなる。 In the figure, the image forming apparatus 1400 includes, as main functional blocks, the image bearing member 1401 of the photosensitive member in the form of a drum, a latent image forming unit 1402, a developing unit 1403, a transfer unit 1404, and charging unit 1405, a fixing a means 1406, a paper discharge tray 1407, a cleaning unit 1408 Metropolitan. 本実施例は、光偏向アレー1200を潜像形成手段1402に組み込むことから、光書込み時のON/OFF制御が良好で、迷光(反射方向が乱れた時に発生する隣接素子からの反射光)を抑制でき、高速な動作が可能で、長期的な信頼性が高く、低電圧で駆動でき、かつS/N比を向上できる。 This embodiment, since the incorporation of a light deflection array 1200 to the latent image forming means 1402, a good ON / OFF control when the optical writing, stray light (light reflected from adjacent elements that occurs when the reflection direction is disturbed) suppressing can, can operate at a high speed, high long-term reliability can be driven at low voltage, and can improve the S / N ratio.
【0133】 [0133]
潜像形成手段1402以外は周知の画像形成手段であるので、それらについての詳細な説明は省略する。 Since non-latent image forming unit 1402 is a well-known image forming means, a detailed description thereof will be omitted. 画像担持体1401は図示の矢印D方向に回転可能に保持されて形成画像を担持する。 The image carrier 1401 carries a formed image is rotatably held in the direction of arrow D shown. 潜像形成手段1402は本発明の光偏向アレー1200をライン露光型の露光手段として用いる。 Latent image forming means 1402 using the light deflection array 1200 of the present invention as an exposure unit of a line exposure type.
帯電手段1405で均一に帯電された感光体上に、潜像形成手段1402で光書き込みが行なわれて潜像が形成される。 The uniformly charged on the photosensitive member by the charging means 1405, the latent image is carried out optical writing by latent image forming means 1402 is formed. すなわち、入力された画像データに対応して光偏向アレー1200の各素子のスイッチングが行われ、形成された潜像は現像手段1403で顕像化されトナー画像が形成され、形成されたトナー画像は転写手段1404で被転写体(P)に転写されて、定着手段1406で定着された後に、被転写体(P)は排紙トレイ1407に排紙されて収納される。 That is, in response to input image data is performed switching of each element of the optical deflection array 1200, formed latent image is toner image is visualized by the developing means 1403 is formed, the formed toner image is transferred to the transfer medium (P) by a transfer means 1404, after being fixed by the fixing unit 1406, the transfer member (P) is accommodated is discharged to the paper discharge tray 1407. 他方、トナー画像を上記転写手段1404で被転写体(P)に転写した後の上記画像担持体1401のドラム形状の感光体は、クリーニング手段1408でクリーニングされて次工程の画像形成に備えるようになっている。 On the other hand, the photosensitive member in the form of a drum of the image bearing member 1401 after the toner image has been transferred onto the transfer material (P) by the transfer means 1404 is cleaned by a cleaning means 1408 so as to provide the image formation of the next step going on.
【0134】 [0134]
上記潜像形成手段1402は、光源1402aからの入射光束(R)を、第1のレンズシステム1402bを介してアレー状に複数個配置された素子に照射し、各素子は画像情報に応じて、反射手段としての光偏向アレー1200を経て入射光束(R)を第2のレンズシステム1402cを通して画像担持体1401のドラム形状の感光体上の表面に結像させるようになっている。 The latent image forming unit 1402, the incident light beam from the light source 1402a (R), through a first lens system 1402b irradiating a plurality placed elements in an array, each element in accordance with image information, and adapted to form an image on the surface of the photoreceptor drum-shaped image carrier 1401 an incident light beam (R) through the optical deflection array 1200 through the second lens system 1402c as a reflecting means. 従って、入射光の反射方向を変える光偏向の構造が簡単で応答も速く、使用する入射光の波長が制限されることなく、駆動電圧が低く、作動が安定で信頼性も高く、製造工程が少なく低コストの光偏向アレー1200を具備する画像形成装置1400を提供することが出来るようになった。 Therefore, the structure of the light deflection for changing the direction of reflection of the incident light is faster response easy, without the wavelength of the incident light to be used is limited, low driving voltage, operation is stable higher reliability, manufacturing process it has become possible to provide a small image forming apparatus 1400 having a low-cost optical deflection array 1200.
【0135】 [0135]
光伝送装置に本発明を適用した実施例を、図105を用いて説明する。 An embodiment in which the present invention is applied to an optical transmission device will be described with reference to Figure 105.
図105は2次元的に配列された本発明の光偏向アレー1200を光伝送装置に適用した例を示す図である。 Figure 105 is a diagram showing an example of applying the light deflection array 1200 of two-dimensionally arrayed present invention to an optical transmission device.
図105(a)は複数のポートから複数のポートへの光電送の例、図105(b)は単数のポートから複数のポートへの光電送の例を示す図である。 Examples of light electrical transmission of Figure 105 (a) from a plurality of ports to a plurality of ports, FIG. 105 (b) is a diagram showing an example of a light electrical transmission from port singular to multiple ports.
図105(a)において、光伝送装置1500は、基本構成として、光信号入力部1502と、1段目の光偏向アレー1503と、その制御装置1504と、2段目の光偏向アレー1505と、その制御装置1506と、光信号出力部1507と、信号伝達ポート1508とを有する。 In FIG. 105 (a), the optical transmission device 1500, as a basic configuration, an optical signal input unit 1502, a first-stage optical deflection array 1503, and a control unit 1504, the second stage of the optical deflection array 1505, having its control device 1506, an optical signal output unit 1507, and a signal transmission port 1508.
図105(a)において、光偏向アレー1200を、入力光情報信号の反射方向を変えて出力光情報信号のポートを決定する光スイッチ手段として用いることから、2軸方向の光偏向を容易に正確に行うことが出来、それによりポートの選択の制御が良好で、隣接ポートへの迷光を抑制でき、高速な光路切り替えが可能で、長期的な信頼性が高く、低電圧で駆動でき、かつ同一基板上に集積化できる。 Figure 105 (a), the light deflection array 1200, from using as an optical switch means for determining a port by changing the reflecting direction of the input optical information signal output optical information signal, easily and accurately the light deflection biaxial direction it is possible to do it by a good control of the port selection, it is possible to suppress stray light to the adjacent port, enables high-speed optical path switching, high long-term reliability can be driven at low voltage, and the same It can be integrated on the substrate.
【0136】 [0136]
光情報信号が複数の信号伝達ポート1508を有する光信号入力部1502から本発明の光伝送装置1501に入力され、それが2段の光偏向アレー1503及び1505により2軸方向に偏向され、出力ポートを選択して複数の信号伝達ポート1508を有する光信号出力部1507から出力される。 Is inputted from the optical signal input part 1502 optical information signal has a plurality of signal transmission port 1508 to the optical transmission device 1501 of the present invention, it by the light deflection array 1503, and 1505 of the 2-stage is deflected in two axial directions output port select output from the optical signal output portion 1507 having a plurality of signal transmission port 1508. 本実施例においては、光偏向角を大きく取るために1段目の光偏向アレー1503及び2段目の光偏向アレー1505の2段としたが、選択するポートの数によっては、光偏向アレーは1個でも良い。 In the present embodiment, although a two-stage of the first stage in order to increase the light deflection angle light deflection array 1503 and the second-stage optical deflection array 1505, is the number of ports to be selected, the light deflection array it may be one. 光偏向アレー1503及び1505は、それぞれの光偏向アレー内の各素子を同時にかつ独立して駆動制御するための制御装置1504及び1506をそれぞれ具備している。 Light deflection array 1503, and 1505 are each a control unit 1504 and 1506 for simultaneously and independently drives and controls the respective elements of the optical deflection array comprising, respectively. なお、これまでの説明では分かりやすくするため、信号入力部と信号出力部、あるいは、入力ポートと出力ポートは相異なるものとして説明してきたが、光伝送は、通常、双方向伝送が可能なので、実際は”信号入出力部”、あるいは、”入出力ポート”として、信号入力部と信号出力部、あるいは、入力ポートと出力ポートを区別する必要はない。 Note that for clarity in description, the signal input and signal output unit, or, the input and output ports has been described as different ones, the optical transmission is usually so can provide two-way transmission, in fact "signal output section", or as "input-output port", the signal input and signal output unit, or it is not necessary to distinguish the input and output ports.
【0137】 [0137]
光伝送装置の他の実施例を図105(b)を用いて説明する。 Another embodiment of the optical transmission apparatus will be described with reference to FIG. 105 (b). この実施例の構成は、1個の入出力ポート1511を有し、単体の光偏向装置2100と、光偏向装置2100の選択可能な反射光の方向の数だけの入出力ポート1514のみを有した信号入出力部1513を有している。 Structure of this embodiment has a single input and output ports 1511, it had a single optical deflecting device 2100, only the input and output ports 1514 of the number of directions of selectable reflected light of the optical deflector 2100 and a signal output section 1513. 図は実施形態26に示す光偏向装置2100を用いる場合を示しているが、この実施形態では、選択可能な反射光の方向は4方向あるので、一方の入出力ポートとして1個であっても、他方の入出力ポートとしては4個まで設定し得る。 Although the figure shows the case of using an optical deflecting device 2100 shown in the embodiment 26, in this embodiment, since the direction of the selectable reflected light are four directions, be one as one of the input and output ports as the other input and output ports can be set up to four. 図の光路を示す実線は、光偏向装置2100によって1つの入出力ポート1514が選択されている場合を示し、破線は他の入出力ポートに切り換えられた場合を示す。 The solid line showing an optical path diagram, illustrates a case where one of the output ports 1514 by the light deflector 2100 is selected, the broken line shows the case has been switched to the other output port. 図では反射鏡1512を介して入出力ポート1511と光偏向装置2100とを光学的に接続しているが、反射鏡をやめて、入出力ポート1511を信号入出力部1513の中心部に配置することもでき、構造的には非常に簡単になる。 While connecting the input and output ports 1511 and the optical deflecting device 2100 optically via the reflecting mirror 1512 in FIG, quit reflector, placing the output port 1511 in the center of the signal input-output unit 1513 can also be, it becomes very simple in structure. さらに、このような組み合わせの入出力ポートのセットを複数セット一体化して用いることもできる。 It is also possible to use a set of input and output ports of such a combination with a plurality of sets integrally.
【0138】 [0138]
次に、光偏向装置の製造方法について説明する。 Next, a method for manufacturing the optical deflecting device.
図106は光偏向装置2100または光偏向アレーの製造工程を示す図である。 Figure 106 is a diagram illustrating an optical deflector 2100 or light deflection array manufacturing process.
図106(a)〜(h)に、第26の実施形態に示す光偏向装置2100を例に取り、代表的な工程に沿って示した。 Figure 106 (a) ~ (h), the optical deflecting device 2100 shown in the embodiment of the 26 as an example, shown along the typical process. 図106(a)〜(h)は同実施形態におけるB−B'線上の断面概略図である。 Figure 106 (a) ~ (h) is a cross-sectional schematic view of a B-B 'line in the same embodiment.
シリコン基板上に複数の区画を形成する。 Forming a plurality of compartments on a silicon substrate. 区画の並べ方は1次元でも2次元でもよい。 Arrangement of compartments may be two-dimensional in one dimension. 単体の光偏向装置を得る目的であれば、各区画の間に切り離しのためのマージンを設けておく。 If the purpose of obtaining a single optical deflecting device, preferably provided a margin for separation between each section. 光偏向アレーを得る目的であれば、各区画は密着させて形成する。 If the purpose of obtaining a light deflection array, each partition is formed by close contact.
【0139】 [0139]
図106(a):シリコン基板2101上に、支点部材の誘電層801を構成するシリコン酸化膜1601がプラズマCVD法により堆積され、 Figure 106 (a): on a silicon substrate 2101, a silicon oxide film 1601 composing the dielectric layer 801 of the fulcrum member is deposited by a plasma CVD method,
その後、面積階調を有するパターンを形成したフォトマスクを用いた写真製版法やレジストパターン形成後熱変形させる写真製版法により、支点部材の形状とほぼ同形状の任意の膜厚を有するレジストパターンを形成し、その後、ドライエッチング法の手法により目的形状の誘電層801が形成される。 Then, by the photolithography method to photolithography and resist pattern formation after heat deformation using a photo mask formed with a pattern having an area gradation, a resist pattern having an arbitrary thickness substantially the same shape as the shape of the fulcrum member formed, then the dielectric layer 801 of the object shape is formed by the technique of the dry etching method.
図106(b):電極800b、800d及び支点部材の導電層802を窒化チタン(TiN)膜の薄膜で形成する。 Figure 106 (b): the electrode 800b, formed a thin film of 800d and the conductive layer 802 of titanium nitride (TiN) of the fulcrum member film. 図に見えない電極800a、800cもこのとき同時に形成される。 Electrodes 800a invisible in FIG, 800c also at this time are formed at the same time.
TiN薄膜は、TiをターゲットとしたDCマグネトロンスパッタ法により成膜し、写真製版法及びドライエッチング法の手法により複数の電極としてパターン化した。 TiN thin film is deposited by DC magnetron sputtering with targets Ti, it was patterned as a plurality of electrodes by the method of photolithography and dry etching.
【0140】 [0140]
図106(c):非晶質のシリコン膜をスパッタ法により堆積させ、CMP技術を用いて処理時間制御にて平坦化した。 Figure 106 (c): an amorphous silicon film is deposited by sputtering, and flattened by the processing time control using CMP techniques.
残存する非晶質シリコン膜が第1の犠牲層1602である。 Amorphous silicon film remaining is the first sacrificial layer 1602. なお、犠牲層としては上記膜以外にもポリイミド膜や感光性有機膜(一般的に半導体プロセスにて用いられるレジスト膜)や多結晶シリコン膜などを用いることも出来、平坦化の手法としては、熱処理によるリフロー法やドライエッチングによるエッチバック法を用いることも出来る。 As the sacrificial layer can also be used as or polycrystalline silicon film (resist film used in general semiconductor process) the polyimide film other than the film and a photosensitive organic film, as planarization techniques, It can be used an etch-back method by a reflow method or a dry etching by a heat treatment.
図106(d):板状部材の誘電体層2201としてシリコン窒化膜をプラズマCVD法により堆積させ、写真製版法及びドライエッチング法の手法によりパターン化し、開口部2203及び誘電体層2201を形成した。 Figure 106 (d): a silicon nitride film deposited by a plasma CVD method as the dielectric layer 2201 of the plate-like member, and patterned by techniques photolithography and dry etching to form an opening 2203 and the dielectric layer 2201 . 引き続き光反射領域を兼ねる導電体層2202となるアルミニウム系金属膜をスパッタリング技術により堆積させ、写真製版法及びドライエッチング法によりパターン化した。 Subsequently the aluminum metal film to be the conductive layer 2202 serving as a light reflecting region is deposited by sputtering techniques, and patterned by photolithography and dry etching.
【0141】 [0141]
図106(e):非晶質なシリコン膜をスパッタ法により堆積させ、第2の犠牲層1603とした。 Figure 106 (e): an amorphous silicon film is deposited by sputtering, and a second sacrificial layer 1603. やはり犠牲層としては上記シリコン膜以外にもポリイミド膜や感光性有機膜(一般的に半導体プロセスにて用いられるレジスト膜)や多結晶シリコン膜などを用いることも出来る。 Again as the sacrificial layer can also be used as or polycrystalline silicon film (resist film used in general semiconductor process) the silicon polyimide film other than the film and a photosensitive organic film. 第2の犠牲層1603は第1の犠牲層1602と同じ材質であることが望まれる。 The second sacrificial layer 1603 is desired to be the same material as the first sacrificial layer 1602.
図106(f):光偏向装置2100を個別に分離し、板状部材の周囲に規制部材2102を配置するために、写真製版法及びドライエッチング法により、第1の犠牲層1602及び第2の犠牲層1603を同時に板状部材よりやや広くパターン化した。 Figure 106 (f): the optical deflecting device 2100 individually separated, in order to place the regulating member 2102 around the plate-like member, by photolithography and dry etching of the first sacrificial layer 1602 and the second a slightly wider patterned from the same time the plate member sacrificial layer 1603.
図106(g):規制部材2102を構成するシリコン酸化膜をプラズマCVD法により堆積させ、写真製版法及びドライエッチング法により任意の箇所にパターン化し規制部材2102とした。 Figure 106 (g): a silicon oxide film constituting the regulating member 2102 is deposited by a plasma CVD method, and a patterned regulating member 2102 at any point by photolithography and dry etching.
図106(h):残存する第1の犠牲層1602及び第2の犠牲層1603を、テトラメチルアンモニウムヒドロキシド(TMAH)液によるウェットエッチング技術により、規制部材2102近傍の開口部を通してエッチング除去し、板状部材2104を可動範囲が制限された空間に配置して、本発明の光偏向装置が完成する。 Figure 106 (h): the first sacrificial layer 1602 and the second sacrificial layer 1603 remaining, by wet etching technique using tetramethyl ammonium hydroxide (TMAH) solution, is removed by etching through an opening in the vicinity of the regulating member 2102, by arranging the plate-like member 2104 in a space where the movable range is limited, the optical deflecting device of the present invention is completed.
【0142】 [0142]
次に、第25の実施例における光偏向装置の製造方法について説明する。 Next, a method for manufacturing the optical deflecting device in the 25 embodiment. この製造方法は、光偏向装置2100の製造方法の一部の工程であり、少なくとも、複数の電極上に誘電性薄膜を堆積させる工程を有し、その薄膜をパターン化し凸部位を形成する工程を有する。 This manufacturing method is part of a process of the manufacturing method of the optical deflecting device 2100, at least, has a step of depositing a dielectric thin film on a plurality of electrodes, the step of forming a convex portion patterned thin film thereof a.
図107は光偏向装置2100の支点部材の斜面の凸部位を形成する工程を示す図である。 Figure 107 illustrates a step of forming a convex portion of the inclined surface of the fulcrum member of the optical deflecting device 2100.
図107(a)〜(i)に、代表的な工程にを示した。 Figure 107 (a) ~ (i), showed a typical process. 図107(a)〜(i)はB−B'線上の断面概略図である。 Figure 107 (a) ~ (i) is a cross-sectional schematic view of a B-B 'line.
【0143】 [0143]
図107(a):シリコン基板2101上に、支点部材を構成するシリコン酸化膜がプラズマCVD法により堆積され、その後、面積階調を有するパターンを形成したフォトマスクを用いた写真製版法やレジストパターン形成後熱変形させる写真製版法により、支点部材の形状とほぼ同形状の任意の膜厚を有するレジストパターンを形成し、その後、ドライエッチング法の手法により目的形状の支点部材601が形成される。 Figure 107 (a): on a silicon substrate 2101, a silicon oxide film is deposited by a plasma CVD method which constitutes the fulcrum member, then photolithography using a photo mask formed with a pattern having an area gradation or a resist pattern formation after photolithography to thermal deformation, a resist pattern having an arbitrary thickness substantially the same shape as the shape of the fulcrum member, then, the fulcrum member 601 of the object shape is formed by the technique of the dry etching method.
図107(b):電極2301及び支点部材の導電性を有する部材602を窒化チタン(TiN)膜の薄膜で形成する。 Figure 107 (b): forming the member 602 having a conductive electrode 2301 and the fulcrum member with a thin film of titanium nitride (TiN) film.
TiN薄膜は、TiをターゲットとしたDCマグネトロンスパッタ法により成膜し、写真製版法及びドライエッチング法の手法により複数の電極としてパターン化した。 TiN thin film is deposited by DC magnetron sputtering with targets Ti, it was patterned as a plurality of electrodes by the method of photolithography and dry etching.
【0144】 [0144]
図107(c):板状部材と電極の電気的短絡を防止するための絶縁膜603としてシリコン酸化膜がプラズマCVD法により堆積され、その後写真製版法及びドライエッチング法の手法により目的形状の凸部位701が任意の箇所にパターン化される。 Figure 107 (c): silicon oxide film as the insulating film 603 for preventing electrical shorting plate member and the electrode is deposited by a plasma CVD method, a convex object shape by techniques then photolithography and dry etching site 701 is patterned anywhere. なお、この時同時に板状部材の電位を付与するために支点部材の頂部近傍が開口される。 Incidentally, near the top of the fulcrum member to impart electric potential at this time simultaneously the plate-like member is opened.
図107(d):非晶質のシリコン膜をスパッタ法により堆積させ、CMP技術を用いて処理時間制御にて平坦化した。 Figure 107 (d): an amorphous silicon film is deposited by sputtering, and flattened by the processing time control using CMP techniques.
残存する非晶質シリコン膜が第1の犠牲層1702である。 Amorphous silicon film remaining is the first sacrificial layer 1702. なお、犠牲層としては上記膜以外にもポリイミド膜や感光性有機膜(一般的に半導体プロセスにて用いられるレジスト膜)や多結晶シリコン膜などを用いることも出来、平坦化の手法としては、熱処理によるリフロー法やドライエッチングによるエッチバック法を用いることも出来る。 As the sacrificial layer can also be used as or polycrystalline silicon film (resist film used in general semiconductor process) the polyimide film other than the film and a photosensitive organic film, as planarization techniques, It can be used an etch-back method by a reflow method or a dry etching by a heat treatment.
【0145】 [0145]
図107(e):板状部材2104として、光反射領域を兼ねて導電性を有するアルミニウム系金属膜をスパッタリング技術により堆積させ、写真製版法及びドライエッチング法によりパターン化した。 Figure 107 (e): a plate-like member 2104, an aluminum-based metal film having conductivity serves as a light reflecting region is deposited by sputtering techniques, and patterned by photolithography and dry etching.
図107(f):非晶質のシリコン膜をスパッタ法により堆積させ、第2の犠牲層1703とした。 Figure 107 (f): an amorphous silicon film is deposited by sputtering, and a second sacrificial layer 1703. やはり犠牲層としては上記シリコン膜以外にもポリイミド膜や感光性有機膜(一般的に半導体プロセスにて用いられるレジスト膜)や多結晶シリコン膜などを用いることも出来る。 Again as the sacrificial layer can also be used as or polycrystalline silicon film (resist film used in general semiconductor process) the silicon polyimide film other than the film and a photosensitive organic film. 第2の犠牲層1703は第1の犠牲層1702と同じ材質であることが望まれる。 The second sacrificial layer 1703 is desired to be the same material as the first sacrificial layer 1702.
【0146】 [0146]
図107(g):光偏向装置2100を個別に分離し、板状部材の周囲に規制部材2102を配置するために、写真製版法及びドライエッチング法により、第1の犠牲層1702及び第2の犠牲層1703を同時に板状部材2104よりやや広くパターン化した。 Figure 107 (g): the optical deflecting device 2100 individually separated, in order to place the regulating member 2102 around the plate-like member, by photolithography and dry etching of the first sacrificial layer 1702 and the second a slightly wider patterned than the plate member 2104 simultaneously sacrificial layer 1703.
図107(h):規制部材2102を構成するシリコン酸化膜をプラズマCVD法により堆積させ、写真製版法及びドライエッチング法により任意の箇所にパターン化し規制部材2102とした。 Figure 107 (h): a silicon oxide film constituting the regulating member 2102 is deposited by a plasma CVD method, and a patterned regulating member 2102 at any point by photolithography and dry etching.
図107(i):残存する第1の犠牲層1702及び第2の犠牲層1703を、テトラメチルアンモニウムヒドロキシド(TMAH)液によるウェットエッチング技術により、規制部材2102近傍の開口部を通してエッチング除去し、板状部材を可動範囲が制限された空間に配置して、本発明の光偏向装置が完成する。 Figure 107 (i): the first sacrificial layer 1702 and the second sacrificial layer 1703 remaining, by wet etching technique using tetramethyl ammonium hydroxide (TMAH) solution, is removed by etching through an opening in the vicinity of the regulating member 2102, by arranging the plate-like member in a space where the movable range is limited, the optical deflecting device of the present invention is completed.
【0147】 [0147]
ここで、支点部材2103の形状について、図108、図109を用いて説明する。 Here, the shape of the fulcrum member 2103, FIG. 108, will be described with reference to FIG. 109.
図108(a)は基本となる円錐体を示した図である。 Figure 108 (a) is a diagram showing a cone underlying. この図では、円錐体2103の頂部2103aは鋭い尖端となっている。 In this figure, the top 2103a of the cone 2103 has a sharp point. 板状部材2104に静電引力が作用したとき、これを支えるに当たって、両部材の接触点に応力が集中するため、該尖端形状を維持しきれなくなるおそれもあるので、図108(b)のように、頂部2103aを小さな球状に形成すると、安定した作動が得られるので良い。 When the electrostatic attraction is applied to the plate-like member 2104, when support this, since the stress is concentrated on the contact points of the two members, because some it discouraged not be sufficiently maintained 該尖 end shape, as shown in FIG. 108 (b) , when forming a top 2103a into small spheres, good because stable operation can be obtained. 図108(a)、(b)どちらの形状の場合も、図108(c)に示すように、円錐体底面の下に該底面の径と同型の底面を有する円柱とを合体させた形状にするとさらによい。 Figure 108 (a), the case of (b) either shape, as shown in FIG. 108 (c), the shape obtained by combining the a cylinder with a diameter the same type as the bottom surface of the bottom surface under the cone bottom Then even better. すなわち、支点部材の高さを同じにする場合、円錐体の頂角を大きくすることができるので、頂部の強度的安定性が得られる。 That is, if the same height of the fulcrum member, it is possible to increase the vertical angle of the cone, the intensity stability of the top can be obtained. このような形状にしても、使用上は全く同じに扱える。 Even with this configuration, usage can be treated identically.
