JP2005099063A - Deflection actuator, optical scanning element, and light receiving scanning element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a deflection actuator which realizes a large deflection angle with a relatively low current and a low frequency signal and is inexpensive, can be mass-produced and has a long lifetime. <P>SOLUTION: Doubly supported beams 4 and 4 are constituted like a sheet by using materials which can be made into sheets, like a polyimide, and parts are adhered to the moving part of a deflection part 3. Since the moving part 3 and the doubly supported beams 4 and 4 are constituted like a sheet by using the materials which can be made into sheets, a large twist angle is obtained, and frequency reduction is possible to lead to a low power consumption. A current to a flat coil 2 of the moving part 3 is supplied through suspended wiring 20. Therefore, damages or fatigue wire breakage resulting from the metal fatigue of wiring are avoided to extend the lifetime. A constitution of having no wiring in the parts of beams may also be adopted. Further, since the parts of the deflection part are adhered, no large-scale facility is required to make this deflection actuator applicable to various uses. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a deflection actuator, an optical scanning element, and a light-receiving scanning element suitable for, for example, a scanning system or an image recognition tracking system of an optical system.
[0002]
[Prior art]
With the development of microelectronics typified by high integration of semiconductor devices, various devices have become highly functional and miniaturized, and the same applies to laser scanning systems using polygon mirrors and galvanometer mirrors. As an example, laser application equipment such as a laser microscope can be cited.
[0003]
The galvanometer mirror is used in a laser scanner or the like that deflects and scans laser light. The principle is as follows. That is, when a current is passed through a moving coil arranged in a magnetic field, a Lorentz force (determined by the outer product of the current and the magnetic flux) is generated in relation to the current and the magnetic flux, and a rotational force with the fixed end as the central axis ( Torque). The galvanometer mirror uses the galvanometer principle that the movable coil rotates to an angle at which this torque and stress (restoring force) are balanced, and the presence or absence of current is detected by swinging the pointer through this movable coil. Instead of the pointer, a reflecting mirror is provided on a shaft that rotates integrally with the movable coil.
[0004]
There is a demand for further miniaturization of these laser scanning systems and the like.
[0005]
In order to meet the above requirements, for example, Japanese Patent Publication No. 2722314 (referred to as a first conventional technique) discloses a planar galvanomirror to which a semiconductor manufacturing technique is applied. As described above, since the mirror movable part is formed on the semiconductor substrate by using the semiconductor manufacturing process (the movable plate, the pair of torsion bars (both supported beams) and the like are made of the same material as the silicon substrate), the galvano The mirror can be extremely miniaturized as compared with the conventional one, and the laser scanning system that performs polarization scanning of the laser light can be miniaturized.
[0006]
As shown in FIGS. 14 and 15, the planar galvanometer mirror 101 has a three-layer structure in which upper and lower insulating substrates 103 and 104 are anodically bonded to the upper and lower surfaces of a silicon substrate 102. The silicon substrate 102 is laminated on the left and right ends so as to open the upper part of the movable plate 105. The silicon substrate 102 includes a flat plate-like movable plate 105 and a torsion bar 106 that pivotally supports the movable plate 105 so as to be swingable in the vertical direction with respect to the silicon substrate 102 at the center position of the movable plate 105. 106 (both supported beams) are integrally formed by anisotropic etching. As described above, the movable plate 105 and the torsion bars 106 and 106 are made of the same material as the silicon substrate 102. In addition, a reflecting mirror 108 is provided substantially at the center of the movable plate 105.
[0007]
A planar coil 107 that generates a magnetic field when energized is covered with an insulating coating on the periphery of the upper surface of the movable plate 105. An electrode terminal 109 that is electrically connected to the planar coil 107 via the torsion bar 106 is provided on the side upper surface of each torsion bar 106. Further, permanent magnets 110 </ b> A, 110 </ b> B, 111 </ b> A, 111 </ b> B are provided so that a magnetic field is applied to the coil portion of the planar coil 107 that is in a positional relationship parallel to the axial direction of the torsion bar 106.
[0008]
The operation of the planar galvanometer mirror 101 will be described below with reference to FIG.
[0009]
In FIG. 16, a current is passed through the planar coil 107 with one electrode terminal 109 as a positive pole and the other electrode terminal 109 as a negative pole. On both sides of the movable plate 105, a magnetic field is formed in a direction crossing the planar coil 107 by the permanent magnets 110A, 110B, 111A, and 111B. When a current flows through the planar coil 107 in the magnetic field, the Lorentz force F is applied to the planar coil 107, that is, to both ends of the movable plate 105 in the direction in accordance with Fleming's left-hand rule according to the current and magnetic flux density of the planar coil 107. Act.
[0010]
On the other hand, when the movable plate 105 rotates, the torsion bars 106 and 106 are twisted, and the relationship between the stress F ′ of the torsion bar 106 generated thereby and the twist angle φ of the movable plate 105 is expressed by the following equation (1). Satisfied.
[0011]
φ = (Mx / G · lp) = (F ′ · L / 8.5 × 10 ⁹ r ^Four ) × l ₁ … (1)
In the above equation (1), Mx represents the torsional moment, G represents the transverse elastic modulus, lp represents the second moment of polar section, and L represents the distance from the central axis of the torsion bar 106 to the force point. R represents the radius of the torsion bar 106, l ₁ Represents the length of the torsion bar 106.
[0012]
Then, the movable plate 105 is rotated and stopped until the Lorentz force F and the stress F ′ (restoring force) are balanced. Therefore, the twist angle φ of the movable plate 105 can be controlled by controlling the current flowing through the planar coil 107. For example, the reflection direction of the laser light incident on the reflection mirror 108 can be freely controlled in a plane perpendicular to the axes of the torsion bars 106 and 106, and if the twist angle of the reflection mirror 108 is continuously repeated, Laser light scanning is possible.
[0013]
As another conventional example, for example, Japanese Patent Laid-Open No. 11-242180 (referred to as a second conventional technique) which is an open patent gazette prevents deterioration of electrical elements such as wiring, An optical scanner capable of maintaining reliability is disclosed.
[0014]
According to this, the structure includes a structure whose free end is vibrated and a permanent magnet disposed opposite to the free end of the structure. The structure includes a support that is a fixed end and a reflection as a mirror. The movable plate is provided with a movable plate provided with a surface, and a plate spring-like elastic member that connects the support and the movable plate. The movable plate is provided with a coil so as to circulate around the periphery of the movable plate, and wiring is formed so as to straddle the coil from the coil end located on the inner peripheral portion of the coil, and is provided on the elastic member. It is connected to the electrode pad via wiring. On the other hand, the coil end located on the outer peripheral portion of the coil is connected to another electrode pad as it is by wiring provided on the elastic member.
[0015]
In the optical scanner described above, the elastic member is formed of a plurality of polyimide layers, and the wiring for applying an electric current to the coil is positioned substantially in half (elasticity) in the thickness direction of the elastic member. It is characterized in that it is provided at a position where the stress due to elastic deformation of the member is small. Thereby, since the wiring is arranged at a place where the twist radius is small, it is possible to mitigate damage and disconnection of the wiring due to repeated twisting accompanying the rotation of the elastic member.
[0016]
[Problems to be solved by the invention]
However, the above conventional technique has the following problems.
[0017]
That is, in the first prior art described above, the movable plate 105 has a mechanical resonance frequency ω (= () that is governed by its physical conditions (the spring constant k of the torsion bar 106 and the inertia mass J of the movable plate 105). k / J) ^1/2 )have. That is, the spring constant k is determined by the shape and material of the torsion bar 106, and the inertial mass J is also determined by the shape and specific gravity of the movable plate 105. Therefore, the mechanical resonance frequency ω is also determined by these physical conditions. For example, when the above-mentioned member is formed of silicon, since the silicon is light, the inertia mass J is small, so that the mechanical resonance frequency ω is also high and not only high-speed rotation is possible, but also the driving energy is extremely high. It's small.
[0018]
However, when the movable plate 105 matches the mechanical resonance frequency ω, a large torsion angle (deflection angle) can be obtained. However, when the movable plate 105 does not match the mechanical resonance frequency ω, Such a large twist angle cannot be obtained.
[0019]
Further, due to physical conditions in design, it is easy to manufacture a mechanical resonance frequency ω of 1000 Hz or more, and it is difficult to cope with a low frequency. Depending on the application, when deflecting in two dimensions, it may be required to support both high and low frequencies (50 Hz to 100 Hz). In such a case, the first prior art cannot cope with a low frequency.
[0020]
Further, since the first conventional technology is produced by a semiconductor production process, it can be produced only in a factory equipped with a large-scale production facility, and the efficiency of small-lot production is poor, resulting in high costs. In addition, because it is manufactured through a series of processes, the reflector cannot be replaced with other optical components (for example, other optical components such as prisms, lenses, CCDs, MOS image sensors, and pyroelectric elements). Cannot be used. In the second prior art, since the wiring is housed in a plurality of layers of polyimide, a large number of manufacturing steps are required, which is very complicated as a whole and causes an increase in manufacturing cost. .
[0021]
Furthermore, in the first prior art described above, the torsion bar 106 is repeatedly twisted, so that when the scan is performed with a large deflection angle, a large stress acts on the lead pattern, causing damage and fatigue disconnection. Therefore, as a countermeasure, in the second prior art, the wiring (lead pattern) is arranged at approximately equal positions.
[0022]
However, in the second prior art, although the life of the wiring (corresponding to the lead pattern of the first prior art) is longer than that in the case of the first prior art, the wiring is moved to the movable part. There is no. Furthermore, since it is integrally formed by a semiconductor process, the reflector cannot be replaced with another object as in the first prior art.
[0023]
In recent years, electronic small-sized imaging devices for use in mobile phones and the like are becoming widespread. However, in order to construct a device that follows a specific object, a current technology such as a polygon mirror requires a large space. And need power.
[0024]
The present invention solves the above-described problems and provides a long-life deflection actuator or the like that is small in size and reduced in manufacturing cost.
[0025]
[Means for Solving the Problems]
In order to solve the above-described problem, the deflection actuator of the present invention has a coil whose surface is covered with a protective film formed on the surface, and the portion where the coil is formed is a movable part, and is pivotally supported by a doubly supported beam. A sheet having the other end of the cantilever as a fixed portion is used as a structural material, and magnetic field generating means is provided around the structural material.
[0026]
According to the above invention, the structure of the deflection actuator is simplified by using a single sheet as the structural material, and the manufacturing process is reduced as compared with the prior art. In addition, the torsional angle φ increases as the value of the second moment of inertia lp acting on the beam decreases. The quadratic pole moment of inertia lp is bh (b, where b is the beam thickness and h is the width. ² + H ² ) / 12, but by using a sheet structure, b << h and h ² Against b ² Is a negligible value, so lp = bh ^Three / 12. Since b is a small value, lp is also reduced, and the twist angle φ is increased. Furthermore, the helix angle φ can be designed by setting the value of h.
