JPH03117537U - - Google Patents

Info

Publication number
JPH03117537U
JPH03117537U JP2559490U JP2559490U JPH03117537U JP H03117537 U JPH03117537 U JP H03117537U JP 2559490 U JP2559490 U JP 2559490U JP 2559490 U JP2559490 U JP 2559490U JP H03117537 U JPH03117537 U JP H03117537U
Authority
JP
Japan
Prior art keywords
movable
platen
drive
fixed
drive devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2559490U
Other languages
Japanese (ja)
Other versions
JP2515316Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990025594U priority Critical patent/JP2515316Y2/en
Priority to US07/667,893 priority patent/US5163651A/en
Priority to DE4107881A priority patent/DE4107881C2/en
Priority to FR9103036A priority patent/FR2659537A1/en
Priority to GB9105256A priority patent/GB2243075B/en
Publication of JPH03117537U publication Critical patent/JPH03117537U/ja
Application granted granted Critical
Publication of JP2515316Y2 publication Critical patent/JP2515316Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Machine Tool Units (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は実施例の移動テーブルを一部切欠いて
示す平面図、第２図は第１図の−線に沿つた
断面図、第３図は同上の一部を切欠いて示す斜視
図、第４図ａ〜ｅは駆動装置と可動盤の連結構造
を模式的に示す図である。 １……移動テーブル、２……固定盤、４……フ
ランジ部材、５……すき間、６……可動盤、９…
…スペーサ板、１０……ボルト、１１，１２……
スラスト軸受、１３……保持器、１４……ボール
、１６，１７，１８……駆動装置、２０……継手
、２１……案内棒、２２……スライダ、２３……
回動ピン。 FIG. 1 is a partially cutaway plan view of the moving table of the embodiment, FIG. 2 is a sectional view taken along the - line in FIG. 1, FIG. 3 is a partially cutaway perspective view of the same, and FIG. Figures 4a to 4e are diagrams schematically showing the connection structure between the drive device and the movable platen. 1...Moving table, 2...Fixed plate, 4...Flange member, 5...Gap, 6...Movable plate, 9...
...Spacer plate, 10... Bolt, 11, 12...
Thrust bearing, 13... Cage, 14... Ball, 16, 17, 18... Drive device, 20... Joint, 21... Guide rod, 22... Slider, 23...
Rotating pin.

Claims (1)

【実用新案登録請求の範囲】 (1) 固定盤を、可動盤とその可動盤に一体に連
結するフランジ部材により挾み、その固定盤と可
動盤間及び固定盤とフランジ部材間にスラスト軸
受を設け、上記可動盤にそれをスラスト軸受に沿
つて移動させる駆動装置を連結した移動テーブル
。 (2) 固定盤上に、可動盤を含む平面内で互いに
平行に伸縮する２個以上の駆動装置とその駆動装
置に直交する方向に伸縮する１個以上の駆動装置
を配置し、その各駆動装置と可動盤の側辺を、上
記平面内で回動可能かつ駆動装置の伸縮方向と直
交する方向にスライド可能な継手により連結して
成る請求項１に記載の移動テーブル。[Scope of claim for utility model registration] (1) A fixed platen is sandwiched between a movable platen and a flange member integrally connected to the movable platen, and a thrust bearing is installed between the fixed platen and the movable platen and between the fixed platen and the flange member. a movable table, the movable table being connected to a drive device for moving the movable plate along a thrust bearing; (2) Two or more drive devices that expand and contract in parallel to each other within a plane including the movable plate and one or more drive devices that expand and contract in a direction perpendicular to the drive devices are arranged on the fixed plate, and each drive 2. The movable table according to claim 1, wherein the side of the device and the movable platen are connected by a joint that is rotatable within the plane and slidable in a direction perpendicular to the direction of expansion and contraction of the drive device.
JP1990025594U 1990-03-13 1990-03-13 Moving table Expired - Fee Related JP2515316Y2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1990025594U JP2515316Y2 (en) 1990-03-13 1990-03-13 Moving table
US07/667,893 US5163651A (en) 1990-03-13 1991-03-12 Movable table
DE4107881A DE4107881C2 (en) 1990-03-13 1991-03-12 Adjustable table
FR9103036A FR2659537A1 (en) 1990-03-13 1991-03-13 MOBILE TABLE WITH RESPECTIVELY FIXED AND MOBILE TRAYS.
GB9105256A GB2243075B (en) 1990-03-13 1991-03-13 Movable table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990025594U JP2515316Y2 (en) 1990-03-13 1990-03-13 Moving table

Publications (2)

Publication Number Publication Date
JPH03117537U true JPH03117537U (en) 1991-12-04
JP2515316Y2 JP2515316Y2 (en) 1996-10-30

Family

ID=31528526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990025594U Expired - Fee Related JP2515316Y2 (en) 1990-03-13 1990-03-13 Moving table

Country Status (1)

Country Link
JP (1) JP2515316Y2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09155666A (en) * 1995-12-01 1997-06-17 Kazuya Hirose Lateral and longitudinal movement and rotation supporting mechanism of stage
JPH1170430A (en) * 1997-08-28 1999-03-16 Ntn Corp Movable table
JP2005351917A (en) * 2004-06-08 2005-12-22 Pentax Corp Image blur correcting device
JP2006094185A (en) * 2004-09-24 2006-04-06 Pentax Corp Stage driving mechanism
JP2009061512A (en) * 2007-09-04 2009-03-26 Hiihaisuto Seiko Kk Table device
WO2021161872A1 (en) * 2020-02-13 2021-08-19 Thk株式会社 Alignment device and actuator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61230836A (en) * 1985-03-29 1986-10-15 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン Positioning device
JPS62123882U (en) * 1986-01-31 1987-08-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61230836A (en) * 1985-03-29 1986-10-15 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン Positioning device
JPS62123882U (en) * 1986-01-31 1987-08-06

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09155666A (en) * 1995-12-01 1997-06-17 Kazuya Hirose Lateral and longitudinal movement and rotation supporting mechanism of stage
JPH1170430A (en) * 1997-08-28 1999-03-16 Ntn Corp Movable table
JP2005351917A (en) * 2004-06-08 2005-12-22 Pentax Corp Image blur correcting device
JP4691326B2 (en) * 2004-06-08 2011-06-01 Ｈｏｙａ株式会社 Image blur correction device
JP2006094185A (en) * 2004-09-24 2006-04-06 Pentax Corp Stage driving mechanism
JP4647273B2 (en) * 2004-09-24 2011-03-09 Ｈｏｙａ株式会社 Stage drive mechanism
JP2009061512A (en) * 2007-09-04 2009-03-26 Hiihaisuto Seiko Kk Table device
WO2021161872A1 (en) * 2020-02-13 2021-08-19 Thk株式会社 Alignment device and actuator

Also Published As

Publication number Publication date
JP2515316Y2 (en) 1996-10-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees