JP2009035790A - Sintered compact, method for producing transparent electroconductive film, and transparent electroconductive film - Google Patents
Sintered compact, method for producing transparent electroconductive film, and transparent electroconductive film Download PDFInfo
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本発明は、酸化亜鉛系焼結体、酸化亜鉛系透明導電膜の製造方法及び酸化亜鉛系透明導電膜膜に関するものである。 The present invention relates to a zinc oxide-based sintered body, a method for producing a zinc oxide-based transparent conductive film, and a zinc oxide-based transparent conductive film.
現在、フラットパネルディスプレイ等の透明電極として最も多く使用されている材料は、酸化インジウムに適量の錫をドープしたITO（Indium Tin Oxide）である。
ITOが透明導電体の主役となっている理由は、ITOの抵抗率が低く、可視光領域での透過率が高いという透明導電体に要求される諸特性が、他の材料系の透明導電体と比較して優れているためである。
At present, ITO (Indium Tin Oxide), which is most frequently used as a transparent electrode for flat panel displays or the like, is an indium oxide doped with an appropriate amount of tin.
The reason why ITO is the leading role of transparent conductors is that the properties required for transparent conductors, such as low resistivity of ITO and high transmittance in the visible light region, are transparent conductors of other materials. It is because it is excellent compared with.
しかし、ITOに使用される原料であるＩｎ（インジウム）は、高価であることによる最終製品のコストアップや希少資源であることによる資源枯渇に伴う材料供給の問題がある。ITO代替材料の開発として、酸化亜鉛を主成分とする酸化亜鉛系透明導電体の開発が盛んに進められているが、依然として抵抗率がITOと比較して、かなり高いというのが実情である。 However, In (indium), which is a raw material used for ITO, has a problem of supply of materials accompanying an increase in the cost of the final product due to its high cost and resource depletion due to its scarce resources. As an alternative material for ITO, zinc oxide-based transparent conductors mainly composed of zinc oxide have been actively developed, but the actual situation is that the resistivity is still considerably higher than that of ITO.
この理由は、これまでの酸化亜鉛系透明導電材料の開発方針が、最適な単一ドーパントの探索にすぎなかったからである。つまり、母材である酸化亜鉛にドープすることで電子を放出してn型ドーパントとなるような元素を、周期律表から探すというものである。具体的には、例えば、亜鉛の価数である2価より大きい原子価を有する候補元素を適当濃度範囲でドープしたターゲットを作製し、それをスパッタ成膜して膜の抵抗率を評価するというものが殆どであった。
この開発方針の結果、3価（特許文献１参照）や4価（特許文献２参照）の原子価を有する候補ドーパントの探索が行われたが、抵抗率はITOに遠く及ばないのが実情である。
This is because the conventional development policy for zinc oxide-based transparent conductive materials has only been to search for an optimal single dopant. That is, an element that emits electrons by doping zinc oxide as a base material to become an n-type dopant is searched from the periodic table. Specifically, for example, a target doped with a candidate element having a valence greater than the valence of zinc in an appropriate concentration range is prepared, and it is sputtered to evaluate the resistivity of the film. Most of them were.
As a result of this development policy, a search was made for candidate dopants having trivalent (see Patent Document 1) and tetravalent (see Patent Document 2) valence, but the resistivity is far from that of ITO. is there.
ところで、最近、所謂、Co-doping（コ・ドーピング）理論の適用によって、低抵抗率の酸化亜鉛系透明導電体を開発したとの報告がある（特許文献３参照）。
その内容は、一定濃度以上のn型ドーパントをp型ドーパントより多く含むというだけの規定であり、これまでに、この規定を満足しただけで、この特許出願中に記載されているような低抵抗率を有する酸化亜鉛系透明導電体の作製に実際に成功したとの報告は、他には未だ無い。
また、当該特許出願には、酸化亜鉛系透明導電体の作製方法として、有機金属化学気相成長法(MOCVD法)の実施例と分子線エピタキシー法(MBE法)への言及があるが、何れも大面積透明導電膜を作製するには不適当な方法である。
Recently, there has been a report that a low resistivity zinc oxide-based transparent conductor has been developed by applying a so-called Co-doping theory (see Patent Document 3).
The content is merely a rule that the n-type dopant of a certain concentration or more is included more than the p-type dopant, and the low resistance as described in this patent application has been satisfied so far. There are no other reports of successful production of zinc oxide-based transparent conductors having high rates.
In addition, in the patent application, as a method for producing a zinc oxide-based transparent conductor, there is a reference to an example of a metal organic chemical vapor deposition method (MOCVD method) and a molecular beam epitaxy method (MBE method). Is an inappropriate method for producing a large-area transparent conductive film.
また、所定の元素を複数含有することで、透明導電体の抵抗率を下げられると主張する特許出願もある（特許文献４参照）が、これもこの特許出願中に記載されているような低抵抗率を有する酸化亜鉛系透明導電体の作製に実際に成功したとの報告は、他には未だ無い。 In addition, there is a patent application claiming that the resistivity of the transparent conductor can be lowered by containing a plurality of predetermined elements (see Patent Document 4), but this is also low as described in this patent application. There are no other reports that the zinc oxide based transparent conductor having resistivity has actually been successfully produced.
さらには、これらの特許出願に記載されている技術的思想で、実用上の最大の問題点としては、低抵抗率化に効果がある窒素の供給方法が、成膜時に雰囲気ガスから供給されなければならない点である。つまり、窒素が雰囲気のガス成分から供給される場合には、ガスの供給量のばらつき、基板温度や成膜炉内の温度分布によるガスの流れの乱れ等によって、窒素成分の膜中での偏析が生じやすいという問題がある。
そして、その偏析の程度は、膜を大面積に生産することでスケールメリットや生産性の向上を図らなければならない産業応用時にはより顕著となる。
従って、窒素をガス成分から供給する方法は、供給される窒素が、随時、膜へ取り込まれて消費されるために、膜へ取り込まれる窒素を考慮しつつ、窒素濃度を一定に保ちながらガス流量を調整、制御し続けて成膜しなければならないという大きな欠点がある。
The degree of segregation becomes more prominent in industrial applications where it is necessary to improve the merit of scale and productivity by producing a film with a large area.
Therefore, in the method of supplying nitrogen from the gas component, since the supplied nitrogen is taken into the film and consumed as needed, the gas flow rate while keeping the nitrogen concentration constant while taking into account the nitrogen taken into the film. There is a great disadvantage that the film must be continuously controlled and controlled.
前述のように、高価で資源枯渇の懸念のあるIn原料を有しないITO代替材料としての酸化亜鉛系透明導電体の開発において、最適な単一ドーパントの探索は既に限界に達しており、また、Co-doping理論による開発では、その内容が漠としており、その作製方法が産業的に利用されるのに適当である大面積透明導電体が作製可能なものとなっていないのが現状である。
本発明はこのような状況に鑑みてなされたもので、ITOに匹敵する低抵抗率を有し、大面積化可能な酸化亜鉛系透明導電膜を提供することを目的とする。
As described above, in the development of zinc oxide-based transparent conductors as ITO alternative materials that do not have expensive In raw materials that may cause resource depletion, the search for the optimal single dopant has already reached its limit. In the development based on the co-doping theory, the content is vague, and the present situation is that it is not possible to produce a large-area transparent conductor suitable for industrial use.
