JP2011133530A - Device and array for deflecting light, image projection display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light deflection device that can guide a first polarized light or a second polarized light to a desired direction according to a pixel without generating heat due to transmitted light. <P>SOLUTION: The light deflection device includes: a substrate; a plurality of regulation members which are provided on each of a plurality of edges of the substrate and have stoppers on each of top parts of the regulation members; a fulcrum member provided on an upper surface of the substrate with a top part; a plate member having a light-reflecting region, not having a fixed end and being movably arranged in a space generated by the substrate, the fulcrum member and the stopper, wherein at least a part of the plate member has a conductive layer comprised of a member having conductivity; and a plurality of electrodes which are provided on the substrate and substantially face the conductive layer of the plate member. The plate member is declined and shifted with the support member as a center by electrostatic attraction, whereby light incident on the light reflection region changes its reflection direction to perform light deflection. Polarizing elements of a wire grid type are provided by connecting them directly onto the stopper or stereoscopically onto an upper part of the stopper. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an optical deflection device, an optical deflection array, and an image projection display device that change the direction of outgoing light with respect to incident light.

  First, the terms “light deflection” and “polarization” that are frequently used in the present specification will be defined as follows. “Light deflection” means changing the direction of light. Specifically, the direction of reflected light may change when a mirror such as a plate-like member constituting the light deflection device changes the tilt direction. Applicable. On the other hand, “polarized light” means a change in properties as a wave when light is captured as an electromagnetic wave. For example, it means light whose vibration is biased in a specific direction with respect to natural light whose vibration direction is random. Specifically, the wire grid type polarizing element reflects light whose vibration direction is parallel to the wire and transmits light perpendicular to the wire.

In general, as a display device (corresponding to the light deflection apparatus in the present invention) used in an image projection display device such as a projection projector, a digital theater system, and a rear projection television, a transmissive liquid crystal device, a reflective liquid crystal device, a digital micromirror There are devices, and projectors using Texas Instruments digital micromirror devices (generally called DMD) are widely used in the market because of their high light utilization efficiency and large aperture ratio. This DMD is a two-dimensional array of optical switches having a reflection mirror on the top of a torsion beam. In the optical system of a projector using this DMD, a digital light processing method (generally called DLP method) invented by Texas Instruments. Is adopted). This DLP system includes a single-plate type using one DMD and a three-plate type using three DMDs. This single-plate optical system is a well-known literature, “A MEMS-Based Projction Display” PROCEEDINGS OF THE In IEEE. VOL.86, NO.8, AUGUST 1998, pages 1687-1704, LJ Hornbeck et al. As for the three-plate optical system, “Using ZEMAX Image Analysis and user-defined surfaces for projection lens design and evaluation for Digital Light Processing ^TM projection systems” Optical Engineering, Vol. 39 No. 7, July 2000, pages 1802-1807.

  Although there are projectors with the above-mentioned several methods, in recent years, projectors and digital theater systems that project and display stereoscopic images using these projectors have been commercialized. As a system for projecting and displaying a stereoscopic image, there are mainly a time-division method using a time-division type DLP projector and liquid crystal shutter glasses, and a polarization method using two projectors including the liquid crystal method and polarization glasses as well as the DLP method. There is. In Patent Document 1 (Japanese Patent Laid-Open No. 10-153755), both systems are disclosed as a conventional example. In the time division system, glasses with independent liquid crystal shutters are attached to the left and right eyes, and the time is displayed on the screen. The right-eye image and left-eye image are alternately displayed in a divided manner, and the shutter control device operates the right-eye and left-eye shutters according to the image timing. The right-eye image is displayed for the right eye, and the left-eye image is displayed for the left eye. The polarization method uses two projectors that project an image for the right eye and an image for the left eye, and one projector uses a polarization filter to project each projection light. In the horizontal direction, the other projector is polarized in the vertical direction and projected onto the screen. This is polarized glasses for the right eye in the vertical direction, the left eye in the horizontal direction, the right eye for the right eye, and the left eye for the left eye. for Image is obtained by to be able to see.

  However, in the case of the time division method, the shutter control device operates the liquid crystal shutters for the right eye and the left eye of the glasses in accordance with the image timing, so that a connection code is necessary and troublesome, and a liquid crystal shutter without a connection cord is provided. Glasses are expensive, and it is difficult for a large number of people to enjoy stereoscopic images at the same time. In the case of the polarization method, two projectors for projecting the image for the right eye and the image for the left eye are necessary, the price cannot be kept low, and the projection images of the two projectors must match. There was a problem that adjustment was difficult and it was not easy for anyone to set.

  Therefore, as a device that can use inexpensive polarized glasses and can project and display a stereoscopic image with one projector, the light emitted from the light source is separated into S and P waves by a holographic polarization beam splitter, A stereoscopic image projection display device configured to guide the separated S wave and P wave to different pixels of the DMD and simultaneously project an image constituted by the S wave and an image constituted by the P wave, It is disclosed in Patent Document 2 (Japanese Patent No. 2999953). In addition, by using a rotating polarization color wheel, linearly polarized light with mutually orthogonal polarization vectors is configured to be guided to the DMD for each color of RGB in a time-sharing manner, and this DMD is time-division operated by the polarization color wheel. A three-dimensional image display device configured to be able to visually recognize a three-dimensional display with polarized glasses by controlling in conjunction with the above is disclosed in Patent Document 1.

  However, an apparatus using a holographic polarizing beam splitter has the advantage that the DMD is a single plate type and requires only a relatively low driving frequency, but the direction of polarized light emitted by the holographic polarizing beam splitter is accurately applied to each pixel of the DMD. Therefore, there is a problem that strict optical adjustment is required, and that such a holographic polarization beam splitter is very expensive, so that the price of the apparatus cannot be reduced. Furthermore, when colorization is attempted, light of different hues cannot be guided equally due to the characteristics of the hologram, so it is necessary to provide a holographic polarization beam slitter with a pixel structure corresponding to each color of RGB, thereby further There was a problem that the manufacturing cost increased. On the other hand, an apparatus using a polarization color wheel has a problem that the drive frequency becomes high because the color wheel has a polarization selection function and the DMD needs to be time-division driven for each color and polarization of light. It was. In addition, since it is necessary to transmit light while rotating the polarization color wheel, the polarization axis of the color polarization filter tilts with the rotation of the polarization color wheel, so that the polarization axis of linearly polarized light does not become constant and may swing. For this reason, when viewing a stereoscopic image, there is a possibility that a double image is produced in which the left and right parallax images are visually recognized mixed with each other.

  In view of the above problems, an apparatus for projecting and displaying a stereoscopic image with a single projector using a single-plate DMD and without using a holographic polarizing beam splitter or a polarizing color wheel is disclosed in Patent Document 3 No. 2006-58339). In Patent Document 3, each mirror corresponding to a pixel of a DMD which is a display device is configured by a mirror capable of first polarization or a mirror capable of second polarization, and a mirror capable of first polarization. And mirrors capable of second polarization are alternately arranged in stripe lines, or alternately in vertical and horizontal adjacent positions. The three-dimensional image projection display device of Patent Document 3 splits light from a light source into each color in a time-series manner through a non-polarized color wheel, and sequentially enters it into a single plate DMD as a display device. Let The DMD can reflect the first polarized light and the second polarized light toward the projection lens in accordance with the three-dimensional pixel information, and the first polarized light image and the second polarized light image on the screen through the projection lens. Can be displayed simultaneously. When viewing this image using polarized glasses with different polarizing filters attached to the parts corresponding to the left and right eyes, particularly in the case of an image by the first polarized light and an image by the second polarized light that constitute the parallax image, It can be viewed as a stereoscopic image.

