JP2009025262A - X線分析装置 - Google Patents
X線分析装置 Download PDFInfo
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- JP2009025262A JP2009025262A JP2007191557A JP2007191557A JP2009025262A JP 2009025262 A JP2009025262 A JP 2009025262A JP 2007191557 A JP2007191557 A JP 2007191557A JP 2007191557 A JP2007191557 A JP 2007191557A JP 2009025262 A JP2009025262 A JP 2009025262A
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Abstract
【解決手段】窓材41を有する撮像窓40を備える分析室2内でX線を試料Sに照射して分析を行うX線分析装置であって、窓材41を透過させて試料Sを照明する試料照明手段7と、試料Sを分析室2の外部から撮像する撮像手段8であって、撮像部81とフード82を有し、試料照明手段7からの照射光が、窓材の裏面41bで反射光となって撮像部81内に入射しないように形成されている撮像手段8とを有し、試料照明手段7がフードを取り囲むように配置され、フードの窓近位部82bの端部が撮像窓40に近接しているX線分析装置。
【選択図】図1
Description
2 分析室
3 X線源(X線管)
7 試料照明手段
8 撮像手段
40 撮像窓
41 窓材(鉛ガラス板)
71 発光部
72 拡散照明部
81 撮像部(CCDカメラ)
82 フード
S 試料
Claims (1)
- 試料を外部から撮像するために照射光を透過する窓材を有する撮像窓を備える分析室内でX線源からのX線を試料に照射して試料の分析を行うX線分析装置であって、
前記窓材を透過する照射光で試料を照明する試料照明手段と、
試料を前記分析室の外部から撮像する撮像手段であって、前記撮像窓に対し遠位側に配置されて試料を撮像する撮像部および前記撮像窓に対し遠位側に位置する窓遠位部が前記撮像部のレンズ外筒と組み合わされ、前記撮像窓に対し近位側に位置している窓近位部が前記撮像窓に延伸している筒状のフードを有し、前記試料照明手段から照射されて前記窓材の試料側の面で反射する反射光が前記撮像部内に入射しないように形成されている撮像手段と、
を有し、前記試料照明手段が前記フードを取り囲むように配置され、前記フードの窓近位部の端部が前記撮像窓に近接しているX線分析装置。
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JP2007191557A JP4630313B2 (ja) | 2007-07-24 | 2007-07-24 | X線分析装置 |
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JP2007191557A JP4630313B2 (ja) | 2007-07-24 | 2007-07-24 | X線分析装置 |
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JP2009025262A true JP2009025262A (ja) | 2009-02-05 |
JP4630313B2 JP4630313B2 (ja) | 2011-02-09 |
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JP2007191557A Active JP4630313B2 (ja) | 2007-07-24 | 2007-07-24 | X線分析装置 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010256103A (ja) * | 2009-04-23 | 2010-11-11 | Hyogo Science & Technology Association | X線分析装置 |
JP2013036793A (ja) * | 2011-08-05 | 2013-02-21 | Sii Nanotechnology Inc | X線分析装置及び方法 |
CN107589130A (zh) * | 2017-09-05 | 2018-01-16 | 成都理工大学 | 海底原位x荧光测量影响监管方法及装置 |
WO2018110265A1 (ja) * | 2016-12-15 | 2018-06-21 | 株式会社堀場製作所 | 放射線検出装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062047A (ja) * | 1983-09-16 | 1985-04-10 | Seiko Instr & Electronics Ltd | X線分析装置 |
JP2001249090A (ja) * | 2000-03-07 | 2001-09-14 | Rigaku Industrial Co | 試料表面の観察機構を持つx線分析装置 |
JP2003161707A (ja) * | 2001-11-27 | 2003-06-06 | Toshiba It & Control Systems Corp | X線透視検査装置 |
JP2006194835A (ja) * | 2005-01-17 | 2006-07-27 | Uni-Hite System Corp | X線検査方法及びその装置 |
-
2007
- 2007-07-24 JP JP2007191557A patent/JP4630313B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062047A (ja) * | 1983-09-16 | 1985-04-10 | Seiko Instr & Electronics Ltd | X線分析装置 |
JP2001249090A (ja) * | 2000-03-07 | 2001-09-14 | Rigaku Industrial Co | 試料表面の観察機構を持つx線分析装置 |
JP2003161707A (ja) * | 2001-11-27 | 2003-06-06 | Toshiba It & Control Systems Corp | X線透視検査装置 |
JP2006194835A (ja) * | 2005-01-17 | 2006-07-27 | Uni-Hite System Corp | X線検査方法及びその装置 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010256103A (ja) * | 2009-04-23 | 2010-11-11 | Hyogo Science & Technology Association | X線分析装置 |
JP2013036793A (ja) * | 2011-08-05 | 2013-02-21 | Sii Nanotechnology Inc | X線分析装置及び方法 |
WO2018110265A1 (ja) * | 2016-12-15 | 2018-06-21 | 株式会社堀場製作所 | 放射線検出装置 |
JPWO2018110265A1 (ja) * | 2016-12-15 | 2019-10-24 | 株式会社堀場製作所 | 放射線検出装置 |
EP3540417A4 (en) * | 2016-12-15 | 2020-08-19 | Horiba, Ltd. | RADIATION DETECTION DEVICE |
US10823688B2 (en) | 2016-12-15 | 2020-11-03 | Horiba, Ltd. | Radiation detection device |
CN107589130A (zh) * | 2017-09-05 | 2018-01-16 | 成都理工大学 | 海底原位x荧光测量影响监管方法及装置 |
CN107589130B (zh) * | 2017-09-05 | 2020-05-29 | 成都理工大学 | 海底原位x荧光测量影响监管方法及装置 |
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