The present invention has been made in view of such a situation, and an object thereof is to provide a zinc oxide-based transparent conductive film having a low resistivity comparable to that of ITO and capable of increasing the area.
本発明者らは上記課題を解決すべく鋭意研究を行い、その結果、酸化亜鉛に対してn型ドーパントの濃度範囲、窒素とn型ドーパントとの比等を適切範囲とする焼結体を開発し、低抵抗率かつ大面積化可能な酸化亜鉛系透明導電膜の実現に成功して、本発明を完成するに至ったものである。 The present inventors have intensively studied to solve the above problems, and as a result, developed a sintered body having an n-type dopant concentration range, a ratio of nitrogen to n-type dopant, etc. in an appropriate range with respect to zinc oxide. However, the present invention has been completed by successfully realizing a zinc oxide-based transparent conductive film having a low resistivity and a large area.
即ち、本発明は、
１）酸化亜鉛、酸化亜鉛に対してn型ドーパントとなるガリウム、アルミニウム、インジウム、ホウ素の中から選ばれた、少なくとも１種類以上の元素及び窒化チタン、窒化ジルコニウム、窒化アルミニウム、窒化クロム、窒化ガリウムの中から選ばれた、少なくとも1種類以上の金属窒素物からなる焼結体であって、酸化亜鉛中の亜鉛の原子数をZ、酸化亜鉛に対してn型ドーパントとなる元素の原子数をA、金属窒素化合物中の金属元素の原子数をB、窒素の原子数をCとしたときに、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下であることを特徴とする焼結体、を提供する。
That is, the present invention
1) At least one element selected from zinc oxide, gallium, aluminum, indium, and boron, which are n-type dopants for zinc oxide, and titanium nitride, zirconium nitride, aluminum nitride, chromium nitride, gallium nitride A sintered body made of at least one kind of metal nitrogen selected from Z, wherein the number of zinc atoms in zinc oxide is Z, and the number of atoms of n-type dopant elements relative to zinc oxide is A, when the number of metal element atoms in the metal nitrogen compound is B and the number of nitrogen atoms is C, the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less, and There is provided a sintered body characterized in that a value of C / (A + B) is 0.3 or more and 0.7 or less.
また、本願発明は、
２）酸化亜鉛、酸化亜鉛に対してn型ドーパントとなるガリウム、アルミニウム、インジウム、ホウ素の中から選ばれた、少なくとも１種類以上の元素及び窒化チタン、窒化ジルコニウム、窒化アルミニウム、窒化クロム、窒化ガリウムの中から選ばれた、少なくとも1種類以上の金属窒素物からなる焼結体であって、酸化亜鉛中の亜鉛の原子数をZ、酸化亜鉛に対してn型ドーパントとなる元素の原子数をA、金属窒素化合物中の金属元素の原子数をB、窒素の原子数をCとしたときに、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下である焼結体をスパッタリングすることによって、前記焼結体と同組成の膜を形成することを特徴とする透明導電膜の製造方法、を提供する。
In addition, the present invention
2) At least one element selected from zinc oxide, gallium, aluminum, indium, and boron, which are n-type dopants to zinc oxide, and titanium nitride, zirconium nitride, aluminum nitride, chromium nitride, gallium nitride A sintered body made of at least one kind of metal nitrogen selected from Z, wherein the number of zinc atoms in zinc oxide is Z, and the number of atoms of n-type dopant elements relative to zinc oxide is A, when the number of metal element atoms in the metal nitrogen compound is B and the number of nitrogen atoms is C, the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less, and A method for producing a transparent conductive film, wherein a film having the same composition as the sintered body is formed by sputtering a sintered body having a C / (A + B) value of 0.3 or more and 0.7 or less ,I will provide a.
また、本願発明は、
３）酸化亜鉛、酸化亜鉛に対してn型ドーパントとなるガリウム、アルミニウム、インジウム、ホウ素の中から選ばれた、少なくとも１種類以上の元素及び窒化チタン、窒化ジルコニウム、窒化アルミニウム、窒化クロム、窒化ガリウムの中から選ばれた、少なくとも1種類以上の金属窒素物からなる透明導電膜であって、酸化亜鉛中の亜鉛の原子数をZ、酸化亜鉛に対してn型ドーパントとなる元素の原子数をA、金属窒素化合物中の金属元素の原子数をB、窒素の原子数をCとしたときに、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下であることを特徴とする透明導電膜、を提供する。
In addition, the present invention
3) At least one element selected from zinc oxide, gallium, aluminum, indium, and boron, which are n-type dopants for zinc oxide, and titanium nitride, zirconium nitride, aluminum nitride, chromium nitride, gallium nitride A transparent conductive film made of at least one kind of metal nitrogen selected from among Z, the number of zinc atoms in zinc oxide is Z, and the number of elements that are n-type dopants relative to zinc oxide is A, when the number of metal element atoms in the metal nitrogen compound is B and the number of nitrogen atoms is C, the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less, and A transparent conductive film having a C / (A + B) value of 0.3 or more and 0.7 or less is provided.
本発明は、酸化亜鉛に対して、n型ドーパントとなる元素および窒素化合物を適切濃度範囲とする焼結体をスパッタすることで、ITOと同等レベルの低抵抗率の膜を得ることができる。しかも、低抵抗率化に効果がある窒素を従来法の様に、雰囲気ガスから膜へ供給するのではなく、焼結体自体に金属窒化物の形態で含有させていることから、大面積膜の作製時に、窒素濃度の膜中での偏析を抑え、膜全体の渡って均一性の高い窒素濃度分布が得られるという効果を有する。 In the present invention, a film having a low resistivity equivalent to that of ITO can be obtained by sputtering a sintered body having an appropriate concentration range of elements and nitrogen compounds as n-type dopants with respect to zinc oxide. In addition, nitrogen, which is effective in reducing the resistivity, is not supplied from the atmospheric gas to the film as in the conventional method, but is contained in the form of metal nitride in the sintered body itself. When producing the film, it is possible to suppress the segregation in the film having a nitrogen concentration and to obtain a highly uniform nitrogen concentration distribution over the entire film.
Co-doping理論は、n型及びp型ドーパントの両方をドープすることで、それぞれの不純物準位が相互作用によって浅くなる効果を利用するものであり、特に作製困難とされているp型酸化亜鉛の実現のために開発されたものである。
一方、本発明ではn型不純物に着目した点に一つの特徴がある。つまり、不純物準位が浅くなることはn型ドーパントでも同じであり、その効果を酸化亜鉛系透明導電体に適用したのである。
The Co-doping theory utilizes the effect of doping both n-type and p-type dopants so that the respective impurity levels become shallow due to interaction. It was developed to realize this.