【0148】 [0148]
頂部を球状にする代わりに、平面にしても構わない。 The top instead of the spherical, but may be in a plane. 図109(a)のように円錐台形状にして、尖端形状をなくすと、応力集中の心配がさらになくなり、支点部材の破損などの危険性がより少なくなる。 In the truncated cone shape as shown in FIG. 109 (a), when eliminating the apex shape, further eliminates the concern of stress concentration, there is less danger of damage to the fulcrum member. 図108(c)と同様に、円錐台の底面の下に、該底面の径と同型の底面を有する円柱を合体させた図109(b)のような形状でも構わない。 Similar to FIG. 108 (c), under the truncated cone of the bottom surface, may be a shape as shown in FIG. 109 a cylinder having a diameter the same type as the bottom surface of the bottom surface was coalesced (b). 効果は図108(c)の場合とほぼ同様である。 Effect is substantially the same as that of FIG. 108 (c). 頂部2103aの面積があまり大きくならなければ図109(c)のように単なる円柱でも一応使うことはできる。 If the area of ​​the top 2103a is not so large it can be used once be a simple cylinder as shown in FIG. 109 (c). この形状は円錐体の部分は無いが、製造が容易である。 Although this shape is not part of the cone, it is easy to manufacture.
【0149】 [0149]
図110、111に、図97で示した本発明の第25実施形態における凸部位に対する、変形実施形態を示す。 Figure 110 and 111, against the protrusion in the 25th embodiment of the present invention shown in FIG. 97, showing a modified embodiment.
図110において符号2005は凸部位を示す。 Reference numeral 2005 in FIG. 110 shows a convex portion. 凸部位2005は、図97に示した実施例の凸部位701と同様の製造方法により得られ、同様の役割を果たすものであるが、その形状が凸部位701とは異なっている。 The protrusion 2005 is obtained by the same manufacturing method as the protrusion 701 of the embodiment shown in FIG. 97, but those same role, its shape is different from that of the convex portion 701.
凸部位2005は絶縁性膜により、4個の電極2301の上に、複数の帯状に配列されている。 The protrusion 2005 is an insulating film, over the four electrodes 2301 are arranged in a plurality of strip. 帯の幅、間隔、長さなどは、前述したとおり、板状部材2104が弾性変形により凹部位の電極2301へ接触しない範囲で任意の形状として、静電引力と板状部材の剛性の関係から設計することができる。 Band width, spacing, length, etc., as described above, as any shape in the range in which the plate-like member 2104 does not contact the electrode 2301 of the recess position by elastic deformation, from the relationship between the stiffness of the electrostatic attraction and the plate-like member it is possible to design. 凸部位を形成する斜面は、図97に示す尾根状の頂部を有する柱状体の支点部材に限らず、図101の実施例で述べた、多角錐体の斜面でも良い。 Slopes forming the convex portion is not limited to a fulcrum member of a columnar body having a ridge shaped top portion shown in FIG. 97, described in the embodiment of FIG. 101, may be a slope of the polygonal pyramid.
凸部位を形成するためのフォトマスクを作成するに際し、これら凸部位の大きさは解像限界に近いため、図97に示した円形のみの構成では精度が低下しやすい。 Upon creating a photomask for forming the convex portion, close to the size of the resolution limit of the protrusion, the precision tends to decrease the circular only the configuration shown in FIG. 97. そこで、本実施例のように、帯状に構成することによって面積的に大きくして、精度を出しやすくする。 Therefore, as in the present embodiment, the area to increase by configuring the band-shaped, to facilitate out accuracy.
【0150】 [0150]
図111において符号2105は凸部位を示す。 2105 In FIG. 111 shows a convex portion. 凸部位2105は、図97に示した実施例の凸部位701とは一部異なる製造方法により形成されるが、その他に関しては上記凸部位2005と同様である。 The protrusion 2105 is formed by a portion different manufacturing methods and the protrusion 701 of the embodiment shown in FIG. 97, the other features are the same as the convex portion 2005.
凸部位2105は、電極2301の上に載っているのではなく、電極と電極の間に突出しているような構成となっている。 The protrusion 2105, instead of resting on the electrode 2301 has a configuration as to protrude between the electrode and the electrode.
【0151】 [0151]
凸部位2105は、4個の電極を形成する前に、支点部材601の形成時に、所定のパターンによって形成しておく。 The protrusion 2105, prior to forming the four electrodes, during formation of the fulcrum member 601, previously formed by a predetermined pattern. 支点部材601が絶縁性材料で形成されている場合は、支点部材601自身の表面をパターン化すれば良いが、支点部材601が導電性部材の場合は、支点部材601形成後表面に絶縁性膜を施してから、所定のパターンによって帯状の絶縁性凸部位2105を形成する。 If the fulcrum member 601 is formed of an insulating material, but may be patterned surface of the fulcrum member 601 itself, if the fulcrum member 601 of the conductive member, the insulating film in the fulcrum member 601 is formed after the surface after applying, to form a strip-shaped insulating convex portion 2105 by a predetermined pattern. 電極2301は凸部位2105の周囲の平坦部にのみ形成する。 Electrode 2301 is formed only on the flat portion of the periphery of the protrusion 2105. ただし、これとは別に、支点部材601の頂部には、板状部材2104に電位を供給するための導電部材602を形成する必要があるが、工程上は、上記電極2301を形成するときに、一緒に形成することができる。 However, apart from this, the top of the fulcrum member 601, when it is necessary to form the conductive member 602 for supplying a potential to the plate-like member 2104, the process of forming the electrodes 2301, it can be formed together. 電極2301を凸部位以外のところにだけ設ける理由は、凸部位の下に電極がある場合は、凸部位表面に分極による静電荷が発生して、これが板状部材2104を吸着してしまう虞があるからである。 The reason for providing the electrode 2301 only at a non-convex sites, in the case where the electrode below the convex portion, an electrostatic charge due to polarization in the protrusion surface is generated, a risk that this ends up suction plate member 2104 This is because there. この吸着が強くなると、電極に対する印加電圧が消滅した後も、板状部材2104が凸部位に吸着したまま離れない、いわゆる固着現象が発生することもある。 When the suction is stronger, there is even after the voltage applied to the electrode has disappeared, not away while the plate-like member 2104 was adsorbed to the protrusion, even so-called sticking phenomenon occurs.
【0152】 [0152]
図112は、図101に示した第9の実施例の円形の光偏向装置2100を、最稠密状態に並べて2次元的なアレー状に構成する場合の、規制部材の実施形態を示す図である。 Figure 112 is a diagram showing a circular optical deflecting device 2100 of the ninth embodiment shown in FIG. 101, for configuring the two-dimensional array-like side by side in the densest state, the embodiment of the regulating member . 図は説明を容易にするため、最小の構成を示してあるが、実用上はこのような構成が縦及び横に多数配列されたものが使用される。 Since figure to facilitate the explanation, there is shown a minimal configuration, practically those such configuration is arrayed in the vertical and horizontal are used.
図において、符号2102'は2個の光偏向装置に共有された複合規制部材を示す。 In the figure, reference numeral 2102 'denotes a composite regulating member that is shared by two optical deflecting device. 一般に円を最稠密に並べた場合、1つの円の周囲には6個の円が等間隔に隙間無く並ぶ。 In general in the case of side-by-side circle densest, six of the circle around one of the circles are aligned without a gap at regular intervals. したがって、規制部材2102は基板2101の円周上に等間隔に6個形成すると隣接する基板2101と規制部材の位置を一致させることができる。 Therefore, the regulating member 2102 can be matched to the position of the substrate 2101 regulating member adjacent to the equal intervals to six formed on the circumference of the substrate 2101. 複数の光偏向装置2100を集積化して一度に作る場合、規制部材の位置が一致していると両者を一体化して複合規制部材2102'として形成することができる。 When making a plurality of optical deflecting device 2100 once by integrating, it can be integrated both the position of the regulating member are matched to form a composite regulating member 2102 '. 特に図示はしないが、1次元アレーの場合でも隣接する基板同士の規制部材を一体化することができるのは同じである。 In particular although not shown, it can be integrated regulating member of the substrate adjacent to each other even in the case of one-dimensional array are the same. ただし、1次元の場合の規制部材の個数は、図101に示す4個でも構わない。 However, the number of the regulating member in the case of one-dimensional, may be a four shown in Figure 101. また、2次元アレーであっても、正方マトリクス状に配列する場合は、基板同士は縦、及び、横に連結されるので、規制部材は図101のように4個が丁度良い。 Also, a two-dimensional array, when arranged in a square matrix, the boards are vertical, and, since it is connected to the horizontal, the regulating member is just good 4 as shown in FIG. 101.
【0153】 [0153]
図113は規制部材2102の変形実施形態を説明するための斜視図である。 Figure 113 is a perspective view for explaining a modified embodiment of the regulating member 2102. 図114は上記変形実施形態の規制部材2102を用いた光偏向装置2100の断面図である。 Figure 114 is a sectional view of the optical deflector 2100 with regulating member 2102 of the alternative embodiment.
図113(a)に示す規制部材2102は、直立部2102cの頂部に設けられたストッパ2102aの突出方向とは逆方向に突出した延長基部2102bを直立部2102cの下端部に有する。 Figure 113 regulating member 2102 shown in (a), the protruding direction of the stopper 2102a provided at the top of the upright portion 2102c has an extension base 2102b protruding in the opposite direction to the lower end of the upright portion 2102c. この規制部材2102は、図91、あるいは、図101に示すような、基板2101の周縁部に規制部材を設ける場合に用いる。 The regulating member 2102, FIG. 91 or, as shown in FIG. 101, used in the case of providing a regulating member in the peripheral portion of the substrate 2101. 図114からも分かるように、板状部材2104の可動範囲として規制される空間は、規制部材2102の延長基部2102bの有る分だけ、基板2101よりも小さい範囲に限定される。 As can be seen from Figure 114, the space is regulated as a movable range of the plate-like member 2104, by the amount having the extension base 2102b of the regulating member 2102 is limited to a range smaller than the substrate 2101. このようにする理由は、規制部材2102が基板2101と接合する部分の面積があまり小さいと、わずかな応力にも破損しやすくなる虞があるためで、延長基部2102bによって上記接合面積を大きくすることによって、十分な強度が得られるようになる。 The reason for this is that when the regulating member 2102 is too small the area of ​​the portion to be bonded to the substrate 2101, because there is a fear that it becomes easily damaged in a slight stress, increasing the bonding area by extending the base 2102b by, so that sufficient strength can be obtained.
【0154】 [0154]
図113(b)に示す規制部材2102は、図94に示すような角部における規制部材に関して、上記接合面積を大きくしたものである。 Restricting member 2102 shown in FIG. 113 (b), with respect to the regulating member at the corner portion as shown in FIG. 94, is made larger the bonding area. 使用法、及び、効果は上記と同じなので説明を省略する。 Usage and effects will be omitted because it is the same as above.
【0155】 [0155]
図115は規制部材の更なる変形実施形態を示す斜視図である。 Figure 115 is a perspective view of a further alternative embodiment of the regulating member.
図116、117は変形実施形態の規制部材の使用例を示す断面図である。 Figure 117 is a sectional view showing an example of use of the regulating member variant embodiment.
図において、符号2102'は図112と同様、2個の光偏向装置に共有される複合規制部材を示す。 In the figure, reference numeral 2102 'is similar to FIG. 112 shows a composite restriction member which is shared by two optical deflecting device. 複数の光偏向装置を並べてアレー状にして用いる場合、隣接する光偏向装置の連結位置において、規制部材を共有することができる。 When used in in an array by arranging a plurality of optical deflecting device, in the coupling position of the adjacent optical deflecting device can share the regulating member. 図102、あるいは、図112にその例が示されている。 Figure 102 or has been shown an example in FIG. 112. 図115(a)に示す複合規制部材2102'は、図113に示した規制部材2102の変形であり、2個の規制部材の延長基部同士をつきあわせて連結した形の基部2102'bを有している。 Composite regulating member 2102 shown in FIG. 115 (a) 'is a modification of the regulating member 2102 shown in FIG. 113, have the two forms linked against the extension base ends of the regulating member of the base 2102'b are doing. 逆に言えば、隣接する2個の基板2101の境界線K上に、両基板に等分に跨って横たわる平板状の基部2102'bの対向する両端に、直立部2102'cを設け、両直立部2102'cの頂部に、前記境界線Kと逆方向に突出するストッパ2102aをそれぞれ設けた形となっている。 Conversely, on the boundary K between adjacent two substrates 2101, at opposite ends of the plate-shaped base portion 2102'b lying across equally divided into two substrates, provided uprights 2102'C, both the top of the uprights 2102'C, has a form of a stopper 2102a provided respectively projecting to the boundary line K and the reverse direction.
【0156】 [0156]
図115(b)に示す複合規制部材2102'は、上記と同様な位置において、図91に示す規制部材2102を2個、ストッパの存在しない側の面を、互いに密着させて連結した形になっており、アルファベットのTの字の形に似ている。 Figure 115 (b) complex regulation shown in member 2102 ', in the same position, becomes the regulating member 2102 shown in FIG. 91 two, non-existent side surface of the stopper, in the form linked in close contact with each other and, similar to the shape of the letter of the alphabet T. この構成では、図115(a)に示す直立部2102'cを2枚合わせた厚さ、または、それ以上の厚さとし、基板2101と接合する部分の面積が大きくしてあるので、特に基部としての形状を持たないが、十分な強度を有することになる。 In this configuration, FIG. 115 (a) uprights 2102'c shown in two combined thickness, or, more thick Satoshi, the area of ​​the portion to be bonded to the substrate 2101 is made larger, in particular as a base Although no shape, it will have a sufficient strength.
【0157】 [0157]
図118ないし図127は、本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 118 through Figure 127 is a diagram showing a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
図において、符号2802、2803、2804は第1、第2、第3の犠牲層をそれぞれ示す。 In the figure, reference numeral 2802,2803,2804 shows first, second, third sacrificial layer, respectively.
基板2101上に支点部材2103を形成する(図118)。 Forming the fulcrum member 2103 on the substrate 2101 (FIG. 118).
面方位[100]を有するシリコン基板2101上に、支点部材2103を構成する酸化シリコン膜がプラズマCVD法により堆積され、その後、面積階調を有する、パターンを形成したフォトマスクを用いた写真製版法や、レジストパターン形成後熱変形させる写真製版法により、支点部材2103とほぼ同じ形状の任意の膜厚を有するレジストパターンを形成し、その後、ドライエッチング法の手法により目的形状の支点部材2103が形成された。 On the silicon substrate 2101 having a plane orientation [100], a silicon oxide film forming the fulcrum member 2103 is deposited by a plasma CVD method, thereafter, with an area gradation, photolithography using a photo mask formed with the pattern and, the resist pattern formation after heat deformed to photolithography, a resist pattern having an arbitrary thickness of substantially the same shape as the fulcrum member 2103, then, object shape of the fulcrum member 2103 by the technique of dry etching is formed It has been.
なお、上記[100]面方位を有するシリコン基板2101上に2μm程度の酸化シリコン膜を形成し、その上層1μm程度にて同様の加工を行っても良い。 Note that the [100] plane orientation to form a silicon oxide film of about 2μm on the silicon substrate 2101 having a may be subjected to the same processing at the upper layer 1μm about.
また、支点部材2103の頂部2103aの高さはおよそ1μmである。 The height of the top portion 2103a of the fulcrum member 2103 is approximately 1 [mu] m.
【0158】 [0158]
次いで、複数の電極2301を形成する(図119)。 Then, a plurality of electrodes 2301 (FIG. 119).
電極2301は窒化チタン(TiN)の薄膜で形成する。 Electrode 2301 is formed by a thin film of titanium nitride (TiN). TiN薄膜は、TiをターゲットとしたDCマグネトロンスパッタ法により、厚さ0.01μmに成膜し、写真製版法、及び、ドライエッチング法の手法により、複数の、たとえば、4個の電極2301としてパターン化した。 Pattern TiN thin film by DC magnetron sputtering with a target of Ti, is deposited to a thickness of 0.01 [mu] m, photolithography, and by a method of dry etching, a plurality of, for example, as four electrodes 2301 ized.
次に、電極2301の上に保護膜2301aを形成する(図120)。 Next, a protective film 2301a on the electrode 2301 (FIG. 120).
保護膜2301aとしては、プラズマCVD法により、シリコン窒化膜を膜厚0.2μmで形成した。 As the protective film 2301a, by the plasma CVD method to form a silicon nitride film with a thickness of 0.2 [mu] m.
【0159】 [0159]
次に、第1の犠牲層2802を形成する(図121)。 Next, a first sacrificial layer 2802 (FIG. 121).
第1の犠牲層2802として、非晶質シリコン膜をスパッタ法により2μm堆積させ、CMP技術を用いて処理時間制御にて、支点部材2103の頂部2103aが露出させ、さらに時間をオーバーさせて平坦化させる。 As a first sacrificial layer 2802, an amorphous silicon film is 2μm deposited by sputtering, in the processing time control using CMP techniques, to expose the top 2103a of the fulcrum member 2103, planarized by over more time make. このとき、支点部材2103、及び、保護膜2301aとの研磨選択性の高いCMP条件とすることにより、支点部材2103の頂点近傍では、頂部2103aが残存し、非晶質シリコン膜が薄く存在する。 At this time, the fulcrum member 2103, and, by a high CMP condition of polishing selectivity of the protective film 2301a, the apex near the fulcrum member 2103, the top 2103a remains and amorphous silicon film exists thinly. 支点部材2103の頂点部が約0.2μm突出した。 Apex portion of the fulcrum member 2103 is approximately 0.2μm projects. 残存する非晶質シリコン膜が第1の犠牲層2802で有る。 Amorphous silicon film remaining is at a first sacrificial layer 2802. 第1の犠牲層としては、上記以外にも、ポリイミド膜や感光性有機膜、あるいは、一般的に半導体プロセスにて用いられるレジスト膜や多結晶シリコン膜などを用いることもできる。 The first sacrificial layer, in addition to the above, a polyimide film or a photosensitive organic film, or the like generally resist film or a polycrystalline silicon film used in the semiconductor process can also be used. また、平坦化の手法としては、ドライエッチングによるエッチバック法を用いることもできる。 As the planarization technique, it is also possible to use an etch-back method by dry etching.
【0160】 [0160]
次いで、第2の犠牲層2803を形成する(図122)。 Then, a second sacrificial layer 2803 (FIG. 122).
非晶質シリコン膜をスパッタ法により支点部材2103の先端部まで含めて0.1μm堆積させた。 It was 0.1μm deposited including amorphous silicon film by sputtering to the distal end of the fulcrum member 2103.
【0161】 [0161]
次に、板状部材2104の誘電体層2201と導電体層2202を形成する(図123)。 Next, a dielectric layer 2201 and the conductive layer 2202 of the plate-like member 2104 (FIG. 123).
誘電体層2201となる基材として、シリコン窒化膜をプラズマCVD法により、厚さ0.2μmで堆積させ、引き続き、光反射領域を兼ねる導電体層2202となる、アルミニウム系金属膜を0.05μmの厚さで、スパッタリング技術により堆積させた。 As the base material serving as a dielectric layer 2201, the silicon nitride film plasma CVD method, is deposited with a thickness 0.2 [mu] m, subsequently, a conductive layer 2202 serving as a light reflecting region, 0.05 .mu.m aluminum-based metal film at a thickness of, it was deposited by sputtering techniques. その後、上記金属膜と上記シリコン窒化膜を、それぞれ、写真製版法、及び、ドライエッチング法によりパターン化した。 Thereafter, the metal film and the silicon nitride film, respectively, photolithography, and was patterned by dry etching. 後の工程で、基板2101の周縁部に、規制部材2102を形成するためのスペースを残すため、誘電体層2201は基板2101より小さめに形成する。 In a subsequent step, the peripheral portion of the substrate 2101, to leave a space for forming the restriction member 2102, dielectric layer 2201 is formed to be smaller than the substrate 2101. また、導電体層2202は、誘電体層2201の上に載るように、それより小さめに形成する。 Further, the conductive layer 2202 to rest on top of the dielectric layer 2201, and it more smaller form.
【0162】 [0162]
次に、第3の犠牲層2804を形成する(図124)。 Next, a third sacrificial layer 2804 (FIG. 124).
非晶質のシリコン膜をスパッタ法により、1μm堆積させ、第3の犠牲層2904とした。 By sputtering amorphous silicon film, it is 1μm deposited and the third sacrificial layer 2904. なお、第3の犠牲層としては、上記以外にも、ポリイミド膜や感光性有機膜、あるいは、一般的に半導体プロセスにて用いられるレジスト膜や多結晶シリコン膜などを用いることもできる。 As the third sacrificial layer, in addition to the above, a polyimide film or a photosensitive organic film, or the like generally resist film or a polycrystalline silicon film used in the semiconductor process it can also be used.
【0163】 [0163]
次に、規制部材2102を形成するスペースを作る(図125)。 Next, make a space for forming the restriction member 2102 (FIG. 125).
写真製版法、及び、ドライエッチング法により、第1の犠牲層、第2の犠牲層、および第3に犠牲層を同時にパターン化して、基板2101の周縁部に沿った部分を除去し、規制部材2102用のスペースを形成する。 Photolithography and dry etching method, the first sacrificial layer, a second sacrificial layer, and the third to simultaneously patterning the sacrificial layer to remove the portion along the periphery of the substrate 2101, the regulating member space for 2102 to form. このとき、残す犠牲層の大きさは誘電体層2201が露出しないように誘電体層2201の大きさよりも大きくしておく。 At this time, the size of the sacrificial layer to leave the set larger than the size of the dielectric layer 2201 as a dielectric layer 2201 is not exposed.
【0164】 [0164]
次に、規制部材2102を形成する(図126)。 Next, a restriction member 2102 (FIG. 126).
酸化シリコン膜をプラズマCVD法により厚さ0.8μmで堆積させ、写真製版法、及び、ドライエッチング法により、パターン化して、規制部材2102を形成した。 Silicon oxide film deposited at a thickness of 0.8μm by a plasma CVD method, photolithography, and, by a dry etching method, and patterned to form a regulating member 2102. なお、規制部材2102は図示の形状に限るものではなく、図113、115に示したように種々の変形があり得る。 Incidentally, the regulating member 2102 is not limited to the illustrated shape, there can be various modifications as shown in FIG. 113, 115.
【0165】 [0165]
最後に、犠牲層の除去を行う(図127)。 Finally, the removal of the sacrificial layer (Fig. 127).
残存する第1ないし第3の犠牲層、2802、2803および2804を、ウェットエッチング技術により、開口部を通してエッチング除去し、反射面を有した板状部材2104の可動範囲が、基板2101と、規制部材2102と、支点部材2103によって所定の空間に規制された光偏向装置2100が得られた。 First to third sacrificial layer remains, the 2802,2803 and 2804, by wet etching, is removed by etching through the opening, the movable range of the plate-like member 2104 having a reflecting surface, and the substrate 2101, the regulating member and 2102, an optical deflecting device 2100 is regulated to a predetermined space by the fulcrum member 2103 is obtained.
【0166】 [0166]
この製造方法では、板状部材2104の裏面の中央部が、支点部材2103と凹凸の関係で組み合わさるようになり、板状部材2104が電極2301から静電引力を受けて傾斜する場合にも、横滑りが生ぜず、中央部が常に一定した位置にあるので、マイクロミラーデバイスとして用いた場合、反射光の方向制御が精度良くできるようになる。 In this manufacturing method, the central portion of the rear surface of the plate-like member 2104, will mate with the relationship of the fulcrum member 2103 and unevenness, even when the plate-like member 2104 is inclined by receiving the electrostatic attraction from the electrode 2301, sideslip not occur, since the central portion is always in constant position, when used as a micro-mirror device, the direction control of the reflected light will be able to accurately.
【0167】 [0167]
本発明の作用効果を全体的に述べると、ミラーの役割をする板状部材が斜面や基板に接触して傾斜角が決まることから、ミラーの偏向角の制御が容易かつ安定である。 Describing the effect of the present invention Overall, since the inclination angle plate member which serves as a mirror in contact with the slopes and the substrate is determined, the control of the deflection angle of the mirror is easy and stable. 支点部材を中心として対向する電極に異なる電位を印加することにより高速に板状部材を反転できるので、応答速度が速くできる。 Since it inverts the plate-like member at high speed by applying different potentials to the opposing electrode around the fulcrum member can response speed. 板状部材が固定端を有していないのでねじり変形などの変形を伴わず長期的な劣化が少なく低電圧で駆動できる。 Long-term degradation without deformation, such as torsional deformation because the plate-like member does not have a fixed end can be driven at a reduced low voltage. 半導体製造技術により微細で軽量な板状部材を形成できるので、規制部材との衝突による衝撃が少なく、長期的な劣化が少ない。 Can be formed a lightweight plate-shaped member in fine by a semiconductor manufacturing technology, less impact due to the collision of the regulating member, long-term degradation is small. 規制部材や板状部材の構成を任意に決めることにより、反射光のON/OFF比(画像機器におけるS/N比、映像機器におけるコントラスト比)を向上できる。 By arbitrarily determined the structure of the regulating member and the plate-shaped member, thereby improving the ON / OFF ratio of the reflected light (S / N ratio of the image device, the contrast ratio in the video equipment). 半導体製造技術及び装置を使用できるので低コストにて微細化と集積化が可能である。 Because the semiconductor manufacturing technology and equipment can be used which can be miniaturized and integrated at a low cost. また、支点部材を中心として複数の電極を配置することにより、1軸及び2軸方向の光偏向が可能である。 Further, by arranging a plurality of electrodes about the fulcrum member, it is possible to light deflection uniaxial and biaxial directions.