[0027]
Therefore, it is possible to realize a deflection electromagnetic actuator that is inexpensive, small, and can be deflected with a relatively large deflection angle by driving with a low-frequency alternating current without being aware of the resonance frequency. In addition, low power consumption can be achieved.
[0028]
An optical scanning element can be realized by adhering a reflecting mirror to the insulator of the movable part of the deflection electromagnetic actuator. In this case, since the reflecting mirror is bonded to the above-described deflection electromagnetic actuator, the mirror deflection electromagnetic actuator (optical scanning element) that deflects the light collected from the LED, the laser beam, etc. is inexpensive, small, and has a low frequency alternating current. It can be provided as a product that can be driven by
[0029]
The reflecting mirror is preferably made of a silicon substrate. In this case, the existing semiconductor technology can be used by fabricating the reflecting mirror with a silicon substrate, and it is relatively cheap and has a uniform quality (for example, a high flatness with an unevenness difference of 0.5 μm or less). Available at: Therefore, it is possible to provide a silicon mirror deflection electromagnetic actuator (optical scanning element) that can reduce the cost and has high accuracy (high quality). In addition, thin film formation techniques such as aluminum and an antireflection film are substantial, and this substantial technique can be used.
[0030]
A light receiving scanning element can be realized by laying a wiring to a light receiving element together with a coil on an insulator of a movable part of the deflection actuator, and bonding and electrically connecting the light receiving element enclosed in a small package to the movable part. .
[0031]
A feature of the present invention is that various parts are bonded to the movable part of the deflection actuator during the manufacturing process. Thereby, various deflection actuators can be realized. In other words, it is possible to reliably mass-produce products that do not require large-scale manufacturing facilities, have few manufacturing processes, are very simple, and have a low unit price. Therefore, by adhering commonly produced light receiving elements and deflecting them with the deflection actuator of the present invention, the functions of many types of semiconductor light receiving elements currently produced in semiconductor technology can be effectively exhibited. Can do. For example, an image receiving deflection electromagnetic actuator (light receiving scanning element) that can obtain three-dimensional information by receiving and deflecting a two-dimensional image can be realized.
[0032]
In the light receiving scanning element, it is preferable that an optical system including a lens is incorporated in the small package of the light receiving element. In this case, an optical system including a lens is integrated with the light receiving element and is bonded to the above-described deflection electromagnetic actuator, and an ultra-small imaging deflection electromagnetic actuator (light receiving scanning element) can be realized. Is possible. In addition, a three-dimensional shape memory sensor can be realized using this.
[0033]
In the image light receiving deflection electromagnetic actuator light receiving scanning element, the light receiving element is preferably a charge coupled element. In this case, a general-purpose image-receiving deflection electromagnetic actuator (light-receiving scanning element) that is inexpensive and of uniform quality can be obtained by bonding a charge-coupled element that is currently mass-produced to the deflection electromagnetic actuator and is frequently used in video cameras and digital cameras. Can be realized.
[0034]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a MOS image pickup element. In this case, low-power, low-power-consumption image-receiving / deflection electromagnetic actuators (light receiving devices) that are inexpensive and of uniform quality can be obtained by bonding charge coupled devices that are currently mass-produced to the deflection electromagnetic actuators and are widely used in video cameras and digital cameras. (Scanning element) can be realized.
[0035]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a pyroelectric element. In this case, by attaching a pyroelectric element that is currently used in an automatic door or an automatic flushing system of a toilet, etc. to the deflection electromagnetic actuator, an infrared light receiving deflection electromagnetic actuator (light reception) capable of sensing a wide range of organisms and fire. (Scanning element) can be realized.
[0036]
In the imaging deflection electromagnetic actuator, it is preferable that the light receiving element is an optical component integrated charge coupled element. In this case, an optical system including a lens that is currently mass-produced in the deflection electromagnetic actuator and is frequently used in a video camera, a digital camera, etc. is integrated with the light receiving element, and the charge coupled element incorporated in the package is bonded, thereby reducing the cost. Therefore, it is possible to realize an ultra-small general-purpose imaging deflection electromagnetic actuator (light-receiving scanning element) with uniform quality, and a wide range of imaging is possible. In addition, a three-dimensional shape memory sensor can be realized using this.
[0037]
In the imaging deflection electromagnetic actuator, it is preferable that the light receiving element is an optical component integrated MOS imaging element. In this case, an optical system including a lens that is currently mass-produced in the above-described deflection electromagnetic actuator and frequently used in a video camera, a digital camera, etc. is integrated with the light receiving element, and the MOS imaging element incorporated in the package is bonded, thereby reducing the cost. Therefore, it is possible to realize an ultra-compact, low power consumption type deflection electromagnetic actuator (light-receiving scanning element) with a uniform quality, and a wide range of imaging is possible. In addition, a three-dimensional shape memory sensor can be realized using this.
[0038]
In order to solve the above-mentioned problem, another deflection actuator of the present invention is a sheet in which a thin permanent magnet bonded plane is a movable part, is pivotally supported by a both-end supported beam, and the other end of the both-end supported beam is a fixed part. And a coil as a magnetic field generating means around the structural material.
[0039]
According to the above invention, the permanent magnet that does not require wiring is arranged in the movable part as the magnetic field generating means, and the magnetic field of the permanent magnet provided in the movable part is arranged in the fixed part around the periphery. And the magnetic field generated based on the current supplied to the coil provided in the stationary part outside the movable part repels, and the movable part is centered on a pair of doubly supported beams that pivotally support the movable part. Rotate. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, no breakage due to wiring damage or metal fatigue does not occur, and a long-life electromagnetic actuator can be provided.
[0040]
An optical scanning element can be realized by adhering a reflecting mirror to the insulator of the movable part of the deflection electromagnetic actuator. In this case, since the reflecting mirror is bonded to the above-described deflection electromagnetic actuator, the mirror deflection electromagnetic actuator (optical scanning element) that deflects the light collected from the LED, the laser beam, etc. is inexpensive, small, and has a low frequency alternating current. It can be provided as a product that can be driven by According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, no breakage due to wiring damage or metal fatigue does not occur, and a long-life mirror deflection electromagnetic actuator (optical scanning element) can be provided.
[0041]
In the optical scanning element, the reflecting mirror is preferably made of a silicon substrate. In this case, the existing semiconductor technology can be used by fabricating the reflecting mirror with a silicon substrate, and it is relatively cheap and has a uniform quality (for example, a high flatness with an unevenness difference of 0.5 μm or less). Is available. Therefore, it is possible to provide a highly accurate (high quality) mirror deflection electromagnetic actuator (optical scanning element) that can reduce costs. In addition, thin film formation techniques such as aluminum and an antireflection film are substantial, and this substantial technique can be used. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, no breakage due to wiring damage or metal fatigue does not occur, and a long-life silicon mirror deflection electromagnetic actuator can be provided.
[0042]
Wiring to the light receiving element is laid along with the coil on the insulator of the movable part of the deflection electromagnetic actuator, and the light receiving element sealed in a small package is bonded to the movable part and electrically connected to the light receiving scanning element. realizable.
[0043]
A feature of the present invention is that various parts are bonded to the movable part of the deflection actuator during the manufacturing process. Thereby, various deflection actuators can be realized. In other words, it is possible to reliably mass-produce products that do not require large-scale manufacturing facilities, have few manufacturing processes, are very simple, and have a low unit price. Therefore, by adhering commonly produced light receiving elements and deflecting them with the deflection actuator of the present invention, the functions of many types of semiconductor light receiving elements currently produced in semiconductor technology can be effectively exhibited. Can do. For example, an image receiving deflection electromagnetic actuator (light receiving scanning element) that can obtain three-dimensional information by receiving and deflecting a two-dimensional image can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, disconnection due to wiring damage or metal fatigue does not occur, and a long-life image receiving deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0044]
In the light receiving scanning element, it is preferable that an optical system including a lens is incorporated in the small package of the light receiving element. In this case, an optical system including a lens is integrated with the light receiving element and is bonded to the above-described deflection electromagnetic actuator, and an ultra-small imaging deflection electromagnetic actuator (light receiving scanning element) can be realized. Is possible. In addition, a three-dimensional shape memory sensor can be realized using this. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, disconnection due to wiring damage or metal fatigue does not occur, and a long-life imaging deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0045]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a charge coupled element. In this case, a general-purpose image-receiving deflection electromagnetic actuator (light-receiving scanning element) that is inexpensive and of uniform quality can be obtained by bonding a charge-coupled element that is currently mass-produced to the deflection electromagnetic actuator and is frequently used in video cameras and digital cameras. Can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, no breakage due to wiring damage or metal fatigue does not occur, and a long-life general-purpose image receiving deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0046]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a MOS image pickup element. In this case, low-power consumption, low-power-consumption image receiving deflection with low power consumption and low quality is achieved by bonding a MOS imaging device that is currently mass-produced to the deflection electromagnetic actuator and is widely used in video cameras and digital cameras. An electromagnetic actuator (light receiving scanning element) can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, disconnection due to wiring damage or metal fatigue does not occur, and a long-life low power consumption type image light receiving deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0047]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a pyroelectric element. In this case, by attaching a pyroelectric element that is currently used in an automatic door or an automatic flushing system of a toilet, etc. to the deflection electromagnetic actuator, an infrared light receiving deflection electromagnetic actuator (light reception) capable of sensing a wide range of organisms and fire. (Scanning element) can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, no breakage due to wiring damage or metal fatigue does not occur, and a long-life infrared light receiving deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0048]
In the imaging deflection electromagnetic actuator, it is preferable that the light receiving element is an optical component integrated charge coupled element. In this case, a general-purpose image-receiving deflection electromagnetic actuator (light-receiving scanning element) that is inexpensive and of uniform quality can be obtained by bonding a charge-coupled element that is currently mass-produced to the deflection electromagnetic actuator and is frequently used in video cameras and digital cameras. Can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, no breakage due to wiring damage or metal fatigue does not occur, and a long-life general-purpose imaging deflection electromagnetic actuator (light-receiving scanning element) can be provided.
[0049]
In the imaging deflection electromagnetic actuator, it is preferable that the light receiving element is an optical component integrated MOS imaging element. In this case, an optical system including a lens that is currently mass-produced in the above-described deflection electromagnetic actuator and frequently used in a video camera, a digital camera, etc. is integrated with the light receiving element, and the MOS imaging element incorporated in the package is bonded, thereby reducing the cost. Therefore, it is possible to realize an ultra-compact, low power consumption type deflection electromagnetic actuator (light-receiving scanning element) with a uniform quality, and a wide range of imaging is possible. In addition, a three-dimensional shape memory sensor can be realized using this. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, disconnection due to wiring damage or metal fatigue does not occur, and a long-life, low power consumption type deflection electromagnetic actuator (light-receiving scanning element) can be provided.