  Unlike the invention of Patent Document 2, the stereoscopic image projection display device of Patent Document 3 does not require polarization separation in front of the display device, so that adjustment of the projection position of polarized light is not necessary, and adjustment work of the device is unnecessary. Becomes easier. In addition, since it is not necessary to project the image by the first polarized light and the image by the second polarized light in a time-sharing manner, the driving frequency of the DMD can be reduced. Further, the single-plate type DMD can simultaneously form an image by the first polarized light and an image by the second polarized light, and thus there are advantages such as reduction in size and weight.

  However, in Patent Document 3, non-polarized incident light is incident on individual mirrors constituting the DMD, and light having a certain vibration direction is reflected by a polarization function such as a wire grid formed on each mirror part. Thus, light in other vibration directions is transmitted. The reflected light is used to project and display an image by changing the reflection direction by switching operation of each element of the DMD which is a display device (light deflecting operation in the present invention). Since the light is scattered below and lowers the contrast and the image quality, it is necessary to form a light absorbing layer such as a black resin layer or a non-reflective multilayer film under the polarization function and absorb it by the mirror portion. Generally speaking, since half of the illumination light from the light source is absorbed by the DMD mirror array, the heat generation is enormous, and a rapid cooling mechanism such as a powerful fan is required. It is difficult to configure. In addition, the light absorption layer and the non-reflective multilayer film constituting the mirror are severely deteriorated, making it difficult to view for a long time, and it becomes difficult to use the image projection display device for a long time. Furthermore, since the wire grid is formed in the mirror portion, the mirror is warped or not smooth due to the stress of the wire depending on the arrangement of the metal wires, and the pixel separation of the displayed image is not uniform and the image quality is deteriorated. There is a problem. Furthermore, when a black resin layer is used as the light absorption layer, a film thickness of several μm is required. Considering the inclination of the mirror by about ± 20 °, the distance between the pixels is set so that adjacent mirrors do not collide with each other. It is necessary to widen and it is difficult to integrate fine mirrors at a narrow pitch. Further, when a non-reflective multilayer film is used as the light absorbing layer, it is difficult to control the film stress distribution, and a smooth mirror cannot be obtained, which may cause a deterioration in image quality. Furthermore, when the mirror is configured as described above, the weight of the mirror portion increases, the load on the support portion fixing the mirror or the hinge supporting the mirror is large, and the support portion or hinge is destroyed due to continuous use. It is easy to change the display device frequently.

  Hereinafter, with reference to Patent Document 4 (Japanese Patent No. 4307813), an optical deflection method, an optical deflection apparatus, a manufacturing method thereof, and an applied product thereof, which the inventors have previously invented, will be described. When Patent Document 4 is a conventional example, the optical deflecting device of the conventional example is characterized in that a plate-like member having no fixed portion, that is, a mirror is confined in a space, and the optical deflection is performed by tilting and shifting around a fulcrum part by electrostatic attraction. In this patent document 4, an optical deflecting device that deflects light in a uniaxial or biaxial direction is disclosed. Patent Document 4 discloses an optical deflecting device and an optical deflecting method (that is, a driving method) having respective structures when a contact potential is applied to a plate-like member that is a mirror and when it is electrically floating.

  The typical structure and driving method will be described below. FIG. 9 schematically shows an example of the optical deflection apparatus disclosed in Patent Document 4. This optical deflecting device is an optical deflecting device for applying a contact potential to a plate-like member that is a mirror, and has a structure for deflecting light in two directions and four directions. 9A is a top view of the optical deflector, FIG. 9B is a cross-sectional view taken along the line AA ′, FIG. 9C is a cross-sectional view taken along the line BB ′, and FIG. Is a cross-sectional view along the line CC ′. In FIG. 9, a plurality of light deflection devices are extracted and described as one light deflection device of a light deflection array arranged two-dimensionally. In FIG. 9, a substrate 101, a plurality of regulating members 102, a fulcrum member 103, a plate member 104, and a plurality of electrodes 105a, 105b, 105c, and 105d are provided. Each of the plurality of regulating members 102 has a stopper at the top, and is provided at each of a plurality of ends of the substrate 101. The fulcrum member 103 has a top portion made of a conductive member and is provided on the upper surface of the substrate 101. The plate-like member 104 does not have a fixed end, has a light reflection region on the upper surface, has a conductor layer made of a conductive member at least in part, and a contact point in contact with at least the top of the back surface is conductive. And is movably disposed in a space between the substrate 101, the fulcrum member 103, and the stopper, and applies a potential of the plate member by contact with the fulcrum member. The plurality of electrodes 105 a, 105 b, 105 c, and 105 d are provided on the substrate, respectively, and have a configuration that substantially faces the conductor layer of the plate-like member 104. Reference numeral 106 denotes a contact portion arranged for the purpose of reducing the contact area when the plate-like member 104 comes into contact with the substrate 101 due to an inclination displacement, and is not disclosed in Patent Document 4. Details of the contact portion 106 are described in Patent Document 5 (Japanese Patent Laid-Open No. 2005-202257).

  The optical deflection device is tilted in directions 1 to 4 as shown in FIGS. 9C and 9D by a combination of potentials applied to the electrodes 105a, 105b, 105c, and 105d and the fulcrum member 103. Accordingly, incident light incident from a direction perpendicular to the substrate surface, for example, can be reflected in four directions of direction 1 to direction 4 accordingly. Conversely, incident light incident from the maximum four directions can be reflected in the direction perpendicular to the substrate. In FIG. 10, the relationship between the combination of voltage application currently disclosed by patent document 4 and the inclination direction of a plate-shaped member is collectively described as a table | surface. As shown in FIG. 10, light deflection in the above four directions is possible by combining two potentials of X (V) and 0 (V) with a total of five electrodes. See Reference 4.

The conventional optical deflecting device has the following advantages. That is,
Since the tilt angle is determined by the contact of the fulcrum member, the substrate, and the plate-like member, the control of the mirror deflection angle is easy and stable.
Since the thin plate member is reversed at high speed by applying different potentials to the opposing electrodes with the fulcrum member as the center, the response speed can be increased.
-Since the plate-like member does not have a fixed end, it can be driven at a low voltage with little long-term deterioration without deformation such as torsional deformation.
・ Since a fine and lightweight plate-like member can be formed by a semiconductor process, there is little impact due to collision with the stopper, and there is little long-term deterioration.
-The ON / OFF ratio of reflected light (S / N ratio in image equipment, contrast ratio in video equipment) can be improved by arbitrarily determining the configuration of the regulating member, plate-like member, and light reflection area.
-Since semiconductor processes and devices can be used, miniaturization and integration are possible at low cost.
-By arranging a plurality of electrodes around the fulcrum member, uniaxial two-dimensional light deflection and biaxial three-dimensional light deflection are possible.

