JP2009061512A - Table device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a table device of a planar bearing type in which a retainer does not excessively lower by gravity, even if vertically placed, by preventing the retainer from excessively lowering by the gravity. <P>SOLUTION: The table device comprises a base having an upper surface and a lower surface formed to be flat planes parallel to each other, two planar ball bearings provided across the upper and lower surfaces of the base, and a movable carriage for sandwiching the two planar ball bearings from the upper and lower surfaces and moving them in at least two orthogonal X and Y directions. Each of the two planar ball bearings has the flat retainer having numerous holding holes bored and numerous spherical objects held in the holding holes. The table device is characterized in that it has an interlock mechanism for forcibly moving the retainer by a half of a travel of the movable carriage by the movement of the carriage. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a base having an upper surface and a lower surface formed in a plane parallel to each other, two flat ball bearings arranged with the upper surface and the lower surface of the base interposed therebetween, and the two flat ball bearings Further, the present invention relates to a table device having a movable table sandwiched and held from the upper surface and the lower surface and moving in at least two orthogonal X and Y directions. Note that the notation regarding the vertical direction of the table device such as the upper surface and the lower surface here indicates the vertical direction when the table is placed in a flat shape, and when it is placed in a vertical shape, the actual vertical direction is It will be in a different direction.

  The table device is usually provided with a guide along each moving direction. For example, a table device having a moving table that moves in two orthogonal X and Y directions normally moves in the X direction. The moving table that moves and the moving table that moves in the Y direction are vertically stacked. For this reason, in this type of table device, it is inevitable that the thickness will increase. Furthermore, when moving (rotating) also in the θ direction, which is the rotation direction, guides in the θ direction are stacked on this, and thus a thicker table device must be obtained.

  In order to eliminate this defect, for example, as shown in Patent Document 1, a base having an upper surface and a lower surface formed in a plane parallel to each other, and 2 arranged with the upper surface and the lower surface of the base interposed therebetween There is known a table device having a plurality of flat ball bearings, and a movable table that holds the two flat ball bearings by sandwiching them from the upper and lower surfaces and moves in at least two orthogonal X and Y directions. .

  As shown in FIG. 5 as an example of a cross-sectional view of this type of table device (hereinafter referred to as a planar bearing type table device), the table device 50 has a planar shape in which the upper surface 51a and the lower surface 51b are parallel to each other. The formed base 51, the two flat ball bearings 52, 53 disposed with the upper surface 51a and the lower surface 51b of the base 51 interposed therebetween, and the two flat ball bearings 52, 53 are further connected to the upper surface and the lower surface. And a movable table 54 that moves in at least two orthogonal X and Y directions. Each of the two flat ball bearings 52 and 53 includes a flat plate retainer 55 having a large number of holding holes and a large number of spheres 56 held in the holding holes.

  In this table device 50, the guide for guiding the moving base 54 is only a flat ball bearing 52, 53 consisting of a sphere 56 and a retainer 55, and at least two directions of the X direction and the Y direction orthogonal, usually the X direction orthogonal, Since it can move in three directions, the Y direction and the θ direction, which is the rotational direction, it is possible to obtain a table device that is very thin compared to the number of movable directions, and because the guide becomes a rolling bearing, the friction It has a feature that it has low resistance and can move smoothly.

  However, when this table device 50 is arranged vertically, the moving table 54 is supported only by the flat ball bearings 52 and 53, and the feature that it can freely move in any direction including the rotation direction is damaged. While the movement of the movable table 54 is repeated, the retainer 55 slightly lowers due to gravity, and finally reaches the lower limit of the allowable movable range of the retainer 55, so that the retainer 55 is moved to the lower side. It collides with the fixed member of this.

  This remarkably appears when the moving base 54 repeats a reciprocating motion in the up and down direction with a short stroke and occasionally moves in the up and down direction with a large stroke full of the movable range of the moving base 54. That is, during the reciprocating motion with a short stroke, the retainer 55 repeatedly descends slightly due to gravity, exceeding the limit of the allowable movable range, and then the movable range of the movable table 54 is full. The retainer 55 collides with the lower fixed member beyond the limit of the movable range.

