JP5388664B2 - Positioning stage - Google Patents

Description

  The present invention relates to a positioning stage on which a certain sample for analysis, a workpiece for achieving a certain kind of processing, and the like are placed.

  In sample stages used in optical microscopes and electron microscopes, processing steps for joining the end faces of optical fibers, prism application steps, processes for analyzing components by irradiating radiation to certain types of samples, etc. In order to observe a workpiece or sample from an arbitrary direction, it is necessary to move these to a predetermined position in units of microns or incline in a unit of seconds. Many devices have been developed.

JP 7-214438 A Utility Model Registration No. 3144575 JP-A-6-331900 JP 2000-138278 A

  The invention “X / Y stage” of Patent Document 1 is configured to assemble an X-axis base that moves in the X horizontal direction with respect to the fixed base, and further assemble a Y-axis base that moves in the Y horizontal direction with respect to this X-axis base. The sample is placed on the top surface of the Y-axis base, but it is at least a three-stage set consisting of a fixed base, an X-axis base, and a Y-axis base. As a result, it was impossible to expect high-precision movement, and there was a complaint that the installation space was large.

  An improvement of this point is the “biaxial planar moving stage” of Patent Document 2. Here, the first and second Y-axis guides arranged opposite to each other on the substrate, and the first and second Y-axis sliders facing each other and moving in the YY′-axis direction along the Y-axis guide. A first X-axis guide and a second X-axis guide that are fixed to the Y-axis slider, an X-axis slider that moves along the X-axis guide in the XX′-axis direction, and a Y-axis of the X-axis slider. This is a configuration of a linear stage that includes moving means in the Y′-axis direction and the XX′-axis direction and is movable in directions orthogonal to each other. In this configuration, since the X-axis slider to which the test object is attached can move linearly in the XX ′ axis direction and the YY ′ axis direction on the same plane, the height width of the entire apparatus as compared with the invention of Patent Document 1. Can be lowered.

  However, since the pair of X-axis guides to which the X-axis slider is assembled is assembled to the pair of Y-axis guides, the length of the X-axis guide is extremely shorter than the length of the Y-axis slider, and the rigidity is weak. There's a problem. Since rigidity is proportional to the length of the guide, the shorter it is, the weaker it becomes. As a result of the great difference in length, a large difference is formed in the rigidity in the X direction and the Y direction, and stable and accurate movement cannot be expected. In addition, since the X-axis slider and the X-axis guide and the Y-axis slider and the Y-axis guide are so-called ant sliding assemblies, there is a large difference between the static friction coefficient and the dynamic friction coefficient, and there is also a problem that operational slip is likely to occur. The

  Next, the invention “Sample Stage” in Patent Document 3 or the “Tilt Stage” in Patent Document 4 allows the stage to swing and move in the X direction and the Y direction, respectively, so as to obtain a desired tilt posture of the stage upper surface. An X-direction swinging stage that slides in a surface with a predetermined curvature curved surface is assembled to the base plate, and then a Y-direction swinging that slides in a surface with another predetermined curvature curved surface with respect to the X-direction swinging stage. This is a form in which the stages are assembled one above the other. Therefore, these inventions have drawbacks such as large size, poor balance, poor accuracy, and a large installation space, as in the above-described conventional example.

  In addition, as particularly mentioned in Patent Document 3, the surface-sliding curved surface with respect to the base plate or the surface-sliding curved surface with respect to the X-direction rocking stage of the X-direction rocking stage and the Y-direction rocking stage positioned above and below Each curvature has to be set to a different value because the mounting position of the sample on the upper surface of the stage must be the center of curvature, and it is necessary to prepare different members for each swing stage. A great amount of labor is required in that a high level of manufacturing accuracy is required and that the occurrence of errors due to mutual assembly must always be taken into account.

  Therefore, the present invention is a positioning stage developed to eliminate the above-mentioned drawbacks, inconveniences and dissatisfactions of the prior art, and moves the sample stage used for an optical microscope or an electron microscope to a predetermined position in units of microns. It is an object of the present invention to perform control with high accuracy and to suppress the size of the entire apparatus as much as possible so as to obtain an inclined posture of a second unit angle.

  In order to solve the above-mentioned problem, the present invention according to claim 1 is capable of horizontally moving in the X direction via a fixed base plate and a pair of X-direction cross roller guides extending in the X direction on the fixed base plate. An intermediate table to be assembled, and an installation table mounted on the intermediate table so as to be horizontally movable in the Y direction via a pair of Y-direction cross roller guides extending in the Y direction and on which the sample is placed The X direction cross roller guide and the Y direction cross roller guide are arranged on the same plane.

