JP2009031732A5 - - Google Patents
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- Publication number
- JP2009031732A5 JP2009031732A5 JP2008033997A JP2008033997A JP2009031732A5 JP 2009031732 A5 JP2009031732 A5 JP 2009031732A5 JP 2008033997 A JP2008033997 A JP 2008033997A JP 2008033997 A JP2008033997 A JP 2008033997A JP 2009031732 A5 JP2009031732 A5 JP 2009031732A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical modulator
- base portion
- electrode
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000003287 optical effect Effects 0.000 claims description 182
- 239000000463 material Substances 0.000 claims description 67
- 238000009826 distribution Methods 0.000 claims description 30
- 230000008859 change Effects 0.000 claims description 29
- 230000005684 electric field Effects 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 19
- 230000007423 decrease Effects 0.000 claims description 10
- 230000000737 periodic effect Effects 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 19
- 239000000758 substrate Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008033997A JP5232493B2 (ja) | 2007-06-29 | 2008-02-15 | 光変調器および画像記録装置 |
| PCT/JP2008/061313 WO2009004936A1 (ja) | 2007-06-29 | 2008-06-20 | 光変調器および画像記録装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007171591 | 2007-06-29 | ||
| JP2007171591 | 2007-06-29 | ||
| JP2008033997A JP5232493B2 (ja) | 2007-06-29 | 2008-02-15 | 光変調器および画像記録装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009031732A JP2009031732A (ja) | 2009-02-12 |
| JP2009031732A5 true JP2009031732A5 (enExample) | 2011-03-17 |
| JP5232493B2 JP5232493B2 (ja) | 2013-07-10 |
Family
ID=40402255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008033997A Expired - Fee Related JP5232493B2 (ja) | 2007-06-29 | 2008-02-15 | 光変調器および画像記録装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5232493B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5318702B2 (ja) * | 2009-08-18 | 2013-10-16 | 大日本スクリーン製造株式会社 | パターン描画装置 |
| JP5133956B2 (ja) * | 2009-09-25 | 2013-01-30 | 大日本スクリーン製造株式会社 | 空間光変調器および露光装置 |
| JP5134031B2 (ja) * | 2010-03-23 | 2013-01-30 | 大日本スクリーン製造株式会社 | 光変調デバイスおよび露光装置 |
| JP2012078443A (ja) | 2010-09-30 | 2012-04-19 | Dainippon Screen Mfg Co Ltd | 光学デバイス、光学デバイスの製造方法および露光装置 |
| JP5793308B2 (ja) | 2011-01-14 | 2015-10-14 | 株式会社Ｓｃｒｅｅｎホールディングス | 光学デバイス、レーザ装置および露光装置 |
| JP2024090064A (ja) * | 2022-12-22 | 2024-07-04 | 浜松ホトニクス株式会社 | 光学デバイスおよび光学装置 |
| JP2024090069A (ja) * | 2022-12-22 | 2024-07-04 | 浜松ホトニクス株式会社 | 光学デバイスおよび光学装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4415226A (en) * | 1980-12-31 | 1983-11-15 | Battelle Memorial Institute | Apparatus for controlling light in electrooptic waveguides with individually addressable electrodes |
| JPH01144074A (ja) * | 1987-12-01 | 1989-06-06 | Canon Inc | 画像形成装置 |
| US5991065A (en) * | 1996-12-10 | 1999-11-23 | Eastman Kodak Company | Addressable electro-optic modulator with periodically poled domain regions |
| CA2261197A1 (en) * | 1999-02-16 | 2000-08-16 | Ppm Photomask Inc. | Tunable electro-optical diffraction grating with electrically switchable period |
-
2008
- 2008-02-15 JP JP2008033997A patent/JP5232493B2/ja not_active Expired - Fee Related
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