[0050]
In order to solve the above-described problem, another deflection actuator of the present invention has an electrode whose surface is covered with a protective film on the surface, the electrode forming portion is a movable portion, and is pivotally supported by a doubly supported beam. A sheet having the other end of the both-end supported beam as a fixed part is used as a structural material, and another electrode is provided on the opposite side of the movable part electrode of the structural material.
[0051]
According to the above invention, by forming the electrode on the sheet structure material, the flexible substrate technology which is an existing technology can be used, and the deflection electrostatic actuator can be realized at low cost and without making capital investment. In addition, downsizing is possible.
[0052]
An optical scanning element can be realized by adhering a reflecting mirror to the movable part of the deflection electrostatic actuator. In this case, since the reflecting mirror is bonded to the above-described deflecting electrostatic actuator, the mirror deflecting electrostatic actuator (optical scanning element) that deflects the light collected from the LED, laser light, etc. is inexpensive, small, and low frequency. It can be provided as a good product that can be driven by alternating current.
[0053]
In the optical scanning element, the reflecting mirror is preferably made of a silicon substrate. In this case, the existing semiconductor technology can be used by fabricating the reflecting mirror with a silicon substrate, and it is relatively cheap and has a uniform quality (for example, a high flatness with an unevenness difference of 0.5 μm or less). Is available. Accordingly, it is possible to provide a silicon mirror deflecting electrostatic actuator (optical scanning element) that can reduce the cost and is highly accurate (high quality). In addition, thin film formation techniques such as aluminum and an antireflection film are substantial, and this substantial technique can be used.
[0054]
A wiring to a light receiving element is laid together with a coil on an insulator of a movable part of the deflection electrostatic actuator, and the light receiving element sealed in a small package is bonded to the movable part and electrically connected to the light receiving scanning element. Can be realized.
[0055]
In this case, various deflection electrostatic actuators can be realized by bonding various parts to the movable part of the deflection electrostatic actuator. In other words, it is possible to reliably mass-produce products that do not require large-scale manufacturing facilities, have few manufacturing processes, are very simple, and have a low unit price. Therefore, by adhering commonly produced light receiving elements and deflecting them by the deflection electrostatic actuator of the present invention, the functions of many types of semiconductor light receiving elements currently produced in semiconductor technology are effectively exhibited. Can be made. For example, an image receiving deflection electrostatic actuator (light receiving scanning element) that can obtain three-dimensional information by receiving and deflecting a two-dimensional image can be realized.
[0056]
In the light receiving scanning element, an optical system including a lens is preferably incorporated in the small package of the light receiving element. In this case, an ultra-small imaging deflection electrostatic actuator (light-receiving scanning element) can be realized by bonding an optical system including a lens to the above-described electrostatic actuator, which is integrated with the light-receiving element and incorporated in the package. Imaging can be performed. In addition, a three-dimensional shape memory sensor can be realized using this.
[0057]
In the image receiving deflection electrostatic actuator, the light receiving element is preferably a charge coupled element. In this case, a general-purpose image receiving deflection electrostatic actuator (light receiving scanning with low quality and uniform quality) is bonded by bonding a charge coupled device which is currently mass-produced to the deflection electrostatic actuator and is frequently used in video cameras and digital cameras. Element) can be realized.
[0058]
In the image receiving deflection electrostatic actuator, the light receiving element is preferably a MOS image pickup element. In this case, low-power consumption, low-power-consumption image reception with low power consumption is achieved by bonding a MOS imaging device that is currently mass-produced to the deflection electrostatic actuator and is widely used in video cameras and digital cameras. A deflection electrostatic actuator (light receiving scanning element) can be realized.
[0059]
In the image receiving deflection electrostatic actuator, the light receiving element is preferably a pyroelectric element. In this case, an infrared light receiving deflection actuator (light receiving device) capable of sensing a wide range of organisms and fires by adhering a pyroelectric element currently used in an automatic door or toilet flushing system to the deflection electrostatic actuator. (Scanning element) can be realized.
[0060]
In the imaging deflection electrostatic actuator, it is preferable that the light receiving element is an optical component integrated charge coupled device. In this case, by attaching a charge coupled device that is currently mass-produced to the deflection electrostatic actuator and is frequently used in video cameras, digital cameras, etc., an ultra-compact general-purpose imaging deflection electrostatic actuator (low-cost and uniform quality) ( Light receiving scanning element) can be realized, and a wide range of imaging is possible. In addition, a three-dimensional shape memory sensor can be realized using this.
[0061]
In the imaging deflection electrostatic actuator, it is preferable that the light receiving element is a MOS imaging element integrated with an optical system component. In this case, an optical system including a lens that is currently mass-produced in the deflection electrostatic actuator and frequently used in a video camera, a digital camera, or the like is integrated with a light receiving element, and a MOS imaging element incorporated in a package is bonded. An ultra-compact and low-power imaging deflection electrostatic actuator (light-receiving scanning element) with uniform quality can be realized, and a wide range of imaging is possible. In addition, a three-dimensional shape memory sensor can be realized using this.
[0062]
In any of the deflection actuators of the present invention, it is preferable that the sheet is an insulator and is made of polyimide. In this case, polyimide is mainly used as a material for the flexible substrate which is an existing product, but this material is a good electrical insulating material and is a dielectric. Moreover, it is a material excellent in mechanical strength and dimensional stability. This is proven in the market. Therefore, the fact that this is used as a material for the sheet means that a high-quality deflection actuator (deflection electromagnetic actuator or deflection electrostatic actuator) can be provided.
[0063]
The fixed magnetic field generating means of the deflection electromagnetic actuator is preferably a permanent magnet. In this case, magnets such as neodymium magnets (neodymium, iron, boron) and SmCo magnets (samarium, cobalt) that are stable and have good characteristics among the magnets that are currently widely used as general materials are used as means for generating a fixed magnetic field. It is available relatively inexpensively. By using these materials, it is possible to provide an electromagnetic actuator that is inexpensive and has stable characteristics.
[0064]
The fixed magnetic field generating means of the deflection electromagnetic actuator may be an electromagnet. In this case, the strength of the magnetic field can be varied by the current by using an electromagnet as means for generating a fixed magnetic field. An electromagnetic actuator with a high degree of freedom in design specifications can be provided.
[0065]
In the deflection actuator, it is preferable that a lens-integrated CMOS image sensor is bonded to the movable part. In this case, by attaching a lens-integrated CMOS image sensor, it is possible to realize a follow-up portable small camera system that can receive an image without the object moving off the screen. Such a small and low power consumption follow-up camera system can be applied to mobile phones and the like, and an image system closely related to daily life can be constructed.
[0066]
In the deflection actuator, it is preferable to avoid the beam portion by a jumper wire as a method of supplying current to the movable portion. In this case, it is possible to provide a structure capable of avoiding repeated torsional forces by using a jumper wire (floating wire) for the wire portion of the beam. If the wiring is fixed and arranged on the beam portion, a torsional force acts on the wiring every time the movable portion rotates, and shear stress is generated. Since the wiring is formed of metal, if it is rotated at a large angle, metal fatigue accumulates, causing damage and disconnection. However, by using, for example, a curled bridge with a jumper wire, the force is distributed, repeated torsional force is avoided, the problem of deterioration due to metal fatigue of the wiring can be solved, and the deflection at a large angle is also involved. Therefore, the life of the deflection actuator can be extended.
[0067]
In the deflection actuator, the beam may have a ramen structure. In this case, the doubly supported beam can move elastically and the torsional force is distributed, so the force applied to the wiring formed in the beam part is also distributed, and the movable part is rotated at a large deflection angle. However, the force applied to the wiring falls within the category of elastic deformation, can solve the problem of metal fatigue, and can provide a deflection actuator with a long life even when deflected at a large deflection angle.
[0068]
In order to solve the above-described problem, another deflection actuator of the present invention forms a ferroelectric on the surface of the movable part, and the movable part is pivotally supported by a double-supported beam, and the other end of the dual-supported beam is fixed. And an electrode opposed to both surfaces of the surface of the fixed portion.
[0069]
According to the above invention, by performing the charge generation means of the movable part with a ferroelectric material, it is not necessary to apply a voltage to the movable part through the wiring, and the wiring of the beam portion can be eliminated. Therefore, a long-life ferroelectric deflecting electrostatic actuator can be realized.
[0070]
In the deflection electrostatic actuator, the movable part is made of barium titanate, lead titanate, lead zirconate, Rochelle salt, ammonium phosphate, potassium phosphate, barium strontium titanium oxide, SBLN, PZT, or lead zirconate titanate. It is preferable that a pattern is formed on the surface with any ferroelectric.
[0071]
In addition, ferroelectric materials are used in various electronic parts and continue to advance. For example, as a result of improvement in thin film technology, it has become possible to form a film having a relatively large thickness uniformly. In addition to barium titanate, materials having good characteristics such as BST and PZT have been developed. If this technique is used, a ferroelectric can be formed on a sheet, and a good ferroelectric-type deflection electrostatic actuator can be provided.
[0072]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention will be described below with reference to FIGS.
[0073]
A case where the present invention is applied to a deflection electromagnetic actuator will be described below. As shown in FIG. 2, the deflection electromagnetic actuator has a configuration in which protective films 1a and 1b are provided on the upper surface and the lower surface of the sheet substrate 6, respectively. The sheet substrate 6 is not particularly limited as long as the sheet substrate 6 can be formed into a sheet shape with a sheetable material such as polyimide. The use of polyimide, which is a relatively elastic organic insulating material, is preferable because brittle fracture is unlikely to occur and a large deflection angle can be obtained without considering the mechanical resonance frequency. That is, the frequency can be reduced.
[0074]
As shown in FIG. 2, the deflection electromagnetic actuator is provided with a movable portion 3, which is pivotally supported by a pair of both-end supported beams 4, 4 and the other end of the both-end supported beams 4, 4. Are fixed portions and formed integrally with the sheet substrate 6. The movable portion 3 also has a sheet structure configured in a sheet shape using the same sheetable material as the sheet substrate 6. Such a sheet structure can utilize the existing flexible substrate technology made of polyimide or the like, and can easily produce a desired one. When the doubly supported beams 4 and 4 are made of polyimide, the spring constant is larger than that of silicon, and a large deflection angle can be realized with a smaller torque. That is, it leads to low power consumption.