【0168】 [0168]
【発明の効果】 【Effect of the invention】
本発明は、以上説明したように構成されているので、請求項1の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を、基板上に固定することなく基板上の支点部材上と笠形状の笠形状部材間に形成される空隙内に変位が自由の状態で配置して、基板上の支点部材の周囲に板形状部材と対向して配置した電極に電位を付与して、支点部材上に傾斜して載置する板形状部材上の反射手段で入射光の反射方向を1軸又は2軸方向に変えて光偏向を行うようにしたので、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧 The present invention, which is configured as described above, according to the invention of claim 1, the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light, displacement in the gap formed between the umbrella-shaped member of the fulcrum member on the umbrella shape on the substrate without fixing on a substrate placed in a free state, the plate-shaped member around the fulcrum member on the substrate oppositely by applying a potential to the electrodes placed, performing optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction by the reflecting means on the plate-shaped member for placing inclined on the fulcrum member was so so, the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing the faster a stable response, the wavelength of the incident light to be used is limited without mechanical strength little change and deterioration in long-term use, the drive voltage 低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向方法を提供することが出来るようになった。 Low resource saving, low cost and can be miniaturized and integrated, has become possible to provide a light deflection method using environment is also not limited.
請求項2の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を、基板上に固定することなく基板上の支点部材上と笠形状の笠形状部材間に形成される空隙内に変位が自由の状態で配置して、基板上の支点部材の周囲に板形状部材と対向して配置した電極に電位を付与して、支点部材上に傾斜して載置する板形状部材上の反射手段で入射光の反射方向を1軸又は2軸方向に変えると共に電極は基板上の支点部材の周囲に板形状部材と対向して配列した複数個の各電極に異なる電位を付与して光偏向を行うようにしたので、板形状部材を目的の方向へ変位、又は、変位方向の高速での変更、傾斜の向きを2軸方向で高精度に制御することも出来るようになり、入射光の反射方向を1軸又 According to the invention of claim 2, the fulcrum member on the substrate without the plate-shaped member of a plate-shaped reflection means are formed by a thin film of a combination constituting a surface that reflects incident light is fixed on a substrate and sheds shape displaced in a gap formed between the umbrella-shaped member is arranged in a free state of, by applying a potential to the electrodes arranged plate-shaped member facing to the periphery of the fulcrum member on the substrate, a fulcrum member electrode together with changing the direction of reflection of incident light in uniaxial or biaxial direction by the reflecting means on the plate-shaped member for placing inclined above was arranged to face the plate-shaped member around the fulcrum member on the substrate since to perform the light deflection by applying different potentials to a plurality of the electrodes, the displacement of the plate-shaped member in the desired direction, or high changes in displacement direction, high speed, the direction of inclination in two axial directions also to be able to control the precision, the reflection direction of the incident light 1 Jikumata 2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が安定で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向方法を提供することが出来るようになった。 2 axially varied structure and control is more simple easy operation for optical deflection even faster stable response without wavelength of the incident light to be used is limited, change in use mechanical strength for a long time and less deterioration, the driving voltage is low resource saving, low cost and can be miniaturized and integrated, has become possible to provide a light deflection method using environment is also not limited.
【0169】 [0169]
請求項3の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を、基板上に固定することなく基板上の支点部材上と笠形状の笠形状部材間に形成される空隙内に変位が自由の状態で配置して、基板上の支点部材の周囲に板形状部材と対向して配置した電極に電位を付与して、支点部材上に傾斜して載置する板形状部材上の反射手段で入射光の反射方向を1軸又は2軸方向に変えると共に電極に異なる電位を付与して反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を基板上の斜面に接触して入射光の反射方向を接触する位置で規定して変えて光偏向を行うようにしたので、板形状部材の変位による接触時の衝撃を分散し、変位方向の制御が容易になり、入射 According to the invention of claim 3, the fulcrum member on the substrate without the plate-shaped member of a plate-shaped reflection means are formed by a thin film of a combination constituting a surface that reflects incident light is fixed on a substrate and sheds shape displaced in a gap formed between the umbrella-shaped member is arranged in a free state of, by applying a potential to the electrodes arranged plate-shaped member facing to the periphery of the fulcrum member on the substrate, a fulcrum member forming a thin film in combination constitute the reflecting means by applying a different potential to the electrode with changing the direction of reflection of incident light by the reflection means on the plate-shaped member for placing inclined upward in uniaxial or biaxial directions to the surface since the plate shape of the plate-shaped member which is was as varied and defined in a position in contact the reflection direction of the incident light in contact with the inclined surface on the substrate for optical deflection, at the time of contact by displacement of the plate-shaped member impact dispersed, facilitates the control of the displacement direction, the incident の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向方法を提供することが出来るようになった。 By changing the reflection direction of the uniaxial or biaxial direction further faster structure and the control response more simple easy operation is more stable for optical deflection without wavelength of the incident light to be used is limited, mechanical strength little change and deterioration in long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, so it is possible to provide a light deflection method using environment not limited It was.
請求項4の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった According to the invention of claim 4, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state since so as to place the electrodes and, a easy simple control structure for performing varied light deflecting the reflection direction of the incident light to the uniaxial or biaxial direction actuation stable faster response, of the incident light used without wavelengths is limited, the mechanical strength is small change and deterioration in long-term use, the drive voltage is low resource saving, in a possible miniaturization and integration cost, light deflection using environment not limited it has become possible to provide an apparatus
【0170】 [0170]
請求項5の発明によれば、入射光を反射する反射面が平板で形成された反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、光反射領域に入射した光束は反射方向を揃えて反射することが可能で、反射光を拡散することなく目的の反射方向にのみ光変更が可能となり、光偏向装置を各光情報処理装置、画像形成装置、画像投影表示装置及び光伝送装置等に用いる場合にも隣接素子への影響が抑制され、入射光の反射方向を1軸又は2軸方向に変えて According to the invention of claim 5, the substrate for mounting without fixing the plate-shaped member of a plate-shaped reflection surface is formed in a thin film combination constituting the surface reflection means formed by a flat plate that reflects incident light around the sloping plate-shaped member supporting point to become the fulcrum displaces the plate-shaped member on the member consists umbrella shaped member bevel shape to form a void disposed in a free state the fulcrum member on the substrate at the time of displacement of the upper since so as to place the rear surface opposite to the electrode of the plate-shaped member, the light beams incident on the light reflection region can be reflected align the reflection direction, the direction the reflection of the object without diffusing the reflected light only it is possible to light changes, the optical information processing apparatus optical deflecting device, an image forming apparatus, even when used in image projection display apparatus and an optical transmission device such as a suppressed influence on the adjacent elements, the reflection direction of the incident light the change in uniaxial or biaxial direction 偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Deflecting the control faster response more simple easy operation is more stable to perform, without the wavelength of the incident light to be used is limited, also changes less deterioration during use the mechanical strength for a long period of time, the drive voltage in low resource saving, low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
請求項6の発明によれば、入射光を反射するアルミニウム系金属膜で形成された反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、反射手段又は板形状部材の少なくとも一部に形成される導電性領域を兼ねて反射性能も良好であり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆 According to the invention of claim 6, the substrate for mounting without fixing the plate-shaped member of a plate shape formed by a thin film of a combination constituting a reflective means formed of an aluminum-based metal film which reflects incident light on the surface around the sloping plate-shaped member supporting point to become the fulcrum displaces the plate-shaped member on the member consists umbrella shaped member bevel shape to form a void disposed in a free state the fulcrum member on the substrate at the time of displacement of the upper the so was to place the rear surface opposite to the electrode of the plate-shaped member, reflective performance also serves as a conductive region formed on at least a portion of the reflection means or plate-shaped member is also good, the reflection of incident light direction uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing the faster a stable response without wavelength of the incident light to be used is limited, the mechanical strength is used for a long time when to change and deterioration is less, driving 電圧が低く省資源で、微細化と集積化が可能で更に低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Voltage is low resource saving, in miniaturization and further low cost integration possible, has become possible to provide an optical deflecting device using environment is also not limited.
請求項7の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に板形状部材は支点部材と接する個所の面形状に湾曲形状の湾曲形状部からなるようにしたので、支点部材に対する板形状部材の位置決めが自発的に容易となり、板形状部材の変位時に板形状部材が笠形状部材5側面に接触することを抑制され、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も速く According to the invention of claim 7, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state and since the plate-shaped member with placing the electrode was formed to be a curved shape of the curved shape to the surface shape of the portion in contact with the fulcrum member, the positioning of the plate-shaped member is facilitated spontaneously against the fulcrum member, a plate-shaped plate-shaped member during the displacement of the member is prevented from contacting the umbrella-shaped member 5 side, the structure and the control is more simple and easy operation for performing optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction in addition stable and faster response 使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Without the wavelength of the incident light to be used is limited, the mechanical strength changes with degradation further reduced to long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, using environment has become possible to provide an optical deflecting device which is not limited.
【0171】 [0171]
請求項8の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状で外形が円形状である板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、板形状部材に組み合わされた反射手段の反射面の反射領域にて反射した反射光が円形となり、光偏向装置を具備する上記画像形成装置や画像投影装置等における1画素を円形状として隣接画素の隙間部をドット状に点在させることにより矩形な板形状部材による矩形な画素形状の隣接画素の隙間部が線状の筋となるのと異なり高精 According to the invention of claim 8, outer a plate shape formed reflecting means with a thin film of a combination constituting a surface for reflecting the incident light on the substrate for mounting without fixing the plate-shaped member is a circular plate around the sloping plate-shaped member supporting point to become the fulcrum displaces the plate-shaped member on the member consists umbrella shaped member bevel shape to form a void disposed in a free state the fulcrum member on the substrate at the time of displacement of the since so as to place the rear surface opposite to the electrode of the shaped member, the image light reflected by the reflecting region of the reflecting surface of the reflecting means are combined in a plate-shaped member is circular, having a light deflection device and muscle clearance of adjacent pixels linear rectangular pixel shape by a rectangular plate-shaped member by causing one pixel in the forming apparatus and an image projection apparatus such as a intersperse clearance of adjacent pixels in a dot pattern as a circular shape made of the different high-precision な画像が得られ、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 An image is obtained, the reflection direction of the incident light uniaxial or biaxial directions to vary the structure and the control is more simple easy operation for optical deflection faster stable response, limited wavelength of the incident light to be used without Rukoto mechanical strength little change and deterioration in long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, to provide an optical deflecting device using environment not limited it has become possible.
請求項9の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状のシリコン窒化膜からなる板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、板形状部材は高い絶縁破壊電圧を有し且つ長期的な劣化即ち繰り返し変位に伴う疲労に対する耐性も高いので極力軽量及び薄膜化できそれにより高い周波数における駆動が可能な即ち数10kHz以上の高速動作が可能となり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が更に安 According to the invention of claim 9, the inclination of the substrate for mounting without fixing the plate-shaped member made of a silicon nitride film of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light plate-shaped around the plate-shaped member fulcrum member from umbrella-shaped member made of a substrate bevel shape as a fulcrum to become the fulcrum member on the time displacement displaces the plate-shaped member to form a gap which is arranged in a free state of since so as to place the rear surface opposite to the electrode member, the plate-shaped member can minimize weight and thinner because resistance is high with respect to fatigue caused by and long term degradation i.e. repeated displacement has a high breakdown voltage thereby it is possible to drive capable i.e. number 10kHz or more high-speed operation at high frequencies, the structure for performing varied light deflecting the reflection direction of the incident light to the uniaxial or biaxial direction and the control is simple easy operation is more cheap で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が更に低く省資源で、微細化と集積化が更に可能で更に低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 In even faster response, without wavelength of the incident light to be used is limited, the mechanical strength for a long time varies deterioration further reduced in use, a driving voltage is resource saving even lower, miniaturization and integration in addition possible lower cost, has become possible to provide an optical deflecting device using environment is also not limited.
【0172】 [0172]
請求項10の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に反射手段又は板形状部材は導電性を有する導電性領域を有して導電性領域が電極と対向するようにしたので、複数の電極間に任意に電位差を生じさせることにより、より低い駆動電圧で板形状部材を目的の方向へ変位、又は、引き続き変位方向を高速で変え、又は、傾斜の向きを2軸方向で高精度に制御することが出来るようになり、入射光の反射方向を1軸 According to the invention of claim 10, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state because conductive areas reflecting means or plate-shaped member having a conductive region having a conductive with placing the electrode and is to be opposed to the electrodes, a potential difference is generated between the optionally between a plurality of electrodes the lower driving voltage displacing the plate-shaped member in the desired direction, or subsequently alter the displacement direction at a high speed, or becomes the direction of the inclination to be able to control with high precision in two axial directions, the incident 1 axial reflecting direction of light は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が安定で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が更に低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 2 axially varied structure and control operation more simple and easy to perform optical deflection even faster stable response without wavelength of the incident light to be used is limited, even when using the mechanical strength for a long time changes less deterioration, a driving voltage is even lower resource saving, low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
請求項11の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する窪み形状の窪み形状部からなる基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、笠形状部材の高さが低くなり、歩留まりが向上して、更に、笠形状部材自体の自立安定につながり機械的強度を高め、製造方法により空隙(G)の高さの制御性を向上でき駆動電圧、及び、リセット電圧の制御性が良くなり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作 According to the invention of claim 11, the substrate made of the depression-shaped portion of the mounting recesses shape without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light around the sloping plate-shaped member supporting point to become the fulcrum displaces the plate-shaped member on the member consists umbrella shaped member bevel shape to form a void disposed in a free state the fulcrum member on the substrate at the time of displacement of the upper the so was to place the rear surface opposite to the electrode of the plate-shaped member, the lower the height of the hat-shaped member, and yield is improved, further, the self-supporting stability leads mechanical strength bevel shaped member itself increased, the height increase can drive voltage control of the gap (G) by the process, and, the better the control of the reset voltage, a varied light deflecting the reflection direction of the incident light to the uniaxial or biaxial direction structure and control more easily facilitate a work performed が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Is faster stable response without wavelength of the incident light to be used is limited, change in use mechanical strength for a long time and deterioration even less, the driving voltage is low resource saving, miniaturization and integration in possible at low cost, has become possible to provide an optical deflecting device using environment is also not limited.
【0173】 [0173]
請求項12の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する(100)面方位を有するシリコン基板からなる基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、同一基板内に複雑な駆動系回路を簡単に形成されて、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微 According to the invention of claim 12, the silicon substrate having a mounting to (100) plane orientation without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light fulcrum on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum upon the displacement of the inclined plate-shaped member on the substrate to form a gap which is arranged in a free state consisting of since so as to place the rear surface opposite to the electrode surrounding the plate-shaped member of the member, a complicated drive circuits on the same substrate is easily formed, the reflection direction of the incident light uniaxial or biaxial direction varied in faster construction and control is a stable yet simple easy operation response for optical deflection without wavelength of the incident light to be used is limited, less deterioration and change in use mechanical strength for a long time , the drive voltage is resource saving low, fine 化と集積化が可能で更に低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 In reduction and further low cost integration possible, has become possible to provide an optical deflecting device using environment is also not limited.
請求項13の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に支点部材は板形状部材と接する個所の面形状が円形状部であるようにしたので、板形状部材と支点部材の接触面積を低下させて2軸方向の光偏向が容易となり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化 According to the invention of claim 13, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state since the surface shape of the point fulcrum member in contact with the plate-shaped member with placing the electrode and has as a circular portion, the light deflection biaxial direction by reducing the contact area of ​​the plate-shaped member and the fulcrum member becomes easy, the reflection direction of the incident light uniaxial or biaxial directions to vary the structure and the control is more simple easy operation for optical deflection faster stable response without wavelength of the incident light to be used is limited , change the mechanical strength is also a long period of time during use 劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Less deterioration, the driving voltage is low resource saving, low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
【0174】 [0174]
請求項14の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に支点部材は板形状部材と点で接する円錐形状部であるようにしたので、支点部材の支点部位の基板側の機械的強度を強めることが出来、且つ、板形状部材の変位は、板形状部材の端部における基板の上面との接触部で規定されるので、接触面積を極力低減して板形状部材の基板3への固着や接触帯電を抑制できる、支点部材が板形状部材と接触する領域におい According to the invention of claim 14, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state and since the fulcrum member with placing the electrodes was set to a conical portion in contact with the plate-shaped member and the point with, it can enhance the mechanical strength of the substrate side of the fulcrum portion of the fulcrum member, and a plate-shaped displacement of the member, because they are defined by the contact portion of the upper surface of the substrate at the end of the plate-shaped member, avoids the locking or contact charging to the substrate 3 of the plate-shaped member is reduced as much as possible the contact area, the fulcrum member regions smell but in contact with the plate-shaped member 点形状を有することから静電引力に作用する方向に対応した任意の方向へ板形状部材を傾斜変位させることが容易に可能となり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が更に低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Electrostatic attraction allows easy be tilted displacement in any direction to a plate-shaped member that corresponds to the direction acting from having point-shaped light by changing the reflection direction of the incident light to the uniaxial or biaxial direction deflecting the control more stable faster response operation is simple and easy to perform, without the wavelength of the incident light to be used is limited, also change deterioration further reduced when using the mechanical strength for a long period of time, the drive voltage There saving resources even lower, at a low cost can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
請求項15の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に支点部材は板形状部材と接する面が長方形の長方形状部であるようにしたので、支点部材の短尺方向への支点部材傾斜変位、即ち、1軸方向の板形状部材の静電引力による傾斜変位が安定して起こり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制限されることな According to the invention of claim 15, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state fulcrum because member was set to the surface in contact with the plate-shaped member has a rectangular shape of a rectangle, the fulcrum member tilting displacement in the short direction of the fulcrum member, i.e., one-axis direction of the plate-shaped member with placing the electrode by electrostatic occur attraction tilt displacement stably by the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing the faster more stable response, using it the wavelength of the incident light is limited 、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Mechanical strength little change and deterioration in long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, it is possible to provide an optical deflecting device using environment not limited It became so.
【0175】 [0175]
請求項16の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に支点部材は板形状部材と線で接する尾根の形状からなる尾根形状部であるようにしたので、支点部材の尾根形状部と板形状部材の接触面積を低減して1軸方向の板形状部材の静電引力による傾斜変位が安定して起こされ、支点部材の尾根形状部が斜面を有することから支点部材の機械的強度を強め、且つ、板形状部材の変位は板形状部材の端部における基板の According to the invention of claim 16, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state the fulcrum member with placing the electrode and since as a ridge-shaped portion consisting of ridge shape in contact with the plate-shaped member and the line, to reduce the contact area of ​​the ridge-shaped portion and the plate-shaped member of the fulcrum member 1 axial inclination displacement due to the electrostatic attraction of the plate-shaped member is caused to stably strengthen the mechanical strength of the fulcrum member since the ridge-shaped portion of the fulcrum member has an inclined surface, and the displacement of the plate-shaped member the substrate at an end portion of the plate-shaped member 面との接触部で規定されるので、接触面積を極力低減して板形状部材の基板への固着や接触帯電が抑制でき、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Since defined by the contact portion of the surface, the contact area can as much as possible sticking and contact charging suppression of by reducing the substrate of the plate-shaped member, the optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction structure and control are more easily easy operation is more stable to perform faster response without wavelength of the incident light to be used is limited, changed deterioration further reduced even when using the mechanical strength for a long period of time, the drive voltage in low resource saving, low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
請求項17の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に支点部材は板形状部材と接する斜面を有するようにしたので、電極の全面に接触して板形状部材を変位させることが出来るので接触時の衝撃を分散させ変位方向の制御が容易となり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が更に安定で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強 According to the invention of claim 17, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state and since the fulcrum member with placing the electrodes so as to have a slope which is in contact with the plate-shaped member, in contact with the entire surface of the electrode plate-shaped member at the time of contact since the causes that can be displaced impact the displacement direction is dispersed control is facilitated, the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing more stable even faster response, limited wavelength of the incident light to be used without Rukoto, mechanical strength が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 There little change deterioration in long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment not limited .
【0176】 [0176]
請求項18の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる酸化シリコン膜又はシリコン窒化膜からなる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、支点部材は機械的強度が強くなり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で According to the invention of claim 18, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped fulcrum member on which a silicon oxide film or a silicon nitride film as a fulcrum during displacement displaces the plate-shaped member to form a gap which is arranged in a free state since so as to place the rear surface opposite to the electrode surrounding the plate-shaped member, the fulcrum member is the mechanical strength becomes strong, performing optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction structure and control is faster and stable response operation is simple and easy, without the wavelength of the incident light to be used is limited, the mechanical strength changes with degradation further reduced to long-term use, resource saving low driving voltage in, and it can be miniaturized and integrated コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Cost, has become possible to provide an optical deflecting device using environment is also not limited.
請求項19の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に笠形状部材は板形状部材の外周に対応して複数個の各笠形状部材を所定間隔を空けて配置するようにしたので、犠牲層のエッチング除去時に要する時間が短縮化され歩留まりも向上して、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が According to the invention of claim 19, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state to so umbrella shaped member has a plurality of the hat-shaped member corresponding to the outer periphery of the plate-shaped member be arranged at predetermined intervals along with arranging the electrodes, reducing the time required for the etching removal of the sacrificial layer and improved reduction is yield, the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing the faster a stable response, the wavelength of the incident light to be used are limited without being mechanical strength 期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で更に低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Period is also changed and with less deterioration in use, saving resources low driving voltage, with miniaturization and further low cost integration possible, has become possible to provide an optical deflecting device using environment is also not limited.
【0177】 [0177]
請求項20の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に笠形状部材は板形状部材の外周に対応する全領域に配置するようにしたので、板形状部材が機械的に可動範囲を制限された空隙よりはみ出し故障することを極力低減され、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用 According to the invention of claim 20, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state since the umbrella-shaped member with placing the electrodes were so arranged in the entire area corresponding to the outer periphery of the plate-shaped member, as much as possible to fail protruding from voids plate-shaped member is limited mechanically movable range is reduced, the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing more stable faster response without wavelength of the incident light to be used is limited , mechanical strength is used for a long period of time にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 To change the degradation further smaller, the driving voltage is low resource saving, low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
請求項21の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の絶縁性を有する絶縁膜からなる笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、板形状部材が笠形状部材に接触した場合でも電気的に浮いている板形状部材の電荷が笠形状部材を経由して移動しないので板形状部材の電位が変動することが抑制され、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制 According to the invention of claim 21, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light around the fulcrum member on the substrate consists of umbrella-shaped member made of an insulating film having an insulating property bevel shape displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state since so as to place the rear surface opposite to the electrode of the plate-shaped member, and the charge of the plate-shaped member in which the plate-shaped member is electrically floating even when in contact with umbrella shape member through bevel-shaped member does not move is suppressed the potential of the plate-shaped member is varied, and control structure for the varied optical deflecting the reflection direction of the incident light to the uniaxial or biaxial direction also respond more simple easy actuation more stable fast, the wavelength of the incident light to be used braking されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Without being to be mechanical strength little change and deterioration in long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, providing an optical deflecting device using environment not limited it has become to be able to.
【0178】 [0178]
請求項22の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の入射光束に対し透光性を有する透光性膜からなる笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、板形状部材と組み合わせ構成される反射手段の反射面の光反射領域の笠形状部材と重なる領域からの反射光も寄与させることが出来るので1素子における反射光の面積及び光量を増加させることが出来るのでON光量が増大して、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制 According to the invention of claim 22, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light It consists umbrella shaped member to the incident light beam bevel shape displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state made of a transparent film having a light transmitting property since so as to place the rear surface opposite to the electrode surrounding the plate-shaped member of the fulcrum member on the substrate, a region overlapping with umbrella-shaped member of the light reflecting region of the reflecting surface of the plate-shaped member and the combination constituted reflecting means light varied oN light amount is increased because it is possible to increase the area and the light quantity of the reflected light, the reflection direction of the incident light to the uniaxial or biaxial direction in one element the reflected light also can be contributions from structure and control to perform a deflection が更に簡単容易で作動が更に安定で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 There is also faster response further actuation yet simple and easy stable without wavelength of the incident light to be used is limited, the mechanical strength is also little change degradation a long period of time during use, the drive voltage is low resource saving , at low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
請求項23の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の酸化シリコン膜からなる笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、笠形状部材が高い絶縁性と高い透光性を両立して微細化と集積化の作製も可能となり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が According to the invention of claim 23, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light plate-shaped around the fulcrum member on the substrate consists of umbrella-shaped member consisting of a silicon oxide film bevel shape fulcrum and a displacement of the plate-shaped member on the fulcrum member comprising at displacement to form a gap which is arranged in a free state since so as to place the rear surface opposite to the electrode member, fabricated umbrella shaped member with both high insulation and high light-transmitting fine and integration also becomes possible, the reflection direction of the incident light a uniaxial or biaxial direction varied structure and control is more simple easy operation for optical deflector further even faster stable response without wavelength of the incident light to be used is limited, the mechanical strength for a long time also changes less deterioration during use, the drive voltage く省資源で、微細化と集積化が更に可能で更に低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 In Ku resource saving, in miniaturization and integration can further lower cost is further possible, has become possible to provide an optical deflecting device using environment is also not limited. 請求項24の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の入射光束に対し遮光性を有する遮光性膜からなる笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、笠形状部材に入射した光束の望まれない方向への反射が抑制されて目的方向への光偏向の迷光が低下してOFF光量が抑制されて、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制限されることなく、 According to the invention of claim 24, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light substrate consists umbrella-shaped member consisting of light-shielding film to the incident light beam bevel shape displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state having a light shielding property the so was to place the rear surface opposite to the electrode of the plate-shaped member around the fulcrum member, the reflection in the direction undesired light beam incident on the umbrella-shaped member is suppressed in the optical deflection in the target direction stray light is turned OFF light amount is suppressed decrease, the reflection direction of the incident light uniaxial or biaxial directions to vary the structure for the light deflection control is more simple and easy operation more stable faster response, use without the wavelength of the incident light is restricted, 械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。械的 strength little change deterioration in long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, so that it is possible to provide an optical deflecting device using environment not limited Became.