Next, FIG. 11 shows another embodiment of a conventional optical deflection device disclosed in Patent Document 6 (Japanese Patent Laid-Open No. 2005-202257). FIG. 11A is a top view of another form of the conventional optical deflection device, and FIG. 11B is a cross-sectional view along the line DD ′. In FIG. 11, a plurality of light deflection devices are extracted and described as one light deflection device of a light deflection array arranged two-dimensionally. In FIG. 11, a substrate 101, a plurality of regulating members 102, a fulcrum member 103, a plate-like member 104, and a plurality of electrodes 105a and 105b are provided. Each of the plurality of regulating members 102 has a stopper at the top, and is provided at each of a plurality of ends of the substrate 101. The fulcrum member 103 has a top portion made of a conductive member and is provided on the upper surface of the substrate 101. The plate-like member 104 does not have a fixed end, has a light reflection region on the upper surface, has a conductor layer made of a conductive member at least in part, and a contact point in contact with at least the top of the back surface is conductive. And is movably disposed in the space between the substrate 101, the fulcrum member 103, and the stopper, and applies the potential of the plate member by contact with the fulcrum member. The plurality of electrodes 105a and 105b are provided on the substrate, respectively, and have a configuration in which they substantially face the conductor layer of the plate-like member 104. In particular, the optical deflection apparatus of FIG. 11 is an optical deflection apparatus in which the fulcrum member 103 has a ridge-like apex and performs a one-axis two-dimensional optical deflection operation in which the optical deflection direction is limited to directions 1 and 2. Note that, in the DD ′ cross-sectional view of FIG. 11B, the stopper configured on the regulating member 102 is arranged to bridge between the divided regulating members. Further, the contact portion 106 described in the conventional example in FIG. 9 is simply omitted, and is actually configured similarly to FIG.
The light deflecting device is inclined and displaced in directions 1 and 2 by a combination of potentials applied to the electrodes 105a and 105b and the fulcrum member 103, and accordingly incident light incident from a direction perpendicular to the substrate surface, for example, in direction 1 And can be reflected in direction 2.

  Next, a conventional example of an optical deflection array in which a plurality of optical deflection devices shown in FIG. 11 are arranged in a two-dimensional array will be described with reference to FIG. FIG. 12A is a top view of a conventional optical deflection array, and FIG. 12B is a cross-sectional view along DD ′. In FIG. 12A, conventional optical deflecting devices are arranged in m rows and n columns, and each optical deflecting device performs an optical deflecting operation in accordance with a drive signal supplied individually in accordance with image information. At this time, since the optical deflecting device can be driven at a low voltage due to its characteristics, a low-voltage voltage can also be used as a drive signal to be supplied. The drive signal is stored in a semiconductor memory circuit configured immediately below the optical deflecting device, and causes all the optical deflecting devices to perform an optical deflecting operation simultaneously. For the method of driving the optical deflection array and the configuration of the semiconductor memory circuit, refer to Japanese Patent Application Laid-Open No. 2006-133394.

  Next, a conventional example of an image projection display device using the above-described conventional light deflection array will be described with reference to FIG. In FIG. 13, reference numeral 1201 denotes a white light source such as a halogen lamp or a xenon lamp. 1202 is a rod lens for shaping light source light. Reference numeral 1103 denotes a color wheel having color filters of at least three primary colors, and 1104 denotes a conventional light deflection array. Reference numeral 1105 denotes a control chip that controls the light deflection direction of each of the light deflection devices that constitute the light deflection array. Reference numeral 1107 denotes a projection lens, and 1106 denotes a light absorbing plate. This conventional optical deflection apparatus is an optical deflection apparatus that performs a one-axis two-dimensional optical deflection operation, and colors incident light incident from one direction in a target direction (ON direction) and a direction other than the target (OFF direction). Light is deflected according to information. Briefly describing this optical system, white light from the white light source 1201 is shaped through the rod lens 1202 and enters the color wheel 1103. The light source light passing through the color wheel becomes light L having red, blue and green colors in time sequence. The light L illuminates the light deflection array 1104. Each of the optical deflectors constituting the optical deflection array 1104 performs an optical deflection operation in accordance with image information, that is, color information, reflects the reflected light Lon in a target direction, for example, a direction perpendicular to the array surface, and guides it to the projection lens 1107. . The color information is projected and displayed on the screen 1302 through the projection lens. The color information projected in time sequence is color-synthesized by the afterimage phenomenon of the observer's eyes, resulting in an image having various colors. The light Loff reflected in the direction other than the intended purpose is absorbed by the light absorbing plate.

  The conventional optical deflecting device has many advantages by using the plate-like member 104 having no fixing portion as a mirror, and an optical deflecting array and an image projection display device using the optical deflecting device also have such advantages. Has more advantages. However, on the other hand, the light incident on the plate member 104 of the light deflector is either unpolarized light or single polarized light polarized before the light deflector, and the light deflector does not have a polarizing element. The reflected light from the plate member is also non-polarized light or single polarized light. Therefore, if the polarization color wheel disclosed in Patent Document 1 and the holographic polarization beam splitter disclosed in Patent Document 2 are not provided, the polarization can be reduced with a single projector (the image projection display device in the present invention). It is impossible to display and appreciate stereoscopic images using glasses.

  The present invention solves the problems found in Patent Documents 1 to 6, and does not generate heat due to the transmitted light found in Patent Document 3, and the first polarized light or the second polarized light depending on the pixel. It is an object to provide an optical deflecting device capable of guiding the light in a desired direction. In addition, by forming a pixel with the optical deflection device, an optical deflection array that can guide an image by the first polarized light and an image by the second polarized light to one projection lens by one optical deflection array. Is to provide. In addition, by using the optical deflection array as a display device, the image projection is small and inexpensive, can display a high-definition stereoscopic image on a single image projection display device, and can use inexpensive polarized glasses. It is to provide a display device.

  In order to achieve such an object, the optical deflecting device of the present invention includes a substrate, a plurality of restricting members, a fulcrum member, a plate-like member, and a plurality of electrodes. It has a stopper on the top and is provided at each of the plurality of ends of the substrate. The fulcrum member has a top and is provided on the top surface of the substrate. The plate-like member has a light reflecting area and is fixed. It has a conductor layer made of a member having no end and having conductivity at least in part, and is movably disposed in a space between the substrate, the fulcrum member, and the stopper, and the plurality of electrodes are formed on the substrate. Each is provided on the top and has a configuration that is substantially opposite to the conductor layer of the plate-like member, and the plate-like member is inclined and displaced by electrostatic attraction around the fulcrum member, so that it enters the light reflecting region. In an optical deflector that deflects light by changing the direction of reflection , Directly or stopper top on stopper sterically connect comprises a polarizing element, and wherein the polarizing element is a wire grid polarization element.

  In the optical polarizing device of the present invention, the wire grid type polarizing element has a grid structure in which a plurality of strip-shaped metal layers are arranged in parallel, and the grid structure causes the vibration direction as an electromagnetic wave to be incident on the incident light. Light parallel to the extension direction is reflected, and light whose oscillation direction as incident electromagnetic waves is perpendicular to the extension direction of the band is transmitted.

  In the light polarizing device of the present invention, the width of the band-shaped metal layer is determined by a width that allows favorable polarization depending on the wavelength of incident light, and is 100 nm or less when the incident light is visible light of 300 to 800 nm. It is characterized by that.