On the other hand, the present invention has one feature in that attention is paid to n-type impurities. In other words, the shallower impurity level is the same for the n-type dopant, and the effect is applied to the zinc oxide-based transparent conductor.
金属窒化物中の金属元素の原子数と酸化亜鉛に対してn型ドーパントとなる元素の原子数と合計が、亜鉛の原子数と金属窒化物中の金属元素の原子数と酸化亜鉛に対してn型ドーパントとなる元素の原子数との合計に対して、0.02以下であると、これらのn型ドーパントとして効果を奏する添加元素が放出する電子数が少なく、抵抗率が低くならない、一方0.08以上となると、添加されたn型不純物の活性化率が下がるとともに、イオン化不純物散乱の効果が大きくなって抵抗率が低くならない。この状況はこれまでの通常の酸化亜鉛系透明導電体と同様である。 The number of atoms of the metal element in the metal nitride and the number of atoms of the element that is an n-type dopant relative to zinc oxide are the same as the number of atoms of the zinc, the number of metal elements in the metal nitride, and zinc oxide. If the total number of atoms of the element serving as the n-type dopant is 0.02 or less, the additive element effective as these n-type dopants emits a small number of electrons and the resistivity does not decrease. As a result, the activation rate of the added n-type impurity decreases, and the effect of ionized impurity scattering increases, and the resistivity does not decrease. This situation is the same as that of a conventional normal zinc oxide based transparent conductor.
また、窒素の原子数が、酸化亜鉛に対してn型ドーパントとなる元素の原子数と金属窒化物の金属元素の原子数の合計に対して、0.3以下であると、所謂、co-doping効果が有効に示されず、逆に、0.6以上であると、窒素のp型効果が大きくなりなり過ぎて、抵抗率が小さくならない。 In addition, when the number of nitrogen atoms is 0.3 or less with respect to the total number of atoms of n-type dopant elements and metal nitride metal elements with respect to zinc oxide, the so-called co-doping effect Is not shown effectively, and conversely, if it is 0.6 or more, the p-type effect of nitrogen becomes too large and the resistivity does not decrease.
また、本願発明は窒素を金属窒化物の形態で焼結体に含有されていることが、大きな特徴である。従来法の様に窒素を雰囲気ガスから供給する場合は、ガスの供給量のばらつき、基板温度や成膜炉内の温度分布によるガスの流れの乱れ等によって、窒素成分の膜中での偏析が生じ易く、その傾向は成膜面積が大きくなるにつれてより顕著な問題として表れてくる。 In addition, the present invention is characterized in that nitrogen is contained in the sintered body in the form of metal nitride. When nitrogen is supplied from an atmospheric gas as in the conventional method, segregation of nitrogen components in the film occurs due to fluctuations in the gas supply amount, disturbance of the gas flow due to substrate temperature and temperature distribution in the film formation furnace, etc. This tendency tends to occur, and this tendency appears as a more prominent problem as the film formation area increases.
しかし、本発明の様に窒素が焼結体中に含まれている場合は、単に、当該焼結体をスパッタすることで、他の焼結体に含有されている元素成分と同様に適切な均一組成分布が大面積膜前面に渡って得られるという大きな利点がある。 However, when nitrogen is contained in the sintered body as in the present invention, it is possible to simply sputter the sintered body so that it is suitable as in the case of elemental components contained in other sintered bodies. There is a great advantage that a uniform composition distribution can be obtained over the front surface of a large area film.
金属窒化物としては、例えば、窒化チタン、窒化ジルコニウム、窒化アルミニウム、窒化クロム、窒化ガリウムなどがあるが、特に窒化物チタンなど窒化物の形態で、電気伝導性が良いものはより望ましい。それは、ターゲット中に含有されている状態の時にターゲットの導電性に悪影響を与えずに、生産上利点の多い直流（DC）スパッタによって膜が得られるからである。 Examples of the metal nitride include titanium nitride, zirconium nitride, aluminum nitride, chromium nitride, and gallium nitride. In particular, nitrides such as titanium nitride, which have good electrical conductivity, are more desirable. This is because the film can be obtained by direct current (DC) sputtering, which has many advantages in production, without adversely affecting the conductivity of the target when it is contained in the target.
焼結体の製造については、例えば、酸化亜鉛紛、酸化ガリウム紛、窒化チタン紛をそれぞれ各元素の濃度が所定の値となるように適量秤量、混合、プレス面圧力700〜900kgf/cm2で成形後、酸素雰囲気中で焼結温度1,200℃で5時間焼結を行うことで得ることができる。 For the production of the sintered body, for example, zinc oxide powder, gallium oxide powder, and titanium nitride powder are weighed, mixed, and pressed at a pressing surface pressure of 700 to 900 kgf / cm 2 so that each element has a predetermined value. After molding, it can be obtained by sintering in an oxygen atmosphere at a sintering temperature of 1,200 ° C. for 5 hours.
このようにして得られた焼結体をターゲットとしてスパッタすることで得られる膜もターゲットを同じ組成を有する膜となり、その組成範囲が適切な範囲となることで、低抵抗率を有する透明導電膜となるのである。 The film obtained by sputtering using the sintered body thus obtained as a target is also a film having the same composition as the target, and the transparent conductive film having a low resistivity by having an appropriate composition range. It becomes.
次に実施例に基づいて本発明を説明する。以下に示す実施例は、理解を容易にするためのものであり、これらの実施例によって本発明を制限するものではない。すなはち、本発明の技術的思想に基づく変形及び他の実施例は、当然本発明に含まれる。 Next, this invention is demonstrated based on an Example. The following examples are for ease of understanding, and the present invention is not limited by these examples. That is, modifications and other embodiments based on the technical idea of the present invention are naturally included in the present invention.
（実施例１）
原料である酸化亜鉛粉末、酸化ガリウム粉末、および窒化チタン粉末とを、亜鉛、ガリウム、チタン、窒素の各元素の原子数をそれぞれZn、Ga、Ti、Nとするときに、(Ga+Ti)/(Zn+Ga+Ti)＝0.02, N/(Ga+Ti)＝0.5となるように秤量し、大気雰囲気中でスーパーミキサーにより、毎分3000回転、3分の混合を行った。
Example 1
When the number of atoms of each element of zinc, gallium, titanium, and nitrogen is Zn, Ga, Ti, and N for the raw material zinc oxide powder, gallium oxide powder, and titanium nitride powder, respectively (Ga + Ti) It was weighed so that /(Zn+Ga+Ti)=0.02, N / (Ga + Ti) = 0.5, and was mixed in an air atmosphere at 3000 rpm for 3 minutes with a super mixer.