【0179】 [0179]
請求項25の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の酸化クロム膜からなる笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置するようにしたので、笠形状部材が高い絶縁性と高い遮光性を両立して微細化と集積化の作製が可能となり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が更に安定で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低 According to the invention of claim 25, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light plate-shaped around the fulcrum member on the substrate consists of umbrella-shaped member made of chromium oxide bevel shape fulcrum and a displacement of the plate-shaped member on the fulcrum member comprising at displacement to form a gap which is arranged in a free state since so as to place the rear surface opposite to the electrode member, umbrella-shaped member with both high insulation and high light-shielding property becomes possible to produce fine and integrated, one-axis the reflection direction of the incident light or 2 instead of the axial structure and control for light deflection more easily easy operation is more stable even faster response, without wavelength of the incident light to be used is limited, when using the mechanical strength for a long time little even change deterioration, a driving voltage is low 省資源で、微細化と集積化が可能で更に低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Saving resources, with miniaturization and further low cost integration possible, has become possible to provide an optical deflecting device using environment is also not limited.
請求項26の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に電極は複数個の各電極からなり板形状部材は電気的に浮いているようにしたので、板形状部材を目的の方向へ変位させて、引き続き変位方向を高速で変えて、更に任意に電位差を生じさせることにより板形状部材の傾斜の向きを2軸方向で高精度に制御されて、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が安 According to the invention of claim 26, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state since the electrodes while placing the electrode by becomes plate-shaped member from a plurality of individual electrodes so as to float electrically, varied by displacing the plate-shaped member in the desired direction, continuing the displacement direction at a high speed Te, and optionally further controlled by a potential difference is generated between the direction of the inclination of the plate-shaped member with high precision 2-axis direction to perform the light deflection by changing the reflection direction of the incident light in a uniaxial or biaxial direction structure simpler easily controlled and an operation is safe で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 In even faster response, without wavelength of the incident light to be used is limited, the mechanical strength is little changed deterioration in long-term use, the drive voltage is low resource saving, enables miniaturization and integration at low cost has become possible to provide an optical deflecting device using environment is also not limited.
【0180】 [0180]
請求項27の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に電極は板形状部材の裏面と対向した斜面上に配置した複数個の各電極からななり板形状部材は電気的に浮いているようにしたので、板形状部材の変位をより低電圧で駆動可能で、板形状部材の接触時の衝撃が分散され、板形状部材を目的の方向へ変位させて、引き続き変位方向を高速で変えて、更に任意に電位差を生じさせることにより板形状部材の傾斜の向 According to the invention of claim 27, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state to since the electrodes while placing the electrodes was set to the plate-shaped member of the back surface and opposing made such a plurality of individual electrodes arranged on the slope plate-shaped member is electrically floating, the displacement of the plate-shaped member be driven at a low voltage, are dispersed impact at the time of contact of the plate-shaped member, that by displacing the plate-shaped member in the desired direction, subsequently changing the direction of displacement at a high speed, causing a further optionally potential direction of inclination of the plate-shaped member by を2軸方向で高精度に制御されて、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が更に簡単容易で作動が安定で応答も更に速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が更に低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 The controlled with high precision in two axial, the reflection direction of the incident light uniaxial or biaxial directions to vary the structure and the control is more simple easy operation for optical deflection even faster stable response, using without the wavelength of the incident light is limited, the mechanical strength changes with degradation further reduced to long-term use, a driving voltage is even lower resource saving, low cost and can be miniaturized and integrated, the use environment also it becomes possible to provide an optical deflecting device which is not limited.
請求項28の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に1次元アレー状に配列した1次元光偏向アレーを形成するようにしたので、画像形成装置における潜像形成手段等に使用することが出来る、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電 According to the invention of claim 28, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state since so as to form a one-dimensional optical deflector array arranged in one-dimensional array form with placing the electrode and can be used for latent image forming unit or the like in an image forming apparatus, the reflection direction of the incident light 1 uniaxial or biaxial directions to vary the structure and control operation easy easy to perform the light deflection faster stable response without wavelength of the incident light to be used is limited, changed mechanical strength even long-term use and less deterioration, the driving power が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 In low resource saving, low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
【0181】 [0181]
請求項29の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置すると共に2次元アレー状に配列した2次元光偏向アレーを形成するようにしたので、画像投影表示装置における光スイッチ手段等に使用することが出来る、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、 According to the invention of claim 29, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state since so as to form a two-dimensional optical deflector array arranged in a two-dimensional array-like with disposing an electrode and can be used in optical switching means or the like in the image projection display device, the reflection direction of the incident light 1 uniaxial or biaxial directions to vary the structure and control operation easy easy to perform the light deflection faster stable response without wavelength of the incident light to be used is limited, changed mechanical strength even long-term use and less deterioration, 動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を提供することが出来るようになった。 Dynamic voltage is low resource saving, low cost and can be miniaturized and integrated, has become possible to provide an optical deflecting device using environment is also not limited.
請求項30の発明によれば、基板上に支点部材と電極を形成し、堆積して平坦化した第1の犠牲層を介して反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、第1の犠牲層と第2の犠牲層を除去するようにしたので、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置の製造方法を提供することが出来るようになった。 According to the invention of claim 30, forming a fulcrum member and the electrode on the substrate, deposited in a plate shape formed of a thin film in combination constitute the reflecting means to the surface via the first sacrificial layer is planarized forming a plate-shaped member, further after patterning the umbrella-shaped member to a predetermined position and a second sacrificial layer patterned deposited, so as to remove the first sacrificial layer and the second sacrificial layer of since the, the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing the faster a stable response without wavelength of the incident light to be used is limited, mechanical strength little change and deterioration in long-term use, the drive voltage is low resource saving, in a possible miniaturization and integration cost, to provide a method of manufacturing the optical deflecting device using environment not limited It came to be.
請求項31の発明によれば、基板上に支点部材と電極を形成し、支点部材を突出させて堆積して平坦化した第1の犠牲層に重ねて堆積して平坦化した第3の犠牲層を介して反射手段を表面に組み合わせ構成する薄膜で形成された湾曲形状の湾曲形状部からなる板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、第1の犠牲層と第2の犠牲層と第3の犠牲層を除去するようにしたので、静電引力により板形状部材が傾斜変位する時に、板形状部材の変位時に湾曲形状部を中心とた変位が可能となり、板形状部材がずれることを抑制し、言い換えると、支点部材に対する板形状部材の位置決めが自発的に容易となり、板形状部材の変位時に、板形状部材が笠形状部材の側面に接 According to the invention of claim 31, a third sacrifice the fulcrum member and the electrode formed on the substrate, and flattened by depositing superimposed on the first sacrificial layer is planarized deposited by projecting fulcrum member forming a plate-shaped member made of curved shape of the curved shape formed by a thin film of a combination constituting the reflecting means to the surface via the layer, the further predetermined position and the second sacrificial layer patterned deposited after patterning the umbrella-shaped member, since so as to remove the first sacrificial layer and the second sacrificial layer and the third sacrificial layer of, when the plate-shaped member inclined displaced by electrostatic attraction, a plate-shaped member the curved shape portion allows the center and was displaced during displacement, to prevent the plate-shaped member shifts, in other words, positioning of the plate-shaped member is facilitated spontaneously against the fulcrum member, when the displacement of the plate-shaped member, contact plate-shaped member on the side surface of the umbrella-shaped member することを抑制して、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が更に安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置の製造方法を提供することが出来るようになった。 To suppress that, the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing the faster more stable response, the wavelength of the incident light to be used are limited without being able to be mechanical strength changes deteriorated further less long term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, the optical deflecting device using environment not limited now it is possible to provide a process for the production.
【0182】 [0182]
請求項32の発明によれば、基板上に窪み形状部と窪み形状部内に斜面からなる支点部材と電極を形成し、堆積して平坦化した第1の犠牲層を介して反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、第1の犠牲層と第2の犠牲層を除去するようにしたので、笠形状部材の高さが低くなり、笠形状部材自体の自立安定につながり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が更に少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで According to the invention of claim 32, forming a fulcrum member and the electrode made from a slant into the shaped portion recess shaped portion recesses on the substrate, deposited to the surface of the reflection means through the first sacrificial layer is planarized forming a plate-shaped member of a plate shape formed by a thin film of a combination structure, after further patterning the umbrella-shaped member deposited a second sacrificial layer to a predetermined position patterned first sacrificial layer If so was to remove the second sacrificial layer, the lower the height of the hat-shaped member, leading to independence stabilized bevel shaped member itself, by changing the reflection direction of the incident light to the uniaxial or biaxial direction light structure for deflection and control is simple easy operation is faster and stable response without wavelength of the incident light to be used is limited, also change deterioration further reduced when using the mechanical strength for a long period of time, the drive voltage in low resource saving, low cost and can be miniaturized and integrated 使用環境も制限されない光偏向装置の製造方法を提供することが出来るようになった。 Use environment has become possible to provide a manufacturing method of the optical deflection device which is not limited.
請求項33の発明によれば、基板上に支点部材と電極を形成し、堆積して平坦化した第1の犠牲層を介して反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、笠形状部材の複数個の各笠形状部材間を空けて配置した所定間隔から第1の犠牲層と第2の犠牲層を除去するようにしたので、犠牲層のエッチング作業が短縮化して、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で更に低コストで、使 According to the invention of claim 33, forming a fulcrum member and the electrode on the substrate, deposited in a plate shape formed of a thin film in combination constitute the reflecting means to the surface via the first sacrificial layer is planarized forming a plate-shaped member, after patterning the umbrella-shaped member further predetermined position and the second sacrificial layer patterned deposited, spaced between a plurality of the umbrella-shaped member bevel-shaped member from the predetermined interval and the first sacrificial layer since so as to remove the second sacrificial layer, the etching work of the sacrificial layer is shortened, light deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction structure and control is faster and stable response operation is simple and easy to perform, without the wavelength of the incident light to be used is limited, the mechanical strength is little changed deterioration in long-term use, a low driving voltage saving in resources, yet at low cost can be miniaturized and integrated, using 環境も制限されない光偏向装置の製造方法を提供することが出来るようになった。 Environment has become possible to provide a manufacturing method of the optical deflection device which is not limited.
【0183】 [0183]
請求項34の発明によれば、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置した光偏向装置を独立駆動手段で各々独立に駆動するようにしたので、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されな According to the invention of claim 34, the sloping plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light backside facing the surrounding plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped displacing the plate-shaped member to the fulcrum member on which the fulcrum of the time displacement to form a gap which is arranged in a free state and since so as to drive each independently independently driving means optical deflecting device arranged an electrode, the structure for the varied optical deflecting the reflection direction of the incident light to the uniaxial or biaxial direction control is simple easy actuation faster stable response without wavelength of the incident light to be used is limited, the mechanical strength is little changed deterioration in long-term use, resource saving low driving voltage, miniaturization and integration in possible a low-cost, Do not be used environment also limit 光偏向装置を具備して、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制する光偏向装置を具備する光情報処理装置を提供することが出来るようになった。 It comprises a light deflecting device, a simple easy to control the structure, and to provide stray, an optical information processing apparatus comprising suppressing optical deflecting device the reflected light from the adjacent element that occurs when the reflected direction disturbed it has become possible.
請求項35の発明によれば、回動可能に保持されて形成画像を担持する画像担持体上に光書き込みを行なって潜像を形成する、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置した光偏向装置からなる潜像形成手段の上記光偏向装置によって形成された潜像を顕像化してトナー画像を形成する現像手段で形成されたトナー画像を転写手段によって被転写体に転写して画像を形成するようにしたので、入射光の反射方向を1軸又は2軸方向に変えて光 According to the invention of claim 35, to form a latent image by performing optical writing on an image carrier for carrying a formed image and is rotatably held, in combination constitutes a reflecting means for reflecting the incident light on the surface displacing the plate-shaped member to the fulcrum member on which the fulcrum upon the displacement of the inclined plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed by a thin film is arranged in a free state by the optical deflection device of the latent image forming means comprising a light deflecting device disposed backside opposite to the electrode of the plate-shaped member around the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped to form a that voids since so as to form an image transferred to the transfer medium the toner image formed by the developing means to visualize the formed latent image to form a toner image by the transfer means, the reflection direction of the incident light 1 light instead of uniaxial or biaxial direction 向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を具備して、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制して、光書き込み時のON/OFF制御が良好で高速動作が可能で、且つ、長期的な信頼性が高く、低電圧で駆動され、S/N比も向上出来る高速で高精彩な画像を形成する光偏向装置を具備する画像形成装置を提供することが出来るようになった。 Countercurrent structure and control is faster and stable response operation is simple and easy to perform, without the wavelength of the incident light to be used is limited, the mechanical strength is little changed deterioration in long-term use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, comprises a light deflecting device usage environment is also not limited, a simple easy to control the structure, and, adjacent generated when stray light is reflected direction disturbed by suppressing the reflected light from the element, it can be ON / OFF control is good high-speed operation at the time of the optical writing, and a high long-term reliability is driven at a low voltage, S / N ratio can be improved it has become possible to provide an image forming apparatus including the optical deflecting device to form a high-definition image at high speed.
【0184】 [0184]
請求項36の発明によれば、画像投影データの入射光の反射方向を変えて光偏向を行なって画像を投影して表示する、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置した光偏向装置からなる光スイッチ手段が投影スクリーンに画像を投影して表示するようにしたので、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射光の波長が制限されることなく、機械的強度が長期間 According to the invention of claim 36, formed by a thin film of a combination configured to display by projecting an image by performing optical deflection by changing the reflection direction of the incident light of the image projection data, a reflection means for reflecting the incident light on the surface voids displacing the plate-shaped member to the fulcrum member on which the fulcrum upon the displacement of the inclined plate-shaped member on the substrate is placed in a free state for placing without fixing the plate-shape of the plate-shaped member which is optical switch means displays by projecting an image on a projection screen comprising a light deflecting device disposed backside opposite to the electrode surrounding the plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped form was so so, the reflection direction of the incident light uniaxial or biaxial direction in the structure and control operation easy easy to perform the light deflection by changing the faster a stable response, the wavelength of the incident light to be used is limited rather, the mechanical strength is a long period of time 用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を具備して、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制して、画像の明暗制御時のON/OFF制御が良好で高速動作が可能で、且つ、長期的な信頼性が高く、低電圧で駆動され、コントラスト比も向上出来るので、高輝度でありながら高いコントラストを有する高精細な画像を投影して表示する光偏向装置を具備する画像投影表示装置を提供することが出来るようになった。 Also little change and degradation during use, the drive voltage is low resource saving, low cost and can be miniaturized and integrated, comprises a light deflecting device usage environment is also not limited, the structure and control is simple easy, and stray light, by suppressing the reflected light from the adjacent element that occurs when a disordered reflection direction, the image oN / OFF control is excellent and fast operation in dark control of possible, and long-term reliability high, is driven at a low voltage, since it improves the contrast ratio, it is possible to provide an image projection display apparatus having a light deflection device for displaying by projecting high-definition images having a high contrast while a high intensity It became so.
請求項37の発明によれば、光信号を入力する光信号入力手段からの光信号の入射光の反射方向を1軸又は2軸方向に変えて光偏向を行なって、各光信号の光路を決定する、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置した光偏向装置からなる光スイッチ手段からの光信号を光信号出力手段で出力するようにしたので、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用する入射 According to the invention of claim 37, perform the light deflection reflection direction of the incident light of the optical signal from the optical signal input means for inputting an optical signal in place of the uniaxial or biaxial direction, the optical path of the optical signal determining, as a fulcrum during the displacement of the inclined plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light displacing the plate-shaped member on the fulcrum member is disposed backside opposite to the electrode surrounding the plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped forming voids that are arranged in a free state since the optical signal from the optical switching means comprising a light deflection apparatus so as to output an optical signal output means, simple structure and control for performing optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction easy operation is faster and stable response, incident to use の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を具備して、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制して、2軸方向の光偏向を容易に正確に行なうことが出来、各ポートの選択の制御が良好で隣接ポートへの迷光、を抑制して、高速な光路切替が可能で、長期的な信頼性が高く、低電圧で駆動され、同一基板上に集積化が出来るので、小型でありながら高速で誤動作の少ない光信号の光路を決定して出力して伝送する光偏向装置を具備する光伝送装置を提供することが出来るようになった。 Without wavelengths is limited, and the mechanical strength is small change and deterioration in long-term use, resource saving low driving voltage, with possible miniaturization and integration cost, not used environment restrictions light comprises a deflection device, easy simple control structure, and stray light, by suppressing the reflected light from the adjacent element that occurs when a disordered reflection direction, easily performed accurately light deflection biaxial direction it is possible, stray light control of selection of each port to the good neighbor port, to suppress, enables high-speed optical path switching, high long-term reliability is driven at a low voltage, on the same substrate in since integration can, has become possible to provide an optical transmission device comprising an optical deflection device for transmitting output to determine the optical path of less light signal malfunctions in high speed while being compact.
【0185】 [0185]
請求項38の発明によれば、光信号を入力する光信号入力手段からの光信号の入射光の反射方向を1軸又は2軸方向に変えて光偏向を行なって、各光信号の光路を決定する、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を固定することなく載置する基板上の傾斜する板形状部材の変位時の支点となる支点部材上に板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材からなり基板上の支点部材の周囲に板形状部材の裏面と対向して電極を配置した複数段の光偏向装置からなる光スイッチ手段からの光信号を光信号出力手段で出力するようにしたので、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易で作動が安定で応答も速く、使用 According to the invention of claim 38, perform the light deflection reflection direction of the incident light of the optical signal from the optical signal input means for inputting an optical signal in place of the uniaxial or biaxial direction, the optical path of the optical signal determining, as a fulcrum during the displacement of the inclined plate-shaped member on the substrate for mounting without fixing the plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light displacing the plate-shaped member on the fulcrum member is disposed backside opposite to the electrode surrounding the plate-shaped member of the fulcrum member on the substrate consists of umbrella-shaped member of the umbrella-shaped forming voids that are arranged in a free state since the optical signal from the optical switching means comprising a light deflecting device in a plurality of stages to output an optical signal output means, a structure for performing optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction control is simple easy operation is faster and stable response, using る入射光の波長が制限されることなく、機械的強度が長期間使用時にも変化と劣化が少なく、駆動電圧が低く省資源で、微細化と集積化が可能で低コストで、使用環境も制限されない光偏向装置を具備して、光偏向角が大きく、構造と制御が簡単容易で、且つ、迷光、反射方向が乱れた時に発生する隣接素子からの反射光を抑制して、2軸方向の光偏向を容易に正確に行なうこと出来、各ポートの選択の制御が良好で隣接ポートへの迷光、を抑制して、高速な光路切替が可能で、長期的な信頼性が高く、低電圧で駆動され、同一基板上に集積化が出来るので、小型でありながら高速で誤動作の少ない光信号の光路を決定して出力して伝送する光偏向装置を具備する光伝送装置を提供することが出来るようになった。 That without wavelength is limited to incident light, mechanical strength even little change degradation a long period of time during use, the drive voltage is low resource saving, in a possible miniaturization and integration cost, the use environment It comprises a unrestricted optical deflector, a large light deflection angle, a simple easy to control the structure, and stray light, by suppressing the reflected light from the adjacent element that occurs when the reflected direction disturbed, 2 axial of can perform optical deflector easily accurately, stray light of control of the selection of each port to the good neighbor port, to suppress, enables high-speed optical path switching, long-term reliable, low-voltage in is driven, because integrated on the same substrate can, is to provide an optical transmission device comprising an optical deflection device for transmitting output to determine the optical path of less light signal malfunctions in high speed while being small It became possible way.
請求項39ないし43の発明によれば、支点部材が板形状部材と接触する領域において点形状を有することから静電引力に作用する方向に対応した任意の方向へ板形状部材を傾斜変位させることが容易に可能となり、入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う構造と制御が簡単容易である。 According to the invention of claim 39 to 43, the fulcrum member tilting displace any direction plate-shaped member that corresponds to the direction that acts on electrostatic attraction from having a point-shaped in a region in contact with the plate-shaped member is readily and becomes, structure and control for performing optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction is simple and easy.
請求項44ないし57の発明によれば、支点部材が板形状部材と接触する領域において点形状を有することから静電引力に作用する方向に対応した任意の方向へ板形状部材を傾斜変位させることが容易に可能となり、入射光の反射方向を複数軸方向に変えて光偏向を行う構造と制御が簡単容易である。 According to the invention of claim 44 to 57, the fulcrum member tilting displace any direction plate-shaped member that corresponds to the direction that acts on electrostatic attraction from having a point-shaped in a region in contact with the plate-shaped member is readily and becomes, the structure and control for changing the light deflecting the reflection direction of the incident light into a plurality axis is simple and easy.
【0186】 [0186]
請求項58の発明によれば、板状部材と支点部材の互いに接触する部位が導電性であるため、両者の間の接触抵抗を低減でき、低電圧駆動ができる。 According to the invention of claim 58, for the site in contact with each other of the plate-like member and the fulcrum member is conductive, it is possible to reduce the contact resistance therebetween, can be driven at a low voltage. 支点部材を中心とした板状部材の支点を中心とした傾斜を基板に接触するまで行うことにより、ミラーの偏向角の制御が容易かつ安定とすることができる。 By performing fulcrum tilting around the plate-like member about the fulcrum member to contact the substrate, the control of the deflection angle of the mirror can be easily and stably. また、板状部材が固定端を有していないので、ねじり又は変形が生じるようなヒンジ、あるいは、固定梁部が存在せず、長期的な使用における脆性劣化などの劣化が少なく、かつ変形を生じさせることがない分そのための力が不要なので低電圧で駆動できる。 Further, since the plate-shaped member does not have a fixed end, twisting or deformation occurs such hinges or absent fixed beam portion, less deterioration, such as embrittlement degradation in long-term use, and the deformation force that for that amount is no cause can be driven with unnecessary since the low voltage. また、規制部材により板状部材を任意の空間にほぼ位置付けできるので、リセット動作時のリセット電圧を極力低くすることが出来る。 Further, since the plate-like member by the regulating member Dekiru substantially positioned on any space, it is possible to as low as possible a reset voltage during a reset operation. また、板状部材の電位を、支点部材を経由して任意の電位とすることにより、さらに低電圧で安定に駆動することができる。 Further, the potential of the plate-like member, by any potential via the fulcrum member can be stably driven at lower voltage.
【0187】 [0187]
請求項59の発明によれば、入射する光束を最大限利用できる。 According to the invention of claim 59, it can take full advantage of the light beam incident.
請求項60の発明によれば、板状部材が誘電性を有する部材を有することから、板状部材の電位を誘電性を有する部材に保持することが可能となり、板状部材と支点部材の接触が瞬間的に断たれた場合も板状部材の電位を保持できるので、板状部材の傾斜を安定に駆動できる。 According to the invention of claim 60, since it has a member of the plate-like member has a dielectric, it is possible to hold the potential of the plate-like member to a member having a dielectric, contact of the plate-like member and the fulcrum member There can be held the potential of even a plate-like member when momentarily cut off can be stably driven inclination of the plate-like member.
請求項61の発明によれば、板状部材の電位を誘電性を有する部材に保持することが容易となり、かつより効率的に誘電することが可能なので、板状部材の傾斜をより安定に低電圧で駆動できる。 According to the invention of claim 61, it becomes easy to hold the potential of the plate-like member to a member having a dielectric, and so more efficiently can be dielectric, low inclination of the plate-like member more stably It can be driven by a voltage.
【0188】 [0188]
請求項62の発明によれば、高い比誘電率を確保しながら高い絶縁性を有しかつ高い機械的強度を有するので、板状部材と電極との電気的短絡を抑制でき、板状部材の変位時の破壊を抑制できる。 According to the invention of claim 62, since high while securing the dielectric constant has a high insulating property and has high mechanical strength, can be suppressed an electrical short between the plate member and the electrode, the plate-like member the destruction at the time of displacement can be suppressed.
請求項63の発明によれば、基板に形成された複数の電極と支点部材の頂部の、導電性の部位とが電気的に分離されていることから、板状部材に与える電位は基板上の電極とは独立したものとすることができる。 According to the invention of claim 63, the top portions of the plurality of electrodes and the fulcrum member formed on the substrate, since the site of the electrical conductivity is electrically isolated, the potential applied to the plate member on the substrate it can be made independent of the electrode.
【0189】 [0189]
請求項64の発明によれば、板状部材と電極との間に所定値以上の電位差を与えた場合、両者は少なくともその一部が対向しているので、両者の間に静電引力を働かせることができる。 According to the present invention 64, when a potential difference higher than a predetermined value between the plate member and the electrode, because both at least partially faces exerts an electrostatic attraction between them be able to.
