JP2009069340A5 - - Google Patents

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Publication number
JP2009069340A5
JP2009069340A5 JP2007236298A JP2007236298A JP2009069340A5 JP 2009069340 A5 JP2009069340 A5 JP 2009069340A5 JP 2007236298 A JP2007236298 A JP 2007236298A JP 2007236298 A JP2007236298 A JP 2007236298A JP 2009069340 A5 JP2009069340 A5 JP 2009069340A5
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JP
Japan
Prior art keywords
coil
movable plate
wiring
pair
actuator according
Prior art date
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Granted
Application number
JP2007236298A
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Japanese (ja)
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JP2009069340A (en
JP5023907B2 (en
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Publication date
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Priority to JP2007236298A priority Critical patent/JP5023907B2/en
Priority claimed from JP2007236298A external-priority patent/JP5023907B2/en
Publication of JP2009069340A publication Critical patent/JP2009069340A/en
Publication of JP2009069340A5 publication Critical patent/JP2009069340A5/ja
Application granted granted Critical
Publication of JP5023907B2 publication Critical patent/JP5023907B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (12)

可動板と、該可動板を支持する1対の軸部材とを備えた振動部と、
前記振動部に設けられたコイルと、
前記コイルに通電するための配線と、
前記コイルに対向して設置された磁石とを有し、
前記磁石の磁界中に配された前記コイルに通電することにより、前記可動板を前記各軸部材の捩れ変形を伴って回動させるように構成され、
前記コイルは、絶縁膜を介して前記振動部上に設けられ、
前記絶縁膜は、前記各軸部材に対し離間しつつ延長された延長部を有し、
前記配線は、前記延長部上に設けられていることを特徴とするアクチュエータ。
A vibrating portion including a movable plate and a pair of shaft members that support the movable plate;
A coil provided in the vibrating section;
Wiring for energizing the coil;
A magnet installed facing the coil,
By energizing the coil disposed in the magnetic field of the magnet, the movable plate is configured to rotate with torsional deformation of each shaft member,
The coil is provided on the vibration part via an insulating film,
The insulating film has an extended portion that is extended while being separated from the shaft members,
The actuator, wherein the wiring is provided on the extension .
前記配線は、前記1対の軸部材のうちの少なくとも一方の軸部材に沿って設けられている請求項1に記載のアクチュエータ。   The actuator according to claim 1, wherein the wiring is provided along at least one shaft member of the pair of shaft members. 前記コイルは、前記可動板に設けられている請求項1ないしのいずれかに記載のアクチュエータ。 The coil actuator according to any one of claims 1 to 2 provided on the movable plate. 前記コイルは、前記可動板の板面に沿って渦巻状に形成されている請求項に記載のアクチュエータ。 The actuator according to claim 3 , wherein the coil is formed in a spiral shape along a plate surface of the movable plate. 前記配線は、前記可動板と前記各軸部材との境界部付近に接合された1対の第1の接合点を有している請求項に記載のアクチュエータ。 The actuator according to claim 4 , wherein the wiring has a pair of first joining points joined in the vicinity of a boundary portion between the movable plate and each shaft member. 前記振動部を支持する支持部を有しており、前記配線は、前記支持部と前記各軸部材との境界部付近に接合された1対の第2の接合点を有している請求項に記載のアクチュエータ。 The support part which supports the vibration part is provided, and the wiring has a pair of 2nd junctions joined near the boundary part of the support part and each axis member. 5. The actuator according to 5 . 前記1対の第1の接合点および前記1対の第2の接合点は、前記1対の軸部材に対する前記配線の影響が互いに等しくなるように設けられている請求項に記載のアクチュエータ。 The actuator according to claim 6 , wherein the pair of first joint points and the pair of second joint points are provided so that influences of the wiring on the pair of shaft members are equal to each other. 前記配線は、前記1対の軸部材に対する影響が互いに等しくなるように設けられている請求項1ないしのいずれかに記載のアクチュエータ。 The wire actuator according to any one of claims 1 to 7 effects on the shaft member of said pair is provided to be equal to each other. 前記可動板および前記各軸部材は、シリコンで一体的に形成されている請求項1ないしのいずれかに記載のアクチュエータ。 The actuator according to any one of claims 1 to 8 , wherein the movable plate and each shaft member are integrally formed of silicon. 前記コイルおよび前記配線は、それぞれ、金属で構成されている請求項1ないしのいずれかに記載のアクチュエータ。 The coil and the wire, respectively, the actuator according to any one of claims 1 is constituted by a metal 9. 光反射部が設けられた可動板と、該可動板を支持する1対の軸部材とを備えた振動部と