次に、混合紛に水を加えて、固形分50％のスラリーとして、直径1mmのジルコニアビーズで2時間の微粉砕を行い、混合紛の平均粒径(D50)を1.0μm以下とした。その後、PVA（ポリビニルアルコール）をスラリー1kgあたり125ccの割合で混合して、造粒機入口温度220℃、出口温度120℃、ディスク回転数9000rpmの条件で造粒した。 Next, water was added to the mixed powder, and the mixture was finely pulverized with zirconia beads having a diameter of 1 mm for 2 hours as a slurry having a solid content of 50%, so that the average particle diameter (D50) of the mixed powder was 1.0 μm or less. Thereafter, PVA (polyvinyl alcohol) was mixed at a rate of 125 cc per 1 kg of slurry, and granulated under the conditions of a granulator inlet temperature of 220 ° C., an outlet temperature of 120 ° C., and a disk rotation speed of 9000 rpm.
さらに、８インチターゲット直径となる様な所定のサイズの型に造粒紛を充填し、面圧力780kgf/cm2でプレスして成形体を得た。そして、成形体を昇温速度5℃/分で1,200℃まで昇温させ、1,200℃で5時間保持後、降温は炉冷とする焼結を行った。 Furthermore, the granulated powder was filled in a mold having a predetermined size so as to have an 8-inch target diameter, and pressed at a surface pressure of 780 kgf / cm 2 to obtain a molded body. Then, the compact was heated to 1,200 ° C. at a rate of temperature increase of 5 ° C./min, held at 1,200 ° C. for 5 hours, and then sintered with furnace cooling.
上記条件で得られた酸化物焼結体の外周の円筒研削、面側の平面研削をして、厚さ5mm程度、直径8インチとし、銅製のバッキングプレートに、インジウムをボンディングメタルとして、貼り合わせることでスパッタリングターゲットとした。 Cylinder grinding of the outer periphery of the oxide sintered body obtained under the above conditions, surface grinding of the surface side to a thickness of about 5 mm and a diameter of 8 inches, and bonding indium as a bonding metal to a copper backing plate Thus, a sputtering target was obtained.
上記スパッタリングターゲットを用いて、アルゴンガス圧を0.5Pa、ターゲットと基板間隔を80mm、無アルカリガラスを基板として、基板無加熱の状態で、スパッタパワーを150W、成膜時間6分で直流マグネトロンスパッタ成膜することで、膜厚約1,500Åの膜を得た。なお、この膜はターゲットと同一組成であった。 Using the above sputtering target, the argon gas pressure is 0.5 Pa, the distance between the target and the substrate is 80 mm, non-alkali glass is the substrate, the substrate is not heated, the sputtering power is 150 W, and the film formation time is 6 minutes. By filming, a film having a thickness of about 1,500 mm was obtained. This film had the same composition as the target.
膜の抵抗率はホール測定により行い、膜抵抗率は0.50mΩcmであった。これらの結果を表１に示す。 The film resistivity was measured by Hall measurement, and the film resistivity was 0.50 mΩcm. These results are shown in Table 1.
[実施例２]から[実施例１１]
実施例２−実施例１１については、(Ga+Ti)/(Zn+Ga+Ti)、N/(Ga+Ti)の値をそれぞれ表１に記載の通りとした点のみが異なり、その他条件等は、実施例１と同様とした。得られた結果を、同様に表１に示す。なお、この実施例２−実施例１１で得られた膜は、ターゲットと同一組成であった。
[Example 2] to [Example 11]
Example 2 Example 11 differs from Example 11 only in that the values of (Ga + Ti) / (Zn + Ga + Ti) and N / (Ga + Ti) are as shown in Table 1, respectively. Etc. were the same as in Example 1. The obtained results are similarly shown in Table 1. The film obtained in Example 2 to Example 11 had the same composition as the target.
[比較例１]から[比較例４]
比較例１−比較例４についても、(Ga+Ti)/(Zn+Ga+Ti)、N/(Ga+Ti)の値をそれぞれ表１に記載の通りとした点のみが異なり、その他条件等は、実施例１と同様とした。得られた結果を、同様に表１に示す。
[Comparative Example 1] to [Comparative Example 4]
Comparative Example 1 also differs from Comparative Example 4 only in that the values of (Ga + Ti) / (Zn + Ga + Ti) and N / (Ga + Ti) are as shown in Table 1, respectively. Etc. were the same as in Example 1. The obtained results are similarly shown in Table 1.
［実施例１−１１と比較例１−４のまとめ］
表１の実施例１−７の結果から、N/(Ga+Ti)=0.5であって、(Ga+Ti)/(Zn+Ga+Ti)の値が0.02以上0.08以下である場合は、膜抵抗率は0.5mΩcm以下となり、低抵抗率な膜が得られた。また、表1の実施例８〜１１の結果から、(Ga+Ti)/(Zn+Ga+Ti)=0.05であって、N/(Ga+Ti)の値が0.3以上0.7以下である場合も、膜抵抗率は0.5mΩcm以下となり、低抵抗率な膜が得られた。
[Summary of Example 1-11 and Comparative Example 1-4]
From the result of Example 1-7 in Table 1, when N / (Ga + Ti) = 0.5 and the value of (Ga + Ti) / (Zn + Ga + Ti) is 0.02 or more and 0.08 or less, The film resistivity was 0.5 mΩcm or less, and a low resistivity film was obtained. Further, from the results of Examples 8 to 11 in Table 1, when (Ga + Ti) / (Zn + Ga + Ti) = 0.05 and the value of N / (Ga + Ti) is 0.3 or more and 0.7 or less However, the film resistivity was 0.5 mΩcm or less, and a low resistivity film was obtained.
一方、表１の比較例１〜２の結果から、N/(Ga+Ti)=0.5であっても、(Ga+Ti)/(Zn+Ga+Ti)の値が0.02未満や0.08を超える場合は、膜抵抗率は0.90mΩcmと高抵抗率な膜となった。また、表１の比較例３〜４の結果から、(Ga+Ti)/(Zn+Ga+Ti)=0.05であっても、N/(Ga+Ti)の値が0.3未満や0.7を超える場合は、膜抵抗率は0.9mΩcmとなり、高抵抗率な膜となった。
以上から、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下であることが、低抵抗の膜を形成する上で重要なことが分る。
On the other hand, from the results of Comparative Examples 1 and 2 in Table 1, even if N / (Ga + Ti) = 0.5, the value of (Ga + Ti) / (Zn + Ga + Ti) is less than 0.02 or more than 0.08. In this case, the film resistivity was 0.90 mΩcm, resulting in a high resistivity film. Further, from the results of Comparative Examples 3 to 4 in Table 1, even when (Ga + Ti) / (Zn + Ga + Ti) = 0.05, the value of N / (Ga + Ti) is less than 0.3 or more than 0.7. In this case, the film resistivity was 0.9 mΩcm, and the film had a high resistivity.
From the above, it is confirmed that the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less and the value of C / (A + B) is 0.3 or more and 0.7 or less. It is understood that it is important in forming the film.