請求項65の発明によれば、板状部材は支点部材の頂部を接触点として、あらゆる方向に変位が可能である。 According to the invention of claim 65, the plate-like member as the contact point a top of the fulcrum member, it is possible to displace in any direction.
【0190】 [0190]
請求項66の発明によれば、あらゆる方向に変位可能な板状部材を複数の斜面のいずれかに接触させることで変位方向を安定的に確定させることができる。 According to the invention of claim 66, the displacement direction can be stably determined by contacting the displaceable plate-shaped member in all directions to any one of a plurality of slopes.
請求項67の発明によれば、板状部材は支点部材と線接触をなすので、接触線を軸とした2方向のみの変位に限定されるが、簡易な装置に用いる場合安定性が非常に高いので精度のよい装置が得られる。 According to the invention of claim 67, since the plate-like member constituting the fulcrum member and line contact, the contact line is limited to the displacement of only two directions around an axis, if stability is very used in simple apparatus accurate device can be obtained is higher.
【0191】 [0191]
請求項68の発明によれば、電極が漸近的に板状部材に近接しているので、より低い電位差でも静電引力による板状部材の変位を引き起こすことができるようになる。 According to the invention of claim 68, since the electrode is close to asymptotically plate member, also it is possible to cause the displacement of the plate-like member by electrostatic attraction at a lower potential.
請求項69の発明によれば、板状部材が変位したとき、板状部材の裏面全体が斜面と接触するので、変位状態が非常に安定するとともに、接触時の衝撃を分散させることができ、それにより長期的な強度劣化の少ない光偏向装置を提供することができる。 According to the invention of claim 69, when the plate member is displaced, the entire back surface of the plate-like member is in contact with the inclined surface, with the displacement state is very stable, it is possible to disperse the impact at the time of contact, thereby providing a small optical deflecting device having long-term strength degradation.
【0192】 [0192]
請求項70の発明によれば、板状部材が斜面に接触状態になったときも、板状部材裏面の全面が斜面に接触するのではなく、凸部位のみに接触するので、接触面積を低減して板状部材の基板への固着を抑制でき、高い信頼性を有する光偏向装置を提供することができる。 According to the invention of claim 70, also when the plate-like member becomes in contact with the inclined surface, rather than a plate-like member the entire back surface is in contact with the inclined surface, it comes into contact only with the convex portion, reduces the contact area and can suppress the adhesion to the substrate of the plate-like member, it is possible to provide an optical deflecting device having high reliability.
請求項71の発明によれば、光偏向アレーにおいては、板状部材の近傍の雰囲気がほぼ真空であることから、板状部材の変位時に雰囲気中の気体による浮力を受けることが無いので、隣接する素子間の気体の流入及び流出の問題を解消でき、素子間における板状部材の変位の相互作用をなくすことが出来る。 According to the present invention 71, the optical deflection array, since the atmosphere in the vicinity of the plate-like member is substantially vacuum, since it is not receiving the buoyancy due to the gas in the atmosphere when the displacement of the plate-like member, adjacent can eliminate the gas inflow and outflow of issues between elements of, it can be eliminated interaction of the displacement of the plate-like member between the elements. 光偏向装置においては、装置周囲をカバーで覆うようにパッケージ化した場合、電圧印加による板状部材の急速な傾斜の変化に対して雰囲気の気体が粘性抵抗となり、わずかな応答遅れが生ずることを防ぐことができる。 In the optical deflecting device, when packaged so as to cover the device around a cover gas atmosphere becomes viscous resistance to rapid changes in the inclination of the plate-like member according to the voltage application, that slight response delay occurs it is possible to prevent.
【0193】 [0193]
請求項72の発明によれば、雰囲気中の水分を低減することができ、それにより、板状部材が傾斜変位し基板へ接触した時の接触点及び支点部材と板状部材の接触点における固着を抑制することができる。 According to the invention of claim 72, it is possible to reduce the moisture in the atmosphere, thereby fixing the contact points of the contact point and the fulcrum member and the plate-like member when the plate member in contact to the inclined displaced substrate it is possible to suppress.
請求項73の発明によれば、支点部材の頂部を挟んで対向する電極に与える電位の最大値と最小値の関係を切り替えるか、あるいは、板状部材に与える電位を最大値側と最小値側の間で切り替えることにより板状部材の変位方向を逆側に切り替えることができる。 According to the invention of claim 73, switch the relationship between the maximum value and the minimum value of the potential applied to the electrodes facing each other across the top of the fulcrum member, or the maximum value side and the minimum value side potentials to be supplied to the plate-like member the displacement direction of the plate-like member can be switched to the opposite side by switching between. また、電極に与える最大電位、もしくは、最小電位を隣接その他の電極に切り替えることにより、さらに多くの変位方向を得ることができる。 The maximum potential applied to the electrodes, or by switching the minimum potential to the adjacent other electrode can be obtained more displacement direction.
【0194】 [0194]
請求項74の発明によれば、特に電極の数を6個以上にすれば、最大電位を与える電極と最小電位を与える電極との間に、電気的に浮いた状態の電極を1個以上挟むことが可能になり、隣接する電極同士の間に高い電位差が生じることがなく、安定した動作が得られる。 According to the invention of claim 74, sandwiched in particular if the number of electrodes to six or more, between the electrodes to provide an electrode and the minimum potential that gives the maximum potential, the electrode of the electrically floating state one or more it enables, without a high potential difference is generated between the electrodes adjacent to each other, stable operation can be obtained.
請求項75の発明によれば、板状部材の残留応力によるミラー面における反りを容易に抑制できるので目的方向以外への反射光を抑制でき、反射光量のS/N比を高めることができる。 According to the invention of claim 75, it is possible to easily suppress warpage of the mirror surface due to the residual stress of the plate member can suppress the reflection light to non target direction, it is possible to improve the S / N ratio of the reflected light.
【0195】 [0195]
請求項76の発明によれば、アルミニウム系金属膜の反射率が良好なことから、ミラーとしての反射性能を高くすることが出来る。 According to the invention of claim 76, the reflectivity of the aluminum metal film to be good, it is possible to increase the reflection performance of the mirror. さらに、アルミニウム系金属膜の電気抵抗が低いことから、支点部材からの電位の付与を効果的に行うことが出来、低電圧で駆動することが出来る。 Further, since the electric resistance of the aluminum metal film is low, it is possible to grant the potential from the fulcrum member effectively, it is possible to drive at a low voltage.
【0196】 [0196]
請求項77の発明によれば、複数の素子を同時にかつ独立に駆動制御して光偏向させることが可能になる。 According to the invention of claim 77, it becomes possible to light deflection by the drive control simultaneously and independently the plurality of elements.
請求項78の発明によれば、光スイッチのON/OFF制御による画素の明暗制御が良好でかつ迷光を抑制でき、高速な動作が可能で、長期的な信頼性が高く、低電圧で駆動でき、コントラスト比を向上できるので、高輝度でありながら高いコントラスト比を有する高精細な画像投影表示装置を提供することができる。 According to the invention of claim 78, brightness control of pixels by the ON / OFF control of the optical switch can be suppressed good and stray light, can operate at a high speed, high long-term reliability can be driven at low voltage since it improves the contrast ratio, it is possible to provide a high-definition image projection display apparatus having a high contrast ratio while a high luminance. 請求項79の発明によれば、基板表面に形成された支点部材に板状部材が接触する場合に板状部材に重力が作用するが、どの電極の方向への板状部材の傾斜も、重力が均等に作用し、偏りがない。 According to the invention of claim 79, although gravity acting on the plate member when the contact plate member to the fulcrum member formed on the substrate surface, the inclination of the plate-like member in the direction of which electrode, gravity It acts equally, there is no bias. それにより、板状部材が傾斜変位する場合にさらに安定した動作、すなわち、長期信頼性や繰り返し再現性のある動作を得ることができる。 Thereby, more stable operation when the plate-shaped member inclined displacement, i.e., it is possible to obtain long-term reliability and repeatedly reproducible operation.
【0197】 [0197]
請求項80の発明によれば、光書込み時のON/OFF制御が良好でかつ迷光を抑制でき、高速な動作が可能で、長期的な信頼性が高く、低電圧で駆動でき、S/N比を向上できるので、高速かつ高精彩な画像形成装置を提供することができる。 According to the invention of claim 80, ON / OFF control at the time of optical writing can be suppressed good and stray light, can operate at a high speed, high long-term reliability can be driven at a low voltage, S / N since it improves the ratio, it is possible to provide a high-speed and high-definition image forming apparatus.
請求項81の発明によれば、基板表面に形成された支点部材に板状部材が接触する場合に板状部材に重力が作用するが、どの電極の方向への板状部材の傾斜も、重力が均等に作用し、偏りがない。 According to the invention of claim 81, although gravity acting on the plate member when the contact plate member to the fulcrum member formed on the substrate surface, the inclination of the plate-like member in the direction of which electrode, gravity It acts equally, there is no bias. それにより、板状部材が傾斜変位する場合にさらに安定した動作、すなわち、長期信頼性や繰り返し再現性のある動作を得ることができる。 Thereby, more stable operation when the plate-shaped member inclined displacement, i.e., it is possible to obtain long-term reliability and repeatedly reproducible operation.
【0198】 [0198]
請求項82の発明によれば、1個の入出力ポートに対する複数の入出力ポートの選択の制御が良好で、隣接ポートへの迷光を抑制でき、高速な光路切替が可能で、長期的な信頼性が高く、低電圧で駆動でき、同一基板上に集積化できるので、小型でありながら高速かつ誤動作の少ない光伝送装置を提供することができる。 According to the invention of claim 82, a good control of the selection of the plurality of input and output ports for a single input and output ports, it is possible to suppress stray light to the adjacent port, enables high-speed optical path switching, long-term reliability sexual high, can be driven at a low voltage, so can be integrated on the same substrate, it is possible to provide a small optical transmission apparatus having high speed and malfunction yet compact.
請求項83の発明によれば、一方の入出力部の複数の入出力ポートと他方の入出力部の複数の入出力ポートの選択の制御が良好で、隣接ポートへの迷光を抑制でき、高速な光路切替が可能で、長期的な信頼性が高く、低電圧で駆動でき、同一基板上に集積化できるので、小型でありながら高速かつ誤動作の少ない光伝送装置を提供することができる。 According to the invention of claim 83, a good control of the plurality of input and output ports of the selection of the plurality of input and output ports and the other of the input and output portions of one of the input-output unit, it is possible to suppress stray light to the adjacent port, high speed can be an optical path switching, high long-term reliability can be driven at a low voltage, so can be integrated on the same substrate, it is possible to provide a small optical transmission apparatus having high speed and malfunction yet compact.
請求項84の発明によれば、基板表面に形成された支点部材に板状部材が接触する場合に板状部材に重力が作用するが、どの電極の方向への板状部材の傾斜も、重力が均等に作用し、偏りがない。 According to the invention of claim 84, although gravity acting on the plate member when the contact plate member to the fulcrum member formed on the substrate surface, the inclination of the plate-like member in the direction of which electrode, gravity It acts equally, there is no bias. それにより、板状部材が傾斜変位する場合にさらに安定した動作、すなわち、長期信頼性や繰り返し再現性のある動作を得ることができる。 Thereby, more stable operation when the plate-shaped member inclined displacement, i.e., it is possible to obtain long-term reliability and repeatedly reproducible operation.
【0199】 [0199]
請求項85の発明によれば、高歩留及び高集積及び微細な光偏向装置を同一基板上に製造することができる。 According to the invention of claim 85, it is possible to produce a high yield and high integration and fine light deflection device on the same substrate. また、微細に本発明の光偏向装置を製造できることから板状部材の重量を低減でき、それにより待機時に板状部材が規制部材に衝突した場合の衝撃や、動作時に板状部材が基板に接触した場合の衝撃を低減でき、高い信頼性を有する光偏向装置を提供することができる。 Further, it is possible to reduce the weight of the plate-like member because it can produce an optical deflector of a finely present invention, whereby the impact or in the case where the plate member during standby collides with the regulating member, the contact plate member is to the substrate during operation can be reduced the impact in the case of, it is possible to provide an optical deflecting device having high reliability.
請求項86の発明によれば、高歩留及び高集積及び微細な光偏向アレーを同一基板上に製造することができる。 According to the invention of claim 86, it is possible to produce a high yield and highly integrated and fine light deflection array on the same substrate. また、微細に本発明の光偏向アレーを製造できることから板状部材の重量を低減でき、それにより待機時に板状部材が規制部材に衝突した場合の衝撃や、動作時に板状部材が基板に接触した場合の衝撃を低減でき、高い信頼性を有する光偏向アレーを提供することができる。 Further, it is possible to reduce the weight of the plate-like member because it can produce a light deflection array of finely present invention, whereby the impact or in the case where the plate member during standby collides with the regulating member, the contact plate member is to the substrate during operation can be reduced the impact in the case of, it is possible to provide an optical deflector array with high reliability.
【0200】 [0200]
請求項87の発明によれば、任意の大きさの凸部位を形成できるので、板状部材の吸着力を低減し、固着を抑制した、安定した駆動が可能な光偏向装置を、同一基板上に製造することができる。 According to the invention of claim 87, it is possible to form any size of the protrusion reduces the suction force of the plate-shaped member, secured to the suppression, stable drive is possible is the optical deflecting device, the same substrate it can be produced in.
【0201】 [0201]
請求項88の発明によれば、円錐体の頂部が球状であることにより、応力集中が避けられ、安定した作動が得られる。 According to the invention of claim 88, the top of the cone by a spherical, stress concentration is avoided, stable operation is obtained.
【0202】 [0202]
請求項89の発明によれば、円錐体の頂角を大きくすることができ、頂部の強度的安定性が得られる。 According to the invention of claim 89, it is possible to increase the vertical angle of the cone, the intensity stability of the top can be obtained.
【0203】 [0203]
請求項90の発明によれば、支点部材の頂部に尖端形状がないので応力集中による支点部材の破損などの危険性がより少なくなる。 According to the invention of claim 90, since there is no apex shape at the top of the fulcrum member danger of breakage of the fulcrum member due to stress concentration is less.
【0204】 [0204]
請求項91の発明によれば、頂部の強度的安定性が得られる。 According to the invention of claim 91, the intensity stability of the top is obtained.
【0205】 [0205]
請求項92の発明によれば、製造容易な支点部材が得られる。 According to the invention of claim 92, easily manufactured fulcrum member is obtained.
【0206】 [0206]
請求項93の発明によれば、板状部材と点接触をする多角錐形状の支点部材を用いる光偏向装置において、板状部材が斜面に接触状態になったときも、板状部材裏面の全面が斜面に接触するのではなく、凸部位のみに接触するので、接触面積を低減して板状部材の基板への固着を抑制でき、高い信頼性を有する光偏向装置を提供することができる。 According to the present invention 93, in the optical deflecting device using a fulcrum member of a polygonal pyramid shape that the plate-like member and the point contact, even when the plate-like member becomes in contact with the inclined surface, the plate-like member the entire rear surface There, instead of contacting the inclined surface, comes into contact only with the convex portion, to reduce the contact area can be suppressed adhesion to the substrate of the plate-like member, it is possible to provide an optical deflecting device having high reliability. また、凸部位のパターニングに際し、フォトマスクの作成が容易になる。 Also, upon patterning of the protrusion, thereby facilitating the creation of a photomask.
【0207】 [0207]
請求項94の発明によれば、板状部材と点接触をする多角錐形状の支点部材を用いる光偏向装置において、支点部材の斜面上の凸部位への板状部材の固着現象を予防することができる。 According to the present invention 94, in the optical deflecting device using a fulcrum member of a polygonal pyramid shape that the plate-like member and the point contact, preventing the sticking phenomenon of the plate-like member to the protrusion on the slope of the fulcrum member can.
【0208】 [0208]
請求項95の発明によれば、板状部材と線接触をする角柱形状の支点部材を用いる光偏向装置において、板状部材が斜面に接触状態になったときも、板状部材裏面の全面が斜面に接触するのではなく、凸部位のみに接触するので、接触面積を低減して板状部材の基板への固着を抑制でき、高い信頼性を有する光偏向装置を提供することができる。 According to the present invention 95, in the optical deflecting device using a fulcrum member of prismatic shape the plate-like member and the line contact, even when the plate-like member becomes in contact with the slope, the plate member the entire rear surface instead of contacting the inclined surface, comes into contact only with the convex portion, to reduce the contact area can be suppressed adhesion to the substrate of the plate-like member, it is possible to provide an optical deflecting device having high reliability. また、フォトマスクの作成が容易になるほか、凸部位における帯電の可能性が低くなり、板状部材の固着の確率が低くなる。 Further, in addition to it facilitates creation of a photomask, the lower the possibility of charging in the protrusion, the probability of sticking the plate member is lowered.
【0209】 [0209]
請求項96の発明によれば、板状部材と線接触をする角柱形状の支点部材を用いる光偏向装置において、支点部材の斜面上の凸部位への板状部材の固着現象を予防することができる。 According to the present invention 96, in the optical deflecting device using a fulcrum member of prismatic shape the plate-like member and the line contact is possible to prevent the sticking phenomenon of the plate-like member to the protrusion on the slope of the fulcrum member it can.
【0210】 [0210]
請求項97の発明によれば、入射する光束を最大限利用できる。 According to the invention of claim 97, it can take full advantage of the light beam incident.
【0211】 [0211]
請求項98の発明によれば、板状部材が誘電性を有する部材を有することから、板状部材の電位を誘電性を有する部材に保持することが可能となり、板状部材と支点部材の接触が瞬間的に断たれた場合も板状部材の電位を保持できるので、板状部材の傾斜を安定に駆動できる。 According to the invention of claim 98, since it has a member of the plate-like member has a dielectric, it is possible to hold the potential of the plate-like member to a member having a dielectric, contact of the plate-like member and the fulcrum member There can be held the potential of even a plate-like member when momentarily cut off can be stably driven inclination of the plate-like member.
【0212】 [0212]
請求項99の発明によれば、板状部材の電位を誘電性を有する部材に保持することが容易となり、かつより効率的に誘電することが可能なので、板状部材の傾斜をより安定に低電圧で駆動できる。 According to the invention of claim 99, it becomes easy to hold the potential of the plate-like member to a member having a dielectric, and so more efficiently can be dielectric, low inclination of the plate-like member more stably It can be driven by a voltage.
【0213】 [0213]
請求項100の発明によれば、高い比誘電率を確保しながら高い絶縁性を有しかつ高い機械的強度を有するので、板状部材と電極との電気的短絡を抑制でき、板状部材の変位時の破壊を抑制できる。 According to the invention of claim 100, since high while securing the dielectric constant has a high insulating property and has high mechanical strength, it can be suppressed an electrical short between the plate member and the electrode, the plate-like member the destruction at the time of displacement can be suppressed.
【0214】 [0214]
請求項101の発明によれば、基板に形成された複数の電極と支点部材の頂部の、導電性の部位とが電気的に分離されていることから、板状部材に与える電位は基板上の電極とは独立したものとすることができる。 According to the invention of claim 101, the top portion of the plurality of electrodes and the fulcrum member formed on the substrate, since the site of the electrical conductivity is electrically isolated, the potential applied to the plate member on the substrate it can be made independent of the electrode.
【0215】 [0215]
請求項102の発明によれば、板状部材と電極との間に所定値以上の電位差を与えた場合、両者は少なくともその一部が対向しているので、両者の間に静電引力を働かせることができる。 According to the present invention 102, when a potential difference higher than a predetermined value between the plate member and the electrode, because both at least partially faces exerts an electrostatic attraction between them be able to.
【0216】 [0216]
請求項103の発明によれば、延長基部によって規制部材が基板と接合する部分の接合面積を大きくすることによって、応力等に対し十分な強度が得られるようになる。 According to the invention of claim 103, by the regulating member by an extension base portion to increase the bonding area of ​​the portion to be bonded to the substrate, so that sufficient strength can be obtained against stress or the like.
【0217】 [0217]
請求項104の発明によれば、アレー状に配列した複数の光偏向装置の、互いに隣り合う2個の光偏向装置の規制部材の位置を一致させて、一体化させて形成するので、規制部材の強度の安定化が得られる。 According to the invention of claim 104, a plurality of optical deflecting device which are arranged in an array, to match the position of the regulating member of the two optical deflection devices adjacent to each other, so it formed by integrated regulating member stabilization of the strength.
【0218】 [0218]
請求項105の発明によれば、面積の利用効率が最大になり、すべての隣接する光偏向装置において、互いに規制部材を共有した複合規制部材とすることができる。 According to the invention of claim 105, the utilization efficiency of the area is maximized, in all of the adjacent optical deflecting device can be a composite regulating member sharing the regulating member to each other.
【0219】 [0219]
請求項106の発明によれば、隣接する光偏向装置が無い位置においても、規制部材が基板と接合する接合面積を大きくできるので、規制部材の安定した強度が得られる。 According to the invention of claim 106, even in the absence of adjacent optical deflecting device position, the regulating member can be increased bonding area to be bonded to the substrate, stable strength of the regulating member can be obtained.
【0220】 [0220]
請求項107の発明によれば、隣接する2個の光偏向装置において共有される複合規制部材の基部において、基板との接合面積が大きくできるので安定した強度が得られる。 According to the present invention 107, in the base of the composite regulating member that is shared in two adjacent optical deflecting device, a stable strength can be obtained because the bonding area between the substrate can be increased.
【0221】 [0221]
請求項108の発明によれば、隣接する2個の光偏向装置において共有される複合規制部材の直立部において、基板との接合面積が大きくできるので安定した強度が得られる。 According to the present invention 108, in the upright portion of the composite regulating member that is shared in two adjacent optical deflecting device, a stable strength can be obtained because the bonding area between the substrate can be increased.
【0222】 [0222]
請求項109の発明によれば、高歩留及び高集積及び微細な光偏向装置を同一基板上に製造することができる。 According to the invention of claim 109, it is possible to produce a high yield and high integration and fine light deflection device on the same substrate. また、微細に本発明の光偏向装置を製造できることから板状部材の重量を低減でき、それにより待機時に板状部材が規制部材に衝突した場合の衝撃や、動作時に板状部材が基板に接触した場合の衝撃を低減でき、高い信頼性を有する光偏向装置を提供することができる。 Further, it is possible to reduce the weight of the plate-like member because it can produce an optical deflector of a finely present invention, whereby the impact or in the case where the plate member during standby collides with the regulating member, the contact plate member is to the substrate during operation can be reduced the impact in the case of, it is possible to provide an optical deflecting device having high reliability.
【0223】 [0223]
請求項110の発明によれば、板状部材の裏面の中央部が、支点部材と凹凸の関係で組み合わさるようになり、板状部材が電極から静電引力を受けて傾斜する場合にも、横滑りが生ぜず、中央部が常に一定した位置にあるので、マイクロミラーデバイスとして用いた場合、反射光の方向制御が精度良くできるようになる。 According to the invention of claim 110, the central portion of the rear surface of the plate-like member, will mate with the relationship of the fulcrum member and irregularities, even when the plate member is inclined by receiving the electrostatic attraction from the electrode, sideslip not occur, since the central portion is always in constant position, when used as a micro-mirror device, the direction control of the reflected light will be able to accurately.
【0224】 [0224]
請求項111の発明によれば、高歩留及び高集積及び微細な光偏向アレーを同一基板上に製造することができる。 According to the invention of claim 111, it is possible to produce a high yield and highly integrated and fine light deflection array on the same substrate. また、微細に本発明の光偏向アレーを製造できることから板状部材の重量を低減でき、それにより待機時に板状部材が規制部材に衝突した場合の衝撃や、動作時に板状部材が基板に接触した場合の衝撃を低減でき、高い信頼性を有する光偏向アレーを提供することができる【0225】 Further, it is possible to reduce the weight of the plate-like member because it can produce a light deflection array of finely present invention, whereby the impact or in the case where the plate member during standby collides with the regulating member, the contact plate member is to the substrate during operation [0225] the impact in the case of can be reduced, it is possible to provide an optical deflector array having high reliability
請求項112の発明によれば、光偏向アレーにおいて、板状部材の裏面の中央部が、支点部材と凹凸の関係で組み合わさるようになり、板状部材が電極から静電引力を受けて傾斜する場合にも、横滑りが生ぜず、中央部が常に一定した位置にあるので、マイクロミラーデバイスとして用いた場合、反射光の方向制御が精度良くできるようになる。 According to the present invention 112, in the light deflection array, the central portion of the rear surface of the plate-like member, will mate with the relationship of the fulcrum member and irregularities, the plate-like member receives an electrostatic attraction from the electrode slope also in the case of side-slip is not generated, since the central portion is always in constant position, when used as a micro-mirror device, the direction control of the reflected light will be able to accurately.
【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS
【図1】本発明の第1の実施形態に係る光偏向装置を説明する図2のA−A線断面図である。 1 is a sectional view along line A-A of FIG. 2 illustrating the optical deflection apparatus according to a first embodiment of the present invention.
【図2】図1の平面図である。 Is a plan view of FIG. 1. FIG.
【図3】本発明の第1の実施形態を示す光偏向装置の主要部の状態を説明する説明図である。 3 is an explanatory diagram for explaining a state of a main portion of the optical deflecting device showing a first embodiment of the present invention.
【図4】本発明の第1の実施形態を示す光偏向装置の主要部の他の状態を説明する説明図である。 It is an explanatory view illustrating another state of the main part of the optical deflecting device showing a first embodiment of the present invention; FIG.