  According to a second aspect of the present invention, the fixed base plate and the fixed base plate are assembled so as to be swingable in the θX direction via a pair of θX direction cross roller guides extending in the θX direction. A table and an installation table on which a sample is placed on the upper surface are assembled to the middle table so as to be swingable in the θY direction via a pair of θY-direction cross roller guides extending in the θY direction. The θX direction cross roller guide and the θY direction cross roller guide are arranged on the same plane.

  In the present invention as set forth in claim 1, the intermediate table can move horizontally in the X direction through a pair of X direction cross roller guides extending in the X direction with respect to the fixed base plate. On the other hand, the installation table can move horizontally in the Y direction via a pair of Y direction cross roller guides extending in the Y direction. That is, the installation table on which the sample is placed can be moved horizontally in the X direction and the Y direction with respect to the fixed base plate via the middle table, and the sample on the upper surface can be installed at a predetermined position.

  In this case, since the pair of X direction cross roller guides and the pair of Y direction cross roller guides are arranged on the same plane, the height width of the entire positioning stage is substantially the height width of the installation table and the fixed base plate. The overall size is small, the installation space is minimized, and a balanced and accurate movement is obtained. Furthermore, since the X-direction cross roller guide and the Y-direction cross roller guide have the same length stroke and a sufficient length can be secured, high rigidity can be maintained and stable and accurate movement can be achieved.

  Further, as is well known, the cross roller guide is composed of a pair of roller races having a V-groove transfer surface subjected to precision grinding, and a roller cage in which precision cylinder rollers are alternately and orthogonally installed in the opposing V-groove space. Since there are a plurality of cylindrical rollers rolling on the roller race, there is an advantage that the change in friction from the stop to the start (difference between static friction and dynamic friction) is small, and it is difficult to cause operating slip. Since the load is supported by line contact, the rigidity is high.

  Therefore, if the horizontal movement of the middle table relative to the fixed base plate and the horizontal movement of the installation table relative to the middle table are respectively performed via the cross roller guide as in the present invention described above, the minute feed can be accurately followed and the low speed can be achieved. Stable operation from high to high speed is possible, and high rigidity and high load capacity can be realized.

  In the present invention described in claim 2, the middle table can swing and move in the θX direction via a pair of θX-direction cross roller guides that are curved and extended in the θX direction with respect to the fixed base plate. The installation table can swing and move in the θY direction via a pair of θY-direction cross roller guides extending in the θY direction with respect to the middle table. That is, the installation table on which the sample is placed can be swung in the θX direction and the θY direction with respect to the fixed base plate via the middle table, and the sample on the upper surface can be installed at a predetermined position.

  In this case, since the pair of θX direction cross roller guides and the pair of θY direction cross roller guides are arranged on the same plane, the height width of the entire positioning stage is substantially equal to the height width of the installation table and the fixed base plate. The overall size is small, the installation space is minimized, and a balanced and accurate movement is obtained.

  The advantages of using the cross roller guide are as described above. The micro-feed can be accurately followed, stable operation from low speed to high speed is possible, and high rigidity and high load capacity can be realized.

  Furthermore, since the θX direction cross roller guide and the θY direction cross roller guide are arranged on the same plane, it is only necessary to perform curve forming with the same curvature with respect to a specific point on the upper surface of the installation table serving as the center of curvature. Since it is not necessary to prepare products with different curvatures for the θX direction cross roller guide and θY direction cross roller guide, not only higher precision operation can be expected, but also the manufacturing cost is reduced and the labor of assembly is reduced. It has many excellent effects such as being able to reduce this.

It is a perspective view of a positioning stage that achieves horizontal movement. FIG. 2 is a transparent perspective view showing a state in FIG. 1 that is horizontally moved by 3 mm in the X direction and the Y direction, respectively. FIG. 2 is an exploded schematic perspective view of FIG. 1. It is the sectional view on the AA line of FIG. It is the BB sectional view taken on the line of FIG. It is the schematic which shows arrangement | positioning of the cross roller guide of FIG. It is a see-through | perspective perspective view of the positioning stage which achieves rocking | fluctuation movement. FIG. 8 is a see-through perspective view showing a state of being oscillated and moved by an angle of 3 degrees in the θX direction and the θY direction in FIG. 7. FIG. 8 is an exploded schematic perspective view of FIG. 7. It is CC sectional view taken on the line of FIG. It is the DD sectional view taken on the line of FIG. It is the schematic which shows arrangement | positioning of the cross roller guide of FIG.