[0075]
A planar coil 2 is provided on the surface of the movable part 3 (in the case of FIG. 3, it is provided in a spiral shape), and the planar coil 2 is covered with the protective film 1a. The lower surface of the movable portion 3 is covered with the protective film 1b, and the movable portion 3 can be rotated by twisting the both-end supported beams 4 and 4.
[0076]
As shown in FIG. 3, the movable part 3 is configured such that the upper and lower surfaces are covered with the protective films 1a and 1b, and the planar coil 2 is not exposed. Can be suppressed. The deflection angle can be controlled by controlling the magnitude of the current flowing through the planar coil 2.
[0077]
The movable part 3 is formed as follows when a flexible substrate technology made of polyimide or the like is used. That is, a copper foil or the like is bonded to the movable part 3 to form the planar coil 2 and lands are formed in the vicinity of the both-end supported beams 4. The land is a through hole, the planar coil 2 is formed on both sides, and the front and back circuits are connected. Further, the protective films 1a and 1b are formed on both surfaces. This is a method used for general substrate fabrication.
[0078]
Then, the periphery of the planar coil 2 formed as described above is punched out with a mold or the like so as to face each other in a substantially U shape, and a groove 30 (see FIG. 2) is formed. Thereby, the said movable part 3 provided with the both-end beams 4 * 4 is formed.
[0079]
In the sheet substrate 6, permanent magnets 7 and 7 are respectively provided on end surfaces in a positional relationship parallel to the both-end supported beams 4 and 4. FIG. 2 shows the case where the permanent magnets 7 and 7 are provided, but the present invention is not limited to this. For example, as shown in FIG. A configuration in which electromagnets 8 and 8 are provided may be used. In addition, about the member which has the same function as FIG. 2, the same reference number is attached and detailed description is abbreviate | omitted.
[0080]
Further, in order to efficiently generate a magnetic field and prevent the magnetic field from leaking as much as possible to the outside, as shown in FIG. 5, the permanent magnets 7 and 7 are surrounded by a pure iron yoke 25, and the permanent magnets 7 and 7 are It is preferable that the yoke 25 is bonded with, for example, a thermosetting adhesive and annealed. In this case, a longitudinal magnetic field molded product is used as the permanent magnets 7.
[0081]
In the deflection electromagnetic actuator according to the present embodiment, the planar coil 2 whose surface is covered with the protective film 1 is formed on the surface as described above.・ A sheet structure material pivotally supported by 4 and having the other end of the both-end supported beams 4 and 4 as a fixed portion, and provided with magnetic field generating means (permanent magnets 7 and 7 or electromagnets 8 and 8) around the structure material. ing.
[0082]
According to the above-described deflection electromagnetic actuator, the movable part 3 has a sheet structure configured in a sheet shape with a sheetable material such as polyimide. For example, the movable part 3 can be formed of a flexible substrate made of polyimide. When the thickness is small, the spring constant can be designed according to the width of the beam, and the deflection angle can be designed without being strongly limited by the mechanical resonance frequency. As a result, the movable part 3 can be rotated over a wide range from a high frequency signal to a low frequency signal.
[0083]
Here, the reflecting mirror will be described with reference to FIG. As shown in FIG. 6, the reflecting mirror 31 is required to have a small surface roughness. Therefore, the reflecting mirror 31 is made of an aluminum thin film 9 obtained by vapor-depositing aluminum on a silicon single crystal wafer. It is obtained by coating the membrane 10. The reflecting mirror 31 is formed on the movable portion 3 shown in FIG. 2 or 4 by adhering to the flat substrate 11 made of a flexible substrate made of polyimide.
[0084]
The reason why it is preferable to use the silicon single crystal wafer as the reflecting mirror 31 is that the existing semiconductor technology can be used, and a product with relatively low quality and uniform quality can be obtained (high flatness with an unevenness difference of 0.5 μm or less. The thing of the degree is available.) Therefore, it is possible to provide a reflection mirror with high accuracy (high quality) as well as cost reduction. In addition, thin film formation techniques such as aluminum and an antireflection film are substantial, and this substantial technique can be used.
[0085]
Next, referring to FIG. 1, how the planar coil 2 provided on the movable part 3 is electrically connected to the electrode terminals 35 and 39 which are the fixed parts of the sheet substrate 6. explain. A DC or AC electric signal (current signal or voltage signal) is applied to the planar coil 2 through the electrode terminals 35 and 39.
[0086]
As shown in FIG. 1, the planar coil 2 is provided in a spiral shape between an end portion (land) 36 and an end portion (land) 37, and the end portion 36 is interposed via a floating wiring 20 (jumper wire). The electrode terminal 35 is connected. The end portion 37 is connected to the electrode terminal 39 through a through hole in the end portion (land) 38 and the floating wiring 20 (jumper wire) by forming a planar coil on the back surface through the through hole. ing. As described above, the floating wiring 20 is provided so as not to be fixed on the both-supported beams 4 and 4, so that the force is dispersed when the rotational force acts on the both-supported beams 4 and 4.
[0087]
The floating wiring 20 is not particularly limited as long as it is a conductor. FIG. 1 shows the floating wiring 20 in a state of being looped once (a state of being wound once). However, the number of loops is not limited to one. There is no particular limitation as long as the floating state can be maintained during the rotation without causing the rotation of 3 and the obstruction of the electromagnetic wave or the magnetic field.
[0088]
As described above, in the example of FIG. 1, the end 36 of the planar coil 2 is not connected via the lead pattern fixed on the both-end supported beams 4 and 4 but via the floating wiring 20. And 38 are connected to the electrode terminals 35 and 39, respectively, so that the stress acting on the floating wiring 20 is dispersed and ignored even if the both-supported beams 4 and 4 are twisted as the movable part 3 rotates. Small enough to do. As a result, metal fatigue is not accumulated in the floating wiring 20, and damage or fatigue disconnection due to the fatigue can be reliably avoided, so that the life of the deflection actuator is extended.
[0089]
As described above, the movable part 3 has a sheet structure configured in a sheet shape with a sheetable material such as polyimide, and is connected via a lead pattern or the like provided on the both-end supported beams 4. Instead, the ends 36 and 38 of the planar coil 2 are connected to the electrode terminals 35 and 39 through the floating wiring 20, respectively. (A) Metal fatigue is accumulated, causing damage or fatigue breakage. (B) Even if it does not match the mechanical resonance frequency ω, a large torsion angle can be obtained, and (c) a large-scale manufacturing facility is not required, and extremely high reliability, long life, and low A deflection actuator capable of realizing power consumption can be manufactured, and the unit price is low and downsizing is possible.
[0090]
Here, another example of avoiding damage and disconnection due to metal fatigue of the connection wiring will be described below with reference to FIG. Note that members having the same functions as those in the example of FIG. 1 are given the same member numbers, and detailed descriptions thereof are omitted.
[0091]
By making the cantilever beams 4 and 4 have a ramen structure (ramen structure beam), the cantilever beams 4 and 4 can move elastically and the torsional stress is dispersed. Even if a lead pattern is formed on the beams 4 and 4, it is possible to disperse the stress applied to (act on) the lead pattern. As a result, the life of the lead pattern is extended (the life of the deflection actuator is extended). Can be achieved reliably. FIG. 7 merely shows an example of the ramen structure, and the present invention is not limited to this configuration.
[0092]
Further, another example for avoiding damage and disconnection due to metal fatigue of the connection wiring will be described below with reference to FIG. Note that members having the same functions as those in the example of FIG. 1 are given the same member numbers, and detailed descriptions thereof are omitted.
[0093]
In the example shown here, as shown in FIG. 8, a thin permanent magnet 16 is bonded to the movable part 3, the planar coil 2 is formed in the fixed part 5 around the movable part 3, It is different from the examples of FIGS. 1 and 7 in that it is not necessary to provide connection wiring.
[0094]
According to the configuration of FIG. 8, it is not necessary to provide the planar coil 2 on the movable part 3, and it is not necessary to fix the connection wiring on the both-end supported beams 4, 4. Even if the cantilever beams 4 and 4 are twisted, the planar coil 2 is provided not on the movable portion 3 but on the fixed portion 5, so that the connection wiring fixed on the cantilever beams 4 and 4 as in the prior art is used. The influence of force acting is lost. That is, the above-described damage and fatigue disconnection due to the action of force do not occur, so that the life of the deflection actuator is reliably increased.
[0095]
Here, another example of avoiding damage or disconnection due to metal fatigue of the connection wiring will be described below with reference to FIG. Note that members having the same functions as those in the example of FIG. 1 are given the same member numbers, and detailed descriptions thereof are omitted.
[0096]
In the example shown here, as shown in FIG. 9, insulators 17 and 17 are provided in place of the permanent magnets 7 and 7 of FIG. 1, and electrodes 18a and 18c are provided on the upper and lower surfaces of these insulators 17 and 17, respectively. And the electrodes 18b and 18d are provided, and the ferroelectrics 19 and 19 are provided on the movable portion 3 at positions symmetrical to the line connecting the both cantilevers 4 and 4, and on the both cantilevers 4 and 4 1 is different from the example of FIG. 1 in that the connection wiring and the coil 3 are not required.
[0097]
An electric field is generated by applying a voltage between the electrodes 18a-18b. At this time, a voltage is applied between the electrodes 18c-18d so that an electric field opposite to the electric field generated between the electrodes 18a-18b is generated. The ferroelectric materials 19 and 19 are ferroelectric materials such as barium titanate, lead titanate, lead zirconate, Rochelle salt, ammonium phosphate, potassium phosphate, BST (barium strontium titanium oxide), SBLN, Either PZT or lead zirconate titanate is patterned on both sides of the movable part 3 (positions symmetric with respect to the line connecting the both-supported beams 4 and 4 on the movable part 3). These ferroelectrics 19 and 19 are always in a state where, for example, negative charges are held.
[0098]
According to the configuration of FIG. 9, the charges held in the ferroelectric materials 19 and 19 receive an attractive force or a repulsive force through the electric field generated between the electrodes 18c-18d and between the electrodes 18a-18b, As a result, the double-supported beams 4 and 4 are twisted, and the movable portion 3 is rotated.
[0099]
Therefore, according to the configuration of FIG. 9, it is not necessary to provide the planar coil 2 in the movable portion 3 and it is not necessary to fix the connection wirings in the both-end supported beams 4 and 4. As mentioned above, even if the cantilever beams 4 and 4 are twisted, the above-described damage or fatigue breakage caused by the force acting on the connection wiring fixed on the both cantilever beams 4 and 4 is not caused. Does not occur. Therefore, the lifetime is surely increased.
[0100]
The example of FIG. 9 shows an example in which the electrodes 18a to 18d are provided outside the movable portion 3, but the present invention is not limited to this, and although not shown, the ferroelectrics 19 and 19 in FIG. Alternatively, an electrode (a pair of electrodes) may be provided at the position of the ferroelectric materials 19 and 19, and a voltage may be applied to the electrodes via the floating wiring 20 in FIG.