  In the optical polarization device of the present invention, the stopper is configured in a flat plate shape so as to substantially cover the entire surface of the optical deflection device, and an opening is formed at a corner of the optical deflection device, and the opening is a plate shape. It functions as a window for introducing an etching species when the sacrificial layer formed on the upper and lower surfaces of the member is removed by etching.

  In the optical polarization device of the present invention, the stopper is configured in a bridge shape, and a transparent flat plate is connected to the stopper via a column-shaped connection post. The transparent flat plate substantially covers the entire surface of the optical deflection device. It is configured in a flat plate shape, and an opening is formed at the corner of the light deflection device. The opening is used for etching and removing the sacrificial layer formed on the upper and lower surfaces of the plate member and the upper portion of the stopper. It functions as a window for introducing etching species.

  The light polarization array of the present invention is a light deflection array in which a plurality of light deflection devices of the present invention are arranged in a one-dimensional or two-dimensional array, and includes a wire grid type polarization element capable of the first polarization. The deflecting device and the optical deflecting device including the wire grid type polarizing element capable of the second polarization are alternately arranged.

  An image projection display device of the present invention has the light deflection array of the present invention, and has at least a light source that illuminates the light deflection array and a projection lens that projects reflected light from the light deflection array. The image composed of the first polarized light and the image composed of the second polarized light by the reflected light are simultaneously guided to a single projection lens and projected onto the screen.

  According to the present invention, it is possible to provide an optical deflecting device that can guide the first polarized light or the second polarized light in a target direction according to a pixel without generating heat by transmitted light. In addition, by forming a pixel with the optical deflection device, an optical deflection array that can guide an image by the first polarized light and an image by the second polarized light to one projection lens by one optical deflection array. Can provide. In addition, by using the optical deflection array as a display device, the image projection is small and inexpensive, can display a high-definition stereoscopic image on a single image projection display device, and can use inexpensive polarized glasses. A display device can be provided.

It is a figure which shows the structural example of the optical deflection | deviation apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram which shows the example of the wire grid type polarizing element of the optical deflection apparatus which concerns on Embodiment 1 of this invention. It is a figure explaining each process of the manufacturing method of the optical deflection device concerning Embodiment 1 of the present invention. It is a figure which shows the structural example of the optical deflection | deviation apparatus which concerns on Embodiment 2 of this invention. It is a figure explaining each process of the manufacturing method of the optical deflection apparatus concerning Embodiment 2 of the present invention. It is a figure which shows the structural example of the optical deflection | deviation array which concerns on Embodiment 3 of this invention. It is a figure which shows the structural example of the optical deflection | deviation array which concerns on Embodiment 4 of this invention. It is a perspective view which shows the structural example of the image projection display apparatus which concerns on Embodiment 5 of this invention. It is a figure which shows typically the example of the optical deflection apparatus currently disclosed by patent document 4. FIG. It is a table | surface which shows the relationship between the combination of the voltage application currently disclosed by patent document 4, and the inclination direction of a plate-shaped member. It is a figure which shows the example of the optical deflection apparatus currently disclosed by patent document 6. FIG. It is a figure which shows the example of the optical deflection | deviation array which has arrange | positioned the optical deflection | deviation apparatus shown in FIG. 11 in two-dimensional array shape. It is a perspective view which shows the structure of the image projection display apparatus using the conventional optical deflection | deviation array.

  Hereinafter, an optical deflection apparatus (Embodiments 1 and 2), an optical deflection array (Embodiments 3 and 4), and an image projection display apparatus (Embodiment 5) according to an embodiment of the present invention will be described.

  First, an optical deflecting device according to an embodiment of the present invention will be described. The plate-like member constituting the light deflecting device of one embodiment of the present invention may be either electrically floating or when a potential is applied in a contact manner via a fulcrum member. . In addition, either a light deflection device that performs a one-axis two-dimensional light deflection operation or a light deflection device that performs a two-axis three-dimensional light deflection operation may be used, but in the following description, for the sake of convenience, a fulcrum member is used. A description will be given of an optical deflecting device that performs a one-axis two-dimensional optical deflecting operation when a potential is applied in a contact manner.

  An optical deflecting device according to an embodiment of the present invention includes a substrate, a plurality of regulating members, a fulcrum member, a plate member, and a plurality of electrodes. Each of the plurality of restricting members has a stopper at the top, and is provided at each of a plurality of ends of the substrate. The fulcrum member has a top and is provided on the upper surface of the substrate. The plate-like member has a light reflection region, does not have a fixed end, has a conductor layer made of a member having conductivity at least partially, and is in a space between the substrate, the fulcrum member, and the stopper. Is movably arranged. The plurality of electrodes are provided on the substrate, respectively, and have a configuration that substantially faces the conductor layer of the plate-like member. In such a configuration, the light deflecting device according to an embodiment of the present invention changes the reflection direction of light incident on the light reflection region by the plate member being inclined and displaced by electrostatic attraction around the fulcrum member. An optical deflecting device for deflecting light, characterized in that a polarizing element is provided directly on the stopper or three-dimensionally connected to the upper part of the stopper, and the polarizing element is a wire grid type polarizing element. Hereinafter, an optical deflection apparatus according to an embodiment of the present invention will be described in order using Embodiments 1 and 2, respectively.

[Embodiment 1]
FIG. 1 shows Embodiment 1 of the present invention. FIG. 1A is a top view of the optical deflecting device of the present embodiment, and FIG. 1B shows the present embodiment excluding the stopper member 602 and the wire grid type polarizing element 601 for easy understanding. FIG. 1C is a cross-sectional view taken along the line DD ′. Also in FIG. 1, a plurality of optical deflection devices are extracted and described as one optical deflection device of an optical deflection array arranged two-dimensionally.

  In FIG. 1, the optical deflection apparatus of this embodiment includes a substrate 101, a plurality of regulating members 102, a fulcrum member 103, a plate-like member 104, and a plurality of electrodes 105a and 105b.

  The plurality of regulating members 102 are provided at a plurality of end portions of the substrate 101, respectively, and have stoppers 602 at the top.

  The fulcrum member 103 has a top portion made of a conductive member, and is provided on the upper surface of the substrate 101.

  The plate-like member 104 does not have a fixed end, has a light reflection region on the upper surface, and has a conductor layer made of a member having conductivity at least in part. Further, the plate-like member 104 is a member having conductivity at the contact point at least contacting the top of the back surface, and is movably disposed in a space between the substrate 101, the fulcrum member 103, and the stopper 602, and is a plate-like member. The potential 104 is applied by contact with the fulcrum member 103.

  The plurality of electrodes 105 a and 105 b are respectively provided on the substrate 101 and have a configuration in which they are substantially opposed to the conductor layer of the plate-like member 104. Similarly to the conventional example of FIG. 11, the fulcrum member 103 also has a ridge-like top in the optical deflecting device of FIG. Further, in the present embodiment, the length of one side of the plate-like member 104 and the height of the fulcrum member 103 are designed, and the plate-like member 104 has a structure that can be tilted and displaced up to ± 15 degrees around the fulcrum member 103. . The regulating member 102 may have a hollow structure.