  The positioning stage 10 that achieves the horizontal movement shown in FIGS. 1 to 6 includes a fixed base plate 11, a middle table 12 assembled on the fixed base plate 11, and a sample mounted on the upper surface. The installation table 13 is configured.

The fixed base plate 11 and the intermediate table 12 can be moved horizontally in the X direction through a pair of X-direction cross roller guides 14 that are assembled on the fixed base plate 11 and extend in the X direction. The intermediate table 12 and the installation table 13 are configured such that the installation table 13 is assembled on the intermediate table 12 and can be moved horizontally in the Y direction via a pair of Y direction cross roller guides 15 extending in the Y direction.
In this case, a roller race 14a having V grooves 14b formed on the outer surface at both ends along the X direction on the lower surface of the intermediate table 12 is horizontally extended in the X direction as a part of the X direction cross roller guide 14. The Y-direction cross-roller guide 15 is provided with roller races 15a having V grooves 15b formed on the outer surface at both end portions along the Y-direction on the lower surface of the intermediate table 12 as opposed to each other. A roller race 14a is formed as a part of the roller race 14a that is horizontally suspended in the Y direction and is formed with V grooves 14b 'on the inner surface at both ends along the X direction on the upper surface of the fixed base plate 11 described above. Are arranged opposite to each other in the form of horizontally extending in the X direction as a part of the X direction cross roller guide 14 described above, and at the both ends along the Y direction on the lower surface of the installation table 13. Facing in a form that appear horizontally extending in the Y direction 'roller race 15a that engraved' V groove 15b as part of the Y-direction cross roller guide 15 which is the hanging set to.

  Next, the positioning stage 100 that achieves the swinging movement shown in FIGS. 7 to 12 includes a fixed base plate 101, a middle table 102 that is assembled on the fixed base plate 101, and a middle table 102 that is assembled on the middle table 102. And an installation table 103 on which a sample is placed.

The fixed base plate 101 and the middle table 102 can be oscillated in the θX direction via a pair of θX-direction cross roller guides 104 that are mounted on the fixed base plate 101 and bend and extend in the θX direction. The intermediate table 102 and the installation table 103 can be slidably moved in the θY direction via a pair of θY-direction cross roller guides 105 that are assembled and mounted on the intermediate table 102 and curved in the θY direction. Yes.
In this case, a roller race 104a having V grooves 104b formed on the outer surface at both ends along the X direction on the lower surface of the intermediate table 102 is curved and extended in the θX direction as a part of the θX direction cross roller guide 104 described above. The cross-roller guide in the .theta.Y direction described above has a roller race 105a in which V grooves (05b are engraved on the outer surface) are formed at both ends along the Y direction on the lower surface of the intermediate table 102. A roller race in which a part of 105 extends downwardly in a curved form extending in the θY direction, and V grooves 104b ′ are formed on the inner surface at both ends along the X direction on the upper surface of the fixed base plate 101 described above. 104a ′ is arranged as a part of the θX-direction cross roller guide 104 so as to be curved and extended in the θX direction, and is further arranged as described above. A roller race 105a ′ in which a V groove 105b ′ is formed on the inner surface is opposed to both ends along the Y direction on the lower surface so as to bend and extend in the θY direction as a part of the θY direction cross roller guide 105 described above. Droop down.

  In FIG. 1 to FIG. 6, first, in the rectangular plate-shaped intermediate table 12, roller races 14a are opposed to both end portions along the X direction on the lower surface thereof so as to extend horizontally in the X direction. A V groove 14b is formed on the outer surface of the roller race 14a. On the other hand, at both ends along the Y direction on the lower surface of the intermediate table 12, roller races 15a are vertically suspended so as to extend horizontally in the Y direction, and V grooves 15b are formed on the outer surface of the roller race 15a. Are engraved (see FIG. 3). That is, on the lower surface of the middle table 12, a pair of opposing roller races 14a and a pair of opposing roller races 15a are suspended in a cross-beam shape.

  Next, in the rectangular plate-like fixed base plate 11 to which the middle table 12 is assembled from above, a pair of blocks 16 extending in the X direction are opposed to both ends of the upper surface along the X direction. The roller races 14a 'are arranged on the inner surface of the block 16 in such a manner as to extend horizontally in the X direction, and V-grooves 14b' are formed on the inner surface of the roller race 14a '.

