JP2009069340A5 - - Google Patents

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Publication number
JP2009069340A5
JP2009069340A5 JP2007236298A JP2007236298A JP2009069340A5 JP 2009069340 A5 JP2009069340 A5 JP 2009069340A5 JP 2007236298 A JP2007236298 A JP 2007236298A JP 2007236298 A JP2007236298 A JP 2007236298A JP 2009069340 A5 JP2009069340 A5 JP 2009069340A5
Authority
JP
Japan
Prior art keywords
coil
movable plate
wiring
pair
actuator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007236298A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009069340A (ja
JP5023907B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007236298A priority Critical patent/JP5023907B2/ja
Priority claimed from JP2007236298A external-priority patent/JP5023907B2/ja
Publication of JP2009069340A publication Critical patent/JP2009069340A/ja
Publication of JP2009069340A5 publication Critical patent/JP2009069340A5/ja
Application granted granted Critical
Publication of JP5023907B2 publication Critical patent/JP5023907B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007236298A 2007-09-12 2007-09-12 アクチュエータ、光スキャナ、および画像形成装置 Expired - Fee Related JP5023907B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007236298A JP5023907B2 (ja) 2007-09-12 2007-09-12 アクチュエータ、光スキャナ、および画像形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007236298A JP5023907B2 (ja) 2007-09-12 2007-09-12 アクチュエータ、光スキャナ、および画像形成装置

Publications (3)

Publication Number Publication Date
JP2009069340A JP2009069340A (ja) 2009-04-02
JP2009069340A5 true JP2009069340A5 (enExample) 2010-10-07
JP5023907B2 JP5023907B2 (ja) 2012-09-12

Family

ID=40605692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007236298A Expired - Fee Related JP5023907B2 (ja) 2007-09-12 2007-09-12 アクチュエータ、光スキャナ、および画像形成装置

Country Status (1)

Country Link
JP (1) JP5023907B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013076844A1 (ja) * 2011-11-24 2013-05-30 パイオニア株式会社 アクチュエータ
DE102012206269B4 (de) 2012-04-17 2023-12-14 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
WO2014002183A1 (ja) * 2012-06-26 2014-01-03 パイオニア株式会社 アクチュエータ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01200322A (ja) * 1988-02-05 1989-08-11 Matsushita Electric Ind Co Ltd 振動ミラー装置
JP2005099063A (ja) * 2000-12-11 2005-04-14 Miwa Engineering:Kk 偏向アクチュエータ、光走査素子、及び受光走査素子
JP2002345230A (ja) * 2001-05-16 2002-11-29 Matsushita Electric Ind Co Ltd リニア駆動装置
JP2003311695A (ja) * 2002-04-26 2003-11-05 Nippon Signal Co Ltd:The プレーナ型アクチュエータ及びその製造方法
JP2005245074A (ja) * 2004-02-25 2005-09-08 Alps Electric Co Ltd リニア駆動装置

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