[0101]
In this case, the movable portion 3 is made of an organic insulating material such as polyimide, and an electric field is generated because a voltage is applied between the pair of electrodes. At this time, an electric field is generated between the electrodes, and this electric field changes depending on the applied voltage and its polarity and receives an attractive force or a repulsive force, thereby twisting the doubly supported beams 4 and 4. Thus, the movable part 3 rotates.
[0102]
Therefore, even in this case, since a voltage for generating electric charges is applied through the floating wiring 20, even if the both-supported beams 4 and 4 are twisted with the rotation of the movable portion 3, the floating wiring 20 is affected. The force to be distributed is small enough to be ignored. As a result, metal fatigue is not accumulated in the floating wiring 20, and damage and fatigue disconnection caused by the fatigue can be reliably avoided, so that the life of the deflection actuator is extended.
[0103]
By the way, in order to scan two dimensions with the reflecting mirror 31, a scanning time is required, which is not suitable for real-time control (apparatus). Further, in a configuration in which a laser beam is scanned and a signal is obtained by a light receiving element, the number of necessary parts increases. In recent years, pyroelectric elements that sense infrared rays and ultra-small lens-integrated light-receiving elements (for example, LZ0P3800 (lens-integrated CMOS image sensor) manufactured by Sharp Corporation) have become available.
[0104]
Therefore, a description will be given of a deflection actuator in which another optical component is bonded to the movable portion 3 instead of the reflecting mirror 31. In addition, about the member which has the same function as the said member, the same reference number is attached and detailed description is abbreviate | omitted.
[0105]
FIG. 10 shows an example of a deflection actuator in which a charge coupled device (CCD) 12 is bonded to the movable part 3. FIG. 11 shows an example of a deflection actuator in which a charge coupled device 12 including a lens 13 is bonded to the movable portion 3. FIG. 12 shows an example of a deflection actuator in which a MOS image sensor 14 including a lens 13 is bonded to the movable part 3. FIG. 13 shows an example of a deflection actuator in which the pyroelectric element 15 is bonded to the movable part 3.
[0106]
By scanning the charge coupled device 12, real-time imaging can be performed. The pyroelectric element 15 senses infrared rays, and by sensing the pyroelectric element 15 attached to the movable part 3 and scanning it, living organisms and fire can be sensed over a wide range. Further, the charge coupled device 12 including the lens 13 and the MOS imaging device 14 including the lens 13 are ultra-small lens-integrated light receiving devices that can sense two-dimensional information in real time and fuse with image recognition technology. Thus, a shape recognition sensor capable of following a wide range can be realized.
[0107]
As shown in FIGS. 10 to 13, according to the above-described deflection actuator, since only the optical component is bonded to the movable part 3, a large-scale manufacturing facility is unnecessary, and the reflecting mirror 31 is connected to the charge coupled device. 12, the charge coupled device 12 including the lens 13, the MOS imaging device 14 including the lens 13, and the pyroelectric device 15 can be replaced with optical components, and the number of manufacturing processes can be reduced. Unit price is low and mass production is possible. That is, the optical system can be downsized as a whole. Examples of other optical components include a beam splitter, a prism, and a lens. In addition, the light receiving element is not limited to the CCD, and may be another type such as a MOS image pickup element, BBD, or PSD.
[0108]
Although not shown in the figure, the lens-integrated CMOS image sensor of 1 cc size is bonded to the movable portion 3 and connected by a floating wiring 20 (jumper wire) that moves freely, so that the object does not come off the screen. A follow-up portable small camera system capable of receiving images with high accuracy can be realized.
[0109]
For example, as shown in FIG. 17, an image is captured via a lens-integrated CMOS image sensor 150, stored as image data in the storage element 151, and the pattern recognition / control unit 152 deflects based on the stored image data. By controlling the rotation of the movable part of the actuator 153, a highly accurate and compact follow-up portable portable camera system can be realized with a simple configuration.
[0110]
In the first and eighth deflection actuators according to the present invention, as described above, a magnetic field is applied to the movable portion provided with the coil, and the movable portion is arranged around a pair of both-end supported beams that pivotally support the movable portion. In the rotating deflection actuator, the movable part and the both-end supported beam are formed in a sheet shape from a sheetable material, and a current is applied to the coil via a floating wiring.
[0111]
According to the above invention, when a magnetic field is applied to the movable part and a current is applied to the coil provided on the movable part, Lorentz force acts on the coil. By this Lorentz force, the movable part rotates around a pair of both-end supported beams that pivotally support the movable part.
[0112]
Conventionally, an electric current is applied via a connection wiring (lead pattern) fixed on a both-end supported beam. For this reason, if the cantilever is twisted with the rotation of the movable part, the connection wiring fixed on the both-supported beam is also twisted, and as the number of rotations of the movable part increases, As the stress acting on the above-mentioned connection wiring becomes stronger, the connection wiring fixed on the both-end supported beam accumulates metal fatigue due to repeated torsion and causes damage or fatigue breakage.
[0113]
Therefore, in the above invention, a current is applied to the coil via the floating wiring. In this way, the connection wiring is not fixed on the both-end supported beam, but is made a floating wiring, so that the floating wiring 20 is not fixed and can be moved freely. Therefore, it is possible to reliably disperse the stress due to the torsion of the doubly-supported beam, and the dispersive stress becomes negligibly small. As a result, metal fatigue is not accumulated in the floating wiring, and damage or fatigue disconnection caused by the fatigue can be reliably avoided, so that the life of the connection wiring can be extended.
[0114]
In addition, the flat coil can be made into a sheet by a flexible substrate manufacturing technique that has already been technically established, and mass production is possible even if the factory is not equipped with facilities for semiconductor manufacturing processes. Since the above steps are not required, the number of manufacturing steps may be small, and the overall process is very simple, the unit price is low, and downsizing is possible.
[0115]
In addition, in the above invention, since the movable portion and the both-end supported beam are configured in a sheet shape with a sheetable material, by designing the width of the beam without depending on the mechanical resonance frequency, A large twist angle is obtained. That is, the frequency can be reduced.
[0116]
As described above, the second deflection actuator according to the present invention includes a movable part pivotally supported by a pair of both-end supported beams and provided with a permanent magnet, and a coil for energizing a fixed part outside the movable part is provided. The movable part and the both-end supported beam are provided in a sheet shape with a sheetable material.
[0117]
According to the above invention, the magnetic field of the permanent magnet provided in the movable part and the magnetic field generated based on the current supplied to the coil provided in the fixed part outside the movable part repel each other, and the movable part Will rotate around a pair of doubly supported beams that pivotally support the movable part.
[0118]
As described above, it is not necessary to provide a coil in the movable part, and it is not necessary to provide a connection wiring (lead pattern) in the both-end supported beam. As the movable part is rotated, the both-end supported beam is twisted. However, since the coil is provided not on the movable part but on the fixed part, the wiring is not twisted, and therefore no stress acts on the coil of the fixed part. As a result, the above-described damage or fatigue breakage due to the action of the stress can be reliably avoided, and the life can be reliably extended.
[0119]
Moreover, it is only necessary to provide a permanent magnet on the movable part, and the coil of the fixed part can be produced by the flexible substrate technology in the same manner as described above. Therefore, a large-scale manufacturing facility such as a semiconductor manufacturing process becomes unnecessary, and a factory equipped with such a facility. Even if it is not, mass production becomes possible. Further, since the above steps are not required, the number of manufacturing steps may be small, and as a whole, the manufacturing process is very simple, the unit price is low, and the size can be reduced.
[0120]
In addition, in the above-described invention, since the movable part and the both-end supported beam are formed in a sheet shape from a sheetable material, a large twist angle can be obtained even when the mechanical resonance frequency is not matched. .
[0121]
As described above, the ninth deflection actuator according to the present invention is a deflection actuator that rotates the movable portion around a pair of both-end supported beams having connection wirings. The deflection actuator includes the movable portion and the movable portion. The doubly-supported beam is formed into a sheet shape from a sheetable material, and the doubly-supported beam has a ramen structure.
[0122]
According to the above-mentioned invention, since the both-supported beam has a ramen structure, the both-supported beam can move elastically and the force is distributed, so that the connection wiring (lead pattern) is formed on the both-supported beam. Even if this is done, the force applied (acting) to the connection wiring is dispersed and reduced to a negligible level, and as a result, the life of the connection wiring can be reliably extended.
[0123]
Moreover, it is possible to produce with the flexible substrate technology just by making the above-mentioned doubly supported beam a ramen structure, and no large-scale manufacturing equipment such as a semiconductor manufacturing process is required, and mass production is possible even if it is not a factory equipped with such equipment. . Further, since the above steps are not required, the number of manufacturing steps may be small, and as a whole, the manufacturing process is very simple, the unit price is low, and the size can be reduced.
[0124]
In addition, in the above-described invention, since the movable part and the both-end supported beam are formed in a sheet shape from a sheetable material, a large twist angle can be obtained even when the mechanical resonance frequency is not matched. .
[0125]
As described above, the tenth deflection actuator according to the present invention is provided with the movable portion having the ferroelectric and the electrode on the fixed portion, and applies an electric voltage to the electric charge of the ferroelectric by applying a voltage to the electrode. An electric field generating means is provided.
[0126]
According to the above invention, the electric charge from the ferroelectric on the movable part receives a force by the electric field from the electric field generating means, and based on this force, the movable part rotates around the doubly supported beam. . That is, the electric charge of the ferroelectric substance receives an attractive force or a repulsive force via the electric field, whereby the both-end supported beam is twisted and the movable part rotates.
[0127]
As described above, in the above invention, it is not necessary to provide a coil in the movable part and it is not necessary to provide a connection wiring on the both-end supported beam. Even if the cantilever is twisted, the above-described damage or fatigue breakage due to the stress acting on the connection wiring fixed on the both-end supported beam as in the prior art does not occur. Therefore, the lifetime can be reliably increased.
[0128]
In addition, in the above-described invention, since the movable part and the both-end supported beam are formed in a sheet shape from a sheetable material, a large twist angle can be obtained even when the mechanical resonance frequency is not matched. .
[0129]
According to the eleventh deflection actuator of the present invention, as described above, in the tenth deflection actuator, the ferroelectric is composed of barium titanate, lead titanate, lead zirconate, Rochelle salt, ammonium phosphate, potassium phosphate, Any one of barium strontium titanium oxide, SBLN, PZT, or lead zirconate titanate is patterned on the movable part.
[0130]
As described above, the third deflection actuator according to the present invention is configured in a sheet shape with an organic insulating material in which a movable part having a pair of opposed electrodes and a doubly supported beam that pivotally supports the movable part can be formed into a sheet. Then, a voltage is applied to the electrode through the floating wiring.