  At this time, naturally, an impact is applied to the retainer 55, and this impact is also transmitted to the movable table 54. After that, each time the moving table 54 moves with a large stroke, the retainer 55 moves beyond the limit of the movable range and collides with the fixed member, and an impact is given to the moving table 54. If the moving table 54 is used for precision machining or precision measurement, the retainer 55 will give an impact to the moving table 54, which may cause an error in the positional accuracy of the moving table 54. Therefore, in order to guarantee the positional accuracy of the movable table 54, there has been a problem of how to prevent the retainer 55 from being excessively lowered.

JP-A-9-155666 (paragraph numbers [0015] to [0016], FIG. 3)

  An object of the present invention is to solve the above-mentioned problems of the prior art, and a base having an upper surface and a lower surface formed in a plane parallel to each other and a base 2 placed between the upper surface and the lower surface of the base. In a table apparatus having a plurality of plane ball bearings and a movable table that holds and holds the two plane ball bearings from the upper surface and the lower surface and moves in at least two orthogonal X and Y directions, the retainer is gravity Therefore, the present invention is intended to provide a flat bearing type table device in which the retainer does not drop excessively due to gravity even if it is arranged vertically.

  In order to solve the above-described problems, the present invention provides a base having an upper surface and a lower surface formed in a plane parallel to each other, and two planar ball bearings arranged with the upper surface and the lower surface of the base interposed therebetween. In addition, the two flat ball bearings further include a moving table that holds the two flat ball bearings from the upper surface and the lower surface and moves in at least two orthogonal X and Y directions. Each of them has a flat plate-like retainer in which a large number of holding holes are perforated, and a large number of spheres held in the holding holes. Further, the retainer is moved by moving the movable table. It is an object of the present invention to provide a table device characterized by having an interlocking mechanism that forcibly moves by half the amount.

  Here, the interlocking mechanism includes an interlocking pin having a spherical body at the center and both ends, a first support hole provided in the retainer for supporting the spherical body at the center of the interlocking pin, and a spherical at both ends. It comprises a second support hole provided in the base for supporting the body and the moving base, and the interlocking pin has an equal distance from the spherical body at the center to the spherical bodies at the both ends. In addition, the second support hole provided in the base and the moving base has a large-diameter escape hole on the retainer side, and has at least two interlocking mechanisms. desirable.

  The spherical body of the interlocking pin is a bulging portion provided directly on the interlocking pin, and the first support hole provided in the retainer is a through hole directly drilled in the retainer. It is desirable that the second support holes provided in the table and the moving table are blind holes that are directly drilled in the base and the moving table from the side facing the retainer. It is desirable that the first support hole provided in the retainer is a hole having the same diameter as the holding hole of the sphere provided in the retainer.

  Alternatively, the interlock mechanism includes a first spherical bearing provided on the retainer, a second spherical bearing provided on the base and the moving table, and the first spherical bearing and the second spherical surface. A connecting pin that communicates with the bearing, and the distance from the first spherical bearing to the second spherical bearing is equal, and the mounting hole of the second spherical bearing is large on the side of the retainer. It is desirable to have a relief hole with a diameter and a relief hole with a small diameter on the back side, and it is desirable to have at least two interlocking mechanisms, and further, the second spherical surface provided on the base and the moving base. The bearing mounting holes are preferably blind holes drilled from the side facing the retainer.

  Then, it is desirable that the moving table moves in two directions of X and Y that are orthogonal to each other and in the θ direction that is the rotational direction.

  Hereinafter, the present invention will be described with reference to the drawings illustrating the best embodiment. 1 is a cross-sectional view showing an embodiment of the table device of the present invention, FIG. 2 is a cross-sectional view showing an embodiment of the interlocking mechanism, FIG. 3 is a diagram showing another shape of the interlocking pin, and FIG. It is sectional drawing which shows another Example.

  The table device 10 according to the present invention includes a base 11 in which an upper surface 11a and a lower surface 11b are formed in a plane parallel to each other, and two plane balls arranged with the upper surface 11a and the lower surface 11b of the base 11 interposed therebetween. The bearings 12 and 13 and the two flat ball bearings 12 and 13 are further sandwiched and held from the upper surface and the lower surface, and the movable table 14 capable of moving in any direction within the horizontal plane (the surface orthogonal to the paper surface in the figure). The workpiece is placed on the upper surface of the movable table 14, and the movable table 14 is moved and positioned in an arbitrary direction by a driving device (not shown).

