JPH045328U - - Google Patents
Info
- Publication number
- JPH045328U JPH045328U JP4530990U JP4530990U JPH045328U JP H045328 U JPH045328 U JP H045328U JP 4530990 U JP4530990 U JP 4530990U JP 4530990 U JP4530990 U JP 4530990U JP H045328 U JPH045328 U JP H045328U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- movable platen
- bearing
- transmission mechanism
- expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000008602 contraction Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Machine Tool Units (AREA)
Description
第１図は第１実施例を示す平面図、第２図はそ
の側面図、第３図は同上の要部を示す断面図、第
４図はボールスライド軸受の構造を示す断面図、
第５図は同上の駆動装置とその連結部を示す一部
縦断平面図、第６図は第５図の−線に沿つた
断面図、第７図は第６図の−線に沿つた断面
図、第８図は第２実施例を示す一部縦断平面図で
ある。
１……固定盤、２……可動盤、３……スラスト
軸受、４……保持器、６……ボール、７……ピン
、１０，１１……駆動装置、１３，３９，４０…
…継手、１４，４２，４３……案内棒、１５，４
１，４４……ボールスライド軸受、２０……駆動
部、２１……駆動力伝達機構、２４……ボールね
じ軸、３５……位置検出センサ、３７……モータ
、３８……位置検出器。
Fig. 1 is a plan view showing the first embodiment, Fig. 2 is a side view thereof, Fig. 3 is a sectional view showing the main parts of the same, Fig. 4 is a sectional view showing the structure of the ball slide bearing,
Fig. 5 is a partially longitudinal plan view showing the same drive device and its connecting portion, Fig. 6 is a sectional view taken along the - line in Fig. 5, and Fig. 7 is a sectional view taken along the - line in Fig. 6. 8 are partially vertical plan views showing the second embodiment. DESCRIPTION OF SYMBOLS 1... Fixed plate, 2... Movable plate, 3... Thrust bearing, 4... Cage, 6... Ball, 7... Pin, 10, 11... Drive device, 13, 39, 40...
...Joint, 14,42,43...Guide rod, 15,4
DESCRIPTION OF SYMBOLS 1, 44... Ball slide bearing, 20... Drive unit, 21... Driving force transmission mechanism, 24... Ball screw shaft, 35... Position detection sensor, 37... Motor, 38... Position detector.
Claims (1)
を支持し、上記可動盤の側辺に、可動盤を含む平
面内で互いに直交する方向に伸縮する２個の駆動
装置を、それぞれ各駆動装置の伸縮方向と直交す
る方向にスライドする継手を介して連結したＸＹ
テーブル。 (2) 駆動装置が、回転力を発生するモータと、
そのモータの回転力を伸縮方向の動きに変換する
駆動力伝達機構と、モータの回転と駆動力伝達機
構の伸縮量との相対的な移動量を検出する位置検
出器とから構成されている請求項(1)に記載のＸ
Ｙテーブル。 (3) 継手が、スライド軸受とその軸受に嵌合す
る案内棒との組み合せから成る請求項(1)又は(2)
に記載のＸＹテーブル。[Claims for Utility Model Registration] (1) A movable platen is supported on the fixed platen via a thrust bearing, and two parts on the sides of the movable platen that extend and contract in directions orthogonal to each other within a plane including the movable platen. The
table. (2) The drive device includes a motor that generates rotational force,
A claim consisting of a driving force transmission mechanism that converts the rotational force of the motor into movement in an expansion and contraction direction, and a position detector that detects the relative movement amount between the rotation of the motor and the amount of expansion and contraction of the driving force transmission mechanism. X described in section (1)
Y table. (3) Claim (1) or (2) in which the joint consists of a combination of a slide bearing and a guide rod that fits into the bearing.
The XY table described in
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4530990U JPH045328U (en) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4530990U JPH045328U (en) | 1990-04-27 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH045328U true JPH045328U (en) | 1992-01-17 |
Family
ID=31559368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4530990U Pending JPH045328U (en) | 1990-04-27 | 1990-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH045328U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752602A (en) * | 1980-09-16 | 1982-03-29 | Toshiba Corp | Steam-water separator in steam turbine |
| JPS60168072A (en) * | 1984-02-10 | 1985-08-31 | 株式会社ミツトヨ | Base plate |
-
1990
- 1990-04-27 JP JP4530990U patent/JPH045328U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752602A (en) * | 1980-09-16 | 1982-03-29 | Toshiba Corp | Steam-water separator in steam turbine |
| JPS60168072A (en) * | 1984-02-10 | 1985-08-31 | 株式会社ミツトヨ | Base plate |
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