【図5】本発明の第2の実施形態を示す光偏向装置の主要部を説明する図6のB−B線断面図である。 5 is a sectional view taken along line B-B of FIG. 6 illustrating a main portion of the optical deflecting device according to a second embodiment of the present invention.
【図6】図5の平面図である。 FIG. 6 is a plan view of FIG. 5.
【図7】本発明の第2の実施形態を示す光偏向装置の主要部を説明する説明図である。 7 is an explanatory view illustrating a main portion of the optical deflecting device according to a second embodiment of the present invention.
【図8】図7の変形例の欠点を説明する図である。 8 is a diagram for explaining the drawbacks of a modification of FIG.
【図9】本発明の第3の実施形態を示す光偏向装置の他の主要部を説明する図10のD−D線断面図である。 9 is a sectional view taken along line D-D of Figure 10 illustrating another principal part of the optical deflecting device showing a third embodiment of the present invention.
【図10】図9の平面図である。 FIG. 10 is a plan view of FIG. 9.
【図11】本発明の第3の実施形態を示す光偏向装置の主要部を説明する拡大斜視図である。 11 is an enlarged perspective view illustrating a main portion of the optical deflecting device showing a third embodiment of the present invention.
【図12】本発明の第3の実施形態の変形例を示す光偏向装置の主要部を説明する拡大斜視図である。 12 is an enlarged perspective view illustrating a main portion of the optical deflecting device showing a modification of the third embodiment of the present invention.
【図13】本発明の第4の実施形態を示す光偏向装置の主要部を説明する図14のE−E線断面図である。 13 is a sectional view taken along line E-E of Figure 14 illustrating a main part of the optical deflecting device showing a fourth embodiment of the present invention.
【図14】図13の平面図である。 14 is a plan view of FIG. 13.
【図15】本発明の第4の実施形態を示す光偏向装置の主要部を説明する拡大斜視図である。 15 is an enlarged perspective view illustrating a main portion of the optical deflecting device showing a fourth embodiment of the present invention.
【図16】本発明の第4の実施形態の変形例を示す光偏向装置の主要部を説明する拡大斜視図である。 16 is an enlarged perspective view illustrating a main portion of the optical deflecting device of a modified example of the fourth embodiment of the present invention.
【図17】本発明の第5の実施形態を示す光偏向装置の主要部を説明する図18のF−F線断面図である。 17 is a sectional view taken along line F-F of Figure 18 illustrating a main part of the optical deflecting device of a fifth embodiment of the present invention.
【図18】図17の平面図である。 Is a plan view of the FIG. 18] FIG. 17.
【図19】本発明の第6の実施形態を示す光偏向装置の主要部を説明する図14のG−G線断面図である。 19 is a second 6 G-G line sectional view of FIG. 14 illustrating the main portion of the optical deflecting device of an embodiment of the present invention.
【図20】図19の平面図である。 Is a plan view of the FIG. 20] FIG. 19.
【図21】本発明の第6の実施形態を示す光偏向装置の主要部を説明する拡大斜視図である。 21 is an enlarged perspective view illustrating a main portion of the optical deflecting device of a sixth embodiment of the present invention.
【図22】本発明の第6の実施形態の変形例を示す光偏向装置の主要部を説明する拡大斜視図である。 22 is an enlarged perspective view illustrating a main portion of the optical deflecting device showing a modification of the sixth embodiment of the present invention.
【図23】本発明の第7の実施形態を示す光偏向装置の主要部を説明する図24のH−H線断面図である。 23 is a second 7 H-H line sectional view of FIG. 24 illustrating the main portion of the optical deflecting device of an embodiment of the present invention.
【図24】図23の平面図である。 Is a plan view of the FIG. 24] FIG. 23.
【図25】本発明の第7の実施形態を示す光偏向装置の主要部を説明する図26のI−I線断面図である。 FIG. 25 is a second 7 I-I line sectional view of FIG. 26 illustrating the main portion of the optical deflecting device of an embodiment of the present invention.
【図26】図25の平面図である。 26 is a plan view of FIG. 25.
【図27】本発明の第7の実施形態を示す光偏向装置の他の主要部を説明する平面図である。 27 is a plan view illustrating another principal part of the optical deflecting device according to a seventh embodiment of the present invention.
【図28】本発明の第7の実施形態を示す光偏向装置の他の主要部の動作を説明する図27のJ−J線断面図である。 28 is a second 7 J-J line sectional view of FIG. 27 illustrating another operation of the main part of the optical deflecting device of an embodiment of the present invention.
【図29】本発明の第7の実施形態を示す光偏向装置の他の主要部の他の動作を説明する図27のJ−J線断面図である。 29 is a second 7 J-J line sectional view of FIG. 27 illustrating another operation of the other main part of the optical deflecting device of an embodiment of the present invention.
【図30】本発明の第7の実施形態を示す光偏向装置の他の主要部の他の動作を説明する図27のK−K線断面図である。 FIG. 30 is a second 7 K-K line sectional view of FIG. 27 illustrating another operation of the other main part of the optical deflecting device of an embodiment of the present invention.
【図31】本発明の第7の実施形態を示す光偏向装置の他の主要部の他の動作を説明する図27のJ−J線断面図である。 31 is a second 7 J-J line sectional view of FIG. 27 illustrating another operation of the other main part of the optical deflecting device of an embodiment of the present invention.
【図32】本発明の第7の実施形態を示す光偏向装置の他の主要部の他の動作を説明する図27のK−K線断面図である。 32 is a second 7 K-K line sectional view of FIG. 27 illustrating another operation of the other main part of the optical deflecting device of an embodiment of the present invention.
【図33】本発明の第7の実施形態を示す光偏向装置の他の主要部の他の動作を説明する図27のJ−J線断面図である。 33 is a second 7 J-J line sectional view of FIG. 27 illustrating another operation of the other main part of the optical deflecting device of an embodiment of the present invention.
【図34】本発明の第7の実施形態を示す光偏向装置の他の主要部の他の動作を説明する図27のK−K線断面図である。 34 is a second 7 K-K line sectional view of FIG. 27 illustrating another operation of the other main part of the optical deflecting device of an embodiment of the present invention.
【図35】本発明の第7の実施形態を示す光偏向装置における静電力の発生を説明する図27のL−L線断面図である。 35 is a second 7 L-L line sectional view of FIG. 27 illustrating the generation of electrostatic forces in the light deflecting apparatus according to an embodiment of the present invention.
【図36】本発明の第8の実施形態を示す光偏向装置の主要部を説明する図37のP−P線断面図である。 36 is a first 8 P-P line sectional view of FIG. 37 illustrating the main portion of the optical deflecting device of an embodiment of the present invention.
【図37】図36の平面図である。 Is a plan view of FIG. 37 FIG. 36.
【図38】本発明の第9の実施形態を示す光偏向装置の主要部を説明する図39のQ−Q線断面図である。 38 is a line Q-Q sectional view of FIG. 39 illustrating the main portion of the optical deflecting device according to the ninth embodiment of the present invention.
【図39】図38の平面図である。 FIG. 39 is a plan view of FIG. 38.
【図40】本発明の第10の実施形態を示す光偏向装置の主要部を説明する図41のR−R線断面図である。 Figure 40 is a line R-R sectional view of FIG. 41 illustrating a main part of an optical deflection apparatus showing a tenth embodiment of the present invention.
【図41】図40の平面図である。 41 is a plan view of FIG. 40.
【図42】本発明の第11の実施形態を示す光偏向装置の主要部を説明する図43のS−S線断面図である。 42 is a first 11 S-S line sectional view of FIG. 43 illustrating the main portion of the optical deflecting device of an embodiment of the present invention.
【図43】図42の平面図である。 43 is a plan view of FIG. 42.
【図44】本発明の第11の実施形態を示す光偏向装置の主要部を説明する説明図である。 FIG. 44 is an explanatory view illustrating a main portion of the optical deflecting device showing an eleventh embodiment of the present invention.
【図45】本発明の第12の実施形態を示す光偏向装置の主要部を説明する図46のT−T線断面図である。 FIG. 45 is a line T-T sectional view of FIG. 46 illustrating the main portion of the optical deflecting device showing a twelfth embodiment of the present invention.
【図46】図45の平面図である。 Is a plan view of Figure 46 Figure 45.
【図47】本発明の第13の実施形態を示す光偏向装置の主要部を説明する図48のU−U線断面図である。 47 is a second 13 U-U sectional view taken along line of FIG. 48 illustrating the main portion of the optical deflecting device of an embodiment of the present invention.
【図48】図47の平面図である。 Is a plan view of the FIG. 48] FIG. 47.
【図49】本発明の第14の実施形態を示す光偏向装置を説明する説明図である。 FIG. 49 is an explanatory diagram for explaining the optical deflection apparatus according to a fourteenth embodiment of the present invention.
【図50】本発明の第15の実施形態を示す光偏向装置を説明する説明図である。 FIG. 50 is an explanatory diagram for explaining the optical deflection apparatus according to a fifteenth embodiment of the present invention.
【図51】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 51 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図52】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 52 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図53】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 53 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図54】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 54 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図55】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 55 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図56】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 56 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図57】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 57 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図58】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 58 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図59】本発明の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 59 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in the embodiment of the present invention.
【図60】本発明の実施形態に示す光偏向装置の製造方法の他の主要部の工程を説明する説明図である。 Figure 60 is an explanatory view illustrating another principal part of the steps of the manufacturing method of the optical deflection apparatus shown in the embodiment of the present invention.
【図61】本発明の実施形態に示す光偏向装置の製造方法の他の主要部の工程を説明する説明図である。 FIG. 61 is an explanatory view illustrating another principal part of the steps of the manufacturing method of the optical deflection apparatus shown in the embodiment of the present invention.
【図62】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 62 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of the present invention.
【図63】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 63 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of the present invention.
【図64】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 64 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of the present invention.
【図65】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 It is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of FIG. 65 the present invention.
【図66】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 66 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of the present invention.
【図67】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 67 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of the present invention.
【図68】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 FIG. 68 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of the present invention.
【図69】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 69 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of the present invention.
【図70】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 It is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of FIG. 70 the present invention.
【図71】本発明の他の実施形態に示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 71 is an explanatory view illustrating a main part of the process of the manufacturing method of the optical deflecting device as shown in another embodiment of the present invention.
【図72】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 72 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図73】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 73 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図74】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 74 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図75】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 75 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図76】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 76 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図77】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 77 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図78】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 78 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図79】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 79 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図80】本発明の更に他の実施形態を示す光偏向装置の製造方法の主要部の工程を説明する説明図である。 Figure 80 is a further explanatory view illustrating a main part of the process of the manufacturing method of the optical deflection apparatus according to another embodiment of the present invention.
【図81】本発明の実施形態に示す光偏向装置を具備する画像形成装置を説明する説明図である。 Figure 81 is an explanatory diagram for explaining an image forming apparatus including the optical deflecting device shown in the embodiment of the present invention.
【図82】本発明の実施形態に示す光偏向装置を具備する画像投影表示装置を説明する説明図である。 Figure 82 is an explanatory diagram for explaining an image projection display apparatus including an optical deflecting device shown in the embodiment of the present invention.
【図83】本発明の実施形態に示す光偏向装置を具備する光伝送装置を説明する説明図である。 Figure 83 is an explanatory diagram for explaining an optical transmission device including an optical deflecting device shown in the embodiment of the present invention.
【図84】本発明の第16の実施形態を示す光偏向装置の主要部を説明するための平面図である。 Figure 84 is a plan view illustrating a main portion of the optical deflecting device showing a sixteenth embodiment of the present invention.
【図85】図84のA−A'線断面図である。 It is a A-A 'sectional view of FIG. 85] FIG 84.
【図86】本発明の第17の実施形態を示す光偏向装置の主要部を説明するための平面図である。 Figure 86 is a plan view illustrating a main portion of the optical deflecting device showing a seventeenth embodiment of the present invention.
【図87】図86のA−A'線断面図である。 Figure 87 is a section along the line A-A 'of FIG 86.
【図88】本発明の第18の実施形態を示す光偏向装置の主要部を説明するための平面図である。 Is a plan view illustrating a main portion of the optical deflecting device showing the eighteenth embodiment of the FIG. 88 the present invention.
【図89】本発明の第19の実施形態を示す光偏向装置の主要部を説明するための平面図である。 Figure 89 is a plan view illustrating a main portion of the optical deflecting device showing a nineteenth embodiment of the present invention.
【図90】図89のA−A'線断面図である。 It is a A-A 'sectional view of FIG. 90] FIG 89.
【図91】本発明の第20の実施形態を説明する図である。 Figure 91 is a diagram for explaining the 20th embodiment of the present invention.
【図92】本発明の第21の実施形態を説明する図である。 It is a diagram for explaining a twenty-first embodiment of Figure 92 the present invention.
【図93】本発明の第22の実施形態を説明する図である。 Is a diagram illustrating an embodiment of the 22 of Figure 93 the present invention.
【図94】本発明の第23の実施形態を説明する図である。 It is a diagram for explaining a twenty-third embodiment of Figure 94 the present invention.
【図95】第23の実施形態に適用する支点部材の変形例を示す図である。 Figure 95 is a diagram showing a modification of the fulcrum member to be applied to the embodiment of the 23.
【図96】本発明の第24の実施形態を説明する図である。 It is a diagram illustrating a 24th embodiment of Figure 96 the present invention.
【図97】本発明の第25の実施形態をを説明する図である。 It is a diagram illustrating a 25th embodiment of Figure 97 the present invention.
【図98】本発明の第26の実施形態をを説明する図である。 Is a diagram illustrating the the 26th embodiment of Figure 98 the present invention.
【図99】図98における光偏向装置2100の、リセット動作時のD−D'線の断面図である。 [Figure 99] of the optical deflecting device 2100 in FIG. 98 is a cross-sectional view of line D-D 'of the reset operation.
【図100】本発明の第27の実施形態を説明する図である。 It is a diagram illustrating a 27th embodiment of Figure 100 the present invention.
【図101】本発明の第28の実施形態を説明する図である。 It is a diagram illustrating a 28th embodiment of Figure 101 the present invention.
【図102】本発明の第29の実施形態を説明する図である。 Figure 102 is a diagram for explaining the 29th embodiment of the present invention.
【図103】本発明の光偏向アレー1200を、画像投影表示装置に適用した例を説明する図である。 A light deflection array 1200 of Figure 103] The present invention, is a diagram illustrating an example of application to the image projection display apparatus.
【図104】本発明の光偏向アレー1200を複写機等の画像形成装置に適用した例を示す図である。 Figure 104 is a diagram showing an example of applying the light deflection array 1200 to the image forming apparatus such as a copying machine of the present invention.
【図105】本発明の光偏向アレー1200を光伝送装置に適用した例を示す図である。 Is a diagram showing an example of applying the optical transmission system an optical deflection array 1200 of Figure 105 the present invention.
【図106】本発明の光偏向装置2100または光偏向アレー1200の製造工程を示す図である。 Figure 106 is a diagram showing a manufacturing process of the optical deflecting device 2100 or the light deflection array 1200 of the present invention.
【図107】第24の実施例の斜面の凸部位を形成する工程を示す図である。 Figure 107 is a diagram showing a step of forming a convex portion of the slope of the twenty-fourth embodiment.
【図108】支点部材の形状について説明するための図である。 Figure 108 is a diagram for illustrating the shape of the fulcrum member.
【図109】支点部材の形状について説明するための図である。 Figure 109 is a diagram for illustrating the shape of the fulcrum member.
【図110】本発明の第25実施形態における凸部位に対する、変形実施形態を示す図である。 For the protrusion in the 25th embodiment of Figure 110] The present invention is a diagram illustrating a modified embodiment.
【図111】本発明の第25実施形態における凸部位に対する、変形実施形態を示す図である。 For the protrusion in the 25th embodiment of Figure 111] The present invention is a diagram illustrating a modified embodiment.
【図112】規制部材の実施形態を示す図である。 Figure 112 is a diagram showing an embodiment of a regulating member.
【図113】規制部材の変形実施形態を説明するための斜視図である。 Figure 113 is a perspective view for explaining a modified embodiment of the regulating member.
【図114】変形実施形態の規制部材を用いた光偏向装置の断面図である。 Figure 114 is a cross-sectional view of an optical deflecting device having an regulating member variant embodiment.
【図115】規制部材の更なる変形実施形態を示す斜視図である。 Figure 115 is a perspective view of a further alternative embodiment of the regulating member.
【図116】変形実施形態の規制部材の使用例を示す断面図である。 Figure 116 is a sectional view showing an example of use of the regulating member variant embodiment.
【図117】変形実施形態の規制部材の使用例を示す断面図である。 Figure 117 is a sectional view showing an example of use of the regulating member variant embodiment.
【図118】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 118 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【図119】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 119 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【図120】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 120 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【図121】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 121 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【図122】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 122 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【図123】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 123 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【図124】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 124 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【図125】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 It is a diagram showing a manufacturing procedure of an optical deflector according to another embodiment of the Figure 125] present invention.
【図126】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 126 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【図127】本発明の他の実施形態に係わる光偏向装置の製造手順を示す図である。 Figure 127 is a view illustrating a manufacturing procedure of an optical deflector according to another embodiment of the present invention.
【符号の説明】 DESCRIPTION OF SYMBOLS
0 光偏向装置1 反射手段1a 反射面1b アルミニウム系金属膜2 板形状部材2a 湾曲形状部2b 導電性領域2c シリコン窒化膜2d 接触部3 基板3a 窪み形状部3b (100)面方位を有するシリコン基板3c 絶縁膜4 支点部材4a 円形状部4a 円柱形状4b 円錐形状部4b 点形状4b 丸形状4c 長方形状部4d,4d ,4d ,4d ,4d 斜面4e 尾根形状部4e 線形状4e 丸形状4f 酸化シリコン膜4g シリコン窒化膜5 笠形状部材5a 1〜n笠形状部材5b 絶縁膜5c 透光性膜5d 酸化シリコン膜5e 遮光性膜5f 酸化クロム膜6,6a ,6a ,6a ,6a 電極6b 保護膜7 犠牲層7a 第1の犠牲層7b 第2の犠牲層7c 第3の犠牲層10 1次元光偏向アレー20,20 0 optical deflecting device 1 reflecting means 1a reflecting surface 1b aluminum metal film 2 plate-shaped member 2a curved portion 2b conductive region 2c silicon nitride film 2d contact portion 3 substrate 3a recess shaped portion 3b (100) plane silicon substrate with an orientation 3c insulating film 4 fulcrum member 4a circular portion 4a 1 cylindrical 4b conical portion 4b 1 point shape 4b 2 rounded 4c rectangular portion 4d, 4d 1, 4d 2, 4d 3, 4d 4 slopes 4e ridge-shaped portion 4e 1 line shape 4e 2 rounded 4f silicon oxide film 4g silicon nitride film 5 umbrella shaped member 5a 1 to n umbrella shaped member 5b insulating film 5c transparent film 5d silicon oxide film 5e light-shielding film 5f chromium oxide film 6, 6a 1, 6a 2, 6a 3, 6a 4 electrode 6b protective film 7 sacrificial layer 7a first sacrificial layer 7b second sacrificial layer 7c third sacrificial layer 10 one-dimensional optical deflector array 20, 20 a,20b 2次元光偏向アレー100 光情報処理装置101 独立駆動手段102 光源103 第1のレンズシステム104 第2のレンズシステム105 投影レンズ106 絞り107 回転カラーホール108 マイクロレンズアレー200 画像形成装置201 画像担持体202 潜像形成手段203 現像手段204 転写手段205 帯電手段206 定着手段207 排紙トレイ208 クリーニング手段300 画像投影表示装置301 光スイッチ手段302 投影スクリーン400 光伝送装置401 光信号入力手段401a,401a ,401a 信号入力伝達ポート402 光スイッチ手段402a,402a 制御装置403 光信号出力手段403a,403a ,403a 信号出力伝達ポート(a ) 基板上支点部材形成工 a, 20b 2-dimensional optical deflector array 100 an optical information processing apparatus 101 independent drive means 102 light source 103 first lens system 104 a second lens system 105 projecting lens 106 aperture 107 rotates collar hole 108 microlens array 200 image forming apparatus 201 images carrier 202 latent image forming unit 203 developing means 204 transfer means 205 charging means 206 fixing means 207 the sheet discharge tray 208 cleaning means 300 image projection display apparatus 301 optical switch means 302 the projection screen 400 the optical transmission device 401 an optical signal input means 401a, 401a 1, 401a 2 signal input transmission port 402 optical switching means 402a, 402a 1 controller 403 optical signal output means 403a, 403a 1, 403a 2 signal output transfer port (a 1) substrate on the fulcrum member formed Engineering (a ) 電極形成工程(a ) 保護膜形成工程(a ) 第1の犠牲層形成工程(a ) 反射手段と板形状部材形成工程(a ) 第2の犠牲層形成工程(a ) 笠形状部材パターン化工程(a ) 笠形状部材形成工程(a ) 犠牲層除去工程(b ) 基板上支点部材形成工程(b ) 電極形成工程(b ) 保護膜形成工程(b ) 第1の犠牲層形成工程(b ) 第3の犠牲層形成工程(b ) 反射手段と板形状部材形成工程(b ) 第2の犠牲層形成工程(b ) 笠形状部材パターン化工程(b ) 笠形状部材形成工程(b 10 ) 犠牲層除去工程(c ) 基板上窪み形状部と支点部材形成工程(c ) 電極形成工程(c ) 保護膜形成工程(c ) 第1の犠牲層形成工程(c ) 反射手段と (A 2) electrode forming step (a 3) a protective film forming step (a 4) the first sacrificial layer forming step (a 5) reflecting means and the plate-shaped member forming step (a 6) the second sacrificial layer forming step ( a 7) umbrella-shaped member patterning step (a 8) umbrella-shaped member forming step (a 9) sacrificial layer removing step (b 1) a substrate on the fulcrum member forming step (b 2) electrode forming step (b 3) a protective film formed step (b 4) first sacrificial layer forming step (b 5) the third sacrificial layer formation step of (b 6) reflecting means and the plate-shaped member forming step (b 7) a second sacrificial layer forming step (b 8) umbrella-shaped member patterning step (b 9) umbrella-shaped member forming step (b 10) the sacrificial layer removing step (c 1) substrate recess-shaped portion and the fulcrum member forming step (c 2) electrode forming step (c 3) a protective film forming step (c 4) the first sacrificial layer forming step and (c 5) reflecting means 形状部材形成工程(c ) 第2の犠牲層形成工程(c ) 笠形状部材パターン化工程(c ) 笠形状部材形成工程(c ) 犠牲層除去工程601 支点部材602 導電部材603 絶縁性膜701 凸部位800 電極801 絶縁層802 導電層1200 光偏向アレー1300 画像投影表示装置1301 光スイッチ手段1400 画像形成装置1402 潜像形成手段1500 光伝送装置1502 光信号入力部1503 1段目の光偏向アレー1505 2段目の光偏向アレー1507 光信号出力部2100 光偏向装置2101 基板2102 規制部材2103 支点部材2104 板状部材2201 誘電体層2202 導電体層2301 電極2401 支点部材2402 接触部位 Shaped member forming step (c 6) the second sacrificial layer forming step (c 7) umbrella-shaped member patterning step (c 8) umbrella-shaped member forming step (c 9) sacrificial layer removing step 601 the fulcrum member 602 conductive member 603 insulating sex film 701 the protrusion 800 electrode 801 insulating layer 802 conductive layer 1200 light deflection array 1300 image projection display apparatus 1301 optical switch means 1400 image forming apparatus 1402 latent image forming unit 1500 optical transmission apparatus 1502 an optical signal input unit 1503 first stage light deflection array 1505 2 stage optical deflection array 1507 optical signal output section 2100 optical deflecting device 2101 substrate 2102 regulating member 2103 fulcrum member 2104 plate-like member 2201 dielectric layer 2202 conductive layer 2301 electrodes 2401 fulcrum member 2402 contact site

Claims (112)

  1. 入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向方法において、入射光を反射する反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を、基板上に固定することなく上記基板上の支点部材上と笠形状の笠形状部材間に形成される空隙内に変位が自由の状態で配置して、上記基板上の上記支点部材の周囲に上記板形状部材と対向して配置した電極に電位を付与して、上記支点部材上に傾斜して載置する上記板形状部材上の上記反射手段で入射光の反射方向を変えて光偏向を行うことを特徴とする光偏向方法。 In light deflection method of performing optical deflection by changing the reflection direction of the incident light to the uniaxial or biaxial direction, a plate-shaped member of a plate shape formed reflecting means with a thin film of a combination constituting a surface that reflects incident light, displaceably in the gap formed between the umbrella-shaped member of the fulcrum member on the umbrella shape on the substrate are placed in a free state without being fixed on the substrate, above around the fulcrum member on the substrate by applying a potential to the electrode which is disposed to face the plate-shaped member, for optical deflection by changing the reflection direction of the incident light by the reflecting means on said plate-shaped member for placing inclined on said fulcrum member light deflection wherein the.
  2. 請求項1に記載の光偏向方法において、電極は、基板上の支点部材の周囲に板形状部材と対向して配列した複数個の各電極に異なる電位を付与して光偏向を行うことを特徴とする光偏向方法。 In light deflection method according to claim 1, the electrode, characterized in that different potentials to a plurality of respective electrodes arranged to face the plate-shaped member around the fulcrum member on the substrate by applying performing optical deflection light deflection method to.
