JP2009027671A - Sh型バルク波共振子 - Google Patents
Sh型バルク波共振子 Download PDFInfo
- Publication number
- JP2009027671A JP2009027671A JP2007191681A JP2007191681A JP2009027671A JP 2009027671 A JP2009027671 A JP 2009027671A JP 2007191681 A JP2007191681 A JP 2007191681A JP 2007191681 A JP2007191681 A JP 2007191681A JP 2009027671 A JP2009027671 A JP 2009027671A
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- JP
- Japan
- Prior art keywords
- wave
- thickness
- substrate
- type bulk
- bulk wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims abstract description 68
- 239000010453 quartz Substances 0.000 claims abstract description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 32
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 8
- 230000008878 coupling Effects 0.000 abstract description 19
- 238000010168 coupling process Methods 0.000 abstract description 19
- 238000005859 coupling reaction Methods 0.000 abstract description 19
- 235000019687 Lamb Nutrition 0.000 description 24
- 238000010897 surface acoustic wave method Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Images
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007191681A JP2009027671A (ja) | 2007-07-24 | 2007-07-24 | Sh型バルク波共振子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007191681A JP2009027671A (ja) | 2007-07-24 | 2007-07-24 | Sh型バルク波共振子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009027671A true JP2009027671A (ja) | 2009-02-05 |
| JP2009027671A5 JP2009027671A5 (enExample) | 2010-08-19 |
Family
ID=40399010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007191681A Withdrawn JP2009027671A (ja) | 2007-07-24 | 2007-07-24 | Sh型バルク波共振子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009027671A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110114974A (zh) * | 2016-11-25 | 2019-08-09 | 国立大学法人东北大学 | 弹性波器件 |
| CN110571258A (zh) * | 2019-09-18 | 2019-12-13 | 京东方科技集团股份有限公司 | 显示装置、显示面板、阵列基板及其制造方法 |
| CN114079436A (zh) * | 2020-08-18 | 2022-02-22 | 大河晶振科技有限公司 | 弹性波元件 |
| US12274173B2 (en) | 2020-08-18 | 2025-04-08 | River Eletec Corporation | Acoustic wave device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004215227A (ja) * | 2002-12-18 | 2004-07-29 | Seiko Epson Corp | 弾性表面波装置、その製造方法、および電子機器 |
| JP2006014165A (ja) * | 2004-06-29 | 2006-01-12 | Seiko Epson Corp | 共振子型sawフィルタ |
| JP2006217566A (ja) * | 2005-01-07 | 2006-08-17 | Seiko Epson Corp | ラム波型高周波共振子 |
-
2007
- 2007-07-24 JP JP2007191681A patent/JP2009027671A/ja not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004215227A (ja) * | 2002-12-18 | 2004-07-29 | Seiko Epson Corp | 弾性表面波装置、その製造方法、および電子機器 |
| JP2006014165A (ja) * | 2004-06-29 | 2006-01-12 | Seiko Epson Corp | 共振子型sawフィルタ |
| JP2006217566A (ja) * | 2005-01-07 | 2006-08-17 | Seiko Epson Corp | ラム波型高周波共振子 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110114974A (zh) * | 2016-11-25 | 2019-08-09 | 国立大学法人东北大学 | 弹性波器件 |
| CN110114974B (zh) * | 2016-11-25 | 2024-01-12 | 国立大学法人东北大学 | 弹性波器件 |
| CN110571258A (zh) * | 2019-09-18 | 2019-12-13 | 京东方科技集团股份有限公司 | 显示装置、显示面板、阵列基板及其制造方法 |
| CN110571258B (zh) * | 2019-09-18 | 2022-01-11 | 京东方科技集团股份有限公司 | 显示装置、显示面板、阵列基板及其制造方法 |
| CN114079436A (zh) * | 2020-08-18 | 2022-02-22 | 大河晶振科技有限公司 | 弹性波元件 |
| US12274173B2 (en) | 2020-08-18 | 2025-04-08 | River Eletec Corporation | Acoustic wave device |
| CN114079436B (zh) * | 2020-08-18 | 2025-08-26 | 大河晶振科技有限公司 | 弹性波元件 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100707 |
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| A621 | Written request for application examination |
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| A131 | Notification of reasons for refusal |
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| A761 | Written withdrawal of application |
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