  Further, in FIG. 1, the contact portion 106 described in the conventional example of FIG. 9 is simply omitted, and is actually configured similarly to FIG. In this embodiment, unlike the conventional example of FIG. 11, the stopper 602 is not configured in a bridge shape as in Embodiment 2 described later, but is configured in a flat plate shape so as to substantially cover the entire surface of the optical deflector. The optical deflector has an opening 603 at the corner. The opening 603 is a window for introducing an etching species when the sacrificial layer formed on the upper and lower surfaces of the plate-like member 104 is removed by etching.

  On the stopper 602 configured in a flat plate shape, a wire grid type polarizing element 601 which is a feature of the present embodiment is configured. The wire grid type polarizing element 601 has a grid structure in which a plurality of strip-shaped metal layers (that is, wires) are arranged in parallel. With this grid structure, in the incident light, light whose vibration direction as an electromagnetic wave is parallel to the band extension direction is reflected, and light whose vibration direction as incident electromagnetic wave is perpendicular to the band extension direction is transmitted. The width of the band-shaped metal layer is determined by the width that allows favorable polarization depending on the wavelength of incident light, and is preferably 100 nm or less when the incident light is visible light of 300 to 800 nm. In this case, the pitch between the metal layers is preferably 200 nm or less. The polarization in the wire grid type polarization element is shown schematically in FIG. Reference numeral 701 denotes a transparent substrate, and reference numeral 702 denotes a strip-shaped metal layer, which is configured in a grid shape. When non-polarized light 703 enters at an angle from above the metal layer 702 configured in a grid shape with respect to the wire grid type polarizing element, the light 704 having a vibration direction parallel to the extending direction of the band-shaped metal layer is reflected. Is done. On the other hand, light 705 having a vibration direction perpendicular to the extending direction of the band-shaped metal layer is transmitted through the substrate 701. Since the wire grid type deflection element is provided in the light deflection apparatus of this embodiment shown in FIG. 1, polarized incident light can be incident on a plate-like member that is a mirror.

  The process will be specifically described to clarify the effect of this embodiment. In FIG. 1C, non-polarized incident light 703 enters from above the optical deflector. Then, in the stopper 602 in which the wire grid type polarizing element 601 is configured, the polarized light 704 parallel to the extending direction of the band-shaped metal layer is reflected and processed as unnecessary light (specifically, in the image projection display device). It is absorbed by the installed light absorber). On the other hand, the polarized light 705 perpendicular to the extending direction of the band-shaped metal layer passes through the transparent stopper 602 and enters the plate member 104. When the surface of the plate-like member 104 constituting the light reflection region is inclined in the direction 2, the polarized light 705 is reflected in the direction normal to the optical deflector substrate surface. This reflected light is the ON light in the figure. On the contrary, when the plate-like member 104 in which the light reflection region is formed is inclined with the surface thereof directed in the direction 1, the polarized light 705 is reflected in the OFF direction in the figure, which is a direction greatly inclined from the ON light. This OFF light is processed as unnecessary light in the same manner as the polarized light 704 parallel to the extending direction of the band-shaped metal layer. The driving method for inclining the plate-like member in the target direction is the same as the conventional example. In this embodiment, the relative positional relationship between the inclination direction (direction 1 and direction 2) of the plate-like member 104 and the extension direction of the band-like metal layer, that is, the extension direction of the band-like metal layer and the plate-like member. It is not particularly defined that the inclination direction (direction 1 and direction 2) of 104 is vertical.

  In this embodiment, with the above-described configuration, incident light parallel to the band-shaped metal layer is reflected by the wire grid type polarizing element, and only incident light perpendicular to the band-shaped metal layer is incident on the plate-shaped member. Can do. Thereby, the polarization of the light source light as disclosed in Patent Document 1 and Patent Document 2 is performed immediately before entering the plate-like member that is a mirror without having a holographic polarization beam splitter or a polarization color wheel. This can be performed arbitrarily for each optical deflecting device without adjusting the position as shown in Patent Document 2. Further, the incident light is not absorbed in the optical deflecting device and is reflected as unnecessary light, or is reflected in the ON direction (target direction for image display guided to the projection lens) or the OFF direction. It is possible to eliminate the deterioration of the mirror quality due to heat generation as seen in FIG.

  Next, a method for manufacturing the optical deflection apparatus of this embodiment will be described with reference to FIG. Note that the steps omitted in the description of FIG. 3 are the same as those of the above-described conventional example disclosed in Patent Document 4 (Japanese Patent No. 4307813). FIG. 3 is a cross-sectional view taken along the line D-D ′ (FIG. 1C) of the optical deflecting device of this embodiment.

  In FIG. 3A, a fulcrum member 103 and a plurality of electrodes 105 a and 105 b are formed on a substrate 101. Further, in FIG. 3 (a), the contact portion 106 described in the conventional example of FIG. 9 is simply omitted, and is actually configured similarly to FIG.

  Next, in FIG. 3B, the first sacrificial layer 801, the plate-like member 104, and the second sacrificial layer 802 are sequentially formed on the substrate 101. In the present embodiment, the first sacrificial layer 801 and the second sacrificial layer 802 are made of a novolac resin by spin coating and planarized by heat treatment or the like. The plate-like member 104 is formed by laminating an aluminum-based metal film as a highly reflective film and a titanium nitride film as a highly elastic film by sputtering or the like, and is patterned so as to correspond to pixels. In this embodiment, an organic film is used as the film type of the sacrificial layer, but a silicon film or a silicon oxide film may be used. Moreover, the deposition method of each film is not necessarily limited.

  Next, in FIG. 3C, the first sacrificial layer 801 and the second sacrificial layer 802 are patterned using the same photomask. This patterning is an opening 803 for constituting the regulating member 102 and is performed by plasma etching using an oxygen-based gas.

  Next, in FIG. 3D, a transparent insulating film such as a silicon oxide film is deposited.

  Next, in FIG.3 (e), the metal film for comprising the wire grid type polarizing element 601 which is the characteristics of this embodiment is deposited, and is patterned using a photomask. An aluminum-based metal film was used as this metal film. Next, although the state of patterning is not clear in the figure, the regulating member 102 and the stopper 602 are configured by patterning the silicon oxide film deposited in FIG. 3D using a photomask. As described above, the stopper 602 is formed in a flat plate shape so as to substantially cover the entire surface of the optical deflection apparatus, and has an opening 603 at a corner of the optical deflection apparatus.

  Finally, in FIG. 3F, the sacrificial layers 801 and 802 formed on the upper and lower surfaces of the plate-like member 104 are etched away by plasma etching using an oxygen-based gas through the opening 603, and the light of the present embodiment is removed. The deflection device is completed.

[Embodiment 2]
Next, Embodiment 2 of the present invention is shown in FIG. FIG. 4A is a top view of the optical deflecting device of the embodiment, and FIG. 4B shows the embodiment of the present embodiment excluding the transparent base material 902 and the wire grid type polarizing element 901 for easy understanding. FIG. 4C is a top view of the optical deflection apparatus, and FIG. 4C is a cross-sectional view taken along the line DD ′. Also in FIG. 4, a plurality of optical deflecting devices are extracted and described as one optical deflecting device of an optical deflecting array arranged two-dimensionally.

  In FIG. 9, a substrate 101, a plurality of regulating members 102, a fulcrum member 103, a plate-like member 104, and a plurality of electrodes 105a and 105b are provided.