[0131]
In this case, the movable part is formed of an organic insulating material, and when a voltage is applied between the pair of electrodes, an electric charge is generated. At this time, an electric field is generated between the electrodes of the fixed part, and the electric charge receives an attractive force or a repulsive force via the electric field, whereby the doubly supported beam is twisted and the movable part rotates. Become.
[0132]
Therefore, even in this case, since a voltage for generating an electric charge is applied via the floating wiring, even if the both-end supported beam is twisted as the movable portion rotates, the stress acting on the floating wiring is dispersed. Small enough to be ignored. As a result, metal fatigue is not accumulated in the floating wiring, and damage or fatigue disconnection can be reliably avoided, so that the life of the connection wiring is extended.
[0133]
As described above, the fourth deflection actuator according to the present invention is characterized in that, in any one of the first to eleventh deflection actuators, the movable portion and the doubly supported beam are made of polyimide. . In this case, the existing flexible substrate technology can be used, and the manufacture becomes easy.
[0134]
As described above, the fifth and sixth deflection actuators according to the present invention are characterized in that, in any one of the first and second deflection actuators, the magnetic field is generated by a permanent magnet or an electromagnet.
[0135]
As described above, the first optical scanning element according to the present invention is characterized in that a reflecting mirror is bonded to the movable portion of any one of the first to third and tenth deflection actuators. Thereby, a mirror deflection actuator can be realized. In this case, it is only necessary to carry out a simple process of bonding, so the unit price is low, miniaturization, long life and low power consumption are possible, and a large deflection angle is hardly controlled by the mechanical vibration frequency. Is obtained. That is, the frequency can be reduced.
[0136]
As described above, the second optical scanning element according to the present invention is characterized in that, in the first optical scanning element, the reflecting mirror is made of a silicon wafer. In this case, the existing semiconductor technology can be used, and a relatively inexpensive and uniform product (for example, a high flatness with an unevenness difference of 0.5 μm or less) can be easily obtained. Therefore, it is possible to provide a highly accurate (high quality) mirror deflection actuator that can be reduced in cost. In addition, thin film formation techniques such as aluminum and an antireflection film are substantial, and this substantial technique can be used.
[0137]
As described above, the first and second light-receiving scanning elements according to the present invention include a light-receiving element or an optical system component including a lens and a light-receiving element in the movable portion of the first to third and tenth deflection actuators. It is characterized in that the package is bonded.
[0138]
In the third to fifth light receiving scanning elements according to the present invention, as described above, in the first and second light receiving scanning elements, the light receiving element is a charge-coupled element, a MOS imaging element, or a pyroelectric element. It is a feature.
[0139]
As described above, the deflection actuator according to the present invention is characterized in that a lens-integrated CMOS image sensor is bonded to the movable portion of the first to third and tenth deflection actuators. In this case, it is possible to realize a follow-up portable small camera system that can receive an image without the object moving off the screen. Such a small and low power consumption follow-up camera system can be applied to mobile phones and the like, and an image system closely related to daily life can be constructed.
[0140]
As described above, various deflection actuators can be realized by simply bonding an optical component to the deflection actuator of the present invention. Therefore, it is possible to reliably mass-produce various deflection actuators that do not require a large-scale manufacturing facility, have a small number of manufacturing processes, are very simple, are inexpensive, and can be downsized. That is, since it is only necessary to bond the optical components as described above, the application range is widened, and it can be used for a wide range of applications including optical systems.
[0141]
Furthermore, it is possible to bond a part made by using a micromachine technique or the like, or a part having a very small quality and produced in large quantities from a mold made by a micromachine technique. In addition, the reliability of the product is significantly improved by extending the life.
[0142]
【The invention's effect】
As described above, the deflection actuator of the present invention forms a coil whose surface is covered with a protective film on the surface, and a portion where this coil is formed is a movable part, and is pivotally supported by a double-supported beam. A sheet having the other end as a fixed portion is used as a structural material, and magnetic field generating means is provided around the structural material.
[0143]
According to the above invention, the structure of the deflection actuator is simplified by using a single sheet as the structural material, and the manufacturing process is reduced as compared with the prior art. In addition, the torsional angle φ increases as the value of the second moment of inertia lp acting on the beam decreases. The quadratic pole moment of inertia lp is bh (b, where b is the beam thickness and h is the width. ² + H ² ) / 12, but by using a sheet structure, b << h and h ² Against b ² Is a negligible value, so lp = bh ^Three / 12. Since b is a small value, lp is also reduced, and the twist angle φ is increased. Furthermore, the helix angle φ can be designed by setting the value of h.
[0144]
Therefore, it is possible to realize a deflection electromagnetic actuator that is inexpensive, small, and can be deflected with a relatively large deflection angle by driving with a low-frequency alternating current without being aware of the resonance frequency. In addition, the effect of reducing the power consumption is also achieved.
[0145]
An optical scanning element can be realized by adhering a reflecting mirror to the insulator of the movable part of the deflection electromagnetic actuator. In this case, since the reflecting mirror is bonded to the above-described deflection electromagnetic actuator, the mirror deflection electromagnetic actuator (optical scanning element) that deflects the light collected from the LED, the laser beam, etc. is inexpensive, small, and low frequency AC current. It also has the effect that it can be provided as a product that can be driven by.
[0146]
The reflecting mirror is preferably made of a silicon substrate. In this case, the existing semiconductor technology can be used by fabricating the reflecting mirror with a silicon substrate, and it is relatively cheap and has a uniform quality (for example, a high flatness with an unevenness difference of 0.5 μm or less). Is available. Therefore, it is possible to provide a silicon mirror deflection electromagnetic actuator (optical scanning element) that can reduce the cost and has high accuracy (high quality). In addition, the technology for forming a thin film such as aluminum or an antireflection film is enhanced, and the effect that this enhanced technology can be used is also achieved.
[0147]
A light receiving scanning element can be realized by laying a wiring to a light receiving element together with a coil on an insulator of a movable part of the deflection actuator, and bonding and electrically connecting the light receiving element enclosed in a small package to the movable part. .
[0148]
A feature of the present invention is that various parts are bonded to the movable part of the deflection actuator during the manufacturing process. Thereby, various deflection actuators can be realized. In other words, it is possible to reliably mass-produce products that do not require large-scale manufacturing facilities, have few manufacturing processes, are very simple, and have a low unit price. Therefore, by adhering commonly produced light receiving elements and deflecting them with the deflection actuator of the present invention, the functions of many types of semiconductor light receiving elements currently produced in semiconductor technology can be effectively exhibited. Can do. For example, there is an effect that an image receiving deflection electromagnetic actuator (light receiving scanning element) capable of obtaining three-dimensional information can be realized by receiving and deflecting a two-dimensional image.
[0149]
In the light receiving scanning element, it is preferable that an optical system including a lens is incorporated in the small package of the light receiving element. In this case, an optical system including a lens is integrated with the light receiving element and is bonded to the above-described deflection electromagnetic actuator, and an ultra-small imaging deflection electromagnetic actuator (light receiving scanning element) can be realized. Is possible. Moreover, the effect that a three-dimensional shape memory sensor can be realized by using this is also exhibited.
[0150]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a charge coupled element. In this case, a general-purpose image-receiving deflection electromagnetic actuator (light-receiving scanning element) that is inexpensive and of uniform quality can be obtained by bonding a charge-coupled element that is currently mass-produced to the deflection electromagnetic actuator and is frequently used in video cameras and digital cameras. It also has the effect that can be realized.
[0151]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a MOS image pickup element. In this case, low-power, low-power-consumption image-receiving / deflection electromagnetic actuators (light receiving devices) that are inexpensive and of uniform quality can be obtained by bonding charge coupled devices that are currently mass-produced to the deflection electromagnetic actuators and are widely used in video cameras and digital cameras. (Scanning element) can also be realized.
[0152]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a pyroelectric element. In this case, by attaching a pyroelectric element that is currently used in an automatic door or an automatic flushing system of a toilet, etc. to the deflection electromagnetic actuator, an infrared light receiving deflection electromagnetic actuator (light reception) capable of sensing a wide range of organisms and fire. (Scanning element) can also be realized.
[0153]
In the imaging deflection electromagnetic actuator, it is preferable that the light receiving element is an optical component integrated charge coupled element. In this case, an optical system including a lens that is currently mass-produced in the deflection electromagnetic actuator and is frequently used in a video camera, a digital camera, etc. is integrated with the light receiving element, and the charge coupled element incorporated in the package is bonded, thereby reducing the cost. Therefore, it is possible to realize an ultra-small general-purpose imaging deflection electromagnetic actuator (light-receiving scanning element) with uniform quality, and a wide range of imaging is possible. In addition, a three-dimensional shape memory sensor can be realized using this.
[0154]
In the imaging deflection electromagnetic actuator, it is preferable that the light receiving element is an optical component integrated MOS imaging element. In this case, an optical system including a lens that is currently mass-produced in the above-described deflection electromagnetic actuator and frequently used in a video camera, a digital camera, etc. is integrated with the light receiving element, and the MOS imaging element incorporated in the package is bonded, thereby reducing the cost. Therefore, it is possible to realize an ultra-compact, low power consumption type deflection electromagnetic actuator (light-receiving scanning element) with a uniform quality, and a wide range of imaging is possible. In addition, there is an effect that a three-dimensional shape memory sensor can be realized by using this.
[0155]
As described above, the other deflection actuator of the present invention has a structure in which a sheet having a thin permanent magnet bonded as a movable portion is pivotally supported by a both-end supported beam and the other end of the both-end supported beam is a fixed portion. And a coil as a magnetic field generating means around the structural material.
[0156]
According to the above invention, the permanent magnet that does not require wiring is arranged in the movable part as the magnetic field generating means, and the magnetic field of the permanent magnet provided in the movable part is arranged in the fixed part around the periphery. And the magnetic field generated based on the current supplied to the coil provided in the stationary part outside the movable part repels, and the movable part is centered on a pair of doubly supported beams that pivotally support the movable part. Rotate. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, the wiring damage and the disconnection due to metal fatigue do not occur, and the effect that a long-life electromagnetic actuator can be provided is also achieved.
[0157]
An optical scanning element can be realized by adhering a reflecting mirror to the insulator of the movable part of the deflection electromagnetic actuator. In this case, since the reflecting mirror is bonded to the above-described deflection electromagnetic actuator, the mirror deflection electromagnetic actuator (optical scanning element) that deflects the light collected from the LED, the laser beam, etc. is inexpensive, small, and has a low frequency alternating current. It can be provided as a product that can be driven by According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, disconnection due to wiring damage or metal fatigue does not occur, and a long-life mirror deflection electromagnetic actuator (optical scanning element) can be provided.
