JP2009039624A5 - - Google Patents

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Publication number
JP2009039624A5
JP2009039624A5 JP2007205839A JP2007205839A JP2009039624A5 JP 2009039624 A5 JP2009039624 A5 JP 2009039624A5 JP 2007205839 A JP2007205839 A JP 2007205839A JP 2007205839 A JP2007205839 A JP 2007205839A JP 2009039624 A5 JP2009039624 A5 JP 2009039624A5
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JP
Japan
Prior art keywords
coating
liquid
substrate
slit
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007205839A
Other languages
English (en)
Japanese (ja)
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JP2009039624A (ja
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Publication date
Application filed filed Critical
Priority to JP2007205839A priority Critical patent/JP2009039624A/ja
Priority claimed from JP2007205839A external-priority patent/JP2009039624A/ja
Publication of JP2009039624A publication Critical patent/JP2009039624A/ja
Publication of JP2009039624A5 publication Critical patent/JP2009039624A5/ja
Withdrawn legal-status Critical Current

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JP2007205839A 2007-08-07 2007-08-07 スリットコート式塗布方法 Withdrawn JP2009039624A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007205839A JP2009039624A (ja) 2007-08-07 2007-08-07 スリットコート式塗布方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007205839A JP2009039624A (ja) 2007-08-07 2007-08-07 スリットコート式塗布方法

Publications (2)

Publication Number Publication Date
JP2009039624A JP2009039624A (ja) 2009-02-26
JP2009039624A5 true JP2009039624A5 (enExample) 2010-09-02

Family

ID=40440975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007205839A Withdrawn JP2009039624A (ja) 2007-08-07 2007-08-07 スリットコート式塗布方法

Country Status (1)

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JP (1) JP2009039624A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100966089B1 (ko) * 2009-09-07 2010-06-28 (주)둔포기계 박막 코팅 장치
CN103084290B (zh) * 2011-10-31 2015-10-28 细美事有限公司 喷嘴单元、基板处理装置和基板处理方法
JP6231956B2 (ja) * 2014-08-11 2017-11-15 東京エレクトロン株式会社 基板処理装置
JP6659422B2 (ja) * 2016-03-29 2020-03-04 アルバック成膜株式会社 塗布装置、マスクブランクの製造方法

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