  The plurality of regulating members 102 are respectively provided at a plurality of end portions of the substrate 101, and have stoppers 905 on the top.

  The fulcrum member 103 has a top portion made of a conductive member, and is provided on the upper surface of the substrate 101.

  The plate-like member 104 does not have a fixed end, has a light reflection region on the upper surface, and has a conductor layer made of a member having conductivity at least in part. Further, the plate-like member 104 is made of a member having conductivity at least at the contact point in contact with the top of the back surface, and is movably disposed in a space between the substrate 101, the fulcrum member 103, and the stopper 905, 14 is applied by contact with the fulcrum member 103.

  The plurality of electrodes 105 a and 105 b are respectively provided on the substrate 101 and have a configuration in which they are substantially opposed to the conductor layer of the plate-like member 104. As in the conventional example of FIG. 11, the fulcrum member 103 also has a ridge-like top in the optical deflector of FIG. Further, in the present embodiment, the length of one side of the plate-like member 104 and the height of the fulcrum member 103 are designed, and the plate-like member 104 has a structure that can be tilted and displaced up to ± 15 degrees around the fulcrum member 103. . The regulating member 102 may have a hollow structure.

  Further, in FIG. 4, the contact portion 106 described in the conventional example of FIG. 9 is simply omitted, and is actually configured similarly to FIG. In the present embodiment, the stopper 905 is formed in a bridge shape as in the conventional example of FIG. Further, a transparent flat plate 902 is connected to the stopper 905 via a connection post 904. The transparent flat plate 902 is formed in a flat plate shape so as to substantially cover the entire surface of the optical deflecting device, and has openings 903 at corners of the optical deflecting device. The opening 903 is a window for introducing an etching species when the sacrificial layer formed on the upper and lower surfaces of the plate-like member 104 and the stopper 905 is removed by etching.

  On the transparent flat plate 902 configured in a flat plate shape, a wire grid type polarizing element 901 which is a feature of the present embodiment is formed. The wire grid type polarizing element 901 has a grid structure in which a plurality of strip-shaped metal layers (that is, wires) are arranged in parallel. With this grid structure, in the incident light, light whose vibration direction as an electromagnetic wave is parallel to the band extension direction is reflected, and light whose vibration direction as incident electromagnetic wave is perpendicular to the band extension direction is transmitted. The width of the band-shaped metal layer is determined by a width that allows favorable polarization depending on the wavelength of incident light, as in the first embodiment, and is preferably 100 nm or less when the incident light is visible light of 300 to 800 nm. In the optical deflecting device of this embodiment, since the stopper 905 is configured in a bridge shape, the contact area when the unfixed plate-like member 104 contacts the stopper 905 during the manufacturing process or the optical deflecting operation is implemented. Compared to the first mode, it is possible to suppress the decrease in yield due to the fixation of the plate-like member 104 that is a mirror.

  Next, a method for manufacturing the optical deflection apparatus of this embodiment will be described with reference to FIG. Note that the processes omitted in the description of FIG. 5 are the same as those of the above-described conventional example disclosed in Patent Document 4 (Japanese Patent No. 4307813). FIG. 5 is a cross-sectional view taken along the line D-D ′ (FIG. 4C) of the optical deflecting device of this embodiment.

  5A, as in the first embodiment, a fulcrum member 103, a plurality of electrodes 105a and 105b, a first sacrificial layer 801 and a second sacrificial layer 802, and a plate-like member 104 are formed on a substrate 101. In addition, an opening 803 for configuring the regulating member 102 is formed. Further, in FIG. 5 (a), the contact portion 106 described in the conventional example of FIG. 9 is simply omitted, and is actually configured similarly to FIG.

  Next, in FIG. 5B, a silicon oxide film is deposited by a plasma CVD method and patterned using a photomask, whereby the regulating member 102 and the stopper 905 are configured.

  Next, in FIG. 5C, a third sacrificial layer 1001 is formed on the substrate 101 and patterned using a photomask to form an opening 1002 for the connection post 904. In the present embodiment, the third sacrificial layer 1001 is made of a novolac resin by spin coating, and is planarized by heat treatment or the like. This patterning is performed by plasma etching using an oxygen-based gas. In this embodiment, an organic film is used as the film type of the sacrificial layer, but a silicon film or a silicon oxide film may be used. Moreover, the deposition method of each film is not necessarily limited.

  Next, in FIG. 5D, a transparent insulating film such as a silicon oxide film is deposited, and further a metal film for constituting the wire grid type polarizing element 601 which is a feature of this embodiment is deposited, and a photomask is formed. Pattern. An aluminum-based metal film was used as this metal film. Next, although the state of patterning is not clear in the figure, the silicon oxide film is patterned using a photomask to form the connection posts 904 and the transparent flat plate 902. As described above, the transparent flat plate 902 is formed in a flat plate shape so as to substantially cover the entire surface of the optical deflecting device, and has an opening 903 at a corner of the optical deflecting device.

  Finally, in FIG. 5E, the sacrificial layers 801 and 802 formed on the upper and lower surfaces of the plate-like member 104 and the third formed on the stopper are formed by plasma etching using an oxygen-based gas through the opening 903. The sacrificial layer 1001 is removed by etching, and the optical deflection apparatus of this embodiment is completed.

  Next, an optical deflection array according to an embodiment of the present invention will be described. An optical deflection array according to an embodiment of the present invention is an optical deflection array in which the above-described optical deflection devices according to an embodiment of the present invention are arranged in a plurality of one-dimensional or two-dimensional arrays, and the first polarization is possible. An optical deflecting device having a wire grid type polarizing element and an optical deflecting device having a wire grid type polarizing element capable of second polarization are alternately arranged. Hereinafter, an optical deflection array according to an embodiment of the present invention will be described in order using Embodiments 3 and 4, respectively.

[Embodiment 3]
The configuration of the optical deflection array of this embodiment will be described with reference to FIG. In FIG. 6, as an example, an optical deflection array in which a plurality of the optical deflection devices of the above-described first embodiment are arranged in a two-dimensional array shape is described. FIG. 6A is a top view of the optical deflection array of this embodiment, and FIG. 6B shows this embodiment excluding the stopper member 602 and the wire grid type polarizing element 601 for easy understanding. FIG. 6C is a cross-sectional view taken along the line DD ′, in which one optical deflecting device is extracted.

  In the third embodiment, the light deflecting device of the first embodiment is arranged in m rows and n columns, and each light deflecting device performs a light deflecting operation in accordance with a drive signal supplied individually. At this time, since the optical deflecting device of Embodiment 1 can be driven at a low voltage by the same characteristics as the above-described conventional example (configuration of FIG. 12), a low-voltage voltage can also be used as a drive signal to be supplied. This drive signal is stored in a semiconductor memory circuit configured immediately below the optical deflecting device, and causes all the optical deflecting devices to perform an optical deflecting operation simultaneously. For the method of driving the optical deflection array and the configuration of the semiconductor memory circuit, refer to Japanese Patent Application Laid-Open No. 2006-133394.