  3. 請求項1又は2に記載の光偏向方法において、電極に異なる電位を付与して、反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を基板上の斜面に接触して、入射光の反射方向を接触する位置で規定して変えて光偏向を行なうことを特徴とする光偏向方法。 In light deflection method according to claim 1 or 2, by applying different potentials to the electrodes, the plate-shaped member of a plate shape formed of a thin film in combination constitute the reflecting means on the surface in contact with the inclined surface on the substrate , light deflection method characterized by changing defines at a position contacting the reflection direction of the incident light performing optical deflection.
  4. 入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向装置において、入射光を反射する反射手段と、上記反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材と、上記板形状部材を固定することなく載置する基板と、上記基板上の傾斜する上記板形状部材の変位時の支点となる支点部材と、上記支点部材上に上記板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材と、上記基板上の上記支点部材の周囲に上記板形状部材の裏面と対向して配置した電極とからなることを特徴とする光偏向装置。 In the optical deflection apparatus for performing varied light deflecting the reflection direction of the incident light in a uniaxial or biaxial direction, a reflection means for reflecting the incident light, a plate shape formed by a thin film of a combination constituting the reflecting means on the surface a plate-shaped member, and the substrate for mounting without fixing the plate-shaped member, a fulcrum member as a fulcrum during the displacement of the plate-shaped member which is inclined on said substrate, said plate-shaped member on said fulcrum member and umbrella-shaped member bevel shape to form a void displaced are arranged in a free state, that consist of a back surface opposite to the arranged electrodes of the plate-shaped member around the fulcrum member on the substrate optical deflecting device according to claim.
  5. 請求項4に記載の光偏向装置において、反射手段の反射面は、平板で形成されていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4, the reflecting surface of the reflecting means, the light deflecting device, characterized in that it is formed by a flat plate.
  6. 請求項4又は5に記載の光偏向装置において、反射手段は、アルミニウム系金属膜で形成されていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4 or 5, reflecting means, optical deflecting device, characterized in that it is formed of an aluminum-based metal film.
  7. 請求項4、5又は6に記載の光偏向装置において、板形状部材は、支点部材と接する個所の面形状に湾曲形状の湾曲形状部からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4, 5 or 6, the plate-shaped member, the optical deflection apparatus characterized by comprising the curved shape of the curved shape to the surface shape of the portion in contact with the fulcrum member.
  8. 請求項4、5、6又は7に記載の光偏向装置において、板形状部材は、外形が円形状であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4, 5, 6 or 7, the plate-shaped member, the optical deflection device, wherein the outer shape is circular.
  9. 請求項4、5、6、7又は8に記載の光偏向装置において、板形状部材は、シリコン窒化膜からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4, 5, 6, 7 or 8, the plate-shaped member, the optical deflecting device, characterized in that a silicon nitride film.
  10. 請求項4、5、6、7、8又は9に記載の光偏向装置において、反射手段又は板形状部材は、導電性を有する導電性領域を有して、上記導電性領域が電極と対向することを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4,5,6,7,8 or 9, the reflection means or plate-shaped member, electrically conductive regions having conductivity, the conductive region is opposed to the electrode optical deflecting device, characterized in that.
  11. 請求項4、5、6、7、8、9又は10に記載の光偏向装置において、基板は、窪み形状の窪み形状部からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4,5,6,7,8,9 or 10, the substrate is an optical deflecting device, characterized in that it consists recess shaped portion of the recess shape.
  12. 請求項4、5、6、7、8、9、10又は11に記載の光偏向装置において、基板は、(100)面方位を有するシリコン基板からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 7, 8, 9, 10 or 11, the substrate is an optical deflector characterized by comprising a silicon substrate having a (100) plane orientation.
  13. 請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と接する個所の面形状が円形状部であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member, said the surface shape of the portion in contact with the plate-shaped member is circular portion optical deflector for.
  14. 請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と点で接する円錐形状部であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member, the light deflector, which is a conical portion in contact with the plate-shaped member and the point apparatus.
  15. 請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と接する面が長方形の長方形状部であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member may be the surface in contact with the plate-shaped member has a rectangular shape of a rectangle light deflection device.
  16. 請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と線で接する尾根の形状からなる尾根形状部であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member is a ridge-shaped portion comprising a ridge-shaped contact with the plate-shaped member and the line optical deflecting device according to claim.
  17. 請求項4、5、6、7、8、9、10、11又は12に記載の光偏向装置において、支点部材は、板形状部材と接する斜面を有することを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 4,5,6,7,8,9,10,11 or 12, the fulcrum member, the light deflecting device, characterized in that it has a slope which is in contact with the plate-shaped member.
  18. 請求項4乃至17の何れか一項に記載の光偏向装置において、支点部材は、酸化シリコン膜又はシリコン窒化膜からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 17, the fulcrum member, the light deflecting device, characterized in that a silicon oxide film or a silicon nitride film.
  19. 請求項4乃至18の何れか一項に記載の光偏向装置において、笠形状部材は、板形状部材の外周に対応して複数個の各笠形状部材を所定間隔を空けて配置したことを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 18, umbrella-shaped member, characterized in that a plurality of the hat-shaped member corresponding to the outer periphery of the plate-shaped member is disposed at a predetermined distance and optical deflection device.
  20. 請求項4乃至18の何れか一項に記載の光偏向装置において、笠形状部材は、板形状部材の外周に対応する全領域に配置したことを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 18, umbrella-shaped member, the optical deflecting device, characterized in that arranged in the entire area corresponding to the outer periphery of the plate-shaped member.
  21. 請求項4乃至20の何れか一項に記載の光偏向装置において、笠形状部材は、絶縁性を有する絶縁膜からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 20, umbrella-shaped member, the optical deflecting device characterized by comprising an insulating film having an insulating property.
  22. 請求項4乃至21の何れか一項に記載の光偏向装置において、笠形状部材は、入射光束に対し透光性を有する透光性膜からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 21, umbrella-shaped member, the optical deflecting device characterized by comprising a transparent film having a light-transmitting property with respect to the incident light beam.
  23. 請求項4乃至22の何れか一項に記載の光偏向装置において、笠形状部材は、酸化シリコン膜からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 22, umbrella-shaped member, the optical deflecting device, characterized in that a silicon oxide film.
  24. 請求項4乃至23の何れか一項に記載の光偏向装置において、笠形状部材は、入射光束に対し遮光性を有する遮光性膜からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 23, umbrella-shaped member, the optical deflection apparatus characterized by comprising the light-shielding film having a light-shielding property with respect to the incident light beam.
  25. 請求項4乃至24の何れか一項に記載の光偏向装置において、笠形状部材は、酸化クロム膜からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 24, umbrella-shaped member, the optical deflecting device, characterized in that chromium oxide film.
  26. 請求項4乃至25の何れか一項に記載の光偏向装置において、電極は、複数個の各電極からなり、板形状部材は電気的に浮いていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 25, the electrode consists of a plurality of the electrodes, the plate-shaped member the optical deflecting device, characterized in that electrically floating.
  27. 請求項26に記載の光偏向装置において、複数個の各電極は、板形状部材の裏面と対向した斜面上に配置したことを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 26, the plurality of the electrodes, the light deflecting device, characterized in that arranged on the inclined surface opposed to the back surface of the plate-shaped member.
  28. 請求項4乃至27の何れか一項に記載の複数個の光偏向装置において、1次元アレー状に配列した1次元光偏向アレーを形成したことを特徴とする光偏向装置。 At a plurality of optical deflecting device according to any one of claims 4 to 27, the optical deflecting device, characterized in that the formation of the one-dimensional light deflection array arranged in one-dimensional array shape.
  29. 請求項4乃至28の何れか一項に記載の複数個の光偏向装置においては、2次元アレー状に配列した2次元光偏向アレーを形成したことを特徴とする光偏向装置。 At a plurality of optical deflecting device according to any one of claims 4 to 28, the light deflecting device, characterized in that the formation of the two-dimensional optical deflector array arranged in a two-dimensional array shape.
  30. 入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う請求項4乃至29の何れか一項に記載の光偏向装置の製造方法において、基板上に支点部材と電極を形成し、堆積して平坦化した第1の犠牲層を介して上記反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、上記第1の犠牲層と上記第2の犠牲層を除去することを特徴とする光偏向装置の製造方法。 In the method for manufacturing an optical deflecting device according to any one of claims 4 to 29 for optical deflection by changing the reflection direction in uniaxial or biaxial direction of the incident light to form a fulcrum member and the electrode on a substrate , deposited to form a plate-shaped member of the flattened first plate shape formed through a sacrificial layer of a thin film in combination constituting the reflecting means on the surface it was in, and a second sacrificial layer was further deposited the hat-shaped member to a predetermined position patterned after patterning, a method of manufacturing an optical deflecting device, and removing the first sacrificial layer and the second sacrificial layer of.
  31. 請求項30に記載の光偏向装置の製造方法において、基板上に支点部材と電極を形成し、上記支点部材を突出させて堆積して平坦化した第1の犠牲層に重ねて堆積して平坦化した第3の犠牲層を介して上記反射手段を表面に組み合わせ構成する薄膜で形成された湾曲形状の湾曲形状部からなる板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、上記第1の犠牲層と上記第2の犠牲層と上記第3の犠牲層を除去することを特徴とする光偏向装置の製造方法。 In the method for manufacturing an optical deflection device of claim 30, the fulcrum member and the electrode formed on the substrate, flat and deposited to overlap the first sacrificial layer is planarized deposited by projecting the fulcrum member phased to form a plate-shaped member made of curved shape of the curved shape formed by a thin film of a combination constituting the reflecting means to the surface via the third sacrificial layer and a second sacrificial layer was further deposited after patterning the umbrella-shaped member to a predetermined position patterned, a method of manufacturing an optical deflecting device, and removing the first sacrificial layer and the second sacrificial layer and the third sacrificial layer .
  32. 請求項30に記載の光偏向装置の製造方法において、基板上に窪み形状部と上記窪み形状部内に斜面からなる支点部材と電極を形成し、堆積して平坦化した第1の犠牲層を介して上記反射手段を表面に組み合わせ構成する薄膜で形成された板形状の板形状部材を形成して、更に堆積した第2の犠牲層とをパターン化した所定の位置に笠形状部材をパターン化した後に、上記第1の犠牲層と第2の犠牲層を除去することを特徴とする光偏向装置の製造方法。 In the method for manufacturing an optical deflection device of claim 30, forming a fulcrum member and the electrode made from a slant into the shaped portion and the recess-shaped portion recesses on the substrate, through the first sacrificial layer is planarized by depositing forming a plate-shaped member of a plate shape formed by a thin film of a combination constituting the reflecting means on the surface Te, patterning the umbrella-shaped member further predetermined position and the second sacrificial layer and patterned deposited later, a method of manufacturing an optical deflecting device, and removing the first sacrificial layer and the second sacrificial layer of.
  33. 請求項30、31又は32に記載の光偏向装置の製造方法において、笠形状部材の複数個の各笠形状部材間を空けて配置した所定間隔から犠牲層を除去することを特徴とする光偏向装置の製造方法。 In the method for manufacturing an optical deflection device of claim 30, 31 or 32, the light deflector, characterized in that the sacrificial layer is removed from the predetermined interval is spaced between a plurality of the umbrella-shaped member bevel-shaped member manufacturing method of the device.
  34. 入射光の反射方向を1軸又は2軸方向に変えて光偏向を行う光偏向装置を使用して光情報の処理を行なう光情報処理装置において、複数の上記請求項4乃至29の何れか一項に記載の光偏向装置と、複数の上記光偏向装置を各々独立に駆動する独立駆動手段とからなることを特徴とする光情報処理装置。 In the optical information processing apparatus for processing optical information using an optical deflecting device performs changing the light deflecting the reflection direction of the incident light in a uniaxial or biaxial direction, any one of a plurality of the claims 4 to 29 optical information processing apparatus comprising: the optical deflecting device, that consist of independent driving means for driving each independently a plurality of the optical deflecting device according to claim.
  35. 電子写真プロセスで光書き込みを行なって画像を形成する画像形成装置において、回動可能に保持されて形成画像を担持する画像担持体と、上記画像担持体上に光書き込みを行なって潜像を形成する上記請求項4乃至29の何れか一項に記載の光偏向装置からなる潜像形成手段と、上記潜像形成手段の上記光偏向装置によって形成された潜像を顕像化してトナー画像を形成する現像手段と、上記現像手段で形成されたトナー画像を被転写体に転写する転写手段。 Forming in an image forming apparatus for forming an image by performing optical writing with the electrophotographic process, an image carrier for carrying a pivotally held by the formed image, the latent image by performing optical writing on the image carrying body a latent image forming means comprising an optical deflector device according to any one of the claims 4 to 29, a toner image by visualizing the formed latent image by the optical deflection device of the latent image forming means developing means and the transfer means for transferring the toner image formed by the developing means onto a transfer body to form.
  36. 画像を投影して表示する画像投影表示装置において、画像投影データの入射光の反射方向を変えて光偏向を行なって画像を投影して表示する請求項4乃至29の何れか一項に記載の光偏向装置からなる光スイッチ手段と、上記光スイッチ手段が投影する画像を表示する投影スクリーンとからなることを特徴とする画像投影表示装置。 In the image projection display device for displaying by projecting an image, by changing the reflection direction of the incident light of the image projection data according to any one of claims 4 to 29 for displaying by projecting an image by performing optical deflection image projection display device comprising an optical switching means comprising a light deflecting device, that the optical switching means comprising a projection screen for displaying an image to be projected.
  37. 光信号の光路を決定して出力して伝送する光伝送装置において、光信号を入力する光信号入力手段と、上記光信号入力手段からの光信号の入射光の反射方向を1軸又は2軸方向に変えて光偏向を行なって、各光信号の光路を決定する請求項4乃至29の何れか一項に記載の光偏向装置からなる光スイッチ手段と、上記光スイッチ手段からの光信号を出力する光信号出力手段とからなることを特徴とする光伝送装置。 In the optical transmission device for transmitting output to determine the optical path of the optical signal, an optical signal input means for inputting a light signal, a uniaxial or biaxial the reflection direction of the incident light of the optical signal from the optical signal input means perform the light deflection instead of the direction, and the optical switching means comprising a light deflecting apparatus according to any one of claims 4 to 29 for determining the optical path of the optical signal, the optical signal from the optical switching means the optical transmission apparatus, comprising the output optical signal output means.
  38. 請求項37に記載の光偏向装置において、光スイッチ手段は、複数段の光偏向装置からなることを特徴とする光伝送装置。 The optical deflection apparatus as claimed in claim 37, the optical switch means, an optical transmission apparatus, comprising the optical deflecting device in a plurality of stages.
  39. 請求項4ないし12のいずれか1つに記載の光偏向装置において、前記支点部材は前記板形状部材と点で接触する4角錐形状であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 4 to 12, the optical deflecting device, wherein the fulcrum member is a quadrangular pyramid shape in contact with the plate-shaped member and the point.
  40. 請求項39に記載の光偏向装置において、前記4角錐形状の支点部材の底面の大きさは、前記板形状部材の大きさにほぼ等しいことを特徴とする光偏向装置。 In the optical deflection device of claim 39, the size of the bottom surface of the fulcrum member of the quadrangular pyramid shape, optical deflecting device, characterized in that approximately equal to the size of the plate-shaped member.
  41. 請求項4ないし16のいずれか1つに記載の光偏向装置において、前記板形状部材が静電引力により変位したとき、前記基板と点または線で接触することにより、入射光束の反射方向を決定することを特徴とする光偏向装置。 Determined in the optical deflecting device according to any one of claims 4 to 16, when the plate-shaped member is displaced by electrostatic attraction, by contacting with the substrate and the point or line, the reflection direction of the incident beam optical deflecting device which is characterized in that.
  42. 入射光の反射方向を複数の軸方向に変えて光偏向を行う光偏向装置において、入射光を反射する反射機能を有する板形状の板形状部材と、上記板形状部材を固定することなく載置する基板と、上記基板上の傾斜する上記板形状部材の変位時の支点となる支点部材と、上記支点部材上に上記板形状部材を変位が自由の状態で配置される空隙を形成する笠形状の笠形状部材と、上記基板上の上記支点部材の周囲に上記板形状部材の裏面と対向して配置した電極とからなることを特徴とする光偏向装置。 In the optical deflection apparatus for performing varied light deflecting the reflection direction of the incident light into a plurality of axially, a plate-shaped member of a plate shape having a reflective function to reflect incident light, placed without fixing the plate-shaped member umbrella shape formed with the substrate, and a fulcrum member as a fulcrum during the displacement of the plate-shaped member which is inclined on the substrate, a void displace said plate-shaped member on said fulcrum member is disposed in a free state to be and umbrella-shaped member, the optical deflecting device, characterized by comprising the above plate-shaped member of the back surface opposite to the arranged electrodes around the fulcrum member on the substrate.
  43. 請求項42に記載の光偏向装置において、前記板形状部材は単層薄膜で形成されていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 42, the optical deflecting device, characterized in that said plate-shaped member is formed of a single layer film.
  44. 請求項42または43に記載の光偏向装置において、反射手段の反射面は、平板で形成されていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 42 or 43, the reflecting surface of the reflecting means, the light deflecting device, characterized in that it is formed by a flat plate.
  45. 請求項42ないし44のいずれか1つに記載の光偏向装置において、反射手段は、アルミニウム系金属膜で形成されていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 44, reflecting means, optical deflecting device, characterized in that it is formed of an aluminum-based metal film.
  46. 請求項42ないし45のいずれか1つに記載の光偏向装置において、板形状部材は、支点部材と接する個所の面形状に湾曲形状の湾曲形状部からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 45, the plate-shaped member, the optical deflection apparatus characterized by comprising the curved shape of the curved shape to the surface shape of the portion in contact with the fulcrum member.
  47. 請求項42ないし46のいずれか1つにに記載の光偏向装置において、板形状部材は、外形が円形状であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 46, the plate-shaped member, the optical deflection device, wherein the outer shape is circular.
  48. 請求項42ないし47のいずれか1つにに記載の光偏向装置において、反射手段又は板形状部材は、導電性を有する導電性領域を有して、上記導電性領域が電極と対向することを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 47, the reflecting means or plate-shaped member, electrically conductive regions having conductivity, that the conductive region is opposed to the electrode optical deflecting device according to claim.
  49. 請求項42ないし48のいずれか1つにに記載の光偏向装置において、基板は、窪み形状の窪み形状部からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 48, the substrate is an optical deflecting device, characterized in that it consists recess shaped portion of the recess shape.
  50. 請求項42ないし49のいずれか1つにに記載の光偏向装置において、基板は、(100)面方位を有するシリコン基板からなることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 49, the substrate is an optical deflector characterized by comprising a silicon substrate having a (100) plane orientation.
  51. 請求項42ないし50のいずれか1つにに記載の光偏向装置において、支点部材は、板形状部材と接する個所の面形状が円形状部であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 50, the fulcrum member, the light deflection device, wherein the surface shape of the portion in contact with the plate-shaped member is circular portion.
  52. 請求項42ないし50のいずれか1つにに記載の光偏向装置において、支点部材は、板形状部材と点で接する円錐形状部であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 50, the fulcrum member, the light deflecting device, characterized in that the conical portion in contact with the plate-shaped member and the point.
  53. 請求項42ないし50のいずれか1つにに記載の光偏向装置において、支点部材は、板形状部材と接する面が長方形の長方形状部であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 50, the fulcrum member, the light deflecting device, characterized in that the surface in contact with the plate-shaped member has a rectangular shape of a rectangle.
  54. 請求項42ないし50のいずれか1つに記載の光偏向装置において、前記支点部材は前記板状部材と点で接触する4角錐形状であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 50, the optical deflecting device, wherein the fulcrum member is a quadrangular pyramid shape in contact with the plate-like member and the point.
  55. 請求項54に記載の光偏向装置において、前記4角錐形状の支点部材の底面の大きさは、前記板状部材の大きさにほぼ等しいことを特徴とする光偏向装置。 In the optical deflection device of claim 54, the size of the bottom surface of the fulcrum member of the quadrangular pyramid shape, optical deflecting device, characterized in that approximately equal to the size of the plate-like member.
  56. 請求項42ないし53のいずれか1つに記載の光偏向装置において、前記板状部材が静電引力により変位したとき、前記基板と点または線で接触することにより、入射光束の反射方向を決定することを特徴とする光偏向装置。 Determined in the optical deflecting device according to any one of claims 42 to 53, when the plate-like member is displaced by electrostatic attraction, by contacting with the substrate and the point or line, the reflection direction of the incident beam optical deflecting device which is characterized in that.
  57. 請求項42ないし56のいずれか1つにに記載の光偏向装置において、支点部材は、板形状部材と接する斜面を有することを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 42 to 56, the fulcrum member, the light deflecting device, characterized in that it has a slope which is in contact with the plate-shaped member.
  58. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記板状部材の電位を前記支点部材 By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer made from the rear surface member having contact points electrically conductive contact with at least said top being movably arranged in the space between the between the substrate and the fulcrum member stopper, of said plate-like member the fulcrum member potential の接触により付与することを特徴とする光偏向装置。 Optical deflecting device, which comprises applying by contact.
  59. 請求項59に記載の光偏向装置において、前記板状部材の上面全域が前記光反射領域であることを特徴とする光偏向装置。 In the optical deflection device of claim 59, the optical deflecting device, wherein the entire upper surface of the plate-like member is in the light reflecting region.
  60. 請求項58または59に記載の光偏向装置において、前記板状部材が誘電性を有する部材からなる誘電体層と、前記導電体層との積層により構成されていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 58 or 59, and a dielectric layer in which the plate-like member is made of a member having a dielectric, optical deflecting device, characterized in that is constituted by lamination of the conductor layer .
  61. 請求項60に記載の光偏向装置において、前記誘電体層の比誘電率が3以上であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 60, the optical deflecting device, wherein the dielectric constant of the dielectric layer is 3 or more.
  62. 請求項60または61に記載の光偏向装置において、前記板状部材の前記誘電体層はシリコン窒化膜により構成されることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 60 or 61, the optical deflecting device, characterized in that the dielectric layer of the plate-like member is constituted by a silicon nitride film.
  63. 請求項58ないし62のいずれか1つに記載の光偏向装置において、前記板状部材の裏面側に対向する前記基板上に電極が複数形成され、該電極は前記支点部材の前記頂部と電気的に分離されていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 58 to 62, electrodes are formed with a plurality on the substrate facing the rear surface side of the plate-like member, the electrode is electrically and said top of said fulcrum member optical deflecting device, characterized in that it is separated.
  64. 請求項63に記載の光偏向装置において、前記板状部材の前記導電体層の少なくとも一部が前記電極と対向していることを特徴とする光偏向装置。 In the optical deflection device of claim 63, the optical deflector, wherein at least a portion of the conductive layer of the plate-like member is opposite to the electrode.
  65. 請求項58ないし64のいずれか1つに記載の光偏向装置において、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が、円錐体であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 58 to 64, wherein said plate-like member in contact fulcrum member and is at approximately point, the fulcrum member, characterized in that it is a cone of light deflection device.
  66. 請求項58ないし64のいずれか1つに記載の光偏向装置において、前記板状部材と前記支点部材とがほぼ点で接しており、かつ前記支点部材が、複数の斜面を有する多角錐体であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 58 to 64, wherein said plate-like member in contact fulcrum member and is at approximately point and the fulcrum member is in a polygonal pyramid having a plurality of inclined surfaces optical deflecting device, characterized in that there.
  67. 請求項58ないし64のいずれか1つに記載の光偏向装置において、前記板状部材と前記支点部材とがほぼ線で接しており、かつ前記支点部材が、斜面を有し頂部が前記板状部材と線接触可能な稜を有する柱状体であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 58 to 64, wherein said plate-like member in contact with the fulcrum member and is substantially linear, and the fulcrum member, a top said plate having an inclined surface optical deflecting device which is a columnar body having a member a line-contactable edge.
  68. 請求項66または67に記載の光偏向装置において、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有することを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 66 or 67, and wherein the inclined surface is formed corresponding to almost the entire area of ​​the plate-like member, having a plurality of electrodes for applying an electrostatic attraction on the slopes optical deflector for.
  69. 請求項68に記載の光偏向装置において、前記板状部材が前記斜面からの静電引力により変位し、前記斜面へ接触することにより光偏向方向が規定されることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 68, wherein the plate-shaped member is displaced by electrostatic attraction from the slope, the light deflecting device, characterized in that the light deflecting direction is defined by contact to the inclined surface.
  70. 請求項68に記載の光偏向装置において、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定されることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 68, is formed with a plurality of convex portions on the slope, the light by the plate-like member is displaced by electrostatic attraction from the slopes, in contact to the convex portion optical deflecting device, characterized in that the deflection direction is defined.
  71. 請求項68ないし70のいずれか1つに記載の光偏向装置において、前記板状部材の近傍の雰囲気がほぼ真空であることを特徴する光偏向装置。 The optical deflection apparatus as claimed in any one of claims 68 to 70, the optical deflecting device which, wherein the atmosphere in the vicinity of the plate-like member is substantially vacuum.
  72. 請求項68ないし70のいずれか1つに記載の光偏向装置において、前記板状部材の近傍の雰囲気が不活性な気体の雰囲気であることを特徴する光偏向装置。 The optical deflection apparatus as claimed in any one of claims 68 to 70, the optical deflecting device which, wherein the atmosphere in the vicinity of the plate-like member is an atmosphere of inert gas.