［実施例１２−実施例２２と比較例５−８］
実施例１２−実施例２２については、成分組成を変えただけで、実施例１と同様の条件で粉末を得、これを実施例１と同様にして焼結し、表２に示す組成と同組成の各種スパッタリングターゲットを得た。次に、このターゲットを用いて、アルゴンガス圧を0.5Pa、ターゲットと基板間隔を80mm、無アルカリガラスを基板として、基板無加熱の状態で、スパッタパワーを150W、成膜時間6分で直流マグネトロンスパッタリングし、膜厚約1,500Åの、表２に示す各種組成の膜を得た。上記の通り、この実施例１２−実施例２２で得られた膜は、ターゲットと同一組成であった。
そして、各種成膜の抵抗率を測定した。膜の低効率はホール測定により、行った。このようにして得た、(Al+Zr)/(Zn+Al+Zr)、N/(Al+Zr)の組成の各種の膜と抵抗値を、同様に表２に示す。
[Example 12-Example 22 and Comparative Example 5-8]
For Example 12 to Example 22, the powder was obtained under the same conditions as in Example 1 only by changing the component composition, and this was sintered in the same manner as in Example 1, and the same composition as shown in Table 2 was obtained. Various sputtering targets with compositions were obtained. Next, with this target, the argon gas pressure is 0.5 Pa, the distance between the target and the substrate is 80 mm, non-alkali glass is used as the substrate, the substrate is not heated, the sputtering power is 150 W, and the film formation time is 6 minutes. Sputtering was performed to obtain films of various compositions shown in Table 2 having a film thickness of about 1,500 mm. As described above, the films obtained in Examples 12 to 22 had the same composition as the target.
And the resistivity of various film-forming was measured. The low efficiency of the film was measured by Hall measurement. Table 2 shows the various films and the resistance values obtained in this manner and having the compositions of (Al + Zr) / (Zn + Al + Zr) and N / (Al + Zr).
[比較例５]から[比較例８]
比較例５−比較例８についても、(Al+Zr)/(Zn+Al+Zr)、N/(Al+Zr) の値をそれぞれ表２に記載の通りとした点のみが異なり、その他条件等は、実施例１と同様とした。得られた結果を、同様に表２に示す。
[Comparative Example 5] to [Comparative Example 8]
Comparative Example 5 also differs from Comparative Example 8 only in that the values of (Al + Zr) / (Zn + Al + Zr) and N / (Al + Zr) are as shown in Table 2, respectively. Etc. were the same as in Example 1. The obtained results are similarly shown in Table 2.
［実施例１２−２２と比較例５−８のまとめ］
表２の実施例１２−１８の結果から、N/(Al+Zr)=0.5であって、(Al+Zr)/(Zn+Al+Zr)の値が0.02以上0.08以下である場合は、膜抵抗率は0.49mΩcm以下となり、低抵抗率な膜が得られた。また、表２の実施例１９−２２の結果から明らかなように、(Al+Zr)/(Zn+Al+Zr)=0.05であって、N/(Al+Zr)の値が0.3以上0.7以下である場合も、膜抵抗率は0.5mΩcm以下となり、低抵抗率な膜が得られた。
[Summary of Examples 12-22 and Comparative Examples 5-8]
From the results of Examples 12-18 in Table 2, when N / (Al + Zr) = 0.5 and the value of (Al + Zr) / (Zn + Al + Zr) is 0.02 or more and 0.08 or less, The film resistivity was 0.49 mΩcm or less, and a low resistivity film was obtained. Further, as is apparent from the results of Examples 19-22 in Table 2, (Al + Zr) / (Zn + Al + Zr) = 0.05 and the value of N / (Al + Zr) is 0.3 or more and 0.7 Even in the following cases, the film resistivity was 0.5 mΩcm or less, and a film with low resistivity was obtained.
一方、表２の比較例５−６の結果から、N/(Al+Zr)=0.5であっても、(Al+Zr)/(Zn+Al+Zr)の値が0.02未満や0.08を超える場合は、膜抵抗率は0.80mΩcmとなり、高抵抗率な膜となった。また、表２の比較例７−８の結果から、(Al+Zr)/(Zn+ Al+Zr)=0.05であっても、N/(Al+Zr)の値が0.3未満や0.7を超える場合には、膜抵抗率は0.90mΩcmとなり、高抵抗率な膜となった。
以上から、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下であることが、低抵抗の膜を形成する上で重要なことが分る。
On the other hand, from the result of Comparative Example 5-6 in Table 2, even if N / (Al + Zr) = 0.5, the value of (Al + Zr) / (Zn + Al + Zr) is less than 0.02 or more than 0.08. In this case, the film resistivity was 0.80 mΩcm, and the film had a high resistivity. Moreover, from the result of Comparative Example 7-8 in Table 2, even when (Al + Zr) / (Zn + Al + Zr) = 0.05, the value of N / (Al + Zr) is less than 0.3 or more than 0.7 The film resistivity was 0.90 mΩcm, resulting in a high resistivity film.
From the above, it is confirmed that the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less and the value of C / (A + B) is 0.3 or more and 0.7 or less. It is understood that it is important in forming the film.
［実施例２３−実施例３３と比較例９−１２］
実施例２３−実施例３３については、成分組成を変えただけで、実施例１と同様の条件で粉末を得、これを実施例１と同様にして焼結し、表３に示す組成と同組成の各種スパッタリングターゲットを得た。次に、このターゲットを用いて、アルゴンガス圧を0.5Pa、ターゲットと基板間隔を80mm、無アルカリガラスを基板として、基板無加熱の状態で、スパッタパワーを150W、成膜時間6分で直流マグネトロンスパッタリングし、膜厚約1,500Åの、表３に示す各種組成の膜を得た。上記の通り、この実施例２３−実施例３３で得られた膜は、ターゲットと同一組成であった。
そして、各種成膜の抵抗率を測定した。膜の低効率はホール測定により、行った。このようにして得た、(In+Al)/(Zn+In+Al)、N/(In+Al)の組成の各種の膜と抵抗値を、同様に表３に示す。
[Example 23-Example 33 and Comparative Example 9-12]
For Example 23 to Example 33, the powder was obtained under the same conditions as in Example 1 only by changing the component composition, and this was sintered in the same manner as in Example 1, and the same composition as shown in Table 3 was obtained. Various sputtering targets with compositions were obtained. Next, with this target, the argon gas pressure is 0.5 Pa, the distance between the target and the substrate is 80 mm, non-alkali glass is used as the substrate, the substrate is not heated, the sputtering power is 150 W, and the film formation time is 6 minutes. Sputtering was performed to obtain films of various compositions shown in Table 3 with a film thickness of about 1,500 mm. As described above, the films obtained in Example 23 to Example 33 had the same composition as the target.
And the resistivity of various film-forming was measured. The low efficiency of the film was measured by Hall measurement. Table 3 shows various films and resistance values obtained in this manner and having compositions of (In + Al) / (Zn + In + Al) and N / (In + Al).
[比較例９]から[比較例１２]
比較例９−比較例１２ついても、(In+Al)/(Zn+ In+Al)、N/( In+Al) の値をそれぞれ表３に記載の通りとした点のみが異なり、その他条件等は、実施例１と同様とした。得られた結果を、同様に表３に示す。
[Comparative Example 9] to [Comparative Example 12]
Comparative Example 9-Comparative Example 12 also differs only in that the values of (In + Al) / (Zn + In + Al) and N / (In + Al) are as shown in Table 3, and other conditions, etc. Was the same as in Example 1. The obtained results are similarly shown in Table 3.