[0158]
In the optical scanning element, the reflecting mirror is preferably made of a silicon substrate. In this case, the existing semiconductor technology can be used by fabricating the reflecting mirror with a silicon substrate, and it is relatively cheap and has a uniform quality (for example, a high flatness with an unevenness difference of 0.5 μm or less). Is available. Therefore, it is possible to provide a highly accurate (high quality) mirror deflection electromagnetic actuator (optical scanning element) that can reduce costs. In addition, thin film formation techniques such as aluminum and an antireflection film are substantial, and this substantial technique can be used. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, disconnection due to wiring damage or metal fatigue does not occur, and there is an effect that a long-life silicon mirror deflection electromagnetic actuator can be provided.
[0159]
Wiring to the light receiving element is laid along with the coil on the insulator of the movable part of the deflection electromagnetic actuator, and the light receiving element sealed in a small package is bonded to the movable part and electrically connected to the light receiving scanning element. realizable.
[0160]
A feature of the present invention is that various parts are bonded to the movable part of the deflection actuator during the manufacturing process. Thereby, various deflection actuators can be realized. In other words, it is possible to reliably mass-produce products that do not require large-scale manufacturing facilities, have few manufacturing processes, are very simple, and have a low unit price. Therefore, by adhering commonly produced light receiving elements and deflecting them with the deflection actuator of the present invention, the functions of many types of semiconductor light receiving elements currently produced in semiconductor technology can be effectively exhibited. Can do. For example, an image receiving deflection electromagnetic actuator (light receiving scanning element) that can obtain three-dimensional information by receiving and deflecting a two-dimensional image can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, the wire breakage and the disconnection due to metal fatigue do not occur, and the effect of providing a long-life image receiving deflection electromagnetic actuator (light receiving scanning element) is also achieved.
[0161]
In the light receiving scanning element, it is preferable that an optical system including a lens is incorporated in the small package of the light receiving element. In this case, an optical system including a lens is integrated with the light receiving element and is bonded to the above-described deflection electromagnetic actuator, and an ultra-small imaging deflection electromagnetic actuator (light receiving scanning element) can be realized. Is possible. In addition, a three-dimensional shape memory sensor can be realized using this. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, disconnection due to wiring damage or metal fatigue does not occur, and there is an effect that a long-life imaging deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0162]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a charge coupled element. In this case, a general-purpose image-receiving deflection electromagnetic actuator (light-receiving scanning element) that is inexpensive and of uniform quality can be obtained by bonding a charge-coupled element that is currently mass-produced to the deflection electromagnetic actuator and is frequently used in video cameras and digital cameras. Can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, the wire breakage and the disconnection due to metal fatigue do not occur, and it is possible to provide an effect that a long-life general-purpose image receiving deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0163]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a MOS image pickup element. In this case, low-power consumption, low-power-consumption image receiving deflection with low power consumption and low quality is achieved by bonding a MOS imaging device that is currently mass-produced to the deflection electromagnetic actuator and is widely used in video cameras and digital cameras. An electromagnetic actuator (light receiving scanning element) can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, the wire breakage and the disconnection due to metal fatigue do not occur, and the long-life low power consumption type image light receiving deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0164]
In the image receiving deflection electromagnetic actuator, the light receiving element is preferably a pyroelectric element. In this case, by attaching a pyroelectric element that is currently used in an automatic door or an automatic flushing system of a toilet, etc. to the deflection electromagnetic actuator, an infrared light receiving deflection electromagnetic actuator (light reception) capable of sensing a wide range of organisms and fire. (Scanning element) can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, the wire breakage and the disconnection due to metal fatigue do not occur, and it is possible to provide an effect of providing a long-life infrared light receiving deflection electromagnetic actuator (light receiving scanning element).
[0165]
In the imaging deflection electromagnetic actuator, it is preferable that the light receiving element is an optical component integrated charge coupled element. In this case, a general-purpose image-receiving deflection electromagnetic actuator (light-receiving scanning element) that is inexpensive and of uniform quality can be obtained by bonding a charge-coupled element that is currently mass-produced to the deflection electromagnetic actuator and is frequently used in video cameras and digital cameras. Can be realized. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, disconnection due to wiring damage or metal fatigue does not occur, and a long-life general-purpose imaging deflection electromagnetic actuator (light receiving scanning element) can be provided.
[0166]
In the imaging deflection electromagnetic actuator, it is preferable that the light receiving element is an optical component integrated MOS imaging element. In this case, an optical system including a lens that is currently mass-produced in the deflection actuator and is frequently used in video cameras, digital cameras, etc., is integrated with the light receiving element and bonded to the MOS imaging element incorporated in the package, thereby reducing the cost. An ultra-compact, low-power consumption type deflection electromagnetic actuator (light-receiving scanning element) with uniform quality can be realized, and a wide range of imaging is possible. In addition, a three-dimensional shape memory sensor can be realized using this. According to this method, it is not necessary to provide wiring on the both-end supported beam, and even if the both-end supported beam is twisted with the rotation of the movable part, the wiring is not twisted and no repeated load is applied. . Therefore, the wire breakage and the disconnection due to metal fatigue do not occur, and there is an effect that it is possible to provide a long-life low power consumption type deflection electromagnetic actuator (light receiving scanning element).
[0167]
As described above, the other deflection actuator of the present invention has an electrode whose surface is covered with a protective film formed on the surface, the electrode forming portion is a movable part, and is pivotally supported by a doubly supported beam. A sheet having the other end as a fixed part is used as a structural material, and another electrode is provided on the opposite side of the movable part electrode of the structural material.
[0168]
According to the above invention, by forming the electrode on the sheet structure material, the flexible substrate technology which is an existing technology can be used, and the deflection electrostatic actuator can be realized at low cost and without making capital investment. In addition, there is an effect that downsizing is possible.
[0169]
An optical scanning element can be realized by adhering a reflecting mirror to the movable part of the deflection electrostatic actuator. In this case, since the reflecting mirror is bonded to the above-described deflecting electrostatic actuator, the mirror deflecting electrostatic actuator (optical scanning element) that deflects the light collected from the LED, laser light, etc. is inexpensive, small, and low frequency. It also has the effect that it can be provided as a good product that can be driven by alternating current.
[0170]
In the optical scanning element, the reflecting mirror is preferably made of a silicon substrate. In this case, the existing semiconductor technology can be used by fabricating the reflecting mirror with a silicon substrate, and it is relatively cheap and has a uniform quality (for example, a high flatness with an unevenness difference of 0.5 μm or less). Is available. Accordingly, it is possible to provide a silicon mirror deflecting electrostatic actuator (optical scanning element) that can reduce the cost and is highly accurate (high quality). In addition, the technology for forming a thin film such as aluminum or an antireflection film is enhanced, and the effect that this enhanced technology can be used is also achieved.
[0171]
A wiring to a light receiving element is laid together with a coil on an insulator of a movable part of the deflection electrostatic actuator, and the light receiving element sealed in a small package is bonded to the movable part and electrically connected to the light receiving scanning element. Can be realized.
[0172]
In this case, various deflection electrostatic actuators can be realized by bonding various parts to the movable part of the deflection electrostatic actuator. In other words, it is possible to reliably mass-produce products that do not require large-scale manufacturing facilities, have few manufacturing processes, are very simple, and have a low unit price. Therefore, by adhering commonly produced light receiving elements and deflecting them by the deflection electrostatic actuator of the present invention, the functions of many types of semiconductor light receiving elements currently produced in semiconductor technology are effectively exhibited. Can be made. For example, there is an effect that an image receiving deflection electrostatic actuator (light receiving scanning element) capable of obtaining three-dimensional information can be realized by receiving and deflecting a two-dimensional image.
[0173]
In the light receiving scanning element, an optical system including a lens is preferably incorporated in the small package of the light receiving element. In this case, an ultra-small imaging deflection electrostatic actuator (light-receiving scanning element) can be realized by bonding an optical system including a lens to the above-described electrostatic actuator, which is integrated with the light-receiving element and incorporated in the package. Imaging can be performed. Moreover, the effect that a three-dimensional shape memory sensor can be realized by using this is also exhibited.
[0174]
In the image receiving deflection electrostatic actuator, the light receiving element is preferably a charge coupled element. In this case, a general-purpose image receiving deflection electrostatic actuator (light receiving scanning with low quality and uniform quality) is bonded by bonding a charge coupled device which is currently mass-produced to the deflection electrostatic actuator and is frequently used in video cameras and digital cameras. The effect that an element) is realizable is also produced.
[0175]
In the image receiving deflection electrostatic actuator, the light receiving element is preferably a MOS image pickup element. In this case, low-power consumption, low-power-consumption image reception with low power consumption is achieved by bonding a MOS imaging device that is currently mass-produced to the deflection electrostatic actuator and is widely used in video cameras and digital cameras. There is also an effect that a deflection electrostatic actuator (light receiving scanning element) can be realized.
[0176]
In the image receiving deflection electrostatic actuator, the light receiving element is preferably a pyroelectric element. In this case, an infrared receiving deflection electrostatic actuator capable of sensing a wide range of organisms and fires by bonding a pyroelectric element currently used in an automatic door or an automatic flushing system of a toilet in the deflection electrostatic actuator. There is also an effect that a (light receiving scanning element) can be realized.
[0177]
In the imaging deflection electrostatic actuator, it is preferable that the light receiving element is an optical component integrated charge coupled device. In this case, by attaching a charge coupled device that is currently mass-produced to the deflection electrostatic actuator and is frequently used in video cameras, digital cameras, etc., an ultra-compact general-purpose imaging deflection electrostatic actuator (low-cost and uniform quality) ( Light receiving scanning element) can be realized, and a wide range of imaging is possible. In addition, there is an effect that a three-dimensional shape memory sensor can be realized by using this.
[0178]
In the imaging deflection electrostatic actuator, it is preferable that the light receiving element is a MOS imaging element integrated with an optical system component. In this case, an optical system including a lens that is currently mass-produced in the deflection electrostatic actuator and frequently used in a video camera, a digital camera, or the like is integrated with a light receiving element, and a MOS imaging element incorporated in a package is bonded. An ultra-compact and low-power imaging deflection electrostatic actuator (light-receiving scanning element) with uniform quality can be realized, and a wide range of imaging is possible. In addition, there is an effect that a three-dimensional shape memory sensor can be realized by using this.
[0179]
In any of the deflection actuators of the present invention, it is preferable that the sheet is an insulator and is made of polyimide. In this case, polyimide is mainly used as a material for the flexible substrate which is an existing product, but this material is a good electrical insulating material and is a dielectric. Moreover, it is a material excellent in mechanical strength and dimensional stability. This is proven in the market. Therefore, the fact that this is used as a material for the sheet means that a high-quality deflection actuator (deflection electromagnetic actuator or deflection electrostatic actuator) can be provided.