  In the optical deflection array according to the present embodiment, an optical deflection device 1101 including a wire grid type polarization element capable of first polarization, and an optical deflection device 1102 including a wire grid type polarization element capable of second polarization. Are alternately arranged, in particular, alternately arranged in stripe lines. The wire grid type polarization element capable of the first polarization and the wire grid type polarization element capable of the second polarization both have the above-described structure in which a plurality of band-like metal layers (that is, wires) are arranged in parallel. However, the extension directions are orthogonal to each other on the stopper plane 602, and the polarization vectors of the transmitted light 705 are orthogonal to each other. By constructing this structure, transmitted light in different polarization states (polarized light having polarization vectors orthogonal to each other) can be generated at the same time, and incident light to optical deflectors in different polarization states, It can be ON light guided to the projection lens. In the optical deflection array according to the present embodiment, the first image by the optical deflection device 1101 group including the wire grid type polarization element capable of the first polarization arranged in a plurality of lines, and the plurality of lines. It is possible to simultaneously form and project a second image by the group of optical deflecting devices 1102 including the wire grid type polarization element capable of the second polarization arranged.

[Embodiment 4]
The optical deflection array of this embodiment will be described with reference to FIG. In FIG. 7, as an example, an optical deflection array in which a plurality of the optical deflection devices of the first embodiment described above are arranged in a two-dimensional array is described. FIG. 7A is a top view of the optical deflection array of the present embodiment, and FIG. 7B shows the present embodiment in which the stopper member 602 and the wire grid type polarizing element 601 are omitted for easy understanding. FIG. 7C is a cross-sectional view taken along the line DD ′, in which one optical deflecting device is extracted.

  Also in the fourth embodiment, similarly to the third embodiment, the optical deflecting devices of the first embodiment are arranged in m rows and n columns, and each optical deflecting device is configured to emit light in accordance with an individually supplied drive signal. Deflection operation. At this time, since the optical deflecting device of Embodiment 1 can be driven at a low voltage by the same characteristics as the above-described conventional example (configuration of FIG. 12), a low-voltage voltage can also be used as a drive signal to be supplied. This drive signal is stored in a semiconductor memory circuit configured immediately below the optical deflecting device, and causes all the optical deflecting devices to perform an optical deflecting operation simultaneously. As for the driving method of the optical deflection array and the configuration of the semiconductor memory circuit, refer to Japanese Patent Application Laid-Open No. 2006-133394.

  In the optical deflection array of this embodiment, the optical deflection device 1101 having a wire grid type polarization element capable of first polarization and the optical deflection device 1102 having a wire grid type polarization element capable of second polarization are alternately arranged. In particular, they are alternately arranged at adjacent positions in the vertical and horizontal directions. The wire grid type polarization element capable of the first polarization and the wire grid type polarization element capable of the second polarization both have the above-described structure in which a plurality of band-like metal layers (that is, wires) are arranged in parallel. However, the extension directions are orthogonal to each other on the stopper plane 602, and the polarization vectors of the transmitted light 705 are orthogonal to each other. By constructing this structure, transmitted light in different polarization states (polarized light having polarization vectors orthogonal to each other) can be generated at the same time, and incident light to optical deflectors in different polarization states, It can be ON light guided to the projection lens. In the optical deflection array of this embodiment, the first image by the optical deflecting device 1101 group including the wire grid type polarizing elements capable of the first polarization arranged vertically and horizontally in a staggered manner, and staggered vertically and horizontally. It is possible to simultaneously form and project a second image by the group of optical deflecting devices 1102 including the wire grid type polarization element capable of the second polarization arranged.

  In the optical deflection arrays of the third and fourth embodiments, as shown in FIGS. 6B and 7B, the fulcrum member 103 is a wire grid type capable of the first polarization on the substrate plane. Regardless of the optical deflecting device 1101 having the polarizing element and the optical deflecting device 1102 having the wire grid type polarizing element capable of second polarization, the fulcrum member 103 having a ridge shape extending in the same direction is used. That is, the relative positional relationship between the inclination direction (direction 1 and direction 2) of the plate-like member 104 and the extending direction of the band-shaped metal layer of the wire grid type deflection element is not particularly defined.

  Next, an image projection display device according to an embodiment of the present invention will be described. An image projection display device according to an embodiment of the present invention includes a light deflection array according to an embodiment of the present invention, a light source that illuminates at least the light deflection array, and a projection lens that projects reflected light from the light deflection array. And an image composed of the first polarized light and the image composed of the second polarized light by the reflected light from the light deflection array are simultaneously guided to a single projection lens and projected onto the screen. Hereinafter, an image projection display apparatus according to an embodiment of the present invention will be described using Embodiment 5.

[Embodiment 5]
FIG. 8 shows an image projection display apparatus according to this embodiment. Reference numeral 1300 denotes an image projection display apparatus according to this embodiment. Reference numeral 1301 denotes a white light source such as a halogen lamp or a xenon lamp. Reference numeral 1302 denotes a rod lens for shaping light source light. Reference numeral 1303 denotes a color wheel having color filters of at least three primary colors. Reference numeral 1304 denotes an optical deflection array according to an embodiment of the present invention. Reference numeral 1305 denotes a control chip for controlling the light deflection direction of each of the light deflection devices constituting the light deflection array. Reference numeral 1306 denotes a light absorbing plate. Reference numeral 1307 denotes a projection lens. Reference numeral 1308 denotes a screen.

  The light deflection array 1304 used in the image projection display device 1300 of the present embodiment is assumed to be the light deflection array described in the fourth embodiment as an example. The optical deflection apparatus constituting the optical deflection array is an optical deflection apparatus that performs a one-axis two-dimensional optical deflection operation including a wire grid type polarization element. That is, incident light incident from one direction is separated into first polarized light (or second polarized light) and reflected light Lr in a wire grid type polarization element. The light absorbing plate 1306 is disposed so that the reflected light Lr is absorbed by the light absorbing plate 1306. The first polarized light or the second polarized light is incident on the plate-like member 104 of each optical deflecting device constituting the optical deflection array 1304.

  The optical system of the image projection display device of this embodiment will be briefly described. White light from the light source 1301 is shaped through the rod lens 1302 and enters the color wheel 1303. The light source light passing through the color wheel becomes light L having red, blue and green colors in time sequence. The light L illuminates the light deflection array 1304. The light L is separated into unnecessary reflected light Lr and first polarized light (or second polarized light) in the wire grid type polarization element, and the first polarized light and the second polarized light are sent to the plate member 104. Incident light. In each of the optical deflection devices constituting the optical deflection array 1304, the plate-like member 104 changes its direction according to the image information formed by the first polarized light and the image information formed by the second polarized light. Thus, the incident light is deflected in a target direction (ON direction) and a direction other than the target (OFF direction). The reflected light Lon reflected in the target direction, for example, in the direction perpendicular to the array surface, is guided to the projection lens 1307 and is projected onto the screen 1308 through the projection lens. The light Loff reflected in the direction other than the intended purpose is absorbed by the light absorbing plate, similarly to the reflected light in the wire grid type polarizing element.