［実施例２３−３３と比較例９−１２のまとめ］
表３の実施例２３〜２９の結果から、N/( In+Al)=0.5であって、(In+Al)/(Zn+ In+Al)の値が0.02以上0.08以下である場合は、膜抵抗率は0.58mΩcm以下となり、低抵抗率な膜が得られた。また、表３の実施例３０〜３３の結果から、(In+Al)/(Zn+ In+Al)=0.05であって、N/( In+Al)の値が0.3以上0.7以下である場合も、膜抵抗率は0.60mΩcm以下となり、低抵抗率な膜が得られた。
[Summary of Examples 23-33 and Comparative Examples 9-12]
From the results of Examples 23 to 29 in Table 3, when N / (In + Al) = 0.5 and the value of (In + Al) / (Zn + In + Al) is 0.02 or more and 0.08 or less, the film The resistivity was 0.58 mΩcm or less, and a low resistivity film was obtained. In addition, from the results of Examples 30 to 33 in Table 3, (In + Al) / (Zn + In + Al) = 0.05 and the value of N / (In + Al) is 0.3 or more and 0.7 or less. The film resistivity was 0.60 mΩcm or less, and a low resistivity film was obtained.
一方、表３の比較例９〜１０の結果から、N/(Al+Zr)=0.5であっても、(In+Al)/(Zn+ In+Al)の値が0.02未満や0.08を超える場合は、膜抵抗率は0.90mΩcmとなり、高抵抗率な膜となった。また、表３の比較例１１−１２の結果から明らかなように、(In+Al)/(Zn+ In+Al)=0.05であっても、N/(Al+Zr)の値が0.3未満や0.7を超える場合には、膜抵抗率は1.00mΩcmとなり、高抵抗率な膜となった。
以上から、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下であることが、低抵抗の膜を形成する上で重要なことが分る。
On the other hand, from the results of Comparative Examples 9 to 10 in Table 3, even when N / (Al + Zr) = 0.5, the value of (In + Al) / (Zn + In + Al) is less than 0.02 or more than 0.08 The film resistivity was 0.90 mΩcm, and the film had a high resistivity. Further, as is clear from the results of Comparative Examples 11-12 in Table 3, even when (In + Al) / (Zn + In + Al) = 0.05, the value of N / (Al + Zr) is less than 0.3. When it exceeded 0.7, the film resistivity was 1.00 mΩcm, and the film had a high resistivity.
From the above, it is confirmed that the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less and the value of C / (A + B) is 0.3 or more and 0.7 or less. It is understood that it is important in forming the film.
［実施例３４−実施例４４と比較例１３−１６］
実施例３４−実施例４４については、成分組成を変えただけで、実施例１と同様の条件で粉末を得、これを実施例１と同様にして焼結し、表４に示す組成と同組成の各種スパッタリングターゲットを得た。次に、このターゲットを用いて、アルゴンガス圧を0.5Pa、ターゲットと基板間隔を80mm、無アルカリガラスを基板として、基板無加熱の状態で、スパッタパワーを150W、成膜時間6分で直流マグネトロンスパッタリングし、膜厚約1,500Åの、表４に示す各種組成の膜を得た。上記の通り、この実施例３４−実施例４４で得られた膜は、ターゲットと同一組成であった。
そして、各種成膜の抵抗率を測定した。膜の低効率はホール測定により、行った。このようにして得た、(B+Cr)/(Zn+ B+Cr)、N/(B+Cr)の組成の各種の膜と抵抗値を、同様に表４に示す。
[Example 34-Example 44 and Comparative Example 13-16]
For Example 34 to Example 44, the powder was obtained under the same conditions as in Example 1 only by changing the component composition, and this was sintered in the same manner as in Example 1, and the same composition as shown in Table 4 was obtained. Various sputtering targets with compositions were obtained. Next, with this target, the argon gas pressure is 0.5 Pa, the distance between the target and the substrate is 80 mm, non-alkali glass is used as the substrate, the substrate is not heated, the sputtering power is 150 W, and the film formation time is 6 minutes. Sputtering was performed to obtain films of various compositions shown in Table 4 having a film thickness of about 1,500 mm. As described above, the films obtained in Examples 34 to 44 had the same composition as the target.
And the resistivity of various film-forming was measured. The low efficiency of the film was measured by Hall measurement. Table 4 shows various films and resistance values obtained in this manner and having compositions of (B + Cr) / (Zn + B + Cr) and N / (B + Cr).
[比較例１３]から[比較例１６]
比較例１３−比較例１６ついても、(B+Cr)/(Zn+B+Cr)、N/(B+Cr) の値をそれぞれ表４に記載の通りとした点のみが異なり、その他条件等は、実施例１と同様とした。得られた結果を、同様に表４に示す。
[Comparative Example 13] to [Comparative Example 16]
Comparative Example 13-Comparative Example 16 also differs only in that the values of (B + Cr) / (Zn + B + Cr) and N / (B + Cr) are as shown in Table 4, respectively. Etc. were the same as in Example 1. The obtained results are similarly shown in Table 4.
［実施例３４−４４と比較例１３−１６のまとめ］
表４の実施例３４−４０の結果から、N/(B+Cr)=0.5であって、(B+Cr)/(Zn+B+Cr)の値が0.02以上0.08以下である場合は、膜抵抗率は0.69mΩcm以下となり、低抵抗率な膜が得られた。また、表４の実施例４１−４４の結果から、(B+Cr)/(Zn+B+Cr )=0.05であって、N/(B+Cr)の値が0.3以上0.7以下である場合も、膜抵抗率は0.70mΩcm以下となり、低抵抗率な膜が得られた。
[Summary of Examples 34-44 and Comparative Examples 13-16]
From the results of Example 34-40 in Table 4, when N / (B + Cr) = 0.5 and the value of (B + Cr) / (Zn + B + Cr) is 0.02 or more and 0.08 or less, The film resistivity was 0.69 mΩcm or less, and a low resistivity film was obtained. Also, from the results of Examples 41-44 in Table 4, when (B + Cr) / (Zn + B + Cr) = 0.05 and the value of N / (B + Cr) is 0.3 or more and 0.7 or less However, the film resistivity was 0.70 mΩcm or less, and a low resistivity film was obtained.
一方、表４の比較例１３−１４の結果から、N/(B+Cr)=0.5であっても、(B+Cr )/(Zn+ B+Cr)の値が0.02未満や0.08を超える場合は、膜抵抗率は0.90mΩcm以上となり、高抵抗率な膜となった。また、表４の比較例１５−１６の結果から明らかなように、(B+Cr)/(Zn+B+Cr)=0.05であっても、N/(Al+Zr)の値が0.3未満や0.7を超える場合には、膜抵抗率は1.00mΩcmとなり、高抵抗率な膜となった。
以上から、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下であることが、低抵抗の膜を形成する上で重要なことが分る。
On the other hand, from the results of Comparative Examples 13-14 in Table 4, even when N / (B + Cr) = 0.5, the value of (B + Cr) / (Zn + B + Cr) is less than 0.02 or more than 0.08 The film resistivity was 0.90 mΩcm or more, and a high resistivity film was obtained. Further, as is apparent from the results of Comparative Examples 15-16 in Table 4, even when (B + Cr) / (Zn + B + Cr) = 0.05, the value of N / (Al + Zr) is less than 0.3. When the value exceeded 0.7, the film resistivity was 1.00 mΩcm, and the film had a high resistivity.