  Then, with the intermediate table 12 assembled to the fixed base plate 11, the roller race 14a ′ of the fixed base plate 11 is positioned on the outer surface side of the roller race 14a of the intermediate table 12, and the V groove 14b and the V groove 14b ′ respectively. A set of X-direction cross roller guides 14 extending horizontally in the X direction are formed by simultaneously incorporating alternately orthogonal roller cages (not shown) with precision cylindrical rollers in the space to be formed (FIG. 1). 6).

  Next, a pair of blocks 17 extending in the Y direction are oppositely arranged at both ends along the Y direction on the lower surface of the rectangular plate-shaped installation table 13 assembled to the middle table 12 from above. The roller races 15a 'are arranged on the inner surfaces of the inner surfaces in a manner extending horizontally in the Y direction, and V grooves 15b' are formed on the inner surfaces.

  Therefore, the installation table 13 is assembled to the middle table 12 from above, the roller race 15a ′ of the installation table 13 is positioned on the outer surface side of the roller race 15a of the middle table 12, and formed by the respective V grooves 15b and V grooves 15b ′. A pair of Y-direction cross roller guides 15 extending horizontally in the Y direction are formed by simultaneously incorporating alternately orthogonal roller cages (not shown) with precision cylindrical rollers in the space formed (FIG. 6). reference).

  Therefore, in this configuration, as described above, the pair of roller races 14a and the pair of roller races 15a are suspended in the same plane as the lower surface of the middle table 12, so that the fixed base plate 11 and the middle base plate 11 In the state where the table 12 and the installation table 13 are assembled, the two sets of X-direction cross roller guides 14 extending horizontally in the X direction and the two sets of Y-direction cross roller guides 14 extending horizontally in the Y direction are coplanar. It will be located on the top and the height width as a whole can be kept low.

  A micrometer head 18 for X direction control is attached between the fixed base plate 11 and the middle table 12, and a micrometer head 19 for Y direction control is attached between the installation table 13 and the middle table 12, respectively. Yes (indirectly via the micrometer head 18 in the embodiment of FIG. 1), the intermediate table 12 is moved forward and backward in a small stroke in the X direction with respect to the fixed base plate 11, or the installation table with respect to the intermediate table 12 As a result, the sample on the upper surface of the installation table 13 can be set at a predetermined position.

  7 to 12, the roller race 104a is suspended from both ends of the rectangular plate-shaped middle table 102 along the X direction on the lower surface thereof so as to bend and extend in the θX direction. A V groove 104b is formed on the outer surface of the roller race 104a. On the other hand, at both ends along the Y direction on the lower surface of the intermediate table 102, roller races 105a are suspended in a curved manner extending in the θY direction, and a V groove 105b is formed on the outer surface of the roller race 105a. Are engraved (see FIG. 9). That is, on the lower surface of the middle table 102, a pair of opposing roller races 104a and a pair of opposing roller races 105a are formed in a hanging manner in the form of a cross.

  Next, in the fixed base plate 101 having a rectangular plate shape to which the middle table 102 is assembled from above, a pair of blocks 106 extending in the X direction are opposed to both ends of the upper surface along the X direction. The roller race 104a ′ is arranged on the inner surface of the block 106 so as to be curved and extend in the θX direction, and a V groove 104b ′ is formed on the inner surface of the roller race 104a ′.

  Then, with the intermediate table 102 assembled to the fixed base plate 101, the roller race 104a ′ of the fixed base plate 101 is positioned on the outer surface side of the roller race 104a of the intermediate table 102, and the V groove 104b and the V groove 104b ′ respectively. A set of θX-direction cross roller guides 104 extending in the θX direction are formed by simultaneously incorporating alternately orthogonal roller cages (not shown) with precision cylindrical rollers in the space to be formed (FIG. 5). 12).

  Next, a pair of blocks 107 extending in the Y direction are arranged opposite to each other at both ends along the Y direction on the lower surface of the rectangular plate-shaped installation table 103 assembled to the middle table 102 from above. Each roller race 105a ′ is arranged in a curvedly extending manner in the θY direction, and a V groove 105b ′ is formed on the inner surface.

  Accordingly, the installation table 103 is assembled to the middle table 102 from above, and the roller race 105a ′ of the installation table 103 is positioned on the outer surface side of the roller race 105a of the middle table 102, and is formed by the respective V grooves 105b and V grooves 105b ′. A set of θY-direction cross roller guides 105 that are curved and extended in the θY direction are formed by simultaneously incorporating alternately orthogonal roller cages (not shown) with precision cylindrical rollers in the space formed (FIG. 12). reference).

