JP2009039624A - スリットコート式塗布方法 - Google Patents

スリットコート式塗布方法 Download PDF

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Publication number
JP2009039624A
JP2009039624A JP2007205839A JP2007205839A JP2009039624A JP 2009039624 A JP2009039624 A JP 2009039624A JP 2007205839 A JP2007205839 A JP 2007205839A JP 2007205839 A JP2007205839 A JP 2007205839A JP 2009039624 A JP2009039624 A JP 2009039624A
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JP
Japan
Prior art keywords
coating
substrate
liquid
coating film
head
Prior art date
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Withdrawn
Application number
JP2007205839A
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English (en)
Japanese (ja)
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JP2009039624A5 (enExample
Inventor
Shinya Momose
信也 百瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007205839A priority Critical patent/JP2009039624A/ja
Publication of JP2009039624A publication Critical patent/JP2009039624A/ja
Publication of JP2009039624A5 publication Critical patent/JP2009039624A5/ja
Withdrawn legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Materials For Photolithography (AREA)
JP2007205839A 2007-08-07 2007-08-07 スリットコート式塗布方法 Withdrawn JP2009039624A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007205839A JP2009039624A (ja) 2007-08-07 2007-08-07 スリットコート式塗布方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007205839A JP2009039624A (ja) 2007-08-07 2007-08-07 スリットコート式塗布方法

Publications (2)

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JP2009039624A true JP2009039624A (ja) 2009-02-26
JP2009039624A5 JP2009039624A5 (enExample) 2010-09-02

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JP2007205839A Withdrawn JP2009039624A (ja) 2007-08-07 2007-08-07 スリットコート式塗布方法

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JP (1) JP2009039624A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100966089B1 (ko) * 2009-09-07 2010-06-28 (주)둔포기계 박막 코팅 장치
JP2013098569A (ja) * 2011-10-31 2013-05-20 Semes Co Ltd ノズルユニット、基板処理装置、及び基板処理方法
KR20160019370A (ko) * 2014-08-11 2016-02-19 도쿄엘렉트론가부시키가이샤 기판 처리 장치
JP2017183374A (ja) * 2016-03-29 2017-10-05 アルバック成膜株式会社 塗布装置、マスクブランクの製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100966089B1 (ko) * 2009-09-07 2010-06-28 (주)둔포기계 박막 코팅 장치
JP2013098569A (ja) * 2011-10-31 2013-05-20 Semes Co Ltd ノズルユニット、基板処理装置、及び基板処理方法
KR20160019370A (ko) * 2014-08-11 2016-02-19 도쿄엘렉트론가부시키가이샤 기판 처리 장치
KR102331827B1 (ko) * 2014-08-11 2021-11-25 도쿄엘렉트론가부시키가이샤 기판 처리 장치
JP2017183374A (ja) * 2016-03-29 2017-10-05 アルバック成膜株式会社 塗布装置、マスクブランクの製造方法

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