From the above, it is confirmed that the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less and the value of C / (A + B) is 0.3 or more and 0.7 or less. It is understood that it is important in forming the film.
［実施例４５−実施例５５と比較例１７−２０］
実施例４５−実施例５５については、成分組成を変えただけで、実施例１と同様の条件で粉末を得、これを実施例１と同様にして焼結し、表５に示す組成と同組成の各種スパッタリングターゲットを得た。次に、このターゲットを用いて、アルゴンガス圧を0.5Pa、ターゲットと基板間隔を80mm、無アルカリガラスを基板として、基板無加熱の状態で、スパッタパワーを150W、成膜時間6分で直流マグネトロンスパッタリングし、膜厚約1,500Åの、表５に示す各種組成の膜を得た。上記の通り、この実施例４５−実施例５５で得られた膜は、ターゲットと同一組成であった。
そして、各種成膜の抵抗率を測定した。膜の低効率はホール測定により、行った。このようにして得た、(Al+Ga)/(Zn+Al+Ga)、N/(Al+Ga)の組成の各種の膜と抵抗値を、同様に表５に示す。
[Example 45-Example 55 and Comparative Example 17-20]
For Example 45-Example 55, the powder was obtained under the same conditions as in Example 1 only by changing the component composition, and this was sintered in the same manner as in Example 1, and the same composition as shown in Table 5 was obtained. Various sputtering targets with compositions were obtained. Next, with this target, the argon gas pressure is 0.5 Pa, the distance between the target and the substrate is 80 mm, non-alkali glass is used as the substrate, the substrate is not heated, the sputtering power is 150 W, and the film formation time is 6 minutes. Sputtering was performed to obtain films of various compositions shown in Table 5 having a film thickness of about 1,500 mm. As described above, the films obtained in Example 45 to Example 55 had the same composition as the target.
And the resistivity of various film-forming was measured. The low efficiency of the film was measured by Hall measurement. Table 5 shows various films and resistance values obtained in this manner and having compositions of (Al + Ga) / (Zn + Al + Ga) and N / (Al + Ga).
[比較例１７]から[比較例２０]
比較例１７−比較例２０ついても、(Al+Ga)/(Zn+Al+Ga)、N/(Al+Ga) の値をそれぞれ表５に記載の通りとした点のみが異なり、その他条件等は、実施例１と同様とした。得られた結果を、同様に表５に示す。
[Comparative Example 17] to [Comparative Example 20]
Comparative Example 17-Comparative Example 20 also differs only in that the values of (Al + Ga) / (Zn + Al + Ga) and N / (Al + Ga) are set as shown in Table 5, respectively. Etc. were the same as in Example 1. The obtained results are similarly shown in Table 5.
［実施例４５−５５と比較例１７−２０のまとめ］
表５の実施例４５−５１の結果から、N/(Al+Ga)=0.5であって、(Al+Ga )/(Zn+Al+Ga)の値が0.02以上0.08以下である場合は、膜抵抗率は0.48mΩcm以下となり、低抵抗率な膜が得られた。また、表５の実施例５２−５５の結果から明らかなように、(Al+Ga)/(Zn+Al+Ga)=0.05であって、N/(Al+Ga)の値が0.3以上0.7以下である場合も、膜抵抗率は0.50mΩcm以下となり、低抵抗率な膜が得られた。
[Summary of Examples 45-55 and Comparative Examples 17-20]
From the results of Examples 45-51 in Table 5, when N / (Al + Ga) = 0.5 and the value of (Al + Ga) / (Zn + Al + Ga) is 0.02 or more and 0.08 or less, The film resistivity was 0.48 mΩcm or less, and a low resistivity film was obtained. Further, as is clear from the results of Examples 52-55 in Table 5, (Al + Ga) / (Zn + Al + Ga) = 0.05 and the value of N / (Al + Ga) is 0.3 or more and 0.7. Even in the following cases, the film resistivity was 0.50 mΩcm or less, and a low resistivity film was obtained.
一方、表５の比較例１７−１８の結果から、N/(Al+Ga)=0.5であっても、(Al+Ga)/(Zn+ l+Ga)の値が0.02未満や0.07を超える場合は、膜抵抗率は0.81mΩcm以上となり、高抵抗率な膜となった。また、表５の比較例１９−２０の結果から明らかなように、(Al+Ga)/(Zn+Al+Ga)=0.05であっても、N/(Al+Zr)の値が0.3未満や0.7を超える場合には、膜抵抗率は1.00mΩcmとなり、高抵抗率な膜となった。
以上から、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下であることが、低抵抗の膜を形成する上で重要なことが分る。
On the other hand, if the value of (Al + Ga) / (Zn + l + Ga) is less than 0.02 or more than 0.07, even if N / (Al + Ga) = 0.5 from the results of Comparative Examples 17-18 in Table 5 The film resistivity was 0.81 mΩcm or more, and a high resistivity film was obtained. Further, as is clear from the results of Comparative Examples 19-20 in Table 5, even when (Al + Ga) / (Zn + Al + Ga) = 0.05, the value of N / (Al + Zr) is less than 0.3. When the value exceeded 0.7, the film resistivity was 1.00 mΩcm, and the film had a high resistivity.
From the above, it is confirmed that the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less and the value of C / (A + B) is 0.3 or more and 0.7 or less. It is understood that it is important in forming the film.
［実施例５６−実施例６６と比較例２１−２４］
実施例５６−実施例６６については、成分組成を変えただけで、実施例１と同様の条件で粉末を得、これを実施例１と同様にして焼結し、表６に示す組成と同組成の各種スパッタリングターゲットを得た。次に、このターゲットを用いて、アルゴンガス圧を0.5Pa、ターゲットと基板間隔を80mm、無アルカリガラスを基板として、基板無加熱の状態で、スパッタパワーを150W、成膜時間6分で直流マグネトロンスパッタリングし、膜厚約1,500Åの、表５に示す各種組成の膜を得た。上記の通り、この実施例５６−実施例６６で得られた膜は、ターゲットと同一組成であった。
そして、各種成膜の抵抗率を測定した。膜の低効率はホール測定により、行った。このようにして得た、(Ga+Al+Ti+Zr)/(Zn+Ga+Al+Ti+Zr)、N/(Ga+Al+Ti+Zr)の組成の各種の膜と抵抗値を、同様に表６に示す。
[Example 56-Example 66 and Comparative Example 21-24]
For Example 56 to Example 66, the powder was obtained under the same conditions as in Example 1 only by changing the component composition, and this was sintered in the same manner as in Example 1, and the same composition as shown in Table 6 was obtained. Various sputtering targets with compositions were obtained. Next, with this target, the argon gas pressure is 0.5 Pa, the distance between the target and the substrate is 80 mm, non-alkali glass is used as the substrate, the substrate is not heated, the sputtering power is 150 W, and the film formation time is 6 minutes. Sputtering was performed to obtain films of various compositions shown in Table 5 having a film thickness of about 1,500 mm. As described above, the films obtained in Examples 56 to 66 had the same composition as the target.