  Here, each of the two flat ball bearings 12 and 13 includes a plate-like retainer 15 and 16 in which a large number of holding holes 15a and 16a are perforated, and a large number of holding holes 15a and 16a. It is a normal flat ball bearing having spheres 17 and 18.

  As described above, the movable table 14 of the table device 10 configured as described above is driven by a driving device (not shown) and guided to the flat ball bearings 12 and 13 along the upper surface 11 a and the lower surface 11 b of the base 11. It is possible to move in any direction within the horizontal plane (the plane orthogonal to the paper surface in the figure), and at least two orthogonal X and Y directions within the horizontal plane (for example, the X direction is the left-right direction along the paper surface, Y The direction is movable in the direction perpendicular to the paper surface, and is normally movable in the θ direction, which is the rotational direction. Here, the words in the X direction, the Y direction, and the θ direction are words that are commonly used as words indicating the moving direction of the table device.

  Interlocking mechanisms 19 and 20 are provided between the base 11 and the moving base 14 to forcibly move the retainers 15 and 16 by a half of the moving amount of the moving base 14 by the movement of the moving base 14. ing. Since the interlocking mechanism 19 and the interlocking mechanism 20 in this embodiment are substantially the same configuration, only the interlocking mechanism 19 will be described below.

  As shown in FIG. 2, the interlocking mechanism 19 includes an interlocking pin 21 having spherical bodies 21 a, 21 b, 21 c at the center and both ends, and a retainer 15 for supporting the spherical body 21 a at the center of the interlocking pin 21. And the second support holes 11c and 14a provided in the base 11 and the moving base 14 for supporting the spherical bodies at both ends.

  The interlocking pin 21 has a distance from the spherical body 21a at the center to the spherical bodies 21b and 21c at both ends, and the second distance provided on the base 11 and the movable base 14 respectively. In the support holes 11c and 14a, when the moving base 14 moves to the position of the imaginary line in FIG. Large-diameter relief holes 11d and 14b are provided. The escape holes 11d and 14b are illustrated as straight holes, but there is no problem even if they are tapered holes having a large diameter at the base and a small diameter at the back.

  In this embodiment, the spherical bodies 21 a, 21 b, 21 c of the interlocking pin 21 are bulging portions provided directly on the interlocking pin 21. However, as shown in the example of the interlocking pin 21 having another shape in FIG. 3, the interlocking pin 21 has an equidistant distance from the spherical body 21a at the central portion to the spherical bodies 21b and 21c at both end portions. The spherical body 21a at the center is formed by the first support hole 15b provided in the base 15 and the spherical bodies 21b and 21c at the both ends are formed by the second support holes 11c and 14a provided in the base 11 and the movable base 14. It is enough if it is supported.

  That is, it is not essential to provide the spherical bodies 21a, 21b, and 21c of the interlocking pin 21 directly as the bulging portion. For example, as shown in FIG. 3A, the spherical bodies 21a, 21b, and 21c are ground to increase the strength and wear resistance. A rod-shaped pin may be press-fitted into the hardened steel spherical bodies 21a, 21b, and 21c as a rod-shaped portion 21d.

  Alternatively, the shape of the interlocking pin 21 depicted in FIG. 2 is a shape in which stress is likely to concentrate on the connecting portion between the spherical bodies 21a, 21b, 21c and the rod-shaped portion 21d. As shown in FIG. In order to eliminate the concentration of stress, the diameter from the spherical bodies 21a, 21b, 21c to the rod-shaped portion 21d can be changed smoothly.

  In the embodiment of FIG. 2, the first support hole 15 b provided in the retainer 15 is a through hole directly drilled in the retainer 15 to support the first spherical body 21 a of the interlocking pin 21. Each of the second support holes 11 c and 14 a provided in the base 11 and the movable base 14 is a blind hole directly drilled in the base 11 and the movable base 14 from the side facing the retainer 15.

  In particular, the second support hole 14 a provided in the moving table 14 is a blind hole that is directly drilled from the side facing the retainer 15 of the moving table 14 so as not to provide unnecessary holes on the surface of the moving table 14. It is desirable to do. In this embodiment, the support hole 11 c provided in the base 11 is also a blind hole that is directly drilled from the side facing the retainer 15.