  Therefore, in this configuration, as described above, the pair of roller races 104a and the pair of roller races 105a are suspended in the same plane as the lower surface of the middle table 102, so that the fixed base plate 101 and the middle base In the state where the table 102 and the installation table 103 are assembled, the two sets of θX direction cross roller guides 104 extending in the θX direction and the two sets of θY direction cross roller guides 105 extending in the θY direction are coplanar. It will be located on the top and the height width as a whole can be kept low. In addition, since the two sets of θX direction cross roller guides 104 and the two sets of θY direction cross roller guides 105 are located on the same plane, they all have the same curvature with respect to a specific curvature point on the upper surface of the installation table 103. Curve forming is sufficient.

  A micrometer head 108 for X direction control is attached between the fixed base plate 101 and the middle table 102, and a micrometer head 109 for Y direction control is attached between the installation table 103 and the middle table 102. Yes, the intermediate table 102 is moved forward and backward with a small stroke in the θX direction with respect to the fixed base plate 101, or the installation table 103 is moved forward and backward with a small stroke in the θY direction with respect to the intermediate table 102. The sample on the upper surface can be set at a predetermined position.

DESCRIPTION OF SYMBOLS 10 Positioning stage 11 Fixed base plate 12 Middle table 13 Installation table 14 X direction cross roller guide 14a Roller race 14b V groove 15 Y direction cross roller guide 15a Roller race 15b V groove 16 Block 17 Block 18 Micrometer head 19 for X direction control Micrometer head 100 for Y direction control Positioning stage 101 Fixed base plate 102 Middle table 103 Installation table 104 X direction cross roller guide 104a Roller race 104b V groove 105 Y direction cross roller guide 105a Roller race 105b V groove 106 Block 107 Block 108 X Micrometer head 109 for direction control Micrometer head for Y direction control

Claims (2)

A fixed base plate (11), and a middle table (12) mounted on the fixed base plate (11) so as to be horizontally movable in the X direction via a pair of X-direction cross roller guides (14) extending in the X direction. The installation table (13) is mounted on the middle table (12) so as to be horizontally movable in the Y direction via a pair of Y-direction cross roller guides (15) extending in the Y direction, and a sample is placed on the upper surface. ) And
A roller race (14a) in which V grooves (14b) are engraved on the outer surface at both ends along the X direction on the lower surface of the intermediate table (12) is used as a part of the X direction cross roller guide (14) in the X direction. The roller race (15a) is formed in a horizontally extending manner so as to oppose the lower surface of the intermediate table (12), and V-grooves (15b) are formed on the outer surface at both ends along the Y direction. As a part of the Y-direction cross roller guide (15), it hangs down oppositely in a form extending horizontally in the Y direction,
A roller race (14a ') having V grooves (14b') on the inner surface at both ends along the X direction on the upper surface of the fixed base plate (11) is used as a part of the X-direction cross roller guide (14). Arranged opposite to each other in a form extending horizontally in the X direction,
Furthermore, a roller race (15a ′) having V grooves (15b ′) formed on the inner surface at both ends along the Y direction on the lower surface of the installation table (13) is provided on one side of the Y-direction cross roller guide (15). A positioning stage characterized in that the part is vertically suspended so as to extend horizontally in the Y direction . A fixed base plate (101) and an intermediate table (102) mounted on the fixed base plate (101) so as to be swingable in the θX direction via a pair of θX-direction cross roller guides (104) extending in the θX direction. ) And a pair of θY-direction cross roller guides (105) extending in the θY direction so as to swing and move in the θY direction, and the sample is placed on the upper surface. The installation table (103),
A roller race (104a) in which V grooves (104b) are engraved on the outer surface at both ends along the X direction on the lower surface of the intermediate table (102) is used as a part of the θX direction cross roller guide (104) in the θX direction. Roller races (105a) are provided so as to be opposed to each other in a curvedly extending manner, and V grooves (105b) are engraved on the outer surface at both ends along the Y direction on the lower surface of the intermediate table (102). As a part of the θY-direction cross roller guide (105), it is suspended and opposed in a form extending and curving in the θY direction,
A roller race (104a ′) in which V grooves (104b ′) are formed on the inner surface at both ends along the X direction on the upper surface of the fixed base plate (101) is used as a part of the θX direction cross roller guide (104). Arranged facing each other in a form extending in the θX direction,
Further, a roller race (105a ′) having V grooves (105b ′) formed on the inner surface at both ends along the Y direction on the lower surface of the installation table (103) is provided on one of the θY direction cross roller guides (105). A positioning stage, wherein the positioning stage is provided so as to face and bend and extend in the θY direction .

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