[0180]
The fixed magnetic field generating means of the deflection electromagnetic actuator is preferably a permanent magnet. In this case, magnets such as neodymium magnets (neodymium, iron, boron) and SmCo magnets (samarium, cobalt) that are stable and have good characteristics among the magnets that are currently widely used as general materials are used as means for generating a fixed magnetic field. It is available relatively inexpensively. By using these materials, it is possible to provide an electromagnetic actuator that is inexpensive and has stable characteristics.
[0181]
The fixed magnetic field generating means of the deflection electromagnetic actuator may be an electromagnet. In this case, the strength of the magnetic field can be varied by the current by using an electromagnet as means for generating a fixed magnetic field. In addition, the electromagnetic actuator having a high degree of freedom in design specifications can be provided.
[0182]
In the deflection actuator, it is preferable that a lens-integrated CMOS image sensor is bonded to the movable part. In this case, by attaching a lens-integrated CMOS image sensor, it is possible to realize a follow-up portable small camera system that can receive an image without the object moving off the screen. Such a small and low power consumption follow-up camera system can be applied to a mobile phone or the like, and also has an effect of being able to construct an image system closely related to daily life.
[0183]
In the deflection actuator, it is preferable to avoid the beam portion by a jumper wire as a method of supplying current to the movable portion. In this case, it is possible to provide a structure capable of avoiding repeated torsional forces by using a jumper wire (floating wire) for the wire portion of the beam. If the wiring is fixed and arranged on the beam portion, a torsional force acts on the wiring every time the movable portion rotates, and shear stress is generated. Since the wiring is formed of metal, if it is rotated at a large angle, metal fatigue accumulates, causing damage and disconnection. However, by using, for example, a curled bridge with a jumper wire, the force is distributed, repeated torsional force is avoided, the problem of deterioration due to metal fatigue of the wiring can be solved, and the deflection at a large angle is also involved. In addition, there is an effect that the life of the deflection actuator can be extended.
[0184]
In the deflection actuator, the beam may have a ramen structure. In this case, the doubly supported beam can move elastically and the torsional force is distributed, so the force applied to the wiring formed in the beam part is also distributed and the movable part is rotated at a large deflection angle. However, the force applied to the wiring falls within the category of elastic deformation, can solve the problem of metal fatigue, and has the effect of providing a long-life deflection actuator even when deflected at a large deflection angle.
[0185]
Still another deflection actuator of the present invention, as described above, forms a ferroelectric on the surface of the movable part, the movable part is pivotally supported by a double-supported beam, and the other end of the double-supported beam is a fixed part, Electrodes facing both surfaces of the surface of the fixed part are provided.
[0186]
According to the above invention, by performing the charge generation means of the movable part with a ferroelectric material, it is not necessary to apply a voltage to the movable part through the wiring, and the wiring of the beam portion can be eliminated. Therefore, there is an effect that a long-life ferroelectric deflection electrostatic actuator can be realized.
[0187]
In the deflection electrostatic actuator, the movable part is made of barium titanate, lead titanate, lead zirconate, Rochelle salt, ammonium phosphate, potassium phosphate, barium strontium titanium oxide, SBLN, PZT, or lead zirconate titanate. It is preferable that a pattern is formed on the surface with any ferroelectric.
[0188]
In addition, ferroelectric materials are used in various electronic parts and continue to advance. For example, as a result of improvement in thin film technology, it has become possible to form a film having a relatively large thickness uniformly. In addition to barium titanate, materials having good characteristics such as BST and PZT have been developed. If this technique is used, a ferroelectric material can be formed on the sheet, and an advantageous effect that a good ferroelectric-type deflection electrostatic actuator can be provided is also obtained.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram viewed from the back side, showing a configuration example of an electromagnetic deflection actuator according to the present invention.
FIG. 2 is an explanatory diagram including a configuration of a sheet substrate, as seen from the table of FIG.
3 is an explanatory diagram showing a configuration of a movable part of the sheet substrate of FIG. 2;
FIG. 4 is an explanatory view showing a configuration example using an electromagnet instead of a permanent magnet in FIG. 2;
FIG. 5 is an explanatory diagram showing an example in which a magnetic circuit for generating a magnetic field is composed of a permanent magnet and an iron yoke.
FIG. 6 is an explanatory view showing an example in which a reflecting mirror is bonded to a movable part.
FIG. 7 is an explanatory diagram showing a configuration example of another deflection actuator according to the present invention.
FIG. 8 is an explanatory view showing a configuration example of still another deflection actuator according to the present invention.
FIG. 9 is an explanatory view showing a configuration example of still another deflection actuator according to the present invention.
FIG. 10 is an explanatory diagram showing an example of an optical element in which a charge coupled element is bonded to a movable part.
FIG. 11 is an explanatory diagram showing an example of an optical element in which a charge coupled element including a lens is bonded to a movable part.
FIG. 12 is an explanatory diagram showing an example of an optical element in which a lens-integrated CMOS image sensor is bonded to a movable part.
FIG. 13 is an explanatory diagram showing an example of an optical element in which a pyroelectric element is bonded to a movable part.
FIG. 14 is a plan view showing a configuration example of a conventional planar galvanometer mirror.
15 is a cross-sectional view taken along the line AA in FIG. 14;
FIG. 16 is an explanatory view illustrating the operating principle of the planar galvanometer mirror.
FIG. 17 is a block diagram showing a configuration example of a shape memory sensor according to the present invention.
[Explanation of symbols]
1a Protective film
1b Protective film
2 Planar coil
3 Moving parts
4 Double-sided beam
5 fixed part
6 Sheet substrate
7 Permanent magnet
8 Electromagnet
12 Charge coupled devices
13 Lens
14 MOS image sensor
15 Pyroelectric element
16 Thin permanent magnet
18a electrode
18b electrode
18c electrode
18d electrode
19 Ferroelectric
20 Floating wiring
25 York
30 grooves
31 Reflector
35 Electrode terminal
36 rand
37 rand
38 rand
39 Electrode terminal

Claims (38)

A coil covered with a protective film is formed on the surface of the insulator, and the formed part of the coil is used as a movable part, is pivotally supported by a double-supported beam, and the other end of the double-supported beam is a fixed part. And a deflection actuator provided with magnetic field generating means around the structural material. An optical scanning element characterized in that a reflecting mirror is bonded to the movable part of the deflection actuator according to claim 1. The optical scanning element according to claim 2, wherein the reflecting mirror is made of a silicon substrate. A wire to the light receiving element is laid together with a coil on the insulator of the movable part of the deflection actuator according to claim 1, and the light receiving element sealed in a small package is bonded to the movable part and electrically connected. A featured light receiving scanning element. 5. The light receiving scanning element according to claim 4, wherein an optical system including a lens is incorporated in the small package of the light receiving element. The light receiving scanning element according to claim 4, wherein the light receiving element is a charge coupled device. The light receiving scanning element according to claim 4, wherein the light receiving element is a MOS image pickup element. The light receiving scanning element according to claim 4, wherein the light receiving element is a pyroelectric element. 6. The light receiving scanning element according to claim 5, wherein the light receiving element is a charge coupled device. 6. The light receiving scanning element according to claim 5, wherein the light receiving element is a MOS image pickup element. The surface to which the thin magnetic material is bonded is used as a movable part, is pivotally supported by a both-end supported beam, and a sheet having the other end of the both-end supported beam as a fixed part is used as a structural material. Provided deflection actuator. An optical scanning element comprising a reflecting mirror bonded to an insulator of a movable part of the deflection actuator according to claim 11. The optical scanning element according to claim 12, wherein the reflecting mirror is made of a silicon substrate. The wiring to the light receiving element is laid together with the coil on the insulator of the movable part of the deflection actuator according to claim 11, and the light receiving element sealed in a small package is bonded to and electrically connected to the movable part. A featured light receiving scanning element. 15. The light receiving scanning element according to claim 14, wherein an optical system including a lens is incorporated in the small package of the light receiving element. The light receiving scanning element according to claim 14, wherein the light receiving element is a charge coupled device. The light receiving scanning element according to claim 14, wherein the light receiving element is a MOS imaging element. The light receiving scanning element according to claim 14, wherein the light receiving element is a pyroelectric element. The light receiving scanning element according to claim 15, wherein the light receiving element is a charge coupled device. The light receiving scanning element according to claim 15, wherein the light receiving element is a MOS image pickup element. An electrode whose surface is covered with a protective film is formed on the surface, the electrode forming part is a movable part, and it is pivotally supported by a both-end supported beam. A deflection actuator comprising another electrode on the opposite side of the movable part electrode of the structural material. An optical scanning element characterized in that a reflecting mirror is bonded to the movable part of the deflection actuator according to claim 21. The optical scanning element according to claim 22, wherein the reflecting mirror is made of a silicon substrate. A wiring to a light receiving element is laid together with a coil on an insulator of a movable part of the deflection actuator according to claim 21, and the light receiving element sealed in a small package is adhered to and electrically connected to the movable part. A featured light receiving scanning element. 25. The light receiving scanning element according to claim 24, wherein an optical system including a lens is incorporated in the small package of the light receiving element. The light receiving scanning element according to claim 24, wherein the light receiving element is a charge coupled device. The light receiving scanning element according to claim 24, wherein the light receiving element is a MOS image pickup element. The light receiving scanning element according to claim 24, wherein the light receiving element is a pyroelectric element. 26. The light receiving scanning element according to claim 25, wherein the light receiving element is a charge coupled device. 26. The light receiving scanning element according to claim 25, wherein the light receiving element is a MOS image pickup element. The deflection actuator according to claim 1, 11 or 21, wherein the sheet is an insulator and is made of polyimide. The deflection actuator according to claim 1, wherein the magnetic field generating means is a permanent magnet. The deflection actuator according to claim 1, wherein the magnetic field generating means is an electromagnet. The deflection actuator according to claim 1, 11 or 21, wherein a lens-integrated CMOS image sensor is bonded to the movable part. The deflection actuator according to claim 1 or 21, wherein wiring of the portion of the both-end supported beam is performed by a jumper wire. The deflection actuator according to claim 1 or 21, wherein the beam has a ramen structure. A deflection actuator having a ferroelectric formed on the surface of the movable part, the movable part being pivotally supported by a double-supported beam, the other end of the double-supported beam being a fixed part, and electrodes facing both surfaces of the fixed part surface . The movable part is made of a ferroelectric material such as barium titanate, lead titanate, lead zirconate, Rochelle salt, ammonium phosphate, potassium phosphate, barium strontium titanium oxide, SBLN, PZT, or lead zirconate titanate. A deflection actuator with a pattern formed on the surface.

Images