  However, it is not essential to directly drill these support holes 15b, 11c, and 14a in the retainer 15, the base 11 or the movable base 14, and various improvements are made, for example, a bush of a bearing material can be inserted. Of course it is possible. However, in order to manufacture the interlocking mechanism 19 at a low cost, the spherical bodies 21a, 21b, 21c of the interlocking pin 21 are bulged portions provided directly on the interlocking pin 21, and the support holes 15b, 11c, 14a are the retainers 15, It is desirable to drill directly in the base 11 and the movable base 14.

  In the embodiment shown in FIG. 2, if the diameters of the holding hole 15 a of the spherical body 17 of the flat ball bearing 12 and the support hole 15 b of the spherical body 21 a at the center of the interlocking pin 21 are the same diameter, the support hole of the retainer 15. The hole processing of 15b and the hole processing of the holding hole 15a for holding the sphere 17 can be performed simultaneously and easily, and can be manufactured at low cost. In the embodiment of FIG. 2, the spherical bodies 21b and 21c at both ends of the interlocking pin 21 have the same diameter, so that the blind holes of the support holes 11c and 14a provided in the base 11 and the moving base 14 have the same diameter. Shown as a hole.

  In the interlocking mechanism 19 having this configuration, when the moving base 14 moves, the spherical body 21b of the interlocking pin 21 moves to the position of the imaginary line by the support hole 14a provided in the moving base 14. On the other hand, since the base 11 does not move, the support hole 11c provided in the base 11 does not move, and the spherical body 21c of the interlocking pin 21 does not move. And since the interlocking pin 21 is made so that the distance from the spherical body 21a of the center part to the spherical bodies 21b and 21c of the both ends becomes equal, the spherical body 21a of the central part is The movement amount is ½ of the movement amount.

  Therefore, the retainer 15 is always forcibly moved by ½ of the moving amount of the moving table 14 by the interlocking pin 21. Even if the table device 10 shown in FIG. Since the retainer 15 is always forcibly moved by a half of the moving amount of the moving table 14, the retainer 15 does not drop excessively due to gravity, and the retainer 15 moves beyond the movable range, and the fixed member No more collisions will occur.

  This interlocking mechanism 19 acts not only in the direction parallel to the illustrated paper surface but also in the direction orthogonal to the paper surface. Therefore, even if the moving table 14 moves in any of the X, Y, and θ directions, the retainer 15 is always forcibly moved in the same direction by ½ of the moving amount of the moving table 14. Therefore, by arranging at least two interlocking mechanisms 19, the retainer 15 is forcibly moved by ½ of the moving amount of the moving table 14 at all positions. However, considering the rigidity of the interlocking pin 21, it is desirable to arrange three to four interlocking mechanisms 19.

  FIG. 4 shows another embodiment of the interlocking mechanism. The interlocking mechanism 30 of this embodiment is provided on the first spherical bearing 31 provided on the retainer 15, the base 11 and the movable base 14. The second spherical bearings 32 and 33 and the communication pins 34 for communicating the first spherical bearing 31 and the second spherical bearings 32 and 33.

  At this time, the distance from the first spherical bearing 31 to the second spherical bearings 32, 33 is equal, and the mounting holes 14c, 11e of the second spherical bearings 32, 33 are on the retainer 15 side. Large-diameter relief holes 11f and 14d are provided on the back side, and communication pins 34 are provided with small-diameter relief holes 11g and 14e that serve as relief at the tip. The details of the large-diameter escape holes 11f and 14d have been described above, and thus the description thereof is omitted here.

  And the mounting holes 14c and 11e of the second spherical bearing provided in the base 11 and the moving base 14 are provided so as not to provide unnecessary holes on the surface of the moving base 14 as in the embodiment shown in FIG. A blind hole drilled in the base 11 and the movable base 14 from the side facing the retainer 15 is desirable. The communication pin 34 is preferably fixed to the first spherical bearing 31 so as not to move in the longitudinal direction.