前記振動部に設けられたコイルと、
前記コイルに通電するための配線と、
前記コイルに対向して設置された磁石とを有し、
前記磁石の磁界中に配された前記コイルに通電することにより、前記可動板を前記各軸部材の捩れ変形を伴って回動させ、前記光反射部で反射した光を走査するように構成され、
前記コイルは、絶縁膜を介して前記振動部上に設けられ、
前記絶縁膜は、前記各軸部材に対し離間しつつ延長された延長部を有し、
前記配線は、前記延長部上に設けられていることを特徴とする光スキャナ。
A vibrating portion including a movable plate provided with a light reflecting portion and a pair of shaft members that support the movable plate;
,
A coil provided in the vibrating section;
Wiring for energizing the coil;
A magnet installed facing the coil,
By energizing the coil disposed in the magnetic field of the magnet, the movable plate is rotated with torsional deformation of each shaft member, and the light reflected by the light reflecting portion is scanned. ,
The coil is provided on the vibration part via an insulating film,
The insulating film has an extended portion that is extended while being separated from the shaft members,
The optical scanner is characterized in that the wiring is provided on the extension portion .
光反射部が設けられた可動板と、該可動板を支持する1対の軸部材とを備えた振動部と、
前記振動部に設けられたコイルと、
前記コイルに通電するための配線と、
前記コイルに対向して設置された磁石とを有し、
前記磁石の磁界中に配された前記コイルに通電することにより、前記可動板を前記各軸部材の捩れ変形を伴って回動させ、前記光反射部で反射した光を走査して、画像を形成するように構成され、
前記コイルは、絶縁膜を介して前記振動部上に設けられ、
前記絶縁膜は、前記各軸部材に対し離間しつつ延長された延長部を有し、
前記配線は、前記延長部上に設けられていることを特徴とする画像形成装置。
A vibrating portion including a movable plate provided with a light reflecting portion and a pair of shaft members that support the movable plate;
A coil provided in the vibrating section;
Wiring for energizing the coil;
A magnet installed opposite the coil,
By energizing the coil disposed in the magnetic field of the magnet, the movable plate is rotated with torsional deformation of each shaft member, and the light reflected by the light reflecting portion is scanned to scan the image. Configured to form,
The coil is provided on the vibration part via an insulating film,
The insulating film has an extended portion that is extended while being separated from the shaft members,
The image forming apparatus , wherein the wiring is provided on the extension portion .
JP2007236298A 2007-09-12 2007-09-12 Actuator, optical scanner, and image forming apparatus Expired - Fee Related JP5023907B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007236298A JP5023907B2 (en) 2007-09-12 2007-09-12 Actuator, optical scanner, and image forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007236298A JP5023907B2 (en) 2007-09-12 2007-09-12 Actuator, optical scanner, and image forming apparatus

Publications (3)

Publication Number Publication Date
JP2009069340A JP2009069340A (en) 2009-04-02
JP2009069340A5 true JP2009069340A5 (en) 2010-10-07
JP5023907B2 JP5023907B2 (en) 2012-09-12

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007236298A Expired - Fee Related JP5023907B2 (en) 2007-09-12 2007-09-12 Actuator, optical scanner, and image forming apparatus

Country Status (1)

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JP (1) JP5023907B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013076844A1 (en) * 2011-11-24 2013-05-30 パイオニア株式会社 Actuator
DE102012206269B4 (en) 2012-04-17 2023-12-14 Robert Bosch Gmbh Micromechanical component and manufacturing process for a micromechanical component
WO2014002183A1 (en) * 2012-06-26 2014-01-03 パイオニア株式会社 Actuator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01200322A (en) * 1988-02-05 1989-08-11 Matsushita Electric Ind Co Ltd Oscillatory mirror device
JP2005099063A (en) * 2000-12-11 2005-04-14 Miwa Engineering:Kk Deflection actuator, optical scanning element, and light receiving scanning element
JP2002345230A (en) * 2001-05-16 2002-11-29 Matsushita Electric Ind Co Ltd Linear driver
JP2003311695A (en) * 2002-04-26 2003-11-05 Nippon Signal Co Ltd:The Planar type actuator and its manufacturing method
JP2005245074A (en) * 2004-02-25 2005-09-08 Alps Electric Co Ltd Linear driving device

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