  73. 請求項63ないし72のいずれか1つに記載の光偏向装置において、前記複数の電極に最大電位差が所定値以上になるようにそれぞれ任意の電位を与え、前記頂部に与える電位を、前記複数の電極に与える電位の最大値と最小値のいずれか一方の値と等しくすることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 63 to 72, the maximum potential difference to the plurality of electrodes are given respective arbitrary potential to be equal to or greater than the predetermined value, the potential applied to said top, said plurality of optical deflecting device which is characterized in that equal to one value of the maximum value and the minimum value of the potential applied to the electrode.
  74. 請求項63ないし72のいずれか1つに記載の光偏向装置において、前記複数の電極のうち、前記板状部材の変位の軸となる前記頂部を通る直線に関して、同じ側に存在する電極において最大電位差が所定値以上になるようにそれぞれ任意の電位を与え、前記頂部に与える電位を、前記複数の電極に与える電位の最大値と最小値の略中間値とすることを特徴とする光偏向装置。 Maximum in the optical deflecting device according to any one of claims 63 to 72, among the plurality of electrodes, with respect to a straight line passing through the top as the displacement of the axis of the plate-like member, the electrodes on the same side potential difference giving each arbitrary potential to be equal to or greater than the predetermined value, the potential applied to the top, a light deflecting device, characterized in that a substantially intermediate value between the maximum value and the minimum value of the potential applied to the plurality of electrodes .
  75. 請求項58ないし74のいずれか1つに記載の光偏向装置において、前記導電体層はアルミニウム系金属膜であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 58 to 74, the optical deflecting device, wherein the conductive layer is an aluminum-based metal film.
  76. 請求項75に記載の光偏向装置において、前記光反射領域は前記導電体層が兼ねることを特徴とする光偏向装置。 In the optical deflection device of claim 75, wherein the light reflection region is optical deflecting device, wherein the conductive layer also functions as.
  77. 請求項58ないし76のいずれか1つに記載の光偏向装置を複数、任意の基板上に1次元又は2次元アレー状に配置したことを特徴とする光偏向アレー。 Light deflection array, wherein placing the optical deflecting device according the plurality, in a one-dimensional or two-dimensional array form on any substrate in any one of claims 58 to 76.
  78. 請求項58ないし76のいずれか一つに記載の光偏向装置、または請求項77に記載の光偏向アレーを、画像データに従って入射光の反射方向を切り替える光スイッチ手段として用い、スクリーン上に前記画像データによる画像を投影することを特徴とする画像投影表示装置。 Optical deflection apparatus as claimed in any one of claims 58 to 76, or a light deflection array according to claim 77, used as an optical switching means for switching the reflection direction of the incident light in accordance with image data, the image on the screen image projection display apparatus characterized by projecting the image of data.
  79. 請求項78に記載の画像投影表示装置において、前記光偏向装置の前記板状部材が中立位置にあるときの光反射面の法線方向が、重力の作用方向とほぼ同方向になるように配置することを特徴とする画像投影表示装置。 In the image projection display apparatus according to claim 78, the normal direction of the plate-like light reflecting surface when the member is in the neutral position of the light deflecting device, arranged to be substantially in the same direction as the direction of gravity image projection display apparatus, characterized by.
  80. 請求項77に記載の光偏向アレーを、ライン露光型の潜像形成手段として用いることを特徴とする画像形成装置。 Light deflection array of claim 77, the image forming apparatus, which comprises using as the latent image forming unit of a line exposure type.
  81. 請求項80に記載の画像形成装置において、前記光偏向装置の前記板状部材が中立位置にあるときの光反射面の法線方向が、重力の作用方向とほぼ同方向になるように配置することを特徴とする画像形成装置。 The image forming apparatus according to claim 80, the normal direction of the plate-like light reflecting surface when the member is in the neutral position of the light deflecting device, arranged to be substantially in the same direction as the direction of gravity image forming apparatus characterized by.
  82. 請求項58ないし76のいずれか1つに記載の光偏向装置を光スイッチ手段として用い、光情報の伝送を、1個の入出力ポートと複数の入出力ポート中の任意のポートとの間で切り替えることを特徴とする光伝送装置。 Used as an optical switch unit optical deflecting device according to any one of claims 58 to 76, the transmission of light information, between one of the input and output ports and any port in the plurality of input and output ports optical transmission apparatus and switches.
  83. 請求項77に記載の光偏向アレーを光スイッチ手段として用い、光情報の伝送を、一方の入出力部の複数の入出力ポートの中の任意のポートと他方の入出力部の複数の入出力ポート中の任意のポートとの間でそれぞれ切り替えることを特徴とする光伝送装置。 Used as an optical switch unit light deflection array of claim 77, the transmission of light information, a plurality of input and output of any port and the other of the input and output portions of the plurality of input and output ports of one output unit optical transmission apparatus and switches each between any port in the port.
  84. 請求項83に記載の光伝送装置において、前記光偏向装置の前記板状部材が中立位置にあるときの光反射面の法線方向が、重力の作用方向とほぼ同方向になるように配置することを特徴とする光伝送装置。 In the optical transmission device according to claim 83, the normal direction of the plate-like light reflecting surface when the member is in the neutral position of the light deflecting device, arranged to be substantially in the same direction as the direction of gravity the optical transmission apparatus, characterized in that.
  85. 任意の基板上に、少なくとも、前記支点部材を形成する工程と、複数の電極及び前記支点部材の導電性を有する部材をパターン化して形成する工程と、第1の犠牲層を堆積及び平坦化する工程と、少なくとも1層からなる前記板状部材をパターン化する工程と、第2の犠牲層を堆積する工程と、第1の犠牲層及び第2の犠牲層をパターン化する工程と、該パターン化された第1及び第2の犠牲層の任意の個所に前記規制部材をパターン化する工程と、該パターン化された第1及び第2の犠牲層をエッチングにより除去する工程と、を有することを特徴とする請求項58ないし76のいずれか1つに記載の光偏向装置の製造方法。 Any substrate, at least, a step of forming the fulcrum member, depositing and planarizing a step of forming and patterning the member, a first sacrificial layer having conductivity of the plurality of electrodes and said fulcrum member a step, a step of patterning a step of patterning said plate-like member made of at least one layer, depositing a second sacrificial layer, the first sacrificial layer and the second sacrificial layer of the patterned having a step of patterning the regulating member at any point of the first and second sacrificial layers of, removing by etching the first and second sacrificial layers, which are the patterned, the the method of manufacturing an optical deflecting device according to any one of claims 58 to 76, characterized in.
  86. 任意の基板上に複数の区画を、1次元または2次元状に密着させて形成し、各区画毎に、少なくとも、前記支点部材を形成する工程と、複数の電極及び前記支点部材の導電性を有する部材をパターン化して形成する工程と、第1の犠牲層を堆積及び平坦化する工程と、少なくとも1層からなる前記板状部材をパターン化する工程と、第2の犠牲層を堆積する工程と、第1の犠牲層及び第2の犠牲層をパターン化する工程と、該パターン化された第1及び第2の犠牲層の任意の個所に前記規制部材をパターン化する工程と、該パターン化された第1及び第2の犠牲層をエッチングにより除去する工程と、を有することを特徴とする請求項77に記載の光偏向アレーの製造方法。 A plurality of compartments to any substrate, in close contact with the one-dimensional or two-dimensionally formed, for each partition, at least, a step of forming the fulcrum member, a conductive plurality of electrodes and said fulcrum member forming and patterning a member having, depositing and planarizing the first sacrificial layer, a step of patterning said plate-like member made of at least one layer, depositing a second sacrificial layer of When a step of patterning the first sacrificial layer and the second sacrificial layer in a step of patterning the regulating member at any point of the first and second sacrificial layers are the patterned, the pattern the first and the manufacturing method of the optical deflection array of claim 77, the second sacrificial layer, characterized in that it and a step of removing by etching the reduction.
  87. 少なくとも、複数の電極上に薄膜を堆積させる工程と、該薄膜をパターン化し凸部位を形成する工程を有することを特徴とする請求項110に記載の光偏向装置の製造方法。 At least, the manufacturing method of the optical deflection device of claim 110 comprising the steps of depositing a thin film on a plurality of electrodes, and a step of forming a convex portion patterned the thin film.
  88. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記基板上に静電引力を作用させる By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer, the contact points in contact with at least the top portion of the back surface is a member having conductivity, is movably arranged in the space between the between the substrate and the fulcrum member stopper, static on the substrate the action of electrostatic attraction めの複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が円錐体であり、該円錐体の頂部が球状であることを特徴とする光偏向装置。 A plurality of electrodes of fit, the potential of the plate-like member is imparted by contact with the fulcrum member, and the plate-like member and the fulcrum member is in contact with approximately point, the fulcrum member in the cone There, the optical deflecting device, wherein the top portion of the cone is spherical.
  89. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記基板上に静電引力を作用させる By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer, the contact points in contact with at least the top portion of the back surface is a member having conductivity, is movably arranged in the space between the between the substrate and the fulcrum member stopper, static on the substrate the action of electrostatic attraction めの複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が、円錐体と、該円錐体底面の下に該底面の径と同径の底面を有する円柱とを合体させた形状であることを特徴とする光偏向装置。 A plurality of electrodes of fit, the potential of the plate-like member is imparted by contact with the fulcrum member, and the plate-like member and the fulcrum member is in contact with approximately point, the fulcrum member is cone When the light deflecting device, characterized in that the bottom of the cone bottom is a shape obtained by combining the a cylinder with a diameter and the bottom surface of the same diameter of the bottom surface.
  90. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記基板上に静電引力を作用させる By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer, the contact points in contact with at least the top portion of the back surface is a member having conductivity, is movably arranged in the space between the between the substrate and the fulcrum member stopper, static on the substrate the action of electrostatic attraction めの複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が円錐台形状であることを特徴とする光偏向装置。 A plurality of electrodes of fit, the potential of the plate-like member is imparted by contact with the fulcrum member, and the fulcrum member and the plate-shaped member is in contact with approximately point, the fulcrum member is frustoconical optical deflecting device, characterized in that it.
  91. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記基板上に静電引力を作用させる By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer, the contact points in contact with at least the top portion of the back surface is a member having conductivity, is movably arranged in the space between the between the substrate and the fulcrum member stopper, static on the substrate the action of electrostatic attraction めの複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が円錐台と、該円錐台底面の下に該底面の径と同径の底面を有する円柱とを合体させた形状であることを特徴とする光偏向装置。 A plurality of electrodes of fit, the potential of the plate-like member is imparted by contact with the fulcrum member, and the fulcrum member and the plate-shaped member is in contact with approximately point, the fulcrum member and the truncated cone the light deflection device, characterized in that the bottom of the frustoconical bottom is a shape obtained by combining the a cylinder with a diameter and the bottom surface of the same diameter of the bottom surface.
  92. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記基板上に静電引力を作用させる By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer, the contact points in contact with at least the top portion of the back surface is a member having conductivity, is movably arranged in the space between the between the substrate and the fulcrum member stopper, static on the substrate the action of electrostatic attraction めの複数の電極を有し、前記板状部材の電位は前記支点部材との接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、前記支点部材が円柱であることを特徴とする光偏向装置。 A plurality of electrodes of fit, the potential of the plate-like member is the imparted by contact with the fulcrum member, the said plate-like member in contact fulcrum member and is at approximately point, the fulcrum member is a cylindrical optical deflecting device, characterized in that.
  93. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記板状部材の電位は前記支点部材 By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer made from the rear surface member having contact points electrically conductive contact with at least said top being movably arranged in the space between the between the substrate and the fulcrum member stopper, of said plate-like member the fulcrum member potential の接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、かつ前記支点部材が、複数の斜面を有する多角錐体であり、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有し、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定され、前記凸部位は、電極上に複数の帯状に配列されていることを特徴とする光偏向装置。 It is granted by the contact, the said plate-like member in contact fulcrum member and is at approximately point and the fulcrum member is a polygonal pyramid having a plurality of inclined surfaces, almost the entire area of ​​the slope the plate-like member formed to correspond to, a plurality of electrodes for applying an electrostatic attraction on the slope, it is formed with a plurality of convex parts on the inclined surface, electrostatic from the plate-like member, wherein the beveled surface displaced by attraction, the optical polarization direction by contacting the convex portion is defined, the convex portion, the light deflecting device, characterized by being arranged in a plurality of strip-like on the electrode.
  94. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記板状部材の電位は前記支点部材 By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer made from the rear surface member having contact points electrically conductive contact with at least said top being movably arranged in the space between the between the substrate and the fulcrum member stopper, of said plate-like member the fulcrum member potential の接触により付与され、前記板状部材と前記支点部材とがほぼ点で接しており、かつ前記支点部材が、複数の斜面を有する多角錐体であり、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有し、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定され、前記凸部位は複数の帯状に配列され、該凸部位の周囲の平坦部に前記電極を形成することを特徴とする光偏向装置。 It is granted by the contact, the said plate-like member in contact fulcrum member and is at approximately point and the fulcrum member is a polygonal pyramid having a plurality of inclined surfaces, almost the entire area of ​​the slope the plate-like member formed to correspond to, a plurality of electrodes for applying an electrostatic attraction on the slope, it is formed with a plurality of convex parts on the inclined surface, electrostatic from the plate-like member, wherein the beveled surface displaced by attraction, the light polarization direction is defined by contact to the convex portion, the convex portion is arranged in a plurality of band-like, and forming the electrode on the flat part of the periphery of the convex portion light deflection device.
  95. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記板状部材の電位は前記支点部材 By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer made from the rear surface member having contact points electrically conductive contact with at least said top being movably arranged in the space between the between the substrate and the fulcrum member stopper, of said plate-like member the fulcrum member potential の接触により付与され、前記板状部材と前記支点部材とがほぼ線で接しており、かつ前記支点部材が、斜面を有し頂部が前記板状部材と線接触可能な稜を有する柱状体であり、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有し、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定され、前記凸部位は、電極上に複数の帯状に配列されていることを特徴とする光偏向装置。 It is granted by the contact, the said plate-like member in contact with the fulcrum member and is substantially linear, and the fulcrum member is in columnar body top having an inclined surface having the plate-like member and a line-contactable edges There, the slope is formed corresponding to almost the entire area of ​​the plate-like member has a plurality of electrodes for applying an electrostatic attraction on the slope, a plurality of convex portions are formed on the inclined surface , the plate-like member is displaced by electrostatic attraction from the slope, the light deflecting direction is defined by contact to the convex portion, the convex portion is that it is arranged in a plurality of strip on the electrode optical deflecting device according to claim.
  96. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記板状部材の電位は前記支点部材 By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer made from the rear surface member having contact points electrically conductive contact with at least said top being movably arranged in the space between the between the substrate and the fulcrum member stopper, of said plate-like member the fulcrum member potential の接触により付与され、前記板状部材と前記支点部材とがほぼ線で接しており、かつ前記支点部材が、斜面を有し頂部が前記板状部材と線接触可能な稜を有する柱状体であり、前記斜面が前記板状部材のほぼ全域に対応して形成され、前記斜面上に静電引力を作用させるための電極を複数有し、前記斜面上に複数の凸部位が形成されており、前記板状部材が前記斜面からの静電引力により変位し、前記凸部位へ接触することにより光偏向方向が規定され、前記凸部位は複数の帯状に配列され、該凸部位の周囲の平坦部に前記電極を形成することを特徴とする光偏向装置。 It is granted by the contact, the said plate-like member in contact with the fulcrum member and is substantially linear, and the fulcrum member is in columnar body top having an inclined surface having the plate-like member and a line-contactable edges There, the slope is formed corresponding to almost the entire area of ​​the plate-like member has a plurality of electrodes for applying an electrostatic attraction on the slope, a plurality of convex portions are formed on the inclined surface , the plate-like member is displaced by electrostatic attraction from the slope, the light deflecting direction is defined by contact to the convex portion, the convex portion is arranged in a plurality of strip-shaped, flat around the convex portion optical deflecting device, which comprises forming the electrode section.
  97. 請求項88ないし96のいずれか1つに記載の光偏向装置において、前記板状部材の上面全域が前記光反射領域であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 88 to 96, the optical deflecting device, wherein the entire upper surface of the plate-like member is in the light reflecting region.
  98. 請求項88ないし97のいずれか1つに記載の光偏向装置において、前記板状部材が誘電性を有する部材からなる誘電体層と、前記導電体層との積層により構成されていることを特徴とする光偏向装置。 Wherein the optical deflecting device according to any one of claims 88 to 97, a dielectric layer in which the plate-like member is made of a member having a dielectric, that is constituted by lamination of the conductor layer and optical deflection device.
  99. 請求項98に記載の光偏向装置において、前記誘電体層の比誘電率が3以上であることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 98, the optical deflecting device, wherein the dielectric constant of the dielectric layer is 3 or more.
  100. 請求項98または99に記載の光偏向装置において、前記板状部材の前記誘電体層はシリコン窒化膜により構成されることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 98 or 99, the optical deflecting device, characterized in that the dielectric layer of the plate-like member is constituted by a silicon nitride film.
  101. 請求項88ないし100のいずれか1つに記載の光偏向装置において、前記電極は、前記板状部材の裏面側に対向する位置に設けられ、該電極は前記支点部材の前記頂部と電気的に分離されていることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 88 to 100, wherein the electrode is provided at a position opposed to the back surface side of the plate-like member, the electrode is the and electrically top of the fulcrum member optical deflecting device, characterized in that it is separated.
  102. 請求項101に記載の光偏向装置において、前記板状部材の前記導電体層の少なくとも一部が前記電極と対向していることを特徴とする光偏向装置。 The optical deflection apparatus as claimed in claim 101, the optical deflector, wherein at least a portion of the conductive layer of the plate-like member is opposite to the electrode.
  103. 請求項88ないし102のいずれか1つに記載の光偏向装置において、前記規制部材は頂部のストッパの突出方向とは逆方向に突出した延長基部を下端部に有することを特徴とする光偏向装置。 The optical deflection apparatus as claimed in any one of claims 88 to 102, wherein the regulating member is an optical deflecting device, characterized in that it comprises a lower end portion of the extension base projecting in a direction opposite to the projecting direction of the stopper top .
  104. 光反射領域を有する部材に与えられる電位に応じた静電引力により変位することにより、該光反射領域に入射する光束が反射方向を変えて偏向される光偏向装置において、基板と、複数の規制部材と、支点部材と、板状部材とを有し、前記複数の規制部材はそれぞれ上部にストッパを有し、前記基板の複数の端部にそれぞれ設けられ、前記支点部材は導電性を有する部材で構成される頂部を有し、前記基板の上面に設けられ、前記板状部材は固定端を持たず、上面に前記光反射領域を有し、少なくとも一部に導電性を有する部材からなる導電体層を有し、裏面の少なくとも前記頂部と接する接触点が導電性を有する部材からなり、前記基板と前記支点部材と前記ストッパの間の空間内で可動的に配置され、前記板状部材の電位を前記支点部材 By displacing by electrostatic attraction in accordance with the given potential member having a light reflecting region, an optical deflecting device a light beam incident on the light reflection region is deflected by changing the reflection direction, and a substrate, a plurality of regulation a member, and the fulcrum member, and a plate-like member has a stopper at the top each of the plurality of regulating members, respectively provided at a plurality of ends of the substrate, members having the fulcrum member is conductive have constructed apex in, provided on the upper surface of the substrate, the plate-like member has no fixed end, having said light reflecting region on the upper surface, the conductive consisting member having conductivity in at least a part has a body layer made from the rear surface member having contact points electrically conductive contact with at least said top being movably arranged in the space between the between the substrate and the fulcrum member stopper, of said plate-like member the fulcrum member potential の接触により付与する光偏向装置を複数、任意の基板上に1次元又は2次元アレー状に配置し、前記光偏向装置の前記基板を円形とし、隣接する基板同士の前記規制部材の位置を一致させ、両規制部材を一体化して複合規制部材とすることを特徴とする光偏向アレー。 A plurality of optical deflecting devices for applying a contact, arranged in a one-dimensional or two-dimensional array form on any substrate, the substrate is circular of the optical deflecting device, matching the position of the regulating member of the substrate adjacent to is allowed, the light deflection array, characterized in that a composite regulating member by integrating both regulating members.
  105. 請求項104に記載の光偏向アレーにおいて、前記規制部材もしくは複合規制部材を、前記基板の円周上に等間隔に6個配置し、前記光偏向装置を2次元的に最稠密に配列したことを特徴とする光偏向アレー。 In the optical deflection array of claim 104, that the regulating member or the composite regulating member, equidistantly arranged six on the circumference of the substrate, an array of the light deflection device two-dimensionally most densely light deflection array, wherein.
  106. 請求項104または105に記載の光偏向アレーにおいて、前記規制部材は頂部のストッパの突出方向とは逆方向に突出した延長基部を下端部に有することを特徴とする光偏向アレー。 In the optical deflection array of claim 104 or 105, the regulating member is an optical deflection array, wherein the protrusion direction of the stopper top having an extended base portion projecting in the opposite direction to the lower end.
  107. 請求項104ないし106のいずれか1つに記載の光偏向アレーにおいて、前記複合規制部材は、隣接する2個の基板の境界線上に、両基板に等分に跨って基板上に横たわる平板状の基部の対向する両端に、直立部を設け、両直立部の頂部に、前記境界線と逆方向に突出するストッパをそれぞれ設けた形であることを特徴とする光偏向アレー。 In the optical deflection array according to any one of claims 104 to 106, the composite regulating member, on the boundary of two adjacent substrates, plate-like lying on the substrate across equally on both substrates the opposite ends of the base, the upright portion is provided, at the top of both the uprights, the light deflection array, wherein the stopper projecting to the boundary line and the opposite direction in the form provided respectively.
  108. 請求項104ないし106のいずれか1つに記載の光偏向アレーにおいて、前記複合規制部材は、隣接する2個の基板の境界線上に、両基板に等分に跨って基板上に直立部を設け、該直立部の頂部に、双方向に突出するストッパを有することを特徴とする光偏向アレー。 In the optical deflection array according to any one of claims 104 to 106, the composite regulating member, on the boundary of two adjacent substrates, provided upright portion on the substrate across equally on both substrates , the top of the straight Tatsubu, light deflection array and having a stopper projecting in both directions.
  109. 任意の基板上に、少なくとも、前記支点部材を形成する工程と、複数の電極及び前記支点部材の導電性を有する部材をパターン化して形成する工程と、第1の犠牲層を堆積及び平坦化する工程と、少なくとも1層からなる前記板状部材をパターン化する工程と、第2の犠牲層を堆積する工程と、第1の犠牲層及び第2の犠牲層をパターン化する工程と、該パターン化された第1及び第2の犠牲層の任意の個所に前記規制部材をパターン化する工程と、該パターン化された第1及び第2の犠牲層をエッチングにより除去する工程と、を有することを特徴とする請求項88ないし103のいずれか1つに記載の光偏向装置の製造方法。 Any substrate, at least, a step of forming the fulcrum member, depositing and planarizing a step of forming and patterning the member, a first sacrificial layer having conductivity of the plurality of electrodes and said fulcrum member a step, a step of patterning a step of patterning said plate-like member made of at least one layer, depositing a second sacrificial layer, the first sacrificial layer and the second sacrificial layer of the patterned having a step of patterning the regulating member at any point of the first and second sacrificial layers of, removing by etching the first and second sacrificial layers, which are the patterned, the the method of manufacturing an optical deflecting device according to any one of claims 88 to 103, characterized in.
  110. 請求項109に記載の光偏向装置の製造方法において、前記支点部材の頂部は、前記平坦化された第1の犠牲層より突出していることを特徴とする光偏向装置の製造方法。 In the method for manufacturing an optical deflection device according to claim 109, the top of the fulcrum member, the manufacturing method of the optical deflecting device, characterized in that protrudes from the first sacrificial layer in which the flattened.
  111. 任意の基板上に複数の区画を、1次元または2次元状に密着させて形成し、各区画毎に、少なくとも、前記支点部材を形成する工程と、複数の電極及び前記支点部材の導電性を有する部材をパターン化して形成する工程と、第1の犠牲層を堆積及び平坦化する工程と、少なくとも1層からなる前記板状部材をパターン化する工程と、第2の犠牲層を堆積する工程と、第1の犠牲層及び第2の犠牲層をパターン化する工程と、該パターン化された第1及び第2の犠牲層の任意の個所に前記規制部材をパターン化する工程と、該パターン化された第1及び第2の犠牲層をエッチングにより除去する工程と、を有することを特徴とする請求項104ないし108のいずれか1つに記載の光偏向アレーの製造方法。 A plurality of compartments to any substrate, in close contact with the one-dimensional or two-dimensionally formed, for each partition, at least, a step of forming the fulcrum member, a conductive plurality of electrodes and said fulcrum member forming and patterning a member having, depositing and planarizing the first sacrificial layer, a step of patterning said plate-like member made of at least one layer, depositing a second sacrificial layer of When a step of patterning the first sacrificial layer and the second sacrificial layer in a step of patterning the regulating member at any point of the first and second sacrificial layers are the patterned, the pattern the first and the manufacturing method of the optical deflection array according to any one of claims 104 to 108 the second sacrificial layer and having a step of removing by etching, the which is of.
  112. 請求項111に記載の光偏向アレーの製造方法において、前記支点部材の頂部は、前記平坦化された第1の犠牲層より突出していることを特徴とする光偏向アレーの製造方法。 In the method for manufacturing an optical deflection array of claim 111, the top of the fulcrum member, the flattened method of manufacturing the optical deflection array, characterized in that protrudes from the first sacrificial layer.
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