  Since the interlocking mechanism 30 of this embodiment is configured as described above, when the moving table 14 moves, the spherical bearing 33 provided on the moving table 14 moves to the position of the imaginary line. On the other hand, since the base 11 does not move, the spherical bearing 32 provided on the base 11 does not move. Since the spherical bearing 33 and the spherical bearing 32 are equidistant with respect to the spherical bearing 31 provided in the retainer 15 and communicated by the communication pin 34, the spherical bearing 31 is moved by the amount of movement of the movable table 14. It will move by 1/2 of this.

  Therefore, the retainer 15 is always forced to move in the same direction by 1/2 of the moving amount of the moving table 14 regardless of the direction of movement of the moving table 14 by the communication pin 34. Even if the table apparatus shown in FIG. 4 is arranged vertically, the retainer 15 does not gradually descend due to gravity, and the retainer 15 does not move beyond the movable range and collide with the fixed member. Since the necessary number and the like are as described in the embodiment of FIG. 2, they will not be described again.

  The above description has been made on the assumption that the moving table 14 moves in two directions of X and Y orthogonal to each other. However, the planar ball bearings 12 and 13 can move the moving table 14 in any direction within the horizontal plane. Therefore, it can be configured to move in the θ direction which is the rotational direction without providing an additional mechanism.

It is sectional drawing which shows one Example of a table apparatus. It is sectional drawing which shows one Example of an interlocking mechanism. It is a figure which shows the other shape of an interlocking pin. It is sectional drawing which shows the other Example of an interlocking mechanism. It is sectional drawing which shows the table apparatus of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Table apparatus 11 Base 11a Upper surface 11b Lower surface 11c Support hole 11d, 11f Escape hole 11e Attachment hole 11g Small diameter relief hole 12, 13 Planar ball bearing 14 Moving base 14a Support hole 14b, 14d Escape hole 14c Attachment hole 14e Small diameter relief Hole 15, 16 Retainer 15a, 16a Holding hole 15b Support hole 17, 18 Spherical body 19, 20 Interlocking mechanism 21 Interlocking pin 21a, 21b, 21c Spherical body 21d Rod-shaped part 30 Interlocking mechanism 31, 32, 33 Spherical bearing 34 Communication pin

Claims (7)

A base having an upper surface and a lower surface formed in a plane parallel to each other, two flat ball bearings disposed across the upper surface and the lower surface of the base, In a table apparatus having a movable table sandwiched and held from the lower surface and moving in at least two orthogonal X and Y directions,
Each of the two flat ball bearings has a flat plate retainer having a large number of holding holes, and a large number of spheres held in the holding holes.
The table device further comprises an interlocking mechanism for forcibly moving the retainer by a half of the moving amount of the moving table by the movement of the moving table.   The interlocking mechanism supports an interlocking pin having a spherical body at the center and both ends, a first support hole provided in the retainer that supports the spherical body at the center of the interlocking pin, and a spherical body at both ends. The base pin and the second support hole provided in the movable table, the interlocking pin, the distance from the spherical body of the central portion to the spherical body of the both ends, and The second support hole provided in the base and the moving base has a large-diameter escape hole on the retainer side, and has at least two interlocking mechanisms. The table apparatus according to claim 1.   The spherical body of the interlocking pin is a bulging portion provided directly on the interlocking pin, and the first support hole provided in the retainer is a through hole directly drilled in the retainer, and the base 3. The second support hole provided in the movable table is a blind hole that is directly drilled in the base and the movable table from the side facing the retainer. The table device described.   The table apparatus according to claim 2 or 3, wherein the first support hole provided in the retainer is a hole having the same diameter as the holding hole of the spherical body provided in the retainer.   The interlock mechanism includes a first spherical bearing provided on the retainer, a second spherical bearing provided on the base and the moving table, and the first spherical bearing and the second spherical bearing. A communication pin that communicates with each other, and the distance from the first spherical bearing to the second spherical bearing is equal, and the mounting hole of the second spherical bearing has a large diameter on the retainer side. 2. The table apparatus according to claim 1, wherein the escape hole has a small diameter escape hole on the back side, and has at least two interlocking mechanisms.   The table according to claim 5, wherein each of the mounting holes of the second spherical bearing provided in the base and the moving base is a blind hole drilled from a side facing the retainer. apparatus.   The table apparatus according to any one of claims 1 to 6, wherein the moving table moves in two directions of X and Y orthogonal to each other and in a θ direction that is a rotation direction.

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