And the resistivity of various film-forming was measured. The low efficiency of the film was measured by Hall measurement. Various films and resistance values with the compositions of (Ga + Al + Ti + Zr) / (Zn + Ga + Al + Ti + Zr) and N / (Ga + Al + Ti + Zr) obtained in this way Similarly, it is shown in Table 6.
[比較例２１]から[比較例２４]
比較例２１−比較例２４ついても、(Ga+Al+Ti+Zr)/(Zn+Ga+Al+Ti+Zr)、N/(Ga+Al+Ti+Zr) の値をそれぞれ表６に記載の通りとした点のみが異なり、その他条件等は、実施例１と同様とした。得られた結果を、同様に表６に示す。
[Comparative Example 21] to [Comparative Example 24]
For Comparative Example 21 to Comparative Example 24, the values of (Ga + Al + Ti + Zr) / (Zn + Ga + Al + Ti + Zr) and N / (Ga + Al + Ti + Zr) are shown in Table 6, respectively. Only the points as described were different, and other conditions were the same as in Example 1. The obtained results are similarly shown in Table 6.
［実施例５６−６３と比較例２１−２４のまとめ］
表６の実施例５６−６２の結果から、N/(Ga+Al+Ti+Zr)=0.5であって、(Ga+Al+Ti+Zr )/(Zn+Ga+Al+Ti+Zr)の値が0.02以上0.08以下である場合は、膜抵抗率は0.48mΩcm以下となり、低抵抗率な膜が得られた。また、表６の実施例６３−６６の結果から明らかなように、(Ga+Al+Ti+Zr)/(Zn+Ga+Al+Ti+Zr)=0.05であって、N/(Ga+Al+Ti+Zr)の値が0.3以上0.7以下である場合も、膜抵抗率は0.50mΩcm以下となり、低抵抗率な膜が得られた。
[Summary of Examples 56-63 and Comparative Examples 21-24]
From the results of Examples 56-62 in Table 6, N / (Ga + Al + Ti + Zr) = 0.5, and (Ga + Al + Ti + Zr) / (Zn + Ga + Al + Ti + Zr) When the value was 0.02 or more and 0.08 or less, the film resistivity was 0.48 mΩcm or less, and a low resistivity film was obtained. Further, as apparent from the results of Examples 63 to 66 in Table 6, (Ga + Al + Ti + Zr) / (Zn + Ga + Al + Ti + Zr) = 0.05, and N / (Ga + Even when the value of (Al + Ti + Zr) was 0.3 or more and 0.7 or less, the film resistivity was 0.50 mΩcm or less, and a low resistivity film was obtained.
一方、表６の比較例２１−２４の結果から明らかなように、N/(Ga+Al+Ti+Zr)=0.5であっても、(Ga+Al+Ti+Zr)/(Zn+Ga+Al+Ti+Zr)の値が0.02未満や0.07を超える場合は、膜抵抗率は0.80mΩcm以上となり、高抵抗率な膜となった。また、表６の比較例２３−２４の結果から明らかなように、(Ga+Al+Ti+Zr)/(Zn+Ga+Al+Ti+Zr)=0.05であっても、N/(Ga+Al+Ti+Zr)の値が0.3未満や0.7を超える場合には、膜抵抗率は0.90mΩcmとなり、高抵抗率な膜となった。
以上から、(A+B)/(Z+A+B)の値が0.02以上0.08以下であり、かつC/(A+B)の値が0.3以上0.７以下であることが、低抵抗の膜を形成する上で重要なことが分る。
On the other hand, as is clear from the results of Comparative Examples 21-24 in Table 6, even when N / (Ga + Al + Ti + Zr) = 0.5, (Ga + Al + Ti + Zr) / (Zn + Ga) When the value of (+ Al + Ti + Zr) was less than 0.02 or more than 0.07, the film resistivity was 0.80 mΩcm or more, and the film had a high resistivity. Further, as is clear from the results of Comparative Examples 23 to 24 in Table 6, even when (Ga + Al + Ti + Zr) / (Zn + Ga + Al + Ti + Zr) = 0.05, N / (Ga When the value of (+ Al + Ti + Zr) was less than 0.3 or more than 0.7, the film resistivity was 0.90 mΩcm, and the film had a high resistivity.
From the above, it is confirmed that the value of (A + B) / (Z + A + B) is 0.02 or more and 0.08 or less and the value of C / (A + B) is 0.3 or more and 0.7 or less. It is understood that it is important in forming the film.
本発明は、酸化亜鉛に対して、n型ドーパントとなる元素および窒素化合物を適切濃度範囲とする焼結体をスパッタすることで、ITOと同等レベルの低抵抗率の膜を得ることができる。しかも、低抵抗率化に効果がある窒素を従来法の様に、雰囲気ガスから膜へ供給するのではなく、焼結体自体に窒素化合物の形態で含有させていることから、大面積膜の作製時に、窒素濃度の膜中での偏析を抑え、膜全体の渡って均一性の高い窒素濃度分布が得られるという効果を有するため、産業上非常に有用である。 In the present invention, a film having a low resistivity equivalent to that of ITO can be obtained by sputtering a sintered body having an appropriate concentration range of elements and nitrogen compounds as n-type dopants with respect to zinc oxide. In addition, nitrogen, which is effective in reducing the resistivity, is not supplied from the atmospheric gas to the film as in the conventional method, but is contained in the form of a nitrogen compound in the sintered body itself. Since it has the effect of suppressing the segregation in the film having a nitrogen concentration at the time of production and obtaining a highly uniform nitrogen concentration distribution over the entire film, it is very useful industrially.
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| KR20140037458A (en) * | 2012-09-18 | 2014-03-27 | 재단법인 포항산업과학연구원 | Compound for transparent electroconductive thin film, method for forming thin film using the same and transparent electroconductive thin film manufacutred thereby |
| US9260779B2 (en) | 2009-05-21 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Light-transmitting conductive film, display device, electronic device, and manufacturing method of light-transmitting conductive film |
| JPWO2014097963A1 (en) * | 2012-12-17 | 2017-01-12 | 住友化学株式会社 | Zinc oxide transparent conductive film |
| CN110563457A (en) * | 2019-09-05 | 2019-12-13 | 华南理工大学 | nitrogen ion doped zinc oxide-based piezoresistor and preparation method thereof |
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| CN110563457A (en) * | 2019-09-05 | 2019-12-13 | 华南理工大学 | nitrogen ion doped zinc oxide-based piezoresistor and preparation method thereof |
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