  With the above-described configuration, the image composed of the first polarized light and the image composed of the second polarized light by the reflected light from the light deflection array 1304 are simultaneously guided to the single projection lens 1307, and on the screen 1308. Can be projected and displayed in time sequence. For example, when viewing an image using polarized glasses with different polarization filters attached to portions corresponding to the left and right eyes, an image composed of a first polarized light and an image composed of a second polarized light, which constitute a parallax image, in particular. In this case, it can be viewed as a stereoscopic image. Note that the screen 1308 is preferably a screen capable of displaying the image composed of the first polarized light and the image composed of the second polarized light while maintaining the projected polarization state. Thereby, the projected polarization state is maintained, and an image corresponding to the polarization state can be visually recognized. For example, a metal surface reflection screen (a metal surface having fine irregularities formed thereon) is used.

  Although the embodiments of the present invention have been described above, the effects obtained by the embodiments of the present invention will be described below.

  In the optical deflecting device of this embodiment, a wire grid type polarizing element is provided on the same member as the stopper or connected to the upper part of the stopper, so that incident light parallel to the wire is reflected by the wire grid type polarizing element. Since only the incident light perpendicular to the wire can be incident on the plate-like member, the polarized light of the light source light as disclosed in Patent Document 1 or Patent Document 2 is immediately before entering the plate-like member that is a mirror. And can be arbitrarily performed for each optical deflecting device without adjusting the position as shown in Patent Document 2. Further, the incident light is not absorbed in the optical deflecting device and is reflected as unnecessary light, or is reflected in the ON direction (target direction for image display guided to the projection lens) or the OFF direction. It is possible to eliminate the deterioration of the mirror quality due to heat generation as seen in FIG. That is, in the light deflecting device of the present embodiment, the first polarized light or the second polarized light can be guided to the projection lens according to the pixel without generating heat due to the transmitted light seen in Patent Document 3.

  In the optical deflection array of the present embodiment, the image by the reflected light constituted by the first polarized light and the image by the reflected light constituted by the second polarized light are timed by a single optical deflection array. They can be generated at the same time. For this reason, the image by the reflected light comprised by the 1st polarized light and the image by the reflected light comprised by the 2nd polarized light can be easily guide | induced to one projection lens. Further, since it is not necessary to project the image by the first polarized light and the image by the second polarized light in time series, the driving frequency of the optical deflection array can be reduced. That is, in the optical deflection array of this embodiment, the image by the first polarized light and the image by the second polarized light can be simultaneously guided to one projection lens by one optical deflection array.

  In the image projection display apparatus of this embodiment, adjustment of the screen projection position of polarized light is not necessary, and the adjustment work of the apparatus is facilitated. In addition, an image by the first polarized light and an image by the second polarized light are simultaneously projected with one light deflection array and one projection lens without separately providing a polarization mechanism such as a polarization color wheel in the apparatus. Since display is possible, a small, light, and inexpensive stereoscopic image projection display device can be provided. That is, in the image projection display apparatus according to the present embodiment, since it is possible to project and display a stereoscopic image with one projection lens without separately providing a deflection mechanism such as a deflection color wheel or a holographic polarization beam splitter, inexpensive deflection glasses are provided. It is possible to provide a small and inexpensive stereoscopic image projection display apparatus using the above.

  In addition, this invention is not limited to said each embodiment, A various deformation | transformation is possible in the range which does not deviate from the summary.

  The present invention relates to an image projection display device such as a projection projector, a digital theater system, and a rear projection television, and is particularly applicable to a stereoscopic image projection display device that projects and displays a stereoscopic image using polarized glasses.

DESCRIPTION OF SYMBOLS 101 Board | substrate 102,501 Restriction member 103 Supporting member 104 Plate-shaped member 105 Electrode 106 Contact part 601,901 Wire grid type polarizing element 602,905 Stopper 603,903 Opening 701 Transparent base material 702 Band-shaped metal layer 703 Non-polarized light Light 703, 704, 705 Light 801 First sacrificial layer 802 Second sacrificial layer 803, 1002 Opening 902 Transparent flat plate 904 Connection post 1001 Third sacrificial layer 1101, 1102 Light polarizing device group 1103, 1303 Color wheel 1104, 1304 Light deflection array 1105, 1305 Control chip 1106, 1306 Light absorption plate 1107, 1307 Projection lens 1201, 1301 White light source 1202, 1302 Rod lens 1308 Screen 1300, 1401 Image projection display device

JP-A-10-153755 Japanese Patent No. 2999953 JP 2006-58339 A Japanese Patent No. 4307813 JP 2005-202257 A JP 2006-133394 A

Claims (7)

A substrate, a plurality of restricting members, a fulcrum member, a plate-like member, and a plurality of electrodes, each of the plurality of restricting members having a stopper at an upper portion thereof; and a plurality of end portions of the substrate. The fulcrum member is provided on the upper surface of the substrate with a top portion, the plate-like member has a light reflection region, does not have a fixed end, and is at least partially conductive. A conductive layer made of a material having a property, and is movably disposed in a space between the substrate, the fulcrum member and the stopper, and the plurality of electrodes are respectively provided on the substrate, The plate-like member has a configuration that is substantially opposite to the conductor layer, and the plate-like member is inclined and displaced by electrostatic attraction around the fulcrum member to be incident on the light reflecting region. Light deflection that deflects light by changing the reflection direction In the location,
An optical deflecting device characterized in that a polarizing element is provided directly on the stopper or three-dimensionally connected to the top of the stopper, and the polarizing element is a wire grid type polarizing element. The wire grid type polarizing element has a grid structure in which a plurality of strip-like metal layers are arranged in parallel,
Due to the grid structure, in the incident light, the light whose oscillation direction as an electromagnetic wave is parallel to the extension direction of the band is reflected, and the light whose oscillation direction as the electromagnetic wave of incident light is perpendicular to the extension direction of the band is transmitted. The light deflection apparatus according to claim 1.   The width of the band-shaped metal layer is determined by a width that allows favorable polarization depending on the wavelength of incident light, and is 100 nm or less when the incident light is visible light of 300 to 800 nm. 3. The light deflection apparatus according to 2. The stopper is configured in a flat plate shape so as to substantially cover the entire surface of the optical deflection device,
An opening is formed at a corner of the light deflection device, and the opening is a window for introducing an etching species when the sacrificial layer formed on the upper and lower surfaces of the plate-like member is removed by etching. The optical deflecting device according to claim 1, wherein the optical deflecting device functions as an optical device. The stopper is configured in a bridge shape,
A transparent flat plate is connected to the stopper via a column-shaped connection post,
The transparent flat plate is configured in a flat plate shape so as to substantially cover the entire surface of the light deflecting device,
An opening is formed at a corner of the light deflector, and the opening introduces an etching species for etching and removing the sacrificial layer formed on the upper and lower surfaces of the plate-like member and the stopper. The optical deflecting device according to claim 1, wherein the optical deflecting device functions as a window for performing the operation.   6. An optical deflection array in which a plurality of optical deflection devices according to claim 1 are arranged in a one-dimensional or two-dimensional array, and comprising a wire grid type polarization element capable of performing the first polarization. An optical deflection array, wherein the optical deflection device and the optical deflection device including the wire grid type polarization element capable of the second polarization are alternately arranged.   7. A light deflection array according to claim 6, further comprising: a light source that illuminates at least the light deflection array; and a projection lens that projects reflected light from the light deflection array, and the reflected light from the light deflection array is used. An image projection display device characterized in that an image composed of first polarized light and an image composed of second polarized light are simultaneously guided to a single projection lens and projected onto a screen.

Images